Journal articles: 'Microelectromechanical system sensors'

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Yen, Nguyen Trong, Nguyen Quoc Khanh, and Ha Manh Thang. "A Calibration Algorithm for Microelectromechanical Inertial Sensors." Journal of the Russian Universities. Radioelectronics 25, no. 4 (September 29, 2022): 90–104. http://dx.doi.org/10.32603/1993-8985-2022-25-4-90-104.

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Introduction. Systematic errors of microelectromechanical (MEMS) inertial sensors, such as those related to zero drift, scale factor, and nonorthogonality of sensitive axes, are the main sources of errors in strapdown inertial navigation systems (SINS). Uncompensated sensor errors accumulate over time as motion state errors, thus reducing the overall accuracy of SINS. Consequently, calibration of inertial sensors is a relevant research task. The disadvantage of existing sensor calibration methods consists in a strict requirement for the initial alignment of sensitive sensor axes relative to a reference coordinate system, which complicates the entire process of calibration. Therefore, alternative methods for MEMS sensor calibration should be developed.Aim. To develop a calibration algorithm for microelectromechanical (MEMS) sensors, which allows calibrating sensors regardless of the angular orientation of the sensor axes relative to a reference coordinate system at the initial installation, as well as to simplify the design of testing tools.Materials and methods. Publications in national and international journals on the theory of calibration of inertial sensors were reviewed. A calibration algorithm was developed based on the least squares method.Results. An algorithm for determining the calibration parameters of sensors regardless of the initial alignment of the sensor sensitive axes relative to a reference system was developed. A simple alternative design for testing MEMS sensors was proposed.Conclusion. The method of calibrating MEMS inertial sensors proposed in this work differs from conventional calibration methods by increased reliability of the results and a simplified design of testing tools. Importantly, the results of determining the calibration coefficients of a micromechanical accelerometer (MMA) do not depend on its angular position relative to a geographic coordinate system (GСS). This works contributes to improving the accuracy of SINS based on MEMS inertial sensors.

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Vasylenko, Mykola, and Maksym Mahas. "Microelectromechanical Gyrovertical." Electronics and Control Systems 1, no. 71 (June 27, 2022): 16–21. http://dx.doi.org/10.18372/1990-5548.71.16818.

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Gyroscopic verticals (gyroverticals) are designed to determine the direction of the true vertical on moving objects. Being one of the devices of the orientation system of a moving object, they are used as sensors for the roll and pitch angles of an aircraft (or sensors of similar angles for other moving objects) and serve to create a platform stabilized in the horizon plane on a moving object. The electrical signals taken from the measuring axes of the device are used in flight, navigation, radar systems, visual indicators, etc. Gyroscopic stabilization systems are widely used as the basis of integrated management systems on aircraft and miniature unmanned aerial vehicles for generating signals proportional to the angular deviations of the aircraft in space in terms of roll and pitch angles and for stabilizing and controlling the position in space of optical equipment. At present, sensors based on the technologies of microelectromechanical systems are widely used in small aircraft. Their important advantage is small weight and size characteristics, and the main disadvantage is low accuracy. Such sensors are used in navigation systems and automatic control systems of aircraft. In particular, algorithms for calculating the orientation angles of an unmanned aerial vehicle are known, using information from microelectromechanical angular velocity sensors. However, due to large drifts, an error accumulates in time and, as a result, the operating time is limited.

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Das, Rajiv, and Rajesh Garg. "Global Environmental Microelectromechanical Systems Sensors: Advanced Weather Observation System." Defence Science Journal 59, no. 6 (November 24, 2009): 659–65. http://dx.doi.org/10.14429/dsj.59.1572.

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Kaneta, Ren, Takumi Hasegawa, Jun Kido, Takashi Abe, and Masayuki Sohgawa. "Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors." Journal of Robotics and Mechatronics 34, no. 3 (June 20, 2022): 677–82. http://dx.doi.org/10.20965/jrm.2022.p0677.

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We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

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Yang, Xiaopeng, and Menglun Zhang. "Review of flexible microelectromechanical system sensors and devices." Nanotechnology and Precision Engineering 4, no. 2 (June 1, 2021): 025001. http://dx.doi.org/10.1063/10.0004301.

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Novikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (September 15, 2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.

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The questions of assessment of achievable performance values of the integrated inertial-satellite navigation system complexed with odometer sensor and used for ground transport and agricultural technological vehicle are considered. Construction of relatively cheap modern navigation systems for ground transport and agricultural technological vehicles is provided by integrating diverse navigation systems, which include inertial-satellite systems that combine into a single hardware system the inertial and satellite modules. Achievable accuracy of gaining the navigation parameters is achieved by using special algorithms for processing of measurement information in combination with complexion of the system with an external source of additional information, where odometer sensor belongs. The most promising sensors are sensors, built using the technology of production of microelectromechanical systems - MEMS / MEMC (Micro-Electro Mechanical Systems). The navigation systems based on MEMS sensors have several advantages. The main advantages are small weight and size characteristics (volume less 1sm3, and weighs less than 1 gram), low power consumption, high reliability, resistance to vibro-impact loads (up to 2000g), easy integration of sensors and electronic modules of the navigation system, low cost. The main disadvantage is the need for the synthesis of complex algorithms of processing of measuring information to obtain the desired accuracy of the estimate of navigation parameters. The navigation system, where as MEMS sensors were used gyroscopes ADXRS-150 in conjunction with accelerometers ADXL-210 manufactured by Analog Devices, was considered. The main design and technological characteristics of sensors were shown, the selection criteria for sensors were formulated, technical and economic effect assessment of the use of MEMS in the navigation system is provided. The practical importance has the estimation of achievable accuracy characteristics of system under actual operating conditions. The paper presents the results of field tests of the navigation system based on MEMS sensors and designed for forklift carrying out transportation in the sea port. The results of experimental studies confirmed the effectiveness of the MEMS application as a sensing element of inertial-satellite navigation system of ground transport and agricultural technological vehicle that creates the foundation for the new high-tech developments.

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Oskin, Dmitry Aleksandrovich, Andrey Alekseevich Gorshkov, Sergey Aleksandrovich Klimenko, and Nikolay Andreevich Pogodin. "Information and control system of collecting and transmitting data for unmanned vessel." Vestnik of Astrakhan State Technical University. Series: Marine engineering and technologies 2021, no. 2 (May 31, 2021): 24–31. http://dx.doi.org/10.24143/2073-1574-2021-2-24-31.

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The article considers the principles of constructing and functioning the data collection and transmission system for developing an information and control system of an unmanned vessel. A problem of the information and control system developing is suggested in two stages: choosing methods and means of transmitting data from sensors to the data collection system, choosing the method of data transfer to the data collection system, implementing the data transmission channels; organizing data collection and storage for use in the autopilot device, implementing systems for receiving and synchronizing data and their placement in the storage system. There has been illustrated a block diagram of the information and control system for collecting and transmitting data for an unmanned vessel, which consists of two subsystems: data collection and data transmission. Selecting the main components and proposals on the software and hardware application is carried out. The detailed characteristics of the microcontroller, digital compass, microelectromechanical sensors and chartplotter are given. In the course of implementing the data collection system, a Maretron digital magnetic compass, CRM100 and CRM200 microelectromechanical sensors, which implement a yaw rate sensor and inclinometer, and an analog steering sensor were connected to the debug board. The software for the information and control system is written in the programming language using the STM32CubeIDE application development tools. It has been stated that the data transfer between different levels of the program is carried out using standard means of the program code.

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Ren, Danyang, Yizhe Sun, Junhui Shi, and Ruimin Chen. "A Review of Transparent Sensors for Photoacoustic Imaging Applications." Photonics 8, no. 8 (August 10, 2021): 324. http://dx.doi.org/10.3390/photonics8080324.

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Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky sensor size, complex system configurations, difficult optical and acoustic alignment, and degradation of signal-to-noise ratio. To overcome these drawbacks, an ultrasonic sensor in the optically transparent form has been introduced, as it enables direct delivery of excitation light through the sensors. In recent years, various types of optically transparent ultrasonic sensors have been developed for photoacoustic imaging applications, including optics-based ultrasonic sensors, piezoelectric-based ultrasonic sensors, and microelectromechanical system-based capacitive micromachined ultrasonic transducers. In this paper, the authors review representative transparent sensors for photoacoustic imaging applications. In addition, the potential challenges and future directions of the development of transparent sensors are discussed.

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Yi, Zhenxiang, Yishan Wang, Ming Qin, and Qingan Huang. "Research on Dust Effect for MEMS Thermal Wind Sensors." Sensors 23, no. 12 (June 13, 2023): 5533. http://dx.doi.org/10.3390/s23125533.

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This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments.

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Fan, Shicheng, Lingju Meng, Li Dan, Wei Zheng, and Xihua Wang. "Polymer Microelectromechanical System-Integrated Flexible Sensors for Wearable Technologies." IEEE Sensors Journal 19, no. 2 (January 15, 2019): 443–50. http://dx.doi.org/10.1109/jsen.2018.2877747.

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Tommaselli, A. M. G., M. B. Campos, L. F. Castanheiro, and E. Honkavaara. "A FEASIBILITY STUDY ON INCREMENTAL BUNDLE ADJUSTMENT WITH FISHEYE IMAGES AND LOW-COST SENSORS." ISPRS - International Archives of the Photogrammetry, Remote Sensing and Spatial Information Sciences XLII-2/W18 (November 29, 2019): 167–71. http://dx.doi.org/10.5194/isprs-archives-xlii-2-w18-167-2019.

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Abstract. Low cost imaging and positioning sensors are opening new frontiers for applications in near real-time Photogrammetry. Omnidirectional cameras acquiring images with 360° coverage, when combined with information coming from GNSS (Global Navigation Satellite Systems) and IMU (Inertial Measurement Unit), can efficiently estimate orientation and object space structure. However, several challenges remain in the use of low-cost sensors and image observations acquired by sensors with non-perspective inner geometry. The accuracy of the measurement using low-cost sensors is affected by different sources of errors and sensor stability. Microelectromechanical systems (MEMS) present a large gap between predicted and actual accuracy. This work presents a study on the performance of an integrated sensor orientation approach to estimate sensor orientation and 3D sparse point cloud, using an incremental bundle adjustment strategy and data coming from a low-cost portable mobile terrestrial system composed by off-theshelf navigation systems and a poly-dioptric system (Ricoh Theta S). Experiments were performed in an outdoor area (sidewalk), achieving a trajectory positional accuracy of 0.33 m and a meter level 3D reconstruction.

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Hsueh, H. T., L. T. Lai, Y. M. Juan, S. W. Huang, T. C. Cheng, and Y. D. Lin. "Heterogeneous sensors of pressure sensor and ultraviolet photodetector fabricated by vertical 3D stacking as a multi-functional device." RSC Advances 6, no. 100 (2016): 97976–82. http://dx.doi.org/10.1039/c6ra23377e.

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Yoo, Yongsang, and Byong-Deok Choi. "Readout Circuits for Capacitive Sensors." Micromachines 12, no. 8 (August 13, 2021): 960. http://dx.doi.org/10.3390/mi12080960.

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The development of microelectromechanical system (MEMS) processes enables the integration of capacitive sensors into silicon integrated circuits. These sensors have been gaining considerable attention as a solution for mobile and internet of things (IoT) devices because of their low power consumption. In this study, we introduce the operating principle of representative capacitive sensors and discuss the major technical challenges, solutions, and future tasks for a capacitive readout system. The signal-to-noise ratio (SNR) is the most important performance parameter for a sensor system that measures changes in physical quantities; in addition, power consumption is another important factor because of the characteristics of mobile and IoT devices. Signal power degradation and noise, which degrade the SNR in the sensor readout system, are analyzed; circuit design approaches for degradation prevention are discussed. Further, we discuss the previous efforts and existing studies that focus on low power consumption. We present detailed circuit techniques and illustrate their effectiveness in suppressing signal power degradation and achieving lower noise levels via application to a design example of an actual MEMS microphone readout system.

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Ibrahim, M. A., and V. V. Luk'yanov. "Algorithms and Configuration for a Moving Object Attitude Control System Based on Microelectromechanical Sensors." Herald of the Bauman Moscow State Technical University. Series Instrument Engineering, no. 2 (131) (June 2020): 44–58. http://dx.doi.org/10.18698/0236-3933-2020-2-44-58.

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Inertial systems for attitude control, stabilisation and navigation of moving objects boast a range of unique qualities, the most important of which are autonomy and interference immunity. At present, strap-down inertial navigation systems using inexpensive and compact microelectromechanical sensors are popular. The biggest disadvantage of the attitude control systems utilising microelectromechanical sensors is rapid error accumulation over time. The main error sources in strap-down inertial navigation systems are the errors of angular velocity sensors and accelerometers. Currently the accuracy required is ensured by the attitude control system processing the following two signals simultaneously: the magnetometer signal and the signal received from global navigation satellite systems such as GPS (NAVSTAR) and/or GLONASS. We developed an unconventional approach to integrating the two systems, that is, a strap-down inertial navigation system and a global navigation satellite system. It involves using the difference between the accelerations computed according to the global navigation satellite systems and those computed by the acelerometers and transformed to the geographic coordinate system for evaluating and compensating for the error of attitude angle assessment via the kinematic channel. Since this approach does not use integration of accelerometer readings, the attitude angle errors at the initial stage do not accumulate over time. Numerical simulation results of the algorithms developed show that the attainable attitude angle estimation accuracy significantly exceeds the accuracy of conventional methods

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Patonis, Photis, Petros Patias, Ilias N. Tziavos, Dimitrios Rossikopoulos, and Konstantinos G. Margaritis. "A Fusion Method for Combining Low-Cost IMU/Magnetometer Outputs for Use in Applications on Mobile Devices." Sensors 18, no. 8 (August 9, 2018): 2616. http://dx.doi.org/10.3390/s18082616.

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This paper presents a fusion method for combining outputs acquired by low-cost inertial measurement units and electronic magnetic compasses. Specifically, measurements of inertial accelerometer and gyroscope sensors are combined with no-inertial magnetometer sensor measurements to provide the optimal three-dimensional (3D) orientation of the sensors’ axis systems in real time. The method combines Euler–Cardan angles and rotation matrix for attitude and heading representation estimation and deals with the “gimbal lock” problem. The mathematical formulation of the method is based on Kalman filter and takes into account the computational cost required for operation on mobile devices as well as the characteristics of the low-cost microelectromechanical sensors. The method was implemented, debugged, and evaluated in a desktop software utility by using a low-cost sensor system, and it was tested in an augmented reality application on an Android mobile device, while its efficiency was evaluated experimentally.

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Wahyudi, Adhi Susanto, Wahyu Widada, and Sasongko P. Hadi. "Simultaneous Calibration for MEMS Gyroscopes of the Rocket IMU." Advanced Materials Research 896 (February 2014): 656–59. http://dx.doi.org/10.4028/www.scientific.net/amr.896.656.

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MEMS (Microelectromechanical System), as an advanced sensor technology, is low power, low cost, and small size. Gyroscope sensor produced with microelectromechanical technology is an angular rate sensor. IMU (Inertial Measurement Unit) sensor for rocket should have a very wide range of measurements. At the beginning of the motion, the rocket accelereation is very high, for which the rocket IMU requires a multisensor with different sensitivity. This paper presents the design of the rocket IMU and its calibration method for all MEMS gyroscopes. Calibration for each sensor is necessary including its varying characteristics. The calibration of the gyroscope sensors use three-axis motion simulator model ST 3176 with resolutions 0.00001 for all axes. Simultaneous calibration was mutually applied which require a short calibration time. The results show that root mean square errors (RMSE) of the calibrated gyroscope for all axes are under 2.5 %. Therefore, that the calibrated gyroscope can be used in the proposed real application.

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Lou, Liang, Chengkuo Lee, Xiangguo Xu, Rama Krishna Kotlanka, Lichun Shao, Woo-Tae Park, and D. L. Kwong. "Design and Characterization of Microelectromechanical System Flow Sensors Using Silicon Nanowires." Nanoscience and Nanotechnology Letters 3, no. 2 (April 1, 2011): 230–34. http://dx.doi.org/10.1166/nnl.2011.1160.

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Zhu, Huamin, Fuzhong Zheng, Huiwen Leng, Cheng Zhang, Kun Luo, Yibo Cao, and Xing Yang. "Simplified Method of Microcontact Force Measurement by Using Micropressure Sensor." Micromachines 12, no. 5 (May 4, 2021): 515. http://dx.doi.org/10.3390/mi12050515.

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Microcontact force measurement is widely applied in micro/nano manufacturing, medicine and microelectromechanical systems. Most microcontact force measurements are performed by using mass comparators, nano-indenter and precision electronic balance, and weighing sensors. However, these instruments have a complex structure and high cost. Nevertheless, the rapid development of microsensor technology provides a new, simple and low-cost approach for microcontact force measurement. In this study, we present a method of microcontact force measurement by using micropressure sensors and study the relationship amongst the microcontact force, output voltage and contact position of the sensor. We use a microcapacitance pressure sensor as an example, then we perform a simulation calculation and construct a microcontact force experiment system to verify the simulation results. The experimental and simulation results are consistent. In addition, an equation that describes the relationship amongst the microcontact force, output voltage and contact position of the sensor is obtained. Based on this simple and low-cost method, we build a micro-manipulation system, which indicates that the micropressure sensors can be used to measure microcontact force in various applications easily and cost-effectively. Furthermore, it is considerably relevant to research and application in this field.

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Bogue, Robert. "Sensors for robotic perception. Part one: human interaction and intentions." Industrial Robot: An International Journal 42, no. 5 (August 17, 2015): 386–91. http://dx.doi.org/10.1108/ir-05-2015-0098.

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Purpose – The purpose of this two-part paper is to illustrate how sensors impart robots with perceptive capabilities. This first part considers robots that interact with humans and which seek to mimic human intentions. Design/methodology/approach – Following a short introduction, this paper first discusses the sensors used in robotic prosthetics. It then considers sensor applications in recently developed service, companion and assistive robots. The final section concerns the sensors used in collaborative robots, followed by brief concluding comments. Findings – This shows that sensors play a vital role in imparting perceptive capabilities to robots which interact with people. They can interpret human intentions, control prosthetic limbs, monitor and map a robot’s environment, assist with navigation, ensure the safety of co-workers and even detect a person’s emotional state. They are based on a diversity of principles and technologies, including microelectromechanical system (MEMS)-based sensors for physical variables, myographic electrodes and electroencephalogram (EEG) sensors, lasers, infra-red and sonar systems and sophisticated cameras and imaging systems. Originality/value – This provides a timely account of how sensors confer perceptive capabilities to the growing number of robots which interact directly with people.

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Nazemi, Haleh, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, and Arezoo Emadi. "Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT." Sensors 20, no. 7 (April 3, 2020): 2010. http://dx.doi.org/10.3390/s20072010.

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Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

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Li, Haohua, M. Boucinha, P. P. Freitas, J. Gaspar, V. Chu, and J. P. Conde. "Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets." Journal of Applied Physics 91, no. 10 (2002): 7774. http://dx.doi.org/10.1063/1.1451896.

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Ma, Weiyi, Yi Jiang, Jie Hu, Lan Jiang, Taojie Zhang, and Taojie Zhang. "Microelectromechanical system-based, high-finesse, optical fiber Fabry–Perot interferometric pressure sensors." Sensors and Actuators A: Physical 302 (February 2020): 111795. http://dx.doi.org/10.1016/j.sna.2019.111795.

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de Conde, Kevin Eduardo, and Fábio Roberto Chavarette. "Control Instability Applied to a Micro Electro Mechanical Actuator System (MEMS)." Advanced Materials Research 1025-1026 (September 2014): 1164–67. http://dx.doi.org/10.4028/www.scientific.net/amr.1025-1026.1164.

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MicroElectroMechanical Systems (MEMS) are devices what have been considered the technology of the future, being used in too many areas. MEMS are a combination of microstructures, micro sensors and micro actuators. The purpose of this work is to reduce the chaotic movement of the micro-actuator electrostatic to a small periodic orbit using the linear optimal control technique. The simulation results show that this technical is very effective.

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Deng, Mingxing, Quanyong Zhang, Kun Zhang, Hui Li, Yikai Zhang, and Wan Cao. "A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors." Journal of Imaging 8, no. 10 (September 30, 2022): 268. http://dx.doi.org/10.3390/jimaging8100268.

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Defect inspection using imaging-processing techniques, which detects and classifies manufacturing defects, plays a significant role in the quality control of microelectromechanical systems (MEMS) sensors in the semiconductor industry. However, high-precision classification and location are still challenging because the defect images that can be obtained are small and the scale of the different defects on the picture of the defect is different. Therefore, a simple, flexible, and efficient convolutional neural network (CNN) called accurate-detection CNN (ADCNN) to inspect MEMS pressure-sensor-chip packaging is proposed in this paper. The ADCNN is based on the faster region-based CNN, which improved the performance of the network by adding random-data augmentation and defect classifiers. Specifically, the ADCNN achieved a mean average precision of 92.39% and the defect classifier achieved a mean accuracy of 97.2%.

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Chen, Lei, Lijun Wei, Yu Wang, Junshuo Wang, and Wenlong Li. "Monitoring and Predictive Maintenance of Centrifugal Pumps Based on Smart Sensors." Sensors 22, no. 6 (March 9, 2022): 2106. http://dx.doi.org/10.3390/s22062106.

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Centrifugal pumps have a wide range of applications in industrial and municipal water affairs. During the use of centrifugal pumps, failures such as bearing wear, blade damage, impeller imbalance, shaft misalignment, cavitation, water hammer, etc., often occur. It is of great importance to use smart sensors and digital Internet of Things (IoT) systems to monitor the real-time operating status of pumps and predict potential failures for achieving predictive maintenance of pumps and improving the intelligence level of machine health management. Firstly, the common fault forms of centrifugal pumps and the characteristics of vibration signals when a fault occurs are introduced. Secondly, the centrifugal pump monitoring IoT system is designed. The system is mainly composed of wireless sensors, wired sensors, data collectors, and cloud servers. Then, the microelectromechanical system (MEMS) chip is used to design a wireless vibration temperature integrated sensor, a wired vibration temperature integrated sensor, and a data collector to monitor the running state of the pump. The designed wireless sensor communicates with the server through Narrow Band Internet of Things (NB-IoT). The output of the wired sensor is connected to the data collector, and the designed collector can communicate with the server through 4G communication. Through cloud-side collaboration, real-time monitoring of the running status of centrifugal pumps and intelligent diagnosis of centrifugal pump faults are realized. Finally, on-site testing and application verification of the system was conducted. The test results show that the designed sensors and sensor application system can make good use of the centrifugal pump failure mechanism to automatically diagnose equipment failures. Moreover, the diagnostic accuracy rate is above 85% by using the method of wired sensor and collector. As a low-cost and easy-to-implement solution, wireless sensors can also monitor gradual failures well. The research on the sensors and pump monitoring system provides feasible methods and an effective means for the application of centrifugal pump health management and predictive maintenance.

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Gao, Rui, Wenjun Zhang, Junmin Jing, Zhiwei Liao, Zhou Zhao, Bin Yao, Huiyu Zhang, et al. "Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor." Micromachines 13, no. 7 (July 19, 2022): 1142. http://dx.doi.org/10.3390/mi13071142.

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Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar−1, while the nonlinearity was 0.069% FSS. The sensor overreacts to rapidly changing pressure environments and can withstand acceleration shocks of up to 20× g. In addition, the sensor is capable of providing normal output over the vibration frequency range of 0–5000 Hz with a temperature coefficient sensitivity of −0.30% FSS °C−1 over the temperature range of 0–80 °C. Our proposed sensor can play a key role in applications with wide pressure ranges, high-frequency vibrations, and high acceleration shocks, as well as guide MEMS-based pressure sensors in high pressure ranges and complex environmental adaptability in their design.

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Wang, Suo Cheng, Yong Ping Hao, and Shuang Jie Liu. "Development and Research of MEMS." Applied Mechanics and Materials 721 (December 2014): 618–21. http://dx.doi.org/10.4028/www.scientific.net/amm.721.618.

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Microelectromechanical system (MEMS) is a new multi-disciplinary research field in recent years, which is an actuator or system composed of micro sensors, micro actuators, micro devices, signal processing system and control system. This paper mainly introduces the development of MEMS, technology characteristics, main processing materials and processing technology. At last it introduces the development and application of MEMS in the fuze system and aerospace system in detail for the future.

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Zhang, Lan, Jian Lu, Hideki Takagi, Sohei Matsumoto, and Eiji Higurashi. "An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring." Micromachines 13, no. 10 (October 7, 2022): 1686. http://dx.doi.org/10.3390/mi13101686.

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In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using only four photomasks and the proposed sensor had an ultra-compact fabricated size (<2.2 × 2.2 mm2). A vacuum measurement system was set up to comprehensively evaluate the fabricated sensors. The results demonstrated that the MEMS Pirani vacuum sensor has a high responsivity in the low-pressure domain from 100 Pa. The proposed sensor with a 953.0-Ω heater exhibited an average responsivity of 11.9 mV/Pa in the preferred range of 100 to 7 Pa and 96.0 mV/Pa in the range of 7 to 1 Pa. The sensor may be potentially suitable in many applications, such as vacuum indicators for processing equipment, health monitoring systems for social infrastructure, and medical and health applications.

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Liebscher, Thilo, Franziska Glös, Andrea Böhme, M. Birkholz, M. di Vona, Fabio de Matteis, and Andreas H. Foitzik. "Affinity Viscosimetry Sensor for Enzyme Free Detection of Glucose in a Micro-Bioreaction Chamber." Materials Science Forum 879 (November 2016): 1135–40. http://dx.doi.org/10.4028/www.scientific.net/msf.879.1135.

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With the growing demand of miniaturization of cell cultivation a new approach towards measuring and sensing bio-analytes needs to be made due to the problem of small volumes (less than 150μl) containing small amounts of analytes. Most of the available glucose sensors monitor the glucose concentration with the help of enzymes, which become very inaccurate in terms of long time measurement and uses (i.e. consumes) glucose during the measurement becoming not available anymore for the cells. Therefore, we focused on applying an enzyme-free glucose sensor based on a microelectromechanical system (MEMS).

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Almassri, Ahmed M., W. Z. Wan Hasan, S. A. Ahmad, A. J. Ishak, A. M. Ghazali, D. N. Talib, and Chikamune Wada. "Pressure Sensor: State of the Art, Design, and Application for Robotic Hand." Journal of Sensors 2015 (2015): 1–12. http://dx.doi.org/10.1155/2015/846487.

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We survey the state of the art in a variety of force sensors for designing and application of robotic hand. Most of the force sensors are examined based on tactile sensing. For a decade, many papers have widely discussed various sensor technologies and transducer methods which are based on microelectromechanical system (MEMS) and silicon used for improving the accuracy and performance measurement of tactile sensing capabilities especially for robotic hand applications. We found that transducers and materials such as piezoresistive and polymer, respectively, are used in order to improve the sensing sensitivity for grasping mechanisms in future. This predicted growth in such applications will explode into high risk tasks which requires very precise purposes. It shows considerable potential and significant levels of research attention.

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Filyashkin, Мykola, and Oleg Smirnov. "Damped Micromechanical Hyrovertical." Electronics and Control Systems 2, no. 72 (September 23, 2022): 58–63. http://dx.doi.org/10.18372/1990-5548.72.16944.

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The article considers the methods for vertical gyro construction on rough microelectromechanical elements, such as: angular velocity sensors and accelerometers. It is proposed to improve the accuracy of the microelectromechanical vertical gyro by combining it with a satellite navigation system. The solutions proposed in the article make it possible to improve the accuracy of the integrated vertical gyro based on micromechanical technologies, by the means of complex data processing that uses a compensation scheme with the latest dynamic filter, which practically does not distort the errors of the strapdown inertial microelectromechanical vertical gyro, and thus obtain an estimate of the ground speed as close to the true speed as possible. Based on the obtained estimate, it is proposed to construct a scheme of the vertical gyro speed correction (damping scheme), which would significantly improve the accuracy of estimation of the angular orientation’s parameters.

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Justa, Josef, Václav Šmídl, and Aleš Hamáček. "Fast AHRS Filter for Accelerometer, Magnetometer, and Gyroscope Combination with Separated Sensor Corrections." Sensors 20, no. 14 (July 9, 2020): 3824. http://dx.doi.org/10.3390/s20143824.

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A new predictor–corrector filter for attitude and heading reference systems (AHRS) using data from an orthogonal sensor combination of three accelerometers, three magnetometers and three gyroscopes is proposed. The filter uses the predictor—corrector structure, with prediction based on gyroscopes and independent correction steps for acceleration and magnetic field sensors. We propose two variants of the filter: (i) one using mathematical operations of special orthogonal group SO(3), that are accurate for nonlinear operations, for highest possible accuracy, and (ii) one using linearization of nonlinear operations for fast evaluation. Both approaches are quaternion-based filter realizations without redundant steps. The filters are compared to state of the art methods in this field on data recorded using low-cost microelectromechanical systems (MEMS) sensors with ground truth measured by the VICON optical system. Both filters achieved better accuracy than conventional methods at lower computational cost. The recorded data with ground truth reference and the source codes of both filters are publicly available.

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Xu, HanYang, Yulong Zhao, Kai Zhang, and Kyle Jiang. "A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity." Sensors 20, no. 13 (July 2, 2020): 3711. http://dx.doi.org/10.3390/s20133711.

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This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12° to ±360°, and the resolution of the sensor was 0.4°. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors.

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Rybarczyk, Dominik. "Application of the MEMS Accelerometer as the Position Sensor in Linear Electrohydraulic Drive." Sensors 21, no. 4 (February 20, 2021): 1479. http://dx.doi.org/10.3390/s21041479.

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Various distance sensors are used as measuring elements for positioning linear electrohydraulic drives. The most common are magnetostrictive transducers or linear variable differential transformer (LVDT) sensors mounted inside the cylinder. The displacement of the actuator’s piston rod is proportional to the change in the value of the current or voltage at the output from the sensor. They are characterized by relatively low measurement noise. The disadvantage of presented sensors is the need to mount them inside the cylinders and the high price. The article presents preliminary research on the replacement of following sensors and the use of a microelectromechanical system (MEMS) accelerometer as a measuring element in the electrohydraulic drive control system. The control consisted of two phases: at first, the signal from the acceleration sensor was analyzed during the actuator movement, based on the value determined from the simplified model implemented on the controller. In the range of motion in which the dynamics were the lowest, the signal was integrated and the obtained value was used in the second phase of motion. In the correction phase, a new set point was determined. Conducting the research required building a dedicated research stand. The author conducted the simulation and experimental research.

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Schwenck, Adrian, Thomas Guenther, and André Zimmermann. "Characterization and Benchmark of a Novel Capacitive and Fluidic Inclination Sensor." Sensors 21, no. 23 (December 1, 2021): 8030. http://dx.doi.org/10.3390/s21238030.

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In this paper, a fluidic capacitive inclination sensor is presented and compared to three types of silicon-based microelectromechanical system (MEMS) accelerometers. MEMS accelerometers are commonly used for tilt measurement. They can only be manufactured by large companies with clean-room technology due to the high requirements during assembly. In contrast, the fluidic sensor can be produced by small- and medium-sized enterprises (SMEs) as well, since only surface mount technologies (SMT) are required. Three different variants of the fluidic sensor were investigated. Two variants using stacked printed circuit boards (PCBs) and one variant with 3D-molded interconnect devices (MIDs) to form the sensor element are presented. Allan deviation, non-repeatability, hysteresis, and offset temperature stability were measured to compare the sensors. Within the fluidic sensors, the PCB variant with two sensor cavities performed best regarding all the measurement results except non-repeatability. Regarding bias stability, white noise, which was determined from the Allan deviation, and hysteresis, the fluidic sensors outperformed the MEMS-based sensors. The accelerometer Analog Devices ADXL355 offers slightly better results regarding offset temperature stability and non-repeatability. The MEMS sensors Bosch BMA280 and TDK InvenSense MPU6500 do not match the performance of fluidic sensors in any category. Their advantages are the favorable price and the smaller package. From the investigations, it can be concluded that the fluidic sensor is competitive in the targeted price range, especially for applications with extended requirements regarding bias stability, noise, and hysteresis.

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Rozhentsov, A. A., A. A. Baev, M. Halimov, and N. N. Mitrakova. "Optoelectronic Navigation System for a Flexible Surgical Instrument Based on Inertial Microelectromechanical Sensors." Bulletin of the Russian Academy of Sciences: Physics 85, no. 12 (December 2021): 1434–38. http://dx.doi.org/10.3103/s1062873821120273.

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Edelstein, Alan S., and Gregory A. Fischer. "Minimizing 1/f noise in magnetic sensors using a microelectromechanical system flux concentrator." Journal of Applied Physics 91, no. 10 (2002): 7795. http://dx.doi.org/10.1063/1.1451901.

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Hsu, Yu-Pin, and Darrin J. Young. "Skin-Coupled Personal Wearable Ambulatory Pulse Wave Velocity Monitoring System Using Microelectromechanical Sensors." IEEE Sensors Journal 14, no. 10 (October 2014): 3490–97. http://dx.doi.org/10.1109/jsen.2014.2345779.

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Lee, Changho, Jin Kim, and Chulhong Kim. "Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies." Micromachines 9, no. 11 (November 8, 2018): 584. http://dx.doi.org/10.3390/mi9110584.

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Photoacoustic imaging (PAI) is a new biomedical imaging technology currently in the spotlight providing a hybrid contrast mechanism and excellent spatial resolution in the biological tissues. It has been extensively studied for preclinical and clinical applications taking advantage of its ability to provide anatomical and functional information of live bodies noninvasively. Recently, microelectromechanical systems (MEMS) technologies, particularly actuators and sensors, have contributed to improving the PAI system performance, further expanding the research fields. This review introduces cutting-edge MEMS technologies for PAI and summarizes the recent advances of scanning mirrors and detectors in MEMS.

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Zhang, M., E. A. Olson, R. D. Twesten, J. G. Wen, L. H. Allen, I. M. Robertson, and I. Petrov. "In situ Transmission Electron Microscopy Studies Enabled by Microelectromechanical System Technology." Journal of Materials Research 20, no. 7 (July 1, 2005): 1802–7. http://dx.doi.org/10.1557/jmr.2005.0225.

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We have designed and fabricated a standardized specimen holder that allows the operation of a microelectromechanical system (MEMS) device inside a transmission electron microscope (TEM). The details of the design and fabrication processes of the holder are presented. The sample loading mechanism is simple and allows reliable electrical contact to eight signal lines on the device. Using a MEMS-based, nanojoule calorimeter, we performed rapid-heating experiments on Bi nanoparticles to demonstrate the functionality of the holder. We show that the heat capacity can be measured simultaneously with TEM observations. The size-dependent melting of Bi nanoparticles was observed simultaneously by nanocalorimetry and selected area diffraction measurements. We believe this approach will open up new experimental pathways to researchers, combining the speed and resolution of transmission electron microscopy with the flexibility, precision, and compactness of MEMS-based sensors and actuators.

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Nakashima, Rihachiro, and Hidetoshi Takahashi. "Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers." Micromachines 12, no. 5 (April 30, 2021): 507. http://dx.doi.org/10.3390/mi12050507.

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Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10−5/(rad/s2), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.

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Takahashi, Hidetoshi. "MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects." Sensors 22, no. 20 (October 20, 2022): 8018. http://dx.doi.org/10.3390/s22208018.

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Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed and are expected to be smaller and more maneuverable than conventional robots. For the development of insect-inspired robots, understanding the mechanical dynamics of the target insect is important. However, evaluating the dynamics via conventional commercialized force sensors is difficult because the exerted force and insect itself are tiny in strength and size. Here, we review force sensor devices, especially fabricated for measuring the tiny forces acting on insects during locomotion. As the force sensor, micro-force plates for measuring the ground reaction force and micro-force probes for measuring the flying force have mainly been developed. In addition, many such sensors have been fabricated via a microelectromechanical system (MEMS) process, due to the process precision and high sensitivity. In this review, we focus on the sensing principle, design guide, fabrication process, and measurement method of each sensor, as well as the technical challenges in each method. Finally, the common process flow of the development of specialized MEMS sensors is briefly discussed.

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Wang, Xin, Lining Sun, and Yunbo Shi. "Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function." Journal of Sensors 2020 (November 17, 2020): 1–16. http://dx.doi.org/10.1155/2020/8897916.

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This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity ( R 2 = 0.9998 ), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW. Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect. Moreover, the sensor chip was small in size, rugged, and highly accurate.

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Frank, Donya, Diane Foster, Pai Chou, Yu-Min Kao, In Mei Sou, and Joseph Calantoni. "Development and Evaluation of an Autonomous Sensor for the Observation of Sediment Motion*." Journal of Atmospheric and Oceanic Technology 31, no. 4 (April 1, 2014): 1012–19. http://dx.doi.org/10.1175/jtech-d-13-00180.1.

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Abstract Measurements within the mobile bed layer have been limited by previous Eulerian-based technologies. A microelectromechanical system device, called a smart sediment grain (SSG), that can measure and record Lagrangian observations of coastal sediments at incipient motion has been developed. These sensors have the potential to resolve fundamental hypotheses regarding the incipient motion of coastal sediments. Angle of repose experiments verified that the sensor enclosure has mobility characteristics similar to coarse gravel. Experiments conducted in a small oscillating flow tunnel verified that the sensors detect incipient motion under various hydrodynamic conditions. Evidence suggests the influence of pressure-gradient-induced sediment motion, contrary to the more commonly assumed bed shear stress criterion. Lagrangian measurements of rotation measured with the newly developed SSG agreed to within 5% of the rotation estimates made simultaneously with high-speed video cameras.

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Behfar, Mohammad H., Toni Björninen, Elham Moradi, Lauri Sydänheimo, and Leena Ukkonen. "Biotelemetric Wireless Intracranial Pressure Monitoring: AnIn VitroStudy." International Journal of Antennas and Propagation 2015 (2015): 1–10. http://dx.doi.org/10.1155/2015/918698.

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Assessment of intracranial pressure (ICP) is of great importance in management of traumatic brain injuries (TBIs). The existing clinically established ICP measurement methods require catheter insertion in the cranial cavity. This increases the risk of infection and hemorrhage. Thus, noninvasive but accurate techniques are attractive. In this paper, we present two wireless, batteryless, and minimally invasive implantable sensors for continuous ICP monitoring. The implants comprise ultrathin (50 μm) flexible spiral coils connected in parallel to a capacitive microelectromechanical systems (MEMS) pressure sensor. The implantable sensors are inductively coupled to an external on-body reader antenna. The ICP variation can be detected wirelessly through measuring the reader antenna’s input impedance. This paper also proposes novel implant placement to improve the efficiency of the inductive link. In this study, the performance of the proposed telemetry system was evaluated in a hydrostatic pressure measurement setup. The impact of the human tissues on the inductive link was simulated using a 5 mm layer of pig skin. The results from thein vitromeasurement proved the capability of our developed sensors to detect ICP variations ranging from 0 to 70 mmHg at 2.5 mmHg intervals.

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Zainal Abidin, Ahmad Faizal, Mohamad Huzaimy Jusoh, and Syed Abdul Mutalib Al Junid. "Development of Low Power Anisotropic Magnetoresistive (AMR) Wireless Magnetometer for Earth’s Magnetic Field Measurement." Applied Mechanics and Materials 785 (August 2015): 714–18. http://dx.doi.org/10.4028/www.scientific.net/amm.785.714.

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Magnetometer is an instrument to measure Earth’s magnetic field magnitude. Microelectromechanical system (MEMS) magnetic sensor is implemented in the device system since it consists of multi-axis magnetic field sensing driven in a single microchip physical scale at low power consumption. The magnetometer is equipped with built-in data logger system as an automatic data storage system to overcome data loss. The Anisotropic Magnetoresistive (AMR) sensor is the best MEMS magnetometer sensors, since it consumes low power (3.3Vdc), small physical size (less than 8.1mm3) and considerable 200nT resolution for Earth’s magnetic field sensing. The magnetometer consumes 5.0Vdc for complete system operation. The instrument device is useful for scientific and geophysical field to observe and measure geomagnetic field magnitude, where the measurement could be taken anywhere around the globe. The mobile wireless magnetometer was tested and experimental measurement was performed at Faculty of Electrical Engineering, Universiti Teknologi MARA, Selangor, Malaysia (coordinate: 3.07°N, 101.50°E).

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Matovic, J. "Application of Ni electroplating techniques towards stress-free microelectromechanical system-based sensors and actuators." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, no. 11 (November 1, 2006): 1645–54. http://dx.doi.org/10.1243/0954406jmes231.

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The bimaterial cantilevers are frequently used in microsensors and microactuators. A bimaterial element consists of two layers of materials with different physical properties and/or deposited under different conditions. For this reason, mechanical stresses of various origins appear along the layers and between them, causing initial deformation of the cantilever. Further, a necessary condition for the optimum response of a bimaterial cantilever to an external stimulus is that Young's moduli of both layers are approximately equal. In thermal cantilever-based actuators commonly met in practice, the first layer is usually made of SiO2, PolySi, or SiNx, whereas the second is made of Al or Au. The Young's moduli of these materials differ significantly and thus the maximum sensitivity is difficult to achieve. To ensure the planarity of the free cantilever, the common goal during fabrication is to obtain low internal stresses within both layers, which sometimes represent a severe technological limitation in high-temperature processes. This work presents a new method of stress compensation between the bimaterial cantilever layers. SiO2, PolySi, or SiNx are still used for the first layer, whereas nickel is used for the second layer. Nickel has many advantages and favourable mechanical properties compared with previously used aluminium and gold.

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Ming, Li, Wang Ming, Rong Hua, and Li Hong-Pu. "A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors." Chinese Physics Letters 23, no. 5 (April 28, 2006): 1211–14. http://dx.doi.org/10.1088/0256-307x/23/5/041.

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Wasisto, Hutomo Suryo, Qing Zhang, Stephan Merzsch, Andreas Waag, and Erwin Peiner. "A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors." Microsystem Technologies 20, no. 4-5 (December 1, 2013): 559–69. http://dx.doi.org/10.1007/s00542-013-1991-9.

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BOIKO, Juliy, and Oleh SVACHII. "RESEARCH OF THE INERTIAL DEVIATION MEASUREMENT SYSTEM UAV CARGO FROM ZERO POINT." Herald of Khmelnytskyi National University. Technical sciences 313, no. 5 (October 27, 2022): 218–26. http://dx.doi.org/10.31891/2307-5732-2022-313-5-218-226.

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Inertial measurement units (IMUs) can consist of one or more sensors that collect data designed to measure inertial motions in a specific frame of reference. Acceleration, rotational speed are examples of data that can be obtained from the sensors contained in the IMU. IMUs can be found in a variety of smart devices, medical rehabilitation, general robotics, UAV control and navigation enhancement systems, sports devices, and virtual reality systems. Some engineering solutions and displacement sensors have a number of limitations, such as systems that do not have a clear initial reference point. In such systems, it is difficult to track deviations from the starting point. However, the acceleration of a moving object is usually easy to measure, so the given deflection of the object can easily be obtained using the integral of the acceleration. To solve such problems, a distance measurement system based on a microelectromechanical system (MEMS) accelerometer has been developed. The hardware structure of the system includes a data measurement module and integrated data collection and data processing modules. Due to the physical properties of the sensor, such a system can be used in a small space, with large overloads and other adverse conditions. This article describes a system calibration method and proposes a deviation tracking algorithm based on acceleration integration. Fixed output error caused by sensor mounting position is analyzed. The analysis shows that if this factor is not taken into account, the error will lead to a serious error. The experiment of measurement of the deviation from the zero point is carried out on a horizontal, flat surface, and the calculation results show that the average accuracy of the deviation measurement of this system can reach 99.05%. The results of the experiment indicate the feasibility of the system in the conditions of short-term free fall and the validity of the data processing algorithm. The accuracy of the distance measurement system can meet most engineering needs.

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Journal articles on the topic 'Microelectromechanical system sensors'

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