Dissertations / Theses on the topic 'Microelectromechanical systems – Micromachining'
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Kim, Yong-Jun. "Application of polymer/metal multi-layer processing techniques to microelectromechanical systems." Diss., Georgia Institute of Technology, 1997. http://hdl.handle.net/1853/14987.
Full textTondapu, Karthik. "Design and fabrication of one and two axis nickel electroplated micromirror array." Diss., Columbia, Mo. : University of Missouri-Columbia, 2007. http://hdl.handle.net/10355/6037.
Full textThe entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on April 15, 2008) Includes bibliographical references.
Coe, David James. "Fabrication technology approaches to micromachined synthetic jets." Diss., Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/15485.
Full textPan, Bo. "Development of micromachined millimeter-wave modules for next-generation wireless transceiver front-ends." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/24654.
Full textCommittee Chair: John Papapolymerou; Committee Chair: Manos Tentzeris; Committee Member: Gordon Stuber; Committee Member: John Cressler; Committee Member: John Z. Zhang; Committee Member: Joy Laskar
Shah, Umer. "Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining." Doctoral thesis, KTH, Mikro- och nanosystemteknik, 2014. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-143757.
Full textQC 20140328
Abhijit, Upadhye. "Electrostatically actuated and bi-stable MEMS structures." Diss., Columbia, Mo. : University of Missouri-Columbia, 2007. http://hdl.handle.net/10355/6041.
Full textThe entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on April 16, 2008) Includes bibliographical references.
Wittwer, Jonathan W. "Predicting the Effects of Dimensional and Material Property Variations in Micro Compliant Mechanisms." BYU ScholarsArchive, 2001. https://scholarsarchive.byu.edu/etd/73.
Full textAlper, Said Emre. "Mems Gyroscopes For Tactical-grade Inertial Measurement Applications." Phd thesis, METU, 2005. http://etd.lib.metu.edu.tr/upload/12606483/index.pdf.
Full textwhile the decoupled drive and sense modes minimizes mechanical cross-coupling for low-noise and stable operation. Three different and new symmetric and decoupled gyroscope structures with unique features are presented. These structures are fabricated in four different micromachining processes: nickel electroforming (NE), dissolved-wafer silicon micromachining (DWSM), silicon-on-insulator (SOI) micromachining, and silicon-on-glass (SOG) micromachining. The fabricated gyroscopes have capacitive gaps from 1.5µ
m to 5.5µ
m and structural layer thicknesses from 12µ
m to 100µ
m, yielding aspect ratios up to 20 depending on the fabrication process. The size of fabricated gyroscope chips varies from 1x1mm2 up to 4.2x4.6mm2. Fabricated gyroscopes are hybrid-connected to a designed capacitive interface circuit, fabricated in a standard 0.6µ
m CMOS process. They have resonance frequencies as small as 2kHz and as large as 40kHz
sense-mode resonance frequencies can be electrostatically tuned to the drive-mode frequency by DC voltages less than 16V. The quality factors reach to 500 at atmospheric pressure and exceed 10,000 for the silicon gyroscopes at vacuum. The parasitic capacitance of the gyroscopes on glass substrates is measured to be as small as 120fF. The gyroscope and interface assemblies are then combined with electronic control and feedback circuits constructed with off-the-shelf IC components to perform angular rate measurements. Measured angular rate sensitivities are in the range from 12µ
V/(deg/sec) to 180µ
V/(deg/sec), at atmospheric pressure. The SOI gyroscope demonstrates the best performance at atmospheric pressure, with noise equivalent rate (NER) of 0.025(deg/sec)/Hz1/2, whereas the remaining gyroscopes has an NER better than 0.1(deg/sec)/Hz1/2, limited by either the small sensor size or by small quality factors. Gyroscopes have scale-factor nonlinearities better than 1.1% with the best value of 0.06%, and their bias drifts are dominated by the phase errors in the demodulation electronics and are over 1deg/sec. The characterization of the SOI and SOG gyroscopes at below 50mTorr vacuum ambient yield angular rate sensitivities as high as 1.6mV/(deg/sec) and 0.9mV/(deg/sec), respectively. The NER values of these gyroscopes at vacuum are smaller than 50(deg/hr)/Hz1/2 and 36(deg/hr)/Hz1/2, respectively, being close to the tactical-grade application limits. Gyroscope structures are expected to provide a performance better than 10 deg/hr in a practical measurement bandwidth such as 50Hz, provided that capacitive gaps are minimized while preserving the aspect ratio, and the demodulation electronics are improved.
Gadiraju, Priya D. "Laminated chemical and physical micro-jet actuators based on conductive media." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/26611.
Full textCommittee Chair: Allen, Mark; Committee Member: Allen, Sue; Committee Member: Glezer, Ari; Committee Member: Koros, Williams; Committee Member: Prausnitz, Mark. Part of the SMARTech Electronic Thesis and Dissertation Collection.
Azgin, Kivanc. "High Performance Mems Gyroscopes." Master's thesis, METU, 2007. http://etd.lib.metu.edu.tr/upload/12608194/index.pdf.
Full textm and structural layer thickness of 25 µ
m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.
Jensen, Kimberly A. "Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/230.
Full textNowakowski, Krzysztof A. "Laser beam interaction with materials for microscale applications." Link to electronic thesis, 2005. http://www.wpi.edu/Pubs/ETD/Available/etd-121205-135626/.
Full textKeywords: laser beam characteristics; heat transfer; hole profile; MEMS; hole formation; laser micromachining; laser microdrilling; plasma effects; silicon; 304 stainless steel; Fourier theory; lattice-phonon vibration. Includes bibliographical references. (p.379-390)
Cheng, Shi. "Integrated Antenna Solutions for Wireless Sensor and Millimeter-Wave Systems." Doctoral thesis, Uppsala universitet, Mikrovågs- och terahertzteknik, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-111197.
Full textwisenet
Farra, Fadi. "Etude du tissage de filaments de très faibles diamètres : conception d'une machine de micro tissage." Phd thesis, Université de Haute Alsace - Mulhouse, 2009. http://tel.archives-ouvertes.fr/tel-00718527.
Full textPark, Sang-Bin. "The use of electrochemical micromachining for making a microfloat valve." Thesis, 1999. http://hdl.handle.net/1957/33164.
Full textGraduation date: 2000
"Milli-meter-scale turning centre: theory and implementation." 2007. http://library.cuhk.edu.hk/record=b5893486.
Full textThesis (M.Phil.)--Chinese University of Hong Kong, 2007.
Includes bibliographical references (leaves 67-70).
Abstracts in English and Chinese.
Abstract --- p.I
摘要 --- p.III
List of Figures --- p.VI
List of Tables --- p.VIII
Chapter 1 --- Introduction --- p.1
Chapter 1.1 --- Background Information --- p.2
Chapter 1.1.1 --- Project Background --- p.2
Chapter 1.1.2 --- Literature Review --- p.4
Chapter 1.1.3 --- Background on Gear Hobbing --- p.10
Chapter 1.1.4 --- Traditional gear hobbing machines --- p.12
Chapter 2 --- Design and Testing of the MMT system --- p.15
Chapter 2.1 --- Specifications of the MMT system --- p.16
Chapter 2.1.1 --- Overall Configuration --- p.18
Chapter 2.1.2 --- Linear Actuation --- p.18
Chapter 2.1.3 --- Main Spindle Assembly --- p.19
Chapter 2.1.4 --- Tool Plate Assembly --- p.20
Chapter 2.1.5 --- Motion Control --- p.22
Chapter 2.2 --- Main Features --- p.24
Chapter 2.2.1 --- Mechanically Decoupled Gear Hobbing --- p.24
Chapter 2.2.2 --- Single Setup for Non-planar Gears --- p.26
Chapter 2.2.3 --- Quality Assurance by Computer Simulation --- p.27
Chapter 2.3 --- Turning Test --- p.28
Chapter 2.3.1 --- Experiment Results --- p.29
Chapter 2.3.2 --- Tornos' Performance --- p.30
Chapter 2.3.3 --- Estimation of Cutting Force and Workpiece Deflection --- p.32
Chapter 2.4 --- Synchronization Test --- p.33
Chapter 2.4.1 --- Experimental Results --- p.34
Chapter 2.5 --- Gear Hobbing Test --- p.36
Chapter 3 --- Diagnostic Tool: Gear Hobbing Simulation --- p.40
Chapter 3.1 --- Simulation Model --- p.41
Chapter 3.2 --- Simulations with Process Defects --- p.44
Chapter 3.2.1 --- Asynchronous motion between tool and workpiece spindle --- p.44
Chapter 3.2.2 --- Pitch error of the cutter hob --- p.45
Chapter 3.2.3 --- Tool spindle run-out error --- p.47
Chapter 3.2.4 --- Combination of process defects --- p.49
Chapter 3.3 --- Experiment Validation --- p.50
Chapter 4 --- Technical know-hows --- p.55
Chapter 4.1 --- Premature Part Break-off --- p.55
Chapter 4.2 --- Tool Alignment and Centering --- p.58
Chapter 4.2.1 --- Two-turns Aligning Algorithm --- p.59
Chapter 5 --- Conclusion and Future Work --- p.63
References --- p.67
Publication Record --- p.71
Appendix --- p.72