Journal articles on the topic 'Microelectromechanical systems technology'
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Liepmann, Dorian, Albert P. Pisano, and Burton Sage. "Microelectromechanical Systems Technology to Deliver Insulin." Diabetes Technology & Therapeutics 1, no. 4 (December 1999): 469–76. http://dx.doi.org/10.1089/152091599317026.
Full textLucyszyn, S. "Review of radio frequency microelectromechanical systems technology." IEE Proceedings - Science, Measurement and Technology 151, no. 2 (March 1, 2004): 93–103. http://dx.doi.org/10.1049/ip-smt:20040405.
Full textLiu, A. Q., X. M. Zhang, H. Cai, D. Y. Tang, and C. Lu. "Miniaturized injection-locked laser using microelectromechanical systems technology." Applied Physics Letters 87, no. 10 (September 5, 2005): 101101. http://dx.doi.org/10.1063/1.2035321.
Full textZhang, X. M., A. Q. Liu, D. Y. Tang, and C. Lu. "Discrete wavelength tunable laser using microelectromechanical systems technology." Applied Physics Letters 84, no. 3 (January 19, 2004): 329–31. http://dx.doi.org/10.1063/1.1639130.
Full textYokoyama, Yoshisato, Takashi Fukushige, Seiichi Hata, Kazuya Masu, and Akira Shimokohbe. "On-Chip Variable Inductor Using Microelectromechanical Systems Technology." Japanese Journal of Applied Physics 42, Part 1, No. 4B (April 30, 2003): 2190–92. http://dx.doi.org/10.1143/jjap.42.2190.
Full textBishop, David, Arthur Heuer, and David Williams. "Microelectro-mechanical Systems: Technology and Applications." MRS Bulletin 26, no. 4 (April 2001): 282–88. http://dx.doi.org/10.1557/mrs2001.60.
Full textKorikov, A. M., and Y. E. Meshcheryakov. "Orientation of mining technology machines based on microelectromechanical systems." Proceedings of Tomsk State University of Control Systems and Radioelectronics 21, no. 4 (2018): 92–97. http://dx.doi.org/10.21293/1818-0442-2018-21-4-92-97.
Full textChircov, Cristina, and Alexandru Mihai Grumezescu. "Microelectromechanical Systems (MEMS) for Biomedical Applications." Micromachines 13, no. 2 (January 22, 2022): 164. http://dx.doi.org/10.3390/mi13020164.
Full textChoe, Howard C., and Emel S. Bulat. "Systems and methods for sensing an acoustic signal using microelectromechanical systems technology." Journal of the Acoustical Society of America 118, no. 1 (2005): 25. http://dx.doi.org/10.1121/1.1999410.
Full textKota, S., G. K. Ananthasuresh, S. B. Crary, and K. D. Wise. "Design and Fabrication of Microelectromechanical Systems." Journal of Mechanical Design 116, no. 4 (December 1, 1994): 1081–88. http://dx.doi.org/10.1115/1.2919490.
Full textLatif, Rhonira, Enrico Mastropaolo, Andy Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, and Leslie Smith. "Microelectromechanical systems for biomimetical applications." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 28, no. 6 (November 2010): C6N1—C6N6. http://dx.doi.org/10.1116/1.3504892.
Full textBaghelani, Masoud, Ahmad Hosseini-Sianaki, Zeinab Behzadi, and Arash Mirabdolah Lavasani. "Simulation of capacitive pressure sensor based on microelectromechanical systems technology." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 232, no. 9 (April 27, 2017): 1538–46. http://dx.doi.org/10.1177/0954406217706095.
Full textElders, Job, Vincent Spiering, and Steve Walsh. "Microsystems Technology (MST) and MEMS Applications: An Overview." MRS Bulletin 26, no. 4 (April 2001): 312–15. http://dx.doi.org/10.1557/mrs2001.69.
Full textSHAKHER, SARDER SHAMIR, and KWADWO OSEI BONSU. "OPTIMIZATION OF THE MICROELECTROMECHANICAL PROPERTIES OF HEAT EXCHANGE SYSTEMS THROUGH MICROCHANNEL TECHNOLOGY." Journal of Engineering Studies and Research 27, no. 1 (June 8, 2021): 120–31. http://dx.doi.org/10.29081/jesr.v27i1.261.
Full textZhenhai Chen and R. C. Luo. "Design and implementation of capacitive proximity sensor using microelectromechanical systems technology." IEEE Transactions on Industrial Electronics 45, no. 6 (1998): 886–94. http://dx.doi.org/10.1109/41.735332.
Full textKim, Steven, and Shuvo Roy. "Microelectromechanical Systems and Nephrology: The Next Frontier in Renal Replacement Technology." Advances in Chronic Kidney Disease 20, no. 6 (November 2013): 516–35. http://dx.doi.org/10.1053/j.ackd.2013.08.006.
Full textMarom, Dan M. "Enabling Devices Using MicroElectroMechanical System (MEMS) Technology for Optical Networking." Advances in Science and Technology 55 (September 2008): 145–49. http://dx.doi.org/10.4028/www.scientific.net/ast.55.145.
Full textBaltiysky, S., I. Gurov, S. De Nicola, P. Ferraro, A. Finizio, and G. Coppola. "Characterization of microelectromechanical systems by digital holography method." Imaging Science Journal 54, no. 2 (June 2006): 103–10. http://dx.doi.org/10.1179/174313106x98746.
Full textLysenko, Igor, Alexey Tkachenko, Elena Sherova, and Alexander Nikitin. "Analytical Approach in the Development of RF MEMS Switches." Electronics 7, no. 12 (December 10, 2018): 415. http://dx.doi.org/10.3390/electronics7120415.
Full textKomvopoulos, K., and W. Yan. "A Fractal Analysis of Stiction in Microelectromechanical Systems." Journal of Tribology 119, no. 3 (July 1, 1997): 391–400. http://dx.doi.org/10.1115/1.2833500.
Full textZou, Ting, and Jorge Angeles. "Structural and instrumentation design of a microelectromechanical systems biaxial accelerometer." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 228, no. 13 (January 7, 2014): 2440–55. http://dx.doi.org/10.1177/0954406213518745.
Full textHuang, Hai Qing, Wei Min Li, and Wen Yi Ren. "Next-Generation ROADM Architecture and Technologies." Advanced Materials Research 760-762 (September 2013): 50–53. http://dx.doi.org/10.4028/www.scientific.net/amr.760-762.50.
Full textLysenko, Igor, Alexey Tkachenko, Olga Ezhova, Boris Konoplev, Eugeny Ryndin, and Elena Sherova. "The Mechanical Effects Influencing on the Design of RF MEMS Switches." Electronics 9, no. 2 (January 22, 2020): 207. http://dx.doi.org/10.3390/electronics9020207.
Full textAllerdissen, Merle, Rinaldo Greiner, and Andreas Richter. "Microfluidic Microchemomechanical Systems." Advances in Science and Technology 81 (September 2012): 84–89. http://dx.doi.org/10.4028/www.scientific.net/ast.81.84.
Full textWoods, R. C., and A. L. Powell. "The impact of III-V semiconductors on microelectromechanical systems." Engineering Science & Education Journal 3, no. 6 (December 1, 1994): 271–75. http://dx.doi.org/10.1049/esej:19940607.
Full textLi, J.-B., K. Jiang, and G. J. Davies. "Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, no. 9 (September 1, 2006): 1481–87. http://dx.doi.org/10.1243/09544062jmes323ft.
Full textDarrow, Margaret M., and David D. Jensen. "Cold Region Applications for In-Place Inclinometers Based on Microelectromechanical Systems Technology." Transportation Research Record: Journal of the Transportation Research Board 2433, no. 1 (January 2014): 1–9. http://dx.doi.org/10.3141/2433-01.
Full textKwon, Hyouk, Sun-Ho Kim, Youngjoo Yee, Jong-Min Ha, Sang-Cheon Kim, Ki-Chang Song, Ki-Young Um, Hyo-Jin Nam, Young-Chang Joo, and Jong-Uk Bu. "Micro-Optical Fiber Coupler on Silicon Bench Based on Microelectromechanical Systems Technology." Japanese Journal of Applied Physics 46, no. 8B (August 23, 2007): 5473–77. http://dx.doi.org/10.1143/jjap.46.5473.
Full textKumar, Sanjay, Pulak Bhushan, Mohit Pandey, and Shantanu Bhattacharya. "Additive manufacturing as an emerging technology for fabrication of microelectromechanical systems (MEMS)." Journal of Micromanufacturing 2, no. 2 (June 17, 2019): 175–97. http://dx.doi.org/10.1177/2516598419843688.
Full textShen, Bin, Hongquan Zhang, Xinlei Liu, Shengwu Cao, and Peiqing Yang. "Fabrication and Characterizations of Catalytic Methane Sensor Based on Microelectromechanical Systems Technology." Journal of Nanoelectronics and Optoelectronics 13, no. 12 (December 12, 2018): 1816–22. http://dx.doi.org/10.1166/jno.2018.2435.
Full textSchirosi, V., G. Del Re, L. Ferrari, P. Caliandro, L. Rizzi, and G. Melone. "A Novel Manufacturing Technology for RF MEMS Devices on Ceramic Substrates." Journal of Sensors 2010 (2010): 1–6. http://dx.doi.org/10.1155/2010/625325.
Full textKahn, H., A. H. Heuer, and R. Ballarini. "On-Chip Testing of Mechanical Properties of MEMS Devices." MRS Bulletin 26, no. 4 (April 2001): 300–301. http://dx.doi.org/10.1557/mrs2001.64.
Full textHaghighi, F., Z. Talebpour, and A. Sanati-Nezhad. "Through the years with on-a-chip gas chromatography: a review." Lab on a Chip 15, no. 12 (2015): 2559–75. http://dx.doi.org/10.1039/c5lc00283d.
Full textDroogendijk, H., R. A. Brookhuis, M. J. de Boer, R. G. P. Sanders, and G. J. M. Krijnen. "Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology." Journal of The Royal Society Interface 11, no. 99 (October 6, 2014): 20140573. http://dx.doi.org/10.1098/rsif.2014.0573.
Full textHornbeck, Larry J. "The DMDTM Projection Display Chip: A MEMS-Based Technology." MRS Bulletin 26, no. 4 (April 2001): 325–27. http://dx.doi.org/10.1557/mrs2001.72.
Full textLee, Changho, Jin Kim, and Chulhong Kim. "Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies." Micromachines 9, no. 11 (November 8, 2018): 584. http://dx.doi.org/10.3390/mi9110584.
Full textTu, Wei-Hsiang, Wen-Chang Chu, Chih-Kung Lee, Pei-Zen Chang, and Yuh-Chung Hu. "Effects of etching holes on complementary metal oxide semiconductor–microelectromechanical systems capacitive structure." Journal of Intelligent Material Systems and Structures 24, no. 3 (June 11, 2012): 310–17. http://dx.doi.org/10.1177/1045389x12449917.
Full textGiles, C. Randy, David Bishop, and Vladimir Aksyuk. "MEMS for Light-Wave Networks." MRS Bulletin 26, no. 4 (April 2001): 328–29. http://dx.doi.org/10.1557/mrs2001.73.
Full textBurcham, Kevin E., and Joseph T. Boyd. "Freestanding, micromachined, multimode silicon optical waveguides at λ = 13 μm for microelectromechanical systems technology." Applied Optics 37, no. 36 (December 20, 1998): 8397. http://dx.doi.org/10.1364/ao.37.008397.
Full textCao, Li, Susan Mantell, and Dennis Polla. "Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology." Sensors and Actuators A: Physical 94, no. 1-2 (October 2001): 117–25. http://dx.doi.org/10.1016/s0924-4247(01)00680-x.
Full textSamotaev, Nikolay, Konstantin Oblov, Maya Etrekova, Denis Veselov, and Anastasiya Gorshkova. "Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology." Materials Science Forum 977 (February 2020): 238–43. http://dx.doi.org/10.4028/www.scientific.net/msf.977.238.
Full textMurashev, V. N., S. A. Legotin, S. I. Didenko, Oleg Rabinovich, A. A. Krasnov, and S. U. Urchuk. "Improvement of Si-Betavoltaic Batteries Technology." Advanced Materials Research 1070-1072 (December 2014): 585–88. http://dx.doi.org/10.4028/www.scientific.net/amr.1070-1072.585.
Full textEsashi, Masayoshi. "Introduction to the special issue: microrobots and distributed microactuators in Japan." Robotica 14, no. 5 (September 1996): 467. http://dx.doi.org/10.1017/s0263574700019925.
Full textMorrison, Richard, Livia Racz, and David Carter. "Case Study: Design and Construction of the Draper Laboratory Microfabrication Center." Journal of the IEST 56, no. 1 (March 1, 2013): 3–16. http://dx.doi.org/10.17764/jiet.56.1.t755m81670245652.
Full textHang, Bui Thu, Tran Duc Tan, and Chu Duc Trinh. "Three-axis piezoresistive accelerometer with adjustable axial resolutions." Vietnam Journal of Mechanics 34, no. 1 (March 1, 2012): 45–54. http://dx.doi.org/10.15625/0866-7136/34/1/427.
Full textKnapkiewicz, Pawel. "Technological Assessment of MEMS Alkali Vapor Cells for Atomic References." Micromachines 10, no. 1 (December 31, 2018): 25. http://dx.doi.org/10.3390/mi10010025.
Full textBaik, S., J. P. Blanchard, and M. L. Corradini. "Development of Micro-Diesel Injector Nozzles via Microelectromechanical Systems Technology and Effects on Spray Characteristics." Journal of Engineering for Gas Turbines and Power 125, no. 2 (April 1, 2003): 427–34. http://dx.doi.org/10.1115/1.1559901.
Full textZhu, Wei Ming, Wu Zhang, Hong Cai, Tarik Bourouina, and Ai Qun Liu. "A Photonic MEMS Polarization Switch." Advanced Materials Research 74 (June 2009): 63–66. http://dx.doi.org/10.4028/www.scientific.net/amr.74.63.
Full textHuang, Jung-Tang, Kuo-Yu Lee, Hou-Jun Hsu, Rung-Gen Wu, Ming-Zhe Lin, Ting-Chiang Tsai, and Ching-Kong Chen. "Fabrication Technology of Microelectromechanical Systems Probe Chip Compatible with Standard Complementary Metal–Oxide–Semiconductor Process." Japanese Journal of Applied Physics 49, no. 6 (June 21, 2010): 06GN02. http://dx.doi.org/10.1143/jjap.49.06gn02.
Full textSamiee, M., K. Garre, M. Cahay, P. B. Kosel, S. Fairchild, J. W. Fraser, and D. J. Lockwood. "Field emission characteristics of a lanthanum monosulfide cold cathode array fabricated using microelectromechanical systems technology." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26, no. 2 (2008): 764. http://dx.doi.org/10.1116/1.2837893.
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