Books on the topic 'Microelectromechanical systems technology'

Ekwall, Britt, and Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Edited by Ekwall Britt and Cronquist Mikkel. Hauppauge, N.Y: Nova Science Publishers, 2009.

Gross, Michael. Travels to the nanoworld: Miniature machinery in nature and technology. Cambridge, Mass: Perseus Pub., 2001.

Michael, Gross. Travels to the nanoworld: Miniature machinery in nature and technology. Cambridge, Mass: Perseus Pub., 2001.

Hensler, Ralph. MEMS technology: Where to? Norwalk, CT: Business Communications Co., 2002.

Hierlemann, A. Integrated chemical microsensor systems in CMOS technology. Berlin: Springer, 2005.

H, Baltes, ed. Enabling technology for MEMS and nanodevices. Weinheim, Germany: Wiley-VCH, 2004.

Aiqun, Liu, ed. MEMS technology and devices: Suntec, Singapore, 1-6 July 2007. Singapore: Pan Stanford Pub., 2007.

RF MEMS: Theory, design, and technology. Hoboken, N.J: Wiley-Interscience, 2003.

Bourne, Marlene Avis. Microfluidics technology: Emerging markets for micronozzles, microvalves, and microsystems. Norwalk, CT: Business Communications Co., 1999.

Micro and smart systems: Technology and modeling. Hoboken, NJ: John Wiley and Sons, 2012.

Michael, Gross. Travels to the nanoworld: Miniature machinery in nature and technology. Cambridge, Mass: Perseus Pub., 2001.

Travels to the nanoworld: Miniature machinery in nature and technology. New York: Plenum, 1999.

Darling, David J. Micromachines and nanotechnology: The amazing new world of the ultrasmall. Parsippany, N.J: Dillon Press, 1995.

den, Berg A. van, Bergveld P. 1940-, and National Sensor Conference (3rd : 1998 : Universiteit Twente), eds. Sensor technology in the Netherlands: State of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2--3 March 1998. Boston, Mass: Kluwer Academic Publishers, 1998.

Adhesion aspects in MEMS-NEMS. Leiden: Brill, 2010.

Suni, Tommi. Direct wafer bonding for MEMS and microelectronics. [Espoo, Finland]: VTT Technical Research Centre of Finland, 2006.

Mehta, Pratima. Micromachining technology: New developments, trends and markets. Norwalk, CT: Business Communications Co., 1995.

Zhaoying, Zhou, and SPIE (Society), eds. MEMS/NEMS technology and applications: 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China. Bellingham, Wash: SPIE, 2009.

Zhaoying, Zhou, Zhongguo yi qi yi biao xue hui, Zhongguo guang xue xue hui, Zhongguo yi qi yi biao xue hui. Optoelectronic-Mechanic Technology and System Integration Chapter, and SPIE (Society), eds. 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS technology and applications : 19-21 October 2009, Shanghai, China. Bellingham, Wash: SPIE, 2009.

Lynn, Khine, and Tsai Julius M, eds. NEMS/MEMS technology and devices: Selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore. Durnten-Zurich: Trans Tech, 2011.

International, Symposium on Semiconductor Wafer Bonding (9th 2006 Cancun Mexico). Simiconductor wafer bonding 9: Science, technology, and applications. Pennington, N.J: The Electrochemical Society, 2006.

RF MEMS circuit design for wireless communications. Boston: Artech House, 2002.

Lee, El-Hang. VLSI micro- and nanophotonics : science, technology, and applications. Boca Raton, FL: CRC Press, 2010.

Silberzan, Pascal, and Jean Berthier. Microfluidics for Biotechnology (Microelectromechanical Systems). Artech House Publishers, 2005.

Setter, N. Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology). Springer, 2005.

G, DeAnna Russell, Reshotko Eli, and United States. National Aeronautics and Space Administration., eds. Microelectromechanical systems for aerodynamics applications. [Washington, D.C: National Aeronautics and Space Administration, 1996.

Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology Book 9). Springer, 2006.

Setter, Nava. Electroceramic-Based MEMS: Fabrication-Technology and Applications. Springer, 2010.

1948-, Fukuda T., and Menz W, eds. Micro mechanical systems: Principles and technology. Amsterdam: Elsevier, 1998.

Zhou, Clarence. Microchip Oscillators and Clocks Using Microelectromechanical Systems (MEMS) Technology. Microchip Technology Incorporated, 2018.

Nelson, Taylor. Microchip Oscillators and Clocks Using Microelectromechanical Systems (MEMS) Technology. Microchip Technology Incorporated, 2017.

Lee, Jade. Microchip Oscillators and Clocks Using Microelectromechanical Systems (MEMS) Technology. Microchip Technology Incorporated, 2018.

Takenaka, Norio. Microchip Oscillators and Clocks Using Microelectromechanical Systems (MEMS) Technology. Microchip Technology Incorporated, 2017.

Iannacci, Jacopo. RF-MEMS Technology for High-Performance Passives. Iop Publishing Ltd, 2018.

Institute Of Electrical and Electronics Engineers and Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg. Microelectromechanical Systems, 1998 IEEE 11th International Workshop. Institute of Electrical & Electronics Enginee, 1998.

Optical MEMS: Worldwide markets for a strategic and convergent technology. New York: John Wiley, 2000.

Gross, Michael. Travels to the Nanoworld: Miniature Machinery in Nature and Technology. Basic Books, 2001.

1949-, Setter N., ed. Electroceramic-based MEMS: Fabrication technology and applications. New York: Springer, 2005.

Control, Mechatronics and Automation Technology. Taylor & Francis Group, 2015.

(Editor), Jorg P. Kutter, and Yolanda Fintschenko (Editor), eds. Separation Methods In Microanalytical Systems. CRC, 2005.

Qin, Yi. Micromanufacturing Engineering and Technology. Elsevier Science & Technology Books, 2015.

Qin, Yi. Micromanufacturing Engineering and Technology. Elsevier Science & Technology Books, 2024.

Thompson, Sarah, and Yongbing Xu. Spintronic Materials and Technology. Taylor & Francis Group, 2006.

Thompson, Sarah, and Yongbing Xu. Spintronic Materials and Technology. Taylor & Francis Group, 2006.

Qin, Yi. Micromanufacturing Engineering and Technology. Elsevier Science & Technology Books, 2010.

Qin, Yi. Micromanufacturing Engineering and Technology. Elsevier Science & Technology Books, 2015.

Qin, Yi. Micromanufacturing Engineering and Technology. Elsevier Science & Technology Books, 2010.

Thompson, Sarah, and Yongbing Xu. Spintronic Materials and Technology. Taylor & Francis Group, 2019.

Thompson, Sarah, Yongbing Xu, Y. B. Xu, and S. M. Thompson. Spintronic Materials and Technology. Taylor & Francis Group, 2010.

Savage. Optical MEMS: Worldwide Markets for a Strategic and Convergent Technology. John Wiley & Sons Inc, 2000.