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Journal articles on the topic 'Micro-mirrors'

To see the other types of publications on this topic, follow the link: Micro-mirrors.

Author: Grafiati

Published: 4 June 2021

Last updated: 20 February 2023

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1

Alneamy, A. M., M. E. Khater, M. S. Al-Ghamdi, S. Park, G. R. Heppler, and E. M. Abdel-Rahman. "Dual actuation micro-mirrors." Journal of Micromechanics and Microengineering 28, no. 7 (April 26, 2018): 075014. http://dx.doi.org/10.1088/1361-6439/aaba3f.

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2

Schenk, Harald, Thilo Sandner, Christian Drabe, Thomas Klose, and Holger Conrad. "Single crystal silicon micro mirrors." physica status solidi (c) 6, no. 3 (March 2009): 728–35. http://dx.doi.org/10.1002/pssc.200880714.

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3

Clark, Natalie, and Paul Furth. "Silicon Eye Using MEMs Micro-Mirrors." Optics and Photonics News 11, no. 11 (November 1, 2000): 34. http://dx.doi.org/10.1364/opn.11.11.000034.

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4

Ow, Yueh Sheng, Mark B. H. Breese, and Sara Azimi. "Fabrication of concave silicon micro-mirrors." Optics Express 18, no. 14 (June 22, 2010): 14511. http://dx.doi.org/10.1364/oe.18.014511.

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5

Werber, A., and H. Zappe. "Tunable, membrane-based, pneumatic micro-mirrors." Journal of Optics A: Pure and Applied Optics 8, no. 7 (May 31, 2006): S313—S317. http://dx.doi.org/10.1088/1464-4258/8/7/s03.

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6

Seale, Kevin, Chris Janetopoulos, and John Wikswo. "Micro-Mirrors for Nanoscale Three-Dimensional Microscopy." ACS Nano 3, no. 3 (March 24, 2009): 493–97. http://dx.doi.org/10.1021/nn900188t.

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7

Lutzenberger, B. J., D. L. Dickensheets, and T. J. Kaiser. "Large area molded silicon nitride micro mirrors." IEEE Photonics Technology Letters 15, no. 10 (October 2003): 1407–9. http://dx.doi.org/10.1109/lpt.2003.818046.

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8

Winter, C., L. Fabre, F. Lo Conte, L. Kilcher, F. Kechana, N. Abelé, and M. Kayal. "Micro-beamer based on MEMS micro-mirrors and laser light source." Procedia Chemistry 1, no. 1 (September 2009): 1311–14. http://dx.doi.org/10.1016/j.proche.2009.07.327.

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9

Kujala, Naresh, Shashidhara Marathe, Deming Shu, Bing Shi, Jun Qian, Evan Maxey, Lydia Finney, Albert Macrander, and Lahsen Assoufid. "Kirkpatrick–Baez mirrors to focus hard X-rays in two dimensions as fabricated, tested and installed at the Advanced Photon Source." Journal of Synchrotron Radiation 21, no. 4 (May 9, 2014): 662–68. http://dx.doi.org/10.1107/s1600577514006493.

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The micro-focusing performance for hard X-rays of a fixed-geometry elliptical Kirkpatrick–Baez (K–B) mirrors assembly fabricated, tested and finally implemented at the micro-probe beamline 8-BM of the Advanced Photon Source is reported. Testing of the K–B mirror system was performed at the optics and detector test beamline 1-BM. K–B mirrors of length 80 mm and 60 mm were fabricated by profile coating with Pt metal to produce focal lengths of 250 mm and 155 mm for 3 mrad incident angle. For the critical angle of Pt, a broad bandwidth of energies up to 20 keV applies. The classical K–B sequential mirror geometry was used, and mirrors were mounted on micro-translation stages. The beam intensity profiles were measured by differentiating the curves of intensity data measured using a wire-scanning method. A beam size of 1.3 µm (V) and 1.2 µm (H) was measured with monochromatic X-rays of 18 keV at 1-BM. After installation at 8-BM the measured focus met the design requirements. In this paper the fabrication and metrology of the K–B mirrors are reported, as well as the focusing performances of the full mirrors-plus-mount set-up at both beamlines.

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10

Suzuki, Hirofumi. "Multi-Axis Controlled Ultraprecision Machining and Measurement." International Journal of Automation Technology 3, no. 3 (May 5, 2009): 227–32. http://dx.doi.org/10.20965/ijat.2009.p0227.

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Demands of micro aspheric optical components such as lenses and mirrors are increasing for installing to the digital devices. As the devices become to be more compact and complicated, the molds shapes of lens and mirrors would become more difficult to be machined and measured. In this study, multi-axis controlled ultra precision machining/grinding and on-machine measurement technologies are developed for manufacturing of the complicated and micro molds. In this paper, the next four technologies are focused: (1) micro fresnel grinding, (2) Micro lens array grinding, (3) Ultrasonic vibration assisted polishing, and (4) Contact type of multi axis controlled on-machine measuring system.

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11

Lee, Heung-Shik, Chongdu Cho, and Myeong-Woo Cho. "Magnetostrictive Micro Mirrors for an Optical Switch Matrix." Sensors 7, no. 10 (October 9, 2007): 2174–82. http://dx.doi.org/10.3390/s7102174.

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12

Peter, Yves-Alain. "Pulsed fiber laser using micro-electro-mechanical mirrors." Optical Engineering 38, no. 4 (April 1, 1999): 636. http://dx.doi.org/10.1117/1.602107.

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13

Manh, Chu Hoang, and Kazuhiro Hane. "Vacuum operation of comb-drive micro display mirrors." Journal of Micromechanics and Microengineering 19, no. 10 (September 17, 2009): 105018. http://dx.doi.org/10.1088/0960-1317/19/10/105018.

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14

Timotijevic, B., R. Lockhart, R. Stanley, M. Luetzelschwab, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, and M. Tormen. "Microfabrication of Optically Flat Silicon Micro-Mirrors for Fully Programmable Micro-Diffraction Gratings." Procedia Engineering 47 (2012): 244–47. http://dx.doi.org/10.1016/j.proeng.2012.09.129.

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15

Wang Bo, Liang Zhong-Zhu, Kong Yan-Mei, Liang Jing-Qiu, Fu Jian-Guo, Zheng Ying, Zhu Wan-Bin, et al. "Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer." Acta Physica Sinica 59, no. 2 (2010): 907. http://dx.doi.org/10.7498/aps.59.907.

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16

Lv, Jin Guang, Jing Qiu Liang, Zhong Zhu Liang, Yu Xin Qin, Chao Tian, and Wei Biao Wang. "Design and Manufacture of Micro Interference System in Spatial Modulation Fourier Transform Spectrometer." Key Engineering Materials 562-565 (July 2013): 973–78. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.973.

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Spatial modulation Fourier transform spectrometer(FTS) based on micro step mirror arrays with high optical path difference sampling precision was a new high-tech measuring instrument. To depress the interferogram aliasing resulted from the chromatic dispersion of beam splitter, considering interferogram contrast reversal as the criterion of image degradation, the thickness difference between beam splitter and compensating plate was determined smaller than 0.2μm. So as to restrain the ghost images induced by secondary reflection on the surface of beam splitter, the transmittance of anti-reflection film should be more than 98% and the transmittance of beam splitter film should be controlled within (50±5) %. Since the restriction of processing method and machining accuracy to micro step mirrors, the thickness deviation and angle deviation existed between various sub-mirrors. After the error synthesis to sub-mirror errors using Monte Carlo method, the tolerance of the thickness deviation and angle deviation was controlled in 1μm and 2×10-5rad. Meanwhile, the step height deviation of micro step mirrors may induce non uniform sampling to interference signal. Thus a spectrum method by least-squares cosines progression arithmetic was advanced and the validity of which was demonstrated well.

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17

LI Zhao, 李昭, 苑伟政 YUAN Weizheng, 吴蒙 WU Meng, 燕斌 YAN Bin, 乔大勇 QIAO Dayong, and 刘耀波 LIU Yaobo. "Micro Scanning Mirrors with Laser Diode for Pattern Generation." ACTA PHOTONICA SINICA 40, no. 11 (2011): 1625–29. http://dx.doi.org/10.3788/gzxb20114011.1625.

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18

Dahan, Daniel, Ami Yaacobi, Ephraim Pinsky, and Zeev Zalevsky. "Spatial super-resolution of colored images by micro mirrors." Journal of Optics 20, no. 6 (May 18, 2018): 065704. http://dx.doi.org/10.1088/2040-8986/aabf9d.

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19

Schenk, Harald, Jan Grahmann, Thilo Sandner, Michael Wagner, Ulrike Dauderstädt, and Jan-Uwe Schmidt. "Micro Mirrors for High-speed Laser Deflection and Patterning." Physics Procedia 56 (2014): 7–18. http://dx.doi.org/10.1016/j.phpro.2014.08.090.

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20

Bukreeva, I., A. Surpi, A. Gerardino, S. Lagomarsino, F. Perennes, M. Altissimo, S. Cabrini, A. Carpentiero, A. Vicenzo, and P. Cavallotti. "Multiple micro mirrors for X-ray focusing and collimation." Optics Communications 259, no. 1 (March 2006): 366–72. http://dx.doi.org/10.1016/j.optcom.2005.08.030.

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21

Toshiyoshi, H., and H. Fujita. "Electrostatic micro torsion mirrors for an optical switch matrix." Journal of Microelectromechanical Systems 5, no. 4 (1996): 231–37. http://dx.doi.org/10.1109/84.546402.

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22

Timoshenkov, Sergei, S. Evstafyev, and I. Britkov. "Development of Controlled Micro-Mirrors with Large Rotation Angle." Advanced Materials Research 630 (December 2012): 339–43. http://dx.doi.org/10.4028/www.scientific.net/amr.630.339.

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Development of micro-mechanical sensors and systems based on them is one of the development branches in microelectronic technology and labeled as one of the technologies of the 21-st century. The relevance and significance of the paper related to the methodology creation for the development and manufacture of micro-mirror with large rotation angle. Methodology was based on an integrated approach to solving such problems as the processes of surface preparation, etching of the complex profile surfaces, matching the silicon structures, etc. which allows to create MOEMS elements.

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23

Егоров, Ф. А. "Влияние структуры волнового фронта лазерного излучения на синхронные автоколебания в волоконных лазерах с микрооптомеханическими резонаторами." Письма в журнал технической физики 48, no. 7 (2022): 39. http://dx.doi.org/10.21883/pjtf.2022.07.52292.19060.

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It is shown, that increasing the stability of synchronous self-oscillations in fiber lasers with nonlinear mirrors, based on micro-optomechanical resonators (micro-oscillators), can be achieved due to the transformation of the wavefront of laser radiation, interacting with micro-oscillators. These transformations are based on the unique properties of mode interference in composite singlemode-multimode-singlemode fiber structures.

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24

Bogaerts, L., A. Phommahaxay, C. Gerets, P. Jaenen, R. Van Hoof, S. Severi, M. Van De Peer, et al. "TEMPORARY PROTECTIVE PACKAGING FOR OPTICAL MEMS." International Symposium on Microelectronics 2011, no. 1 (January 1, 2011): 001052–57. http://dx.doi.org/10.4071/isom-2011-tha5-paper2.

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The fragility of MEM devices is one of the main concerns in case of standard packaging. Steps such as wafer dicing, die handling, assembly and wire bonding can seriously damage the device functionality if the MEM devices are not properly protected during the assembly processes. In this paper we report for the first time on bonding and removal of protective temporary caps used to ease the packaging of MEMS for optical applications. The package, based on a heat decomposable and photo-patternable polymer sealing ring, is gross leak tight, fulfills the MIL spec for shear testing and respects the thermal budget of Al-coated SiGe micro-mirrors. After release of the micro-mirrors at wafer level, a temporary cap with patterned Unity 2203P is bonded to the device wafer, enabling dicing, followed by assembly of the die to a PCB. This can be done by wire bonding and the cap will finally be removed by applying heat. The protective caps are assembled using a die to wafer approach on a flip-chip bonder. The caps are removed by thermal decomposition of the Unity film, leaving little residues in the patterned area. Debonding is done on the flip-chip tool, allowing a slow separation of the cap and MEMS wafer during heating. Several dies with released micro-mirrors were covered with temporary caps by using the optimized process. After dicing and debonding the mirrors were found to be unharmed. Optical and electrical measurements demonstrate the applicability of the process.

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25

Egorov F. A. "Influence of the structure of the wavefront of laser radiation on synchronous self-oscillations in fiber lasers with micro-optomechanical resonators." Technical Physics Letters 48, no. 4 (2022): 30. http://dx.doi.org/10.21883/tpl.2022.04.53168.19060.

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It is shown, that increasing the stability of synchronous self-oscillations in fiber lasers with nonlinear mirrors, based on micro-optomechanical resonators (micro-oscillators), can be achieved due to the transformation of the wavefront of laser radiation, interacting with micro-oscillators. These transformations are based on the unique properties of mode interference in composite singlemode-multimode-singlemode fiber structures. Keywords: synchronous self-oscillations, fiber lasers, microcantilever, resonance.

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26

Gong, Yan Jue, Zhao Fu, Hui Yu Xiang, Li Zhang, and Chun Ling Meng. "Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection." Advanced Materials Research 121-122 (June 2010): 69–73. http://dx.doi.org/10.4028/www.scientific.net/amr.121-122.69.

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As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror.

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27

LI Peng, 李鹏, 冯丽爽 FENG Lishuang, 陈淑英 CHEN Shuying, and 王恺 WANG Kai. "Design of Photonic Crystal Micromirrors in Ring Resonant Cavity." ACTA PHOTONICA SINICA 40, no. 3 (2011): 358–62. http://dx.doi.org/10.3788/gzxb20114003.0358.

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28

Dong, Ruili, Yonghong Tan, and Qingyuan Tan. "Mirror Angle Tuning of Electromagnetic Micro-Mirrors With Oscillation Compensation." IEEE Transactions on Systems, Man, and Cybernetics: Systems 50, no. 8 (August 2020): 2969–77. http://dx.doi.org/10.1109/tsmc.2018.2829849.

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29

Zamek, Steve, Liang Feng, Mercedeh Khajavikhan, Dawn T. H. Tan, Maurice Ayache, and Yeshaiahu Fainman. "Micro-resonator with metallic mirrors coupled to a bus waveguide." Optics Express 19, no. 3 (January 25, 2011): 2417. http://dx.doi.org/10.1364/oe.19.002417.

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30

Poletto, L., F. Frassetto, F. Calegari, S. Anumula, A. Trabattoni, and M. Nisoli. "Micro-focusing of attosecond pulses by grazing-incidence toroidal mirrors." Optics Express 21, no. 11 (May 20, 2013): 13040. http://dx.doi.org/10.1364/oe.21.013040.

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31

ZANARDIOCAMPO, J. "Characterization of GaAs-based micro-origami mirrors by optical actuation." Microelectronic Engineering 73-74 (June 2004): 429–34. http://dx.doi.org/10.1016/s0167-9317(04)00182-0.

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32

Juillard, Jérôme, and Mihai Cristescu. "An inverse approach to the design of adaptive micro-mirrors." Journal of Micromechanics and Microengineering 14, no. 3 (November 18, 2003): 347–55. http://dx.doi.org/10.1088/0960-1317/14/3/006.

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33

Goldwin, J., and E. A. Hinds. "Tight focusing of plane waves from micro-fabricated spherical mirrors." Optics Express 16, no. 22 (October 17, 2008): 17808. http://dx.doi.org/10.1364/oe.16.017808.

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34

Ren-Xi, Gao, Zhang Jia-Hua, Zhang Li-Gong, Sun Jiang-Ting, Kong Xiang-Gui, Song Hong-Wei, and Zheng Jie. "Femtosecond Laser Induced Optical Waveguides and Micro-mirrors Inside Glasses." Chinese Physics Letters 19, no. 10 (October 2002): 1424–26. http://dx.doi.org/10.1088/0256-307x/19/10/308.

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35

Yang, H., C. T. Pan, and S. C. Shen. "Optical switch with auto-aligning fibers and latching micro-mirrors." Microsystem Technologies 10, no. 2 (January 1, 2004): 155–60. http://dx.doi.org/10.1007/s00542-003-0325-8.

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36

He, Tao, Guo Hui Yuan, and Zhuo Ran Wang. "Design and Investigation on Characteristics of a Semiconductor Micro-Ring Laser with Retro-Reflector Cavity." Advanced Materials Research 760-762 (September 2013): 194–98. http://dx.doi.org/10.4028/www.scientific.net/amr.760-762.194.

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A miniaturized semiconductor micro-ring laser with retro-reflector cavity is investigated. By introducing higher order aspheric terms, miniaturized parabolic mirrors are designed and optimized. A Retro-Reflector based semiconductor micro-ring laser with equivalent radius of 38μm and low threshold current of 60mA is realized. The free-running wavelength is 1541.04 nm when the injection current is increased to 140mA.

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37

Popovici, D., Veronica Paltanea, Gheorghe Paltanea, and Gabi Jiga. "A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror." Applied Mechanics and Materials 61 (June 2011): 9–14. http://dx.doi.org/10.4028/www.scientific.net/amm.61.9.

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In many industrial and biomedical applications (laser scanning displays, optical switch matrices and biomedical imaging systems) the sensing and actuation components are realized using micro-mirrors fabricated by MEMS technology. In this paper is evaluated, through numerical methods, the structural mechanical properties of the actuation mechanism of a ring shape micro-mirror. For the lift-off of the structure there are used four springs simulating a prestressed cantilever beam.

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38

Luo, Xianquan, and Junwei Lv. "A Prototype Design of Scanning Mirror Used in MEMS and Its Experimental Verification." Recent Advances in Electrical & Electronic Engineering (Formerly Recent Patents on Electrical & Electronic Engineering) 13, no. 6 (November 4, 2020): 885–93. http://dx.doi.org/10.2174/2352096512666191019153222.

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Background: The MEMS scanning mirror prototype is a spatial scanning device, which has advantages such as light mass, low drive voltage, large scanning and high angular measurement accuracy. Methods: The MEMS scanning mirror prototype uses the piezoelectric driving principle to drive the micro-structure to realize two-axis scanning. The corner of the MEMS scanning mirror is measured by using a piezoelectric resistance sensor. In the paper, the damping properties of MEMS scanning mirrors have been studied, which deduce the damping force formula of MEMS scanning mirrors. Moreover, the influence of different sizes and structures of MEMS scanning mirrors on the damping force and the amplitude of scanning mirror angles are analyzed, and a structural optimization design method to reduce the driving voltage of MEMS scanning mirrors is proposed. Results: The theoretical analysis, design and testing of piezoelectric driven MEMS scanning microscopes have been carried out. Conclusion: Through related experiments, it is verified that the maximum scanning range and the precision index of angle measurement meet the requirements of the index.

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39

Dou, Xinyuan, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Duo Ding, David Z. Pan, and Ray T. Chen. "Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold." Optics Express 18, no. 1 (December 23, 2009): 378. http://dx.doi.org/10.1364/oe.18.000378.

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40

Rabinowitz, Mario, and Mark Davidson. "Electronic film with embedded micro-mirrors for solar energy concentrator systems." Solar Energy 77, no. 1 (2004): 3–13. http://dx.doi.org/10.1016/j.solener.2004.04.002.

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41

Langa, S., C. Drabe, A. Herrmann, T. Ludewig, A. Rieck, A. Flemming, and C. Kaden. "Wafer level vacuum packaging of micro-mirrors with buried signal lines." Microsystem Technologies 21, no. 5 (February 1, 2015): 1021–28. http://dx.doi.org/10.1007/s00542-015-2433-7.

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42

Bouyge, D., A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélemy. "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers." Microsystem Technologies 13, no. 11-12 (January 4, 2007): 1607–13. http://dx.doi.org/10.1007/s00542-006-0340-7.

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43

Chaiwong, K., K. Tamee, S. Punthawanunt, F. H. Suhailin, M. S. Aziz, J. Ali, G. Singh, and P. Yupapin. "Naked-eye 3D imaging model using the embedded micro-conjugate mirrors within the medical micro-needle device." Microsystem Technologies 24, no. 6 (November 21, 2017): 2695–99. http://dx.doi.org/10.1007/s00542-017-3634-z.

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44

Hu, Li-Xiang, Tong-Pu Yu, Han-Zhen Li, Yan Yin, Paul McKenna, and Fu-Qiu Shao. "Dense relativistic electron mirrors from a Laguerre–Gaussian laser-irradiated micro-droplet." Optics Letters 43, no. 11 (May 24, 2018): 2615. http://dx.doi.org/10.1364/ol.43.002615.

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45

Stenchly, Vanessa, Hans Joachim Quenzer, Ulrich Hofmann, Christian Eisermann, and Wolfgang Benecke. "Viscous Hot Glass Forming for Optical Wafer Level Packaging of Micro Mirrors." Procedia Engineering 47 (2012): 64–67. http://dx.doi.org/10.1016/j.proeng.2012.09.085.

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46

Hagsäter, S. M., C. H. Westergaard, H. Bruus, and J. P. Kutter. "A compact viewing configuration for stereoscopic micro-PIV utilizing mm-sized mirrors." Experiments in Fluids 45, no. 6 (June 20, 2008): 1015–21. http://dx.doi.org/10.1007/s00348-008-0523-3.

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47

Ye, Jia-Sheng, Yan Zhang, and Kazuhiro Hane. "Improved first Rayleigh-Sommerfeld method applied to metallic cylindrical focusing micro mirrors." Optics Express 17, no. 9 (April 20, 2009): 7348. http://dx.doi.org/10.1364/oe.17.007348.

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48

Xia, Changfeng, Dayong Qiao, Qi Zeng, and Weizheng Yuan. "The squeeze-film air damping of circular and elliptical micro-torsion mirrors." Microfluidics and Nanofluidics 19, no. 3 (April 30, 2015): 585–93. http://dx.doi.org/10.1007/s10404-015-1585-1.

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49

Pârvulescu, Cǎtǎlin Corneliu, Elena Manea, Cǎtǎlin Tibeica, Munizer Purica, and Alina Popescu. "Design and Fabrication of the Bidirectional Micro-Optic Concentrator for Optical Radiation." Defect and Diffusion Forum 400 (March 2020): 21–31. http://dx.doi.org/10.4028/www.scientific.net/ddf.400.21.

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This paper presents the design and fabrication of a micro-optic concentrator for optical radiation based on coupled micro-lenses and micro-prism (micro – mirrors) arrays. This type of micro-optic concentrator is suitable for both terrestrial and spatial applications where optical radiation is redirected and coupled to small area photovoltaic cells or detection devices located in front of the waveguide edges. Analysis and design were performed for the 0.4-1.06µm spectral range using the COMSOL Multiphysics program and the Ray Optics geometric optics module. Simulations for ray-tracing have been modeled in order to optimize the geometries of micro-optics elements taking into account the optical parameters of the materials to be used (polymers and glass) in the process of micro-optic concentrator fabrication. Micro-lenses and micro-prism arrays were fabricated by the technique of molding in silicon molds and replication in polymeric materials using OrmoClear30 elastomer (n=1.56, UV exposure) and in UV-PDMS, KER4690 polymer, respectively. Assembling and the fabrication process of micro-optic concentrator allowed the achievement of an optical efficiency of 70 % efficiency.

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50

Fischer, V., and O. Karthaus. "Growth of micro-ikebana on a floating substrate: a method to monitor local supersaturation levels." Physical Chemistry Chemical Physics 17, no. 10 (2015): 6695–99. http://dx.doi.org/10.1039/c4cp04799k.

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The growth of biomimetic SrCO₃–SiO₂ micro-ikebana was conducted by an organic additive-free process to monitor the degree of local supersaturation at the surface of a floating substrate. The obtained crystallization pattern mirrors the level of local concentration which was the basis to derive a mathematical equation for the prediction of local nucleation rates.

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