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Journal articles on the topic 'Microfabrication'

To see the other types of publications on this topic, follow the link: Microfabrication.

Author: Grafiati

Published: 4 June 2021

Last updated: 31 August 2024

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1

Wei, Peng, Ning Li, and Lishuang Feng. "A Type of Two-Photon Microfabrication System and Experimentations." ISRN Mechanical Engineering 2011 (January 26, 2011): 1–8. http://dx.doi.org/10.5402/2011/278095.

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After the femtosecond laser was invented, two-photon microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon microfabrication method.

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2

TANIGAWA, Hiroshi. "Semiconductor microfabrication technologies." Journal of the Japan Society for Precision Engineering 54, no. 9 (1988): 1651–55. http://dx.doi.org/10.2493/jjspe.54.1651.

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3

MATSUI, Shinji. "Electron beam microfabrication." Journal of the Japan Society for Precision Engineering 55, no. 2 (1989): 279–84. http://dx.doi.org/10.2493/jjspe.55.279.

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4

Weibel, Douglas B., Willow R. DiLuzio, and George M. Whitesides. "Microfabrication meets microbiology." Nature Reviews Microbiology 5, no. 3 (March 2007): 209–18. http://dx.doi.org/10.1038/nrmicro1616.

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5

Lutz, B. R., J. Chen, and D. T. Schwartz. "Microfluidics without microfabrication." Proceedings of the National Academy of Sciences 100, no. 8 (April 1, 2003): 4395–98. http://dx.doi.org/10.1073/pnas.0831077100.

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6

Deckman, H. W. "Microfabrication cellular phosphors." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 7, no. 6 (November 1989): 1832. http://dx.doi.org/10.1116/1.584675.

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7

FUJITA, Hiroyuki. "Microfabrication and Micromachines." Kobunshi 44, no. 4 (1995): 230–34. http://dx.doi.org/10.1295/kobunshi.44.230.

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8

Zhang, Jie, Bo-Ya Dong, Jingchun Jia, Lianhuan Han, Fangfang Wang, Chuan Liu, Zhong-Qun Tian, Zhao-Wu Tian, Dongdong Wang, and Dongping Zhan. "Electrochemical buckling microfabrication." Chemical Science 7, no. 1 (2016): 697–701. http://dx.doi.org/10.1039/c5sc02644j.

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Isotropic wet chemical etching can be controlled with a spatial resolution at the nanometer scale, especially for the repetitive microfabrication of hierarchical 3D μ-nanostructures on the continuously curved surface of functional materials.

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9

Shoji, Shuichi, and Masayoshi Esashi. "Microfabrication and microsensors." Applied Biochemistry and Biotechnology 41, no. 1-2 (April 1993): 21–34. http://dx.doi.org/10.1007/bf02918525.

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10

MORIMOTO, Mitsutaka. "Microfabrication for VLSI." Journal of the Society of Mechanical Engineers 92, no. 853 (1989): 1050–55. http://dx.doi.org/10.1299/jsmemag.92.853_1050.

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11

Gwozdz, P. S. "NSF Microfabrication Workshops." IEEE Transactions on Education 39, no. 2 (May 1996): 211–16. http://dx.doi.org/10.1109/13.502068.

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12

Rötting, O., W. Röpke, H. Becker, and C. Gärtner. "Polymer microfabrication technologies." Microsystem Technologies 8, no. 1 (March 1, 2002): 32–36. http://dx.doi.org/10.1007/s00542-002-0106-9.

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13

Gamo, Kenji. "Ion beam microfabrication." Vacuum 44, no. 11-12 (November 1993): 1089–94. http://dx.doi.org/10.1016/0042-207x(93)90329-9.

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14

Piyasena, Menake E., and Steven W. Graves. "The intersection of flow cytometry with microfluidics and microfabrication." Lab Chip 14, no. 6 (2014): 1044–59. http://dx.doi.org/10.1039/c3lc51152a.

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15

Wei, P., Yu Zhu, Q. F. Tan, G. H. Duan, and G. H. Gao. "Discussion on the Radial Superresolution of the Two-Photon Microfabrication." Key Engineering Materials 329 (January 2007): 601–6. http://dx.doi.org/10.4028/www.scientific.net/kem.329.601.

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In order to improve the radial superresolution of the two-photon microfabrication, the superresolution diffraction theory was introduced in detail. The theoretical analysis of the photosensitive resist based on the exciting power and concentration of free radical was given.. And the superresolution diffractive optical element was applied in the two-photon microfabrication system. Simulation results indicated that the radial superresolution of the two-photon microfabrication can be improved with the superresolution diffractive optical element.

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16

Morales-Carvajal, Paola M., Avra Kundu, Charles M. Didier, Cacie Hart, Frank Sommerhage, and Swaminathan Rajaraman. "Makerspace microfabrication of a stainless steel 3D microneedle electrode array (3D MEA) on a glass substrate for simultaneous optical and electrical probing of electrogenic cells." RSC Advances 10, no. 68 (2020): 41577–87. http://dx.doi.org/10.1039/d0ra06070d.

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Microfabrication and assembly of 3D MEA based on a glass-stainless steel platform is shown utilizing non-traditional “Makerspace Microfabrication” techniques featuring cost-effective, rapid fabrication and an assorted biocompatible material palette.

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17

Rodrigues, Raquel O., Rui Lima, Helder T. Gomes, and Adrián M. T. Silva. "Polymer microfluidic devices: an overview of fabrication methods." U.Porto Journal of Engineering 1, no. 1 (September 6, 2017): 67–79. http://dx.doi.org/10.24840/2183-6493_001.001_0007.

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The amount of applications associated with microfluidic devices is increasing since the introduction of Lab-on-a-chip devices in the 1990s, especially regarding biomedical and clinical fields. However, in order for this technology to leave the fundamental research and become a day-life technology (e.g., as point-of-care testing), it needs to be disposable and reasonably less expensive. Polymers, due to their several advantages, such as easier microfabrication and low-cost, fill these needs. Several methods are reported regarding microfabrication and, thus, the main aim of the present work is to provide an overview of the most relevant microfabrication techniques found in literature employing polymers, clarifying also the main advantages and disadvantages of each technique and especially considering their cost and time-consumption. Moreover, a future outlook of low-cost microfabrication techniques and standard methods is provided.

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18

KOMURO, Masanori. "Microfabrication Technology Using FIB." SHINKU 35, no. 5 (1992): 512–19. http://dx.doi.org/10.3131/jvsj.35.512.

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19

Koch, Brendan, Ilaria Rubino, Fu-Shi Quan, Bongyoung Yoo, and Hyo-Jick Choi. "Microfabrication for Drug Delivery." Materials 9, no. 8 (August 1, 2016): 646. http://dx.doi.org/10.3390/ma9080646.

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20

Fukuyama, Mao. "Let’s start microfabrication cheaply." Review of Polarography 65, no. 2 (October 17, 2019): 63–64. http://dx.doi.org/10.5189/revpolarography.65.63.

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21

Baxter, G. T., L. J. Bousse, T. D. Dawes, J. M. Libby, D. N. Modlin, J. C. Owicki, and J. W. Parce. "Microfabrication in silicon microphysiometry." Clinical Chemistry 40, no. 9 (September 1, 1994): 1800–1804. http://dx.doi.org/10.1093/clinchem/40.9.1800.

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Abstract Over the past 5 years, microphysiometry has proved an effective means for detecting physiological changes in cultured cells, particularly as a functional assay for the activation of many cellular receptors. To demonstrate the clinical relevance of this method, we have used it to detect bacterial antibiotic sensitivity and to discriminate between bacteriostatic and bacteriocidal concentrations. The light-addressable potentiometric sensor, upon which microphysiometry is based, is well suited for structural manipulations based on photolithography and micromachining, and we have begun to take advantage of this capability. We present results from a research instrument with eight separate assay channels on a 5-cm2 chip. We discuss the planned evolution of the technology toward high-through-put instruments and instruments capable of performing single-cell measurements.

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22

Kang, Inn-Kyu, Yoshihiro Ito, and Oh Hyeong Kwon. "Nano-/Microfabrication of Biomaterials." BioMed Research International 2014 (2014): 1–2. http://dx.doi.org/10.1155/2014/963972.

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23

Ciarlo, D. "Microfabrication techniques and applications." IEEE Potentials 9, no. 3 (October 1990): 13–16. http://dx.doi.org/10.1109/45.101393.

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24

Brittain, Scott, Karteri Paul, Xiao-Mei Zhao, and George Whitesides. "Soft lithography and microfabrication." Physics World 11, no. 5 (May 1998): 31–37. http://dx.doi.org/10.1088/2058-7058/11/5/30.

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25

BABOROWSKI, JACEK. "Microfabrication of Piezoelectric MEMS." Integrated Ferroelectrics 66, no. 1 (January 2004): 3–17. http://dx.doi.org/10.1080/10584580490894302.

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26

Tolfree, D. W. L. "Microfabrication using synchrotron radiation." Reports on Progress in Physics 61, no. 4 (April 1, 1998): 313–51. http://dx.doi.org/10.1088/0034-4885/61/4/001.

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27

Baborowski, J. "Microfabrication of Piezoelectric MEMS." Journal of Electroceramics 12, no. 1/2 (January 2004): 33–51. http://dx.doi.org/10.1023/b:jecr.0000034000.11787.90.

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28

Mukhopadhyay, Rajendrani. "Microfabrication with instant gratification." Analytical Chemistry 77, no. 17 (September 2005): 331 A. http://dx.doi.org/10.1021/ac0534632.

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29

ROUHI, A. MAUREEN. "MICROFABRICATION IN CELLULAR MILIEUS." Chemical & Engineering News 83, no. 40 (October 3, 2005): 46–47. http://dx.doi.org/10.1021/cen-v083n040.p046.

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30

Murray, AJ, and JJ Murray. "Microfabrication with ion beams." Vacuum 35, no. 10-11 (October 1985): 467–77. http://dx.doi.org/10.1016/0042-207x(85)90368-9.

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31

Madou, Marc J. "Solution to microfabrication challenge." Analytical and Bioanalytical Chemistry 379, no. 1 (May 1, 2004): 3. http://dx.doi.org/10.1007/s00216-004-2565-6.

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32

Van der Gaag, B. P., and A. Scherer. "Microfabrication below 10 nm." Applied Physics Letters 56, no. 5 (January 29, 1990): 481–83. http://dx.doi.org/10.1063/1.102772.

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33

Hoch, H. C., R. J. Bojko, G. L. Comeau, and E. A. Allen. "Integrating microfabrication and biology." IEEE Circuits and Devices Magazine 9, no. 1 (January 1993): 17–22. http://dx.doi.org/10.1109/101.180737.

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34

Moore, D. F., A. C. F. Hoole, and A. Heaver. "Microfabrication of freestanding microstructures." Microelectronic Engineering 21, no. 1-4 (April 1993): 459–62. http://dx.doi.org/10.1016/0167-9317(93)90110-q.

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35

Green, T. A. "Gold etching for microfabrication." Gold Bulletin 47, no. 3 (May 11, 2014): 205–16. http://dx.doi.org/10.1007/s13404-014-0143-z.

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36

Knitter, R., D. G�hring, P. Risthaus, and J. Hau�elt. "Microfabrication of ceramic microreactors." Microsystem Technologies 7, no. 3 (October 1, 2001): 85–90. http://dx.doi.org/10.1007/s005420100107.

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37

Carletti, E., T. Endogan, N. Hasirci, V. Hasirci, D. Maniglio, A. Motta, and C. Migliaresi. "Microfabrication of PDLLA scaffolds." Journal of Tissue Engineering and Regenerative Medicine 5, no. 7 (December 10, 2010): 569–77. http://dx.doi.org/10.1002/term.349.

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38

Rogers, John A. "Electrospray for Digital Microfabrication." NIP & Digital Fabrication Conference 22, no. 2 (January 1, 2006): 115. http://dx.doi.org/10.2352/issn.2169-4451.2006.22.2.art00037_3.

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39

Piqué, Alberto, Heungsoo Kim, Ray Auyeung, Jiwen Wang, Andrew Birnbaum, and Scott Mathews. "Laser-Based Digital Microfabrication." NIP & Digital Fabrication Conference 25, no. 1 (January 1, 2009): 394–97. http://dx.doi.org/10.2352/issn.2169-4451.2009.25.1.art00108_1.

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40

Niioka, Takuma, and Yasutaka Hanada. "Surface Microfabrication of Conventional Glass Using Femtosecond Laser for Microfluidic Applications." International Journal of Automation Technology 11, no. 6 (October 31, 2017): 878–82. http://dx.doi.org/10.20965/ijat.2017.p0878.

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Recently, a lot of attention has been paid to a single-cell analysis using microfluidic chips, since each cell is known to have several different characteristics. The microfluidic chip manipulates cells and performs high-speed and high-resolution analysis. In the meanwhile, femtosecond (fs) laser has become a versatile tool for the fabrication of microfluidic chips because the laser can modify internal volume solely at the focal area, resulting in three-dimensional (3D) microfabrication of glass materials. However, little research on surface microfabrication of materials using an fs laser has been conducted. Therefore, in this study, we demonstrate the surface microfabrication of a conventional glass slide using fs laser direct-writing for microfluidic applications. The fs laser modification, with successive wet etching using a diluted hydrofluoric (HF) acid solution, followed by annealing, results in rapid prototyping of microfluidics on a conventional glass slide for fluorescent microscopic cell analysis. Fundamental characteristics of the laser-irradiated regions in each experimental procedure were investigated. In addition, we developed a novel technique combining the fs laser direct-writing and the HF etching for high-speed and high-resolution microfabrication of the glass. After establishing the fs laser surface microfabrication technique, a 3D microfluidic chip was made by bonding the fabricated glass microfluidic chip with a polydimethylsiloxane (PDMS) polymer substrate for clear fluorescent microscopic observation in the microfluidics.

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41

Jang, Yeongseok, Jinmu Jung, and Jonghyun Oh. "Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip." Micromachines 14, no. 9 (September 4, 2023): 1736. http://dx.doi.org/10.3390/mi14091736.

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Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on. However, recent integration with biotechnologies has led to a wide expansion of microfabrication. In particular, many researchers studying pharmacology and pathology are very interested in producing in vitro models that mimic the actual intestine to study the effectiveness of new drug testing and interactions between organs. Various bio–microfabrication techniques have been developed while solving inherent problems when developing in vitro micromodels that mimic the real large intestine. This intensive review introduces various bio–microfabrication techniques that have been used, until recently, to realize two-dimensional and three-dimensional biomimetic experimental models. Regarding the topic of gut chips, two major review subtopics and two-dimensional and three-dimensional gut chips were employed, focusing on the membrane-based manufacturing process for two-dimensional gut chips and the scaffold-based manufacturing process for three-dimensional gut chips, respectively.

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42

Charmet, Rodrigues, Yildirim, Challa, Roberts, Dallmann, and Whulanza. "Low-Cost Microfabrication Tool Box." Micromachines 11, no. 2 (January 25, 2020): 135. http://dx.doi.org/10.3390/mi11020135.

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Microsystems are key enabling technologies, with applications found in almost every industrial field, including in vitro diagnostic, energy harvesting, automotive, telecommunication, drug screening, etc. Microsystems, such as microsensors and actuators, are typically made up of components below 1000 microns in size that can be manufactured at low unit cost through mass-production. Yet, their development for commercial or educational purposes has typically been limited to specialized laboratories in upper-income countries due to the initial investment costs associated with the microfabrication equipment and processes. However, recent technological advances have enabled the development of low-cost microfabrication tools. In this paper, we describe a range of low-cost approaches and equipment (below £1000), developed or adapted and implemented in our laboratories. We describe processes including photolithography, micromilling, 3D printing, xurography and screen-printing used for the microfabrication of structural and functional materials. The processes that can be used to shape a range of materials with sub-millimetre feature sizes are demonstrated here in the context of lab-on-chips, but they can be adapted for other applications. We anticipate that this paper, which will enable researchers to build a low-cost microfabrication toolbox in a wide range of settings, will spark a new interest in microsystems.

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43

ASAKAWA, KIYOSHI. "Microfabrication for optoelectronic integrated circuit." Journal of the Japan Society for Precision Engineering 53, no. 6 (1987): 861–64. http://dx.doi.org/10.2493/jjspe.53.861.

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44

Washio, Kunihiko. "Laser Microfabrication in Electronics Industry." IEEJ Transactions on Electronics, Information and Systems 123, no. 2 (2003): 185–91. http://dx.doi.org/10.1541/ieejeiss.123.185.

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45

KONDOH, Eiichi. "Supercritical Fluid Processing for Microfabrication." Journal of the Japan Society for Precision Engineering 86, no. 9 (September 5, 2020): 671–74. http://dx.doi.org/10.2493/jjspe.86.671.

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46

SANO, Hisatake. "Microfabrication and Plating. Photolithography. Etching." Journal of the Surface Finishing Society of Japan 46, no. 9 (1995): 784–88. http://dx.doi.org/10.4139/sfj.46.784.

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47

Patrick, Chris. "Seeing through transparent materials microfabrication." Scilight 2021, no. 32 (August 6, 2021): 321101. http://dx.doi.org/10.1063/10.0005872.

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48

Lu Libin, 卢立斌, 王海鹏 Wang Haipeng, 管迎春 Guan Yingchun, and 周伟 Zhou Wei. "Laser Microfabrication of Biomedical Devices." Chinese Journal of Lasers 44, no. 1 (2017): 0102005. http://dx.doi.org/10.3788/cjl201744.0102005.

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49

Jimin, Chen, and Zuo Tiechuan. "Laser microfabrication with metallic powder." Journal of Laser Applications 16, no. 4 (November 2004): 258–60. http://dx.doi.org/10.2351/1.1808770.

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50

Marder, Seth R., Jean-Luc Brédas, and Joseph W. Perry. "Materials for Multiphoton 3D Microfabrication." MRS Bulletin 32, no. 7 (July 2007): 561–65. http://dx.doi.org/10.1557/mrs2007.107.

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Two-photon/multiphoton lithography (MPL) has emerged as a versatile technique for the fabrication of complex 3D polymeric, hybrid organic/inorganic, and metallic structures. This article reviews some recent advances in the development of molecules and materials that enable two-photon and multiphoton 3D micro- and nanofabrication. Materials that exhibit high sensitivity for the generation of reactive intermediates are described, as are various materials systems that enable functional devices to be made and in some cases enable structures to be replicated. The combination of advances illustrates the opportunities for MPL to have a significant impact in the areas of photonics, microelectromechanical systems, and biomedical technologies.

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