Relevant bibliographies by topics / Microsensors

Academic literature on the topic 'Microsensors'

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Published: 4 June 2021
Last updated: 20 February 2023

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Journal articles on the topic "Microsensors"

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Pedersen, Ole, Niels Peter Revsbech, and Sergey Shabala. "Microsensors in plant biology: in vivo visualization of inorganic analytes with high spatial and/or temporal resolution." Journal of Experimental Botany 71, no. 14 (April 7, 2020): 3941–54. http://dx.doi.org/10.1093/jxb/eraa175.

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Abstract This Expert View provides an update on the recent development of new microsensors, and briefly summarizes some novel applications of existing microsensors, in plant biology research. Two major topics are covered: (i) sensors for gaseous analytes (O2, CO2, and H2S); and (ii) those for measuring concentrations and fluxes of ions (macro- and micronutrients and environmental pollutants such as heavy metals). We show that application of such microsensors may significantly advance understanding of mechanisms of plant–environmental interaction and regulation of plant developmental and adaptive responses under adverse environmental conditions via non-destructive visualization of key analytes with high spatial and/or temporal resolution. Examples included cover a broad range of environmental situations including hypoxia, salinity, and heavy metal toxicity. We highlight the power of combining microsensor technology with other advanced biophysical (patch–clamp, voltage–clamp, and single-cell pressure probe), imaging (MRI and fluorescent dyes), and genetic techniques and approaches. We conclude that future progress in the field may be achieved by applying existing microsensors for important signalling molecules such as NO and H2O2, by improving selectivity of existing microsensors for some key analytes (e.g. Na, Mg, and Zn), and by developing new microsensors for P.
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Cheng, Xudong, Arindom Datta, Hongseok Choi, Xugang Zhang, and Xiaochun Li. "Study on Embedding and Integration of Microsensors Into Metal Structures for Manufacturing Applications." Journal of Manufacturing Science and Engineering 129, no. 2 (September 25, 2006): 416–24. http://dx.doi.org/10.1115/1.2515456.

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Real time monitoring, diagnosis, and control of numerous manufacturing processes is of critical importance in reducing operation costs, improving product quality, and shortening response time. Current sensors used in manufacturing are normally unable to provide measurements with desired spatial and temporal resolution at critical locations in metal tooling structures that operate in hostile environments (e.g., elevated temperatures and severe strains). Microsensors are expected to offer tremendous benefits for real time sensing in manufacturing processes. Rapid tooling, a layered manufacturing process, could allow microsensors to be placed at any critical location in metal tooling structures. However, a viable approach is needed to effectively integrate microsensors into metal structures during the process. In this study, a novel batch production of metal embedded microsensor units was realized by transferring thin-film sensors from silicon wafers directly into nickel substrates through standard microfabrication and electroplating techniques. Ultrasonic metal welding (USMW) was studied to obtain optimized process parameters and then used to integrate nickel embedded thin-film thermocouple (TFTC) units into copper workpieces. The embedded TFTCs successfully survived the welding tests, validating that USMW is a viable method to integrate microsensors to metallic tool materials. Moreover, the embedded microsensors were also able to measure the transient temperature in situ at 50μm directly beneath the welding interface during welding. The transient temperatures measured by the metal embedded TFTCs provide strong evidence that the heat generation is not critical for weld formation during USMW. Metal embedded microsensors yield great potential to improve fundamental understanding of numerous manufacturing processes by providing in situ sensing data with high spatial and temporal resolution at critical locations.
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Ring, Andrej, Heiko Sorg, Andreas Weltin, Daniel J. Tilkorn, Jochen Kieninger, Gerald Urban, and Jörg Hauser. "In-vivo monitoring of infection via implantable microsensors: a pilot study." Biomedical Engineering / Biomedizinische Technik 63, no. 4 (July 26, 2018): 421–26. http://dx.doi.org/10.1515/bmt-2016-0250.

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Abstract The most common complication after implantation of foreign material is infection, leading to implant failure and severe patient discomfort. Smoldering-infections proceed inapparently and might not get verified by radiological diagnostics. Early identification of this type of infection might significantly reduce the rate of complications. Therefore, we manufactured a microsensor strip in a hybrid of thin-film and laminate technology in a wafer-level process. It comprises electrochemical, amperometric microsensors for glucose, oxygen and lactate as well as an integrated reference electrode. Microsensors have been implanted in the mouse dorsal skin fold chamber, which got inoculated with a human-pathogen bacterial strain. A selective signal could be measured for all parameters and time points. The infection led to measurable changes of the wound environment as given by a decrease of the oxygen- as well as the glucose-concentration while the lactate concentration increased markedly over time. The given results in this study are the first hints on a promising new tool and should therefore be interpreted as a proof of the principle to show the functionality of the microsensors in an in vivo setting. These microsensors could be used to monitor smoldering infections of implantable foreign materials reducing foreign implant associated complications.
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de Beer, Dirk, and Andreas Schramm. "Micro-environments and mass transfer phenomena in biofilms studied with microsensors." Water Science and Technology 39, no. 7 (April 1, 1999): 173–78. http://dx.doi.org/10.2166/wst.1999.0356.

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Direct observations on chemical micro-environment and microbial composition in biofilms are rare. The combination of microsensor and molecular techniques is highly useful for studies on the microbial ecology of biofilms. We shortly describe some applications of microsensors to study mass transfer phenomena and microbial processes in biofilms. It has recent been recognized that biofilms are not always flat layers of cells, but can consist of complex structures allowing liquid flow. Thus the classical view, that transport in biofilms is diffusional, is challenged. In laboratory grown biofilms the effect of convection on mass transfer was demonstrated. The microsensor technique has improved, so that direct in situ measurements in living biofilms are possible. By direct measurements of liquid flow with microsensors we show that in biofilms grown in bioreactors heterogeneity and convectional transport must also be taken into account. For the description of the microbial population we use molecular techniques, such as in situ hybridisation with 16S rRNA-targeted oligonucleotide probes. In a nitrifying-denitrifying biofilm we found a complex nitrifying community consisting of members of the genera Nitrosomonas, Nitrosospira, Nitrobacter and Nitrospira. Their occurrence was correlated with nitrification activity as determined by microsensor measurements.
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Hashim, Hairulazwan, Hisataka Maruyama, Yusuke Akita, and Fumihito Arai. "Hydrogel Fluorescence Microsensor with Fluorescence Recovery for Prolonged Stable Temperature Measurements." Sensors 19, no. 23 (November 29, 2019): 5247. http://dx.doi.org/10.3390/s19235247.

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This work describes a hydrogel fluorescence microsensor for prolonged stable temperature measurements. Temperature measurement using microsensors has the potential to provide information about cells, tissues, and the culture environment, with optical measurement using a fluorescent dye being a promising microsensing approach. However, it is challenging to achieve stable measurements over prolonged periods with conventional measurement methods based on the fluorescence intensity of fluorescent dye because the excited fluorescent dye molecules are bleached by the exposure to light. The decrease in fluorescence intensity induced by photobleaching causes measurement errors. In this work, a photobleaching compensation method based on the diffusion of fluorescent dye inside a hydrogel microsensor is proposed. The factors that influence compensation in the hydrogel microsensor system are the interval time between measurements, material, concentration of photo initiator, and the composition of the fluorescence microsensor. These factors were evaluated by comparing a polystyrene fluorescence microsensor and a hydrogel fluorescence microsensor, both with diameters of 20 µm. The hydrogel fluorescence microsensor made from 9% poly (ethylene glycol) diacrylate (PEGDA) 575 and 2% photo initiator showed excellent fluorescence intensity stability after exposure (standard deviation of difference from initial fluorescence after 100 measurement repetitions: within 1%). The effect of microsensor size on the stability of the fluorescence intensity was also evaluated. The hydrogel fluorescence microsensors, with sizes greater than the measurement area determined by the axial resolution of the confocal microscope, showed a small decrease in fluorescence intensity, within 3%, after 900 measurement repetitions. The temperature of deionized water in a microchamber was measured for 5400 s using both a thermopile and the hydrogel fluorescence microsensor. The results showed that the maximum error and standard deviation of error between these two sensors were 0.5 °C and 0.3 °C, respectively, confirming the effectiveness of the proposed method.
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Nathan, Arokia. "Microsensors for physical signals: Principles, device design, and fabrication technologies." Canadian Journal of Physics 74, S1 (December 1, 1996): 115–30. http://dx.doi.org/10.1139/p96-844.

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Microsensors are miniaturized devices, fabricated using silicon-based and related technologies, that convert input physical and chemical signals into an output electrical signal. The key driving force in microsensor research has been the integrated circuit (IC) and micromachining technologies. The latter, in particular, is fueling tremendous activity in micro-electromechanical systems (MEMS). In terms of technology and design tools, MEMS is at a stage where microelectronics was 30 years ago and is expected to evolve at an equally rapid pace. The synergy between the IC, micromachining, and integrated photonics technologies can potentially spawn a new generation of microsystems that will feature a unique marriage of microsensor, signal-conditioning and -processing circuitry, micromechanics, and optomechanics possibly on a single chip. In this paper, the physical transduction principles, materials considerations, process-fabrication technologies, and computer-aided-design (CAD) tools will be reviewed along with pertinent examples drawn from our microsensor research activity at the Microelectronics Laboratory, University of Waterloo.
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Eschauzier, R. G. H. "Microsensors." Sensors and Actuators A: Physical 35, no. 1 (October 1992): 85. http://dx.doi.org/10.1016/0924-4247(92)87011-5.

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Stefan-van Staden, Raluca-Ioana, Catalina Cioates Negut, Sorin Sebastian Gheorghe, and Paula Sfirloaga. "Stochastic Microsensors Based on Carbon Nanotubes for Molecular Recognition of the Isocitrate Dehydrogenases 1 and 2." Nanomaterials 12, no. 3 (January 28, 2022): 460. http://dx.doi.org/10.3390/nano12030460.

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Two three-dimensional (3D) stochastic microsensors based on immobilization of protoporphyrin IX (PIX) in single-walled carbon nanotubes (SWCNT) and multi-walled carbon nanotubes (MWCNT) decorated with copper (Cu) and gold (Au) nanoparticles were designed and used for the molecular recognition of isocitrate dehydrogenase 1 (IDH1) and isocitrate dehydrogenase 2 (IDH2) in biological samples (brain tumor tissues, whole blood). The linear concentration ranges obtained for the molecular recognition and quantification of IDH1 and IDH2 were: IDH1 (1 × 10−5–1 × 102 ng mL−1) and IDH2 (5 × 10−8 − 5 × 102 ng mL−1). The limits of quantification obtained using the proposed microsensors were: 10 fg mL–1 for IDH1 and 5 × 10−3 fg mL−1 for IDH2. The highest sensitivities were obtained for the microsensor based on MWCNT. High recoveries versus enzyme-linked immunosorbent assay (ELISA) standard method were recorded for the assays of IDH1 and IDH2, all values being higher than 99.00%, with relative standard deviations (RSD) lower than 0.10%.
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Jung, Dong Geon, Junyeop Lee, Jin Beom Kwon, Bohee Maeng, Hee Kyung An, and Daewoong Jung. "Low-Voltage-Driven SnO2-Based H2S Microsensor with Optimized Micro-Heater for Portable Gas Sensor Applications." Micromachines 13, no. 10 (September 27, 2022): 1609. http://dx.doi.org/10.3390/mi13101609.

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To realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors capable of operating at lower voltages with high response, good selectivity and stability, and fast response and recovery times. A gas sensor with a high operating voltage (>5 V) is not suitable for portable applications because it demands additional circuitry, such as a charge pump circuit (supply voltage of common circuits is approximately 1.8–5 V). Among H2S microsensor components, that is, the substrate, sensing area, electrode, and micro-heater, the proper design of the micro-heater is particularly important, owing to the role of thermal energy in ensuring the efficient detection of H2S. This study proposes and develops tin (IV)-oxide (SnO2)-based H2S microsensors with different geometrically designed embedded micro-heaters. The proposed micro-heaters affect the operating temperature of the H2S sensors, and the micro-heater with a rectangular mesh pattern exhibits superior heating performance at a relatively low operating voltage (3–4 V) compared to those with line (5–7 V) and rectangular patterns (3–5 V). Moreover, utilizing a micro-heater with a rectangular mesh pattern, the fabricated SnO2-based H2S microsensor was driven at a low operating voltage and offered good detection capability at a low H2S concentration (0–10 ppm), with a quick response (<51 s) and recovery time (<101 s).
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Liu, Chung-Chiun, Peter Hesketh, and G. W. Hunter. "Chemical Microsensors." Electrochemical Society Interface 13, no. 2 (June 1, 2004): 22–27. http://dx.doi.org/10.1149/2.f04042if.

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Dissertations / Theses on the topic "Microsensors"

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McCarthy, Jeffrey J. "Potentiometric microsensors and telemetry." Thesis, McGill University, 1991. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=39268.

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The use of ion-selective field-effect transistors (ISFETs) as potentiometric microsensors was investigated. In the first stage, an instrument was designed and built to operate an array of ISFETs. A microcomputer was used for instrument control and acquisition of data.
The second phase of research focussed on the development of a pH sensitive radiotelemetric device that could eventually be used for the noninvasive monitoring of gastric pH. The first attempt used an ISFET as a variable resistor in a simple telemetry circuit. The drift in the pH dependent signal from this device was significant. The use of a differential sensor was studied as a possible way to minimize the effect of signal drift. This system measured the differential output of a pH ISFET and a pH insensitive ISFET. The pH insensitivity was due to an alkanethiol monolayer at the ISFET$ vert$solution interface.
It was shown that ISFETs are well suited for use as sensors in telemetry devices. The union of these previously independent research areas has been achieved.
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Kerness, Nicole. "CMOS-based calorimetric chemical microsensors /." [S.l.] : [s.n.], 2002. http://e-collection.ethbib.ethz.ch/show?type=diss&nr=14839.

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Pathak, Shrey. "Piezoelectric microsensors for semiochemical communication." Thesis, University of Warwick, 2012. http://wrap.warwick.ac.uk/57210/.

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Chemical communication plays vital role in the mediating the behaviour of an organism living in the “odour space”. The mechanisms by which odours are generated and detected by the organism has evolved over thousands of years and thus the potential advantages of translating this system into a fully functional communication system has opened new avenues in the area of multi-disciplinary research. This formed the basis of the Biosynthetic Infochemical Communications project – iCHEM whose central aim was to develop a new class of communication technology based on the biosynthesis pathways of the moth, S. littoralis. This novel infochemical communication system would consist of a “chemoemitter” unit which would generate a precise mix of infochemicals which after travelling through the odour space would be detected by a complementary tuned detector – the “chemoreceiver” unit comprising of a ligand specific detection element and an associated biophysical model functioning similar to the antennal lobe neuron of the moth. This combined novel system will have the capability of communicating by the help of chemicals only, in the vapour or liquid phase. For the work presented in this thesis, the novel concept of infochemical communication has been examined in the vapour and liquid phase by employing piezoelectric microsensors. This has been achieved and demonstrated throughout the thesis by employing chemo-specific acoustic wave microsensors. For vapour phase assessment, quartz crystal microbalance, were coated with different organic polymer coatings and incorporated in a prototype infochemical communication system detecting encoded volatiles. For liquid phase assessment, shear horizontal surface acoustic wave (SH-SAW) microsensors were specifically designed and immobilised within Sf9 insect cells. This GPCR based whole cell biosensing system was then employed to detect ligand specific activations thus acting as a precursor to the development of a fully functionalised OR based signalling system, thus contributing to the growing field of communication and labelling technology.
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Lin, Jenn-Yu Gary. "Sensor compatible digitizing techniques for integrated microsensors." Diss., Georgia Institute of Technology, 1995. http://hdl.handle.net/1853/22215.

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Weltin, Andreas [Verfasser], and Gerald A. [Akademischer Betreuer] Urban. "Multiparametric, flexible microsensors for in vivo application." Freiburg : Universität, 2015. http://d-nb.info/1119327407/34.

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McCulloch, Scott. "Fibre optic microsensors for intracellular chemical measurements." Thesis, University of Strathclyde, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.248617.

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SAUSER, FRANK EDWARD. "PACKAGING OF PRESSURE MICROSENSORS FOR CLINICAL APPLICATIONS." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1109368416.

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Srinivas, T. A. S. "A free-standing microthermopile infrared detector." Thesis, University of Cambridge, 1992. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.259660.

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Lazaro, Orlando. "CMOS inductively coupled power receiver for wireless microsensors." Diss., Georgia Institute of Technology, 2014. http://hdl.handle.net/1853/51874.

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This research investigates how to draw energy from a distant emanating and alternating (i.e., AC) magnetic source and deliver it to a battery (i.e., DC). The objective is to develop, design, simulate, build, test, and evaluate a CMOS charger integrated circuit (IC) that wirelessly charges the battery of a microsystem. A fundamental challenge here is that a tiny receiver coil only produces mV's of AC voltage, which is difficult to convert into DC form. Although LC-boosted diode-bridge rectifiers in the literature today extract energy from similar AC sources, they can do so only when AC voltages are higher than what miniaturized coils can produce, unless tuned off-chip capacitors are available, which counters the aim of integration. Therefore, rather than rectify the AC voltage, this research proposes to rectify the current that the AC voltage induces in the coil. This way, the system can still draw power from voltages that fall below the inherent threshold limit of diode-bridge rectifiers. Still, output power is low because, with these low currents, small coils can only extract a diminutive fraction of the magnetic energy available, which is why investing battery energy is also part of this research. Ultimately, the significance of increasing the power that miniaturized platforms can output is higher integration and functionality of micro-devices, like wireless microsensors and biomedical implants.
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Cho, SeongHwan 1974. "Energy efficient RF communication systems for wireless microsensors." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/29240.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.
Includes bibliographical references (p. 131-137).
Emerging distributed wireless microsensor networks will enable the reliable and fault tolerant monitoring of the environment. Microsensors are required to operate for years from a small energy source while maintaining a reliable communication link to the base station. In order to reduce the energy consumption of the sensor network, two aspects of the system design hierarchy are explored: design of the communication protocol and implementation of the RF transmitter. In the first part of the thesis, energy efficient communication protocols for a coordinated static sensor network are proposed. A detailed communication energy model, obtained from measurements, is introduced that incorporates the non-ideal behavior of the physical layer electronics. This includes the frequency errors and start-up energy costs of the radio, which dominate energy consumption for short packet, low duty cycle communication. Using this model, various communication protocols are proposed from an energy perspective, such as MAC protocols, bandwidth allocation methods and modulation schemes. In the second part of the thesis, design methodologies for an energy efficient transmitter are presented for a low power, fast start-up and high data rate radio.
(cont.) The transmitter is based on a [Epsilon]-[Delta] fractional-N synthesizer that exploits trade-offs between the analog and digital components to reduce the power consumption. The transmitter employs closed loop direct VCO modulation for high data rate FSK modulation and a variable loop bandwidth technique to achieve fast start-up time. A prototype transmitter that demonstrates these techniques is implemented using 0.25[mu]m CMOS. The test chip achieves 20[mu]s is start-up time with an effective data rate of 2.5Mbps while consuming 22mW.
by SeongHwan Cho.
Ph.D.
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Books on the topic "Microsensors"

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S, Muller Richard, and IEEE Electron Devices Society, eds. Microsensors. New York: IEEE Press, 1991.

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Elwenspoek, Miko. Mechanical Microsensors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001.

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Elwenspoek, Miko, and Remco Wiegerink. Mechanical Microsensors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-662-04321-9.

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Microsensors: Principles and applications. Chichester: Wiley, 1994.

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Zentner, Lena, and Steffen Strehle, eds. Microactuators, Microsensors and Micromechanisms. Cham: Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-61652-6.

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Fouletier, Jacques, and Pierre Fabry, eds. Chemical and Biological Microsensors. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2013. http://dx.doi.org/10.1002/9781118603871.

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Pandey, Ashok Kumar, Prem Pal, Nagahanumaiah, and Lena Zentner, eds. Microactuators, Microsensors and Micromechanisms. Cham: Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-20353-4.

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Kottapalli, Ajay Giri Prakash, Mohsen Asadnia, Jianmin Miao, and Michael S. Triantafyllou. Biomimetic Microsensors Inspired by Marine Life. Cham: Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-47500-4.

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Jacques, Fouletier, and Fabry Pierre, eds. Chemical and biological microsensors: Applications in fluid media. Hoboken: ISTE Ltd/John Wiley, 2009.

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Webster, John G. Capacitive microsensors for biomedical applications - drug infusion systems. 2nd ed. Hoboken, NJ: Wiley-Interscience, 2006.

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Book chapters on the topic "Microsensors"

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Gardner, Julian W., Vijay K. Varadan, and Osama O. Awadelkarim. "Microsensors." In Microsensors, MEMS, and Smart Devices, 227–302. West Sussex, England: John Wiley & Sons, Ltd,., 2013. http://dx.doi.org/10.1002/9780470846087.ch8.

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Gardner, Julian W., Vijay K. Varadan, and Osama O. Awadelkarim. "IDT Microsensors." In Microsensors, MEMS, and Smart Devices, 359–96. West Sussex, England: John Wiley & Sons, Ltd,., 2013. http://dx.doi.org/10.1002/9780470846087.ch13.

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Laermer, Franz. "Mechanical Microsensors." In MEMS: A Practical Guide to Design, Analysis, and Applications, 523–66. Berlin, Heidelberg: Springer Berlin Heidelberg, 2006. http://dx.doi.org/10.1007/978-3-540-33655-6_10.

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Bartelt, H. "Optical Microsensors." In Sensors, 259–74. Weinheim, Germany: Wiley-VCH Verlag GmbH, 2008. http://dx.doi.org/10.1002/9783527620180.ch8.

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Gardner, Julian W., Vijay K. Varadan, and Osama O. Awadelkarim. "MEMS-IDT Microsensors." In Microsensors, MEMS, and Smart Devices, 397–416. West Sussex, England: John Wiley & Sons, Ltd,., 2013. http://dx.doi.org/10.1002/9780470846087.ch14.

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Tomaszewski, Daniel, Michał Zaborowski, Krzysztof Kucharski, Jacek Marczewski, Krzysztof Domański, Magdalena Ekwińska, Paweł Janus, et al. "SOI-Based Microsensors." In Functional Nanomaterials and Devices for Electronics, Sensors and Energy Harvesting, 389–415. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-08804-4_18.

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Vöelklein, Friedemann. "Thermal-Based Microsensors." In MEMS: A Practical Guide to Design, Analysis, and Applications, 229–79. Berlin, Heidelberg: Springer Berlin Heidelberg, 2006. http://dx.doi.org/10.1007/978-3-540-33655-6_5.

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Schmidt, Martin A., and Roger T. Howe. "Silicon Resonant Microsensors." In Ceramic Engineering and Science Proceedings, 1019–34. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2008. http://dx.doi.org/10.1002/9780470320419.ch3.

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Chang, Shih-Chia, and David B. Hicks. "Tin Oxide Microsensors." In ACS Symposium Series, 58–70. Washington, DC: American Chemical Society, 1986. http://dx.doi.org/10.1021/bk-1986-0309.ch003.

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Gerblinger, J., K. H. Haerdtl, H. Meixner, and Robert Aigner. "High-Temperature Microsensors." In Sensors, 181–219. Weinheim, Germany: Wiley-VCH Verlag GmbH, 2008. http://dx.doi.org/10.1002/9783527620180.ch6.

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Conference papers on the topic "Microsensors"

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Seo, Young Ho, Ki-Ho Han, and Young-Ho Cho. "Design, Fabrication and Characterization of a New Magnetic Microsensor Using Plasma Hall Effect." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1080.

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Abstract This paper is the first attempt to use the plasma Hall effect for magnetic field detection. The plasma Hall microsensor measures the Hall voltage induced by AC plasma electrons. In a theoretical analysis, we develop an analytical model of the plasma Hall sensor in order to express the plasma Hall voltage as a function of electrode geometry, magnetic field, plasma discharge field and chamber pressure. On this basis, we have designed and fabricated a new class of magnetic microsensors using AC neon plasma. In the experimental study, we have measured the plasma Hall voltage for varying five different conditions, including the frequency and magnitude of magnetic field, the frequency and magnitude of plasma discharge voltage, and the neon pressure. The plasma Hall microsensors show a magnetic field sensitivity of 8.87±0.18mvV/G with 4.48% nonlinearity. The experimental results agree well with those estimated from the theoretical analysis, thus verifying the feasibility of the plasma Hall device for a new class of magnetic microsensor.
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"Microsensors." In 2012 International Semiconductor Conference (CAS 2012). IEEE, 2012. http://dx.doi.org/10.1109/smicnd.2012.6400672.

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"Microsensors." In 2006 International Semiconductor Conference. IEEE, 2006. http://dx.doi.org/10.1109/smicnd.2006.283963.

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S. Cumming, David R., Paul A. Hammond, and Mark J. Milgrew. "Integrated Microsensors." In 2004 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2004. http://dx.doi.org/10.7567/ssdm.2004.i-4-1.

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"Microsensors and microactuators." In IECON 2012 - 38th Annual Conference of IEEE Industrial Electronics. IEEE, 2012. http://dx.doi.org/10.1109/iecon.2012.6389262.

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Bult, K., A. Burstein, D. Chang, M. Dong, M. Fielding, E. Kruglick, J. Ho, et al. "Wireless Ingetrated Microsensors." In 1996 Solid-State, Actuators, and Microsystems Workshop. San Diego, CA USA: Transducer Research Foundation, Inc., 1996. http://dx.doi.org/10.31438/trf.hh1996.47.

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"Session S - Microsensors." In 2004 International Semiconductor Conference. CAS 2004 Proceedings. IEEE, 2004. http://dx.doi.org/10.1109/smicnd.2004.1402854.

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"Session Ms: Microsensors." In 2011 International Semiconductor Conference (CAS 2011). IEEE, 2011. http://dx.doi.org/10.1109/smicnd.2011.6095731.

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"Microsensors and microsystems." In 2012 International Semiconductor Conference (CAS 2012). IEEE, 2012. http://dx.doi.org/10.1109/smicnd.2012.6400648.

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"Session Ms: Microsensors." In 2016 International Semiconductor Conference (CAS). IEEE, 2016. http://dx.doi.org/10.1109/smicnd.2016.7783044.

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Reports on the topic "Microsensors"

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ADKINS, DOUGLAS R., RAYMOND H. BYRNE, EDWIN J. HELLER, and JIMMIE V. WOLF. Integrated Microsensors for Autonomous Microrobots. Office of Scientific and Technical Information (OSTI), February 2003. http://dx.doi.org/10.2172/808611.

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Tai, Yu-Chong. Microsensors for Turbulent Flow Diagnostics. Fort Belvoir, VA: Defense Technical Information Center, July 1995. http://dx.doi.org/10.21236/ada299481.

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Overmyer, Donald L., Michael P. Siegal, Alan W. Staton, Paula Polyak Provencio, and William Graham Yelton. Nanoporous-carbon adsorbers for chemical microsensors. Office of Scientific and Technical Information (OSTI), November 2004. http://dx.doi.org/10.2172/920117.

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Edward G. Gatliff, Ph D., Ph D. Laura R. Skubal, and Ph D. Michael C. Vogt. Monitoring Volatile Organic Tank Waste Using Cermet Microsensors. Office of Scientific and Technical Information (OSTI), March 2006. http://dx.doi.org/10.2172/877280.

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Lavery, John. Data Fusion in Large Arrays of Microsensors (Sensorweb). Fort Belvoir, VA: Defense Technical Information Center, September 1999. http://dx.doi.org/10.21236/ada393392.

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CASALNUOVO, STEPHEN A., GREGORY CHARLES ASON, EDWIN J. HELLER, VINCENT M. HIETALA, ALBERT G. BACA, and S. L. HIETALA. The development of integrated chemical microsensors in GaAs. Office of Scientific and Technical Information (OSTI), November 1999. http://dx.doi.org/10.2172/750935.

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Li, DeQuan. Cyclodextrin-based chemical microsensors for Volatile Organic Compounds (VOCs). Office of Scientific and Technical Information (OSTI), December 1998. http://dx.doi.org/10.2172/562505.

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Cohen, Daniel A. Optical Properties of Bound Antigen Monolayers for Biomolecular Microsensors. Fort Belvoir, VA: Defense Technical Information Center, February 2004. http://dx.doi.org/10.21236/ada421593.

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Blatt, Stephen R., Douglas S. Deadrick, Robert J. Nation, and William C. Mackie. Classification and Location of Ground Vehicles using Networked Microsensors. Fort Belvoir, VA: Defense Technical Information Center, January 1999. http://dx.doi.org/10.21236/ada385476.

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Grate, Jay W., and D. A. Nelson. Sorptive Polymers and Photopatterned Films for Gas Phase Chemical Microsensors and Arrays. Office of Scientific and Technical Information (OSTI), December 2002. http://dx.doi.org/10.2172/15010066.

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You might also be interested in the extended bibliographies on the topic 'Microsensors' for particular source types:
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