Journal articles on the topic 'Near-field scanning optical lithography'
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Wegscheider, S., A. Kirsch, J. Mlynek, and G. Krausch. "Scanning near-field optical lithography." Thin Solid Films 264, no. 2 (August 1995): 264–67. http://dx.doi.org/10.1016/0040-6090(95)05818-4.
Full textCredgington, Daniel, Oliver Fenwick, Ana Charas, Jorge Morgado, Klaus Suhling, and Franco Cacialli. "High-Resolution Scanning Near-Field Optical Lithography of Conjugated Polymers." Advanced Functional Materials 20, no. 17 (July 6, 2010): 2842–47. http://dx.doi.org/10.1002/adfm.201000202.
Full textSun, Shuqing, Karen S. L. Chong, and Graham J. Leggett. "Nanoscale Molecular Patterns Fabricated by Using Scanning Near-Field Optical Lithography." Journal of the American Chemical Society 124, no. 11 (March 2002): 2414–15. http://dx.doi.org/10.1021/ja017673h.
Full textTseng, Ampere A. "Recent developments in nanofabrication using scanning near-field optical microscope lithography." Optics & Laser Technology 39, no. 3 (April 2007): 514–26. http://dx.doi.org/10.1016/j.optlastec.2005.11.002.
Full textCotton, Daniel V., Christopher J. Fell, and Paul C. Dastoor. "Fabricating semi-conducting polymer photonic structures via near-field scanning optical lithography." Synthetic Metals 159, no. 5-6 (March 2009): 456–61. http://dx.doi.org/10.1016/j.synthmet.2008.11.007.
Full textMicek, Patrik, Dusan Pudis, Peter Gaso, Jana Durisova, and Daniel Jandura. "Microring Zone Structure for Near-Field Probes." Coatings 11, no. 11 (November 5, 2021): 1363. http://dx.doi.org/10.3390/coatings11111363.
Full textFalcón Casas, Ignacio, and Wolfgang Kautek. "Subwavelength Nanostructuring of Gold Films by Apertureless Scanning Probe Lithography Assisted by a Femtosecond Fiber Laser Oscillator." Nanomaterials 8, no. 7 (July 16, 2018): 536. http://dx.doi.org/10.3390/nano8070536.
Full textLin, Y., M. H. Hong, W. J. Wang, Y. Z. Law, and T. C. Chong. "Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser." Applied Physics A 80, no. 3 (February 2005): 461–65. http://dx.doi.org/10.1007/s00339-004-3093-0.
Full textSmolyaninov, Igor I. "Scanning Probe Microscopy of Surface Plasmons." International Journal of Modern Physics B 11, no. 21 (August 20, 1997): 2465–510. http://dx.doi.org/10.1142/s021797929700126x.
Full textCotton, Daniel V., Christopher J. Fell, Warwick J. Belcher, and Paul C. Dastoor. "The origin of fine structure in near-field scanning optical lithography of an electroactive polymer." Journal of Physics D: Applied Physics 41, no. 19 (September 19, 2008): 195107. http://dx.doi.org/10.1088/0022-3727/41/19/195107.
Full textRoszkiewicz, Agata, Amrita Jain, Marian Teodorczyk, and Wojciech Nasalski. "Formation and Characterization of Hole Nanopattern on Photoresist Layer by Scanning Near-Field Optical Microscope." Nanomaterials 9, no. 10 (October 12, 2019): 1452. http://dx.doi.org/10.3390/nano9101452.
Full textFoglietti, V., E. Cianci, and G. Giannini. "Progress toward the fabrication of scanning near field optical probe: pattern definition by e-beam lithography." Microelectronic Engineering 57-58 (September 2001): 807–11. http://dx.doi.org/10.1016/s0167-9317(01)00483-x.
Full textBacker, Scott A., Itai Suez, Zachary M. Fresco, Jean M. J. Fréchet, Josh A. Conway, Shantha Vedantam, Hyojune Lee, and Eli Yablonovitch. "Evaluation of new materials for plasmonic imaging lithography at 476 nm using near field scanning optical microscopy." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 25, no. 4 (2007): 1336. http://dx.doi.org/10.1116/1.2757184.
Full textCredgington, Daniel, Oliver Fenwick, Ana Charas, Jorge Morgado, Klaus Suhling, and Franco Cacialli. "Conjugated Polymers: High-Resolution Scanning Near-Field Optical Lithography of Conjugated Polymers (Adv. Funct. Mater. 17/2010)." Advanced Functional Materials 20, no. 17 (September 8, 2010): n/a. http://dx.doi.org/10.1002/adfm.201090074.
Full textArena, A., F. Bonsignore, S. Patanè, and G. Saitta. "Optical Properties of Laser-dye-doped Polyvinylcarbazole Films Coated with Polycarbonate." Journal of Materials Research 17, no. 6 (June 2002): 1490–94. http://dx.doi.org/10.1557/jmr.2002.0221.
Full textDing, Li, Jin Qin, Yang Chen, and Liang Wang. "Numerical and experimental study of near-field scanning optical lithography using nanoscale bowtie apertures with ultrasmall gap size." Journal of Micro/Nanolithography, MEMS, and MOEMS 15, no. 3 (September 29, 2016): 031611. http://dx.doi.org/10.1117/1.jmm.15.3.031611.
Full textCotton, Daniel V., Christopher J. Fell, Warwick J. Belcher, and Paul C. Dastoor. "Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling." Journal of Physics D: Applied Physics 48, no. 32 (July 10, 2015): 325101. http://dx.doi.org/10.1088/0022-3727/48/32/325101.
Full textInglis, William, Martyn C. Davies, Clive J. Roberts, Saul J. B. Tendler, and Philip M. Williams. "Micro-Patterning of Polymers for High Resolution Microscopy Analysis." Microscopy and Microanalysis 7, S2 (August 2001): 128–29. http://dx.doi.org/10.1017/s1431927600026714.
Full textMadsen, S., S. I. Bozhevolnyi, K. Birkelund, M. Müllenborn, J. M. Hvam, and F. Grey. "Oxidation of hydrogen-passivated silicon surfaces by scanning near-field optical lithography using uncoated and aluminum-coated fiber probes." Journal of Applied Physics 82, no. 1 (July 1997): 49–53. http://dx.doi.org/10.1063/1.365847.
Full textKwon, S. J., Y. M. Jeong, and S. H. Jeong. "Fabrication of high-aspect-ratio silicon nanostructures using near-field scanning optical lithography and silicon anisotropic wet-etching process." Applied Physics A 86, no. 1 (October 27, 2006): 11–18. http://dx.doi.org/10.1007/s00339-006-3744-4.
Full textLin, Zhenyuan, and Minghui Hong. "Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale." Ultrafast Science 2021 (December 1, 2021): 1–22. http://dx.doi.org/10.34133/2021/9783514.
Full textBraun, Kai, Florian Laible, Otto Hauler, Xiao Wang, Anlian Pan, Monika Fleischer, and Alfred J. Meixner. "Active optical antennas driven by inelastic electron tunneling." Nanophotonics 7, no. 9 (September 7, 2018): 1503–16. http://dx.doi.org/10.1515/nanoph-2018-0080.
Full textOnuki, Teppei, Takashi Tokizaki, Hirotaka Ojima, Jun Shimizu, and Li Bo Zhou. "Improvement in Oxide-Pattern Sizes Controllability on Scanning Probe Nanolithography." Advanced Materials Research 126-128 (August 2010): 701–6. http://dx.doi.org/10.4028/www.scientific.net/amr.126-128.701.
Full textShamsuddin, Liyana, Khairudin Mohamed, and Alsadat Rad Maryam. "The Investigation of Microstructures Fabrication on Quartz Substrate Employing Electron Beam Lithography (EBL) and ICP-RIE Process." Advanced Materials Research 980 (June 2014): 69–73. http://dx.doi.org/10.4028/www.scientific.net/amr.980.69.
Full textKerth, R. T., K. Jain, and M. R. Latta. "Excimer laser projection lithography on a full-field scanning projection system." IEEE Electron Device Letters 7, no. 5 (May 1986): 299–301. http://dx.doi.org/10.1109/edl.1986.26380.
Full textHolz, Mathias, Elshad Guliyev, Ahmad Ahmad, Tzvetan Ivanov, Alexander Reum, Martin Hofmann, Claudia Lenk, et al. "Field-emission scanning probe lithography tool for 150 mm wafer." Journal of Vacuum Science & Technology B 36, no. 6 (November 2018): 06JL06. http://dx.doi.org/10.1116/1.5048357.
Full textHofmann, Martin, Stephan Mecholdt, Markus Mohr, Mathias Holz, Stefano Dallorto, Eberhard Manske, Hans-Jörg Fecht, and Ivo W. Rangelow. "Nanoscale lift-off process using field emission scanning probe lithography." Journal of Vacuum Science & Technology B 37, no. 6 (November 2019): 061803. http://dx.doi.org/10.1116/1.5122272.
Full textLi, Juan, Hu Yang, Yong Qiang Zhao, and Chao Rong Li. "Artificially Induced Defects in Photonic Crystals and their Optical Properties." Advanced Materials Research 800 (September 2013): 298–301. http://dx.doi.org/10.4028/www.scientific.net/amr.800.298.
Full textLu Sen, 鲁森, 杨开明 Yang Kaiming, 朱煜 Zhu Yu, 王磊杰 Wang Leijie, and 张鸣 Zhang Ming. "Design and Analysis of Scanning Beam Interference Lithography Optical System Based on Far-Field Interference." Acta Optica Sinica 38, no. 6 (2018): 0605001. http://dx.doi.org/10.3788/aos201838.0605001.
Full textUlrich, Georg, Emanuel Pfitzner, Arne Hoehl, Jung-Wei Liao, Olga Zadvorna, Guillaume Schweicher, Henning Sirringhaus, et al. "Thermoelectric nanospectroscopy for the imaging of molecular fingerprints." Nanophotonics 9, no. 14 (August 21, 2020): 4347–54. http://dx.doi.org/10.1515/nanoph-2020-0316.
Full textBehzadirad, Mahmoud, Ashwin K. Rishinaramangalam, Daniel Feezell, Tito Busani, Christoph Reuter, Alexander Reum, Mathias Holz, et al. "Field emission scanning probe lithography with GaN nanowires on active cantilevers." Journal of Vacuum Science & Technology B 38, no. 3 (May 2020): 032806. http://dx.doi.org/10.1116/1.5137901.
Full textKotlyar, V. V., S. S. Stafeev, L. O'Faolain, and M. V. Kotlyar. "High numerical aperture metalens to generate an energy backflow." Computer Optics 44, no. 5 (October 2020): 691–98. http://dx.doi.org/10.18287/2412-6179-co-742.
Full textMohiddon, Md Ahamad, L. D. Varma Sangani, and M. Ghanashyam Krishna. "Scanning near field optical microscopy of gold nano-disc arrays fabricated by electron beam lithography and their application as surface enhanced Raman scattering substrates." Chemical Physics Letters 588 (November 2013): 160–66. http://dx.doi.org/10.1016/j.cplett.2013.10.008.
Full textMamyrbayev, Talgat, Alexander Opolka, Alexey Ershov, Josephine Gutekunst, Pascal Meyer, Katsumasa Ikematsu, Atsushi Momose, and Arndt Last. "Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy." Applied Sciences 10, no. 12 (June 16, 2020): 4132. http://dx.doi.org/10.3390/app10124132.
Full textFang, Wei, Jian Lei, Pengda Zhang, Fei Qin, Meiling Jiang, Xufeng Zhu, Dejiao Hu, Yaoyu Cao, and Xiangping Li. "Multilevel phase supercritical lens fabricated by synergistic optical lithography." Nanophotonics 9, no. 6 (April 18, 2020): 1469–77. http://dx.doi.org/10.1515/nanoph-2020-0064.
Full textLenk, Claudia, Martin Hofmann, Tzvetan Ivanov, Ahmad Ahmad, Steve Lenk, Ivo W. Rangelow, Alexander Reum, et al. "Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography." Journal of Vacuum Science & Technology B 36, no. 6 (November 2018): 06JL04. http://dx.doi.org/10.1116/1.5048190.
Full textChen, Henry J. H., Tzu Nien Lee, Shin-Lun Tseng, Sun-Zen Chen, and Po-Wen Chiu. "Characterizations of Ion-Sensitive Field-Effect Transistors with Silicon Wire Array Channels and Stack-Sensing Membrane." Journal of The Electrochemical Society 169, no. 3 (March 1, 2022): 037511. http://dx.doi.org/10.1149/1945-7111/ac5ad9.
Full textLenk, Claudia, Yana Krivoshapkina, Martin Hofmann, Steve Lenk, Tzvetan Ivanov, Ivo W. Rangelow, Ahmad Ahmad, et al. "High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology." Journal of Vacuum Science & Technology B 37, no. 2 (March 2019): 021603. http://dx.doi.org/10.1116/1.5067269.
Full textSaekow, B., S. Porntheeraphat, Sakon Rahong, S. Jaruvanawat, and J. Nukeaw. "High Refractive Index Dielectric Prepared by Electron Beam Evaporation for Photonic Crystal Optical Biosensor Application." Advanced Materials Research 93-94 (January 2010): 545–48. http://dx.doi.org/10.4028/www.scientific.net/amr.93-94.545.
Full textKasahara, Haruo, Tsutomu Shishido, Norihiko Samoto, and Nobuo Shimazu. "Performances by the electron optical system of low energy electron beam proximity projection lithography tool with a large scanning field." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 23, no. 6 (2005): 2754. http://dx.doi.org/10.1116/1.2062435.
Full textSrisuai, N., Mati Horprathum, P. Eiamchai, P. Chindaudom, S. Boonruang, and Somyod Denchitcharoen. "Development of Nanohole Array Patterned by Laser Interference Lithography Technique." Key Engineering Materials 675-676 (January 2016): 41–44. http://dx.doi.org/10.4028/www.scientific.net/kem.675-676.41.
Full textHoe, Zheng-Yu, Chun-Chieh Chang, Jia-Jin Jason Chen, Chung-Kun Yen, Shao-Yu Wang, Yu-Hsuan Kao, Wei-Ming Li, Wen-Fan Chen, and Cheng-Tang Pan. "Enhancement of PVDF Sensing Characteristics by Retooling the Near-Field Direct-Write Electrospinning System." Sensors 20, no. 17 (August 28, 2020): 4873. http://dx.doi.org/10.3390/s20174873.
Full textZhang, Yang, Shulin Gu, Kun Tang, Jiandong Ye, Haixiong Ge, Zhengrong Yao, Shunming Zhu, and Youdou Zheng. "Fabrication and Characterization of Highly Oriented N-Doped ZnO Nanorods by Selective Area Epitaxy." Journal of Nanomaterials 2015 (2015): 1–9. http://dx.doi.org/10.1155/2015/854074.
Full textIshak, N. S., N. Zainal, F. C. Seman, and S. M. Shah. "Fabrication and characterisation of Frequency Selective Surface (FSS) for Terahertz Sensing Application." Journal of Physics: Conference Series 2250, no. 1 (April 1, 2022): 012010. http://dx.doi.org/10.1088/1742-6596/2250/1/012010.
Full textVolkova, Kseniia, Julia Heupel, Sergei Trofimov, Fridtjof Betz, Rémi Colom, Rowan W. MacQueen, Sapida Akhundzada, et al. "Optical and Spin Properties of NV Center Ensembles in Diamond Nano-Pillars." Nanomaterials 12, no. 9 (April 29, 2022): 1516. http://dx.doi.org/10.3390/nano12091516.
Full textStevanović, Magdalena M., Nenad Filipović, Maja Kuzmanović, Nina Tomić, Dušan Ušjak, Marina Milenković, Kai Zheng, Juergen Stampfl, and Aldo R. Boccaccini. "Synthesis and characterization of a collagen-based composite material containing selenium nanoparticles." Journal of Biomaterials Applications 36, no. 10 (February 27, 2022): 1800–1811. http://dx.doi.org/10.1177/08853282211073731.
Full textGupta, Ankur, Poonam Sundriyal, Aviru Basu, Kapil Manoharan, Rishi Kant, and Shantanu Bhattacharya. "Nano-finishing of MEMS-based platforms for optimum optical sensing." Journal of Micromanufacturing 3, no. 1 (November 13, 2019): 39–53. http://dx.doi.org/10.1177/2516598419862676.
Full textCHAKRABORTY, PURUSHOTTAM. "LAYERED SYNTHETIC MICROSTRUCTURES AS OPTICAL ELEMENTS FOR THE EXTREME ULTRAVIOLET AND SOFT X-RAYS." International Journal of Modern Physics B 05, no. 13 (August 10, 1991): 2133–228. http://dx.doi.org/10.1142/s0217979291000845.
Full textNidhi, Tashi Nautiyal, and Samaresh Das. "Large-Scale Synthesis of Nickel Sulfide for Electronic Device Applications." MRS Advances 5, no. 52-53 (2020): 2727–35. http://dx.doi.org/10.1557/adv.2020.339.
Full textChen, Y., F. Carcenac, C. Ecoffet, D. J. Lougnot, and H. Launois. "Mold-assisted near-field optical lithography." Microelectronic Engineering 46, no. 1-4 (May 1999): 69–72. http://dx.doi.org/10.1016/s0167-9317(99)00017-9.
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