Academic literature on the topic 'Oxide nitride stacks'
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Journal articles on the topic "Oxide nitride stacks"
Levin, Igor. "Nanoscale Compositional Characterization of Silicon Oxide-Nitride-Oxide Stacks." Microscopy and Microanalysis 8, S02 (August 2002): 1178–79. http://dx.doi.org/10.1017/s1431927602107768.
Full textHuang, Tiao‐Yuan, Donald J. Coleman, and James L. Paterson. "LPCVD Oxide/LPCVD Nitride Stacks for Interpoly Dielectrics." Journal of The Electrochemical Society 132, no. 6 (June 1, 1985): 1406–9. http://dx.doi.org/10.1149/1.2114133.
Full textMao, L. F., and Z. O. Wang. "Tunneling currents through lightly nitride silicon dioxide/oxide stacks." physica status solidi (a) 204, no. 3 (March 2007): 784–90. http://dx.doi.org/10.1002/pssa.200622325.
Full textIoannou-Sougleridis, V., P. Dimitrakis, V. Em Vamvakas, P. Normand, C. Bonafos, S. Schamm, N. Cherkashin, G. Ben Assayag, M. Perego, and M. Fanciulli. "Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation." Microelectronic Engineering 84, no. 9-10 (September 2007): 1986–89. http://dx.doi.org/10.1016/j.mee.2007.04.068.
Full textLevin, Igor, Mark Kovler, Yakov Roizin, Menachem Vofsi, Richard D. Leapman, Gary Goodman, Norio Kawada, and Munabu Funahashi. "Structure, Chemistry, and Electrical Performance of Silicon Oxide-Nitride-Oxide Stacks on Silicon." Journal of The Electrochemical Society 151, no. 12 (2004): G833. http://dx.doi.org/10.1149/1.1811594.
Full textIoannou-Sougleridis, V., P. Dimitrakis, V. Em Vamvakas, P. Normand, C. Bonafos, S. Schamm, N. Cherkashin, G. Ben Assayag, M. Perego, and M. Fanciulli. "Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks." Applied Physics Letters 90, no. 26 (June 25, 2007): 263513. http://dx.doi.org/10.1063/1.2752769.
Full textDrown, J. L., S. M. Merchant, M. E. Gross, D. Eaglesham, L. A. Giannuzzi, and R. B. Irwin. "Comparison of Sputtered Titanium Nitride on Silicon Dioxide and Aluminum-Alloy Thin Films." Microscopy and Microanalysis 3, S2 (August 1997): 469–70. http://dx.doi.org/10.1017/s1431927600009235.
Full textHabermehl, S., R. D. Nasby, and M. J. Rightley. "Cycling endurance of silicon–oxide–nitride–oxide–silicon nonvolatile memory stacks prepared with nitrided SiO2/Si(100) interfaces." Applied Physics Letters 75, no. 8 (August 23, 1999): 1122–24. http://dx.doi.org/10.1063/1.124616.
Full textRosenman, G., M. Naich, Ya Roizin, and Rob van Schaijk. "Deep traps in oxide-nitride-oxide stacks fabricated from hydrogen and deuterium containing precursors." Journal of Applied Physics 99, no. 2 (January 15, 2006): 023702. http://dx.doi.org/10.1063/1.2161416.
Full textEl Amrani, A., R. Si-Kaddour, M. Maoudj, and C. Nasraoui. "SiN/SiO2 passivation stack of n-type silicon surface." Materials Science-Poland 37, no. 3 (September 1, 2019): 482–87. http://dx.doi.org/10.2478/msp-2019-0065.
Full textDissertations / Theses on the topic "Oxide nitride stacks"
Luo, Tien-ying. "Electrical and physical analysis of ultra-thin in-situ steam generated (ISSG) SiO₂ and nitride/oxide stacks for ULSI application /." Digital version accessible at:, 2000. http://wwwlib.umi.com/cr/utexas/main.
Full textMcCann, Michelle Jane, and michelle mccann@uni-konstanz de. "Aspects of Silicon Solar Cells: Thin-Film Cells and LPCVD Silicon Nitride." The Australian National University. Faculty of Engineering and Information Technology, 2002. http://thesis.anu.edu.au./public/adt-ANU20040903.100315.
Full textMcCann, Michelle Jane. "Aspects of Silicon Solar Cells: Thin-Film Cells and LPCVD Silicon Nitride." Phd thesis, 2002. http://hdl.handle.net/1885/47800.
Full textZHU, WAN-WEN, and 朱萬文. "Study of stacked oxide/nitride/oxide (ONO) interpoly dielectric." Thesis, 1991. http://ndltd.ncl.edu.tw/handle/34020485096393122653.
Full textLee, He-lin, and 李和臨. "A Nonvolatile Two-Bits SONOS Memory with Vertical Oxide-Nitride-Oxide Stack." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/upayuw.
Full text國立中山大學
電機工程學系研究所
95
Flash memory is one sort of non-volatile memory, focus on the dates holding and capacity. Conventional non-volatile memory applies poly-crystalline for floating gate material, because the poly-crystalline (like poly-silicon) itself is the semiconductor material, will cause leakage problem, recently, Oxide-nitride-oxide multi-layer structure is under development for the place of conventional floating gate. Because it is the insulator material, can suppress leakage current, and it contains a deeper trapping energy level, and has a partial trapped carriers phenomenon to give a multi-bits memory solution. My effort is to propose a pair of ONO three layers stack, which is located close to the beneath of D/S region and a column like. Such structure can overcome miniaturization limitation of channel length, and a somewhat depth oxide can promise good isolation and separation between the trapping layer and other area, and a reliable distance of the two trapped unit can prevent interference issue. My proposal can suppose a higher devices density and a feasible and flexible solution to develop memory devices, a cost down to be more competitive, certainly bring much favor for the future improvement.
Huang, Chen-Yi, and 黃禎毅. "Effect of ONO (Oxide-Nitride-Oxide) Interpoly on Charge Loss in Stacked-Gate Flash Memory." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/70403767347558201149.
Full text國立成功大學
微電子工程研究所碩博士班
90
Recently, the Flash memory has received much attention for application to the digital cameras and notebooks as portable mass storage. Although many different Flash cell variations have been reported and introduced into the market place so far, stacked-gate flash memory is still considered as a potential candidate and mainstream for low power and high-speed Flash memory products. However, for the design of advanced flash memory devices, the reliability of data retention is a major concern. In the past, the thickness of ONO (Oxide-Nitride-Oxide) interpoly was regarded as the key issue, and it was mainly focused on thinning the nitride and thickening the top and bottom oxide. In this thesis, first we report electrical characteristics of the ONO dielectric films under both stress polarities, and characteristics of the oxide films are taken as reference. From the experimental results, conduction mechanism of asymmetric ONO dielectric is proposed in this study, which is concentrated on hole-electron recombination under positive and negative stressing. Moreover, the effect of ONO (Oxide-Nitride-Oxide) interpoly on charge loss in stacked-gate flash memory is discussed. We claim that increase of charge loss after 1000 program/erase cycles is cause by electrons trapped in the ONO interpoly. With changed operation conditions according to conduction mechanism model, we successfully reduce the number of electrons trapped in ONO interpoly, and then decrease charge loss phenomenon of the flash memory device.
HUANG, WEN-YUAN, and 黃文遠. "Dielectric reliability and transport mechanisms of the stacked oxide/nitride/oxide films grown on Si substrate." Thesis, 1986. http://ndltd.ncl.edu.tw/handle/98212231632801545296.
Full textLee, Yi-Mu. "Breakdown and reliability of CMOS devices with stacked oxide/nitride and oxynitride gate dielectrics prepared by RPECVD." 2003. http://www.lib.ncsu.edu/theses/available/etd-06082003-115317/unrestricted/etd.pdf.
Full textSu, Yuan-Hung, and 蘇元宏. "GATE LEAKAGE PARTITION MODEL FOR LOCATION OF TRAP GENERATION IN ULTRATHIN OXIDE/NITRIDE GATE STACK AND ITS IMPACT ON MOBILITY DEGRADATION." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/82987826726974556555.
Full text國立聯合大學
電子工程學系碩士班
94
Aim of this thesis is to investigate the location of trap generation between source and drain using gate leakage partition model and the impact mobility degradation on PECVD oxide/nitride (O/N) gate stack. We provide a mathematical model to correlate the distortion of gate leakage with the degradation of drain current and the position of trap generation between source-drain terminal. Experimental evidence shows that most of traps are generated near the source in early stage of stress, but near the drain after 1000 sec stress with much larger amount of traps. In addition, it is found that more traps are generated in the O/N gate stack than that in thermal gate oxide before 1000 sec. We also demonstrate that interface nitridation enhances the Si/SiO2 interface and retards the stress-induced trap generation during constant voltage stress (CVS). Furthermore, we consider the gate-drain leakage to extract the effective mobility. Results suggest this leakage partition model is not valid when the leakage current density is above 2A/cm2.
Huang, Chien-Lin, and 黃建霖. "Effects of Aluminum Oxide and Silicon Nitride Stacked Films on Photovoltaic Characteristics of Passivated Emitter and Rear Contact Silicon Solar Cells." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/7cd7jh.
Full text國立虎尾科技大學
光電工程系光電與材料科技碩士班
105
In this study, the effects of aluminum oxide and silicon nitride stacked films on photovoltaic characteristics of passivated emitter and rear contact silicon solar cells were investigated. In general, the backside electrode of the screen-printed moncrystalline silicon solar cells was formed by screen-printed aluminum paste. However, the recombination rate of aluminum paste/p-type silicon interface is not good. Thus, the aluminum oxide (Al2O3) formed by atomic layer deposition (ALD) and metal organic chemical-vapor-deposition (MOCVD) as well as silicon nitride (SiNx) passivation layer formed by plasma enhanced chemical-vapor-deposition (PECVD) were investigated. By tuning the thickness and the composition of both Al2O3 and SiNx, the high quality stacked passivation layers were addressed. Moreover, the contact process of the Al2O3/SiNx stacked passivation layer were achieved by laser and wet chemical etching technique. The Nd:YAG laser with the wavelength of 1064 nm and the KOH solution for laser damage removal were presented for contact process. Regarding to the wet chemical etching technique, screen-printed polymer paste and the BOE etching solution were used for contact process. The results indicate that the Al2O3 thin film with interface trap charge of 2.061010 cm-2ev-1 deposited by ALD was better than that of MOCVD with interface trap charge of 1.741011 cm-2ev-1. The various thicknesses of silicon nitride ranged from 140 to 300 nm and aluminum oxide ranged from 10 to 30 nm were investigated. The results show that the better conversion efficiency (CE) was presented by combined the SiNx thickness of 180 nm with the Al2O3 thickness of 20 nm. Moreover, the composition effects of the SiNx were investigated by tuning SiH4/(SiH4+NH3) ratio. The results indicate that a good CE was achieved by the SiH4/(SiH4+NH3) at 0.45. Furthermore, the composition effects of the Al2O3 were investigated by tuning exposure time of trimethyl aluminum (TMA) and H2O. The results show that a good CE was demonstrated by the TMA with 0.04 s and H2O with 0.5 s exposure time. Finally, a good contact process was demonstrated by the laser with 1 W. According to the best parameters, a CE of 17.4 % with an open-circuit voltage (Voc) of 627 mV, and a short-circuit current density (Jsc) of 34.2 mA/cm2 were demonstrated in this work.
Books on the topic "Oxide nitride stacks"
Kirchman, David L. The nitrogen cycle. Oxford University Press, 2018. http://dx.doi.org/10.1093/oso/9780198789406.003.0012.
Full textBook chapters on the topic "Oxide nitride stacks"
Albertos, Pablo, Luis Sanz, Isabel Mateos, Inmaculada Sánchez-Vicente, Tamara Lechón, Guadalupe Fernández-Espinosa, Dolores Rodríguez, and Oscar Lorenzo. "Gasotransmission of Nitric Oxide (NO) at Early Plant Developmental Stages." In Gasotransmitters in Plants, 95–116. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-40713-5_5.
Full textAhmad, Faraz S., and Clyde W. Yancy. "HFrEF pharmacological treatment: hydralazine and isosorbide dinitrate." In ESC CardioMed, 1872–77. Oxford University Press, 2018. http://dx.doi.org/10.1093/med/9780198784906.003.0429.
Full textCespuglio, Raymond, and Sophie Burlet. "Voltammetric Detection of Nitric Oxide (NO) in the Rat Brain." In Molecular Regulation of Arousal States. CRC Press, 1997. http://dx.doi.org/10.1201/9780849333613.ch3.
Full textCespuglio, Raymond, and Sophie Burlet. "Voltammetric Detection of Nitric Oxide (NO) in the Rat Brain." In Molecular Regulation of Arousal States. CRC Press, 1997. http://dx.doi.org/10.1201/9781420048940.ch3.
Full textKresin, Vladimir Z., Sergei G. Ovchinnikov, and Stuart A. Wolf. "Materials (II)." In Superconducting State, 309–62. Oxford University Press, 2021. http://dx.doi.org/10.1093/oso/9780198845331.003.0007.
Full textWu, Jia-Ping. "Swimming Exercise-Induced Improvements in Cardiorespiratory Fitness (CRF) are Caused by Nitric Oxide Functional Adaptations in the Oxygen Transport System." In Cardiorespiratory Fitness - New Topics [Working Title]. IntechOpen, 2022. http://dx.doi.org/10.5772/intechopen.109306.
Full textBurlet, Sophie, and Raymond Cespuglio. "Voltammetric Detection of Nitric Oxide (NO) in the Rat Brain: Release Throughout the Sleep–Wake Cycle." In Molecular Regulation of Arousal States, 23–32. CRC Press, 2019. http://dx.doi.org/10.1201/9780429186844-3.
Full textWilliams, Julie, Peter Reiner, and Steven Vincent. "Measurement of Nitric Oxide in the Brain Using the Hemoglobin Trapping Technique Coupled with In Vivo Microdialysis." In Molecular Regulation of Arousal States. CRC Press, 1997. http://dx.doi.org/10.1201/9780849333613.ch17.
Full textWilliams, Julie, Peter Reiner, and Steven Vincent. "Measurement of Nitric Oxide in the Brain Using the Hemoglobin Trapping Technique Coupled with In Vivo Microdialysis." In Molecular Regulation of Arousal States. CRC Press, 1997. http://dx.doi.org/10.1201/9781420048940.ch17.
Full textWilliams, Julie A., Steven R. Vincent, and Peter B. Reiner. "Measurement of Nitric Oxide in the Brain Using the Hemoglobin Trapping Technique Coupled with In Vivo Microdialysis." In Molecular Regulation of Arousal States, 201–12. CRC Press, 2019. http://dx.doi.org/10.1201/9780429186844-17.
Full textConference papers on the topic "Oxide nitride stacks"
Ziyuan Liu, Tomoya Saito, Tomoko Matsuda, Koichi Ando, Shu Ito, Markus Wilde, and Katsuyuki Fukutani. "Hydrogen distribution in oxide-nitride-oxide stacks and correlation with data retention of MONOS memories." In 2008 IEEE International Reliability Physics Symposium (IRPS). IEEE, 2008. http://dx.doi.org/10.1109/relphy.2008.4558998.
Full textMorris, Stephen J. "Multi-Technology Measurements of Nitrided Oxide and High-K Gate Stacks." In CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005. AIP, 2005. http://dx.doi.org/10.1063/1.2062949.
Full textLee, Da-Yuan, Horng-Chih Lin, Wan-Ju Chiang, Chi-Chun Chen, Chi-Yuan Lin, Tiao-Yuan Huang, Tahui Wang, and Mong-Song Liang. "Negative-Bias-Temperature Instability in Ultra Thin Nitride/Oxide Stack Gate Dielectric." In 2002 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2002. http://dx.doi.org/10.7567/ssdm.2002.b-5-3.
Full textWang, Hai-Hong, L. K. Han, Jason Yan, and Dim-Lee Kwong. "Oxide/nitride stacked layers prepared by in situ rapid-thermal multiprocessing." In Microelectronic Manufacturing '95, edited by Ih-Chin Chen, Girish A. Dixit, Trung T. Doan, and Nobuo Sasaki. SPIE, 1995. http://dx.doi.org/10.1117/12.221133.
Full textSorokina, Elena Gennad’evna, Zhanna B. Semenova, Oksana V. Globa, Olga V. Karaseva, Valentin P. Reutov, Galina A. Ignatieva, Sofya A. Afanasieva, et al. "AUTOIMMUNE RESPONSE OF GLUTAMATE RECEPTORS AND NITRIC OXIDE IN EPILEPSY AND TRAUMATIC BRAIN INJURY." In International conference New technologies in medicine, biology, pharmacology and ecology (NT +M&Ec ' 2020). Institute of information technology, 2020. http://dx.doi.org/10.47501/978-5-6044060-0-7.23.
Full textLin, C. C., S. Y. Chen, J. Wang, and C. L. Hsieh. "Highly accurate TEM/EDS analysis to identify the stack oxide-nitride-oxide structure of advanced NAND flash products." In 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). IEEE, 2015. http://dx.doi.org/10.1109/ipfa.2015.7224365.
Full textSengupta, Amretashis, and Chandan Kumar Sarkar. "Comparative study on nanocrystal embedded gate dielectric and oxide nitride oxide stack dielectric GAA MOSFET non-volatile memory devices." In 2012 International Conference on Informatics, Electronics & Vision (ICIEV). IEEE, 2012. http://dx.doi.org/10.1109/iciev.2012.6317402.
Full textLin, W. H., K. L. Pey, Z. Dong, S. Y. M. Chooi, M. S. Zhou, T. C. Ang, C. H. Ang, and W. S. Lau. "Ultrathin Nitride/Oxide Stack Gate Dielectric (14.9Å to 20.3Å) for Sub-0.13 μm CMOS and Beyond." In 2001 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2001. http://dx.doi.org/10.7567/ssdm.2001.a-3-3.
Full textUsov, Eduard, Nikolay Pribaturin, Vladimir Chukhno, Ilya Klimonov, Anton Butov, Ivan Kudashov, Albert Gafiyatullin, and Pavel Lobanov. "Development of Approaches to Simulate Fuel Rod Destruction With Different Fuel Type." In 2020 International Conference on Nuclear Engineering collocated with the ASME 2020 Power Conference. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/icone2020-16326.
Full textKoutsenko, I. G., S. F. Onegin, and A. M. Sipatov. "Application of CFD-Based Analysis Technique for Design and Optimization of Gas Turbine Combustors." In ASME Turbo Expo 2004: Power for Land, Sea, and Air. ASMEDC, 2004. http://dx.doi.org/10.1115/gt2004-53398.
Full textReports on the topic "Oxide nitride stacks"
Schwartz, Bertha, Vaclav Vetvicka, Ofer Danai, and Yitzhak Hadar. Increasing the value of mushrooms as functional foods: induction of alpha and beta glucan content via novel cultivation methods. United States Department of Agriculture, January 2015. http://dx.doi.org/10.32747/2015.7600033.bard.
Full textMECHANISTIC STUDIES AND DESIGN OF HIGHLY ACTIVE CUPRATE CATALYSTS FOR THE DIRECT DECOMPOSITION AND SELECTIVE REDUCTION OF NITRIC OXIDE AND HYDROCARBONS TO NITROGEN FOR ABATEMENT OF STACK EMISSIONS. Office of Scientific and Technical Information (OSTI), April 1998. http://dx.doi.org/10.2172/9059.
Full text