Books on the topic 'PECVD'

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1

Geiser, Juergen. Simulation of deposition processes with PECVD apparatus. Hauppauge, N.Y: Nova Science Publishers, 2011.

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2

Ekinci, Yasin. Fabrication and characterisation of PECVD nanocrystalline silicon thin films. Leicester: De Montfort University, 2000.

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3

M, Pantic Dragan, Electrochemical Society, United States. National Aeronautics and Space Administration., and Symposium on Dielectric Films on Compound Semiconductors., eds. Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP. [Washington, D.C.]: NASA, 1990.

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4

Lamberton, R. W. A study of the microstructure and growth of ultra-thin film amorphous hydrogenated carbon (a-C:H) prepared by plasma enhanced chemical vapour deposition (PECVD). [s.l: The Author], 1998.

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5

Spósito, Ernesto, Gabriela Moirano, and Viviana Barneche. PECV. Montevideo, Uruguay: IMM, Intendencia Municipal de Montevideo, 2004.

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6

service), SpringerLink (Online, ed. Low Pressure Plasmas and Microstructuring Technology. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2009.

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7

Great Britain. Department of the Environment. Wastes Technical Division., Warren Spring Laboratory, and Aspinwall and Company, eds. Development of the national household waste analysis programme: Summary report : prepared on behalf of the Department of the Environment under Research Contract PECD 7/10/288. London: Department of the Environment, Wastes Technical Division, 1993.

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8

Chen, Junhong, Zheng Bo, and Ganhua Lu. Vertically-Oriented Graphene: PECVD Synthesis and Applications. Springer London, Limited, 2015.

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9

Chen, Junhong, Zheng Bo, and Ganhua Lu. Vertically-Oriented Graphene: PECVD Synthesis and Applications. Springer, 2015.

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10

Bo, Zheng, Chen Junhong, and Lu Ganhua. Vertically-Oriented Graphene: PECVD Synthesis and Applications. Springer, 2016.

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11

Die Kombination von Plasmanitrierung und plasmagestützter Schichtabscheidung aus der Gasphase (PACVD) in einem Verfahrensablauf. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998.

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12

Simulation of Deposition Processes with PECVD Apparatus: Theory and Applications. Nova Science Publishers, Incorporated, 2019.

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13

Johnson, Erik Verne. Hydrogenated microcrystalline silicon thin film growth in the DC saddle field PECVD system. 2006.

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14

The PERCVD Principles. Steeltown Publishing LLC, 2011.

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15

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Springer, 2010.

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16

Jackson, C. P. Flow and Transport in the Unsaturated Zone: Final Report for Contract PECD 7/9/260. AEA Technology Plc, 1986.

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17

Mapping the distribution of metal contamination in United Kingdom estuaries: Final Report on DoE contrct PECD 7/7/280. Plymouth, U.K: Plymouth Marine Laboratory, 1992.

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