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1

Kordal, Richard, Arthur Usmani, and Wai Tak Law, eds. Microfabricated Sensors. Washington, DC: American Chemical Society, 2002. http://dx.doi.org/10.1021/bk-2002-0815.

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2

Franssila, Sami. Introduction to Microfabrication. Chichester, UK: John Wiley & Sons, Ltd, 2010. http://dx.doi.org/10.1002/9781119990413.

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3

Sugioka, Koji, Michel Meunier, and Alberto Piqué, eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-10523-4.

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4

Chakraborty, Suman, ed. Microfluidics and Microfabrication. Boston, MA: Springer US, 2010. http://dx.doi.org/10.1007/978-1-4419-1543-6.

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5

J, Jackson Mark, ed. Microfabrication and nanomanufacturing. Boca Raton, FL: Taylor & Francis, 2005.

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6

Franssila, Sami. Introduction to Microfabrication. New York: John Wiley & Sons, Ltd., 2005.

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7

Chakraborty, Suman. Microfluidics and Microfabrication. Boston, MA: Springer Science+Business Media, LLC, 2010.

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8

Narayanan, Sundararajan, ed. Microfabrication for microfluidics. Boston: Artech House, 2010.

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9

Introduction to microfabrication. 2nd ed. Chichester, West Sussex, England: John Wiley & Sons, 2010.

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10

Michel, Meunier, Piqué Alberto, and SpringerLink (Online service), eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2010.

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11

Fundamentals of microfabrication. Boca Raton, Fla: CRC Press, 1997.

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12

Nassar, Raja. Modelling of Microfabrication Systems. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003.

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13

Nassar, Raja, and Weizhong Dai. Modelling of Microfabrication Systems. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003. http://dx.doi.org/10.1007/978-3-662-08792-3.

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14

Luttge, Regina. Microfabrication for industrial applications. Oxford: William Andrew, 2011.

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15

Mehran, Mehregany, Roy Shuvo, and United States. National Aeronautics and Space Administration., eds. Microfabricated ice-detection sensor. [Washington, DC: National Aeronautics and Space Administration, 1997.

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16

Mehran, Mehregany, Roy Shuvo, and United States. National Aeronautics and Space Administration., eds. Microfabricated ice-detection sensor. [Washington, DC: National Aeronautics and Space Administration, 1997.

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17

Modelling of microfabrication systems. Berlin: Springer, 2002.

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18

Feng, Chuanliang, Xiaoqiu Dou, and Yibin Xu. Microfabrication of Stimuli-Responsive Polymers. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-33-6869-9.

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19

Bale, Mark. Microfabrication for scanning tunnelling microscopy. Birmingham: University of Birmingham, 2001.

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20

Hiroaki, Misawa, and Juodkazis Saulius, eds. 3D laser microfabrication: Principles and applications. Weinheim: Wiley-VCH, 2006.

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21

P, Rai-Choudhury, and Institution of Electrical Engineers, eds. Handbook of microlithography, micromachining, and microfabrication. Bellingham, Wash: SPIE Optical Engineering Press, 1997.

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22

P, Rai-Choudhury, ed. Handbook of microlithography, micromachining, and microfabrication. Bellingham, Wash., USA: SPIE Optical Engineering Press, 1997.

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23

Schilp, Johannes. Adaptive Montagesysteme für hybride Mikrosysteme unter Einsatz von Telepräsenz. München: Herbert Utz Verlag, 2012.

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24

Transport in laser microfabrication: Fundamentals and applications. Cambridge, UK: Cambridge University Press, 2009.

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25

Bhatia, Sangeeta. Microfabrication in Tissue Engineering and Bioartificial Organs. Boston, MA: Springer US, 1999. http://dx.doi.org/10.1007/978-1-4615-5235-2.

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26

Fundamentals of microfabrication: The science of miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2002.

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27

Laser Microfabrication. Elsevier, 1989. http://dx.doi.org/10.1016/c2009-0-22188-x.

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28

Gordinier, Roy. Microfabrication Lithography. CreateSpace Independent Publishing Platform, 2016.

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29

Jackson, Mark J. Microfabrication and Nanomanufacturing. Taylor & Francis Group, 2005.

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30

Introduction to Microfabrication. Wiley, 2004.

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31

Renaud, Philippe, and Andre Mercanzini. Microfabricated Cortical Neuroprostheses. Taylor & Francis Group, 2011.

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32

Renaud, Philippe, and Andre Mercanzini. Microfabricated Cortical Neuroprostheses. Taylor & Francis Group, 2010.

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33

Microfabrication and nanomanufacturing. Boca Raton, FL: CRC Taylor & Francis, 2006.

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34

Madou, Marc J. Fundamentals of Microfabrication. CRC Press, 2002. http://dx.doi.org/10.1201/9781482274004.

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35

Jackson, Mark, ed. Microfabrication and Nanomanufacturing. CRC Press, 2005. http://dx.doi.org/10.1201/9781420028270.

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36

Misawa, Hiroaki, and Saulius Juodkazis, eds. 3D Laser Microfabrication. Wiley, 2006. http://dx.doi.org/10.1002/352760846x.

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37

Jackson, Mark J. Microfabrication and Nanomanufacturing. Taylor & Francis Group, 2010.

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38

Franssila, Sami. Introduction to Microfabrication. Wiley & Sons, Limited, John, 2010.

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39

Franssila, Sami. Introduction to Microfabrication. Wiley, 2004.

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40

Franssila, S., and Sami Franssila. Introduction to Microfabrication. Wiley & Sons, Incorporated, John, 2005.

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41

Chakraborty, Suman. Microfluidics and Microfabrication. Springer, 2014.

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42

Franssila, Sami. Introduction to Microfabrication. Wiley & Sons, Incorporated, John, 2010.

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43

Muray, Julius J., and Ivor Brodie. Physics of Microfabrication. Springer London, Limited, 2013.

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44

Franssila, Sami. Introduction to Microfabrication. Wiley & Sons, Incorporated, John, 2010.

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45

Meunier, Michel, Koji Sugioka, and Alberto Piqué. Laser Precision Microfabrication. Springer, 2012.

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46

Franssila, Sami. Introduction to Microfabrication. Wiley & Sons, Incorporated, John, 2011.

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47

Chakraborty, Suman. Microfluidics and Microfabrication. Springer, 2010.

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48

Mercanzini, Andr, and Philippe Renaud. Microfabricated Cortical Neuroprostheses. Taylor & Francis Group, 2011.

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49

Jackson, Mark J. Microfabrication and Nanomanufacturing. Taylor & Francis Group, 2005.

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50

Introduction to Microfabrication. Wiley & Sons, Incorporated, John, 2010.

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