Journal articles on the topic 'Microelectromechanical systems'
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Gabriel, K. J. "Microelectromechanical systems." Proceedings of the IEEE 86, no. 8 (1998): 1534–35. http://dx.doi.org/10.1109/5.704257.
Full textMehregany, M. "Microelectromechanical systems." IEEE Circuits and Devices Magazine 9, no. 4 (July 1993): 14–22. http://dx.doi.org/10.1109/101.250229.
Full textMacDonald, Noel C. "SCREAM MicroElectroMechanical Systems." Microelectronic Engineering 32, no. 1-4 (September 1996): 49–73. http://dx.doi.org/10.1016/0167-9317(96)00007-x.
Full textVasylenko, Mykola, and Maksym Mahas. "Microelectromechanical Gyrovertical." Electronics and Control Systems 1, no. 71 (June 27, 2022): 16–21. http://dx.doi.org/10.18372/1990-5548.71.16818.
Full textBhat, K. N. "Micromachining for Microelectromechanical Systems." Defence Science Journal 48, no. 1 (January 1, 1998): 5–19. http://dx.doi.org/10.14429/dsj.48.3863.
Full textKal, Santiram. "Microelectromechanical Systems and Microsensors." Defence Science Journal 57, no. 3 (May 23, 2007): 209–24. http://dx.doi.org/10.14429/dsj.57.1762.
Full textGupta, Amita. "Advances in Microelectromechanical Systems." Defence Science Journal 59, no. 6 (November 24, 2009): 555–56. http://dx.doi.org/10.14429/dsj.59.1579.
Full textLouizos, Louizos-Alexandros, Panagiotis G. Athanasopoulos, and Kevin Varty. "Microelectromechanical Systems and Nanotechnology." Vascular and Endovascular Surgery 46, no. 8 (October 8, 2012): 605–9. http://dx.doi.org/10.1177/1538574412462637.
Full textKristo, Blaine, Joseph C. Liao, Hercules P. Neves, Bernard M. Churchill, Carlo D. Montemagno, and Peter G. Schulam. "Microelectromechanical systems in urology." Urology 61, no. 5 (May 2003): 883–87. http://dx.doi.org/10.1016/s0090-4295(03)00032-3.
Full text(Rich) Pryputniewicz, R. J. "Progress in Microelectromechanical Systems." Strain 43, no. 1 (February 2007): 13–25. http://dx.doi.org/10.1111/j.1475-1305.2007.00303.x.
Full textPackard, Corinne E., Apoorva Murarka, Eric W. Lam, Martin A. Schmidt, and Vladimir Bulović. "Contact-Printed Microelectromechanical Systems." Advanced Materials 22, no. 16 (April 22, 2010): 1840–44. http://dx.doi.org/10.1002/adma.200903034.
Full textAnsorge, Erik, Bertram Schmidt, Jan Sauerwald, and Holger Fritze. "Langasite for microelectromechanical systems." physica status solidi (a) 208, no. 2 (September 23, 2010): 377–89. http://dx.doi.org/10.1002/pssa.201026508.
Full textSonetha, Vaibhavi, Poorvi Agarwal, Smeet Doshi, Ridhima Kumar, and Bhavya Mehta. "Microelectromechanical Systems in Medicine." Journal of Medical and Biological Engineering 37, no. 4 (June 19, 2017): 580–601. http://dx.doi.org/10.1007/s40846-017-0265-x.
Full textFechan, Andriy, Yuriy Khoverko, Vladyslav Dalyavskii, and Taras Dyhdalovych. "Visualization of color label sensors in microelectromechanical systems." Computational Problems of Electrical Engineering 13, no. 2 (December 15, 2023): 9–14. http://dx.doi.org/10.23939/jcpee2023.02.009.
Full textXu, L., C. Zhu, and L. Qin. "Microelectromechanical coupled dynamics." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, no. 10 (October 1, 2006): 1589–600. http://dx.doi.org/10.1243/09544062jmes134.
Full textAdeosun, Oluwatosin. "Microelectromechanical Systems Lab Simulation Tool." Journal of Purdue Undergraduate Research 4, no. 1 (August 12, 2014): 74–75. http://dx.doi.org/10.5703/1288284315436.
Full textLiqin, Liu, Tang You Gang, and Wu Zhiqiang. "Nonlinear Dynamics of Microelectromechanical Systems." Journal of Vibration and Control 12, no. 1 (January 2006): 57–65. http://dx.doi.org/10.1177/1077546306061127.
Full textBustillo, J. M., R. T. Howe, and R. S. Muller. "Surface micromachining for microelectromechanical systems." Proceedings of the IEEE 86, no. 8 (1998): 1552–74. http://dx.doi.org/10.1109/5.704260.
Full textPolla, D. L., and P. J. Schiller. "Integrated ferroelectric microelectromechanical systems (MEMS)." Integrated Ferroelectrics 7, no. 1-4 (February 1995): 359–70. http://dx.doi.org/10.1080/10584589508220246.
Full textMehregany, M., C. A. Zorman, S. Roy, A. J. Fleischman, and N. Rajan. "Silicon carbide for microelectromechanical systems." International Materials Reviews 45, no. 3 (March 2000): 85–108. http://dx.doi.org/10.1179/095066000101528322.
Full textZhou, Shu-Ang. "On forces in microelectromechanical systems." International Journal of Engineering Science 41, no. 3-5 (March 2003): 313–35. http://dx.doi.org/10.1016/s0020-7225(02)00207-0.
Full textBiasotti, M., L. Pellegrino, E. Bellingeri, C. Bernini, A. S. Siri, and D. Marrè. "All-Oxide Crystalline Microelectromechanical systems." Procedia Chemistry 1, no. 1 (September 2009): 839–42. http://dx.doi.org/10.1016/j.proche.2009.07.209.
Full textSoper, Steven A., Sean M. Ford, Shize Qi, Robin L. McCarley, Kevin Kelly, and Michael C. Murphy. "Peer Reviewed: Polymeric Microelectromechanical Systems." Analytical Chemistry 72, no. 19 (October 2000): 642 A—651 A. http://dx.doi.org/10.1021/ac0029511.
Full textBao, Minhang, and Weiyuan Wang. "Future of microelectromechanical systems (MEMS)." Sensors and Actuators A: Physical 56, no. 1-2 (August 1996): 135–41. http://dx.doi.org/10.1016/0924-4247(96)01274-5.
Full textLatif, Rhonira, Enrico Mastropaolo, Andy Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, and Leslie Smith. "Microelectromechanical systems for biomimetical applications." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 28, no. 6 (November 2010): C6N1—C6N6. http://dx.doi.org/10.1116/1.3504892.
Full textSeppa, H., J. Kyynarainen, and A. Oja. "Microelectromechanical systems in electrical metrology." IEEE Transactions on Instrumentation and Measurement 50, no. 2 (April 2001): 440–44. http://dx.doi.org/10.1109/19.918161.
Full textChircov, Cristina, and Alexandru Mihai Grumezescu. "Microelectromechanical Systems (MEMS) for Biomedical Applications." Micromachines 13, no. 2 (January 22, 2022): 164. http://dx.doi.org/10.3390/mi13020164.
Full textHartzell, Allyson. "Optical microelectromechanical systems: designing for reliability." Journal of Micro/Nanolithography, MEMS, and MOEMS 6, no. 3 (July 1, 2007): 033010. http://dx.doi.org/10.1117/1.2775458.
Full textYang, Yisong, Ruifeng Zhang, and Le Zhao. "Dynamics of electrostatic microelectromechanical systems actuators." Journal of Mathematical Physics 53, no. 2 (February 2012): 022703. http://dx.doi.org/10.1063/1.3684748.
Full textLee, Y. C., B. A. Parviz, J. A. Chiou, and S. Chen. "Packaging for microelectromechanical and nanoelectromechanical systems." IEEE Transactions on Advanced Packaging 26, no. 3 (August 2003): 217–26. http://dx.doi.org/10.1109/tadvp.2003.817973.
Full textElko, Gary W. "Small directional microelectromechanical systems microphone arrays." Journal of the Acoustical Society of America 133, no. 5 (May 2013): 3317. http://dx.doi.org/10.1121/1.4805527.
Full textGriggio, F., H. Kim, S. O. Ural, T. N. Jackson, K. Choi, R. L. Tutwiler, and S. Trolier-Mckinstry. "Medical Applications of Piezoelectric Microelectromechanical Systems." Integrated Ferroelectrics 141, no. 1 (January 2013): 169–86. http://dx.doi.org/10.1080/10584587.2012.694741.
Full textBryzek, J., A. Flannery, and D. Skurnik. "Integrating microelectromechanical systems with integrated circuits." IEEE Instrumentation & Measurement Magazine 7, no. 2 (June 2004): 51–59. http://dx.doi.org/10.1109/mim.2004.1304566.
Full textAnscombe, N. "Good things, small packages [microelectromechanical systems]." Manufacturing Engineer 83, no. 3 (June 1, 2004): 10–13. http://dx.doi.org/10.1049/me:20040301.
Full textRiddle, A. "Nano- and microelectromechanical systems [Book Review]." IEEE Microwave Magazine 2, no. 4 (December 2001): 84–85. http://dx.doi.org/10.1109/mmw.2001.969938.
Full textKhuri‐Yakub, B. T. "Smart structures and microelectromechanical systems (MEMS)." Journal of the Acoustical Society of America 106, no. 4 (October 1999): 2233. http://dx.doi.org/10.1121/1.427599.
Full textMaluf, Nadim. "An Introduction to Microelectromechanical Systems Engineering." Measurement Science and Technology 13, no. 2 (January 16, 2002): 229. http://dx.doi.org/10.1088/0957-0233/13/2/701.
Full textTadigadapa, Srinivas. "Piezoelectric microelectromechanical systems — challenges and opportunities." Procedia Engineering 5 (2010): 468–71. http://dx.doi.org/10.1016/j.proeng.2010.09.148.
Full textFreidhoff, C. B., R. M. Young, S. Sriram, T. T. Braggins, T. W. O'Keefe, J. D. Adam, H. C. Nathanson, et al. "Chemical sensing using nonoptical microelectromechanical systems." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17, no. 4 (July 1999): 2300–2307. http://dx.doi.org/10.1116/1.581764.
Full textGall, K., P. Kreiner, D. Turner, and M. Hulse. "Shape-Memory Polymers for Microelectromechanical Systems." Journal of Microelectromechanical Systems 13, no. 3 (June 2004): 472–83. http://dx.doi.org/10.1109/jmems.2004.828727.
Full textEzawa, Motohiko. "Topological microelectromechanical systems." Physical Review B 103, no. 15 (April 26, 2021). http://dx.doi.org/10.1103/physrevb.103.155425.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 30, no. 2 (April 2021): C2. http://dx.doi.org/10.1109/jmems.2021.3063826.
Full textChu, V., J. Gaspar, and J. P. Conde. "Thin Film Microelectromechanical Systems." MRS Proceedings 715 (2002). http://dx.doi.org/10.1557/proc-715-a12.3.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 30, no. 1 (February 2021): C2. http://dx.doi.org/10.1109/jmems.2020.3038296.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 31, no. 4 (August 2022): C2. http://dx.doi.org/10.1109/jmems.2022.3189490.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 31, no. 3 (June 2022): C2. http://dx.doi.org/10.1109/jmems.2022.3172163.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 30, no. 6 (December 2021): C2. http://dx.doi.org/10.1109/jmems.2021.3123770.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 30, no. 3 (June 2021): C2. http://dx.doi.org/10.1109/jmems.2021.3077790.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 30, no. 4 (August 2021): C2. http://dx.doi.org/10.1109/jmems.2021.3095642.
Full text"Journal of Microelectromechanical Systems." Journal of Microelectromechanical Systems 31, no. 2 (April 2022): C2. http://dx.doi.org/10.1109/jmems.2022.3158710.
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