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Journal articles on the topic 'Micro Electro Mechanical Systems'

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Author: Grafiati
Published: 4 June 2021
Last updated: 25 May 2024

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1

Motamedi, M. Edward. "Micro-opto-electro-mechanical systems." Optical Engineering 33, no. 11 (November 1, 1994): 3505. http://dx.doi.org/10.1117/12.181572.

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2

Xie, Huikai, and Frederic Zamkotsian. "Editorial for the Special Issue on Optical MEMS." Micromachines 10, no. 7 (July 7, 2019): 458. http://dx.doi.org/10.3390/mi10070458.

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Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]
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3

Xu, Kaikai, Lukas W. Snyman, Jean-Luc Polleux, Hongda Chen, and Guannpyng Li. "Silicon Light-Emitting Device with Application in on-Chip Micro-opto-electro-mechanical and Chemical-opto-electro Micro Systems." International Journal of Materials, Mechanics and Manufacturing 3, no. 4 (2015): 282–86. http://dx.doi.org/10.7763/ijmmm.2015.v3.211.

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4

Mamilla, Venkata Ramesh, and Kommuri Sai Chakradhar. "Micro Machining for Micro Electro Mechanical Systems (MEMS)." Procedia Materials Science 6 (2014): 1170–77. http://dx.doi.org/10.1016/j.mspro.2014.07.190.

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5

Ravichandran, Niranjani, and R. Subhashini. "Micro electro mechanical systems in nephrology." International Journal of Bioinformatics Research and Applications 17, no. 5 (2021): 434. http://dx.doi.org/10.1504/ijbra.2021.10043923.

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6

Ravichandran, Niranjani, and R. Subhashini. "Micro electro mechanical systems in nephrology." International Journal of Bioinformatics Research and Applications 17, no. 5 (2021): 434. http://dx.doi.org/10.1504/ijbra.2021.120198.

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7

Gauthier, Robert C., R. Niall Tait, and Mike Ubriaco. "Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications." Applied Optics 41, no. 12 (February 20, 2002): 2361. http://dx.doi.org/10.1364/ao.41.002361.

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8

Helveg, S. "Micro-Electro-Mechanical Systems for Electron Microscopy in Catalysis." Microscopy and Microanalysis 19, S2 (August 2013): 1494–95. http://dx.doi.org/10.1017/s143192761300946x.

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9

Cho, Chong Du, and Byung Ha Lee. "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems." Key Engineering Materials 306-308 (March 2006): 1247–52. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1247.

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In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.
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10

Meng, Guang, Wen-Ming Zhang, Hai Huang, Hong-Guang Li, and Di Chen. "Micro-rotor dynamics for micro-electro-mechanical systems (MEMS)." Chaos, Solitons & Fractals 40, no. 2 (April 2009): 538–62. http://dx.doi.org/10.1016/j.chaos.2007.08.003.

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11

Zhou, Lianqun, Yihui Wu, Ping Zhang, Ming Xuan, Zhenggang Li, and Hongguang Jia. "Micro-spectrophotometer based on micro electro-mechanical systems technology." Frontiers of Mechanical Engineering in China 3, no. 1 (March 2008): 37–43. http://dx.doi.org/10.1007/s11465-008-0001-x.

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12

JIANG, Zhuangde. "Special Micro-electro-mechanical Systems Pressure Sensor." Journal of Mechanical Engineering 49, no. 06 (2013): 187. http://dx.doi.org/10.3901/jme.2013.06.187.

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13

Ardito, Raffaele, Claudia Comi, Alberto Corigliano, and Attilio Frangi. "Solid damping in micro electro mechanical systems." Meccanica 43, no. 4 (January 10, 2008): 419–28. http://dx.doi.org/10.1007/s11012-007-9105-3.

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14

Ardito, Raffaele, Claudia Comi, Alberto Corigliano, and Attilio Frangi. "Solid damping in micro electro mechanical systems." Meccanica 43, no. 5 (May 23, 2008): 557. http://dx.doi.org/10.1007/s11012-008-9137-3.

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15

SHI, F., P. RAMESH, and S. MUKHERJEE. "DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS." International Journal for Numerical Methods in Engineering 39, no. 24 (December 30, 1996): 4119–39. http://dx.doi.org/10.1002/(sici)1097-0207(19961230)39:24<4119::aid-nme42>3.0.co;2-4.

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16

Gilewski, Marian. "Micro-Electro-Mechanical Systems in Light Stabilization." Sensors 23, no. 6 (March 8, 2023): 2916. http://dx.doi.org/10.3390/s23062916.

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This article discusses application considerations in the micro-electro-mechanical system’s optical sensor. Furthermore, the provided analysis is limited to application issues occurring in research or industrial applications. In particular, a case was discussed where the sensor was used as a feedback signal source. Its output signal is used to stabilize the flux of an LED lamp. Thus, the function of the sensor was the periodic measurement of the spectral flux distribution. The application problem of such a sensor is the output analogue signal conditioning. This is necessary to perform analogue-to-digital conversion and further digital processing. In the discussed case, design limitations come from the specifics of the output signal. This signal is a sequence of rectangular pulses, which can have different frequencies, and their amplitude varies over a wide range. The fact such a signal must be conditioned additionally discourages some optical researchers from using such sensors. The developed driver allows measurement using an optical light sensor in the band from 340 nm to 780 nm with a resolution of about 12 nm; in the range of flux values from about 10 nW to 1 μW, and frequencies up to several kHz. The proposed sensor driver was developed and tested. Measurement results are presented in the paper’s final part.
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17

Bordatchev, Evgueni V. "Electro-thermally driven microgrippers for micro-electro-mechanical systems applications." Journal of Micro/Nanolithography, MEMS, and MOEMS 4, no. 2 (April 1, 2005): 023011. http://dx.doi.org/10.1117/1.1899312.

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18

Lei, Yi-ming, Li Chen, and Zhi-yu Wen. "Micro-electro-mechanical systems-based micro-electromagnetic vibration energy harvester." Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems 228, no. 4 (December 16, 2013): 184–88. http://dx.doi.org/10.1177/1740349913510294.

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19

Greiff, Michael, Uzzal Binit Bala, and W. Mathis. "Hybrid Numerical Simulation of Micro Electro Mechanical Systems." PIERS Online 2, no. 3 (2006): 270–74. http://dx.doi.org/10.2529/piers050907123514.

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20

De Pasquale, Giorgio. "Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)." Micromachines 12, no. 11 (November 8, 2021): 1374. http://dx.doi.org/10.3390/mi12111374.

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Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about process attempts, setup details, and case studies. However, the fast and multi-technological development of AM methods for microstructures will require organized analysis of the specific and comparative advantages, constraints, and limitations of the processes. The goal of this paper is to provide an up-to-date overall view on the AM processes at the microscale and also to organize and disambiguate the related performances, capabilities, and resolutions.
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21

Lang, Walter, and Hermann Sandmaier. "Micro Electro Mechanical Systems: From Research to Applications." Japanese Journal of Applied Physics 37, Part 1, No. 12B (December 30, 1998): 7047–51. http://dx.doi.org/10.1143/jjap.37.7047.

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22

YU, Biqiang. "MULTIDISCIPLINARY DESIGN OPTIMIZATION OF MICRO ELECTRO MECHANICAL SYSTEMS." Chinese Journal of Mechanical Engineering 42, supp (2006): 65. http://dx.doi.org/10.3901/jme.2006.supp.065.

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23

Leclercq, J. L., C. Seassal, and P. Viktorovitch. "InP-based micro-opto-electro-mechanical systems (MOEMS)." Le Journal de Physique IV 09, PR2 (February 1999): Pr2–123. http://dx.doi.org/10.1051/jp4:1999213.

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24

Ho, Chih-Ming, and Yu-Chong Tai. "MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS." Annual Review of Fluid Mechanics 30, no. 1 (January 1998): 579–612. http://dx.doi.org/10.1146/annurev.fluid.30.1.579.

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25

Esashi, Masayoshi. "Micro/nano electro mechanical systems for practical applications." Journal of Physics: Conference Series 187 (September 1, 2009): 012001. http://dx.doi.org/10.1088/1742-6596/187/1/012001.

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26

LUO, Fan, Fei FENG, Bin ZHAO, Bowen TIAN, Xuelei YANG, Haimei ZHOU, and Xinxin LI. "Research progress of micro-electro-mechanical systems micro gas chromatography columns." Chinese Journal of Chromatography 36, no. 8 (2018): 707. http://dx.doi.org/10.3724/sp.j.1123.2018.02015.

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27

Camou, Serge, Agnès Tixier-Mita, Hiroyuki Fujita, and Teruo Fujii. "Integration of Microoptics in Bio-Micro-Electro-Mechanical Systems towards Micro-Total-Analysis Systems." Japanese Journal of Applied Physics 43, no. 8B (August 25, 2004): 5697–705. http://dx.doi.org/10.1143/jjap.43.5697.

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28

SUIZU, Yoshiharu, Kazuo ASAUMI, and Shunsuke MOCHIZUKI. "Simulation Technology for Micro-Electro-Mechanical-Systems (MEMS) Development." Journal of the Vacuum Society of Japan 56, no. 10 (2013): 409–16. http://dx.doi.org/10.3131/jvsj2.56.409.

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29

Delavari, Hadi, Ayyob Asadbeigi, and Omid Heydarnia. "Synchronization of Micro-Electro-Mechanical-Systems in Finite Time." Interdisciplinary journal of Discontinuity, Nonlinearity and Complexity 4, no. 2 (June 2015): 173–85. http://dx.doi.org/10.5890/dnc.2015.06.005.

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30

Shoji, Shuichi. "Materials for Micro Electro Mechanical Systems Elements and Micromachining." Materia Japan 34, no. 1 (1995): 17–24. http://dx.doi.org/10.2320/materia.34.17.

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31

Lau, Gih-Keong, and Milan Shrestha. "Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)." Micromachines 8, no. 6 (June 21, 2017): 194. http://dx.doi.org/10.3390/mi8060194.

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32

Epstein, Alan H. "Millimeter-Scale, Micro-Electro-Mechanical Systems Gas Turbine Engines." Journal of Engineering for Gas Turbines and Power 126, no. 2 (April 1, 2004): 205–26. http://dx.doi.org/10.1115/1.1739245.

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The confluence of market demand for greatly improved compact power sources for portable electronics with the rapidly expanding capability of micromachining technology has made feasible the development of gas turbines in the millimeter-size range. With airfoil spans measured in 100’s of microns rather than meters, these “microengines” have about 1 millionth the air flow of large gas turbines and thus should produce about one millionth the power, 10–100 W. Based on semiconductor industry-derived processing of materials such as silicon and silicon carbide to submicron accuracy, such devices are known as micro-electro-mechanical systems (MEMS). Current millimeter-scale designs use centrifugal turbomachinery with pressure ratios in the range of 2:1 to 4:1 and turbine inlet temperatures of 1200–1600 K. The projected performance of these engines are on a par with gas turbines of the 1940s. The thermodynamics of MEMS gas turbines are the same as those for large engines but the mechanics differ due to scaling considerations and manufacturing constraints. The principal challenge is to arrive at a design which meets the thermodynamic and component functional requirements while staying within the realm of realizable micromachining technology. This paper reviews the state of the art of millimeter-size gas turbine engines, including system design and integration, manufacturing, materials, component design, accessories, applications, and economics. It discusses the underlying technical issues, reviews current design approaches, and discusses future development and applications.
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33

Bhatia, Dinesh, BabluLal Rajak, Meena Gupta, and Arun Mukherjee. "Application of Micro-Electro-Mechanical Systems as Neural Interface." Journal of Advances in Biomedical Engineering and Technology 2, no. 2 (November 20, 2015): 1–10. http://dx.doi.org/10.15379/2409-3394.2015.02.02.1.

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34

Higo, Yakichi. "Characterization of Micro/Nano Electro-Mechanical Systems (MEMS/NEMS)." Fatigue Fracture of Engineering Materials and Structures 28, no. 8 (August 2005): 655. http://dx.doi.org/10.1111/j.1460-2695.2005.00933.x.

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35

Singh, Kanika, and Kyung Chun Kim. "Clinical Bio-Micro-Electro-Mechanical Systems: Technology and Applications." Sensor Letters 7, no. 6 (December 1, 2009): 1013–24. http://dx.doi.org/10.1166/sl.2009.1246.

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36

Ma, Yunfei, Shubham Shubham, Michael Kuntzman, Jen-I. Cheng, and Jing Ouyang. "A compact high performance micro-electro-mechanical systems microphone." Journal of the Acoustical Society of America 153, no. 3_supplement (March 1, 2023): A145. http://dx.doi.org/10.1121/10.0018449.

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This paper reports on the development of a MEMS capacitive microphone design with 72 dBA signal-to-noise-ratio (SNR) in a compact 3.4 × 2.3 × 0.7 mm3package. The design incorporates a circular diaphragm disc suspended on one end of the cantilever beam. The diaphragm, under the bias conditions, is supported using peripheral and center protrusions extended from the back plate. The design optimization is targeted to achieve high sensitivity and low damping noise to achieve maximum SNR possible in the mentioned footprint. Finite element modeling (FEM) combined with the lumped element circuit modeling have been implemented to realize the microphone performance. The results have been validated against the measurement with very good correlation of sensitivity, noise and total harmonic distortion (THD). With the sensitivity of −35 dBV (ref. 1 V/Pa at 1 kHz) and acoustic overload point of 134 dBSPL, this is one of the highest performing MEMS analog microphone reported today. Therefore, it is very well suited for audio applications such as mobile phones, true wireless stereo (TWS) earphones, hearing aids and automotive, which demand miniaturized size, low cost and high performance.
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37

Kanthamani, S., S. Raju, and V. Abhaikumar. "Applications of Micro Electro Mechanical Systems in Microwave Circuits and Systems." IETE Journal of Research 54, no. 2 (March 2008): 175–87. http://dx.doi.org/10.1080/03772063.2008.10876197.

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38

Chernyavsky, D. I., and D. D. Chernyavsky. "Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)." Omsk Scientific Bulletin, no. 175 (2021): 5–11. http://dx.doi.org/10.25206/1813-8225-2021-175-5-11.

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Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within the dimensions of the microcircuit case. The paper considers the kinematic calculation of the design of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch of input optical channels, connecting in various combinations certain input or output elements of the microcircuit for further processing. The article presents the calculation of the kinematic parameters of the mechanical structure of the micro mirror. Practical recommendations are given for choosing the optimal range of variation of the micro mirror tilt angles in order to increase the strength of its structure, as well as to reduce the power of the mechanical drive of the micro machine required to change the micro mirror tilt angles
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39

Zhang, Ping, Chun Lei Sun, and Qing’en Li. "Study and Simulation of Electro-Mechanical Sensor." Advanced Materials Research 282-283 (July 2011): 440–43. http://dx.doi.org/10.4028/www.scientific.net/amr.282-283.440.

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The relevant introduction development of the micro electromechanical systems (MEMS) is carried out in this paper. The pressure sensor is an important component of micro electromechanical systems (MEMS). Many aspects of the pressure sensor are studied，simulated and analyzed by us. The principle of work of the pressure sensor is elaborated in details and the material selection is studied also. The correlative performance indexes, such as precision and the repeatability of pressure sensor, are explored. In the following part of this paper, through the finite element simulation software, the analytic study of some performance parameters of the sensor chip is carried out in detail. Through the analysis, we find that the sensor designed here has many advantages.
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40

Akkus, Nihat, Fatih Yücel, and Ersin Toptas. "Vehicle Electro-Mechanical Brake System: A Mechatronic Application." Solid State Phenomena 147-149 (January 2009): 480–85. http://dx.doi.org/10.4028/www.scientific.net/ssp.147-149.480.

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An electro-mechanic brake system, which has the potentiality to be used in future cars, has been studied and a prototype of the brake system has been produced. The electro-mechanic brake system has different working principles then hydraulic brake system. Hydraulic force or air pressure is used to obtain the braking force on the wheels in the hydraulic braking systems, whereas a solenoid valve push force is used to stop the car in electro-mechanic systems. A censor controlled the RPM of the wheel and the data was passed to a micro controller and micro controller produced PWM signals according to obtained signal. Thus, push force of the solenoid valve was controlled by micro controlled according to the braking ratio. If the wheel slows down the turning speed, then micro controller stops to sending PWM signals and solenoid is relaxed until wheels turns again. This cycle continues until the all wheels are stopped. A prototype of the system has been constructed and tested. The initial results indicated that the system can be potentially used in the automotives.
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41

Faudzi, Ahmad Athif Mohd, Yaser Sabzehmeidani, and Koichi Suzumori. "Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review." Journal of Robotics and Mechatronics 32, no. 2 (April 20, 2020): 281–88. http://dx.doi.org/10.20965/jrm.2020.p0281.

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This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.
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42

Djakov, Tatjana, Ivanka Popovic, and Ljubinka Rajakovic. "Micro-electro-mechanical systems (MEMS): Technology for the 21st century." Chemical Industry 68, no. 5 (2014): 629–41. http://dx.doi.org/10.2298/hemind131008091d.

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Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.
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43

Zhang, Yanni, Yiman Han, Xin Zhao, Zhen Zhao, and Jing Pang. "Applying numerical control to analyze the pull-in stability of MEMS systems." Thermal Science 28, no. 3 Part A (2024): 2171–78. http://dx.doi.org/10.2298/tsci2403171z.

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The micro-electro-mechanical system is widely used for energy harvesting and thermal wind sensor, its efficiency and reliability depend upon the pull-in instability. This paper studies a micro-electro-mechanical system using He-Liu [34] formulation for finding its frequency-amplitude relationship. The system periodic motion, pull-in instability and pseudo-periodic motion are discussed. This paper offers a new window for security monitoring of the system reliable operation.
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44

Krisnawan, K. P. "Hopf bifurcation of actuated micro-beam nonlinear vibrations in micro electro mechanical systems." Journal of Physics: Conference Series 1320 (October 2019): 012002. http://dx.doi.org/10.1088/1742-6596/1320/1/012002.

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45

Choi, Ju Chan, Young Chan Choi, June Kyoo Lee, and Seong Ho Kong. "Micro-Electro-Mechanical-Systems-Based Micro-Ro-Boat Utilizing Steam as Propulsion Power." Japanese Journal of Applied Physics 51, no. 6S (June 1, 2012): 06FL12. http://dx.doi.org/10.7567/jjap.51.06fl12.

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46

Choi, Ju Chan, Young Chan Choi, June Kyoo Lee, and Seong Ho Kong. "Micro-Electro-Mechanical-Systems-Based Micro-Ro-Boat Utilizing Steam as Propulsion Power." Japanese Journal of Applied Physics 51 (June 20, 2012): 06FL12. http://dx.doi.org/10.1143/jjap.51.06fl12.

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47

Yao, Shi-Chune, Xudong Tang, Cheng-Chieh Hsieh, Yousef Alyousef, Michael Vladimer, Gary K. Fedder, and Cristina H. Amon. "Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development." Energy 31, no. 5 (April 2006): 636–49. http://dx.doi.org/10.1016/j.energy.2005.10.016.

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48

TSENG, AMPERE A., WILLIAM C. TANG, YUNG-CHENG LEE, and JAMES ALLEN. "NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems." Journal of Materials Processing & Manufacturing Science 8, no. 4 (April 1, 2000): 292–360. http://dx.doi.org/10.1106/nbdb-dkvq-mjhr-fetc.

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49

Tuan, Pham Anh, Nguyen Van Thien, Nguyen Van Tho, and Trinh Van Minh. "Micro-Opto-Electro-Mechanical Transducers for Measurement and Control Systems." International Journal of Electrical and Electronics Engineering 5, no. 10 (October 25, 2018): 7–11. http://dx.doi.org/10.14445/23488379/ijeee-v5i10p103.

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50

ZHAO, Zhao-Hui, Li WANG, Xian-Yun GAN, Chang-An ZHU, Cheng-Gui LIU, Jun ZHENG, and Guo-Ming XIE. "Development of Electrochemical Array Based on Micro Electro-Mechanical Systems." CHINESE JOURNAL OF ANALYTICAL CHEMISTRY (CHINESE VERSION) 41, no. 4 (2013): 621. http://dx.doi.org/10.3724/sp.j.1096.2013.20618.

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