Dissertations / Theses on the topic 'Monolithic sensor'

El Gran Colisionador de Hadrones (LHC) tiene previsto aumentar su luminosidad hasta siete veces su valor actual con el objetivo de ampliar su actual programa de física. Esta mejora se conoce con el nombre de High Luminosity LHC (HL-LHC) y está prevista para el año 2024-2026. El actual Inner Detector (ID) del detector de ALTAS será completamente reemplazado por uno nuevo para ajustarse a los rigurosos requisitos que impone el HL-LHC. Nuevos detectores de píxeles están siendo investigados para su utilización en todo el ID cuando el HL-LHC entre en operación. La utilización de sensores de píxeles tipo monolítico dentro del ID de ATLAS supondría una nueva era para los detectores de píxeles en física de altas energías debido a sus muchas ventajas con respecto a las tecnologías que se usan actualmente. Las principales ventajas son: mejor resolución espacial, menor densidad, mayor rendimiento, y menor coste. En este contexto, un nuevo tipo de sensor monolítico conocido como Depleted Monolithic Active Pixel Sensor on silicon-on-insulator ha sido investigado en esta tesis. El capítulo 1 describe el LHC, el experimento ATLAS, y las mejoras previstas para el HL-LHC. Este capítulo también describe los requerimientos y desafíos del futuro Inner Detector, al ser el subdetector más cercano al punto de interacción. El capítulo 2 describe la base de los detectores de partículas en física de altas energías. Este capítulo abarca la interacción de partículas con la materia, los conceptos básicos para la construcción de un detector de píxeles, y la resolución de momento transverso, vértice, y parámetro de impacto de un detector. El capítulo 3 describe los daños que la radiación produce en detectores de silicio, tanto en la electrónica como en el sensor, cuyo impacto es crucial en el rendimiento de los detectores especialmente para experimentos en el HL-LHC. El capítulo 4 revisa la evolución y tendencias en detectores de pixeles, abarcando desde los ya bien establecidos pixel híbridos, hasta los CMOS píxeles. La sección dedicada a los CMOS píxeles describe los diferentes tipos que se están considerando en ATLAS: High resistivity CMOS, high voltage CMOS, y monolíticos CMOS-on-SOI. Este ultimo compone el núcleo de estudio de esta tesis y es descrito en detalle. Los siguientes capítulos detallan el programa de caracterización y medidas realizado en el contexto de esta tesis. El capitulo 5 se centra en la caracterización del daño creado por la radiación en la electrónica hasta las dosis esperadas en el ID de ATLAS durante su operación en el HL-LHC. Las propiedades del detector, como son las corrientes de fuga, el cociente entre señal y ruido, la colección de carga y la profundidad de depleción, son descritas en el capitulo 6. El Capítulo 7 describe la caracterización de sensores monolíticos CMOS-on-SOI en un haz de piones, donde la colección de carga, el reparto de carga entre píxeles, la resolución espacial, y la eficiencia son discutidas. Este trabajo concluye con un resumen, con vistas al futuro de las tecnologías monolíticas CMOS-on-SOI en la física de altas energías.
A major upgrade of the Large Hadron Collider (LHC) called High Luminosity LHC (HL-LHC) is scheduled for 2024-2026. This will lead to an increase of the luminosity by seven times the current value and to the extension of the currently ongoing physics programme. A completely new Inner Detector for the ATLAS experiment needs to be developed to withstand the extremely harsh environment at the HL-LHC. New pixel detector concepts are being investigated as a possible candidate to the inner and outer layers of the HL-LHC ATLAS Inner Detector. The use of monolithic pixel sensors in the ATLAS Inner Tracker would lead to a new era of pixel detectors as a consequence of its many advantages with respect to the current technologies. The achievement of smaller spatial resolution, lower density, bigger production yield and throughput, and smaller budget cost are the main arguments to pursue this technology. In this context, a novel Depleted Monolithic Pixel Active Detector built on a thick film Silicon-On-Insulator has been fully investigated in this thesis. Chapter 1 introduces LHC and the ATLAS experiment as well as their foreseen scenarios at the HL-LHC upgrade. This naturally motivates the stringent requirements and challenges of the closest sub-detector to the interaction point, the Inner Detector. Chapter 2 describes the basis of a tracking detector for high energy physics applications, detailing the interactions of particles with matter to the formation of a pixel detector from a semiconductor material. Then the momentum, vertex, and impact parameter resolution of a tracking detector are calculated leading to a set of requirements for the detector design. Chapter 3 describes the radiation damage in silicon detectors whose impact to the detector performance is crucial specially for HL-LHC experiments. The radiation damage in the electronics and in the silicon bulk is treated. Chapter 4 revises the current developments and trends on pixel detectors from the well established hybrid pixel technologies to the commercial CMOS pixels. The commercial CMOS pixels section describes the current technologies being considered at ATLAS: high resistivity, high voltage CMOS (currently built as hybrid and as monolithic), and monolithic CMOS-on-SOI. The latter one composes the core of study of this thesis and is described in great detail. The final chapters are dedicated to the description of the validation programme performed to the CMOS-on-SOI technology, together with characterization methods used, measurements performed, and results analysis description. Chapter 5 focuses on the measurements performed to characterize the radiation hardness of the technology against the ionizing radiation expected in the HL-LHC ATLAS detector. The crucial charge collection properties to fulfil the ATLAS detector requirements were measured and are described in Chapter 6. These measurements include leakage current, signal-to-noise ratio, collected charge, and depletion depth on unirradiated and irradiated samples. Additionally, different techniques as radioactive sources, pion beams, and laser beams were used in order to calculate the depletion depth. Chapter 7 describes the characterization of the monolithic CMOS-on-SOI in a pion beam test. The measured charge collection, charge sharing, spatial resolution, and tracking efficiency are discussed. Within the summary, an outlook towards the future of depleted monolithic active pixel sensors on silicon-on-insulator technology for high energy physics is presented.

The objective of this thesis was to develop applications of monolithic fiber devices and actively controlled fibers. A special twin-core fiber known as a ‘Gemini’ fiber was used to construct equal arm-length fiber interferometers, impervious to temperature and mechanical perturbations. A broadband add/drop multiplexer was constructed by inscribing fiber Bragg gratings in the arms of a Gemini Mach-Zehnder interferometer. A broadband interferometric nanosecond switch was constructed from a micro-structured Gemini fiber with incorporated metal electrodes. Additionally, a Michelson fiber interferometer was built from an asymmetric twin-core fiber and used as a high-temperature sensor. While the device could be readily used to measure temperatures below 300 °C, an annealing process was required to extend the range up to 700 °C. The work included development, construction and evaluation of the components along with numerical simulations to estimate their behaviors and to understand the underlying processes. The thesis also explored the use of electrically controlled fibers for filtering in the microwave domain. An ultra-narrow phase-shifted fiber Bragg grating inscribed in a fiber with internal electrodes was used as a scanning filter to measure modulation frequencies applied to an optical carrier. A similar grating was used inside a dual-wavelength fiber laser cavity, to generated tunable microwave beat frequencies. The studied monolithic fiber interferometers and actively controlled fibers provide excellent building blocks in such varied field as in microwave photonics, telecommunications, sensors, and high-speed switching, and will allow for further applications in the future.
Syftet med denna avhandling var att utveckla tillämpningar av monolitiska fiber komponenter samt aktivt kontrollerbara fiber. En speciell tvillingkärnefiber, även kallad ’Geminifiber’ användes för att konstruera fiber interferometrar med identisk armlängd som ej påverkas av termiska och mekaniska variationer. En bredbanding utbytarmultiplexor konstruerades genom att skriva in fiber Bragg gitter inuti grenarna på en Gemini Mach-Zehnder interferometer. Geminifibrer med interna metallelektroder användes för att konstruera en bredbandig nanosekundsnabb interferometrisk fiberomkopplare. Därtill användes en tvillingkärnefiber som en hög-temperatursensor. Även om komponenten direkt kan användas upp till 300 °C, måste den värmebehandlas för att kunna användas upp till 700 °C. Arbetet har innefattat utveckling, konstruktion och utvärdering av komponenterna parallellt med numeriska simuleringar för att analysera deras beteenden samt få insikt om de underliggande fysikaliska processerna. Avhandlingen behandlar även tillämpningar av en elektriskt styrbar fiber för att filtrera radiofrekvenser. Ett ultrasmalt fasskiftat fiber Bragg gitter skrevs in i en fiber med interna elektroder och användes som ett svepande filter för att mäta modulationsfrekvensen på en optisk bärfrekvens. Ett liknande gitter användes inuti en laserkavitet för att generera två olika våglängder samtidigt. Dessa två våglängder användes sedan för att generera en svävningsfrekvens i mikrovågsbandet. De undersökta monolitiska fiberinterferometrarna och de aktivt styrbara fibrerna erbjuder en utmärkt byggsten inom så pass skiljda områden som Mikrovågsfotonik, Telekommunikation, Sensorer samt Höghastighets-omkopplare och bör kunna användas inom många olika tillämpningar i framtiden.

QC 20130226

We have realized a Data Acquisition chain for the use and characterization of APSEL4D, a 32 x 128 Monolithic Active Pixel Sensor, developed as a prototype for frontier experiments in high energy particle physics. In particular a transition board was realized for the conversion between the chip and the FPGA voltage levels and for the signal quality enhancing. A Xilinx Spartan-3 FPGA was used for real time data processing, for the chip control and the communication with a Personal Computer through a 2.0 USB port. For this purpose a firmware code, developed in VHDL language, was written. Finally a Graphical User Interface for the online system monitoring, hit display and chip control, based on windows and widgets, was realized developing a C++ code and using Qt and Qwt dedicated libraries. APSEL4D and the full acquisition chain were characterized for the first time with the electron beam of the transmission electron microscope and with 55Fe and 90Sr radioactive sources. In addition, a beam test was performed at the T9 station of the CERN PS, where hadrons of momentum of 12 GeV/c are available. The very high time resolution of APSEL4D (up to 2.5 Mfps, but used at 6 kfps) was fundamental in realizing a single electron Young experiment using nanometric double slits obtained by a FIB technique. On high statistical samples, it was possible to observe the interference and diffractions of single isolated electrons traveling inside a transmission electron microscope. For the first time, the information on the distribution of the arrival time of the single electrons has been extracted.

We have realized a Data Acquisition chain for the use and characterization of APSEL4D, a 32 x 128 Monolithic Active Pixel Sensor, developed as a prototype for frontier experiments in high energy particle physics. In particular a transition board was realized for the conversion between the chip and the FPGA voltage levels and for the signal quality enhancing. A Xilinx Spartan-3 FPGA was used for real time data processing, for the chip control and the communication with a Personal Computer through a 2.0 USB port. For this purpose a firmware code, developed in VHDL language, was written. Finally a Graphical User Interface for the online system monitoring, hit display and chip control, based on windows and widgets, was realized developing a C++ code and using Qt and Qwt dedicated libraries. APSEL4D and the full acquisition chain were characterized for the first time with the electron beam of the transmission electron microscope and with 55Fe and 90Sr radioactive sources. In addition, a beam test was performed at the T9 station of the CERN PS, where hadrons of momentum of 12 GeV/c are available. The very high time resolution of APSEL4D (up to 2.5 Mfps, but used at 6 kfps) was fundamental in realizing a single electron Young experiment using nanometric double slits obtained by a FIB technique. On high statistical samples, it was possible to observe the interference and diffractions of single isolated electrons traveling inside a transmission electron microscope. For the first time, the information on the distribution of the arrival time of the single electrons has been extracted.

ALICE (A Large Ion Collider Experiment) is dedicated to the study and characterisation of the Quark-­‐Gluon Plasma (QGP), exploiting the unique potential of ultrarelativistic heavy-­‐ion collisions at the CERN Large Hadron Collider (LHC). The increase of the LHC luminosity leading up to about 50 kHz Pb-­‐Pb interaction rate after the second long shutdown (in 2018-­‐2019) will offer the possibility to perform high precision measurements of rare probes over a wide range of momenta. These measurements are statistically limited or not even possible with the present experimental set up. For this reason, an upgrade strategy for several ALICE detectors is being pursued. In particular, it is foreseen to replace the Inner Tracking System (ITS) by a new detector which will significantly improve the tracking and vertexing capabilities of ALICE in the upgrade scenario. The new ITS will have a barrel geometry consisting of seven layers of Monolithic Active Pixel Sensors (MAPS) with high granularity, which will fulfil the material budget, readout and radiation hardness requirements for the upgrade. Intensive R&D has been carried out in the last four years on MAPS in the framework of the ALICE ITS upgrade. Various small scale sensors have been designed in the TowerJazz 0.18 um imaging sensor technology to study noise, charge collection efficiency and signal-­‐to-­‐noise ratio. This work presents the main characterization results obtained from the measurements performed on two small scale prototypes (MIMOSA-­‐32 and MIMOSA-­‐32ter) with X-­‐ray sources and beams of particles. The architecture of an innovative full scale MAPS prototype (Alice Pixel Detector, ALPIDE) is also presented that is based on an AC-­‐sensitive front end and on a hit-­‐ driven readout. The first results on the ALPIDE prototype showed that the sensor is fully functional and that it provides performance in terms of readout time, power density and noise much better than the state of the art MAPS based on the rolling shutter readout, which makes this type of sensors very attractive for employment in the new ALICE ITS.

In the first study, a new µ-HPLC column was developed using a monolithic silica gel as a column substrate for chiral separation by covalently modifying with (S, S)-Whelk-O1 chiral selector. The monolithic stationary phase was generated through a sol-gel process and prepared in situ in a 100 µm i.d. fused silica capillary tubing. The chromatographic performance was characterized in terms of retention factor, column efficiency, enantioselectivity and resolution, as well as the kinetics parameters affecting the separation. Comparison with a commercial particle packed HPLC column demonstrates a promising enantioselective resolving ability of the monolithic Whelk-O1 capillary column. The second project focuses on characterization of fluorescent sensor for zinc detection. In this work, we have examined the photophysical properties of the fluorescent probe sensor that has been developed in our laboratory for Zn2+ recognition via a photo-induced electron transfer (PET) sensing mechanism. To characterize the fundamental function of sensor, response curves have been conducted, using acetone/methanol (199:1), 1,4-dioxane, acetone, methanol and aqueous buffer as the solvent system. Similar to prior work from our group, the sensor was found to respond selectively to Zn2+ ions with fluorescence enhancement. The fluorescence properties and binding response were evaluated in the presence of water and a Lewis base, which we found to have a marked effect on the fluorescence signal. The selectivity of the sensor for Zn2+ was also observed and compared to other divalent metal such as Ca2+, Mg2+, Cu2+ and Hg2+ with the goal of learning fundamental information on the system that can aid in the development of future PET based sensors.

ALICE (A Large Ion Collider Experiment) is the heavy-ion experiment at the Large Hadron Collider (LHC) at CERN. As an important part of its upgrade plans, the ALICE experiment will schedule the installation of a new Inner Tracking System (ITS) during the Long Shutdown 2 (LS2) of the LHC. The new ITS layout will consist of seven concentric layers, ¿ 12.5 Gigapixel camera covering about 10m2 with Monolithic Active Pixel Sensors (MAPS). This choice of technology has been guided by the tight requirements on the material budget of 0.3% X/X0 per layer for the three innermost layers and backed by the significant progress in the field of MAPS in recent years. The technology initially chosen for the ITS upgrade is the TowerJazz 180 nm CMOS Technology. It offers a standard epitaxial layer of 15 - 18 µm with a resistivity between 1 and 5 k¿ cm¿1 and a gate oxide thickness below 4 nm, thus being more robust to Total Ionizing Dose (TID). The main subject of this thesis is to implement a novel digital pixel readout architecture for MAPS. This thesis aims to study this novel readout architecture as an alternative to the rolling-shutter readout. However, this must be investigated through the study of several chip readout architectures during the R&D phase. Another objective of this thesis is the study and characterization of TowerJazz, if it meets the Non-Ionizing Energy Loss (NIEL) and Single Event Effects (SEE) of the ALICE ITS upgrade program. Other goals of this thesis are: ¿ Implementation of the top-down flow for this CMOS process and the design of multiple readouts for different prototypes up to the assembly of a full-scale prototype. xvii Abstract ¿ Characterization of the radiation hardness and SEE of the chips submitted to fabrication. ¿ Characterization of full custom designs using analog simulations and the generation of digital models for the simulation chain needed for the verification process. ¿ Implementation and study of different digital readouts to meet the ITS upgrade program in integration time, pixel size and power consumption, from the conceptual idea, production and fabrication phase. Chapter 1 is a brief overview of CERN, the LHC and the detectors complex. The ALICE ITS will be explained, focusing on the ITS upgrade in terms of detector needs and design constraints. Chapter 2 explains the properties of silicon detectors and the detector material and the principles of operation for MAPS. Chapters 3 and 4 describe the ALPIDE prototypes and their readout based on MAPS; this forms the central part of this work, including the multiple families of pixel detectors fabricated in order to reach the final design for the ITS. The ALPIDE3/pALPIDE3B chip, the latest MAPS chip designed, will be explained in detail, as well focusing in the matrix digital readout. In chapter 5 the noise measurements and its characterization are presented including a brief summary of detector response to irradiation with soft X-rays, sources and particle beams.
El sub detector ITS (Inner Tracking System) del detector ALICE (A Large Ion Collider Experiment) es un detector de vértice y es el detector mas cercano al punto de interacción. Se encuentra conformado por 3 tipos de subdetectores, dos capas de pixel de silicio (Silicon Pixel Detectors), 2 capas de acumulación de silicio (Silicon Drift Detectors) y 2 capas de banda de Silicio (Silicon Strip Detectors). La función primaria del ITS es identificar y rastrear las partículas de bajo momentum transversal. El detector ITS en sus dos capas más internas están equipadas con sensores de silicio basados en píxeles híbridos. Para reemplazar esta tecnología de Píxeles, el detector ITS actual será reemplazado por un nuevo detector de una sola tecnología, ampliando su resolución espacial y mejorando el rastreo de trazas. Este nuevo detector constará de siete capas de sensores de píxeles activos monolíticos (MAPS), las cuales deberán satisfacer los requerimientos de presupuesto de materiales y ser tolerantes a mayores niveles de radiación para los nuevos escenarios de incrementos de luminosidad y mayores tasas de colisiones. Los sensores MAPS que integran el sensor de imagen y los circuitos de lectura se encuentran en la misma oblea de silicio, tienen grandes ventajas en una buena resolución de posición y un bajo presupuesto material en términos de bajo coste de producción. TowerJazz ofrece la posibilidad de una cuádruple-WELL aislando los transistores pMOS que se encuentran en la misma nWELL evitando la competencia con el electrodo de recolección, permitiendo circuitos mas complejos y compactos para ser implementados dentro de la zona activa y además posee una capa epitaxial de alta resistividad. Esta tecnología proporciona una puerta de óxido muy delgado limitando el daño superficial por la radiación haciéndolo adecuado para su uso denxiii Resúmen tro del experimento ALICE. En los últimos cuatro años se ha llevado a cabo una intensiva I+D en MAPS en el marco de la actualización del ITS de ALICE. Varios prototipos a pequeña escala se han desarrollado y probado exitosamente con rayos X, fuentes radioactivas y haces de partículas. La tolerancia a la radiación de ALICE ITS es moderada con una tolerancia de irradiación TID de 700 krad y NIEL de 1 × 1013 1 MeV neqcm¿2 , MAPS es una opción viable para la actualización del ITS. La contribución original de esta tesis es la implementación de una nueva arquitectura digital de lectura de píxeles para MAPS. Esta tesis presenta un codificador asíncrono de direcciones (arquitectura basada en la supresión de ceros transmitiendo la dirección de los píxeles excitados denominada PADRE) para la arquitectura ALPIDE, el autor también hizo una contribución significativa en el ensamblaje y veri- ficación de circuitos. PADRE es la principal investigación del autor, basada en un codificador de prioridad jerárquica de cuatro entradas y es una alternativa a la arquitectura de lectura rolling-shutter. Además de los prototipos a pequeña escala, también se han desarrollado prototipos a escala completa a las necesidades del detector ITS (15 mm y 30 mm) empleando un nuevo circuito de lectura basado en la versión personalizada del circuito PADRE. El pALPIDEfs fue el primer prototipo a escala completa y se caracterizó obteniendo un tiempo de lectura de la matriz por debajo de 4 µs y un consumo de energía en el orden de 80 mWcm¿2 . En general, los resultados obtenidos representan un avance significativo de la tecnología MAPS en cuanto al consumo de energía, velocidad de lectura, tiempo de recolección de carga y tolerancia a la radiación. El sensor pALPIDE2 ha demostrado ser una opción muy atractiva para el nuevo detector ITS, satisfaciendo los requerimientos en términos de eficiencia de detección, fake-hit rate y resolución de posición, ya que su rendimiento no puede alcanzarse mediante prototipos basados en la arquitectura de lectura tradicionales como es
El subdetector ITS (Inner Tracking System) del detector ALICE (A Large Ion Collider Experiment) és un detector de vèrtex i és el detector mes proper al punt d'interacció. Es troba conformat per 3 tipus de subdetectors, dues capes de píxel de silici (Silicon Pixel Detectors), 2 capes d'acumulació de silici (Silicon Drift Detectors) i 2 capes de banda de Silici (Silicon Strip Detectors). La funció primària del ITS és identificar i rastrejar les partícules de baix moment transversal. El detector ITS en les seues dues capes més internes estan equipades amb sensors de silici basats en píxels híbrids. Per a reemplaçar aquesta tecnologia de Píxels, el detector ITS actual serà reemplaçat per un nou detector d'una sola tecnologia, ampliant la seua resolució espacial i millorant el rastreig de traces. Aquest nou detector constarà de set capes de sensors de píxels actius monolítics (MAPS), les quals hauran de satisfer els requeriments de pressupost de materials i ser tolerants a majors nivells de radiació per als nous escenaris d'increments de lluminositat i majors taxes de col·lisions. Els sensors MAPS que integren el sensor d'imatge i els circuits de lectura es troben en la mateixa hòstia de silici, tenen grans avantatges en una bona resolució de posició i un baix pressupost material en termes de baix cost de producció. TowerJazz ofereix la possibilitat d'una quàdruple-WELL aïllant els transistors pMOS que es troben en la mateixa nWELL evitant la competència amb l'elèctrode de recol·lecció, permetent circuits mes complexos i compactes per a ser implementats dins de la zona activa i a més posseeix una capa epitaxial d'alta resistivitat. Aquesta tecnologia proporciona una porta d'òxid molt prim limitant el dany superficial per la radiació fent-ho adequat per al seu ús dins de l'- experiment ALICE. En els últims quatre anys s'ha dut a terme una intensiva R+D en MAPS en el marc de l'actualització del ITS d'ALICE. Diversos prototips a petita escala s'han desenvolupat i provat ix Resum reeixidament amb rajos X, fonts radioactives i feixos de partícules. La tolerància a la radiació d'ALICE ITS és moderada amb una tolerància d'irradiació TID de 700 krad i NIEL d'1× 1013 1MeV neqcm¿2 , MAPS és una opció viable per a l'actualització del ITS. La contribució original d'aquesta tesi és la implementació d'una nova arquitectura digital de lectura de píxels per a MAPS. Aquesta tesi presenta un codificador asíncron d'adreces (arquitectura basada en la supressió de zeros transmetent l'adreça dels píxels excitats denominada PADRE) per a l'arquitectura ALPIDE, l'autor també va fer una contribució significativa en l'assemblatge i verificació de circuits. PADRE és la principal recerca de l'autor, basada en un codificador de prioritat jeràrquica de quatre entrades i és una alternativa a l'arquitectura de lectura rolling-shutter. A més dels prototips a petita escala, també s'han desenvolupat prototips a escala completa a les necessitats del detector ITS (15 mm i 30 mm) emprant un nou circuit de lectura basat en la versió personalitzada del circuit PADRE. El pALPIDEfs va ser el primer prototip a escala completa i es va caracteritzar obtenint un temps de lectura de la matriu per sota de 4 µs i un consum d'energia en l'ordre de 80 mWcm¿2 . En general, els resultats obtinguts representen un avanç significatiu de la tecnologia MAPS quant al consum d'energia, velocitat de lectura, temps de recol·lecció de càrrega i tolerància a la radiació. El sensor pALPIDE2 ha demostrat ser una opció molt atractiva per al nou detector ITS, satisfent els requeriments en termes d'eficiència de detecció, fake-hit rate i resolució de posició, ja que el seu rendiment no pot aconseguir-se mitjançant prototips basats en l'arquitectura de lectura tradicionals com és el rolling-shutter dissenyat en la mateixa tecnologia. Per aquesta raó, la R+D en els prototips ALPIDE ha continuat amb l'objectiu d'optimitza
Marín Tobón, CA. (2017). PADRE pixel read-out architecture for Monolithic Active Pixel Sensor for the new ALICE Inner Tracking System in TowerJazz 180 nm technolog [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/86154
TESIS

Le trajectographe interne (ITk) de l'expérience ATLAS sera amélioré pour la nouvelle phase de prise de données du grand collisionneur de hadrons du CERN à haute luminosité (HL-LHC) en 2026. Le HL-LHC fonctionnera avec l’énergie nominale de collision est de 14 TeV et la luminosité instantanée maximale de 7,5 x (10)34 cm(−2) s(−1), cinq fois plus élevée qu’à présent. La luminosité accrue se traduira par des niveaux de rayonnement et des débits de données environ dix fois plus élevés. Afin de faire face aux exigences d’ATLAS en termes d’intensite du rayonnement, de vitesse de lecture et de granularité au HL-LHC, le remplacement de l’actuel ATLAS Inner Tracker (ITk) est nécessaire. Deux capteurs CMOS épuisés à grande échelle dans la technologie LF de 150 nm, appelés LF-CPIX et LF-MONOPIX, ont été développés dans le cadre de la mise à niveau ATLAS Inner Tracker (ITK) pour le LHC à haute luminosité. Le travail présenté ici montre la caractérisation de ces trois prototypes, avec des contributions concernant le développement de la configuration, le calibrage source 55 Fe et 90 Sr, les modifications du microprogramme FPGA et le développement de programmes de test. L’enquête sur la dureté du rayonnement pour l’électronique et les composants du capteur a été une préoccupation majeure. Nous montrerons les résultats concernant les caractérisations de ces prototypes dans les performances de laboratoire du CPPM, ainsi que les résultats de multiples campagnes de rayonnement conduites à l’installation de protons IRRAD de 24 GeV du CERN, afin d’étudier les effets de la perte d’énergie non ionisante (NIEL) et du Dose ionisante (TID) sur les prototypes
The Inner Tracker (ITk) system of the ATLAS experiment will be upgraded for the 2026 High Luminosity Large Hadron Collider (HL-LHC) run. The HL-LHC will operate with a center of mass energy of 14 TeV and a peak instantaneous luminosity five times higher than at present. The increased luminosity will result in roughly ten times higher radiation levels and data rates. To cope with the ATLAS requirements in terms of radiation hardness, readout speed and granularity at the HL-LHC, the replacement of the present ATLAS Inner Tracker (ITk) is needed. Two large-scale depleted CMOS sensors in the 150 nm LF-technology called LF-CPIX and LF-MONOPIX, developed in the framework of the ATLAS Inner Tracker (ITK) upgrade for High Luminosity LHC. The work presented here shows the characterization for these three prototypes, with contributions concerning the setup development, 55Fe and 90Sr source calibration, modifications of the FPGA firmware and development of test programs. A main concern was the investigation on the radiation hardness for both the electronics and the sensor parts. We will show results concerning characterizations for these prototypes in the laboratory performance at CPPM, as well as results in multiple radiation campaigns performed at the 24 GeV IRRAD proton facility at CERN, to study the effects of Non-Ionizing Energy Loss (NIEL) and Total Ionizing Dose (TID) on the prototypes

This work deals with the design of a CMOS pixel sensor prototype (called MIMOSA 31) for the outer layers of the International Linear Collider (ILC) vertex detector. CMOS pixel sensors (CPS) also called monolithic active pixel sensors (MAPS) have demonstrated attractive performance towards the requirements of the vertex detector of the future linear collider. MIMOSA 31developed at IPHC-Strasbourg is the first pixel sensor integrated with 4-bit column-level ADC for the outer layers. It is composed of a matrix of 64 rows and 48 columns. The pixel concept combines in-pixel amplification with a correlated double sampling (CDS) operation in order to reduce the temporal and fixed pattern noise (FPN). At the bottom of the pixel array, each column is terminated with an analog to digital converter (ADC). The self-triggered ADC accommodating the pixel readout in a rolling shutter mode completes the conversion by performing a multi-bit/step approximation. The ADC design was optimized for power saving at sampling frequency. Accounting the fact that in the outer layers of the ILC vertex detector, the hit density is inthe order of a few per thousand, this ADC works in two modes: active mode and inactive mode. This thesis presents the details of the prototype chip and its laboratory test results.

Orientador : Carlos Ignacio Zamitti Mammana
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica
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Resumo: Este trabalho descreve um sensor de temperatura com saída compatível com microprocessadores em uma ampla faixa de temperaturas, sem necessidade de outro componente externo. Sua saída em frequência proporcional à temperatura, pode-se obter em dois níveis de corrente ou dois níveis de tensão, permitindo sua montagem em um encapsulamento com três terminais. No Capítulo1, com o objetivo de posicionar o trabalho no universo dos sensores. o circuito integrado projetado, são apresentados três estudos. O primeiro, um estudo comparativo a respeito dos sensores monolíticosde silício, sensores inteligentese sensores compatíveiscom microprocessadores, tentando concluir algumas definições a respeito dos mesmos. Um segundo estudo mais pontual a respeito dos sensores monolíticosde temperatura. obtendo uma classificação em três tipos, de um transistor, de tipo PTATe com referência intrínseca. E um terceiro estudo, que faz uma análise comparativa dos sensores de temperatura comerciais. No Capftulo 2 é feito um estudo do comportamento térmico dos componentes usados, que constituem a base teórica do projeto do circuito integrado apresentado neste trabalho. Também são estudados alguns efeitos que inluenciam de maneira considerável neste tipo de sensores, como o efeito Seebeck e de Dissipação de Potência na pastilha. No capítulo 3 é apresentado o projeto do circuito integrado, que é o sensor de temperatura com saída em frequência mencionado no início, partindo da descriçio do processo de fabricação usado,a descrição do: circuitosaté o layout do mesmo. No capítulo 4, são apresentados os resultados experimentais e as medições feitas sobre os protótipos, com o objetivo de caracterizar o funcionamento do sensor e validar algumas considerações teóricas feitas durante o projeto do mesmo. No fina lno Capítulo 5 são analisados os resultados obtidos, como também alguma aplicação e são propostas algumas idéias e trabalhos de interesse nesta área que surgem como consequência do presente trabalho
Abstract: Not informed.
Mestrado
Mestre em Engenharia Elétrica

Monolithic Active Pixel Sensors (MAPS) are good candidates to be used in High Energy Physics (HEP) experiments for charged particle detection. In the HEP applications, MAPS chips are placed very close to the interaction point and are directly exposed to harsh environmental radiation. This thesis focuses on the study and improvement of the MAPS radiation hardness. The main radiation effects and the research progress of MAPS are studied firstly. During the study, the SRAM IP cores built in MAPS are found limiting the radiation hardness of the whole MAPS chips. Consequently, in order to improve the radiation hardness of MAPS, three radiation hard memories are designed and evaluated for the HEP experiments. In order to replace the SRAM IP cores, a radiation hard SRAM is developed on a very limited area. For smaller feature size processes, in which the single event upset (SEU) effects get significant, a radiation hard SRAM with enhanced SEU tolerance is implemented by an error detection and correction algorithm and a bit-interleaving storage. In order to obtain higher radiation tolerance and higher circuitry density, a dual-port memory with an original 2-transistor cell is developed and evaluated for future MAPS chips. Finally, the radiation hardness of the MAPS chips using new available processes is studied, and the future works are prospected.

The ALICE experiment at CERN has planned an upgrade of the Inner Tracking System (ITS), named ITS3, for the LHC Long Shutdown 3, in 2025. The cornerstone of the upgrade is a new CMOS pixel sensor built in 65 nm technology and in bent-cylindrical configuration, replacing the inner layers of the existing detector, the ITS2. The ITS3 will reach much better tracking and vertexing performance, thanks to the improved spatial resolution and the much reduced material budget with respect to the previous Inner Tracking System. The aim of this thesis is to report on the analysis of the data collected at beam tests on new ALPIDE chips (used for ITS2, based on Monolithic Active Pixel Sensor, MAPS) which have been bent in a cylindrical configuration as foreseen for the ITS3. This is the first bending proof of concept for a silicon detector. In particular, data from beam test taken in 2020 have been studied through a data analysis framework that I have personally written to accomplish this task; the complexity of the data analysis is driven by the fact that each ALPIDE chip has a total of 1024x512 pixel MAPS and by the bent geometry of the sensor. In this thesis, the promising performances obtained by studying the sensor total efficiency and spatial resolution in different experimental configurations will be presented and discussed.

La problématique entourant la mise en oeuvre, la conception et le conditionnement de micro-capteurs au sein d'une application embarquée représente un enjeu industriel majeur, consiste en un vaste ensemble de défis techniques et touche à de nombreux champs de recherche scientifiques comme d'applications commerciales. Ce mémoire de thèse compile de manière pédagogique et détaillée la conception, la réalisation et l'évaluation expérimentale d'un capteur MEMS constitué d'un simple micro-filament destiné à la mesure, mutuellement, de la température, de la pression et de l'humidité d'une ambiance gazeuse, en utilisant un même et mutuel étage de conditionnement du signal - ce qui en tant que tel constitue une méthode d'intégration particulièrement originale qui est arbitrairement référencée comme "intégration totale". Aussi, le principe physique sous jacent à ce triplet de mesurage est la diffusion par conduction de la chaleur, produite par effet Joule dans l'élément sensible, à travers l'échantillon gazeux l'environnant. Ainsi, le principe de fonctionnement consiste en ce que, la réponse transitoire d'un tel ensemble permet d'une part de mettre en évidence, simultanément et de manière diagonalisable, à une température donnée, l'influence de la pression et de l'humidité sur la conductivité thermique et la capacité calorifique du couple sonde/échantillon. D'autre part, l'élément sensible est spécifiquement prévu pour que dans les conditions initiales du régime transitoire de l'échauffement, sa résistance électrique ne soit sensible qu'à la seule température ambiante, indépendamment des deux mesurandes.

Modern vertex detectors are based on cylindrical or planar layers of silicon sensors. These detectors are used for precision measurements of tracks and vertices of particles produced in the interactions. Since the tracking layers are always few to tens of cm from the interaction point, this poses an ultimate limitation in the achievable resolution of the vertex position. A silicon-based active target detector capable to image particles produced inside the detector volume in 3D, similarly to a bubble chamber, does not exist. Ideas for a silicon active target providing continuous tracking were put forward already 40 years ago but the required technology just did not exist until recently. In my thesis, I will describe the idea for the first silicon active target based on silicon pixel sensors, called Pixel Chamber, capable to perform continuous, high resolution (order of microns) 3D tracking, including open charm and beauty particles. The aim is to create a bubble chamber-like high-granularity stack of hundreds of very thin monolithic active pixel sensors (MAPS) glued together. To do this, the ALPIDE sensor chip, designed for the ALICE experiment at the CERN LHC, will be used. R&D for prototypes developments is ongoing. The power consumption of a stack consisting of hundreds of ALPIDE is such as to bring the sensor to very high temperatures. For this reason, simulations were carried out to evaluate different cooling options. A tracking and vertexing algorithm has been specifically developed to reconstruct tracks and vertices inside Pixel Chamber. It has been tested on Monte Carlo simulations of proton-silicon interactions occurring inside the sensor. According to those simulations, it is possible to obtain a high efficiency for the reconstruction of hadronic tracks, and for the primary and secondary vertices inside the detector. The vertex resolution can be up to one order of magnitude better than state-of-the-art detectors like those of LHC experiments. The tracking algorithm has been also tested to reconstruct tracks produced in a single ALPIDE sensor exposed to electrons and hadrons beams. Results show that it is possible to obtain very good performances in long track reconstruction on a single ALPIDE.

ALICE (A Large Ion Collider Experiment) is a general-purpose, heavy-ion detector at the CERN LHC designed to study the physics of strongly interacting matter, and in particular the properties of the Quark-Gluon Plasma (QGP), using Pb-Pb collisions at unprecedented energy densities. During the first three years of operation, it has demonstrated very good capabilities for measurements at high energy Pb-Pb collisions. But there are certain measurements like high precision measurements of rare probes over a wide range of momenta, which would require high statistics and are not satisfactory or even possible with the current experimental setup. These measurements would help to achieve the long term physics goals of ALICE and would go a long way forward in understanding and characterizing the Quark Gluon Plasma (QGP). To enhance its physics capabilities, ALICE has formulated an upgrade of its detectors, motivated by an upgrade of the LHC during the LHC Long Shutdown 2 (2018-2020). The LHC upgrade features which primarily motivated the ALICE upgrade programme are, in particular, Pb-Pb collisions with a high interaction rate of up to 50 kHz corresponding to an instantaneous luminosity, L = 6 × 1027cm−2s−1 and, the installation of a narrower beam pipe. Accordingly, ALICE would require detector upgrades to cope with the upgrade scenario. These upgrades should help to improve tracking and vertexing capabilities, radiation hardness and allow readout of all interactions to accumulate enough statistics for the upgrade physics programme. The objective is to accumulate 10 nb−1 of Pb–Pb collisions, recording about 1011 interactions. Within this upgrade strategy, the Inner Tracking System (ITS) upgrade forms an important cornerstone, providing improved vertexing and readout capabilities. The new ITS will have a barrel geometry consisting of seven layers of Monolithic Active Pixel Sensors (MAPS) with high granularity which would cater to the material budget, readout and radiation hardness requirements for the upgrade. The geometry is optimized for high efficiency, both in standalone tracking and ITS-TPC combined tracking. TowerJazz 0.18 μm technology is selected for designing the pixels for ITS upgrade. This technology provides attractive features like the option to implement a deep pwell allowing the implementation of a full CMOS process in the pixel. The ongoing research and development on these pixels investigates different design strategies and would converge towards the final design of the detector by the end of 2014. Several prototypes have been designed to investigate and validate the different design strategies and the different components of the pixel detector using this technology. The work presented in this thesis can be categorized in two parts. The first part concerns the results of characterization of some of the pixel prototype circuits developed for the ITS upgrade, in particular MIMOSA32, MIMOSA32Ter and Explorer-1. The second part discusses the detector performance studies of the upgraded ITS. MIMOSA32 and MIMOSA32Ter were one of the first prototypes designed with the TowerJazz technology in the upgrade programme. The motivation was to validate the technology. This thesis includes the results of tests and characterization of pixel structures of these prototypes and qualifies the technology in terms of charge collection and radiation tolerance and the usage of the deep p-well structure. This provides a starting point for future prototypes where the deep p-well could be implemented in a full CMOS process, thus allowing in-pixel sophisticated signal processing circuits. The Explorer prototypes are developed at CERN with the main motivation towards developing a detector with low power density, lower than the maximum permissible limits for the upgrade programme. This would provide a margin to reduce the material budget of the detection layers, improving the detector performance. The Explorer prototypes are designed to study the ratio of the collected charge to the input capacitance (Q/C), in particular, its dependence on the size of the collection diode and its distance to the adjacent p-well of the input transistors. The Explorer prototypes allows the application of a back-bias voltage which has an effect on the signal collection properties. In a pixel detector, improvement of the Q/C ratio enhances the signal amplitude at the collection node of the pixel circuit which is connected to the analog frontend. This would help in optimizing the analog frontend to improve the signal to noise ratio of the detector, which has a direct consequence in minimizing the power consumption of the detector. This thesis includes the test and characterization of Explorer-1 prototype circuits with different starting materials. The results show that Q/C improves with higher back bias voltage and increased spacing between the collection electrode and the adjacent p-well. With these results, the future prototypes of Explorer could concentrate on Optimizing the size of the input transistors to study its effects on the Random Telegraph Signal noise. In parallel, optimization of the signal processing circuits would also be carried out in other prototypes. The second part of the thesis studies the performance of a baseline configuration of the upgraded detector in terms of impact parameter resolution, momentum resolution and tracking efficiency both in standalone tracking mode and ITS-TPC combined tracking. The performance is compared with the current ITS to study the improvements in the upgraded ITS. The performance is affected by the radial position and material budget of the layers and the detector intrinsic resolution. The detector specifications in this regard are still evolving specially for the Outer Barrel (the outermost four layers). The studies show the effects of variation of the specifications in terms of material budget and intrinsic resolution on the detector performance. This would help to finalize the detector specifications for an optimized detector performance. The thesis also concludes that a reduction in the beam pipe radius (lower than the baseline upgrade scenario) would not affect detector performance but may facilitate the installation of the Inner Barrel. Redundancy studies show that the presence of a dead layer can degrade the detector performance significantly. This defines a key requirement of easy and rapid accessibility to the detector in the design of the upgraded ITS. The ITS upgrade timeline foresees the finalization of the final pixel architecture in late 2014. Mass production of the final circuit is planned for 2015. The construction of the detector modules, tests, assembling and pre-commissioning will be carried out throughout 2016-2017 followed by the installation of the detector in the ALICE cavern in 2018.

Les capteurs Actifs Monolithiques CMOS rapides (MAPS) ont été étudiés au cours de ce travail dans le but d’étudier le futur détecteur de vertex du futur collisionneur linéaire ILC. Deux prototypes (MIMOSA 8 et MIMOSA 16), avec la même architecture micro-électronique, ont été développés avec deux technologies CMOS différentes et avec des épaisseurs de la couche epitaxial différentes. La taille de la matrice de pixels est 32x128: 8 colonnes de pixels en lecture directe analogique et les 24 autres colonnes sont connectées aux discriminateurs de colonne auto-zéro. La structure à Double Echantillonnage Corrélé (CDS : Correlated Double Sampling) est intégrée à l’intérieur du pixel et du discriminateur. Les pixels du type photo diode (avec tailles de diode différentes) sont utilisés. A l’aide d’une source radioactive de 55Fe, les paramètres importants du pixel, tel que Bruit Temporel, le Bruit Fixe (FPN : Fixed Pattern Noise), le rapport Signal sur Bruit (SNR : Signal-to-Noise Ratio), le facteur de conversion de charge (CVF : Charge-to-Voltage conversion Factor) et l’Efficacité de Collection de Charge (CCE), ont été étudiés en fonction de la vitesse de lecture et de la taille de la diode du pixel. L’effet de l’irradiation aux neutrons rapides a été aussi étudié. Deux campagnes de tests en faisceaux (électrons de 5 GeV et pions de 180 GeV) ont été réalisées sur MIMOSA 8. L’Efficacité de Détection et la Résolution Spatiale sont étudiées en variant le seuil du discriminateur. Pour ces deux paramètres, les influences de la taille de pixel et du niveau de SNR sur le pixel central du cluster sont aussi étudiées. Afin d’améliorer la résolution spatiale, un ADC très compact (25 µm x 1 mm) est développé sur la technologie AMS 0. 35 µm OPTO. Basée sur une architecture dite à approximation successive, des structures CDS sont aussi intégrées dans l’ADC. Les résultats préliminaires ont été obtenus. Un nouveau discriminateur de colonne auto-zéro, utilisant un latch statique, a été développé sur la même technologie. Les résultats préliminaires des tests sont également présentés
In order to develop high spatial resolution and readout speed vertex detectors for the future International Linear Collider (ILC), fast CMOS Monolithic Active Pixel Sensors (MAPS) are studied on this work. Two prototypes of MAPS, MIMOSA 8 and MIMOSA 16, based on the same micro-electronic architecture were developed in CMOS processes with different thickness of epitaxial layer. The size of pixel matrix is 32x128: 8 columns of the pixel array are readout directly with analog outputs and the other 24 columns are connected to the column level auto-zero discriminators. The Correlated Double Sampling (CDS) structures are successfully implemented inside pixel and discriminator. The photo diode type pixels with different diode sizes are used in these prototypes. With a 55Fe X ray radioactive source, the important parameters, such as Temporal Noise, Fixed Pattern Noise (FPN), Signal-to-Noise Ratio (SNR), Charge-to-Voltage conversion Factor (CVF) and Charge Collection Efficiency (CCE), are studied as function of readout speed and diode size. For MIMOSA 8, the effect of fast neutrons irradiation is also. Two beam tests campaigns were made: at DESY with a 5 GeV electrons beam and at CERN with a 180 GeV pions beam. Detection Efficiency and Spatial Resolution are studied in function of the discriminator threshold. For these two parameters, the influences of diode size and SNR of the central pixel of a cluster are also discussed. In order to improve the spatial resolution of the digital outputs, a very compact (25µmx1mm) and low consumption (300 µW) column level ADC is designed in AMS 0. 35 µm OPTO process. Based on successive approximation architecture, the auto-offset cancellation structure is integrated. A new column level auto-zero discriminator using static latch is also designed

La nanotechnologie est devenue un domaine clé de la technologie du XXIe siècle. L’important développement des approches pour la synthèse des nanoparticules (NPs) avec une composition, une taille et une forme désirées rend compte du potentiel de leur utilisation comme « blocs de construction » pour des structures de plus grande échelle. Cela permet d’envisager à la fois la fabrication de matériaux fonctionnels et de dispositifs directement à partir de colloïdes par approche ascendante et la conception de matériaux sur plusieurs échelles de grandeur. Le procédé utilise l'assemblage ou l'auto-assemblage de NPs et conduit à des matériaux avec des architectures différentes notamment 1D (bâtonnets), 2D (films) ou 3D (super-réseaux ou gels). Cependant, la plupart des assemblages 3D sont limités à l'échelle micrométrique et sont difficiles à contrôler. Pratiquement, la seule voie permettant la préparation de structures 3D macroscopiques à partir de NPs est la gélification et la préparation d'aérogels. Une voie alternative consiste à disperser les NPs dans une matrice, conduisant ainsi à un matériau composite massif, avec des NPs non agrégées distribuées de manière homogène.Le présent travail est consacré au développement de matériaux à partir de NPs d'oxydes métalliques (principalement Y3Al5O12: Ce et Li4Ti5O12) de différentes dimensions et pour diverses applications. La première partie de ce travail décrit la synthèse de NPs de YAG: Ce et de LTO par approche glycothermale. Dans le cas du YAG: Ce, les conditions de réaction ont été ajustées de façon appropriée pour obtenir des nanocristaux (NCs) non agrégés de quelques nanomètres. Des solutions colloïdales de différentes concentrations contenant de tels NCs ont été utilisées, pour la fabrication par la technique de « spin-coating », de films minces avec une épaisseur contrôlable. A l’inverse, la synthèse de LTO conduit à des NPs agrégées dans une structure hiérarchique très bénéfique pour les batteries au lithium. La grande surface spécifique et la porosité du matériau obtenu assurent en effet un échange efficace des ions lithium entre l'électrolyte et le matériau d'anode.Par ailleurs, les NCs de YAG: Ce ont été utilisés pour la préparation de matériaux monolithiques de grande taille avec une porosité et une transparence élevées. Pour cela, la solution colloïdale de NCs a été gélifiée par le changement brusque de la constante diélectrique du solvant de dispersion des NCs. Les gels ainsi obtenus ont été par la suite séchés de manière supercritique, donnant ainsi des aérogels à base de NPs de YAG:Ce, avec une porosité et une transparence élevées. La même approche s'est avérée appropriée pour d'autres systèmes à base de NPs de GdF3 ou de mélanges de NPS de YAG: Ce et de GdF3.Alternativement, les NPs de YAG: Ce ont été incorporées dans des aérogels de silice formant ainsi des aérogels macroscopiques robustes et hautement transparents présentant les propriétés des NPs incorporées. Ces aérogels composites ont été utilisés en tant que nouveaux types de capteurs pour les rayonnements ionisants de basse énergie dans les liquides ou les gaz. Leur porosité élevée permet un contact optimal entre l'émetteur radioactif et le scintillateur assurant ainsi une bonne récupération de l'énergie radioactive
Nanotechnology has become a key domain of technology in XXI century. The great development of the synthetic approaches toward nanoparticles (NPs) with desired composition, size and shape expose the potential of their use as building blocks for larger scale structures. It allows fabrication of functional materials and devices directly from colloids by bottom-up approach, thus involving possibility of material design over several length scales. The process is referred to NPs assembly or self-assembly and leads to materials with varying architectures as for instance 1D (rods), 2D (films) or 3D (superlattices or gels). However most of 3D assemblies are limited to the micrometric scale and are difficult to control. Practically the only route allowing preparation of macroscopic 3D structures from NPs is their gelation and preparation of aerogels. As an alternative, NPs can be embedded in some matrix creating bulk composite material, with homogenously distributed non-aggregated NPs.Therefore, this work is devoted to development of materials with different dimensionalities for various applications from metal oxides NPs (mainly Y3Al5O12:Ce and Li4Ti5O12). The first part describes the syntheses of YAG:Ce and LTO NPs by glycothermal approach. In the case of YAG:Ce, the reactions conditions were appropriately adjusted in order to obtain non-aggregated nanocrystals (NCs) of few nanometers. The colloidal solution containing such NCs with different concentration was used for fabrication of thin films with controllable thickness by spin-coating method. Contrary, the synthesis of LTO led to aggregated NPs with hierarchical structuration which was highly beneficial for Li-ion batteries. The large surface area and porosity ensured efficient exchange of Li ions between electrolyte and anode material. Furthermore, the YAG:Ce NCs were used for preparation of macroscopic monoliths with high porosity and transparency. For that reason, colloidal solution of NCs was gelled by the abrupt change of solvent dielectric constant. The gels were further supercritically dried yielding YAG:Ce NPs-based aerogels with high porosity and transparency. The same approach turned o be appropriate for other systems like GdF3 or hybrid aerogels of YAG:Ce and GdF3.Alternatively, YAG:Ce NPs were incorporated into silica aerogels forming robust macroscopic and highly transparent aerogels exhibiting properties of incorporated NPs. They served for novel type of sensors for low-energy ionizing radiation in liquids and gases. Their high porosity assured well-developed contact between radioactive emitter and the scintillator ensuring good harvesting of radioactive energy

La notion de microsysteme est nee avec la microelectronique, mais n'a jamais connu le meme essor. Les raisons de cette difference de developpement sont nombreuses : multiplicite des domaines a maitriser, complexite des circuits de traitement du signal necessaires, et surtout manque de procedes de fabrication standards. Jusqu'a nos jours, pour presque chaque circuit microsysteme concu puis realise, un procede de fabrication specifique a du etre developpe en laboratoire. En outre, en raison du manque de marche apparent pour ce type de composant, rares sont les applications qui ont pu etre industrialisees, les investissements necessaires etant trop importants. Les microsystemes sont donc, depuis leur naissance, restes des sujets de recherche en laboratoires, et n'ont pu connaitre de phase d'industrialisation. Le but de mon travail de recherche a ete l'utilisation des capacites et des competences offertes par l'industrie de la microelectronique (technologies de fabrication, outils et methodes de conception, de simulation et de test), pour concevoir et realiser des circuits microsystemes monolithiques. Grace au procede de gravure anisotropique du silicium monocristallin, il est possible d'obtenir des elements suspendus sur des micro-cavites a partir de puces fabriquees avec des technologies vlsi. Ces elements peuvent etre utilises pour realiser des fonctions micro-electro-mecaniques. Ce procede de gravure a ete etudie et caracterise, et des regles de dessin pour la conception et la fabrication de structures suspendues ont ete etablies. Un environnement de conception assistee par ordinateur, base sur le logiciel cadence, a de plus ete developpe, afin de rendre ce procede de fabrication accessible a tous les concepteurs.

L'expérience CBM (Compressed Baryonic Matter) a pour objet d'explorer le diagramme des phases de la matière nucléaire dans la région des hautes densités baryoniques au moyen de collisions d'ions lourds à des énergies de faisceau comprises entre 10 et 40 AGeV. Dans le but d'étudier le charme ouvert (D0 et D+) avec CBM, un détecteur de vertex (MVD) présentant à la fois un faible budget de matière, une excellente résolution spatiale et une bonne tolérance aux radiations est requis. Cette étude vise à déterminer dans quelle mesure un MVD constitué de capteurs CMOS (MAPS) peut garantir de telles performances. Dans cette optique le cahier des charges du MVD a été établi. Les mécanismes de dégradation par irradiation des MAPS ont été étudiés pour en améliorer la tolérance d'un ordre de grandeur. Les résultats de ces études ont permis de réaliser des simulations avec GEANT, et de démontrer la faisabilité du programme de physique portant sur le charme ouvert avec un tel concept de détecteur
The Compressed Baryonic Matter experiment (CBM) will investigate heavy ion collisions at beam energies between 10 and 40 AGeV in order to explore the nuclear matter phase diagram in the high baryon density region. For a first time, open charm mesons (D0 and D±) will be used as probe for the nuclear fireball. Reconstructing them requires a very thin (few 0. 1 % X0 per layer) micro vertex detector (MVD) with pixel sensors featuring excellent spatial resolution (few µm) and substantial radiation hardness. This work studies whether (and how) an MVD based on the novel Monolithic Active Pixel Sensors (MAPS) can the reach the performance needed. For this purpose, the precise requirements on the MVD in terms of material budget, cooling, time resolution and radiation hardness were estimated. Extensive R&D studies on MAPS allowed establishing their performances in particular in the field of radiation tolerance and to improve this tolerance by one order of magnitude. The information obtained was used as input for a GEANT simulation which demonstrated the feasibility of open charm physics with the proposed detector concept

La forte demande et le besoin d’intégration hétérogène de nouvelles fonctionnalités dans les systèmes mobiles et autonomes, tels que les mémoires, capteurs, et interfaces de communication doit prendre en compte les problématiques d’hétérogénéité, de consommation d’énergie et de dissipation de chaleur. Les systèmes mobiles intelligents sont déjà dotés de plusieurs composants de type capteur comme les accéléromètres, les thermomètres et les détecteurs infrarouge. Cependant, jusqu’à aujourd’hui l’intégration de capteurs chimiques dans des systèmes compacts sur puce reste limitée pour des raisons de consommation d’énergie et dissipation de chaleur principalement. La technologie actuelle et fiable des capteurs de gaz, les résistors à base d’oxyde métallique et les MOSFETs (Metal Oxide Semiconductor- Field Effect Transistors) catalytiques sont opérés à de hautes températures de 200–500 °C et 140–200 °C, respectivement. Les transistors à effet de champ à grille suspendu (SG-FETs pour Suspended Gate-Field Effect Transistors) offrent l’avantage d’être sensibles aux molécules gazeuses adsorbées aussi bien par chemisorption que par physisorption, et sont opérés à température ambiante ou légèrement au-dessus. Cependant l’intégration de ce type de composant est problématique due au besoin d’implémenter une grille suspendue et l’élargissement de la largeur du canal pour compenser la détérioration de la transconductance due à la faible capacité à travers le gap d’air. Les transistors à double grilles sont d’un grand intérêt pour les applications de détection de gaz, car une des deux grilles est fonctionnalisée et permet de coupler capacitivement au canal les charges induites par l’adsorption des molécules gazeuses cibles, et l’autre grille est utilisée pour le contrôle du point d’opération du transistor sans avoir besoin d’une structure suspendue. Les transistors monoélectroniques (les SETs pour Single Electron Transistors) présentent une solution très prometteuse grâce à leur faible puissance liée à leur principe de fonctionnement basé sur le transport d’un nombre réduit d’électrons et leur faible niveau de courant. Le travail présenté dans cette thèse fut donc concentré sur la démonstration de l’intégration 3D monolithique de SETs sur un substrat de technologie CMOS (Complementary Metal Oxide Semiconductor) pour la réalisation de la fonction capteurs de gaz très sensible et ultra basse consommation d’énergie. L’approche proposée consiste à l’intégration de SETs métalliques à double grilles dans l’unité de fabrication finale BEOL (Back-End-Of-Line) d’une technologie CMOS à l’aide du procédé nanodamascene. Le système sur puce profitera de la très élevée sensibilité à la charge électrique du transistor monoélectronique, ainsi que le traitement de signal et des données à haute vitesse en utilisant une technologie de pointe CMOS disponible. Les MOSFETs issus de la technologie FD-SOI (Fully Depleted-Silicon On Insulator) sont une solution très attractive à cause de leur pouvoir d’amplification du signal quand ils sont opérés dans le régime sous-le-seuil. Ces dispositifs permettent une très haute densité d’intégration due à leurs dimensions nanométriques et sont une technologie bien mature et modélisée. Ce travail se concentre sur le développement d’un procédé de fonctionnalisation d’un MOSFET FD-SOI comme démonstration du concept du capteur de gaz à base de transistor à double grilles. La sonde Kelvin a été la technique privilégiée pour la caractérisation des matériaux sensibles par le biais de mesure de la variation du travail de sortie induite par l’adsorption de molécules de gaz. Dans ce travail, une technique de caractérisation des matériaux sensibles alternative basée sur la mesure de la charge de surface est discutée. Pour augmenter la surface spécifique de l’électrode sensible, un nouveau concept de texturation de surface est présenté. Le procédé est basé sur le dépôt de réseaux de nanotubes de carbone multi-parois par pulvérisation d’une suspension de ces nanotubes. Les réseaux déposés servent de «squelettes» pour le matériau sensible. L’objectif principal de cette thèse de doctorat peut être divisé en 4 parties : (1) la modélisation et simulation de la réponse d’un capteur de gaz à base de SET à double grilles ou d’un MOSFET FD-SOI, et l’estimation de la sensibilité ainsi que la puissance consommée; (2) la caractérisation de la sensibilité du Pt comme couche sensible pour la détection du H[indice inférieur 2] par la technique de mesure de charge de surface, et le développement du procédé de texturation de surface de la grille fonctionnalisée avec les réseaux de nanotubes de carbone; (3) le développement et l’optimisation du procédé de fabrication des SETs à double grilles dans l’entité BEOL d’un substrat CMOS; et (4) la fonctionnalisation d’un MOSFET FD-SOI avec du Pt pour réaliser la fonction de capteur de H[indice inférieur 2].
Abstract : The need of integration of new functionalities on mobile and autonomous electronic systems has to take into account all the problematic of heterogeneity together with energy consumption and thermal dissipation. In this context, all the sensing or memory components added to the CMOS (Complementary Metal Oxide Semiconductor) processing units have to respect drastic supply energy requirements. Smart mobile systems already incorporate a large number of embedded sensing components such as accelerometers, temperature sensors and infrared detectors. However, up to now, chemical sensors have not been fully integrated in compact systems on chips. Integration of gas sensors is limited since most used and reliable gas sensors, semiconducting metal oxide resistors and catalytic metal oxide semiconductor- field effect transistors (MOSFETs), are generally operated at high temperatures, 200–500 °C and 140–200° C, respectively. The suspended gate-field effect transistor (SG-FET)-based gas sensors offer advantages of detecting chemisorbed, as well as physisorbed gas molecules and to operate at room temperature or slightly above it. However they present integration limitations due to the implementation of a suspended gate electrode and augmented channel width in order to overcome poor transconductance due to the very low capacitance across the airgap. Double gate-transistors are of great interest for FET-based gas sensing since one functionalized gate would be dedicated for capacitively coupling of gas induced charges and the other one is used to bias the transistor, without need of airgap structure. This work discusses the integration of double gate-transistors with CMOS devices for highly sensitive and ultra-low power gas sensing applications. The use of single electron transistors (SETs) is of great interest for gas sensing applications because of their key properties, which are its ultra-high charge sensitivity and the ultra-low power consumption and dissipation, inherent to the fundamental of their operation based on the transport of a reduced number of charges. Therefore, the work presented in this thesis is focused on the proof of concept of 3D monolithic integration of SETs on CMOS technology for high sensitivity and ultra-low power gas sensing functionality. The proposed approach is to integrate metallic double gate-single electron transistors (DG-SETs) in the Back-End-Of-Line (BEOL) of CMOS circuits (within the CMOS interconnect layers) using the nanodamascene process. We take advantage of the hyper sensitivity of the SET to electric charges as well from CMOS circuits for high-speed signal processing. Fully depleted-silicon on insulator (FD-SOI) MOSFETs are very attractive devices for gas sensing due to their amplification capability when operated in the sub-threshold regime which is the strongest asset of these devices with respect to the FET-based gas sensor technology. In addition these devices are of a high interest in terms of integration density due to their small size. Moreover FD-SOI FETs is a mature and well-modelled technology. We focus on the functionalization of the front gate of a FD-SOI MOSFET as a demonstration of the DGtransistor- based gas sensor. Kelvin probe has been the privileged technique for the investigation of FET-based gas sensors’ sensitive material via measuring the work function variation induced by gas species adsorption. In this work an alternative technique to investigate gas sensitivity of materials suitable for implementation in DG-FET-based gas sensors, based on measurement of the surface charge induced by gas species adsorption is discussed. In order to increase the specific surface of the sensing electrode, a novel concept of functionalized gate surface texturing suitable for FET-based gas sensors are presented. It is based on the spray coating of a multi-walled-carbon nanotubes (MW-CNTs) suspension to deposit a MW-CNT porous network as a conducting frame for the sensing material. The main objective of this Ph.D. thesis can be divided into 4 parts: (1) modelling and simulation of a DG-SET and a FD-SOI MOSFET-based gas sensor response, and estimation of the sensitivity as well as the power consumption; (2) investigation of Pt sensitivity to hydrogen by surface charge measurement technique and development of the sensing electrode surface texturing process with CNT networks; (3) development and optimization of the DG-SET integration process in the BEOL of a CMOS substrate, and (4) FD-SOI MOSFET functionalization with Pt for H[subscript 2] sensing.

Durante i prossimi 5 anni il Large Hadron Collider (LHC) verrà aggiornato nell’High Luminosity LHC, il quale, secondo i piani odierni, inizierà a funzionare nel 2026 con una luminosità istantanea di circa cinque volte quella odierna, e una luminosità integrata aumentata di circa 10 ordini di grandezza. Per questo motivo è necessario un aggiornamento di tutti i rivelatori e i loro sistemi di acquisizione per far fronte al maggiore flusso di particelle ionizzanti e all’incremento di dati acquisiti. In particolare l’Inner Detector di ATLAS verrà completamente ridisegnato e sono in corso numerosi studi per identificare le migliori tecnologie adatte a questo aggiornamento. BCD8 e TowerJazz, con le quali sia il sensore che il dispositivo di lettura sono integrati nel medesimo substrato di silicio. Queste soluzioni sono particolarmente adatte per lo strato più esterno del tracciatore di ATLAS, in quanto questo copre una superficie estremamente elevata, tuttavia non è stata ancora dimostrata la resistenza a radiazione ionizzante di queste tecnologie. La tecnologia BCD8 consiste in una soluzione chiamata a “pixel attivo”, in cui parte dell’elettronica di lettura di tipo CMOS, che solitamente funziona a basse tensioni, è integrata in un substrato di tipo DMOS che supporta alte tensioni. La tecnologia TowerJazz invece è già stata usata per produrre sensori monolitici di tipo CMOS per l’esperimento ALICE. In questa tesi sono presentate le misure che ho personalmente effettuato su dei prototipi costruiti con queste tecnologie. Per il prototipo BCD8, chiamato KC53AB, ho misurato i parametri di corrente di buio e capacità su dei pixel passivi, in chip nuovi e irraggiati con dosi simili a quelle che avrebbero ricevuto durante il periodo di funzionamento di HL-LHC. Per il prototipo TowerJazz, chiamato Investigator, ho effettuato, al fascio di test del CERN, degli studi in termini di effcienza di rivelazione e tempo di raccolta delle cariche, su chip nuovi e irraggiati.

Content of this master‘s thesis is construction technological project of the extension Senior Centrum Blansko. The main object is a three-storyed, designed as a monolithic skeleton construction. The masters’s thesis contains technical report of the construction technological project, suggested construction site installations, proposal of suitable machines and mechanisms required for construction, time schedule, budget, wider relations of transport lines to construction site, implementation of monolithic concrete structures and control and test plan.

The projected retirement home is located in the cadaster of the town Velká Bíteš. The building is designed with respect of resident's needs of retirement age. It is a four-storey building without basement. There are designed external doctor's offices on the first floor. There are lounge with library and technical facilities on the first floor as well. Besides that, we can find accomodation spaces from second up to fourth floor. The structural system is a longitudinal wall and ceilings are made by monolithic reinforced concrete. The roof is shed. The building is detached with built chambers

What are the elementary particles and how did the universe originate are the main driving forces in the high energy physics. In order to further demonstrate the standard model and discover new physics, several detectors are built for the high energy physics experiments. CMOS pixel sensors (CPS) can achieve an attractive tradeoff among many performance parameters, such as readout speed, granularity, material budget, power dissipation, radiation tolerance and integrating readout circuitry on the same substrate, compared with the hybrid pixel sensors and charge coupled devices. Thus, the CPS is a good candidate for tracking the charged particles in vertex detectors and beam telescopes.The power distribution becomes an important issue in the future detectors, since a considerable amount of sensors will be installed. Unfortunately, the independent powering has been proved to fail. In order to solve the power distribution challenges and to provide noiseless voltages, this thesis focuses on the design of a low noise, limited area, low power consumption and full on-chip power management in CPS chips. The CPS are firstly introduced drawing the design requirements of the power management. The power distribution dedicated to CPS chips is then proposed, in which the power management is utilized as the second power conversion stage. Two full on-chip regulators are proposed to generate the analog power supply voltage and the reference voltage required by correlated double sampling operation, respectively. Two prototypes have verified these regulators. They can meet the requirements of CPS. Moreover, the power management techniques and the radiation tolerance design are also presented in this thesis.

This thesis deals with the technological solution building construction project seniors home in Prague. Contains a technical report, technical regulations for monolithic and brick structures, which are documented inspection and test plans, as well as time and financial plans and project construction site.

The second decade of Large Hadron Collider operations, from about 2020 onwards, envisages a remarkable increase in collider instantaneous luminosity, one order of magnitude above the project one. This luminosity increase presents several challenges to the LHC experiments. The present Tracker of the Compact Muon Solenoid experiment must be replaced with a system providing excellent tracking quality at higher luminosities, as well as Tracking Trigger inputs to the existing "Level 0" CMS Trigger system at the full 40 MHz bunch-crossing rate. The minimal requirements for a Tracking Trigger would be the capability to confirm the presence of high-pT tracks associated with Calorimeter and/or Muon Level 0 Triggers. The ability to provide effective isolation criteria may also be required, and would in any case substantially improve the Trigger performance. Maintaining the data rates generated by Tracking Trigger inputs within a manageable bandwidth requires sensor modules able to locally sparsify the data. Measuring at detector module level the track direction in the transverse plane, and hence deriving its transverse momentum, is the most promising solution to provide such a detector-embedded data reduction feature. These so-called "pT-modules"' would only transmit to the Level 1 Trigger "stubs", pairs of correlated hits in two closely separated sensors, derived by tracks with pT above a given threshold. To exemplify, a 2 GeV/c threshold would cut data rate of more than a factor 10, hence providing a data rate well within the capabilities of present data links. The pT-modules design discussed in this work consists of two, closely spaced segmented silicon sensors, featuring both pattern hit correlation across the module and a single hit position resolution high enough to compute stubs with the required accuracy to resolve track directions despite a lever arm of about only 1 mm. A concept Tracker layout, the so-called "Long Barrel", consisting in an Outer Tracker completely built out of pT-modules, has been proposed. The Long Barrel Tracker is particularly flexible in simulation studies of Tracking Trigger as it allows for information from several layers of the Tracker to be combined in a projective geometry. For this reason, it is meant as a testing ground to compare the performance of different designs and configurations. The Long Barrel layout also allows the generation of even more structured Trigger Objects such as "tracklets", consisting of pairs of stubs in opportunely paired layers, which can in turn be used as seeds to generate "Level 1 tracks", including even more stubs. The choice of stacked sensors for pT-modules has been recently strengthened by test beam results obtained with novel prototypes of Monolithic Active Pixel Sensors and reported in this thesis. The developement of Tracking Trigger simulations is also presented as a major step towards the design of a realistic Trigger capable Tracker upgrade. A particular challenge for the Trigger system is given by tau leptons produced in many rare processes searched at the LHC. The performance of a Tracking Trigger on final states with tau leptons will be crucial at very high luminosities and is presented at the and of this document as the natural step forward in the work on the subject.
Durante il secondo decennio di operazioni al Large Hadron Collider, a partire dall'anno 2020, è previsto un notevole aumento della luminosità istantanea del collisionatore, di un ordine di grandezza superiore rispetto a quella di progetto. Questa luminosità presenta numeose sfide per gli esperimenti a LHC. Il Tracciatore attualmente impiegato nell'esperimento Compact Muon Solenoid dovrà essere rimpiazzato con un sistema in grado di garantire una tracciatura di qualità eccellente ad alte luminosità e, allo stesso tempo, fornire informazioni utili per l'attuale "Livello 0" del sistema di Trigger a CMS, alla frequenza di collisioni di 40 MHz. Le richieste minime per un Trigger basato sul Tracciatore sono la capacità di confermare la presenza di tracce ad alto pT associate a Trigger di Livello 0 ottenuti con i Calorimetri o i rivelatori di muoni. La capacità di fornire criteri efficaci di isolazione può essere ulteriormente richiesa e in ogni caso migliorerebbe significativamente le prestazioni del Trigger. Il rateo dei dati associati con la generazione nel Tracciatore di informazione di Trigger può essere mantenuto in una larghezza di banda sufficientemente maneggevole richiedendo che i moduli sensitivi siano in grado di ridurre localmente i dati. I principali candidati per una simile riduzione locale del rateo i dati sono caratterizzati dalla capacità di fornire la direzione della traccia nel piano trasverso, oltre alla sua posizione, da cui poter dedurre la quantità di moto della traccia stessa. Questi "pT-modules" trasmetterebbero di conseguenza al Trigger di primo livello degli abbozzi di traccia ("stub") generati da particelle con pT al di sopra di 2 GeV/c. La scelta di una simile soglia permetterebbe la riduzione dei dati di un fattore superiore a 10, consentendo quindi un rateo facilmente tollerabile. I moduli di Trigger possono essere realizzati con due sensori di silicio paralleli leggermente separati, caratterizzati da una risoluzione sulla misura del singolo punto d'impatto tale che gli stub, ottenuti tramite correlazione tra i punti misurati nel modulo, possano fornire un'adeguata misura della direzione della traccia, nonostante il braccio di leva sia dell'ordine del millimetro. Un'ipotetica configurazione per il Tracciatore, composto da "lunghi barili", che prevede un Tracciatore esterno realizzato totalmente con moduli di Trigger, è stata proposta. Essa è particolarmente flessibile negli studi di simulazione per il Trigger realizzato con il Tracciatore giacché consente di combinare tra loro, tramite proiezioni geometriche, le informazioni provenienti da diversi strati del Tracciatore. Pertanto è un campo di prova per confrontare le prestazioni di diverse concezioni e diverse configurazioni. Il Tracciatore proposto permette anche la generazione di oggetti più articolati degli stub per il Trigger, come ad esempio le "tracklet", che consistono in coppie di stub opportunamente associate tra loro, le quali possono a loro volta essere usate come punto di partenza per la costruzione di Tracce di Primo Livello. La scelta di moduli di Trigger realizzati con sensori accoppiati è rafforzata da risultati recenti ottenuti con dei prototipi innovativi di rivelatori a Pixel Monolitici durante dei test sotto fascio riportati in questa tesi. Lo sviluppo di simulazioni per un Trigger con il Tracciatore è anch'esso presentato come un significativo progresso verso la progettazione di un nuovo Tracciatore realistico e capace di fornire informazioni utili per il Trigger. Particolarmente impegnativo è lo sforzo per un Trigger che selezioni i leptoni tau prodotti in numerosi processi rari di interesse per gli esperimenti a LHC. Le prestazioni di un Trigger con il Tracciatore su stati finali contenenti leptoni tau saranno fondamentali a luminosità molto elevate e sono illustrate alla fine di questo documento, come naturale prosecuzione del lavoro descritto.

The diploma thesis elaborates on the design of a new building of freestanding retirement home in the town of Litomyšl. The design of the retirement home is in the form of project documentation for the construction. The new building includes a partial basement and three floors. The main purpose is to build a building for housing with flats for seniors and to provide health care to seniors living here and from the surrounding area. On the 1st floor, there is an administrative part, a doctor's office with the possibility of rehabilitation and a dining room with facilities for food preparation, which is imported into the home. The dining room serves both the guests and the public. The remaining part of the first floor consists of social, administrative and utility rooms. On the 2nd and 3rd floors, there are individual apartments for clients with a common room for visits and spending their free time. On the 1st floor, there is a maintenance center, boiler room, server room, furniture store, and estate depository. Basement walls are monolithic, made of reinforced concrete. The construction system of the above-ground floors is wall-mounted, bidirectional and made of ground brick blocks. The ceilings and staircases are monolithic, made of reinforced concrete. External walls are insulated with a contact thermal insulation systems. The building is mainly based on footings or foot anchors. The retirement home is located on the edge of the town near the Litomyšl Hospital. The land is suitable for construction, as it is located in the area for the construction of civil buildings.

碩士
國立交通大學
電子研究所
105
A Micro Electro Mechanical Systems (MEMS) resonator that can be manufactured and monolithically integrated in the ASIC-compatible 0.18μm 1-poly-6-metal (1P6M) standard complementary metal-oxide-semiconductor (CMOS) process is proposed for measuring environmental temperature. It could be monolithically integrated with CMOS driving and readout circuitry without the need of any post-processing after fabrication from the foundry. The resonant frequency shifts designed proportionally to temperature variation. The phase locked loop (PLL) circuitry provides a stable clock to drive the resonator, and it can track the resonant frequency shifts due to the environmental temperature changes. A high-gain amplitude enhancement circuit is presented to transfer the small current from the resonator output to square wave voltage for the phase frequency detector of PLL proper functioning. The measurement results of the proposed resonator have been demonstrated that the maximum displacement was 648nm when the frequency was 38.66kHz under pressure being 760torr. The calculated Q-factor was 183, and the overlap area of comb fingers is larger than 407.6μm2, which represents more than 92% initial capacitance. The co-simulation result of the proposed resonator-based environmental temperature sensor has been demonstrated with a sensitivity -5.7Hz/°C (-143ppm/°C) or -0.228mV/°C and resolution 0.67°C in a temperature range from -40°C to 120°C. The power consumption of the PLL is 17.23μW and overall readout circuit is only 190.36μW.

博士
國立成功大學
微電子工程研究所
102
This dissertation investigates a monolithic 6-DoF MEMS inertial sensor fabricated by SOG(Silicon On Glass) process together with a fully integrated readout/control circuit fabricated by standard CMOS process for application into the linear acceleration and angular rate measurement. There are three parts in this dissertation. In the first part, a monolithic 6-DoF MEMS inertial sensor including a tri-axis accelerometer and a tri-axis gyroscope is fabricated by SOG(Silicon On Glass) bulk micromachining process with DRIE (Deep Reactive-ion-etchant).For the optimum design for both size and performance considerations, the tri-axis accelerometer is designed under the minimum angular momentum consideration while the tri-axis gyroscope is designed under the conservation of momentum and distributed and differential for sensing mechanism for robustness. The element size of the monolithic 6-DoF inertial sensor is 2.1mm x 2.1mm, and the structure of the inertial sensor is hermetic sealed with the silicon cavity by glass frit process under 2 m bar condition. The quality factor of the gyroscope resonator is about 2000. The second part gives the detail design consideration of the fully integrated readout/control circuit of the MEMS 6-DoF inertial senor. In the accelerometer readout circuit design, a first-order Sigma-Delta modulator is used as analog front end. A calibration DAC (CALDAC) for sensor gain and offset trimming is also adopted. In the gyroscope system, the designed drive/readout ASIC consists of a driving-loop circuit to drive the resonator into resonance, a trans-impedance amplifier (TIA) to detect the Coriolis signal as well as a gain/offset trimming ADC to adjust this output. The ASIC is fabricated by tsmc 0.25um 1P5M process and th chip size is 2.5 x 2.5 mm2. The third part described the measurement results of the 6-DoF inertial measurement unit. The results show that the sensitivities and cross-axis sensitivities of the x/y/z tri-axis accelerometer are 1.442V/g; 0.03%, 1.241V/g; 0.21% and 1.434V/g； 0.21%, respectively. The sensitivities of the x/y/z tri-axis gyroscope are 1.62mV/DPS, 1.67mV/DPS and 1.67mV/DPS, respectively. The power consumption is about 2.5mA under 3V operation.

碩士
國立暨南國際大學
電機工程學系
90
Study on the Monolithic Sensor and Front-End Circuit Design Student: Ping-Yuan Lin Advisor: Tai-Ping Sun ABSTRACT In this thesis, we have used the CMOS standard process to design (N+_Psub、P+_Nwell、Nwell_Psub) three different type photodiode's structures. The five different emitter area's transistors for temperature sensors were fabricated by the CMOS standard process. We have also measured two kinds of sensor's properties respectively. After a series of experimental measurements, the best photodiode can be gotten. Considering the design cost and the optimum area, a good temperature sensor of the transistor which the area of emitter is 5μm×5μm. However, the CMOS standard process of the UMC 0.5μm 2P2M was employed to fabricate a low voltage, low noise operational amplifier to combine with the photo-sensor. We have also used a small area T-type resistance to replace a large area feedback resistance of a transimpedance amplifier. In this study the lux meter measurement system which can detect the photo-current about 1nA in a single chip will be accomplished. Keywords：CMOS standard process、photodiode、temperature sensor、noise、operational amplifier、transimpedance amplifier、lux meter

碩士
國立交通大學
電子研究所
105
A monolithic MEMS resonator based pressure sensor fabricated on the 0.18µm 1-poly-6-metal standard CMOS-MEMS process and monolithically integrated with TIA(trans-impedance amplifier) readout circuitry has been developed. Dependence of the quality factor and ambient pressures are well known to resonator designers and it will be feasible to integrate a readout circuitry of quality factor to detect ambient pressure. An electrostatic-actuated resonator generate current by capacitance changing with different quality factors. The TIA circuit converts current signal by resonator, then the output signal is converted from resonating waveform into voltage level by the envelope detector for ambient pressure estimation. By measuring the sample resonator, the air pressure changes from 100 Pa to 1600 Pa, the Q factor will change from 2566 to 452 with resonant frequency 15.4 kHz and the readout circuit is designed accordingly. The system power consumption is 332.82 µW with 1.8 V power supply and sensitivity is 0.0203 mV/Q.

博士
國立交通大學
電子研究所
106
This thesis presents an experimentally-verified analytical model of temperature-dependent yield effects on the curvatures of composite beam structures used in CMOS MEMS. The temperature-dependent effects of a thermal process on the curvatures of composite beams can be predicted by extracting key parameters from the measured curvatures of a limited number of CMOS MEMS composite-layer combinations. The effects due to thermal history in MEMS packaging, which change the characteristics of beam curvatures due to material yield, are further analyzed. The models are verified with measured results from beam structures fabricated by an ASIC-compatible 0.18 m 1P6M CMOS MEMS process using a white light interferometer. These models can be applied in EDA tools to provide good prediction of temperature-dependent properties related to CMOS MEMS beam curvature, such as sensing capacitance, for monolithic sensor SOC design. This thesis also presents the monolithic ultra-low power MEMS oscillator that can be manufactured in the ASIC compatible standard CMOS process and monolithically integrated with TIA circuitry. It is designed for high Q value and moderate motional impedance under strict design constraints of the standard fabrication process. A high gain ultra-low power sustaining TIA amplifier circuit is compactly integrated with the resonator structure on a single die for low-power 32 kHz clock generation. The proposed 1.69W MEMS oscillator can be embedded in common SoC applications monolithically to provide clock sources. In addition, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18m 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

碩士
國立交通大學
電機工程學系
103
This work presents a monolithic neural sensor integrated with an electrocorticographic (ECoG) electrode and micro-probe array. The polyimide (PI)-based ECoG electrode and micro-probe array were fabricated using a customized Micro Electro Mechanical Systems PI process. Proposed sensor can record 4-channel ECoG signals and 14-channel local-field potential signals simultaneously. The selected materials of the fabricated sensor are biocompatible and flexible in order to minimize the damage in long-term implantation. The structure strength has been proof in agar and rat brain for efficient penetration. The impedance of the ECoG electrodes and micro-probes range at 4k-6kΩ and 118k-168kΩ, respectively, and are both fully characterized for neural signal recording. Successful in vivo recordings demonstrated the feasibility of proposed sensor in an awake rat. Due to bending problem of the PI-based micro-probe array, it is hard to penetrate into the desired position of the rat brain. This work also presents a new silicon (Si)-based probe, which greatly reduces the thickness of traditional Si-based probe to 26 µm and possesses enough rigidity for tissue penetration. Successful in vivo recordings for LPF in an awake rat. In the auditory stimulus experiments, the proposed Si-based probe penetrated into the primary auditory cortex of rat brain. Under different frequency (10 kHz and 16 kHz) and different strength (-40dB and 0 dB) of auditory stimulus, the probe can successfully record the auditory response from each channels. By using independent component analysis, the sources of cortex response to auditory stimulus were also successfully derived from the independent components by using back project method.

碩士
國立臺灣大學
機械工程學研究所
92
The aim of this thesis is to develop an optoelectronic displacement sensor system for small-scale objects. Besides the compactness of the system, the high-speed and precision displacement sensing performances are also the important points of this thesis. To make a high compactness and precision system possible, the system will be made in the form of monolithic type to make sure that all elements are set stably and precisely. In the developing process, choosing the suitable small-diameter laser source according to the system request is the first thing. The laser beam will be transmitted to the displacement sensing area by the appropriate setup of optical elements. The light intensity of the laser beam and the bright/dark area will vary with the displacement of the sensing object, and be sensed by the optoelectronic sensors to output the corresponding electrical analog signal. To improve the precision of the senor system and reduce the interference of the random noise, the differential measurement method is employed. The bright area that varies with the displacement of the sensing object will be projected onto both optoelectronic sensors by using a prism. The differential output signal of the two sensors is considered to be the output signal of the displacement sensor system. Besides the static and dynamic characteristics test of the sensor system, the system error will also be detail conferred. In the system dynamic test, the result will be compared with the data of the LVDT displacement measurement system to check the performance characteristics.

碩士
國立清華大學
動力機械工程學系
106
This research presents a monolithically integrated environment sensing hub utilizing the TSMC CMOS platform. This study first focuses on the structure design of humidity sensors, with the intention of improving the sensors’ response time and sensitivity, then in order to fully utilize the CMOS platform, a pressure sensor and a temperature detector are integrated monolithically on the same chip, the core concept of this research is to fabricate all four sensors at once, without the fabrication process inteferring each other. Experimental measurements will be operated seperately once all the fabrication processes are completed, experiment results show the performance of each device are all above average, proving the feasibility of monolithic integration upon the CMOS platform.

博士
國立清華大學
電機工程學系
90
Although the ion-sensitive field-effect transistor (ISFET) concept has existed for over 30 years, practical applications are still emerging very slowly. In this thesis, we will point out some practical problems that were the limiting factors in the breakthrough of commercialization of ISFET and try to study and provide the appropriate solutions. Three critical issues of ISFET are : (1) The lack of a suitable ion-sensitive membrane as the ISFET gate material with sufficient sensitivity and stability; (2) the encapsulation of the electronics functions from exposure to the sample liquids; and (3) the need of a bulky conventional reference electrode is not compatible to miniaturized chip and not convenient for in-vivo biomedical applications. Although each of the above-mentioned problems has been investigated respectively, very rare researchers have offered a total solution to solve all of those issues at the same time. In this dissertation, a monolithic ISFET hydrogen ion (pH) sensor with an integrated miniaturized solid-state reference electrode and electrical backside contacts structure will be presented and its electrochemical high performance also will be verified. Firstly, we will compare the sensing characteristics of two inorganic insulators, silicon nitride and tantalum oxide, as the ion-sensitive membranes of pH-ISFET. According to the results of their respectively fabricated pH sensors characterized in standard pH solution, the tantalum oxide (Ta2O5) insulator based ISFET has higher linear pH sensitivity (56-57mV/pH) and lower drift level than silicon nitride (Si3N4) insulator based ISFETs. These results agree very well with the theoretical value of the site-binding theory. Secondly, backside electrical contacts were constructed to facilitate its protection from chemical attack by the test solutions. These backside electrical contacts were fabricated using silicon bulk micromachining with P+ etching stop and double-side alignment lithography techniques. Finally, to eliminate the need of a separate reference electrode and facilitate the use of ion-sensitive field-effect transistor (ISFET), an all-solid-state reference electrode integrated with ISFET in one chip has been developed. A novel agarose-stabilized KCl-gel membrane was introduced to serve both as a polymer-supported solid reference electrolyte and an ionic bridge for Ti/Pd/Ag/AgCl electrode. This new planar integrated reference electrode has not only eliminated the fabrication problems associated with the filling of the reference liquid electrolyte into a miniature micromachined cavity, but also has many excellent performance characteristics with respect to the reference potential stability and its insensitivity to the changes of pH values and Cl- ion concentrations in the sample solutions under test. Calibrated against the commercial macro Ag/AgCl reference electrode the new miniaturized reference electrode shows its cell potential variation was ±0.9~1.4mV (equivalent to about ±0.015~0.023pH) in one hour, less than 2mV variation over pH4 to pH10, and almost insensitive to changes in Cl- ion concentration (about 0.02~0.25mV/pKCl). The planar solid-state reference electrode also shows a very small offset voltage of 0.45mV and reproducible to within 0.5mV among the batch fabricated electrodes. ISFET pH-sensor of SiO2/Ta2O5 gate insulator and through chip backside electrical connections with integrated all-solid-state reference electrode, characterized in standard pH solutions show a linear sensitivity of 56mV/pH, these results agree very well with the theoretical value of 59mV/pH. Dynamic response and hysteresis characteristics of the pH-sensor are also studied and discussed.

碩士
國立交通大學
電子工程學系 電子研究所
101
A monolithic accelerometer and magnetometer with integrated capacitance to voltage readout circuit in 0.18um CMOS MEMS process is proposed. The sensing range of the combo sensor is ±5g and ±70µT. The variation of the capacitance is ±4.5fF and ±0.63fF. The sensitivity of the combo is 0.9fF/g and 9aF/µT respectively. The following circuit is a capacitance to voltage readout circuit. The sensitivity of the full system is 80mV/g and 5.6mV/µT. The measurement result of the readout circuit has sensitivity of 1.3mV/aF and power consumption of 372µW. The measurement result of the magnetometer has sensitivity of 8.7nm/µT*mA.

Nowadays, the Wireless Sensor Networks (WSNs) depend on the battery duration of the sensors and there is a renewed interest in creating a passive sensor network scheme in the area of Internet of Things (IoT) and space oriented WSN systems. The challenges for the future of radio communications have a twofold evolution, one being the low power consumption and, another, the adaptability and intelligent use of the available resources. Specially designed radios should be used to reduce power consumption, and adapt to the environment in a smart and e cient way. This thesis will focus on the development of passive sensors based on low power communication (backscatter) with Wireless Power Transfer (WPT) capabilities used in IoT applications. In that sense, several high order modulations for the communication will be explored and proposed in order to increase the data rate. Moreover, the sensors need to be small and cost e ective in order to be embedded in other technologies or devices. Consequently, the RF front-end of the sensors will be designed and implemented in Monolithic Microwave Integrated Circuit (MMIC).
Atualmente, as redes de sensores sem fios dependem da duração da bateria e,deste modo, existe um interesse renovado em criar um esquema de rede de sensores passivos na área de internet das coisas e sistemas de redes de sensores sem fios relacionados com o espaço. Os desafios do futuro das comunicações de rádio têm uma dupla evolução, sendo um o baixo consumo de energia e, outro, a adaptação e o uso inteligente dos recursos disponíveis. Rádios diferentes dos convencionais devem ser usados para reduzir o consumo de energia e devem adaptar-se ao ambiente de forma inteligente e eficiente, de modo a que este use a menor quantidade de energia possível para estabelecer a comunicação. Esta tese incide sobre o desenvolvimento de sensores passivos baseados em comunicação de baixo consumo energético (backscatter) com recurso a transmissão de energia sem fios de modo a que possam ser usados em diferentes aplicações inseridas na internet das coisas. Nesse sentido, várias modulações de alta ordem para a comunicação backscatter serão exploradas e propostas com o objectivo de aumentar a taxa de transmissão de dados. Além disso, os sensores precisam de ser reduzidos em tamanho e económicos de modo a serem incorporados em outras tecnologias ou dispositivos. Consequentemente, o front-end de rádio frequência dos sensores será projetado e implementado em circuito integrado de microondas monolítico.
Programa Doutoral em Engenharia Eletrotécnica

碩士
國立成功大學
機械工程學系
86
Micro-devices can be manufactured due to recent active development ofmicro-electro-mechanical system ( MEMS ) process technique. In this thesis,a monolithic silicon micro-pressure sensor with a four-terminal shear stresssensitive piezoresistive strain gauge in place of Wheatston bridge constructionwas developed. Both pressure sensitivity and its temperature coefficient aremajor considerations of the design process. The design procedures include:boundary length of the squared diaphragm, deciding thickness of the squareddiaphragm, size of the doping strain gauge, choosing thickness of the dielecticfilm, method of forming the dielectric film, orientation of the doping strain gauge and decision of dopant cocentration. In the design, stress analysis of the micro- pressure sensor is performed by means of the finite element method. Theprototype micro-pressure sensor will be applied to measure the stressdistribution on stump surface for above-knee amputees.