Relevant bibliographies by topics / Microfabrication

Academic literature on the topic 'Microfabrication'

Author: Grafiati
Published: 4 June 2021
Last updated: 31 August 2024

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Journal articles on the topic "Microfabrication"

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Wei, Peng, Ning Li, and Lishuang Feng. "A Type of Two-Photon Microfabrication System and Experimentations." ISRN Mechanical Engineering 2011 (January 26, 2011): 1–8. http://dx.doi.org/10.5402/2011/278095.

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After the femtosecond laser was invented, two-photon microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon microfabrication method.
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TANIGAWA, Hiroshi. "Semiconductor microfabrication technologies." Journal of the Japan Society for Precision Engineering 54, no. 9 (1988): 1651–55. http://dx.doi.org/10.2493/jjspe.54.1651.

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MATSUI, Shinji. "Electron beam microfabrication." Journal of the Japan Society for Precision Engineering 55, no. 2 (1989): 279–84. http://dx.doi.org/10.2493/jjspe.55.279.

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Weibel, Douglas B., Willow R. DiLuzio, and George M. Whitesides. "Microfabrication meets microbiology." Nature Reviews Microbiology 5, no. 3 (March 2007): 209–18. http://dx.doi.org/10.1038/nrmicro1616.

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Lutz, B. R., J. Chen, and D. T. Schwartz. "Microfluidics without microfabrication." Proceedings of the National Academy of Sciences 100, no. 8 (April 1, 2003): 4395–98. http://dx.doi.org/10.1073/pnas.0831077100.

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Deckman, H. W. "Microfabrication cellular phosphors." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 7, no. 6 (November 1989): 1832. http://dx.doi.org/10.1116/1.584675.

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FUJITA, Hiroyuki. "Microfabrication and Micromachines." Kobunshi 44, no. 4 (1995): 230–34. http://dx.doi.org/10.1295/kobunshi.44.230.

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Zhang, Jie, Bo-Ya Dong, Jingchun Jia, Lianhuan Han, Fangfang Wang, Chuan Liu, Zhong-Qun Tian, Zhao-Wu Tian, Dongdong Wang, and Dongping Zhan. "Electrochemical buckling microfabrication." Chemical Science 7, no. 1 (2016): 697–701. http://dx.doi.org/10.1039/c5sc02644j.

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Isotropic wet chemical etching can be controlled with a spatial resolution at the nanometer scale, especially for the repetitive microfabrication of hierarchical 3D μ-nanostructures on the continuously curved surface of functional materials.
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Shoji, Shuichi, and Masayoshi Esashi. "Microfabrication and microsensors." Applied Biochemistry and Biotechnology 41, no. 1-2 (April 1993): 21–34. http://dx.doi.org/10.1007/bf02918525.

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MORIMOTO, Mitsutaka. "Microfabrication for VLSI." Journal of the Society of Mechanical Engineers 92, no. 853 (1989): 1050–55. http://dx.doi.org/10.1299/jsmemag.92.853_1050.

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Dissertations / Theses on the topic "Microfabrication"

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Cannon, Andrew Hampton. "Unconventional Microfabrication Using Polymers." Thesis, Georgia Institute of Technology, 2006. http://hdl.handle.net/1853/19845.

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Current microfabrication materials include silicon, a wide variety of metals, dielectrics, and some polymers. Because of the low cost and high processing flexibility that polymers generally have, expanding the use of polymers in microfabrication would benefit the microfabrication community, enabling new routes towards goals such as low-cost 3D microfabrication. This work describes two main unconventional uses of polymers in microfabrication. The first unconventional use is as a carrier material in the self-assembly (SA) of millimeter-scale parts in which functional electronic components and electrical interconnects were cast into 5 mm cubes of Polymethylmethacrylate (PMMA). The second unconventional use is as a non-flat micromold for an alumina ceramic and as transfer material for multiple layers of micropatterned carbon nanotubes (CNTs). Both of these uses demonstrate 3D low-cost microfabrication routes. In the SA chapter, surface forces induced both gross and fine alignment of the PMMA cubes. The cubes were bonded using low-melting temperature solder, resulting in a self-assembled 3D circuit of LEDs and capacitors. The PMMA-encasulated parts were immersed in methyl methacrylate (MMA) to dissolve the PMMA, showing the possibility of using MEMS devices with moving parts such as mechanical actuators or resonators. This technique could be expanded for assembly of systems having more than 104 components. The ultimate goal is to combine a large number of diverse active components to allow the manufacture of systems having dense integrated functionality. The ceramic micromolding chapter explores micromolding fabrication of alumina ceramic microstructures on flat and curved surfaces, transfer of carbon nanotube (CNT) micropatterns into the ceramic, and oxidation inhibition of these CNTs through ceramic encapsulation. Microstructured master mold templates were fabricated from etched silicon, embossed thermally sacrificial polymer, and flexible polydimethylsiloxane (PDMS). The polymer templates were themselves made from silicon masters. Thus, once the master is produced, no further access to a microfabrication facility is required. Using the flexible PDMS molds, ceramic structures with mm-scale curvature were fabricated having microstructures on either the inside or outside of the curved macrostructure. It was possible to embed CNTs into the ceramic microstructures. To do this, micropatterned CNTs on silicon were transferred to ceramic via vacuum molding. Multilayered micropatterned CNT-ceramic devices were fabricated, and CNT electrical traces were encapsulated with ceramic to inhibit oxidation. During oxidation trials, encapsulated CNT traces showed an increase in resistance that was 62% less than those that were not encapsulated.
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Florian, Baron Camilo. "Laser direct-writing for microfabrication." Doctoral thesis, Universitat de Barcelona, 2016. http://hdl.handle.net/10803/400403.

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Digital manufacturing constitutes a real industrial revolution that is transforming the production processes from the early stages of research and development to mass production and marketing. The biggest difference in comparison with old fabrication methods is the possibility to perform changes in the pattern design just by using mouse clicks instead of modifying an already fabricated prototype, which results in faster, cheaper and more efficient fabrication processes. For example, new technologies enabling the production of printed electronic devices on flexible substrates and compatible with roll-to-roll processing methods would result in cheaper fabrication costs than the traditional batch processing of silicon wafers. Such fabrication methods comprise a series of processing steps which are applied to the substrates while they are moving on rolls in the fabrication line. Therefore, it is desired that the new technologies can work at high speeds allowing at the same time the production of miniaturized features. Lasers are a versatile tool that can meet the demands of flexibility, speed, resolution and compatibility with roll-to-roll processing of digital manufacturing. The main advantages of laser radiation rely in its unique properties: high directionality, coherence and monochromaticity. The combination of such properties allows generating high intensities that can be focused into extremely small volumes, which makes lasers an ideal tool for the processing of materials at the micro- and nano-scale, not only as a subtractive but also as an additive technique. Laser ablation is the best known subtractive technique and it consists in the irradiation of a material with a focused laser beam. In the case of working with transparent materials, surface ablation constitutes a serious challenge since it is necessary to develop new strategies that allow controlling the position where the energy is delivered to ensure that ablation really occurs in the surface without modifying the bulk material. On the other hand, lasers can also be used as additive tools. For example, laser-induced forward transfer (LIFT) allows the transfer of materials in both solid and liquid state with high spatial resolution. In spite of the extensive amount of research on LIFT, some challenges still remain. For instance, the understanding of the particular printing dynamics encountered during the high speed printing of liquids, or the problem of printing uniform, continuous and stable lines with high spatial resolution. The objective of this thesis is to propose and implement feasible solutions to some of the challenges that are associated with both the subtractive and additive laser based techniques presented above. On one side, we study the laser ablation of transparent polymers using femtosecond laser pulses with the aim of achieving spatial resolutions that overcome the diffraction limit, and at the same time solving the problem of the required precise focusing of the laser beam on the materials surface. On the other side, we study the LIFT transfer dynamics during the high speed printing of liquids, and we propose alternative printing strategies to solve the inherent quality defects usually encountered during the formation of printed lines. Finally, two different approaches that are a combination of both subtractive and additive techniques are presented; we implement LIFT for the fabrication of liquid microlenses used for the surface nanopatterning of materials, and on the other side, we create fluidic guides by laser ablation for the printing of high quality continuous lines.
La fabricació digital de dispositius tecnològics requereix el desenvolupament de noves i millors tècniques per al microprocessament de materials que al mateix temps siguin compatibles amb mètodes de producció en sèrie a gran escala com el roll-to-roll processing. Aquestes tècniques han de complir certs requisits relacionats amb la possibilitat de realitzar canvis de disseny ràpids durant el procés de fabricació, alta velocitat de processament, i al mateix temps permetre la producció de motius de forma controlada amb altes resolucions espacials. En la present tesi es proposen i implementen solucions viables a alguns dels reptes presents a la microfabricació amb làser tant substractiva com additiva. D'una banda, es presenta un nou mètode d'enfocament del feix làser sobre la mostra per l'ablació superficial de materials transparents que permet obtenir resolucions espacials que superen el límit de difracció del dispositiu òptic. D'altra banda, es duu a terme un estudi de la dinàmica de la impressió de líquids mitjançant làser a alta velocitat, de gran interès de cara a la implementació industrial de la tècnica. A més, es presenten estratègies d'impressió de tintes conductores amb l'objectiu de produir línies contínues amb alta qualitat d'impressió. Finalment s'inclouen dues propostes que són producte de la combinació d’ambues tècniques, la impressió de líquids i l'ablació amb làser.
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Wang, Weihua. "Tools for flexible electrochemical microfabrication /." Thesis, Connect to this title online; UW restricted, 2002. http://hdl.handle.net/1773/9854.

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Griffith, Alun Wyn. "Applications of microfabrication in biosensor technology." Thesis, University of Glasgow, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361768.

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Duan, Xuefeng 1981. "Microfabrication : using bulk wet etching with TMAH." Thesis, McGill University, 2005. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=97942.

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In November 2002 a Microfabrication Lab was established in the physics department of McGill University to support research in nanoscience and technology. At the same time, I arrived at McGill to begin my graduate study. So I was assigned to do research on microfabrication, especially bulk wet etching of silicon using TetraMethyl Ammonium Hydroxide (TMAH).
The content of microfabrication is quite broad, and also very useful in both industry and academic. Since our fab is a newly built one and I had no experience in this area before, this thesis mainly included some basic processes in microfabrication, such as the photolithography, wet etching, reactive ion etching, and soon. Also it compared the wet etching with dry etching. Some results of TMAH wet etching were showed in the thesis, which agreed well with that of the other groups. A simulation program was developed to predict the etching result of TMAH and it appeared to work well. Finally, based on the knowledge and experience acquired, processes in making cantilever and tip structures, which are critical in the scanning probe microscopes, were developed. Silicon oxide cantilevers with length of 100-200 mum, width of 30-50 mum, and thickness of 1 mum were obtained. Pyramid like silicon tips were also fabricated using the wet etching.
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DiBartolomeo, Franklin. "HIGH SPEED CONTINUOUS THERMAL CURING MICROFABRICATION SYSTEM." UKnowledge, 2011. http://uknowledge.uky.edu/gradschool_theses/105.

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Rapid creation of devices with microscale features is a vital step in the commercialization of a wide variety of technologies, such as microfluidics, fuel cells and self-healing materials. The current standard for creating many of these microstructured devices utilizes the inexpensive, flexible material poly-dimethylsiloxane (PDMS) to replicate microstructured molds. This process is inexpensive and fast for small batches of devices, but lacks scalability and the ability to produce large surface-area materials. The novel fabrication process presented in this paper uses a cylindrical mold with microscale surface patterns to cure liquid PDMS prepolymer into continuous microstructured films. Results show that this process can create continuous sheets of micropatterned devices at a rate of 1.9 in2/sec (~1200 mm2/sec), almost an order of magnitude faster than soft lithography, while still retaining submicron patterning accuracy.
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Charlton, Martin David Brian. "Computational design and microfabrication of photonic crystals." Thesis, University of Southampton, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.287304.

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Zoorob, Majd Elias. "Computational design and microfabrication of photonic quasicrystals." Thesis, University of Southampton, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.342813.

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Shur, Maiya 1980. "Microfabrication methods for the study of chemotaxis." Thesis, Massachusetts Institute of Technology, 2004. http://hdl.handle.net/1721.1/27130.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2004.
Includes bibliographical references (leaves 59-60).
We have developed a system for studying chemotaxis in a microfabricated system. The goal was to develop a system capable of generating spatially and temporally stable concentration gradients of a chemotactic molecule while providing a viable environment for the cell. Numerical models were generated to investigate fluid flow in microchannels for given geometries. Through computational modeling and experimentally-driven iteration of the design, features of the chamber were determined and geometry was established. Prototypes of the system were fabricated using soft lithography and multi-layer soft lithography techniques. Three fluid delivery methods for establishing gradients in the system have been studied: gravity feed system, dual-syringe pump feed system, and integrated individually-controlled peristaltic pump feed system. We were able to create spatially and temporally stable gradients using the dual-syringe feed setup. Two syringes were used to pump a chemokine and a buffer in parallel channels that are connected by a cross-channel and terminated to a single output. Microbeads in the flow were used to confirm the lack of movement in the cross-channel. Human neutrophil viability over the course of several hours and directed cell movement was demonstrated in microchannels.
by Maiya Shur.
S.M.
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Tu, Yudi. "Photo Processing and Microfabrication of Graphene Oxide." Kyoto University, 2018. http://hdl.handle.net/2433/232039.

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Books on the topic "Microfabrication"

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Franssila, Sami. Introduction to Microfabrication. Chichester, UK: John Wiley & Sons, Ltd, 2010. http://dx.doi.org/10.1002/9781119990413.

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Sugioka, Koji, Michel Meunier, and Alberto Piqué, eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-10523-4.

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Chakraborty, Suman, ed. Microfluidics and Microfabrication. Boston, MA: Springer US, 2010. http://dx.doi.org/10.1007/978-1-4419-1543-6.

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Michel, Meunier, Piqué Alberto, and SpringerLink (Online service), eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2010.

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Narayanan, Sundararajan, ed. Microfabrication for microfluidics. Boston: Artech House, 2010.

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Franssila, Sami. Introduction to Microfabrication. New York: John Wiley & Sons, Ltd., 2005.

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Chakraborty, Suman. Microfluidics and Microfabrication. Boston, MA: Springer Science+Business Media, LLC, 2010.

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J, Jackson Mark, ed. Microfabrication and nanomanufacturing. Boca Raton, FL: Taylor & Francis, 2005.

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Nassar, Raja. Modelling of Microfabrication Systems. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003.

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Nassar, Raja, and Weizhong Dai. Modelling of Microfabrication Systems. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003. http://dx.doi.org/10.1007/978-3-662-08792-3.

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Book chapters on the topic "Microfabrication"

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Adams, Thomas M., and Richard A. Layton. "Microfabrication laboratories." In Introductory MEMS, 371–403. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09511-0_13.

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Leitão, Diana C., José Pedro Amaral, Susana Cardoso, and Càndid Reig. "Microfabrication Techniques." In Giant Magnetoresistance (GMR) Sensors, 31–45. Berlin, Heidelberg: Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-37172-1_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials, 1–7. Berlin, Heidelberg: Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-36199-9_108-2.

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Joye, Colin D., Alan M. Cook, and Diana Gamzina. "Microfabrication Technologies." In Advances in Terahertz Source Technologies, 701–39. New York: Jenny Stanford Publishing, 2024. http://dx.doi.org/10.1201/9781003459675-26.

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Johnstone, Robert W., and M. Parameswaran. "Microfabrication Processes." In An Introduction to Surface-Micromachining, 9–28. Boston, MA: Springer US, 2004. http://dx.doi.org/10.1007/978-1-4020-8021-0_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials, 1311–17. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-642-29648-2_108.

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Chakraborty, Debapriya, and Suman Chakraborty. "Microfluidic Transport and Micro-scale Flow Physics: An Overview." In Microfluidics and Microfabrication, 1–85. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-1-4419-1543-6_1.

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Ghosal, Sandip. "Mathematical Modeling of Electrokinetic Effects in Micro and Nano Fluidics." In Microfluidics and Microfabrication, 87–112. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-1-4419-1543-6_2.

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DasGupta, Sunando. "Microscale Transport Processes and Interfacial Force Field Characterization in Micro-cooling Devices." In Microfluidics and Microfabrication, 113–30. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-1-4419-1543-6_3.

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Das, Tamal, and Suman Chakraborty. "Bio-Microfluidics: Overview." In Microfluidics and Microfabrication, 131–79. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-1-4419-1543-6_4.

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Conference papers on the topic "Microfabrication"

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Tang, Esheng, Yi FuTing, Yangchao Tian, Jingqiu Liang, and Dingchang Xian. "3D microfabrication technology." In Photonics China '98, edited by ShuShen Deng and S. C. Wang. SPIE, 1998. http://dx.doi.org/10.1117/12.317962.

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Alain, Christine, Hubert Jerominek, Patrice A. Topart, Timothy D. Pope, Francis Picard, Felix Cayer, Carl Larouche, Sebastien Leclair, and Bruno Tremblay. "Microfabrication services at INO." In Micromachining and Microfabrication, edited by John A. Yasaitis, Mary Ann Perez-Maher, and Jean Michel Karam. SPIE, 2003. http://dx.doi.org/10.1117/12.472738.

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de Rooij, Nico F. "Microfabrication technologies for microsystems." In Micromachining and Microfabrication, edited by Shih-Chia Chang and Stella W. Pang. SPIE, 1997. http://dx.doi.org/10.1117/12.284466.

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Mahmood, Aamer, and Ron Reger. "Microfabrication Process Cost Calculator." In 2010 18th Biennial University/ Government/Industry Micro/Nano Symposium (UGIM). IEEE, 2010. http://dx.doi.org/10.1109/ugim.2010.5508855.

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Beauvais, Jacques. "Microfabrication technologies for nanodevices." In Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, edited by John C. Armitage. SPIE, 2017. http://dx.doi.org/10.1117/12.2283870.

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Juodkazis, Saulius, and Hiroaki Misawa. "Three-dimensional laser microfabrication." In Optics/Photonics in Security and Defence, edited by Sean M. Kirkpatrick and Razvan Stoian. SPIE, 2006. http://dx.doi.org/10.1117/12.689384.

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Hruby, Jill. "Overview of LIGA Microfabrication." In HIGH ENERGY DENSITY AND HIGH POWER RF:5TH Workshop on High Energy Density and High Power RF. AIP, 2002. http://dx.doi.org/10.1063/1.1498183.

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Ghadiri, R., T. Weigel, C. Esen, and A. Ostendorf. "Microfabrication by optical tweezers." In SPIE LASE. SPIE, 2011. http://dx.doi.org/10.1117/12.887264.

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Melngailis, John. "Focused Ion Beam Microfabrication." In Medical Imaging II, edited by Arnold W. Yanof. SPIE, 1988. http://dx.doi.org/10.1117/12.945634.

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Sugioka, Koji. "Three-dimensional laser microfabrication." In SPIE Proceedings, edited by Isamu Miyamoto, Henry Helvajian, Kazuyoshi Itoh, Kojiro F. Kobayashi, Andreas Ostendorf, and Koji Sugioka. SPIE, 2004. http://dx.doi.org/10.1117/12.595676.

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Reports on the topic "Microfabrication"

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Woodard, David W. Microfabrication Technology for Photonics. Fort Belvoir, VA: Defense Technical Information Center, June 1990. http://dx.doi.org/10.21236/ada225428.

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Cowan, Benjamin M. Microfabrication of Laser-Driven Accelerator Structures. Office of Scientific and Technical Information (OSTI), April 2003. http://dx.doi.org/10.2172/812999.

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Bauer, Todd, Adam Jones, Tony Lentine, John Mudrick, Murat Okandan, and Arun Rodrigues. Trends in Microfabrication Capabilities & Device Architectures. Office of Scientific and Technical Information (OSTI), June 2015. http://dx.doi.org/10.2172/1184366.

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Bauer, Todd, Adam Jones, Anthony L. Lentine, John Mudrick, Murat Okandan, and Arun F. Rodrigues. Trends in Microfabrication Capabilities & Device Architectures. Office of Scientific and Technical Information (OSTI), June 2015. http://dx.doi.org/10.2172/1192538.

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Joye, Colin D., Alan M. Cook, Jeffrey P. Calame, David K. Abe, Khanh T. Nguyen, Edward L. Wright, Jeremy M. Hanna, Igor A. Chernyavskiy, and Baruch Levush. Microfabrication Techniques for Millimeter Wave Vacuum Electronics. Fort Belvoir, VA: Defense Technical Information Center, January 2015. http://dx.doi.org/10.21236/ad1004171.

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Mastrangelo, C. H. Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, July 2003. http://dx.doi.org/10.21236/ada420836.

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Lawandy, N. M. Laser Microfabrication in Glasses: Mechanisms and Applications. Fort Belvoir, VA: Defense Technical Information Center, March 1997. http://dx.doi.org/10.21236/ada376443.

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Cerjan, C., and A. Fernandez. Microfabrication and characterization of high-density ferromagnetic arrays. Office of Scientific and Technical Information (OSTI), February 1999. http://dx.doi.org/10.2172/14804.

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Hall, Jessica S., Amalie Lucile Frischknecht, John Allen Emerson, Douglas Ray Adkins, Michael Stuart Kent, Douglas H. Read, Rachel Knudsen Giunta, Kerry P. Lamppa, Stacie Kawaguchi, and Melissa A. Holmes. Resolving fundamental limits of adhesive bonding in microfabrication. Office of Scientific and Technical Information (OSTI), April 2004. http://dx.doi.org/10.2172/918260.

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Kelly, James J., Dale R. Boehme, Cheryl A. Hauck, Chu-Yeu Peter Yang, Luke L. Hunter, Stewart K. Griffiths, Dorrance E. McLean, et al. An aluminum resist substrate for microfabrication by LIGA. Office of Scientific and Technical Information (OSTI), April 2005. http://dx.doi.org/10.2172/923166.

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You might also be interested in the extended bibliographies on the topic 'Microfabrication' for particular source types:
Journal articles Dissertations / Theses Books
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