Academic literature on the topic 'Microelectromechanical systems – Design and construction'
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Journal articles on the topic "Microelectromechanical systems – Design and construction"
Morrison, Richard, Livia Racz, and David Carter. "Case Study: Design and Construction of the Draper Laboratory Microfabrication Center." Journal of the IEST 56, no. 1 (March 1, 2013): 3–16. http://dx.doi.org/10.17764/jiet.56.1.t755m81670245652.
Full textOsman, Salah Eldeen, and Musaab Zarog. "Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique." Micro and Nanosystems 11, no. 1 (April 2, 2019): 62–67. http://dx.doi.org/10.2174/1876402911666190208162346.
Full textMorrison, Richard H., and Bradley K. Hodges. "CFD Modeling and Modification of Cleanroom Design to Achieve ISO Class 6 Performance." Journal of the IEST 58, no. 1 (November 1, 2015): 1–6. http://dx.doi.org/10.17764/1098-4321.58.1.1.
Full textIlie, Iulian, and José Machado. "Design and Validation of a Testing 4D Mechatronic System for Measurement and Integrated Control of Processes." Machines 10, no. 12 (December 13, 2022): 1209. http://dx.doi.org/10.3390/machines10121209.
Full textNovikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (September 15, 2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.
Full textLao, Zhaoxin, Neng Xia, Shijie Wang, Tiantian Xu, Xinyu Wu, and Li Zhang. "Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review." Micromachines 12, no. 4 (April 20, 2021): 465. http://dx.doi.org/10.3390/mi12040465.
Full textZhao, Le, Shao hua Luo, Guan ci Yang, and Jun yang Li. "Accelerated Adaptive Backstepping Control of the Chaotic MEMS Gyroscope by Using the Type-2 Sequential FNN." Ingeniería e Investigación 41, no. 1 (March 10, 2021): e85825. http://dx.doi.org/10.15446/ing.investig.v41n1.85825.
Full textLusk, Craig P., and Larry L. Howell. "Design Space of Single-Loop Planar Folded Micro Mechanisms With Out-of-Plane Motion." Journal of Mechanical Design 128, no. 5 (November 3, 2005): 1092–100. http://dx.doi.org/10.1115/1.2216734.
Full textZhang, Jiayu, Jie Li, Xiaorui Che, Xi Zhang, Chenjun Hu, Kaiqiang Feng, and Tingjin Xu. "The Optimal Design of Modulation Angular Rate for MEMS-Based Rotary Semi-SINS." Micromachines 10, no. 2 (February 10, 2019): 111. http://dx.doi.org/10.3390/mi10020111.
Full textAkinina, Tatyana, Volodymyr Symonenkov, Inna Symonenkova, and German Trushkov. "IMPROVING THE EFFICIENCY OF APPLICATION UNCAVATED UNDERWATER DEVICES FOR THE NEEDS OF THE NAVAL FORCES OF THE ARMED FORCES OF UKRAINE." Collection of scientific works of Odesa Military Academy, no. 16 (February 11, 2022): 126–34. http://dx.doi.org/10.37129/2313-7509.2021.16.126-134.
Full textDissertations / Theses on the topic "Microelectromechanical systems – Design and construction"
Li, Min 1977 Apr 2. "Continuum design sensitivity analysis based force calculation in EM devices." Thesis, McGill University, 2007. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=111523.
Full textWan, Weijie 1982. "Simulation and optimization of MEMS actuators and tunable capacitors." Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=99798.
Full textZhang, Rui. "Mechanics of micromachined bridge-type accelerometer." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/1285.
Full textHaving simple structure and high sensitivity, micro accelerometer is a type of popular transducer used to measure the acceleration in a great variety of conditions. The bridge-type micro accelerometer is a typical micro accelerometer and has many types. As one of research project of Kentron in South Africa, the thesis presented here analyzes the bridge-type capacitive nticro accelerometer (BTCMA) and the bridge-type micro accelerometer with two piezoelectric thin films read-out (BTPMA). In this thesis, the similar structures are used on BTCMA and BTPMA For proving the fundamental mode of the structure can measure acceleration and utilizing the structural and electric characteristic to avoid the effect of higher modes, the program CoventorWare for nticro-electric-mechanical system (MEMS) design and analysis is used here to analyze the modes of these two structures, The two group piezoelectric thin films of BTPMA can be connected in serial or parallel configurations. Integrating piezoelectric effect method, strength method and energy method, the analytical analysis of these two configurations has been done with particular emphasis on the elastic characteristics of the thin films. The analytical formulas of transducer, sensitivity, resonance frequency, noise, quality factor, ntinimum detectable signal and maximum detectable range are obtained. According to the comparison results between these two configurations, the charge output in parallel configuration is a little more than that in serial configuration and the sensitivity in serial configuration is much higher than that in parallel configuration. Finally, a calculation of certain practical nticro accelerometer size is used to prove the above conclusions. On the base of capacitance theory, strength method and energy method, the analytical analysis of the BTCMA has been done in this thesis.
Wang, Lin. "Mechanics of micro capacitive accelerometer with u-shape cantilever beam." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/2616.
Full textDue to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research activities in this field; capacitive accelerometers also have got high concern at large. As a research project of the Kentron in South Africa, this thesis deals with a theoretical model for a one-dimensional micro capacitive accelerometer with U-shape cantilever beam. The properties of the small angle tilted-plate capacitor have been analyzed; the capacitance equation and electrostatic force equation of this kind capacitor have been derived. The sensing element of this accelerometer consists of an inertial mass connected with two cantilever beams. The vibration modes analysis to the sensing element was accomplished by using CoventorWare2004's MemMech module, the result indicates that the main vibration mode can cause the capacitance change observably and the effect of the other modes to the capacitance can be ignored, which satisfied the purpose of the design. In the process of deriving the linearizing acceleration equation, the angle of the inertial mass caused by the deformation of the U-shape cantilever beam was taken into account as well as the electrostatic force between the two electrodes, thus the more precise acceleration linear equation was obtained. The sensitivity equation was derived through the acceleration linear equation, the relationship between the main parameters of the system and the sensitivity has been analyzed. The differential structure of this micro capacitive accelerometer was also analyzed; the linearizing acceleration equation and sensitivity equation of this kind structure were derived, it has been proven that the sensitivity of this structure is twice than the normal structure approximately. The maximum detectable signal was obtained in terms of the fracture strength of the cantilever beam and the maximum displacement of the inertial mass. The minimum detectable signal was obtained in terms of the thermal noise analysis. In the process of the dynamic analysis, the forced vibration produced by the sinusoidal periodic force and sinusoidal periodic moment was analyzed and the transient capacitance equation was derived, this proved the system has good dynamic character in theory. The system was simulated and analyzed by using CoventorWare2004's Saber module. The initial capacitance analysis indicates the relationship between the voltage and the initial capacitance, the result is close to the analytic model. The resonance frequencies analysis indicates that the main dimensions of the sensing element can determine the resonance frequencies and each vibration mode's sequence, the initial dimensions of the sensing element was proved reasonable by analyzing. Sensitivity analysis and Monte Carlo analysis indicate the effect of the sensing element's normal manufacturing tolerance to the system's frequency is small. Impact of plate curvature analysis indicates the effect of the inertial mass's deformation caused by the surface stress to the capacitance is small. Transient analysis obtained the system's transient displacement curve of six directions and transient capacitance curve in normal terms; this proved the system has good dynamic character in the simulating environment.
Wu, Zhi Gang. "Design, analysis and experiment of novel compliant micromanipulators with grippers driven by PZT actuators." Thesis, University of Macau, 2017. http://umaclib3.umac.mo/record=b3691021.
Full textNeysmith, Jordan M. "A modular, direct chip attach, wafer level MEMS package : architecture and processing." Thesis, Georgia Institute of Technology, 2000. http://hdl.handle.net/1853/17559.
Full textCreyts, Don Stafford IV. "Design and fabrication of a MEMS magnetic bistable valve." Thesis, Georgia Institute of Technology, 2001. http://hdl.handle.net/1853/17950.
Full textMahdavi, Sareh. "RF power amplifiers and MEMS varactors." Thesis, McGill University, 2007. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=112576.
Full textThe power amplifier consumes most of the power in a receiver/transmitter system (transceiver), and its output signal is directly transmitted by the antenna without further modification. Thus, optimizing the PA for low power consumption, increased linearity, and compact integration is highly desirable.
Micro-electromechanical systems enable new levels of performance in radio-frequency integrated circuits, which are not readily available via conventional IC technologies. They are good candidates to replace lossy, low Q-factor off-chip components, which have traditionally been used to implement matching networks or output resonator tanks in class AB, class F, or class E power amplifiers. The MEMS technologies also make possible the use of new architectures, with the possibility of flexible re-configurability and tunability for multi-band and/or multi-standard applications.
The major effort of this thesis is focused on the design and fabrication of an RF frequency class AB power amplifier in the SiGe BiCMOS 5HP technology, with the capability of being tuned with external MEMS varactors. The latter necessitated the exploration of wide-tuning range MEMS variable capacitors, with prototypes designed and fabricated in the Metal-MUMPS process.
An attempt is made to integrate the power amplifier chip and the MEMS die in the same package to provide active tuning of the power amplifier matching network, in order to keep the efficiency of the PA constant for different input power levels and load conditions.
Detailed simulation and measurement results for all circuits and MEMS devices are reported and discussed.
Sivapurapu, Abhishek. "Piezoelectrically-Transduced Silicon Micromechanical Resonators." Thesis, Georgia Institute of Technology, 2005. http://hdl.handle.net/1853/7478.
Full textDusatko, Tomas A. "Silicon carbide RF-MEM resonators." Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=100250.
Full textSeveral different clamped-clamped beam resonator designs were successfully fabricated and tested using a custom built vacuum system, with measured frequencies ranging from 5MHz to 25MHz. A novel thermal tuning method is also demonstrated, using integrated heaters directly on the resonant structure to exploit the temperature dependence of the Young's modulus and thermally induced stresses.
Books on the topic "Microelectromechanical systems – Design and construction"
Baglio, Salvatore. Scaling issues and design of microelectromechanical systems. Chichester, England: John Wiley & Sons, 2007.
Find full textNational Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. Microelectromechanical systems: Advanced materials and fabrication methods. Washington, DC: National Academy Press, 1997.
Find full textBaglio, S. Scaling issues and design of MEMS. Chichester, West Sussex, England: John Wiley & Sons, 2007.
Find full textBaglio, S. Scaling issues and design of MEMS. Chichester, West Sussex, England: John Wiley & Sons, 2007.
Find full text(Firm), Knovel, ed. MEMS/NEMS: Handbook techniques and applications. New York: Springer, 2006.
Find full textT, Leondes Cornelius, ed. MEMS/NEMS: Handbook techniques and applications. New York: Springer, 2006.
Find full textBaldev, Raj, and Atul Tiwari. Materials and failures in MEMS and NEMS. Hoboken, New Jersey: John Wiley & Sons, 2015.
Find full textBahreyni, Behraad. Fabrication and design of resonant microdevices. Norwich, NY: W. Andrew Inc., 2008.
Find full textKiihamäki, Jyrki. Fabrication of SOI micromechanical devices. [Espoo, Finland]: VTT Technical Research Centre of Finland, 2005.
Find full textHD, International Conference on High-Density Interconnect and Systems Packaging (2000 Denver Colo ). 2000 HD International Conference on High-Density Interconnect and Systems Packaging: 25-28 April 2000, the Adam's Mark Hotel, Denver, Colorado, USA. Reston, VA: IMAPS, 2000.
Find full textBook chapters on the topic "Microelectromechanical systems – Design and construction"
Mehner, J., J. Wibbeler, F. Bennini, and W. Dötzel. "Computer Aided Design for Microelectromechanical Systems." In System Design Automation, 111–30. Boston, MA: Springer US, 2001. http://dx.doi.org/10.1007/978-1-4757-6666-0_10.
Full textAmbrose, James. "Construction Systems." In Building Construction and Design, 177–207. Boston, MA: Springer US, 1992. http://dx.doi.org/10.1007/978-1-4615-6583-3_9.
Full textZaghloul, M. E. "Introduction to Microelectromechanical Systems (MEMS): Design and Application." In Mechanical Engineers' Handbook, 863–75. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2006. http://dx.doi.org/10.1002/0471777455.ch21.
Full textMerritt, Frederick S., and James Ambrose. "Systems for Interior Construction." In Building Engineering and Systems Design, 622–50. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4757-0304-7_16.
Full textCashman, Pat M., and Martin Preene. "Design of Groundwater Lowering Systems." In Groundwater Lowering in Construction, 371–426. 3rd edition. | Boca Raton : CRC Press, 2021.: CRC Press, 2020. http://dx.doi.org/10.1201/9781003050025-15.
Full textBallo, Federico Maria, Massimiliano Gobbi, Giampiero Mastinu, and Giorgio Previati. "Engineering Design and Optimal Design of Complex Mechanical Systems: Definitions." In Optimal Lightweight Construction Principles, 1–20. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-60835-4_1.
Full textMerritt, Frederick S., and James Ambrose. "Contract Documents and Construction Methods." In Building Engineering and Systems Design, 115–36. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4757-0304-7_5.
Full textStinson, D. R. "The Construction of Nested Cycle Systems." In Coding Theory and Design Theory, 362–67. New York, NY: Springer New York, 1990. http://dx.doi.org/10.1007/978-1-4615-6654-0_26.
Full textMan, Siu Shing, Jacky Yu Ki Ng, and Alan Hoi Shou Chan. "A Review of the Risk Perception of Construction Workers in Construction Safety." In Human Systems Engineering and Design II, 637–43. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-27928-8_97.
Full textBeck, Joseph. "W3 - Applying Machine Learning to ITS Design/Construction." In Intelligent Tutoring Systems, 664. Berlin, Heidelberg: Springer Berlin Heidelberg, 2000. http://dx.doi.org/10.1007/3-540-45108-0_87.
Full textConference papers on the topic "Microelectromechanical systems – Design and construction"
Bart, Stephen F. "The Design Environment for MEMS." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-32725.
Full textFu, Kelvin, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann, Kenji Miyaska, and Kaoru Maruta. "Design and Experimental Results of Small-Scale Rotary Engines." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/mems-23924.
Full textFu, Kelvin, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann, Kenji Miyaska, and Kaoru Maruta. "Design and Experimental Results of Small-Scale Rotary Engines." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/aes-23635.
Full textCable, Justin, and Kevin R. Anderson. "Fabrication and Multiphysics Modeling of MEMS Thermal Flow Sensor." In ASME-JSME-KSME 2019 8th Joint Fluids Engineering Conference. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/ajkfluids2019-4606.
Full textMukherjee, Tamal, and Gary K. Fedder. "Structured design of microelectromechanical systems." In the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266320.
Full textTeslyuk, Vasyl, Mykola Pereyma, Volodymyr Karkulyovskyy, and Mykhaylo Lobur. "Features of microelectromechanical systems design." In 2nd International Conference on Perspective Technologies and Methods in MEMS Design. IEEE, 2006. http://dx.doi.org/10.1109/memstech.2006.288666.
Full textAnanthasuresh, G. K., Sridhar Kota, Selden B. Crary, and Kensall D. Wise. "Design and Fabrication of Microelectromechanical Systems." In ASME 1992 Design Technical Conferences. American Society of Mechanical Engineers, 1992. http://dx.doi.org/10.1115/detc1992-0222.
Full textTang, William C. "Overview of microelectromechanical systems and design processes." In the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266316.
Full textYuriy, Hirnyak. "The main points of the microelectromechanical systems development." In 2008 International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH). IEEE, 2008. http://dx.doi.org/10.1109/memstech.2008.4558754.
Full textDenysyuk, Pavlo, Vasyl Teslyuk, Mykhaylo Lobur, Ihor Farmaga, and Roman Abramovych. "System For Physical Processes Simulation In Hydraulic Microelectromechanical Systems." In 2nd International Conference on Perspective Technologies and Methods in MEMS Design. IEEE, 2006. http://dx.doi.org/10.1109/memstech.2006.288683.
Full textReports on the topic "Microelectromechanical systems – Design and construction"
Fanella, David A., Amaldo T. Derecho, and S. K. Ghosh. Design and construction of structural systems. Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1av1.
Full textDunn, Martin L. Topology Optimization for the Design of 3-D Microelectromechanical Systems (MEMS) Undergoing Coupled Multiphysics Phenomena. Fort Belvoir, VA: Defense Technical Information Center, November 2004. http://dx.doi.org/10.21236/ada438436.
Full textCORPS OF ENGINEERS WASHINGTON DC. Engineering and Design: Information Systems Design in Support of Military Construction. Fort Belvoir, VA: Defense Technical Information Center, April 1992. http://dx.doi.org/10.21236/ada404012.
Full textFanella, David A., Amaldo T. Derecho, and S. K. Ghosh. Design and construction of structural systems (Appendices A-G). Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1av2.
Full textLew, HS, Richard W. Bukowski, and Nicholas J. Carino. Design, construction, and maintenance of structural and life safety systems. Gaithersburg, MD: National Institute of Standards and Technology, 2005. http://dx.doi.org/10.6028/nist.ncstar.1-1.
Full textL.E. Dudek, M. Kalish, R. Gernhardt, R.F. Parsells, and W. Blanchard. Design and Construction of the NSTX Bakeout, Cooling and Vacuum Systems. Office of Scientific and Technical Information (OSTI), November 1999. http://dx.doi.org/10.2172/14669.
Full textSteiner, G. R., and J. T. Watson. General design, construction, and operation guidelines: Constructed wetlands wastewater treatment systems for small users including individual residences. Second edition. Office of Scientific and Technical Information (OSTI), May 1993. http://dx.doi.org/10.2172/10105386.
Full textGunay, Selim, Fan Hu, Khalid Mosalam, Arpit Nema, Jose Restrepo, Adam Zsarnoczay, and Jack Baker. Blind Prediction of Shaking Table Tests of a New Bridge Bent Design. Pacific Earthquake Engineering Research Center, University of California, Berkeley, CA, November 2020. http://dx.doi.org/10.55461/svks9397.
Full textWu, Yingjie, Selim Gunay, and Khalid Mosalam. Hybrid Simulations for the Seismic Evaluation of Resilient Highway Bridge Systems. Pacific Earthquake Engineering Research Center, University of California, Berkeley, CA, November 2020. http://dx.doi.org/10.55461/ytgv8834.
Full textVogtsberger. L52138 Resolution Capabilities of High Resolution Axial Flux Leakage Casing Inspection Tools. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2008. http://dx.doi.org/10.55274/r0011164.
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