Academic literature on the topic 'Microelectromechanical systems – Design and construction'

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Journal articles on the topic "Microelectromechanical systems – Design and construction"

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Morrison, Richard, Livia Racz, and David Carter. "Case Study: Design and Construction of the Draper Laboratory Microfabrication Center." Journal of the IEST 56, no. 1 (March 1, 2013): 3–16. http://dx.doi.org/10.17764/jiet.56.1.t755m81670245652.

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For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.
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Osman, Salah Eldeen, and Musaab Zarog. "Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique." Micro and Nanosystems 11, no. 1 (April 2, 2019): 62–67. http://dx.doi.org/10.2174/1876402911666190208162346.

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Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.
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Morrison, Richard H., and Bradley K. Hodges. "CFD Modeling and Modification of Cleanroom Design to Achieve ISO Class 6 Performance." Journal of the IEST 58, no. 1 (November 1, 2015): 1–6. http://dx.doi.org/10.17764/1098-4321.58.1.1.

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The Charles Stark Draper Laboratory Microfabrication Lab, located in Cambridge, Massachusetts, was commissioned in November 2012. The design and construction of this lab was discussed in a previous paper.[1] The laboratory comprises an area of 700.1 m2 (7545 ft2) under filter with 280 m2 (3014 ft2) of clean chase space, divided into 11 distinct cleanrooms. This paper focuses on the design and operation of one ISO Class 6 [2] cleanroom (3335) used for wet processing of microelectromechanical systems (MEMS) and multichip modules (MCM). The initial design criteria are discussed, along with installation of the tools and the non-compliance of ISO Class 6 particle counts. Based on these results, computational fluid dynamics (CFD) modeling software was employed to study the airflow in the room and modify the airflow to be compliant with ISO Class 6 standards.
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Ilie, Iulian, and José Machado. "Design and Validation of a Testing 4D Mechatronic System for Measurement and Integrated Control of Processes." Machines 10, no. 12 (December 13, 2022): 1209. http://dx.doi.org/10.3390/machines10121209.

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Measurements are crucial for research in the fields of microelectromechanical (MEMS), nanoelectromechanical (NEMS) and industrial applications. In this work, the design approach for the development and construction of a testing 4D mechatronic system, and respective validation, including the detailed description of the used components and parts as well as the performed tests for respective validation in the working environment, are presented. Because this is testing equipment, the measurement feature is presented and validated, in detail, making this system available and reliable for the mentioned purposes of use. An important result in this work is the possibility of on-site control or the remote control of the 4D mechatronic system for measurement and integrated control of processes, with the aim of reducing the cost of obtaining the necessary measurements.
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Novikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (September 15, 2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.

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The questions of assessment of achievable performance values of the integrated inertial-satellite navigation system complexed with odometer sensor and used for ground transport and agricultural technological vehicle are considered. Construction of relatively cheap modern navigation systems for ground transport and agricultural technological vehicles is provided by integrating diverse navigation systems, which include inertial-satellite systems that combine into a single hardware system the inertial and satellite modules. Achievable accuracy of gaining the navigation parameters is achieved by using special algorithms for processing of measurement information in combination with complexion of the system with an external source of additional information, where odometer sensor belongs. The most promising sensors are sensors, built using the technology of production of microelectromechanical systems - MEMS / MEMC (Micro-Electro Mechanical Systems). The navigation systems based on MEMS sensors have several advantages. The main advantages are small weight and size characteristics (volume less 1sm3, and weighs less than 1 gram), low power consumption, high reliability, resistance to vibro-impact loads (up to 2000g), easy integration of sensors and electronic modules of the navigation system, low cost. The main disadvantage is the need for the synthesis of complex algorithms of processing of measuring information to obtain the desired accuracy of the estimate of navigation parameters. The navigation system, where as MEMS sensors were used gyroscopes ADXRS-150 in conjunction with accelerometers ADXL-210 manufactured by Analog Devices, was considered. The main design and technological characteristics of sensors were shown, the selection criteria for sensors were formulated, technical and economic effect assessment of the use of MEMS in the navigation system is provided. The practical importance has the estimation of achievable accuracy characteristics of system under actual operating conditions. The paper presents the results of field tests of the navigation system based on MEMS sensors and designed for forklift carrying out transportation in the sea port. The results of experimental studies confirmed the effectiveness of the MEMS application as a sensing element of inertial-satellite navigation system of ground transport and agricultural technological vehicle that creates the foundation for the new high-tech developments.
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Lao, Zhaoxin, Neng Xia, Shijie Wang, Tiantian Xu, Xinyu Wu, and Li Zhang. "Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review." Micromachines 12, no. 4 (April 20, 2021): 465. http://dx.doi.org/10.3390/mi12040465.

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Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.
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Zhao, Le, Shao hua Luo, Guan ci Yang, and Jun yang Li. "Accelerated Adaptive Backstepping Control of the Chaotic MEMS Gyroscope by Using the Type-2 Sequential FNN." Ingeniería e Investigación 41, no. 1 (March 10, 2021): e85825. http://dx.doi.org/10.15446/ing.investig.v41n1.85825.

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In this paper, we propose an accelerated adaptive backstepping control algorithm based on the type2 sequential fuzzy neural network (T2SFNN) for the microelectromechanical system (MEMS) gyroscope with deadzone and constraints. Firstly, the mathematical model of the MEMS gyroscope is established to perform dynamical analyses and controller design. Then, the phase diagrams and Lyapunov exponents are presented to reveal its chaotic oscillation, which is harmful to system stability. In order to suppress oscillations derived from chaos and deadzone, an accelerated adaptive backstepping controller is proposed wherein an adaptive auxiliary is established to compensate the influence of nonsymmetric deadzone on stability performance, along with the T2SFNN designed to approximate unknown functions of dynamic systems. Furthermore, the speed function is introduced to accelerate convergence speed of the control system, and the problem of complex term explosion in traditional backstepping is successfully solved by a secondorder tracking differentiator. Finally, simulation results show that the proposed control scheme can guarantee asymptotic convergence of all signals in the closedloop system, as well as satisfying states constraints and fulfilling the purposes of chaos suppression and accelerated convergence.
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Lusk, Craig P., and Larry L. Howell. "Design Space of Single-Loop Planar Folded Micro Mechanisms With Out-of-Plane Motion." Journal of Mechanical Design 128, no. 5 (November 3, 2005): 1092–100. http://dx.doi.org/10.1115/1.2216734.

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Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods such as surface micromachining, bulk micromachining, or LIGA-type fabrication. If a micro mechanism is desired that has motion out of the plane of fabrication, it can be a folded mechanism in its fabricated position. The desire to design MEMS for a wide range of out-of-plane motions has led to the need for a better theoretical understanding of the design space for folded mechanisms. Thus, this paper derives the design space of arbitrary planar folded mechanisms. This results in the definition of the orientation set measures equality condition (OSMEC) which can be used in constructing adjacency set patches and joining them to construct the design space. The results can be used to explore different properties of the mechanisms in the design space. One such property, the mechanisms’ folded length, is given as an example. Although MEMS provide the primary motivation for the work, the results are general and apply to other areas of application.
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Zhang, Jiayu, Jie Li, Xiaorui Che, Xi Zhang, Chenjun Hu, Kaiqiang Feng, and Tingjin Xu. "The Optimal Design of Modulation Angular Rate for MEMS-Based Rotary Semi-SINS." Micromachines 10, no. 2 (February 10, 2019): 111. http://dx.doi.org/10.3390/mi10020111.

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In previous studies, the semi-strapdown inertial navigation system (SSINS), based on microelectromechanical system (MEMS) sensors, had realized cross-range measurement of attitude information of high-spinning projectiles through construction of a “spin reduction” platform of the roll axis. However, further improvement of its measurement accuracy has been difficult, due to the inertial sensor error. In order to enhance the navigational accuracy, a periodically rotating method is utilized to compensate for sensor error, which is called rotation modulation. At present, the rotation scheme, as one of the core technologies, has been studied by a lot of researchers. It is known that the modulation angular rate is the main factor affecting the effectiveness of error modulation. Different from the long-endurance and low-dynamic motion characteristics of ships, however, the short-endurance and high-dynamic characteristics of the high-spinning projectile not only require the modulation angular rate to be as fast as possible but, also, the influence of the rotation speed error caused by rotating mechanism errors cannot be ignored. Combined with the rotation speed error of the rotating mechanism, this paper explored the relationship between modulation angular rate, device error, and the navigation error, and then proposed a design method for optimal modulation angular rate. Experiments were carried out to validate the performance of the method. In addition, the proposed method is applicable for rotation modulation systems with different types of motors as the rotating mechanism.
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Akinina, Tatyana, Volodymyr Symonenkov, Inna Symonenkova, and German Trushkov. "IMPROVING THE EFFICIENCY OF APPLICATION UNCAVATED UNDERWATER DEVICES FOR THE NEEDS OF THE NAVAL FORCES OF THE ARMED FORCES OF UKRAINE." Collection of scientific works of Odesa Military Academy, no. 16 (February 11, 2022): 126–34. http://dx.doi.org/10.37129/2313-7509.2021.16.126-134.

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The article considers the problems related to the need to use unmanned submarines for the needs of the Navy of the Armed Forces of Ukraine with the possibility of using the latest information technologies, namely,  study of acoustic means of monitoring physical processes in the marine environment, which are the most effective technologies , which significantly supplement and expand the possibilities of contact methods for measuring environmental indicators in technical solutions for underwater monitoring. Methods of solving the tasks on the basis of optimal use of sonar underwater monitoring are proposed in order to increase the overall sensitivity of the sonar system to the useful signal and reduce the sensitivity to "natural" background or intentional interference by using small multi-beam sonar MEMS technology using. Modular design of underwater robotic vehicles, which are one of the promising areas of development of naval equipment, based on the principle of open architecture involves the construction of their components as integral functional elements of the modular type. Therefore, there is a need to create cheap, easy to manufacture and install small hydroacoustic blocks-modules based on the use of MEMS technology, which reduces the overall cost and increases the survivability of the BPA as a whole. It should be noted that the modular design of underwater robotic vehicles, which are one of the promising areas of development of naval equipment, based on the principle of open architecture involves the construction of their components (basic elements) as integral functional elements of the modular type. It is proposed to use the obtained results in the course of further research within the framework of research and development on the creation of promising mobile unmanned aerial vehicles for underwater monitoring and surveillance. Keywords: unmanned underwater vehicle, robotic search and observation technologies, marine situation, underwater situation, microelectromechanical systems.
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Dissertations / Theses on the topic "Microelectromechanical systems – Design and construction"

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Li, Min 1977 Apr 2. "Continuum design sensitivity analysis based force calculation in EM devices." Thesis, McGill University, 2007. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=111523.

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The continuum design sensitivity analysis (CDSA) has been applied to the magnetostatic and electrostatic force calculation. This method allows the computation of the net loading force on a body as well as the force distribution on the surface of the body. An algorithm for force calculation combined with a standard field analysis software package is presented. The efficiency and accuracy of the method is proved through the numerical implementation applied to a set of test examples. In addition, the new approach has several advantages over the traditional methods based on the Maxwell Stress Tensor, such as no air gap or artificial interference with the original model is required. Particularly, the performance analysis of a MEMS micro-mirror using CDSA torque calculation is conducted for the first time.
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Wan, Weijie 1982. "Simulation and optimization of MEMS actuators and tunable capacitors." Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=99798.

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Micro-Electro-Mechanical Systems (MEMS) have played an important role in modern microelectronics, thermal, mechanical and hybrid systems. MEMS technology is a very promising means that might have a great impact on almost every corner of the society. Although many design methodology of MEMS already exists, not as much attention was given to the synthesis and optimization of MEMS devices. This thesis focuses on the optimization of MEMS actuators and MEMS tunable comb drive capacitors. The optimization is based on changing device geometry to achieve desired output parameter profile. For example in the design of MEMS tunable comb drive capacitors, the output parameter is the capacitance tuning range. Numerical experiments were performed to show the successful implementation of the optimization method.
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Zhang, Rui. "Mechanics of micromachined bridge-type accelerometer." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/1285.

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Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005
Having simple structure and high sensitivity, micro accelerometer is a type of popular transducer used to measure the acceleration in a great variety of conditions. The bridge-type micro accelerometer is a typical micro accelerometer and has many types. As one of research project of Kentron in South Africa, the thesis presented here analyzes the bridge-type capacitive nticro accelerometer (BTCMA) and the bridge-type micro accelerometer with two piezoelectric thin films read-out (BTPMA). In this thesis, the similar structures are used on BTCMA and BTPMA For proving the fundamental mode of the structure can measure acceleration and utilizing the structural and electric characteristic to avoid the effect of higher modes, the program CoventorWare for nticro-electric-mechanical system (MEMS) design and analysis is used here to analyze the modes of these two structures, The two group piezoelectric thin films of BTPMA can be connected in serial or parallel configurations. Integrating piezoelectric effect method, strength method and energy method, the analytical analysis of these two configurations has been done with particular emphasis on the elastic characteristics of the thin films. The analytical formulas of transducer, sensitivity, resonance frequency, noise, quality factor, ntinimum detectable signal and maximum detectable range are obtained. According to the comparison results between these two configurations, the charge output in parallel configuration is a little more than that in serial configuration and the sensitivity in serial configuration is much higher than that in parallel configuration. Finally, a calculation of certain practical nticro accelerometer size is used to prove the above conclusions. On the base of capacitance theory, strength method and energy method, the analytical analysis of the BTCMA has been done in this thesis.
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Wang, Lin. "Mechanics of micro capacitive accelerometer with u-shape cantilever beam." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/2616.

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Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005.
Due to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research activities in this field; capacitive accelerometers also have got high concern at large. As a research project of the Kentron in South Africa, this thesis deals with a theoretical model for a one-dimensional micro capacitive accelerometer with U-shape cantilever beam. The properties of the small angle tilted-plate capacitor have been analyzed; the capacitance equation and electrostatic force equation of this kind capacitor have been derived. The sensing element of this accelerometer consists of an inertial mass connected with two cantilever beams. The vibration modes analysis to the sensing element was accomplished by using CoventorWare2004's MemMech module, the result indicates that the main vibration mode can cause the capacitance change observably and the effect of the other modes to the capacitance can be ignored, which satisfied the purpose of the design. In the process of deriving the linearizing acceleration equation, the angle of the inertial mass caused by the deformation of the U-shape cantilever beam was taken into account as well as the electrostatic force between the two electrodes, thus the more precise acceleration linear equation was obtained. The sensitivity equation was derived through the acceleration linear equation, the relationship between the main parameters of the system and the sensitivity has been analyzed. The differential structure of this micro capacitive accelerometer was also analyzed; the linearizing acceleration equation and sensitivity equation of this kind structure were derived, it has been proven that the sensitivity of this structure is twice than the normal structure approximately. The maximum detectable signal was obtained in terms of the fracture strength of the cantilever beam and the maximum displacement of the inertial mass. The minimum detectable signal was obtained in terms of the thermal noise analysis. In the process of the dynamic analysis, the forced vibration produced by the sinusoidal periodic force and sinusoidal periodic moment was analyzed and the transient capacitance equation was derived, this proved the system has good dynamic character in theory. The system was simulated and analyzed by using CoventorWare2004's Saber module. The initial capacitance analysis indicates the relationship between the voltage and the initial capacitance, the result is close to the analytic model. The resonance frequencies analysis indicates that the main dimensions of the sensing element can determine the resonance frequencies and each vibration mode's sequence, the initial dimensions of the sensing element was proved reasonable by analyzing. Sensitivity analysis and Monte Carlo analysis indicate the effect of the sensing element's normal manufacturing tolerance to the system's frequency is small. Impact of plate curvature analysis indicates the effect of the inertial mass's deformation caused by the surface stress to the capacitance is small. Transient analysis obtained the system's transient displacement curve of six directions and transient capacitance curve in normal terms; this proved the system has good dynamic character in the simulating environment.
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Wu, Zhi Gang. "Design, analysis and experiment of novel compliant micromanipulators with grippers driven by PZT actuators." Thesis, University of Macau, 2017. http://umaclib3.umac.mo/record=b3691021.

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Neysmith, Jordan M. "A modular, direct chip attach, wafer level MEMS package : architecture and processing." Thesis, Georgia Institute of Technology, 2000. http://hdl.handle.net/1853/17559.

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Creyts, Don Stafford IV. "Design and fabrication of a MEMS magnetic bistable valve." Thesis, Georgia Institute of Technology, 2001. http://hdl.handle.net/1853/17950.

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Mahdavi, Sareh. "RF power amplifiers and MEMS varactors." Thesis, McGill University, 2007. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=112576.

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This thesis is concerned with the design and implementation of radio frequency (RF) power amplifiers and micro-electromechanical systems---namely MEMS varactors. This is driven by the many wireless communication systems which are constantly moving towards increased integration, better signal quality, and longer battery life.
The power amplifier consumes most of the power in a receiver/transmitter system (transceiver), and its output signal is directly transmitted by the antenna without further modification. Thus, optimizing the PA for low power consumption, increased linearity, and compact integration is highly desirable.
Micro-electromechanical systems enable new levels of performance in radio-frequency integrated circuits, which are not readily available via conventional IC technologies. They are good candidates to replace lossy, low Q-factor off-chip components, which have traditionally been used to implement matching networks or output resonator tanks in class AB, class F, or class E power amplifiers. The MEMS technologies also make possible the use of new architectures, with the possibility of flexible re-configurability and tunability for multi-band and/or multi-standard applications.
The major effort of this thesis is focused on the design and fabrication of an RF frequency class AB power amplifier in the SiGe BiCMOS 5HP technology, with the capability of being tuned with external MEMS varactors. The latter necessitated the exploration of wide-tuning range MEMS variable capacitors, with prototypes designed and fabricated in the Metal-MUMPS process.
An attempt is made to integrate the power amplifier chip and the MEMS die in the same package to provide active tuning of the power amplifier matching network, in order to keep the efficiency of the PA constant for different input power levels and load conditions.
Detailed simulation and measurement results for all circuits and MEMS devices are reported and discussed.
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Sivapurapu, Abhishek. "Piezoelectrically-Transduced Silicon Micromechanical Resonators." Thesis, Georgia Institute of Technology, 2005. http://hdl.handle.net/1853/7478.

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This thesis reports on the design and fabrication of micro-electro-mechanical (MEM) resonators on silicon that are piezoelectrically-transduced for operation in the very high frequency (VHF) range. These devices have a block-type or beam-type design, and are designed to resonate in their in-plane and out-of-plane bulk extensional modes. Two piezoelectric materials were taken into consideration, zinc-oxide (ZnO) and lead-zirconate-titanate (PZT). The resonators are fabricated on silicon-on-insulator (SOI) wafers and the metal/piezo/metal stack of layers forming the device is built and patterned on the device layer silicon via photolithography techniques, RF sputtering (for the piezo-layer) and electron-beam evaporation (for the metal layers). The designing aspect involved ANSYS simulations of the mode-shapes and estimation of frequencies, and these have correlated well with experimental results. Devices with RF sputtered ZnO were successfully fabricated and tested to give high quality factors at reasonably high frequencies. A gold ground plane was implemented to reduce the feed-through level and increase the signal-to-noise ratio. Extensive characterization of PZT was also done as a replacement for ZnO, as the former material has a much higher piezoelectric coefficient (~20X that of ZnO) and can therefore extend the operation of these MEM resonators into the UHF range. Although the basic design of the device remains the same, incorporation of PZT complicates the process flow considerably with respect to the chemistry now involved with the patterning of different layers. The frequency response for ZnO-based resonators as well as all the characterization data for PZT has been reported.
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Dusatko, Tomas A. "Silicon carbide RF-MEM resonators." Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=100250.

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A low-temperature (<300°C) method to fabricate electrostatically actuated microelectromechanical (MEM) clamped-clamped beam resonators has been developed. It utilizes an amorphous silicon carbide (SiC) structural layer and a thin polyimide spacer. The resonator beam is constructed by DC sputtering a tri-layer composite of low-stress SiC and aluminum over the thin polyimide sacrificial layer, and is then released using a microwave O 2 plasma etch. Deposition parameters have been optimized to yield low-stress films (<50MPa), in order to minimize the chance of stress-induced buckling or fracture in both the SiC and aluminum. Characterization of the deposited SiC was performed using several different techniques including scanning electron microscopy, EDX and XRD.
Several different clamped-clamped beam resonator designs were successfully fabricated and tested using a custom built vacuum system, with measured frequencies ranging from 5MHz to 25MHz. A novel thermal tuning method is also demonstrated, using integrated heaters directly on the resonant structure to exploit the temperature dependence of the Young's modulus and thermally induced stresses.
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Books on the topic "Microelectromechanical systems – Design and construction"

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Baglio, Salvatore. Scaling issues and design of microelectromechanical systems. Chichester, England: John Wiley & Sons, 2007.

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National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. Microelectromechanical systems: Advanced materials and fabrication methods. Washington, DC: National Academy Press, 1997.

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Baglio, S. Scaling issues and design of MEMS. Chichester, West Sussex, England: John Wiley & Sons, 2007.

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Baglio, S. Scaling issues and design of MEMS. Chichester, West Sussex, England: John Wiley & Sons, 2007.

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(Firm), Knovel, ed. MEMS/NEMS: Handbook techniques and applications. New York: Springer, 2006.

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T, Leondes Cornelius, ed. MEMS/NEMS: Handbook techniques and applications. New York: Springer, 2006.

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Baldev, Raj, and Atul Tiwari. Materials and failures in MEMS and NEMS. Hoboken, New Jersey: John Wiley & Sons, 2015.

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Bahreyni, Behraad. Fabrication and design of resonant microdevices. Norwich, NY: W. Andrew Inc., 2008.

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Kiihamäki, Jyrki. Fabrication of SOI micromechanical devices. [Espoo, Finland]: VTT Technical Research Centre of Finland, 2005.

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HD, International Conference on High-Density Interconnect and Systems Packaging (2000 Denver Colo ). 2000 HD International Conference on High-Density Interconnect and Systems Packaging: 25-28 April 2000, the Adam's Mark Hotel, Denver, Colorado, USA. Reston, VA: IMAPS, 2000.

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Book chapters on the topic "Microelectromechanical systems – Design and construction"

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Mehner, J., J. Wibbeler, F. Bennini, and W. Dötzel. "Computer Aided Design for Microelectromechanical Systems." In System Design Automation, 111–30. Boston, MA: Springer US, 2001. http://dx.doi.org/10.1007/978-1-4757-6666-0_10.

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Ambrose, James. "Construction Systems." In Building Construction and Design, 177–207. Boston, MA: Springer US, 1992. http://dx.doi.org/10.1007/978-1-4615-6583-3_9.

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Zaghloul, M. E. "Introduction to Microelectromechanical Systems (MEMS): Design and Application." In Mechanical Engineers' Handbook, 863–75. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2006. http://dx.doi.org/10.1002/0471777455.ch21.

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Merritt, Frederick S., and James Ambrose. "Systems for Interior Construction." In Building Engineering and Systems Design, 622–50. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4757-0304-7_16.

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Cashman, Pat M., and Martin Preene. "Design of Groundwater Lowering Systems." In Groundwater Lowering in Construction, 371–426. 3rd edition. | Boca Raton : CRC Press, 2021.: CRC Press, 2020. http://dx.doi.org/10.1201/9781003050025-15.

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Ballo, Federico Maria, Massimiliano Gobbi, Giampiero Mastinu, and Giorgio Previati. "Engineering Design and Optimal Design of Complex Mechanical Systems: Definitions." In Optimal Lightweight Construction Principles, 1–20. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-60835-4_1.

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Merritt, Frederick S., and James Ambrose. "Contract Documents and Construction Methods." In Building Engineering and Systems Design, 115–36. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4757-0304-7_5.

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Stinson, D. R. "The Construction of Nested Cycle Systems." In Coding Theory and Design Theory, 362–67. New York, NY: Springer New York, 1990. http://dx.doi.org/10.1007/978-1-4615-6654-0_26.

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Man, Siu Shing, Jacky Yu Ki Ng, and Alan Hoi Shou Chan. "A Review of the Risk Perception of Construction Workers in Construction Safety." In Human Systems Engineering and Design II, 637–43. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-27928-8_97.

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Beck, Joseph. "W3 - Applying Machine Learning to ITS Design/Construction." In Intelligent Tutoring Systems, 664. Berlin, Heidelberg: Springer Berlin Heidelberg, 2000. http://dx.doi.org/10.1007/3-540-45108-0_87.

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Conference papers on the topic "Microelectromechanical systems – Design and construction"

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Bart, Stephen F. "The Design Environment for MEMS." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-32725.

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Microsystems Technology (MST) or Microelectromechanical Systems (MEMS) by their nature as sensors and actuators are inherently coupled systems that are sensitive to their environment. Therefore, simulating and understanding these influences on the MEMS device’s performance is critical to a successful design. Such simulations require a complex design environment that allows model construction, detailed physical simulation, reduced-order system simulation, and verification. Since these devices almost always interact with IC circuitry, the system level models must, in general, be intergratible with well-established VLSI circuit simulation environments. Also, MEMS are particularly sensitive to package interactions and thus the ability to simulate coupled package interactions are required. In addition to these technical requirements, a MEMS CAD environment must meet several market requirements in order to grow and evolve. This paper examines these requirements and the current state of CAD for MEMS.
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Fu, Kelvin, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann, Kenji Miyaska, and Kaoru Maruta. "Design and Experimental Results of Small-Scale Rotary Engines." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/mems-23924.

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Abstract A research project is currently underway to develop small-scale internal combustion engines fueled by liquid hydrocarbons. The ultimate goal of the MEMS Rotary Internal Combustion Engine Project is to develop a liquid hydrocarbon fueled MEMS-size rotary internal combustion micro-engine capable of delivering power on the order of milli-watts. This research is part of a larger effort to develop a portable, autonomous power generation system with an order of magnitude improvement in energy density over alkaline or lithium-ion batteries. The rotary (Wankel-type) engine is well suited for the fabrication techniques developed in the integrated chip (IC) community and refined by the MicroElectroMechanical Systems (MEMS) field. Features of the rotary engine that lend itself to MEMS fabrication are its planar construction, high specific power, and self-valving operation. The project aims at developing a “micro-rotary” engine with an epitrochoidal-shaped housing under 1 mm3 in size and with a rotor swept volume of 0.08 mm3. To investigate engine behavior and design issues, larger-scale “mini-rotary” engines have been fabricated from steel. Mini-rotary engine chambers are approximately 1000 mm3 to 1700 mm3 in size and their displacements range from 78 mm3 to 348 mm3. A test bench for the mini-rotary engine has been developed and experiments have been conducted with gaseous-fueled mini-rotary engines to examine the effects of sealing, ignition, design, and thermal management on efficiency. Preliminary testing has shown net power output of up to 2.7 W at 9300 RPM. Testing has been performed using hydrogen-air mixtures and a range of spark and glow plug designs as the ignition source. Iterative design and testing of the mini-engine has lead to improved sealing designs. These particular designs are such that they can be incorporated into the fabrication of the micro-engine. Design and fabrication of a first generation meso-scale rotary engine has been completed using a SiC molding process developed at Case Western Reserve University. The fabrication of the micro-rotary engine is being conducted in U.C. Berkeley’s Microfabrication Laboratory. Testing of the mini-engine has lead to the conclusion that there are no fundamental phenomena that would prevent the operation of the micro-engine. However, heat loss and sealing issues are key for efficient operation of the micro-engine, and they must be taken into account in the design and fabrication of the micro-rotary engine. The mini-rotary engine design, testing, results and applications will be discussed in this paper.
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Fu, Kelvin, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann, Kenji Miyaska, and Kaoru Maruta. "Design and Experimental Results of Small-Scale Rotary Engines." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/aes-23635.

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Abstract A research project is currently underway to develop small-scale internal combustion engines fueled by liquid hydrocarbons. The ultimate goal of the MEMS Rotary Internal Combustion Engine Project is to develop a liquid hydrocarbon fueled MEMS-size rotary internal combustion micro-engine capable of delivering power on the order of milli-watts. This research is part of a larger effort to develop a portable, autonomous power generation system with an order of magnitude improvement in energy density over alkaline or lithium-ion batteries. The rotary (Wankel-type) engine is well suited for the fabrication techniques developed in the integrated chip (IC) community and refined by the MicroElectroMechanical Systems (MEMS) field. Features of the rotary engine that lend itself to MEMS fabrication are its planar construction, high specific power, and self-valving operation. The project aims at developing a “micro-rotary” engine with an epitrochoidal-shaped housing under 1 mm3 in size and with a rotor swept volume of 0.08 mm3. To investigate engine behavior and design issues, larger-scale “mini-rotary” engines have been fabricated from steel. Mini-rotary engine chambers are approximately 1000 mm3 to 1700 mm3 in size and their displacements range from 78 mm3 to 348 mm3. A test bench for the mini-rotary engine has been developed and experiments have been conducted with gaseous-fueled mini-rotary engines to examine the effects of sealing, ignition, design, and thermal management on efficiency. Preliminary testing has shown net power output of up to 2.7 W at 9300 RPM. Testing has been performed using hydrogen-air mixtures and a range of spark and glow plug designs as the ignition source. Iterative design and testing of the mini-engine has lead to improved sealing designs. These particular designs are such that they can be incorporated into the fabrication of the micro-engine. Design and fabrication of a first generation meso-scale rotary engine has been completed using a SiC molding process developed at Case Western Reserve University. The fabrication of the micro-rotary engine is being conducted in U.C. Berkeley’s Microfabrication Laboratory. Testing of the mini-engine has lead to the conclusion that there are no fundamental phenomena that would prevent the operation of the micro-engine. However, heat loss and sealing issues are key for efficient operation of the micro-engine, and they must be taken into account in the design and fabrication of the micro-rotary engine. The mini-rotary engine design, testing, results and applications will be discussed in this paper.
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Cable, Justin, and Kevin R. Anderson. "Fabrication and Multiphysics Modeling of MEMS Thermal Flow Sensor." In ASME-JSME-KSME 2019 8th Joint Fluids Engineering Conference. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/ajkfluids2019-4606.

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Abstract A micromachined thermal flow sensor is presented demonstrating sensing liquid flow rates as low as 2 microliters per minute capable of being used for biomedical applications. These flow sensors rely on the varying electrical resistance of sensors generated by forced convection at different flow rates. The sensor array presented was constructed using microelectromechanical systems (MEMS) techniques including micro-molding, wet etching and dry etching utilizing biocompatible materials. A numerical model was built using COMSOL multi-physics in order to predict and optimize the electrical, thermal and fluid behavior of the sensor, which was verified with experimental data. The construction allowed for multiple thermal flow sensing operational modes. Here, constant current hot film and constant current calorimetric were simulated and tested. A variety of flow sensor geometries were compared to investigate maximum heat transfer to the sensors, thermal insultation, size, sensitivity and range capabilities. The sensor design is such that it is capable of detecting different flow direction and various flow ranges for different fluids. In addition to the performance capabilities outlined, the sensor is relatively inexpensive and should have a long lifetime due to the lack of moving parts.
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Mukherjee, Tamal, and Gary K. Fedder. "Structured design of microelectromechanical systems." In the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266320.

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Teslyuk, Vasyl, Mykola Pereyma, Volodymyr Karkulyovskyy, and Mykhaylo Lobur. "Features of microelectromechanical systems design." In 2nd International Conference on Perspective Technologies and Methods in MEMS Design. IEEE, 2006. http://dx.doi.org/10.1109/memstech.2006.288666.

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Ananthasuresh, G. K., Sridhar Kota, Selden B. Crary, and Kensall D. Wise. "Design and Fabrication of Microelectromechanical Systems." In ASME 1992 Design Technical Conferences. American Society of Mechanical Engineers, 1992. http://dx.doi.org/10.1115/detc1992-0222.

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Abstract An attempt has been made to summarize some of the important developments in the emerging technology of microelectromechanical systems (MEMS) from the mechanical engineering perspective. In the micro domain, design and fabrication issues are very much different from those of the macro world. The reason for this is twofold. First, the limitations of the micromachining techniques give way to new exigencies that are nonexistent in the macromachinery. One such difficulty is the virtual loss of the third dimension, since most of the microstructures are fabricated by integrated circuit based micromachining techniques that are predominantly planar. Second, the batch-produced micro structures that require no further assembly, offer significant economical advantage over their macro counterparts. Furthermore, electronic circuits and sensors can be integrated with micromechanical structures. In order to best utilize these features, it becomes necessary to establish new concepts for the design of MEMS. A set of key joints and mechanisms using which majority of the mechanical devices can be built, is identified. It is surmised that such an effort will be advantageous in designing micromechanisms as they form the basis for what we call fabrication building blocks (joints) and synthetic building blocks (mechanisms). The paper also reviews some of the fabrication techniques and the micromechanical devices that have already been made, and makes suggestions regarding the fabrication of a few generic mechanisms that can be made using these techniques. In particular, it discusses the fabrication of a motor-driven four-bar linkage using the “boron-doped bulk-silicon dissolved-wafer process” developed at The University of Michigan’s Center for Integrated Sensors and Circuits.
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Tang, William C. "Overview of microelectromechanical systems and design processes." In the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266316.

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Yuriy, Hirnyak. "The main points of the microelectromechanical systems development." In 2008 International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH). IEEE, 2008. http://dx.doi.org/10.1109/memstech.2008.4558754.

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Denysyuk, Pavlo, Vasyl Teslyuk, Mykhaylo Lobur, Ihor Farmaga, and Roman Abramovych. "System For Physical Processes Simulation In Hydraulic Microelectromechanical Systems." In 2nd International Conference on Perspective Technologies and Methods in MEMS Design. IEEE, 2006. http://dx.doi.org/10.1109/memstech.2006.288683.

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Reports on the topic "Microelectromechanical systems – Design and construction"

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Fanella, David A., Amaldo T. Derecho, and S. K. Ghosh. Design and construction of structural systems. Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1av1.

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Dunn, Martin L. Topology Optimization for the Design of 3-D Microelectromechanical Systems (MEMS) Undergoing Coupled Multiphysics Phenomena. Fort Belvoir, VA: Defense Technical Information Center, November 2004. http://dx.doi.org/10.21236/ada438436.

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CORPS OF ENGINEERS WASHINGTON DC. Engineering and Design: Information Systems Design in Support of Military Construction. Fort Belvoir, VA: Defense Technical Information Center, April 1992. http://dx.doi.org/10.21236/ada404012.

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Fanella, David A., Amaldo T. Derecho, and S. K. Ghosh. Design and construction of structural systems (Appendices A-G). Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1av2.

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Lew, HS, Richard W. Bukowski, and Nicholas J. Carino. Design, construction, and maintenance of structural and life safety systems. Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1.

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L.E. Dudek, M. Kalish, R. Gernhardt, R.F. Parsells, and W. Blanchard. Design and Construction of the NSTX Bakeout, Cooling and Vacuum Systems. Office of Scientific and Technical Information (OSTI), November 1999. http://dx.doi.org/10.2172/14669.

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Steiner, G. R., and J. T. Watson. General design, construction, and operation guidelines: Constructed wetlands wastewater treatment systems for small users including individual residences. Second edition. Office of Scientific and Technical Information (OSTI), May 1993. http://dx.doi.org/10.2172/10105386.

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Gunay, Selim, Fan Hu, Khalid Mosalam, Arpit Nema, Jose Restrepo, Adam Zsarnoczay, and Jack Baker. Blind Prediction of Shaking Table Tests of a New Bridge Bent Design. Pacific Earthquake Engineering Research Center, University of California, Berkeley, CA, November 2020. http://dx.doi.org/10.55461/svks9397.

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Considering the importance of the transportation network and bridge structures, the associated seismic design philosophy is shifting from the basic collapse prevention objective to maintaining functionality on the community scale in the aftermath of moderate to strong earthquakes (i.e., resiliency). In addition to performance, the associated construction philosophy is also being modernized, with the utilization of accelerated bridge construction (ABC) techniques to reduce impacts of construction work on traffic, society, economy, and on-site safety during construction. Recent years have seen several developments towards the design of low-damage bridges and ABC. According to the results of conducted tests, these systems have significant potential to achieve the intended community resiliency objectives. Taking advantage of such potential in the standard design and analysis processes requires proper modeling that adequately characterizes the behavior and response of these bridge systems. To evaluate the current practices and abilities of the structural engineering community to model this type of resiliency-oriented bridges, the Pacific Earthquake Engineering Research Center (PEER) organized a blind prediction contest of a two-column bridge bent consisting of columns with enhanced response characteristics achieved by a well-balanced contribution of self-centering, rocking, and energy dissipation. The parameters of this blind prediction competition are described in this report, and the predictions submitted by different teams are analyzed. In general, forces are predicted better than displacements. The post-tension bar forces and residual displacements are predicted with the best and least accuracy, respectively. Some of the predicted quantities are observed to have coefficient of variation (COV) values larger than 50%; however, in general, the scatter in the predictions amongst different teams is not significantly large. Applied ground motions (GM) in shaking table tests consisted of a series of naturally recorded earthquake acceleration signals, where GM1 is found to be the largest contributor to the displacement error for most of the teams, and GM7 is the largest contributor to the force (hence, the acceleration) error. The large contribution of GM1 to the displacement error is due to the elastic response in GM1 and the errors stemming from the incorrect estimation of the period and damping ratio. The contribution of GM7 to the force error is due to the errors in the estimation of the base-shear capacity. Several teams were able to predict forces and accelerations with only moderate bias. Displacements, however, were systematically underestimated by almost every team. This suggests that there is a general problem either in the assumptions made or the models used to simulate the response of this type of bridge bent with enhanced response characteristics. Predictions of the best-performing teams were consistently and substantially better than average in all response quantities. The engineering community would benefit from learning details of the approach of the best teams and the factors that caused the models of other teams to fail to produce similarly good results. Blind prediction contests provide: (1) very useful information regarding areas where current numerical models might be improved; and (2) quantitative data regarding the uncertainty of analytical models for use in performance-based earthquake engineering evaluations. Such blind prediction contests should be encouraged for other experimental research activities and are planned to be conducted annually by PEER.
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Wu, Yingjie, Selim Gunay, and Khalid Mosalam. Hybrid Simulations for the Seismic Evaluation of Resilient Highway Bridge Systems. Pacific Earthquake Engineering Research Center, University of California, Berkeley, CA, November 2020. http://dx.doi.org/10.55461/ytgv8834.

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Bridges often serve as key links in local and national transportation networks. Bridge closures can result in severe costs, not only in the form of repair or replacement, but also in the form of economic losses related to medium- and long-term interruption of businesses and disruption to surrounding communities. In addition, continuous functionality of bridges is very important after any seismic event for emergency response and recovery purposes. Considering the importance of these structures, the associated structural design philosophy is shifting from collapse prevention to maintaining functionality in the aftermath of moderate to strong earthquakes, referred to as “resiliency” in earthquake engineering research. Moreover, the associated construction philosophy is being modernized with the utilization of accelerated bridge construction (ABC) techniques, which strive to reduce the impact of construction on traffic, society, economy and on-site safety. This report presents two bridge systems that target the aforementioned issues. A study that combined numerical and experimental research was undertaken to characterize the seismic performance of these bridge systems. The first part of the study focuses on the structural system-level response of highway bridges that incorporate a class of innovative connecting devices called the “V-connector,”, which can be used to connect two components in a structural system, e.g., the column and the bridge deck, or the column and its foundation. This device, designed by ACII, Inc., results in an isolation surface at the connection plane via a connector rod placed in a V-shaped tube that is embedded into the concrete. Energy dissipation is provided by friction between a special washer located around the V-shaped tube and a top plate. Because of the period elongation due to the isolation layer and the limited amount of force transferred by the relatively flexible connector rod, bridge columns are protected from experiencing damage, thus leading to improved seismic behavior. The V-connector system also facilitates the ABC by allowing on-site assembly of prefabricated structural parts including those of the V-connector. A single-column, two-span highway bridge located in Northern California was used for the proof-of-concept of the proposed V-connector protective system. The V-connector was designed to result in an elastic bridge response based on nonlinear dynamic analyses of the bridge model with the V-connector. Accordingly, a one-third scale V-connector was fabricated based on a set of selected design parameters. A quasi-static cyclic test was first conducted to characterize the force-displacement relationship of the V-connector, followed by a hybrid simulation (HS) test in the longitudinal direction of the bridge to verify the intended linear elastic response of the bridge system. In the HS test, all bridge components were analytically modeled except for the V-connector, which was simulated as the experimental substructure in a specially designed and constructed test setup. Linear elastic bridge response was confirmed according to the HS results. The response of the bridge with the V-connector was compared against that of the as-built bridge without the V-connector, which experienced significant column damage. These results justified the effectiveness of this innovative device. The second part of the study presents the HS test conducted on a one-third scale two-column bridge bent with self-centering columns (broadly defined as “resilient columns” in this study) to reduce (or ultimately eliminate) any residual drifts. The comparison of the HS test with a previously conducted shaking table test on an identical bridge bent is one of the highlights of this study. The concept of resiliency was incorporated in the design of the bridge bent columns characterized by a well-balanced combination of self-centering, rocking, and energy-dissipating mechanisms. This combination is expected to lead to minimum damage and low levels of residual drifts. The ABC is achieved by utilizing precast columns and end members (cap beam and foundation) through an innovative socket connection. In order to conduct the HS test, a new hybrid simulation system (HSS) was developed, utilizing commonly available software and hardware components in most structural laboratories including: a computational platform using Matlab/Simulink [MathWorks 2015], an interface hardware/software platform dSPACE [2017], and MTS controllers and data acquisition (DAQ) system for the utilized actuators and sensors. Proper operation of the HSS was verified using a trial run without the test specimen before the actual HS test. In the conducted HS test, the two-column bridge bent was simulated as the experimental substructure while modeling the horizontal and vertical inertia masses and corresponding mass proportional damping in the computer. The same ground motions from the shaking table test, consisting of one horizontal component and the vertical component, were applied as input excitations to the equations of motion in the HS. Good matching was obtained between the shaking table and the HS test results, demonstrating the appropriateness of the defined governing equations of motion and the employed damping model, in addition to the reliability of the developed HSS with minimum simulation errors. The small residual drifts and the minimum level of structural damage at large peak drift levels demonstrated the superior seismic response of the innovative design of the bridge bent with self-centering columns. The reliability of the developed HS approach motivated performing a follow-up HS study focusing on the transverse direction of the bridge, where the entire two-span bridge deck and its abutments represented the computational substructure, while the two-column bridge bent was the physical substructure. This investigation was effective in shedding light on the system-level performance of the entire bridge system that incorporated innovative bridge bent design beyond what can be achieved via shaking table tests, which are usually limited by large-scale bridge system testing capacities.
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Vogtsberger. L52138 Resolution Capabilities of High Resolution Axial Flux Leakage Casing Inspection Tools. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2008. http://dx.doi.org/10.55274/r0011164.

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Objective Design and construction of 5.5 inch prototype downhole inspection tool and electronics module. Implement preliminary software acquisition and display module. Integrate hardware and software systems. Conduct operational field test (OFT). Technical Approach From the continuation of Phase 1 of this research, the lessons learned in Phase 1 (Bench Test Prototype) were incorporated into the design and construction of an operational field test instrument. Implementation of preliminary software acquisition and display of data along with integration into existing wireline systems operations accomplished the total systems requirements. Finally, operational field test on PRCI committee member wells provide verification that all components of the system operate and provide desired results.
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