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Journal articles on the topic 'Microelectromechanical systems – Design and construction'

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Author: Grafiati

Published: 4 June 2021

Last updated: 31 July 2024

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1

Morrison, Richard, Livia Racz, and David Carter. "Case Study: Design and Construction of the Draper Laboratory Microfabrication Center." Journal of the IEST 56, no. 1 (March 1, 2013): 3–16. http://dx.doi.org/10.17764/jiet.56.1.t755m81670245652.

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For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.

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2

Osman, Salah Eldeen, and Musaab Zarog. "Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique." Micro and Nanosystems 11, no. 1 (April 2, 2019): 62–67. http://dx.doi.org/10.2174/1876402911666190208162346.

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Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.

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3

Morrison, Richard H., and Bradley K. Hodges. "CFD Modeling and Modification of Cleanroom Design to Achieve ISO Class 6 Performance." Journal of the IEST 58, no. 1 (November 1, 2015): 1–6. http://dx.doi.org/10.17764/1098-4321.58.1.1.

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The Charles Stark Draper Laboratory Microfabrication Lab, located in Cambridge, Massachusetts, was commissioned in November 2012. The design and construction of this lab was discussed in a previous paper.[1] The laboratory comprises an area of 700.1 m2 (7545 ft2) under filter with 280 m2 (3014 ft2) of clean chase space, divided into 11 distinct cleanrooms. This paper focuses on the design and operation of one ISO Class 6 [2] cleanroom (3335) used for wet processing of microelectromechanical systems (MEMS) and multichip modules (MCM). The initial design criteria are discussed, along with installation of the tools and the non-compliance of ISO Class 6 particle counts. Based on these results, computational fluid dynamics (CFD) modeling software was employed to study the airflow in the room and modify the airflow to be compliant with ISO Class 6 standards.

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4

Ilie, Iulian, and José Machado. "Design and Validation of a Testing 4D Mechatronic System for Measurement and Integrated Control of Processes." Machines 10, no. 12 (December 13, 2022): 1209. http://dx.doi.org/10.3390/machines10121209.

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Measurements are crucial for research in the fields of microelectromechanical (MEMS), nanoelectromechanical (NEMS) and industrial applications. In this work, the design approach for the development and construction of a testing 4D mechatronic system, and respective validation, including the detailed description of the used components and parts as well as the performed tests for respective validation in the working environment, are presented. Because this is testing equipment, the measurement feature is presented and validated, in detail, making this system available and reliable for the mentioned purposes of use. An important result in this work is the possibility of on-site control or the remote control of the 4D mechatronic system for measurement and integrated control of processes, with the aim of reducing the cost of obtaining the necessary measurements.

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Novikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (September 15, 2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.

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The questions of assessment of achievable performance values of the integrated inertial-satellite navigation system complexed with odometer sensor and used for ground transport and agricultural technological vehicle are considered. Construction of relatively cheap modern navigation systems for ground transport and agricultural technological vehicles is provided by integrating diverse navigation systems, which include inertial-satellite systems that combine into a single hardware system the inertial and satellite modules. Achievable accuracy of gaining the navigation parameters is achieved by using special algorithms for processing of measurement information in combination with complexion of the system with an external source of additional information, where odometer sensor belongs. The most promising sensors are sensors, built using the technology of production of microelectromechanical systems - MEMS / MEMC (Micro-Electro Mechanical Systems). The navigation systems based on MEMS sensors have several advantages. The main advantages are small weight and size characteristics (volume less 1sm3, and weighs less than 1 gram), low power consumption, high reliability, resistance to vibro-impact loads (up to 2000g), easy integration of sensors and electronic modules of the navigation system, low cost. The main disadvantage is the need for the synthesis of complex algorithms of processing of measuring information to obtain the desired accuracy of the estimate of navigation parameters. The navigation system, where as MEMS sensors were used gyroscopes ADXRS-150 in conjunction with accelerometers ADXL-210 manufactured by Analog Devices, was considered. The main design and technological characteristics of sensors were shown, the selection criteria for sensors were formulated, technical and economic effect assessment of the use of MEMS in the navigation system is provided. The practical importance has the estimation of achievable accuracy characteristics of system under actual operating conditions. The paper presents the results of field tests of the navigation system based on MEMS sensors and designed for forklift carrying out transportation in the sea port. The results of experimental studies confirmed the effectiveness of the MEMS application as a sensing element of inertial-satellite navigation system of ground transport and agricultural technological vehicle that creates the foundation for the new high-tech developments.

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Lao, Zhaoxin, Neng Xia, Shijie Wang, Tiantian Xu, Xinyu Wu, and Li Zhang. "Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review." Micromachines 12, no. 4 (April 20, 2021): 465. http://dx.doi.org/10.3390/mi12040465.

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Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.

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7

Zhao, Le, Shao hua Luo, Guan ci Yang, and Jun yang Li. "Accelerated Adaptive Backstepping Control of the Chaotic MEMS Gyroscope by Using the Type-2 Sequential FNN." Ingeniería e Investigación 41, no. 1 (March 10, 2021): e85825. http://dx.doi.org/10.15446/ing.investig.v41n1.85825.

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In this paper, we propose an accelerated adaptive backstepping control algorithm based on the type2 sequential fuzzy neural network (T2SFNN) for the microelectromechanical system (MEMS) gyroscope with deadzone and constraints. Firstly, the mathematical model of the MEMS gyroscope is established to perform dynamical analyses and controller design. Then, the phase diagrams and Lyapunov exponents are presented to reveal its chaotic oscillation, which is harmful to system stability. In order to suppress oscillations derived from chaos and deadzone, an accelerated adaptive backstepping controller is proposed wherein an adaptive auxiliary is established to compensate the influence of nonsymmetric deadzone on stability performance, along with the T2SFNN designed to approximate unknown functions of dynamic systems. Furthermore, the speed function is introduced to accelerate convergence speed of the control system, and the problem of complex term explosion in traditional backstepping is successfully solved by a secondorder tracking differentiator. Finally, simulation results show that the proposed control scheme can guarantee asymptotic convergence of all signals in the closedloop system, as well as satisfying states constraints and fulfilling the purposes of chaos suppression and accelerated convergence.

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Lusk, Craig P., and Larry L. Howell. "Design Space of Single-Loop Planar Folded Micro Mechanisms With Out-of-Plane Motion." Journal of Mechanical Design 128, no. 5 (November 3, 2005): 1092–100. http://dx.doi.org/10.1115/1.2216734.

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Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods such as surface micromachining, bulk micromachining, or LIGA-type fabrication. If a micro mechanism is desired that has motion out of the plane of fabrication, it can be a folded mechanism in its fabricated position. The desire to design MEMS for a wide range of out-of-plane motions has led to the need for a better theoretical understanding of the design space for folded mechanisms. Thus, this paper derives the design space of arbitrary planar folded mechanisms. This results in the definition of the orientation set measures equality condition (OSMEC) which can be used in constructing adjacency set patches and joining them to construct the design space. The results can be used to explore different properties of the mechanisms in the design space. One such property, the mechanisms’ folded length, is given as an example. Although MEMS provide the primary motivation for the work, the results are general and apply to other areas of application.

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Zhang, Jiayu, Jie Li, Xiaorui Che, Xi Zhang, Chenjun Hu, Kaiqiang Feng, and Tingjin Xu. "The Optimal Design of Modulation Angular Rate for MEMS-Based Rotary Semi-SINS." Micromachines 10, no. 2 (February 10, 2019): 111. http://dx.doi.org/10.3390/mi10020111.

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In previous studies, the semi-strapdown inertial navigation system (SSINS), based on microelectromechanical system (MEMS) sensors, had realized cross-range measurement of attitude information of high-spinning projectiles through construction of a “spin reduction” platform of the roll axis. However, further improvement of its measurement accuracy has been difficult, due to the inertial sensor error. In order to enhance the navigational accuracy, a periodically rotating method is utilized to compensate for sensor error, which is called rotation modulation. At present, the rotation scheme, as one of the core technologies, has been studied by a lot of researchers. It is known that the modulation angular rate is the main factor affecting the effectiveness of error modulation. Different from the long-endurance and low-dynamic motion characteristics of ships, however, the short-endurance and high-dynamic characteristics of the high-spinning projectile not only require the modulation angular rate to be as fast as possible but, also, the influence of the rotation speed error caused by rotating mechanism errors cannot be ignored. Combined with the rotation speed error of the rotating mechanism, this paper explored the relationship between modulation angular rate, device error, and the navigation error, and then proposed a design method for optimal modulation angular rate. Experiments were carried out to validate the performance of the method. In addition, the proposed method is applicable for rotation modulation systems with different types of motors as the rotating mechanism.

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Akinina, Tatyana, Volodymyr Symonenkov, Inna Symonenkova, and German Trushkov. "IMPROVING THE EFFICIENCY OF APPLICATION UNCAVATED UNDERWATER DEVICES FOR THE NEEDS OF THE NAVAL FORCES OF THE ARMED FORCES OF UKRAINE." Collection of scientific works of Odesa Military Academy, no. 16 (February 11, 2022): 126–34. http://dx.doi.org/10.37129/2313-7509.2021.16.126-134.

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The article considers the problems related to the need to use unmanned submarines for the needs of the Navy of the Armed Forces of Ukraine with the possibility of using the latest information technologies, namely,  study of acoustic means of monitoring physical processes in the marine environment, which are the most effective technologies , which significantly supplement and expand the possibilities of contact methods for measuring environmental indicators in technical solutions for underwater monitoring. Methods of solving the tasks on the basis of optimal use of sonar underwater monitoring are proposed in order to increase the overall sensitivity of the sonar system to the useful signal and reduce the sensitivity to "natural" background or intentional interference by using small multi-beam sonar MEMS technology using. Modular design of underwater robotic vehicles, which are one of the promising areas of development of naval equipment, based on the principle of open architecture involves the construction of their components as integral functional elements of the modular type. Therefore, there is a need to create cheap, easy to manufacture and install small hydroacoustic blocks-modules based on the use of MEMS technology, which reduces the overall cost and increases the survivability of the BPA as a whole. It should be noted that the modular design of underwater robotic vehicles, which are one of the promising areas of development of naval equipment, based on the principle of open architecture involves the construction of their components (basic elements) as integral functional elements of the modular type. It is proposed to use the obtained results in the course of further research within the framework of research and development on the creation of promising mobile unmanned aerial vehicles for underwater monitoring and surveillance. Keywords: unmanned underwater vehicle, robotic search and observation technologies, marine situation, underwater situation, microelectromechanical systems.

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Kozior, Tomasz, and Jerzy Bochnia. "The Influence of Printing Orientation on Surface Texture Parameters in Powder Bed Fusion Technology with 316L Steel." Micromachines 11, no. 7 (June 29, 2020): 639. http://dx.doi.org/10.3390/mi11070639.

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Laser technologies for fast prototyping using metal powder-based materials allow for faster production of prototype constructions actually used in the tooling industry. This paper presents the results of measurements on the surface texture of flat samples and the surface texture of a prototype of a reduced-mass lathe chuck, made with the additive technology—powder bed fusion. The paper presents an analysis of the impact of samples’ orientation on the building platform on the surface geometrical texture parameters (two-dimensional roughness profile parameters (Ra, Rz, Rv, and so on) and spatial parameters (Sa, Sz, and so on). The research results showed that the printing orientation has a very large impact on the quality of the surface texture and that it is possible to set digital models on the building platform (parallel—0° to the building platform plane), allowing for manufacturing models with low roughness parameters. This investigation is especially important for the design and 3D printing of microelectromechanical systems (MEMS) models, where surface texture quality and printable resolution are still a large problem.

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12

Baranov, Pavel, Tamara Nesterenko, Evgenii Barbin, and Aleksei Koleda. "Constructive approach to reduce the influence of temperature on spring suspension eigenfrequencies." Sensor Review 40, no. 3 (July 8, 2020): 297–309. http://dx.doi.org/10.1108/sr-11-2019-0290.

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Purpose One of the problems encountered by developers of inertial systems, such as gyroscopes and accelerometers, is the critical dependence of the eigenfrequencies of elastic suspensions (ES) on temperature when using substrates for sensors made of dielectric materials, such as borosilicate glass. The internal stresses arising in the ES caused by the difference in the temperature coefficients of linear expansion (TCLE) lead to deformation of the sensor and complication of the electronic part of the sensor. The purpose of this paper is to approach for in-plane and out-of-plane ES are considered that allow for minimization of the influence of internal stresses on eigenfrequencies. Design/methodology/approach Analytical, finite element and experimental results are considered. The temperature coefficient of thermal expansion, the Young’s modulus and the Poisson ratio are given as a function of temperature. The shape of the spring elements (SEs) and the construction of the elastic suspension are the main topics of focus in this study. The authors’ out-of-plane ES based on a meander-like spring element implemented via finite element modeling show good agreement with the experimental results. Findings Meander-like SEs have been developed that have lower temperature errors in comparison with traditional types of SEs. The main contribution to the change in the eigenfrequency from temperature is made by internal stresses that arose from the deformation of the bonded materials with different TCLE. The change of eigenfrequency from the temperatures that were calculated by finite element method did not exceed 0.15%, however, in practice, the scatter of the obtained characteristics for different samples showed a change of up to 0.3%. Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the microelectromechanical systems (MEMS) inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

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Jiang, Bo, Yan Su, Guowen Liu, Lemin Zhang, and Fumin Liu. "A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode." Micromachines 11, no. 12 (December 1, 2020): 1071. http://dx.doi.org/10.3390/mi11121071.

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Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise.

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Pinto, Raquel, André Cardoso, Sara Ribeiro, Carlos Brandão, João Gaspar, Rizwan Gill, Helder Fonseca, and Margaret Costa. "Application of SU-8 photoresist as a multi-functional structural dielectric layer in FOWLP." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2017, DPC (January 1, 2017): 1–19. http://dx.doi.org/10.4071/2017dpc-tp2_presentation3.

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Microelectromechanical Systems (MEMS) are a fast growing technology for sensor and actuator miniaturization finding more and more commercial opportunities by having an important role in the field of Internet of Things (IoT). On the same note, Fan-out Wafer Level Packaging (FOWLP), namely WLFO technology of NANIUM, which is based on Infineon/ Intel eWLB technology, is also finding further applications, not only due to its high performance, low cost, high flexibility, but also due to its versatility to allow the integration of different types of components in the same small form-factor package. Despite its great potential it is still off limits to the more sensitive components as micro-mechanical devices and some type of sensors, which are vulnerable to temperature and pressure. In the interest of increasing FOWLP versatility and enabling the integration of MEMS, new methods of assembling and processing are continuously searched for. Dielectrics currently used for redistribution layer construction need to be cured at temperatures above 200°C, making it one of the major boundary for low temperature processing. In addition, in order to accomplish a wide range of dielectric thicknesses in the same package it is often necessary to stack very different types of dielectrics with impact on bill of materials complexity and cost. In this work, done in cooperation with the International Iberian Nanotechnology Laboratory (INL), we describe the implementation of commercially available SU-8 photoresist as a structural material in FOWLP, allowing lower processing temperature and reduced internal package stress, thus enabling the integration of components such as MEMS/MOEMS, magneto-resistive devices and micro-batteries. While SU-8 photoresist was first designed for the microelectronics industry, it is currently highly used in the fabrication of microfluidics as well as microelectromechanical systems (MEMS) and BIO-MEMS due to its high biocompatibility and wide range of available thicknesses in the same product family. Its good thermal and chemical resistance and also mechanical and rheological properties, make it suitable to be used as a structural material, and moreover it cures at 150°C, which is key for the applications targeted. Unprecedentedly, SU-8 photoresist is tested in this work as a structural dielectric for the redistribution layers on 300mm fan-out wafers. Main concerns during the evaluation of the new WLFO dielectric focused on processability quality; adhesion to multi-material substrate and metals (copper, aluminium, gold, ¦); between layers of very different thicknesses; and overall reliability. During preliminary runs, processability on 300 mm fan-out wafers was evaluated by testing different coating and soft bake conditions, exposure settings, post-exposure parameters, up to developing setup. The outputs are not only on process conditions and results but also on WLFO design rules. For the first time, a set of conditions has been defined that allows processing SU-8 on WLFO, with thickness values ranging from 1 um to 150 um. The introduction of SU-8 in WLFO is a breakthrough in this fast-growing advanced packaging technology platform as it opens vast opportunities for sensor integration in WLP technology.

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Roohi, Reza, Masoud Akbari, Ali Karimzadeh, and Mohammad Javad Amiri. "Investigating the Effect of an Elliptical Bluff Body on the Behavior of a Galloping Piezoelectric Energy Harvester." Sustainability 15, no. 22 (November 9, 2023): 15773. http://dx.doi.org/10.3390/su152215773.

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The extraction of energy from naturally oscillating objects has recently garnered considerable attention from researchers as a robust and efficient method. This study specifically focuses on investigating the performance of a galloping piezoelectric micro energy harvester (GPEH) designed for self-powered microelectromechanical systems (MEMS). The proposed micro energy harvester comprises a cantilever beam composed of two layers, one being silicon and the other being a piezoelectric material (PZT-5A). The harvester is equipped with an elliptical tip cylinder, and the entire system is modeled using lumped parameters. To simulate the response of the system, the size-dependent coupled governing equations are numerically solved, enabling the extraction of the dynamic behavior of the energy harvester. Furthermore, computational fluid dynamics (CFD) simulations are employed to model the effect of the flow field on the oscillations of the beam. Different aspect ratios (AR) of the elliptical cylinder are taken into account in the simulations. The study examines the impact of the aspect ratio and mass of the elliptical tip cylinder on the harvested power of the system. The results demonstrate a notable decrease in the extracted power density for AR = 1 and 2 compared to higher aspect ratios. In the case of AR = 5, the device exhibits an onset wind speed of 7 m/s. However, for AR = 10, the onset wind speed occurs at a lower wind velocity of 5.5 m/s, resulting in a 66% increase in extracted power compared to AR = 5. Additionally, the results reveal that increasing the normalized mass from 10 to 60 results in a 60% and 70% increase in the output power for AR = 5 and AR = 10, respectively. This study offers valuable insights into the design and optimization of galloping piezoelectric micro energy harvesters, aiming to enhance their performance for MEMS applications.

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Kota, S., G. K. Ananthasuresh, S. B. Crary, and K. D. Wise. "Design and Fabrication of Microelectromechanical Systems." Journal of Mechanical Design 116, no. 4 (December 1, 1994): 1081–88. http://dx.doi.org/10.1115/1.2919490.

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An attempt has been made to summarize some of the important developments in the emerging technology of microelectromechanical systems (MEMS) from the mechanical engineering perspective. In the micro domain, design and fabrication issues are very much different from those of the macro world. The reason for this is twofold. First, the limitations of the micromachining techniques give way to new exigencies that are nonexistent in the macromachinery. One such difficulty is the virtual loss of the third dimension, since most of the microstructures are fabricated by integrated circuit based micromachining techniques that are predominantly planar. Second, the batch-produced micro structures that require no further assembly, offer significant economical advantage over their macro counterparts. Furthermore, electronic circuits and sensors can be integrated with micromechanical structures. In order to best utilize these features, it becomes necessary to establish new concepts for the design of MEMS. Alternate physical forms of the conventional joints are considered to improve the manufacturability of micromechanisms and the idea of using compliant mechanisms for micromechanical applications is put forth. The paper also reviews some of the fabrication techniques and the micromechanical devices that have already been made. In particular, it discusses the fabrication of a motor-driven four-bar linkage using the “boron-doped bulk-silicon dissolved-wafer process” developed at The University of Michigan’s Center for Integrated Sensors and Circuits.

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Kiselev, Egor, Tetyana Krytska, Nina Stroiteleva, and Konstantin Turyshev. "Thermal microelectromechanical sensor construction." Eastern-European Journal of Enterprise Technologies 6, no. 9 (102) (December 18, 2019): 46–52. http://dx.doi.org/10.15587/1729-4061.2019.184443.

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Judy, Jack W. "Microelectromechanical systems (MEMS): fabrication, design and applications." Smart Materials and Structures 10, no. 6 (November 28, 2001): 1115–34. http://dx.doi.org/10.1088/0964-1726/10/6/301.

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Lee, Y. C., B. McCarthy, J. Diao, Z. Zhang, and K. F. Harsh. "Computer-aided design for microelectromechanical systems (MEMS)." International Journal of Materials and Product Technology 18, no. 4/5/6 (2003): 356. http://dx.doi.org/10.1504/ijmpt.2003.002497.

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Yamane, D., T. Konishi, T. Matsushima, K. Machida, H. Toshiyoshi, and K. Masu. "Design of sub-1g microelectromechanical systems accelerometers." Applied Physics Letters 104, no. 7 (February 17, 2014): 074102. http://dx.doi.org/10.1063/1.4865377.

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Dusek, Daniel, Zdenek Hadas, Jan Pekarek, Vojtech Svatos, Jan Zak, Jan Prasek, and Jaromir Hubálek. "Design of an Artificial Microelectromechanical Cochlea." Solid State Phenomena 220-221 (January 2015): 345–48. http://dx.doi.org/10.4028/www.scientific.net/ssp.220-221.345.

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The paper presents the first results of research on an artificial cochlea based on a mechanical filter bank that could be produced by MEMS (Micro Electro Mechanical Systems) technologies and power supplied by energy harvesting systems. First, the basic configuration of the artificial cochlea proposed by our team is described. Then, the configuration of mechanoelectrical transducers (polycrystalline diffused piezoresistors) displayed in the first experiment is offered. Finally, the eigenfrequencies of resonant membranes calculated employing finite element systems Ansys and CoventorWare are introduced.

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Engesser, Manuel, Alexander Buhmann, Axel R. Franke, and Jan G. Korvink. "Efficient Reliability-Based Design Optimization for Microelectromechanical Systems." IEEE Sensors Journal 10, no. 8 (August 2010): 1383–90. http://dx.doi.org/10.1109/jsen.2010.2044171.

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Lysenko, Igor, Alexey Tkachenko, Olga Ezhova, Boris Konoplev, Eugeny Ryndin, and Elena Sherova. "The Mechanical Effects Influencing on the Design of RF MEMS Switches." Electronics 9, no. 2 (January 22, 2020): 207. http://dx.doi.org/10.3390/electronics9020207.

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Radio-frequency switches manufactured by microelectromechanical systems technology are now widely used in aerospace systems and other mobile installations for various purposes. In these operating conditions, these devices are often exposed to intense mechanical environmental influences that have a strong impact on their operation. These negative effects can lead to unwanted short-circuit or open-circuit in the radio-frequency transmission line or to irreversible damage to structural elements. Such a violation in the operation of radio-frequency microelectromechanical switches leads to errors and improper functioning of the electronic equipment in which they are integrated. Thus, this review is devoted to the analysis of the origin of these negative intense mechanical effects of the environment, their classification, and analysis, as well as a review of methods to reduce or prevent their negative impact on the design of radio-frequency microelectromechanical switches.

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Fedder, G. K., and Qi Jing. "A hierarchical circuit-level design methodology for microelectromechanical systems." IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing 46, no. 10 (1999): 1309–15. http://dx.doi.org/10.1109/82.799682.

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Luo, Yi, Xianglong Yin, and Xiaodong Wang. "Design and fabrication of a microelectromechanical systems polymeric micropump." Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems 228, no. 2 (August 23, 2013): 98–103. http://dx.doi.org/10.1177/1740349913490514.

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Belozubov, E. M., V. A. Vasiliev, A. I. Zapevalin, and P. S. Chernov. "Design of elastic components of nano- and microelectromechanical systems." Measurement Techniques 54, no. 1 (April 2011): 21–24. http://dx.doi.org/10.1007/s11018-011-9679-y.

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Senturia, S. D., R. M. Harris, B. P. Johnson, S. Kim, K. Nabors, M. A. Shulman, and J. K. White. "A computer-aided design system for microelectromechanical systems (MEMCAD)." Journal of Microelectromechanical Systems 1, no. 1 (March 1992): 3–13. http://dx.doi.org/10.1109/84.128049.

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Flores-Fuentes, Wendy, Mónica Valenzuela-Delgado, Danilo Cáceres-Hernández, Oleg Sergiyenko, Miguel E. Bravo-Zanoguera, Julio C. Rodríguez-Quiñonez, Daniel Hernández-Balbuena, and Moisés Rivas-López. "Magnetohydrodynamic velocity profile measurement for microelectromechanical systems micro-robot design." International Journal of Advanced Robotic Systems 16, no. 5 (September 1, 2019): 172988141987561. http://dx.doi.org/10.1177/1729881419875611.

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The development of microelectromechanical systems based on magnetohydrodynamic for micro-robot applications requires precise control of the micro-flow behavior. The micro-flow channel design and its performance under the influence of the Lorentz force is a critical challenge, the mathematical model of each magnetohydrodynamic device design must be experimentally validated before to be employed in the fabrication of microelectromechanical systems. For this purpose, the present article proposes the enhancement of a particle image velocimetry measurement process in a customized machine vision system. The particle image velocimetry measurements are performed for the micro-flow velocity profile mathematical model validation of a magnetohydrodynamic stirrer prototype. Data mining and filtering have been applied to a raw measurement database from the customized machine vision system designed to evaluate the magnetohydrodynamic stirrer prototype. Outlier’s elimination and smoothing have been applied to raw data to approximate the particle image velocimetry measurements output to the velocity profile mathematical model to increase the accuracy of a customized machine vision system for two-dimensional velocity profile measurements. The accurate measurement of the two-dimensional velocity profile is fundamental owing to the requirement of future enhancement of the customized machine vision system to construct the three-dimensional velocity profile of the magnetohydrodynamic stirrer prototype. The presented methodology can be used for measurement and validation in the design of microelectromechanical systems micro-robot design and any other devices that require micro-flow manipulation for tasks such as stirring, pumping, mixing, networking, propelling, and even cooling.

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29

Ficai, Denisa, Marin Gheorghe, Georgiana Dolete, Bogdan Mihailescu, Paul Svasta, Anton Ficai, Gabriel Constantinescu, and Ecaterina Andronescu. "Microelectromechanical Systems Based on Magnetic Polymer Films." Micromachines 13, no. 3 (February 23, 2022): 351. http://dx.doi.org/10.3390/mi13030351.

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Microelectromechanical systems (MEMS) have been increasingly used worldwide in a wide range of applications, including high tech, energy, medicine or environmental applications. Magnetic polymer composite films have been used extensively in the development of the micropumps and valves, which are critical components of the microelectromechanical systems. Based on the literature survey, several polymers and magnetic micro and nanopowders can be identified and, depending on their nature, ratio, processing route and the design of the device, their performances can be tuned from simple valves and pumps to biomimetic devices, such as, for instance, hearth ventricles. In many such devices, polymer magnetic films are used, the disposal of the magnetic component being either embedded into the polymer or coated on the polymer. One or more actuation zones can be used and the flow rate can be mono-directional or bi-directional depending on the design. In this paper, we review the main advances in the development of these magnetic polymer films and derived MEMS: microvalve, micropump, micromixer, microsensor, drug delivery micro-systems, magnetic labeling and separation microsystems, etc. It is important to mention that these MEMS are continuously improving from the point of view of performances, energy consumption and actuation mechanism and a clear tendency in developing personalized treatment. Due to the improved energy efficiency of special materials, wearable devices are developed and be suitable for medical applications.

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30

Xu, L., C. Zhu, and L. Qin. "Microelectromechanical coupled dynamics." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, no. 10 (October 1, 2006): 1589–600. http://dx.doi.org/10.1243/09544062jmes134.

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In this paper, a continuous body, electromechanical coupled dynamic model of the micro ring, in an electrical field has been presented and its equations of motion have been given. From the analysis of the system's energy, the electromechanical coupled force has been obtained. The non-linear electromechanical coupled dynamic equations has been linearized and by means of the linear equations, the natural frequencies and vibration modes of the micro ring have been investigated. The dynamic responses of the electrical system and its changes, along with its system parameters have been investigated. These results are useful in the design and manufacture of microelectromechanical systems and can offer some reference for nanomachines.

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31

Migranov, A. B. "Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation." Proceedings of the Mavlyutov Institute of Mechanics 4 (2006): 288–305. http://dx.doi.org/10.21662/uim2006.1.025.

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The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.

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32

Zhang, Ying, and Alice M. Agogino. "Hierarchical component-based representations for evolving microelectromechanical systems designs." Artificial Intelligence for Engineering Design, Analysis and Manufacturing 25, no. 1 (October 7, 2010): 41–55. http://dx.doi.org/10.1017/s0890060410000168.

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AbstractIn this paper we present a genotype representation method for improving the performance of genetic-algorithm-based optimal design and synthesis of microelectromechanical systems. The genetic algorithm uses a hierarchical component-based genotype representation, which incorporates specific engineering knowledge into the design optimization process. Each microelectromechanical system component is represented by a gene with its own parameters defining its geometry and the way it can be modified from one generation to the next. The object-oriented genotype structures efficiently describe the hierarchical nature typical of engineering designs. They also encode knowledge-based constraints that prevent the genetic algorithm from wasting time exploring inappropriate regions of the search space. The efficiency of the hierarchical component-based genotype representation is demonstrated with surface-micromachined resonator designs.

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33

Syms, R. R. A. "Principles of free-space optical microelectromechanical systems." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 222, no. 1 (January 1, 2008): 1–18. http://dx.doi.org/10.1243/09544062jmes662.

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Optical microelectromechanical systems (MEMS) combine miniature optical components with precision fixtures, elastic suspensions, and microactuators, and allow complex functionality at low cost. However, the effect of the bounded nature of the beams propagating through the system on design is profound. The current paper reviews the fundamental consequences. Using a Gaussian beam formulation, models of guided modes in gradient index media, bounded beams and imaging components are constructed. Propagation algorithms are described. The alignment tolerances for common component trains such as fibre-to-fibre and beam-to-fibre connections are derived, limits on the curvature of reflecting surfaces are established, the scaling laws of free-space optical MEMS are presented and the effect of beam size on filter performance is clarified. Examples such as variable optical attenuators, optical cross-connect switches, filters and tunable lasers are discussed.

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34

Hsiung, Kan-Lin. "Design of microelectromechanical systems for variability via chance-constrained optimization." Journal of Physics: Conference Series 34 (April 1, 2006): 162–67. http://dx.doi.org/10.1088/1742-6596/34/1/027.

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35

Zou, Ting, and Jorge Angeles. "Structural and instrumentation design of a microelectromechanical systems biaxial accelerometer." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 228, no. 13 (January 7, 2014): 2440–55. http://dx.doi.org/10.1177/0954406213518745.

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Microscale biaxial accelerometers are required to be sensitive to applied accelerations and manufacturable by means of microelectromechanical systems technology. In order to meet these requirements, a compliant realization of biaxial accelerometers, dubbed simplicial biaxial accelerometers, has been proposed, as reported in this paper. Notched joints, to realize what is termed Π-joints in the parallel-robots literature, are employed and then improved by the introduction of Lamé-shaped hinges serving as flexible joints. The sensitivity of the simplicial biaxial accelerometers in estimating accelerations is investigated and validated by means of finite element analysis. The sensing system is embedded in the simplicial biaxial accelerometers, with piezoresistive sensing technology adopted in the instrumentation design. Using the principles of piezoresistive sensing, the electronic layout is developed for the accelerometer. Through the piezoresistive analysis implemented on the finite element model of the simplicial biaxial accelerometers, the matrix that maps voltage signals into acceleration signals is derived. By virtue of both the structural and electronic designs, the accelerometer is observed to be sensitive to accelerations in its plane, but fairly insensitive to accelerations in any of the other four directions of the rigid-body motion. Finally, prototypes were fabricated with microelectromechanical systems technology to test the microfabrication feasibility of the structure and measurement system of the accelerometer. Test results are the subject of a forthcoming paper.

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36

Meral, Faik Can, and Ipek Basdogan. "Design Methodology for Microelectromechanical Systems. Case Study: Torsional Scanner Mirror." Journal of Mechanical Design 129, no. 10 (December 15, 2006): 1023–30. http://dx.doi.org/10.1115/1.2756087.

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Future optical microsystems, such as microelectromechanical system (MEMS) scanners and micromirrors, will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and dynamic analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (mode shapes), are used to obtain the state-space representation of the mirror. The state-space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square values of the mirror rotation angle under the effect of a disturbance torque. The magnitude levels of the disturbance torque are obtained using an experimental procedure. The disturbance analysis framework is combined with the sensitivity analysis to determine the critical design parameters for optimizing the system performance.

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37

Kitsopoulos, Panagiota, Alison E. Hake, Emily Z. Stucken, Christopher M. Welch, and Karl Grosh. "Design and testing of ultraminiature microelectromechanical systems middle ear accelerometers." Journal of the Acoustical Society of America 153, no. 3_supplement (March 1, 2023): A145. http://dx.doi.org/10.1121/10.0018451.

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Moderate to severe hearing loss is a debilitating condition that affects over 5% of the world’s population. Hearing aids and cochlear implants positively impact the lives of those who suffer from sensorineural hearing loss. However, both display numerous limitations that affect their adoption and use rates, notably including those associated with the external elements of these devices (e.g., microphone and signal processor). These external components impact device safety, appearance, acoustic performance, and ease-of-use. A totally implantable auditory prosthesis would help to address these issues by eliminating external components. A major barrier to progress toward this goal is the lack of a completely implantable acoustic sensor capable of matching or exceeding the performance of commercial external microphones. Our previous studies have indicated that piezoelectric microelectromechanical systems (MEMS) accelerometers have the potential to function as implantable sensors within the middle ear meeting a 20-phon noise floor over a 100–8 kHz range. In this paper, we describe a process to design and fabricate dual and tri-resonance devices that are comprised of piezoelectric cantilever bimorph beams tip-loaded by a proof mass, can meet or exceed the 20-phon noise floor, and can produce a measurable voltage output when deflected by sound-induced ossicular vibrations.

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38

Fechan, Andriy, Yuriy Khoverko, Vladyslav Dalyavskii, and Taras Dyhdalovych. "Visualization of color label sensors in microelectromechanical systems." Computational Problems of Electrical Engineering 13, no. 2 (December 15, 2023): 9–14. http://dx.doi.org/10.23939/jcpee2023.02.009.

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The article presents the design and technological features of creating color labels-sensors of microelectromechanical systems intended for monitoring physicochemical parameters under the conditions of high- level electromagnetic interference. The software module of the hardware and software complex for the visualization of spectral intensity by converting it into an RGB colour model has been created. The algorithm for carrying out the procedure for calculating the color rendering index is shown and the main parameters of temperature colors in a wide range of visible radiation waves are determined

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39

Amalin Prince, A., Iven Jose, and V. P. Agrawal. "Concurrent Design, Modeling and Analysis of Microelectromechanical Systems Products - Design for ‘X’ Abilities." Micro and Nanosystemse 4, no. 1 (February 1, 2012): 56–74. http://dx.doi.org/10.2174/1876402911204010056.

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40

Coppola, G. "Digital holography microscope as tool for microelectromechanical systems characterization and design." Journal of Micro/Nanolithography, MEMS, and MOEMS 4, no. 1 (January 1, 2005): 013012. http://dx.doi.org/10.1117/1.1857551.

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41

Zhenhai Chen and R. C. Luo. "Design and implementation of capacitive proximity sensor using microelectromechanical systems technology." IEEE Transactions on Industrial Electronics 45, no. 6 (1998): 886–94. http://dx.doi.org/10.1109/41.735332.

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42

Li-Peng Wang, R. A. Wolf, Yu Wang, K. K. Deng, Lichun Zou, R. J. Davis, and S. Trolier-McKinstry. "Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers." Journal of Microelectromechanical Systems 12, no. 4 (August 2003): 433–39. http://dx.doi.org/10.1109/jmems.2003.811749.

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43

Schuenemann, M., V. Grosser, R. Leutenbauer, G. Bauer, W. Schaefer, and H. Reichl. "A highly flexible design and production framework for modularized microelectromechanical systems." Sensors and Actuators A: Physical 73, no. 1-2 (March 1999): 153–68. http://dx.doi.org/10.1016/s0924-4247(98)00266-0.

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44

Wenjing Ye, S. Mukherjee, and N. C. MacDonald. "Optimal shape design of an electrostatic comb drive in microelectromechanical systems." Journal of Microelectromechanical Systems 7, no. 1 (March 1998): 16–26. http://dx.doi.org/10.1109/84.661380.

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45

Bedoui, Souhir, Sami Gomri, Hekmet Charfeddine Samet, and Abdennaceur Kachouri. "Design and Simulation of Microelectromechanical Systems (MEMS) for Ozone Gas Sensors." Transactions on Electrical and Electronic Materials 19, no. 1 (January 29, 2018): 41–46. http://dx.doi.org/10.1007/s42341-018-0001-4.

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46

Tadigadapa, Srinivas A., and Nader Najafi. "Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective." Journal of Manufacturing Science and Engineering 125, no. 4 (November 1, 2003): 816–23. http://dx.doi.org/10.1115/1.1617286.

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This paper presents a discussion of some of the major issues that need to be considered for the successful commercialization of MEMS products. The diversity of MEMS devices and historical reasons have led to scattered developments in the MEMS manufacturing infrastructure. A good manufacturing strategy must include the complete device plan including package as part of the design and process development of the device. In spite of rapid advances in the field of MEMS there are daunting challenges that lie in the areas of MEMS packaging, and reliability testing. CAD tools for MEMS are starting to get more mature but are still limited in their overall performance. MEMS manufacturing is currently at a fragile state of evolution. In spite of all the wonderful possibilities, very few MEMS devices have been commercialized. In our opinion, the magnitude of the difficulty of fabricating MEMS devices at the manufacturing level is highly underestimated by both the current and emerging MEMS communities. A synopsis of MEMS manufacturing issues is presented here.

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Komvopoulos, K., and W. Yan. "A Fractal Analysis of Stiction in Microelectromechanical Systems." Journal of Tribology 119, no. 3 (July 1, 1997): 391–400. http://dx.doi.org/10.1115/1.2833500.

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The strong adherence (stiction) of adjacent surfaces is a major design concern in microelectromechanical systems (MEMS). Advances in micromachine technology greatly depend on basic understanding of microscale stiction phenomena. An analysis of the different stiction micromechanisms and the elastic deformation of asperities at MEMS interfaces is developed using a two-dimensional fractal description of the surface topography. The fractal contact model is scale independent since it is based on parameters invariant of the sample area size and resolution of measuring instrument. The influence of surface roughness, relative humidity, applied voltage, and material properties on the contributions of the van der Waals, electrostatic, and capillary forces to the total stiction force is analyzed in light of simulation results. It is shown that the effects of surface roughness and applied voltage on the maximum stiction force are significantly more pronounced than that of material properties. Results for the critical pull-off stiffness versus surface roughness are presented for different material properties and microstructure stand-free surface spacings. The present analysis can be used to determine the minimum stiffness of microdevices required to prevent stiction in terms of surface roughness, apparent contact area, relative humidity, applied voltage, and material properties.

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Hake, Alison E., Chuming Zhao, Wang-Kyung Sung, and Karl Grosh. "Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors." IEEE Sensors Journal 21, no. 16 (August 15, 2021): 17703–11. http://dx.doi.org/10.1109/jsen.2021.3085825.

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49

Tang, Shuo, Woonggyu Jung, Daniel McCormick, Tuqiang Xie, Jiangping Su, Yeh-Chan Ahn, Bruce J. Tromberg, and Zhongping Chen. "Design and implementation of fiber-based multiphoton endoscopy with microelectromechanical systems scanning." Journal of Biomedical Optics 14, no. 3 (2009): 034005. http://dx.doi.org/10.1117/1.3127203.

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Demirel, Kaan, Erdem Yazgan, Simsek Demir, and Tayfun Akin. "Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication." Journal of Micro/Nanolithography, MEMS, and MOEMS 14, no. 3 (September 21, 2015): 035005. http://dx.doi.org/10.1117/1.jmm.14.3.035005.

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