Relevant bibliographies by topics / Micromachined Probe

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'Micromachined Probe'

Author: Grafiati
Published: 4 June 2021
Last updated: 5 February 2022

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Journal articles on the topic "Micromachined Probe"

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Genolet, G., M. Despont, P. Vettiger, and N. F. de Rooij. "Micromachined Photoplastic Probes for Scanning Probe Microscopy." Sensors Update 9, no. 1 (May 2001): 3–19. http://dx.doi.org/10.1002/1616-8984(200105)9:1<3::aid-seup3>3.0.co;2-u.

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Legros, Mathieu, Cyril Meynier, Guillaume Ferin, and Rémi Dufait. "Micromachined probe performance assessment." Journal of the Acoustical Society of America 123, no. 5 (May 2008): 3647. http://dx.doi.org/10.1121/1.2934925.

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Abraham, Michael, W. Ehrfeld, Manfred Lacher, Karsten Mayr, Wilfried Noell, Peter Güthner, and J. Barenz. "Micromachined aperture probe tip for multifunctional scanning probe microscopy." Ultramicroscopy 71, no. 1-4 (March 1998): 93–98. http://dx.doi.org/10.1016/s0304-3991(97)00114-9.

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Noell, W., M. Abraham, K. Mayr, A. Ruf, J. Barenz, O. Hollricher, O. Marti, and P. Güthner. "Micromachined aperture probe tip for multifunctional scanning probe microscopy." Applied Physics Letters 70, no. 10 (March 10, 1997): 1236–38. http://dx.doi.org/10.1063/1.118540.

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Beiley, M., J. Leung, and S. S. Wong. "A micromachined array probe card-characterization." IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B 18, no. 1 (1995): 184–91. http://dx.doi.org/10.1109/96.365507.

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Jiang, Senlin, Dacheng Zhang, Longtao Lin, Zhenchuan Yang, and Guizhen Yan. "Silicon probe for micromachined surface profilers." Micro & Nano Letters 6, no. 7 (2011): 490. http://dx.doi.org/10.1049/mnl.2011.0128.

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Ono, Takahito, Phan Ngoc Minh, Dong-Weon Lee, and Masayoshi Esashi. "Micromachined Probe for High Density Data Storage." Review of Laser Engineering 29, Supplement (2001): S11—S12. http://dx.doi.org/10.2184/lsj.29.supplement_s11.

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Davis, R. C., C. C. Williams, and P. Neuzil. "Micromachined submicrometer photodiode for scanning probe microscopy." Applied Physics Letters 66, no. 18 (May 1995): 2309–11. http://dx.doi.org/10.1063/1.114223.

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Beiley, M., J. Leung, and S. S. Wong. "A micromachined array probe card-fabrication process." IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B 18, no. 1 (1995): 179–83. http://dx.doi.org/10.1109/96.365506.

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ITOH, Toshihiro, Kenichi KATAOKA, and Tadatomo SUGA. "Applicability of Fritting Contacts to Micromachined Probe Cards." Journal of the Japan Society for Precision Engineering 67, no. 8 (2001): 1239–43. http://dx.doi.org/10.2493/jjspe.67.1239.

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Dissertations / Theses on the topic "Micromachined Probe"

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Rosamond, Mark. "Development and testing of a micromachined probe card." Thesis, Durham University, 2009. http://etheses.dur.ac.uk/1957/.

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This thesis is concerned with the design, fabrication and testing of micro scale probes. The probes were designed to act as temporary electrical connections to allow wafer level testing of integrated circuits. The work initially focused on the creation of free standing nickel cantilevers, angled up from the substrate with probe tips at the free end. These were fabricated using a novel method, combining pseudo grey scale lithography and thick photoresist sacrificial layers. Detailed analysis of the fabrication method, in particular the resist processing and lithography was undertaken and the limitations of the method explored.
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Brook, Alexander J. "Micromachined III-V cantilevers for AFM-guided scanning Hall probe microscopy." Thesis, University of Bath, 2003. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.425887.

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Chiang, Franklin Changta. "Micromachined probes for laboratory plasmas." Diss., Restricted to subscribing institutions, 2009. http://proquest.umi.com/pqdweb?did=1835418691&sid=1&Fmt=2&clientId=1564&RQT=309&VName=PQD.

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Torun, Hamdi. "Micromachined membrane-based active probes for biomolecular force spectroscopy." Diss., Georgia Institute of Technology, 2010. http://hdl.handle.net/1853/39638.

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Atomic force microscope (AFM) is an invaluable tool for measurement of pico-Newton to nano-Newton levels of interaction forces in liquid. As such, it is widely used to measure single-molecular interaction forces through dynamic force spectroscopy. In this technique, the interaction force spectra between a specimen on the sharp tip of the cantilever and another specimen on the substrate is measured by repeatedly moving the cantilever in and out of contact with the substrate. By varying the loading rate and measuring the bond rupture force or bond lifetime give researchers information about the strength and dissociation rates of non-covalent bonds, which in turn determines the energy barriers to overcome. Commercially available cantilevers can resolve interaction forces as low as 5 pN with 1 kHz bandwidth in fluid. This resolution can be improved to 1 pN by using smaller cantilevers at the expense of microfabrication constraints and sophisticated detection systems. The pulling speed of the cantilever, which determines the loading rate of the bonds, is limited to the point where the hydrodynamic drag force becomes comparable to the level of the molecular interaction force. This level is around 10 um/s for most cantilevers while higher pulling speeds are required for complete understanding of force spectra. Thus, novel actuators that allow higher loading rates with minimal hydrodynamic drag forces on the cantilevers, and fast, sensitive force sensors with simple detection systems are highly desirable. This dissertation presents the research efforts for the development of membrane-based active probe structures with electrostatic actuation and integrated diffraction-based optical interferometric force detection for single-molecular force measurements. Design, microfabrication and characterization of the probes are explained in detail. A setup including optics and electronics for experimental characterization and biological experiments with the probes membranes is also presented. Finally, biological experiments are included in this dissertation. The "active" nature of the probe is because of the integrated, parallel-plate type electrostatic actuator. The actuation range of the membrane is controlled with the gap height between the membrane and the substrate. Within this range it is possible to actuate the membrane fast, with a speed limited by the membrane dynamics with negligible hydrodynamic drag. Actuating these membrane probes and using a cantilever coupled to the membrane, fast pulling experiments with an order of magnitude faster than achieved by regular AFM systems are demonstrated. The displacement noise spectral density for the probe was measured to be below 10 fm/rtHz for frequencies as low as 3 Hz with differential readout scheme. This noise floor provides a force sensitivity of 0.3 - 3 pN with 1 kHz bandwidth using membranes with spring constants of 1 - 10 N/m. This low inherent noise has a potential to probe wide range of biomolecules. The probes have been demonstrated for fast-pulling and high-resolution force sensing. Feasibility for high throughput parallel operation has been explored. Unique capabilities of the probes such as electrostatic spring constant tuning and thermal drift cancellation in AFM are also presented in this dissertation.
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Bicen, Baris. "Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback." Diss., Georgia Institute of Technology, 2010. http://hdl.handle.net/1853/41065.

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Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure ports. Novel, micromachined biomimetic microphone diaphragms are shown to provide high sensitivity to pressure gradients on one side of the diaphragm with low thermal mechanical noise. These structures have a dominant mode shape with see-saw like motion in the audio band, responding to pressure gradients as well as spurious higher order modes sensitive to pressure. In this dissertation, integration of a diffraction based optical detection method with these novel diaphragm structures to implement a low noise optical pressure gradient microphone is described and experimental characterization results are presented, showing 36 dBA noise level with 1mm port spacing, nearly an order of magnitude better than the current gradient microphones. The optical detection scheme also provides electrostatic actuation capability from both sides of the diaphragm separately which can be used for active force feedback. A 4-port electromechanical equivalent circuit model of this microphone with optical readout is developed to predict the overall response of the device to different acoustic and electrostatic excitations. The model includes the damping due to complex motion of air around the microphone diaphragm, and it calculates the detected optical signal on each side of the diaphragm as a combination of two separate dominant vibration modes. This equivalent circuit model is verified by experiments and used to predict the microphone response with different force feedback schemes. Single sided force feedback is used for active damping to improve the linearity and the frequency response of the microphone. Furthermore, it is shown that using two sided force feedback one can significantly suppress or enhance the desired vibration modes of the diaphragm. This approach provides an electronic means to tailor the directional response of the microphones, with significant implications in device performance for various applications. As an example, the use of this device as a particle velocity sensor for sound intensity and sound power measurements is investigated. Without force feedback, the gradient microphone provides accurate particle velocity measurement for frequencies below 2 kHz, after which the pressure response of the second order mode becomes significant. With two-sided force feedback, the calculations show that this upper frequency limit may be increased to 10 kHz. This improves the pressure residual intensity index by more than 15 dB in the 50 Hz-10 kHz range, matching the Class I requirements of IEC 1043 standards for intensity probes without any need for multiple spacers.
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Boulmé, Audren. "Conception et caractérisation de sondes cMUT large bande pour l'imagerie conventionnelle et l'évaluation du tissu osseux." Thesis, Tours, 2013. http://www.theses.fr/2013TOUR3319/document.

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Les transducteurs ultrasonores capacitifs micro-usinés (cMUT : capacitive Micromachined Ultrasound Transducers) apparaissent, au vu de leur maturité croissante, comme une alternative de plus en plus viable à la technologie piézoélectrique. Caractérisés par une large bande passante et une large directivité, ces transducteurs sont des solutions intéressantes pour le développement de sondes ultrasonores « exotiques » dont les spécifications sont difficilement atteignables en technologie piézoélectrique. C'est dans ce contexte et fort de l'expérience acquise par notre laboratoire sur cette technologie pendant plus d'une dizaine d'années, que s'est inscrit ce travail de thèse. L'originalité du travail rapporté ici est d'aller de l'analyse du comportement général des barrettes cMUT jusqu'à un exemple précis de conception de sonde cMUT pour l'évaluation du tissu osseux. Des outils de modélisation précis et rapides, basés sur l'introduction de conditions de périodicité, ont été développés. Plusieurs modèles ont ainsi été mis en place afin d'adapter la stratégie de modélisation à la topologie du dispositif cMUT à modéliser : cellule isolée, colonne de cellules, matrice de cellules et élément de barrette. Ces modèles ont permis d'étudier le comportement des éléments de barrette cMUT et d'améliorer notre connaissance sur les mécanismes physiques mis en jeu. De cette façon, l'origine des effets de baffle, problème récurrent du comportement des barrettes cMUT, a clairement été interprété par l'intermédiaire d'une analyse modale. Des solutions ont ainsi été identifiées et proposées afin d'optimiser le comportement des barrettes cMUT, de façon à réduire la présence des effets de baffle et à augmenter leur bande passante. Le développement d'une barrette cMUT dédiée à l'évaluation du tissu osseux est présenté dans sa totalité, afin d'illustrer les différents aspects liés à la conception d'une sonde de cette technologie. Un travail original de caractérisation a été réalisé sur cette barrette, afin d'estimer l'homogénéité inter-cellules à l'échelle de l'élément et l'homogénéité inter-éléments à l'échelle de la barrette. Enfin, une confrontation a été réalisée avec une sonde PZT de même topologie sur plusieurs fantômes osseux. Il a ainsi été démontré que la sonde cMUT permettait la détection d'un plus grand nombre de modes guidés, et par conséquent, une meilleure évaluation du tissu osseux
Following recent advances, the capacitive Micromachined Ultrasound Transducers (cMUT) technology seems to be a good alternative to the piezoelectric technology. For specific applications, the requirements and specifications of the probe are sometimes difficult to obtain with the traditional PZT technology. The cMUT technology, with both large bandwidth and angular directivity, can be an interesting way to overcome these limitations. This PhD has been carried out in this context, in a laboratory which has nearly 10 years of experience in the field of cMUT technology. The originality of the work sustained in this PhD is that it covers the cMUT technology, from general aspects dealing of modeling and characterization up to a complete example of cMUT-based probe applied to the assessment of cortical bone. Fast and accurate modeling tools, based on periodicity conditions, have been developed. Several models have been proposed to match the modeling strategy to the topology of the cMUT array : isolated cell, columns of cells, 2-D matrix of cells and array element. These models have been used to analyze the cMUT array behavior and to understand how mutual couplings between cMUTs impact the response of one element. Origins of the baffle effect, well-known as a recurrent problem in cMUT probe, have been explained using an original method based on the normal mode decomposition of the radiated pressure field. Thus, solutions have been identified and tested to optimize the cMUT frequency response, i.e. to increase the bandwidth, and to suppress parasitic disturbances linked to baffle effect in the electroacoustic response. The development of a dedicated cMUT array for the assessment of bone tissue is accurately detailed in the manuscript, including description of the design rules, fabrication steps and packaging procedure. An original characterization work has been carried out in order to check the device homogeneity, first from cell to cell and then from element to element. Finally, a comparison with a PZT probe with the same topology has been performed on bone mimicking phantom. Nice results has been obtained, showing that cMUT probe allows detecting higher number of guided modes in the cortical shell, and consequently, improving the cortical bone assessment
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Yapici, Murat K. "Development of Micromachined Probes for Bio-Nano Applications." 2009. http://hdl.handle.net/1969.1/ETD-TAMU-2009-08-6966.

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The most commonly known macro scale probing devices are simply comprised of metallic leads used for measuring electrical signals. On the other hand, micromachined probing devices are realized using microfabrication techniques and are capable of providing very fine, micro/nano scale interaction with matter; along with a broad range of applications made possible by incorporating MEMS sensing and actuation techniques. Micromachined probes consist of a well-defined tip structure that determines the interaction space, and a transduction mechanism that could be used for sensing a change, imparting external stimuli or manipulating matter. Several micromachined probes intended for biological and nanotechnology applications were fabricated, characterized and tested. Probes were developed under two major categories. The first category consists of Micro Electromagnetic Probes for biological applications such as single cell, particle, droplet manipulation and neuron stimulation applications; whereas the second category targets novel Scanning Probe topologies suitable for direct nanopatterning, variable resolution scanning probe/dip-pen nanolithography, and biomechanics applications. The functionality and versatility of micromachined probes for a broad range of micro and nanotechnology applications is successfully demonstrated throughout the five different probes/applications that were studied. It is believed that, the unique advantages of precise positioning capability, confinement of interaction as determined by the probe tip geometry, and special sensor/actuator mechanisms incorporated through MEMS technologies will render micromachined probes as indispensable tools for microsystems and nanotechnology studies.
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Book chapters on the topic "Micromachined Probe"

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Blanc, N., J. Brugger, and N. F. Rooij. "Electrostatically Actuated Silicon Micromachined Sensors for Scanning Force Microscopy." In Forces in Scanning Probe Methods, 79–84. Dordrecht: Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0049-6_6.

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Ono, Takahito, Xinxin Li, Dong-Weon Lee, Hidetoshi Miyashita, and Masayoshi Esashi. "Nanometric Sensing and Processing with Micromachined Functional Probe." In Transducers ’01 Eurosensors XV, 1034–37. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_244.

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DelRio, Frank W., Martin L. Dunn, and Maarten P. de Boer. "Van der Waals and Capillary Adhesion of Polycrystalline Silicon Micromachined Surfaces." In Scanning Probe Microscopy in Nanoscience and Nanotechnology 3, 363–93. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-25414-7_14.

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Kawakatsu, Hideki. "Expanding the Field of Application of Scanning Probe Microscopy." In Micromachines as Tools for Nanotechnology, 131–51. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003. http://dx.doi.org/10.1007/978-3-642-55503-9_6.

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Takahashi, Takuji. "Nanoscale Characterization of Nanostructures and Nanodevices by Scanning Probe Microscopy." In Micromachines as Tools for Nanotechnology, 191–211. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003. http://dx.doi.org/10.1007/978-3-642-55503-9_8.

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Hagleitner, Christoph, Tony Bonaccio, Hugo Rothuizen, Jan Lienemann, Dorothea Wiesmann, Giovanni Cherubini, Jan G. Korvink, and Evangelos Eleftheriou. "Analog Front End for a Micromachined Probe Storage Device." In Circuits at the Nanoscale, 587–607. CRC Press, 2018. http://dx.doi.org/10.1201/9781315218762-31.

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Hagleitner, Christoph, Tony Bonaccio, Hugo Rothuizen, Jan Lienemann, Dorothea Wiesmann, Giovanni Cherubini, Jan Korvink, and Evangelos Eleftheriou. "Analog Front End for a Micromachined Probe Storage Device." In Circuits at the Nanoscale, 623–43. CRC Press, 2008. http://dx.doi.org/10.1201/9781420070637.ch32.

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Conference papers on the topic "Micromachined Probe"

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Srinivasan, Pradeep, Fred R. Beyette, Jr., and Ian Papautsky. "Micromachined near-field probe arrays." In Micromachining and Microfabrication, edited by James H. Smith. SPIE, 2003. http://dx.doi.org/10.1117/12.472895.

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Abraham, Michael, Wolfgang Ehrfeld, Manfred Lacher, Othmar Marti, Karsten Mayr, Wilfried Noell, Peter Guethner, and Joachim Barenz. "Micromachined aperture probe tip for multifunctional scanning probe microscopy." In Lasers and Optics in Manufacturing III, edited by Olivier M. Parriaux, Ernst-Bernhard Kley, Brian Culshaw, and Magnus Breidne. SPIE, 1997. http://dx.doi.org/10.1117/12.281234.

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Abraham, Michael, Wolfgang Ehrfeld, Manfred Lacher, Karsten Mayr, Wilfried Noell, Peter Guethner, and Joachim Barenz. "Micromachined aperture probe tip for multifunctional scanning probe microscopy." In Photonics West '97, edited by Terry A. Michalske and Mark A. Wendman. SPIE, 1997. http://dx.doi.org/10.1117/12.271226.

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Yapici, M. K., A. E. Ozmetin, J. Zou, and D. G. Naugle. "Experimental Characterization of Micromachined Electromagnetic Probes using Scanning Hall Probe Microscopy." In TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2007. http://dx.doi.org/10.1109/sensor.2007.4300645.

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Bauwens, Matthew F., Naser Alijabbari, Arthur W. Lichtenberger, N. Scott Barker, and Robert M. Weikle. "A 1.1 THz micromachined on-wafer probe." In 2014 IEEE/MTT-S International Microwave Symposium - MTT 2014. IEEE, 2014. http://dx.doi.org/10.1109/mwsym.2014.6848607.

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Wang, Fuyin, Zhengzheng Shao, Zhengliang Hu, Hong Luo, Jiehui Xie, and Yongming Hu. "Micromachined fiber optic Fabry-Perot underwater acoustic probe." In 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), edited by Tianchun Ye, A. G. Poleshchuk, and Song Hu. SPIE, 2014. http://dx.doi.org/10.1117/12.2067784.

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Kim, Byungki, Byung Hyung Kwak, and Faize Jamil. "High-speed AFM probe with micromachined membrane tip." In NanoScience + Engineering, edited by Michael T. Postek and John A. Allgair. SPIE, 2008. http://dx.doi.org/10.1117/12.795050.

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Yi, Ming, Hrishikesh V. Panchawagh, Roop L. Mahajan, Zhengjun Liu, and S. Nahum Goldberg. "Micromachined Electrical Conductivity Probe for RF Ablation of Tumors." In ASME 2005 International Mechanical Engineering Congress and Exposition. ASMEDC, 2005. http://dx.doi.org/10.1115/imece2005-82064.

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RF ablation is an important technique in cancer treatment. It has been proposed that the effective area treated via RF ablation can be increased by increasing the local electrical conductivity. This is achieved by injection of NaCl solution into the tissue. For an accurate and effective RF ablation treatment using this new method, it is necessary to measure the local electrical conductivity, which varies spatially due to diffusion of sodium chloride. In this paper, we propose a micro probe to measure the local tissue electrical conductivity. The probe consists of two in-plane miniature electrodes separated by a small gap. When the electrodes are in contact with the tissue, the electrical resistance across them can be used to calculate the electrical conductivity. The probe is fabricated by standard photolithography techniques. The substrate material is polyimide and the electrodes are made of gold. A four-electrode probe is used to calibrate the new electrical conductivity micro probe using different concentrations of saline water. The resistance measurements are carried out using an impedance analyzer on different frequencies. The frequency of choice for RF ablation of tumors is 500k Hz and is the one selected for calibration and testing. The micro-probe calibration is then verified by measuring electrical conductivity of a phantom and comparing it with the result measured by the four-electrode probe. Finally, some in vivo tests are performed and the results are compared with literate data.
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Yu, Qiang, Matthew Bauwens, Chunhu Zhang, Arthur W. Lichtenberger, Robert M. Weikle, and N. Scott Barker. "Integrated strain sensor for micromachined terahertz on-wafer probe." In 2013 IEEE/MTT-S International Microwave Symposium - MTT 2013. IEEE, 2013. http://dx.doi.org/10.1109/mwsym.2013.6697634.

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Topfer, Fritzi, Lennart Emtestam, and Joachim Oberhammer. "Dermatological verification of micromachined millimeter-wave skin-cancer probe." In 2014 IEEE/MTT-S International Microwave Symposium - MTT 2014. IEEE, 2014. http://dx.doi.org/10.1109/mwsym.2014.6848502.

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