Relevant bibliographies by topics / Microfabricati

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Microfabricati'

Author: Grafiati
Published: 21 October 2023

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Journal articles on the topic "Microfabricati"

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De Maria, C., L. Grassi, F. Vozzi, A. Ahluwalia, and G. Vozzi. "Development of a novel micro-ablation system to realise micrometric and well-defined hydrogel structures for tissue engineering applications." Rapid Prototyping Journal 20, no. 6 (October 20, 2014): 490–98. http://dx.doi.org/10.1108/rpj-03-2012-0022.

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Purpose – This paper aims to develop a novel micro-ablation system to realise micrometric and well-defined hydrogel structures. To engineer a tissue it is necessary to evaluate several aspects, such as cell-cell and cell-substrate interactions, its micro-architecture and mechanical stimuli that act on it. For this reason, it is important to fabricate a substrate which presents a microtopology similar to natural tissue and has chemical and mechanical properties able to promote cell functions. In this paper, well-defined hydrogel structures embedding cells were microfabricated using a purposely developed technique, micro-laser ablation, based on a thulium laser. Its working parameters (laser power emission, stepper motor velocity) were optimised to produce shaded “serpentine” pattern on a hydrogel film. Design/methodology/approach – In this study, initially, swelling/contraction tests on agarose and alginate hydrogel in different solutions of main components of cell culture medium were performed and were compared with the MECpH model. This comparison matched with good approximation experimental measurements. Once known how hydrogel changed its topology, microstructures with a well-defined topology were realised using a purposely developed micro-laser ablation system design. S5Y5 neuroblastoma cell lines were embedded in hydrogel matrix and the whole structure was ablated with a laser microfabrication system. The cells did not show damages due to mechanical stress present in the hydrogel matrix and to thermal increase induced by the laser beam. Findings – The hydrogel structure is able to reproduce extracellular matrix. Initially, the hydrogel swelling/contraction in different solutions, containing the main components of the most common cell culture media, was analysed. This analysis is important to evaluate if cell culture environment could alter microtopology of realised structures. Then, the same topology was realised on hydrogel film embedding neuronal cells and the cells did not show damages due to mechanical stress present in the hydrogel matrix and to thermal increase induced by the laser beam. The interesting obtained results could be useful to realise well-defined microfabricated hydrogel structures embedding cells to guide tissue formation Originality/value – The originality of this paper is the design and realisation of a 3D microfabrication system able to microfabricate hydrogel matrix embedding cells without inducing cell damage. The ease of use of this system and its potential modularity render this system a novel potential device for application in tissue engineering and regenerative medicine area.
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Du, L. Q., C. Liu, H. J. Liu, J. Qin, N. Li, and Rui Yang. "Design and Fabrication of Micro Hot Embossing Mold for Microfluidic Chip Used in Flow Cytometry." Key Engineering Materials 339 (May 2007): 246–51. http://dx.doi.org/10.4028/www.scientific.net/kem.339.246.

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Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, high precision and mass-producing microfluidic chips have been fabricated and they have been used in flow cytometry
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Banerjee, Arunav S., Richard Blaikie, and Wen Hui Wang. "Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery." Materials Science Forum 700 (September 2011): 195–98. http://dx.doi.org/10.4028/www.scientific.net/msf.700.195.

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In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.
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Folch, A., A. Ayon, O. Hurtado, M. A. Schmidt, and M. Toner. "Molding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications." Journal of Biomechanical Engineering 121, no. 1 (February 1, 1999): 28–34. http://dx.doi.org/10.1115/1.2798038.

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Here we demonstrate the microfabrication of deep (>25 μm) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution, we found that the inexpensive photoplastic yields similar replication fidelity. The latter is mostly limited by the mechanical stability of the replicated PDMS structures. As an example, we demonstrate the selective delivery of different cell suspensions to specific locations of a tissue culture substrate resulting in micropatterns of attached cells.
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PARK, W. B., J. H. CHOI, C. W. PARK, G. M. KIM, H. S. SHIN, C. N. CHU, and B. H. KIM. "FABRICATION OF MICRO PROBE-TYPE ELECTRODES FOR MICROELECTRO-CHEMICAL MACHINING USING MICROFABRICATION." International Journal of Modern Physics B 24, no. 15n16 (June 30, 2010): 2639–44. http://dx.doi.org/10.1142/s0217979210065398.

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In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.
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Starodubov, Andrey, Roman Torgashov, Viktor Galushka, Anton Pavlov, Vladimir Titov, Nikita Ryskin, Anand Abhishek, and Niraj Kumar. "Microfabrication, Characterization, and Cold-Test Study of the Slow-Wave Structure of a Millimeter-Band Backward-Wave Oscillator with a Sheet Electron Beam." Electronics 11, no. 18 (September 9, 2022): 2858. http://dx.doi.org/10.3390/electronics11182858.

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In this paper, the results of the microfabrication, characterization, and cold-test study of the previously proposed truncated sine-waveguide interaction structure with wideband-matched output couplers for the millimeter-band backward-wave oscillator (BWO) driven by a high-current-density sheet electron beam are presented. Computer-numerical-control (CNC) micromilling was used to fabricate the designed interaction structure. The first sample was microfabricated from an aluminum alloy to test the milling process. The final sample was made from oxygen-free copper. Scanning electron microscopy (SEM) and optical microscopy were used to investigate the morphology of the microfabricated samples, and stylus profilometry was used to estimate the level of the surface roughness. Cold S-parameters were measured in Q- and V-bands (40–70 GHz), using a vector network analyzer (VNA). Using the experimentally measured phase data of the transmitted signal, the dispersion of the fabricated interaction structure was evaluated. The experimentally measured dispersion characteristic is in good agreement with the numerically calculated.
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Liu, Yue, Megan Chesnut, Amy Guitreau, Jacob Beckham, Adam Melvin, Jason Eades, Terrence R. Tiersch, and William Todd Monroe. "Microfabrication of low-cost customisable counting chambers for standardised estimation of sperm concentration." Reproduction, Fertility and Development 32, no. 9 (2020): 873. http://dx.doi.org/10.1071/rd19154.

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Evaluation of sperm concentration is essential for research and procedures involving AI, cryopreservation and sperm quality assessment. Microfabrication technologies have shown tremendous potential for rapid prototyping and fabrication of devices to assist reproduction and fertility research, but such utility has not yet been made available for most reproduction laboratories. The aim of this study was to evaluate the feasibility of using microfabrication techniques to produce counting chambers for estimation of sperm concentration. Zebrafish (Danio rerio) spermatozoa were used as a model for evaluation of functionality of the chambers. These microfabricated enumeration grid chambers (MEGC) were composed of a polydimethylsiloxane (PDMS) coverslip with grid patterns (100 μm×100 μm) and a PDMS base platform to create a known volume with a 10-μm height to restrict the cells to a single layer. The results of cell counts estimated by two of three prototype MEGC devices tested were not significantly different from the control device, a commercially available Makler chamber. The material cost for a MEGC was less than US$0.10 compared with product costs of approximately US$100 for a standard haemocytometer and US$700 for a Makler counting chamber. This study demonstrates the feasibility of microfabrication in creating low-cost counting chambers to enhance standardisation and strengthen interdisciplinary collaborations.
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Alvarez-Escobar, Marta, Sidónio C. Freitas, Derek Hansford, Fernando J. Monteiro, and Alejandro Pelaez-Vargas. "Soft Lithography and Minimally Human Invasive Technique for Rapid Screening of Oral Biofilm Formation on New Microfabricated Dental Material Surfaces." International Journal of Dentistry 2018 (2018): 1–5. http://dx.doi.org/10.1155/2018/4219625.

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Introduction. Microfabrication offers opportunities to study surface concepts focused to reduce bacterial adhesion on implants using human minimally invasive rapid screening (hMIRS). Wide information is available about cell/biomaterial interactions using eukaryotic and prokaryotic cells on surfaces of dental materials with different topographies, but studies using human being are still limited. Objective. To evaluate a synergy of microfabrication and hMIRS to study the bacterial adhesion on micropatterned surfaces for dental materials. Materials and Methods. Micropatterned and flat surfaces on biomedical PDMS disks were produced by soft lithography. The hMIRS approach was used to evaluate the total oral bacterial adhesion on PDMS surfaces placed in the oral cavity of five volunteers (the study was approved by the University Ethical Committee). After 24 h, the disks were analyzed using MTT assay and light microscopy. Results. In the present pilot study, microwell structures were microfabricated on the PDMS surface via soft lithography with a spacing of 5 µm. Overall, bacterial adhesion did not significantly differ between the flat and micropatterned surfaces. However, individual analysis of two subjects showed greater bacterial adhesion on the micropatterned surfaces than on the flat surfaces. Significance. Microfabrication and hMIRS might be implemented to study the cell/biomaterial interactions for dental materials.
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Creff, Justine, Laurent Malaquin, and Arnaud Besson. "In vitro models of intestinal epithelium: Toward bioengineered systems." Journal of Tissue Engineering 12 (January 2021): 204173142098520. http://dx.doi.org/10.1177/2041731420985202.

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The intestinal epithelium, the fastest renewing tissue in human, is a complex tissue hosting multiple cell types with a dynamic and multiparametric microenvironment, making it particularly challenging to recreate in vitro. Convergence of recent advances in cellular biology and microfabrication technologies have led to the development of various bioengineered systems to model and study the intestinal epithelium. Theses microfabricated in vitro models may constitute an alternative to current approaches for studying the fundamental mechanisms governing intestinal homeostasis and pathologies, as well as for in vitro drug screening and testing. Herein, we review the recent advances in bioengineered in vitro intestinal models.
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Yang, Jian Zhong, Li Chao Pan, C. L. Kang, Gang Liu, Hui Juan Li, Z. You, D. H. Ren, and Y. C. Tian. "Advance of the Micro-Magnetometer MEMSMag Research." Advanced Materials Research 60-61 (January 2009): 241–45. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.241.

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The MEMS fluxgate magnetic sensor which is characterized by its small mass, smart volume, high sensitivity and outstanding temperature stability, is often applied on the measurements of weak magnetic fields, such as the geomagnetic field. Therefore, it is widely utilized in the field of aeronautics and aerospace field, especially in Nano-/Pico- satellites. MEMSMag, a novel type of micro fluxgate magnetic sensor (MFGM), which exploits magnetic fluxgate principle, was designed and microfabricated, Based on MEMS technology. The micro sensor probe has symmetrical geometry, and is flexible for electrical connection. MEMSMag would be easily assembled into a 3-axis subminiature magnetometer and will be applied to measure vector of the weak geomagnetic field. The microfabrication process was developed. The UV lithography technology in combination with thick negative hard-cured technology was exploited in the microfabrication. The original samples were produced with the dimension of 1 1 100 . The primary tests have been done. The integrity, conductivity and resist test, as well as transformer effect measurement were completed. The statistics, analysis and conclusion of the experimental results have been obtained.
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Dissertations / Theses on the topic "Microfabricati"

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Feng, Chunhua. "Microfabrication-compatible synthesis strategies for nanoscale electrocatalysts in microfabricated fuel cell applications /." View abstract or full-text, 2007. http://library.ust.hk/cgi/db/thesis.pl?CENG%202007%20FENG.

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Cannon, Andrew Hampton. "Unconventional Microfabrication Using Polymers." Thesis, Georgia Institute of Technology, 2006. http://hdl.handle.net/1853/19845.

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Current microfabrication materials include silicon, a wide variety of metals, dielectrics, and some polymers. Because of the low cost and high processing flexibility that polymers generally have, expanding the use of polymers in microfabrication would benefit the microfabrication community, enabling new routes towards goals such as low-cost 3D microfabrication. This work describes two main unconventional uses of polymers in microfabrication. The first unconventional use is as a carrier material in the self-assembly (SA) of millimeter-scale parts in which functional electronic components and electrical interconnects were cast into 5 mm cubes of Polymethylmethacrylate (PMMA). The second unconventional use is as a non-flat micromold for an alumina ceramic and as transfer material for multiple layers of micropatterned carbon nanotubes (CNTs). Both of these uses demonstrate 3D low-cost microfabrication routes. In the SA chapter, surface forces induced both gross and fine alignment of the PMMA cubes. The cubes were bonded using low-melting temperature solder, resulting in a self-assembled 3D circuit of LEDs and capacitors. The PMMA-encasulated parts were immersed in methyl methacrylate (MMA) to dissolve the PMMA, showing the possibility of using MEMS devices with moving parts such as mechanical actuators or resonators. This technique could be expanded for assembly of systems having more than 104 components. The ultimate goal is to combine a large number of diverse active components to allow the manufacture of systems having dense integrated functionality. The ceramic micromolding chapter explores micromolding fabrication of alumina ceramic microstructures on flat and curved surfaces, transfer of carbon nanotube (CNT) micropatterns into the ceramic, and oxidation inhibition of these CNTs through ceramic encapsulation. Microstructured master mold templates were fabricated from etched silicon, embossed thermally sacrificial polymer, and flexible polydimethylsiloxane (PDMS). The polymer templates were themselves made from silicon masters. Thus, once the master is produced, no further access to a microfabrication facility is required. Using the flexible PDMS molds, ceramic structures with mm-scale curvature were fabricated having microstructures on either the inside or outside of the curved macrostructure. It was possible to embed CNTs into the ceramic microstructures. To do this, micropatterned CNTs on silicon were transferred to ceramic via vacuum molding. Multilayered micropatterned CNT-ceramic devices were fabricated, and CNT electrical traces were encapsulated with ceramic to inhibit oxidation. During oxidation trials, encapsulated CNT traces showed an increase in resistance that was 62% less than those that were not encapsulated.
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Barham, Oliver M. "Microfabricated Bulk Piezoelectric Transformers." Thesis, University of Maryland, College Park, 2017. http://pqdtopen.proquest.com/#viewpdf?dispub=10615552.

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Piezoelectric voltage transformers (PTs) can be used to transform an input voltage into a different, required output voltage needed in electronic and electro- mechanical systems, among other varied uses. On the macro scale, they have been commercialized in electronics powering consumer laptop liquid crystal displays, and compete with an older, more prevalent technology, inductive electromagnetic volt- age transformers (EMTs). The present work investigates PTs on smaller size scales that are currently in the academic research sphere, with an eye towards applications including micro-robotics and other small-scale electronic and electromechanical sys- tems. PTs and EMTs are compared on the basis of power and energy density, with PTs trending towards higher values of power and energy density, comparatively, indicating their suitability for small-scale systems. Among PT topologies, bulk disc-type PTs, operating in their fundamental radial extension mode, and free-free beam PTs, operating in their fundamental length extensional mode, are good can- didates for microfabrication and are considered here. Analytical modeling based on the Extended Hamilton Method is used to predict device performance and integrate mechanical tethering as a boundary condition. This model differs from previous PT models in that the electric enthalpy is used to derive constituent equations of motion with Hamilton’s Method, and therefore this approach is also more generally applica- ble to other piezoelectric systems outside of the present work. Prototype devices are microfabricated using a two mask process consisting of traditional photolithography combined with micropowder blasting, and are tested with various output electri- cal loads. 4mm diameter tethered disc PTs on the order of .002cm

3 , two orders smaller than the bulk PT literature, had the followingperformance: a prototype with electrode area ratio (input area / output area) = 1 had peak gain of 2.3 (± 0.1), efficiency of 33 (± 0.1)% and output power density of 51.3 (± 4.0)W cm

-3 (for output power of80 (± 6)mW) at 1M? load, for an input voltage range of 3V-6V (± one standard deviation). The gain results are similar to those of several much larger bulk devices in the literature, but the efficiencies of the present devices are lower. Rectangular topology, free-free beam devices were also microfabricated across 3 or- ders of scale by volume, with the smallest device on the order of .00002cm

3 . These devices exhibited higher quality factorsand efficiencies, in some cases, compared to circular devices, but lower peak gain (by roughly 1/2 ). Limitations of the microfab- rication process are determined, and future work is proposed. Overall, the devices fabricated in the present work show promise for integration into small-scale engi- neered systems, but improvements can be made in efficiency, and potentially voltage gain, depending on the application

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Mehregany, Mehran. "Microfabricated silicon electric mechanisms." Thesis, Massachusetts Institute of Technology, 1990. http://hdl.handle.net/1721.1/14042.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.
Includes bibliographical references (leaves 151-156).
by Mehran Mehregany.
Ph.D.
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Florian, Baron Camilo. "Laser direct-writing for microfabrication." Doctoral thesis, Universitat de Barcelona, 2016. http://hdl.handle.net/10803/400403.

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Digital manufacturing constitutes a real industrial revolution that is transforming the production processes from the early stages of research and development to mass production and marketing. The biggest difference in comparison with old fabrication methods is the possibility to perform changes in the pattern design just by using mouse clicks instead of modifying an already fabricated prototype, which results in faster, cheaper and more efficient fabrication processes. For example, new technologies enabling the production of printed electronic devices on flexible substrates and compatible with roll-to-roll processing methods would result in cheaper fabrication costs than the traditional batch processing of silicon wafers. Such fabrication methods comprise a series of processing steps which are applied to the substrates while they are moving on rolls in the fabrication line. Therefore, it is desired that the new technologies can work at high speeds allowing at the same time the production of miniaturized features. Lasers are a versatile tool that can meet the demands of flexibility, speed, resolution and compatibility with roll-to-roll processing of digital manufacturing. The main advantages of laser radiation rely in its unique properties: high directionality, coherence and monochromaticity. The combination of such properties allows generating high intensities that can be focused into extremely small volumes, which makes lasers an ideal tool for the processing of materials at the micro- and nano-scale, not only as a subtractive but also as an additive technique. Laser ablation is the best known subtractive technique and it consists in the irradiation of a material with a focused laser beam. In the case of working with transparent materials, surface ablation constitutes a serious challenge since it is necessary to develop new strategies that allow controlling the position where the energy is delivered to ensure that ablation really occurs in the surface without modifying the bulk material. On the other hand, lasers can also be used as additive tools. For example, laser-induced forward transfer (LIFT) allows the transfer of materials in both solid and liquid state with high spatial resolution. In spite of the extensive amount of research on LIFT, some challenges still remain. For instance, the understanding of the particular printing dynamics encountered during the high speed printing of liquids, or the problem of printing uniform, continuous and stable lines with high spatial resolution. The objective of this thesis is to propose and implement feasible solutions to some of the challenges that are associated with both the subtractive and additive laser based techniques presented above. On one side, we study the laser ablation of transparent polymers using femtosecond laser pulses with the aim of achieving spatial resolutions that overcome the diffraction limit, and at the same time solving the problem of the required precise focusing of the laser beam on the materials surface. On the other side, we study the LIFT transfer dynamics during the high speed printing of liquids, and we propose alternative printing strategies to solve the inherent quality defects usually encountered during the formation of printed lines. Finally, two different approaches that are a combination of both subtractive and additive techniques are presented; we implement LIFT for the fabrication of liquid microlenses used for the surface nanopatterning of materials, and on the other side, we create fluidic guides by laser ablation for the printing of high quality continuous lines.
La fabricació digital de dispositius tecnològics requereix el desenvolupament de noves i millors tècniques per al microprocessament de materials que al mateix temps siguin compatibles amb mètodes de producció en sèrie a gran escala com el roll-to-roll processing. Aquestes tècniques han de complir certs requisits relacionats amb la possibilitat de realitzar canvis de disseny ràpids durant el procés de fabricació, alta velocitat de processament, i al mateix temps permetre la producció de motius de forma controlada amb altes resolucions espacials. En la present tesi es proposen i implementen solucions viables a alguns dels reptes presents a la microfabricació amb làser tant substractiva com additiva. D'una banda, es presenta un nou mètode d'enfocament del feix làser sobre la mostra per l'ablació superficial de materials transparents que permet obtenir resolucions espacials que superen el límit de difracció del dispositiu òptic. D'altra banda, es duu a terme un estudi de la dinàmica de la impressió de líquids mitjançant làser a alta velocitat, de gran interès de cara a la implementació industrial de la tècnica. A més, es presenten estratègies d'impressió de tintes conductores amb l'objectiu de produir línies contínues amb alta qualitat d'impressió. Finalment s'inclouen dues propostes que són producte de la combinació d’ambues tècniques, la impressió de líquids i l'ablació amb làser.
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Jeffery, Nicholas Toby. "PET radiochemistry on microfabricated devices." Thesis, Imperial College London, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.420892.

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Velásquez, García Luis Fernando 1976. "A microfabricated colloid thruster array." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/82201.

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Lubratt, Mark Paul. "A voltage-tunable microfabricated accelerometer." Thesis, Massachusetts Institute of Technology, 1991. http://hdl.handle.net/1721.1/37497.

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Harris, Robert Michael. "Geometric simulation of microfabricated structures." Thesis, Massachusetts Institute of Technology, 1995. http://hdl.handle.net/1721.1/11842.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (p. 295-302).
Robert Michael Harris.
Ph.D.
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Wang, Weihua. "Tools for flexible electrochemical microfabrication /." Thesis, Connect to this title online; UW restricted, 2002. http://hdl.handle.net/1773/9854.

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Books on the topic "Microfabricati"

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Kordal, Richard, Arthur Usmani, and Wai Tak Law, eds. Microfabricated Sensors. Washington, DC: American Chemical Society, 2002. http://dx.doi.org/10.1021/bk-2002-0815.

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Franssila, Sami. Introduction to Microfabrication. Chichester, UK: John Wiley & Sons, Ltd, 2010. http://dx.doi.org/10.1002/9781119990413.

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Sugioka, Koji, Michel Meunier, and Alberto Piqué, eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-10523-4.

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Chakraborty, Suman, ed. Microfluidics and Microfabrication. Boston, MA: Springer US, 2010. http://dx.doi.org/10.1007/978-1-4419-1543-6.

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J, Jackson Mark, ed. Microfabrication and nanomanufacturing. Boca Raton, FL: Taylor & Francis, 2005.

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Franssila, Sami. Introduction to Microfabrication. New York: John Wiley & Sons, Ltd., 2005.

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Chakraborty, Suman. Microfluidics and Microfabrication. Boston, MA: Springer Science+Business Media, LLC, 2010.

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Narayanan, Sundararajan, ed. Microfabrication for microfluidics. Boston: Artech House, 2010.

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Introduction to microfabrication. 2nd ed. Chichester, West Sussex, England: John Wiley & Sons, 2010.

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Michel, Meunier, Piqué Alberto, and SpringerLink (Online service), eds. Laser Precision Microfabrication. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2010.

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Book chapters on the topic "Microfabricati"

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Adams, Thomas M., and Richard A. Layton. "Microfabrication laboratories." In Introductory MEMS, 371–403. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09511-0_13.

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Leitão, Diana C., José Pedro Amaral, Susana Cardoso, and Càndid Reig. "Microfabrication Techniques." In Giant Magnetoresistance (GMR) Sensors, 31–45. Berlin, Heidelberg: Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-37172-1_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials, 1–7. Berlin, Heidelberg: Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-36199-9_108-2.

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Johnstone, Robert W., and M. Parameswaran. "Microfabrication Processes." In An Introduction to Surface-Micromachining, 9–28. Boston, MA: Springer US, 2004. http://dx.doi.org/10.1007/978-1-4020-8021-0_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials, 1311–17. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-642-29648-2_108.

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Ono, Takahito, and Masayoshi Esashi. "Microfabricated Probe Technology." In Encyclopedia of Nanotechnology, 2167–78. Dordrecht: Springer Netherlands, 2016. http://dx.doi.org/10.1007/978-94-017-9780-1_247.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, et al. "Microfabricated Probe Technology." In Encyclopedia of Nanotechnology, 1406–15. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_247.

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Baborowski, J. "Microfabrication of Piezoelectric MEMS." In Electroceramic-Based MEMS, 325–59. Boston, MA: Springer US, 2005. http://dx.doi.org/10.1007/0-387-23319-9_13.

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Jiménez-Martínez, Ricardo, and Svenja Knappe. "Microfabricated Optically-Pumped Magnetometers." In Smart Sensors, Measurement and Instrumentation, 523–51. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-34070-8_17.

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Qin, Dong, Younan Xia, John A. Rogers, Rebecca J. Jackman, Xiao-Mei Zhao, and George M. Whitesides. "Microfabrication, Microstructures and Microsystems." In Topics in Current Chemistry, 1–20. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/3-540-69544-3_1.

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Conference papers on the topic "Microfabricati"

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Levitan, Jeremy A., Dan Good, Michael J. Sinclair, and Joseph M. Jacobson. "Creation of Nanometer-Sized Features in Polysilicon Using Fusing." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/mems-23858.

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Abstract Current microfabrication systems can achieve resolutions of approximately 0.1μm. We present physical methods for creating structures with length scales and characteristic dimensions significantly below current fabrication resolutions. These structures, themselves fabricated in conventional, gross-resolution (greater than 2μm) semiconductor facilities, undergo structural change to create features below the lithography limits of the fabrication process. These devices — dog-boned microfabricated polysilicon fuses — are heated just below melting, and a small perturbation current heats a narrow, necked region of the beam, resulting in fusing. Infrastructure has already been constructed to create gross-resolution structures in microfabrication. Novel processes and mechanisms are needed to utilize these resolutions and create structures capable of addressing biological systems, functioning quantum mechanically, use single electrons, or require extreme speeds.
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Park, Daniel S., Saade Bou-Mikael, Sean King, Karsten E. Thompson, Clinton S. Willson, and Dimitris E. Nikitopoulos. "Design and Fabrication of Rock-Based Micromodel." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-88501.

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A rock-based micromodel was designed using depth averaging with Boise rock digital images obtained from the X-ray micro-computed tomography. Design optimization of 2.5D micromodels was carried out using computational fluid dynamics (CFD) simulations through error analysis of dynamic flow parameters (velocities and permeability), which showed the close dynamic flow match between the actual 3D rock and the optimized 2.5D micromodel. Multiple numbers of polymer micromodels were microfabricated via micromilling of a brass mold insert and hot embossing in polymethylmethacrylate (PMMA). The design optimization and the replication-based microfabrication processes enabled the realistic pore geometry generation, which conforms to the pore dimensions of an actual rock sample but with coarser features in a polymer microfluidic platform. The microfabricated PMMA micromodel was used for fluidic characterization with nanoparticles to compare the flow patterns between the designed micromodel and the microfabricated micromodel. Particle motion paths observed in the particle experiments showed the consistent similarity of stream-traces from the CFD simulations of the designed 2.5D micromodel. Further fluidic investigation on the 2.5D rock-based micromodels will provide better understanding on fluid transport mechanism in porous media.
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Kandra, Deepak, and Ram V. Devireddy. "On the Possible Application of a Microscale Thermocouple to Measure Intercellular Ice Formation in Cells Embedded in an Extracellular Matrix." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-60728.

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To optimize a freezing protocol for tissue systems, knowledge of intercellular ice formation and water transport is essential. Water transport during freezing can be measured using low temperature microscopy technique [1] and/or by differential scanning calorimetry method [2]. To study the formation of intracellular ice in cells embedded in an extracellular matrix we propose to design and develop an array of microscale thermocouples using microfabrication techniques [3]. The microfabricated thermocouples will be required to accurately measure the small temperature fluctuations in an embedded cell due to the formation of intracellular ice.
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Demiri, S., and S. Boedo. "Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings." In STLE/ASME 2010 International Joint Tribology Conference. ASMEDC, 2010. http://dx.doi.org/10.1115/ijtc2010-41189.

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This paper investigates the effect of bearing clearance on the impact behavior of microfabricated silicon journal bearings. The design of a novel test apparatus to assess microbearing wear behavior is presented. Microbearing designs, microfabrication processes, and metrology characterization techniques are discussed. A dynamic impact model of the bearing system based on classical impulse-momentum relations is formulated in order to assess the effect of clearance on rotor speed. Coefficient of restitution values obtained over the range of kinematically allowable radial clearance specifications are found to agree well with previously published results for polysilicon microstructures.
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Carretero, J. A., and K. S. Breuer. "Measurement and Modeling of the Flow Characteristics of Micro Disc Valves." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1120.

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Abstract The head losses in microfluidic systems such as micropumps are dominated by losses in microvalves, where microfabrication constraints limit significantly possible microvalve designs. This makes them quite different from conventional valves. In particular, flow characteristics in the laminar and low-Reynolds turbulent regimes are not understood clearly, and detailed information about the flow losses is lacking. This paper addresses this issue by using a scaled-up (10:1) valve experiment to measure pressure losses in typical microfabricated valve geometries. The macroscale model is fully instrumented and discharge coefficients and sensitivities to stroke, seat width and Reynolds number are presented.
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Shao, Zhanjie, Carolyn L. Ren, and Gerry Schneider. "Control of Laminar Flow and Mass Transport in Crossing Linked Microchannels for Micro Fabrication." In ASME 3rd International Conference on Microchannels and Minichannels. ASMEDC, 2005. http://dx.doi.org/10.1115/icmm2005-75021.

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There has been tremendous interest in developing micro technologies towards the integration and automation of Biochips or Lab-on-a-Chip devices due to their wide range of applications in environmental, chemical and biomedical engineering fields. The laminar flow nature in microfluidic devices offers opportunities to microfabricate the desired structures inside microchannels and pattern culturing medium inside microchannels. However, no analysis tools are available to provide optimized configurations for control the flow for microfabrication. Therefore, the goal of this study is to develop a numerical model to study transport phenomena in a cross-linked microchannels aiming to explore an optimized configuration for the microfabrication of specific desired features inside microchannel networks through investigating the effects of controlling parameters on the multistream flow. In this study, electroosmotic flow with induced pressure-driven flow will be employed. This model consists of a set of equations describing the applied potential field, flow field and concentration field in such geometries. The effects of various operational parameters are investigated based on the simultaneous solution to this model, to explore optimized configurations for flow and mass transport control in crossing linked microchannels.
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Hsu, C. P., N. E. Jewell-Larsen, A. C. Rollins, I. A. Krichtafovitch, S. W. Montgomery, J. T. Dibene, and A. V. Mamishev. "Miniaturization of Electrostatic Fluid Accelerators." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-13990.

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Existing thermal management methods for electronics do not meet technology needs and remain a major bottleneck in the evolution of computing, sensing, and information technology. The decreasing size of microelectronics components and the resulting increasing thermal output density require novel cooling solutions. Electrohydrodynamic ionic wind pumps, also known as electrostatic fluid accelerators (EFA), have the potential of becoming a critical element of electronic thermal management solutions. In order to take full advantage of EFA-based thermal management, it is essential to miniaturize EFA technology. This paper demonstrates the successful operation of a meso-scale microfabricated silicon EFA. A cantilever structure fabricated in bulk silicon with a radius of tip curvature of 25 μm is used as the corona electrode. The device was fabricated using a Deep Reactive Ion Etching (DRIE) microfabrication process. Forced convection cooling is demonstrated using infrared imaging, showing a 25°C surface temperature reduction over an actively heated substrate. The fabrication and test results of a meso-scale microfabricated EFA are presented in this paper.
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Ko, Jong Soo, Young-Ho Cho, Byung Man Kwak, and Kwanhum Park. "Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass." In ASME 1998 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1998. http://dx.doi.org/10.1115/imece1998-1267.

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Abstract This paper presents the production-oriented design and microfabrication process of a piezoresistive cantilever-beam microaccelerometer with a symmetrically bonded proof-mass. The symmetrically bonded proof-mass structure is devised not only for improving the production yield, but also for reducing the transverse sensitivity of the accelerometer. The accelerometers are batch fabricated in arrays, from which individual devices are obtained by wafer sawing process. The microfabricated accelerometer shows a resonant frequency of 2.15kHz and a sensitivity of 34μV/g/V within a nonlinearity of 2% over ±30g range at 100Hz. The structure and fabrication processes of the present accelerometer provide practical and effective means for the mass production of accelerometers with high reproducibility.
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Wang, Yaqiang, and Massood Tabib-Azar. "Fabrication and Characterization of Evanescent Microwave Probes Compatible With Atomic Force Microscope for Scanning Near-Field Microscopy." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-33291.

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The design and microfabrication of silicon co-axial evanescent microwave probes (EMP) compatible with atomic force microscope (AFM) imaging was discussed. Scanning EMP (SEMP) imaging is suitable for nondestructive surface and subsurface characterization of materials over a wide frequency range-between 0.1 GHz and 140 GHz. The microfabricated EMP consists of a silicon V-shaped cantilever beam, a co-axial tip, and aluminum co-planar waveguides. The coaxial tip has an apex radius of ∼80 Å. The tip itself is oxidation-sharpened heavily-doped silicon surrounded by an oxide layer that acts as insulator and covered with an aluminum co-axial layer. The tip apex is electrically connected to a strip of aluminum that forms the active part of the waveguide. The design and microfabrication procedure are described. Mechanical and electrical characterizations are discussed. Contact mode and SEMP surface measurement results are reported. The first ever simultaneous contact AFM and scanning near-field microwave microscopy (SNMM) surface imaging are presented. Using the microwave measurement along with the AFM imaging opens up a new window to see inside the materials and sets the stage for hyperspectral imaging of organelles of biological objects as well as electronic devices and structural materials.
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Mu¨ller, Norbert, and Luc G. Fre´chette. "Performance Analysis of Brayton and Rankine Cycle Microsystems for Portable Power Generation." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-39628.

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The presented work analyses the design space and performance potential of microfabricated Brayton cycle and Rankine cycle devices, accounting for lower component efficiencies, temperatures limited by the material properties and system implementation—constraints imposed by silicon microfabrication and miniaturization. By exploring the design space of such microsystems, their potential thermal efficiency and power density are defined. Results for both types of devices are shown graphically and design challenges and guidelines are determined and found to be different from their large-scale counterparts. Similar analysis was performed for Brayton and Rankine cycle devices, with more complete assessment of the latter by including, windage, generator, conductive and heat sink losses. In contrast to the Brayton cycle, the compression work of the Rankine cycle is minimal and the pump efficiency is not critical. The investigation suggests a higher potential for Rankine cycle devices than for Brayton cycle devices.
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Reports on the topic "Microfabricati"

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Jau, Yuan-Yu. Microfabricated Waveguide Atom Traps. Office of Scientific and Technical Information (OSTI), September 2017. http://dx.doi.org/10.2172/1396077.

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Woodard, David W. Microfabrication Technology for Photonics. Fort Belvoir, VA: Defense Technical Information Center, June 1990. http://dx.doi.org/10.21236/ada225428.

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James C. Lund. Microfabricated Solid State Neutron Generators. Office of Scientific and Technical Information (OSTI), November 2000. http://dx.doi.org/10.2172/791322.

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James C. Lund. Microfabricated Solid State Neutron Generators. Office of Scientific and Technical Information (OSTI), September 2001. http://dx.doi.org/10.2172/791324.

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Spahn, Olga Blum, Adam M. Rowen, Michael Joseph Cich, Gregory Merwin Peake, Christian L. Arrington, Thomas J. Nash, John Frederick Klem, and Dustin Heinz Romero. Microfabricated wire arrays for Z-pinch. Office of Scientific and Technical Information (OSTI), October 2008. http://dx.doi.org/10.2172/945909.

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Bandyopadhyay, P. R. A Microfabricated Surface for Turbulence Control. Fort Belvoir, VA: Defense Technical Information Center, November 1993. http://dx.doi.org/10.21236/ada637044.

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Pitts, W. K., K. M. Walsh, H. L. Cox, and Jr. Development of Microfabricated Radiation Sensor Systems. Fort Belvoir, VA: Defense Technical Information Center, November 2000. http://dx.doi.org/10.21236/ada392846.

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Cowan, Benjamin M. Microfabrication of Laser-Driven Accelerator Structures. Office of Scientific and Technical Information (OSTI), April 2003. http://dx.doi.org/10.2172/812999.

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Revelle, Melissa. Microfabricated Devices and Ion Trapping Capabilities. Office of Scientific and Technical Information (OSTI), July 2022. http://dx.doi.org/10.2172/1876626.

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SASAKI, DARRYL Y., JULIE A. LAST, BRUCE BONDURANT, TINA A. WAGGONER, C. JEFFREY BRINKER, SHANALYN A. KEMME, JOEL R. WENDT, et al. Nanostructured Materials Integrated in Microfabricated Optical Devices. Office of Scientific and Technical Information (OSTI), December 2002. http://dx.doi.org/10.2172/808600.

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