Books on the topic 'Microelectromechanical systems – Micromachining'

Kevin, Chau, Roop Ray M, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., and National Institute of Standards and Technology (U.S.), eds. Micromachined devices and components II: 14-15 October 1996, Austin, Texas. Bellingham, WA: SPIE, 1996.

Mehta, Pratima. Micromachining technology: New developments, trends and markets. Norwalk, CT: Business Communications Co., 1995.

Hensler, Ralph. MEMS technology: Where to? Norwalk, CT: Business Communications Co., 2002.

Bourne, Marlene Avis. MEMS/micromachines/microsystems: Technologies and commercial realities. Norwalk, CT: Business Communications Co., 1998.

Bourne, Marlene Avis. Microfluidics technology: Emerging markets for micronozzles, microvalves, and microsystems. Norwalk, CT: Business Communications Co., 1999.

Lane, Maura Elizabeth. Microfluidics technologies. Norwalk, CT: Business Communications Co. Inc, 2004.

Micro-manufacturing: Design and manufacturing of micro-products. Hoboken, N.J: Wiley, 2011.

Micromachining using electrochemical discharge phenomenon: Fundamentals and application of spark assisted chemical engraving. Norwich, NY, USA: W. Andrew, 2009.

G, Johnson Eric, Nordin Gregory P, and Society of Photo-optical Instrumentation Engineers., eds. Micromachining technology for micro-optics and nano-optics II: 27-29 January 2004, San Jose, California, USA. Bellingham, Washington, USA: SPIE, 2004.

G, DeAnna Russell, Reshotko Eli, and United States. National Aeronautics and Space Administration., eds. Microelectromechanical systems for aerodynamics applications. [Washington, D.C: National Aeronautics and Space Administration, 1996.

Kevin, Chau, Parameswaran Ash M, Tay Francis E. H, Society of Photo-optical Instrumentation Engineers., Nanyang Technological University, and Institute of Physics Singapore, eds. Micromachining and microfabrication: 28-30 November 2000, Singapore. Bellingham, Wash., USA: SPIE, 2000.

Ray, Roop, Chau Kevin, Semiconductor Equipment and Materials International., Society of Photo-optical Instrumentation Engineers., National Institute of Standards and Technology (U.S.), and Society of Photo-optical Instrumentation Engineers., eds. Micromachined devices and components: 23-24 October, 1995, Austin, Texas. Bellingham, Wash: SPIE, 1995.

Urey, Hakan, and Ayman El-Fatatry. MEMS, MOEMS, and Micromachining II: 3-4 April, 2006, Strasbourg, France. SPIE, 2006.

MEMS, MOEMS, and Micromachining III: 9-10 April 2008, Strasbourg, France. SPIE, 2008.

Park, Sang-Bin. The use of electrochemical micromachining for making a microfloat valve. 1999.

(Editor), Hakan Urey, and Ayman El-Fatatry (Editor), eds. Mems, Moems, And Micromachining: 29-30 April 2004, Strasbourg, France (Proceedings of S P I E). SPIE-International Society for Optical Engine, 2004.

World micromachine and microstructure markets: Technology qualified : after sensors, the real search for applications begins. Mountain View, CA: Market Intelligence, 1992.

Design, Test, Integration, and Packaging of Mems/Moems: 9-11 May 2000, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 4019.). SPIE-International Society for Optical Engine, 2000.

B, Courtois, and Centre national de la recherche scientifique (France), eds. Design, test, integration and packaging of MEMS/MOEMS 2001: 25-27 April 2001, Cannes, France. Bellingham, Washington: SPIE, 2001.

Keren, Bergman, Centre national de la recherche scientifique (France), and Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (5th : 2003 : Cannes, France), eds. Design, test, integration and packaging of MEMS/MOEMS 2003: DTIP 2003 : 5-7 May, 2003, Cannes, France. Piscataway, N.J: IEEE, 2003.

1939-, Lee S. H., Johnson Eric Gunnar 1936-, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., Solid State Technology (Organization), and Sandia National Laboratories, eds. Micromachining technology for micro-optics: 20 September 2000, Santa Clara, USA. Bellingham, Wash., USA: SPIE, 2000.

B, Courtois, and Centre national de la recherche scientifique (France), eds. Design, test, integration, and packaging of MEMS/MOEMS 2002: 6-8 May, 2002, Cannes, France. Bellingham, Wash: SPIE, 2002.

Resnick, Paul, Jung-Chih Ann Chiao, and Mary Maher. Micromachining and Microfabrication Process Technology XIII: 22-23 January 2008, San Jose, California, USA. SPIE, 2008.

(Editor), Eric G. Johnson, Gregory P. Nordin (Editor), and Thomas J. Suleski (Editor), eds. Micromachining Technology for Micro-optics and Nano-optics IV (Proceedings of SPIE). SPIE-International Society for Optical Engine, 2006.

Elwenspoek, M., and R. Wiegerink. Mechanical Microsensors. Springer, 2010.

Mechanical Microsensors (Microtechnology and MEMS). Springer, 2001.

G, Johnson Eric, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., Solid State Technology (Organization), and Sandia National Laboratories, eds. Micromachining technology for micro-optics and nano-optics: 28-29 January 2003, San Jose, California, USA. Bellingham, Washington, USA: SPIE, 2003.

G, Johnson Eric, Nordin Gregory P, Suleski Thomas J. 1969-, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., Solid State Technology (Organization), and Sandia National Laboratories, eds. Micromachining technology for micro-optics and nano-optics III: 25-27 January 2005, San Jose, California, USA. Bellingham, Washington: SPIE, 2005.

Eric, Johnson, Harold Stewart, Jung-Chih Chiao, Thomas Ann Suleski, and Mary Maher. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII: 22-24 January 2007, San Jose, California, USA. SPIE, 2007.