Relevant bibliographies by topics / Microelectromechanical systems

Academic literature on the topic 'Microelectromechanical systems'

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Published: 4 June 2021
Last updated: 31 July 2024

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Journal articles on the topic "Microelectromechanical systems"

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Gabriel, K. J. "Microelectromechanical systems." Proceedings of the IEEE 86, no. 8 (1998): 1534–35. http://dx.doi.org/10.1109/5.704257.

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Mehregany, M. "Microelectromechanical systems." IEEE Circuits and Devices Magazine 9, no. 4 (July 1993): 14–22. http://dx.doi.org/10.1109/101.250229.

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MacDonald, Noel C. "SCREAM MicroElectroMechanical Systems." Microelectronic Engineering 32, no. 1-4 (September 1996): 49–73. http://dx.doi.org/10.1016/0167-9317(96)00007-x.

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Vasylenko, Mykola, and Maksym Mahas. "Microelectromechanical Gyrovertical." Electronics and Control Systems 1, no. 71 (June 27, 2022): 16–21. http://dx.doi.org/10.18372/1990-5548.71.16818.

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Gyroscopic verticals (gyroverticals) are designed to determine the direction of the true vertical on moving objects. Being one of the devices of the orientation system of a moving object, they are used as sensors for the roll and pitch angles of an aircraft (or sensors of similar angles for other moving objects) and serve to create a platform stabilized in the horizon plane on a moving object. The electrical signals taken from the measuring axes of the device are used in flight, navigation, radar systems, visual indicators, etc. Gyroscopic stabilization systems are widely used as the basis of integrated management systems on aircraft and miniature unmanned aerial vehicles for generating signals proportional to the angular deviations of the aircraft in space in terms of roll and pitch angles and for stabilizing and controlling the position in space of optical equipment. At present, sensors based on the technologies of microelectromechanical systems are widely used in small aircraft. Their important advantage is small weight and size characteristics, and the main disadvantage is low accuracy. Such sensors are used in navigation systems and automatic control systems of aircraft. In particular, algorithms for calculating the orientation angles of an unmanned aerial vehicle are known, using information from microelectromechanical angular velocity sensors. However, due to large drifts, an error accumulates in time and, as a result, the operating time is limited.
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Bhat, K. N. "Micromachining for Microelectromechanical Systems." Defence Science Journal 48, no. 1 (January 1, 1998): 5–19. http://dx.doi.org/10.14429/dsj.48.3863.

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Kal, Santiram. "Microelectromechanical Systems and Microsensors." Defence Science Journal 57, no. 3 (May 23, 2007): 209–24. http://dx.doi.org/10.14429/dsj.57.1762.

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Gupta, Amita. "Advances in Microelectromechanical Systems." Defence Science Journal 59, no. 6 (November 24, 2009): 555–56. http://dx.doi.org/10.14429/dsj.59.1579.

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Louizos, Louizos-Alexandros, Panagiotis G. Athanasopoulos, and Kevin Varty. "Microelectromechanical Systems and Nanotechnology." Vascular and Endovascular Surgery 46, no. 8 (October 8, 2012): 605–9. http://dx.doi.org/10.1177/1538574412462637.

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Kristo, Blaine, Joseph C. Liao, Hercules P. Neves, Bernard M. Churchill, Carlo D. Montemagno, and Peter G. Schulam. "Microelectromechanical systems in urology." Urology 61, no. 5 (May 2003): 883–87. http://dx.doi.org/10.1016/s0090-4295(03)00032-3.

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(Rich) Pryputniewicz, R. J. "Progress in Microelectromechanical Systems." Strain 43, no. 1 (February 2007): 13–25. http://dx.doi.org/10.1111/j.1475-1305.2007.00303.x.

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Dissertations / Theses on the topic "Microelectromechanical systems"

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Murarka, Apoorva. "Contact-printed microelectromechanical systems." Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/77080.

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Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 105-107).
Microelectromechanical systems (MEMS) are ubiquitous. Scalable large-area arrays of MEMS on a variety of substrates, including flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and flexible cavity-patterned substrates for MEMS applications are reported. The deflection of these membranes, suspended over cavities in a dielectric layer atop a conducting electrode, can be used to produce sounds or monitor pressure. The reported fabrication methods employ contact-printing, and avoid fabrication of MEMS diaphragms via wet or deep reactive-ion etching, which in turn removes the need for etch-stops and wafer bonding. Elevated temperature processing is also avoided to enable MEMS fabrication on flexible polymeric substrates. Thin films up to 12.5 mm2 in area are fabricated. The MEMS devices are electrically actuated and the resulting membrane deflection is characterized using optical interferometry. Preliminary sound production is demonstrated, and further applications of this technology are discussed.
by Apoorva Murarka.
M.Eng.
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Latif, Rhonira. "Microelectromechanical systems for biomimetical application." Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/7955.

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The application of adaptive micro-electro-mechanical systems (MEMS) device in biologically-inspired cochlear model (cochlear biomodel) has been seen as a preferable approach to mimic closely the human cochlear response. The thesis focuses on the design and fabrication of resonant gate transistor (RGT) device applied towards the development of RGT cochlear biomodel. An array of RGT devices can mimic the cochlea by filtering the sound input signals into multiple electrical outputs. The RGT device consists of two main components; a) the MEMS bridge gate structure that transduces the sound input into mechanical vibrations and b) the channel with source/drain regions underneath the bridge gate structure that transduce the mechanical vibrations into electrical signals. The created mathematical model for RGT calculates the electrical outputs that are suited for neural spike coding. The neuromorphic auditory system is proposed by integrating the RGT devices with the spike event interface circuits. The novelty of the system lies in the adaptive characteristics of the RGT devices that can self-tune the frequency and sensitivity using the feedback control signals from the neuromorphic circuits. The bridge gates have been designed to cover the audible frequency range signals of 20 Hz - 20 kHz. Aluminium and tantalum have been studied as the material for the bridge gate structure. The fabrication of a bridge gate requires a gentle etch release technique to release the structure from a sacrificial layer. The downstream etch release technique employing oxygen/nitrogen plasma has been introduced and characterised. In the first iteration, aluminium bridge gates have been fabricated. The presence of tensile stress within aluminium had caused the aluminium bridge gates of length >1mm to collapse. In order to address this issue, tantalum bridge gates have been fabricated in the second iteration. Straight tantalum bridge gates in tensile stress and buckled tantalum bridge gates in compressive stress have been characterised. The frequency range of 550 Hz - 29.4 kHz has been achieved from the fabricated tantalum bridge gates of length 0.57mm - 5.8mm. The channel and source/drain regions have been fabricated and integrated with the aluminium or tantalum bridge gate structures to create the RGTs. In this study, the n-channel and p-channel resonant gate transistor (n-RGT and p-RGT) have been considered. In n-RGT, phosphorus ions are implanted to form the source/drain regions. High subthreshold currents have been measured from the n-RGTs. Thus, p- RGTs have been employed with considerably small subthreshold current. In p-RGT, boron ions are implanted to form the source/drain regions. The threshold voltage, transconductance and subthreshold current for both n-channel and p-channel resonant gate transistor devices have been characterised. In this work, the channel conductance of the n-RGT and p-RGT devices has been modulated successfully and the sensitivity tuning within the audible frequency range has been achieved from the tantalum bridge gates of the p-RGT devices. The characterisation and optimisation of the resonant gate transistor provide the first step towards the development of the adaptive RGT cochlear biomodel for the neuromorphic auditory system application.
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Lemay, Scott A. "Microelectromechanical propulsion systems for spacecraft." Thesis, Monterey, California. Naval Postgraduate School, 2002. http://hdl.handle.net/10945/5883.

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This is a survey of current research on micropropulsion options for very small satellites (less than ten kilogram). The concentration of research and performance evaluations utilize Micro Systems Technology (MST) and Micro Electromechanical Systems technology (MEMS) integrated with existing theories. State of the art methods used for the design and manufacturing of MEMS devices are included to provide a size perspective of microthruster technology. Nine viable microthruster options are presented, including a detailed performance analysis of the Pulsed Plasma Thruster. Exploration of the future role of micropropulsion in space is the influential factor benefiting research efforts on extremely small scale microthrusters. Significant background information on astrodynamics is included to assist the intended reader: a student of Engineering Science with interest in the Aerospace Propulsion Industry.
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Ramaswamy, Deepak 1974. "Simulation tools for microelectromechanical systems." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8625.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.
Includes bibliographical references (p. 101-104).
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
by Deepak Ramaswamy.
Ph.D.
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Then, Alan M. (Alan Michael) 1965. "Commercialization of microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8920.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 2001.
Includes bibliographical references (leaves 69-72).
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are also integrated into these devices. MEMS technology holds the promise of significantly miniaturizing, reducing the cost of, and enhancing the performance of many sensors and actuators, evidence its widespread use in the manufacture of accelerometers, ink jet printer heads and various chemical gas sensors. Despite its stellar success in these "killer-applications," MEMS technology has failed to realize the widespread success many had predicted for it. Nonetheless, this technology has recently been explored extensively for new electro-optics applications, specifically in telecommunications for dense wavelength division multiplexing (DWDM) and optical switching. This thesis examines various models of dynamic technology adoption and explores how they apply to MEMS technology. Furthermore, by way of historical comparison to the development of application specific integrated circuit (ASIC), it will identify various developmental similarities. Finally, a unique model outlining the critical driving forces behind the adoption of MEMS technology will be constructed.
by Alan M. Then.
S.M.M.O.T.
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Cragun, Rebecca. "Thermal microactuators for microelectromechanical systems /." Diss., CLICK HERE for online access, 1999. http://contentdm.lib.byu.edu/ETD/image/etd170.pdf.

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Wilson, Aubrey Marie Mueller. "Transgene Delivery via Microelectromechanical Systems." BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/3936.

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The invention of pronuclear microinjection initiated the field of transgenic research. Over 30 years later microinjection remains the most straight-forward and most commonly used transgene delivery option. In this work we address the current progress of microelectromechanical systems (MEMS) used as transgenic delivery mechanisms. The nanoinjector is a specially designed MEMS device which uses electrostatic charge to manipulate transgene molecules. The process of nanoinjection was designed as an alternative to microinjection which causes less damage to developing embryos, improves embryo survival, birth rates, and overall efficiency of injections. In vivo testing of nanoinjection demonstrates it is both safe and effective. Additionally nanoinjection has the potential to make transgenesis via yeast artificial chromosomes more practical as the nanoinjector may prevent shearing of the YAC molecules. A second nanoinjection protocol termed intracellular electroporetic nanoinjcetion (IEN) was designed to allow for cytoplasmic injections. Cytoplasmic injections are faster and easier than pronuclear injection and do not require the pronuclei to be visible; yet previous attempts to develop cytoplasmic injection have met with limited success. In IEN injections the nanoinjector is used to place transgenic molecules in the cytoplasm. The transgenes are then propelled through the cytoplasm and electroporated into the pronucleus using electrical pulses. Electroporation of whole embryos has not resulted in transgenic animals, but the MEMS device allows localized electroporation to occur within the cytoplasm, giving transgene access to the pronucleus before degradation can occur. In this report we describe the principles which allow for localized electroporation of the pronuclei including: the location of the pronuclei between 21-28 hours post-hCG treatment, modeling data predicting the voltages needed for localized electroporation of pronuclei, and data on the movement of transgenic DNA based on the voltages delivered by IEN. We further report results of an IEN versus microinjection comparative study in which IEN produced transgenic pups with viability, transgene integration, and expression rates statistically comparable to microinjection. The ability to perform injections without visualizing or puncturing the pronuclei will widely benefit transgenic research, and will be particularly advantageous for the production of transgenic animals with embryos exhibiting reduced pronuclear visibility.
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Ruzziconi, Laura. "Nonlinear dynamics in microelectromechanical systems." Doctoral thesis, Università Politecnica delle Marche, 2011. http://hdl.handle.net/11566/242133.

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La tesi affronta lo studio delle dinamiche nonlineari in alcuni dispositivi MEMS. Le tematiche di dinamica nonlineare attualmente affrontate in letteratura sono indispensabili per studiare la loro risposta. L’accuratezza della modellazione dinamica nonlineare è importante per garantire l’affidabilità dei risultati e gli strumenti attuali di dinamica nonlineare riescono ad interpretare scrupolosamente i dati sperimentali della risposta di questi dispositivi. La tesi considera due diversi casi-studio. Il primo caso-studio è un dispositivo MEMS con carico assiale, forma iniziale ad arco molto ribassato e attuazione elettrostatica ed elettrodinamica. È analizzato in un intorno della biforcazione da una singola ad una doppia buca di potenziale. Sia le configurazioni statiche nonlineari sia l’analisi dinamica lineare non possono essere risolte in forma chiusa e sono approssimate con il metodo di Galerkin. Vengono usate per costruire un accurato modello ridotto delle dinamiche nonlineari ad un solo grado di libertà. In questo modello il termine del quinto ordine (che dipende dall’espansione in serie di Taylor nell’equazione del moto) è eliminato per avere una buona approssimazione delle buche di potenziale e del comportamento globale. Altri modelli ridotti sono considerati e paragonati. Si esegue l’analisi dinamica nonlineare, con l’uso combinato di curve di risposta in frequenza, ritratti di fase attrattori-bacini e mappe di comportamento. In un intorno di ciascuna frequenza naturale, la risposta del dispositivo presenta le tipiche caratteristiche di un oscillatore softening. I casi di singola e doppia buca di potenziale vengono paragonati. Il secondo caso-studio analizza i dati sperimentali di pull-in dinamico in risonanza primaria di un dispositivo MEMS (un accelerometro capacitivo). Iniziando da questo caso particolare, si affronta la tematica dell’integrità dinamica in un sistema meccanico. Viene eseguito il suo calcolo qualitativo, scegliendo gli strumenti più appropriati in base alle condizioni sperimentali considerate. Si evidenzia l’efficacia di questa analisi, mostrando l’accuratezza delle curve di percentuale costante di fattore di integrità nell’interpretare l’esistenza di disturbi negli esperimenti e nella pratica. Inoltre, si mostra il loro utilizzo nella progettazione.
This dissertation deals with the nonlinear dynamics in MEMS devices. The nonlinear dynamic topics currently addressed in the literature are essential to investigate their response. The accuracy of the nonlinear dynamic modeling is important to guarantee the reliability of the results and current nonlinear dynamic tools succeed in carefully interpreting the experimental data of the response of these devices. The dissertation considers two different case-studies. The first case-study is a MEMS device with axial load, very shallow arched initial shape and electrostatic and electrodynamic actuation. It is analyzed in the neighborhood of the bifurcation from a single potential well to a twin well. Both the nonlinear static configurations and the linear dynamic analysis cannot be solved in closed form and they are approximated by the Galerkin technique. They are used to derive an accurate single degree of freedom reduced order model of the nonlinear dynamics. In this model the fifth order term (connected to the Taylor expansion in the equation of motion) is removed to obtain a good approximation of the potential wells and of the global behavior. Other reduced order models are considered and compared. The nonlinear dynamic analysis is performed, with the combined use of frequency response curves, attractor-basins phase portraits and behavior charts. In a neighborhood of each natural frequency, the response of the device has the typical characteristics of a softening oscillator. The cases of the single and the double potential well are compared. The second case-study analyzes the experimental dynamic pull-in data at primary resonance for a MEMS device (a capacitive accelerometer). Starting from this particular case, the issue of the dynamical integrity in a mechanical system is addressed. Its qualitative evaluation is performed, choosing the most suitable tools according to the considered experimental conditions. The effectiveness of this analysis is highlighted, showing the accuracy of the curves of constant percentage of integrity factor in interpreting the existence of disturbances in experiments and practice. Also, their use in a design is proposed.
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Lusk, Craig P. "Ortho-Planar Mechanisms for Microelectromechanical Systems." Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd902.pdf.

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Zeng, Yang. "Finite Element Methods for Microelectromechanical Systems." Thesis, Uppsala University, Department of Information Technology, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-110896.

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The stationary Joule heating problem is a crucial multiphysical problem for many microelectromechanical (MEMS) applications. In our paper, we derive a finite element method for this problem and introduce iterative solution-techniques to compute the numerical simulation. Further we construct an adaptive algorithm for mesh refinement based on a posteriori error estimation.Finally, we present two numerical tests: convergences analysis of different iterative methods for distinct materials which are classified by electrical conductivities, and a test of the new adaptive refinement algorithm. All the numerical implementations have been done in MATLAB.

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Books on the topic "Microelectromechanical systems"

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Lobontiu, Nicolae. Dynamics of Microelectromechanical Systems. Boston, MA: Springer US, 2007. http://dx.doi.org/10.1007/978-0-387-68195-5.

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Lee, Ki Bang. Principles of Microelectromechanical Systems. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2011. http://dx.doi.org/10.1002/9780470649671.

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E, Garcia, ed. Mechanics of microelectromechanical systems. New York: Kluwer Academic, 2005.

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Brendley, Keith W. Military applications of microelectromechanical systems. Santa Monica, CA: Rand, 1993.

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Kirt, Williams, ed. Introduction to microelectromechanical systems engineering. 2nd ed. Boston: Artech House, 2004.

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G, DeAnna Russell, Reshotko Eli, and United States. National Aeronautics and Space Administration., eds. Microelectromechanical systems for aerodynamics applications. [Washington, D.C: National Aeronautics and Space Administration, 1996.

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Héctor J. de los Santos. Introduction to microelectromechanical (MEM) microwave systems. Boston: Artech House, 1999.

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Héctor J. de los Santos. Introduction to microelectromechanical (MEM) microwave systems. Boston: Artech House, 1999.

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National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. Microelectromechanical systems: Advanced materials and fabrication methods. Washington, DC: National Academy Press, 1997.

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Simons, Rainee. Microelectromechanical systems (MEMS) actuators for antenna reconfigurability. [Cleveland, Ohio]: National Aeronautics and Space Administration, Glenn Research Center, 2001.

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Book chapters on the topic "Microelectromechanical systems"

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Taklo, Maaike M. V. "Microelectromechanical Systems." In Handbook of Wafer Bonding, 279–99. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2012. http://dx.doi.org/10.1002/9783527644223.ch14.

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Zangari, Giovanni. "Microelectromechanical Systems." In Modern Electroplating, 617–36. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2011. http://dx.doi.org/10.1002/9780470602638.ch28.

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Elwenspoek, M., and R. Wiegerink. "Microelectromechanical Systems." In Smart Structures, 221–31. Vienna: Springer Vienna, 2001. http://dx.doi.org/10.1007/978-3-7091-2686-8_17.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, et al. "MicroElectroMechanical Systems." In Encyclopedia of Nanotechnology, 1404. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100428.

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Gómez-Carmona, Carlos D., José Pino-Ortega, and Markel Rico-González. "Microelectromechanical Systems." In The Use of Applied Technology in Team Sport, 52–73. New York: Routledge, 2021. http://dx.doi.org/10.4324/9781003157007-6.

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Yunjia, Li. "Microelectromechanical Systems (MEMS)." In Material-Integrated Intelligent Systems - Technology and Applications, 81–106. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2017. http://dx.doi.org/10.1002/9783527679249.ch4.

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Young, Darrin J., and Hanseup Kim. "Microelectromechanical Systems (MEMS)." In Guide to State-of-the-Art Electron Devices, 239–50. Chichester, UK: John Wiley & Sons, Ltd, 2013. http://dx.doi.org/10.1002/9781118517543.ch18.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, et al. "MEMS = Microelectromechanical Systems." In Encyclopedia of Nanotechnology, 1305. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100394.

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de Silva, Clarence W. "Microelectromechanical Systems and Multisensor Systems." In Sensor Systems, 599–668. Boca Raton : Taylor & Francis, CRC Press, 2017.: CRC Press, 2016. http://dx.doi.org/10.1201/9781315371160-12.

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Lee, Y. C., Ming Kong, and Yadong Zhang. "Microelectromechanical Systems and Packaging." In Materials for Advanced Packaging, 697–731. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-45098-8_16.

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Conference papers on the topic "Microelectromechanical systems"

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"Microelectromechanical systems (MEMS)." In IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics. IEEE, 2011. http://dx.doi.org/10.1109/iecon.2011.6119970.

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"Microelectromechanical systems (MEMS)." In 2011 IEEE 43rd Southeastern Symposium on System Theory (SSST 2011). IEEE, 2011. http://dx.doi.org/10.1109/ssst.2011.5753816.

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"2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)." In 2001 Microelectromechanical Systems Conference. IEEE, 2001. http://dx.doi.org/10.1109/memsc.2001.992726.

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"Author index." In 2001 Microelectromechanical Systems Conference. IEEE, 2001. http://dx.doi.org/10.1109/memsc.2001.992753.

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Mehregany, Mehran. "Overview of microelectromechanical systems." In Fibers '92, edited by Massood Tabib-Azar and Dennis L. Polla. SPIE, 1993. http://dx.doi.org/10.1117/12.141207.

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Maspero, Federico, Simone Cuccurullo, Giulia Pavese, Maria Cocconcelli, Andrea Del Giacco, Alejandro Plaza, Oksana Koplak, and Riccardo Bertacco. "Magnetism meet microelectromechanical systems." In 2023 IEEE International Magnetic Conference - Short Papers (INTERMAG Short Papers). IEEE, 2023. http://dx.doi.org/10.1109/intermagshortpapers58606.2023.10305034.

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"Microelectromechanical systems (MEMS) devices and systems." In IECON 2010 - 36th Annual Conference of IEEE Industrial Electronics. IEEE, 2010. http://dx.doi.org/10.1109/iecon.2010.5675098.

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"Microelectromechanical systems (MEMS) devices and systems." In IECON 2009 - 35th Annual Conference of IEEE Industrial Electronics (IECON). IEEE, 2009. http://dx.doi.org/10.1109/iecon.2009.5415325.

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Mukherjee, Tamal, and Gary K. Fedder. "Structured design of microelectromechanical systems." In the 34th annual conference. New York, New York, USA: ACM Press, 1997. http://dx.doi.org/10.1145/266021.266320.

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Lee, Y. C. "Packaging and Microelectromechanical Systems (MEMS)." In 2007 8th International Conference on Electronic Packaging Technology. IEEE, 2007. http://dx.doi.org/10.1109/icept.2007.4441562.

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Reports on the topic "Microelectromechanical systems"

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Timpe, Shannon J., Kyriakos Komvopoulos, Bonnie R. Antoun, and Michael Thomas Dugger. Tribological Studies of Microelectromechanical Systems. Office of Scientific and Technical Information (OSTI), January 2008. http://dx.doi.org/10.2172/1324748.

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Dyck, Christopher, Cody M. Washburn, Michael N. Rector, Patrick Sean Finnegan, Kent B. Pfeifer, Beechem, Thomas Edwin,, Jill Blecke, Michael Randolph Satches, Lee Taylor Massey, and Christopher Dyck. Carbon Composite Microelectromechanical Systems (CMEMS). Office of Scientific and Technical Information (OSTI), February 2016. http://dx.doi.org/10.2172/1560994.

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Freeman, Dennis M. Computer Microvision for Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, November 2003. http://dx.doi.org/10.21236/ada419775.

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Yee, Steven C. Tunable Patch Antennas Using Microelectromechanical Systems. Fort Belvoir, VA: Defense Technical Information Center, May 2011. http://dx.doi.org/10.21236/ada554674.

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Baudry, Michel, Theodore W. Berger, Eun Sok Kim, Charles E. McKenna, and Mark E. Thompson. Sensing of Neuron Signals Using Microelectromechanical Systems. Fort Belvoir, VA: Defense Technical Information Center, March 2003. http://dx.doi.org/10.21236/ada414552.

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Mastrangelo, C. H. Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, July 2003. http://dx.doi.org/10.21236/ada420836.

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Chan, H. B., and J. Yelton. Collective behaviors of the Casimir force in microelectromechanical systems. Office of Scientific and Technical Information (OSTI), January 2013. http://dx.doi.org/10.2172/1060378.

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Gluck, Natalie S., and Howard R. Last. Military and Potential Homeland Security Applications for Microelectromechanical Systems (MEMS). Fort Belvoir, VA: Defense Technical Information Center, November 2004. http://dx.doi.org/10.21236/ada430286.

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Goldsmith, Charles L. Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches. Fort Belvoir, VA: Defense Technical Information Center, January 2005. http://dx.doi.org/10.21236/ada432262.

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Kirshberg, Jeffrey A. Microelectromechanical Systems (MEMS)-Based Microcapillary Pumped Loop for Chip-Level Temperature Control. Fort Belvoir, VA: Defense Technical Information Center, January 2002. http://dx.doi.org/10.21236/ada405777.

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