Books on the topic 'Micro Electro Mechanical Systems'

Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-5945-2.

Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-2798-7.

Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

Bang, Lee Ki, ed. Principles of micro electro mechanical systems (MEMS). Hoboken, N.J: WILEY, 2010.

Ekwall, Britt, and Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Edited by Ekwall Britt and Cronquist Mikkel. Hauppauge, N.Y: Nova Science Publishers, 2009.

International, Conference on Micro Electro Opto Mechanical Systems and Components (5th 1996 Potsdam Germany). Micro systems technologies '96: 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996. Berlin: VDE-Verlag, 1996.

International, Conference on Micro Electro Opto Mechanic Systems and Components (6th 1998 Potsdam Germany). Micro system technologies 98: 6th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998. Berlin: VDE-Verlag, 1998.

International Conference on Micro Electro, Opto, Mechanical Systems and Components (4th 1994 Berlin, Germany). Micro system technologies '94: 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994. Edited by Reichl H, Heuberger A, Ausstellungs-Messe-Kongress-GmbH, MESAGO Messe & Kongress GmbH., and Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration. Berlin: vde-Verlag, 1994.

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., and IEEE Workshop on Micro Electro Mechanical Systems (1995 : Amsterdam, the Netherlands), eds. IEEE micro electro mechanical systems: Proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995. [New York]: Institute of Electrical and Electronics Engineers, 1995.

IEEE Robotics and Automation Council. IEEE Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots, Salt Lake City, Utah, February 20-22, 1989 ; proceedings. Piscataway, NJ: Institute of Electrical Electronics Engineers, 1989.

1973-, Turner Kimberly Lynn, American Society of Mechanical Engineers. MEMS Subdivision., and International Mechanical Engineering Congress and Exposition (2003 : Washington, D.C.), eds. Micro-electro-mechanical systems (MEMS)--2003: Presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C. New York, N.Y: American Society of Mechanical Engineers, 2003.

International Mechanical Engineering Congress and Exposition (2004 : Anaheim, Calif.), ed. Micro-electro-mechanical systems--2004: Presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California. New York, N.Y: ASME, 2004.

IEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. Piscataway, NJ: IEEE, 1993.

IEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. Piscataway, NJ: IEEE Service Center, 1994.

American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division. and International Mechanical Engineering Congress and Exposition (2005 : Orlando, Fla.), eds. Micro-electro-mechanical systems--2005: Presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida, USA. New York, N.Y: ASME, 2005.

Liwei, Lin, American Society of Mechanical Engineers. Dynamic Systems and Control Division., and International Mechanical Engineering Congress and Exposition (1998 : Anaheim, Calif.), eds. Micro-electro-mechanical systems (MEMS) 1998: Presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California. New York, N.Y: American Society of Mechanical Engineers, 1998.

IEEE, International Conference on Micro Electro Mechanical Systems (17th 2004 Maastricht Netherlands). 17th IEEE International Conference on Micro Electro Mechanical Systems: Maastricht : MEMS 2004 technical digest : January 25-29, 2004. Piscataway, N.J: IEEE, 2004.

IEEE, International Conference on Micro Electro Mechanical Systems (14th 2001 Interlaken Switzerland). The 14th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001. Piscataway N.J: Institute of Electrical and Electronics Engineers, 2001.

Taiwan) IEEE International Conference on Micro Electro Mechanical Systems (26th 2013 Taipei. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013): Taipei, Taiwan, 20-24 January 2013. Piscataway, NJ: IEEE, 2013.

IEEE International Conference on Micro Electro Mechanical Systems (20th 2007 Hyogo, Japan). Proceedings IEEE the twentieth annual International Conference on Micro Electro Mechanical Systems: Hyogo, Japan, 21-25 January 2007. Piscataway, NJ: IEEE, 2007.

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., Micromachine Center (Japan), and IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan), eds. IEEE micro electro mechanical systems: An investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994. [New York: Institute of Electrical and Electronics Engineers], 1994.

Paris, France) IEEE International Conference on Micro Electro Mechanical Systems (25th 2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012): Paris, France, 29 January - 2 February 2012. Piscataway, N.J: IEEE, 2012.

Institute of Electrical and Electronics Engineers. and IEEE Robotics and Automation Society., eds. MEMS 2003: IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003. Piscataway, N.J: IEEE, 2003.

P, Lee Abraham, American Society of Mechanical Engineers. Fluids Engineering Division., and International Mechanical Engineering Congress and Exposition (2000 : Orlando, Fla.), eds. Micro-electro-mechanical systems (MEMS), 2000: Presented at the 2000 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2000, Orlando, Florida. New York, N.Y: American Society of Mechanical Engineers, 2000.

IEEE Robotics and Automation Society., Denki Gakkai (1888), American Society of Mechanical Engineers. Dynamic Systems and Control Division., and IEEE Workshop on Micro Electro Mechanical Systems (4th : 1991 : Nara-shi, Japan), eds. IEEE micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991. New York: Institute of Electrical and Electronics Engineers, 1991.

IEEE Workshop on Micro Electro Mechanical Systems (4th 1991 Nara, Japan.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991. Piscataway, NJ: Institute of Electrical and Electronics Engineers, 1991.

IEEE International Conference on Micro Electro Mechanical Systems (13th 2000 Miyazaki, Japan). Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems: MEMS 2000 : Miyazaki, Japan, January 23-27, 2000. Piscataway N.J: Institute of Electrical and Electronics Engineers, 2000.

Calif.) IEEE International Conference on Micro Electro Mechanical Systems (27th 2014 San Francisco. 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014): San Francisco, California, USA, 26-30 January 2014. Piscataway, NJ: IEEE, 2014.

IEEE Workshop on Micro Electro Mechanical Systems (5th 1992 Travemünde, Germany). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992. Piscataway, NJ: IEEE, 1992.

IEEE Robotics and Automation Society., ed. MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems: Technical digest : Orlando, Florida, USA, January 17-21, 1999. Piscataway, NJ: IEEE, 1999.

IEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. [New York?]: Institute of Electrical and Electronics Engineers, 1990.

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). The Eleventh Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany. [New York]: Institute of Electrical and Electronics Engineers, 1998.

P, Lee Abraham, American Society of Mechanical Engineers. MEMS Subdivision., and International Mechanical Engineering Congress and Exposition (2001 : New York, N.Y.), eds. Micro-electro-mechanical systems (MEMS)--2001: Presented at the 2001 ASME International Mechanical Engineering Congress and Exposition : November 11-16, 2001, New York, New York. New York, N.Y: American Society of Mechanical Engineers, 2001.

IEEE Workshop on Micro Electro Mechanical Systems (10th 1997 Nagoya, Japan). The Tenth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997. [New York]: Institute of Electrical and Electronics Engineers, 1997.

Institute of Electrical and Electronics Engineers. and IEEE Robotics and Automation Society., eds. MEMS 2002: The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Las Vegas, Nevada, USA, January 20-24, 2002. Piscataway, N.J: IEEE, 2002.

IEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). The Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996. Piscataway, NJ: IEEE Service Center, 1996.

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: Proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany. [New York, N.Y.]: Institute of Electrical and Electronics Engineers, 1998.

IEEE International Conference on Micro Electro Mechanical Systems (18th 2005 Miami Beach, Fla.). MEMS 2005 Miami: 18th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Miami Beach, Florida, USA, January 30-February 3, 2005. Piscataway, N.J: IEEE, 2005.

ASME International Mechanical Engineering Congress and Exposition (2001 New York, N.Y.). Micro-electro-mechanical systems: MEMS -- 2001 : presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York. New York, N.Y: American Society of Mechanical Engineers, 2001.

T, Avedisian C., American Society of Mechanical Engineers. Dynamic Systems and Control Division., and International Mechanical Engineering Congress and Exposition (1996 : Atlanta, Ga.), eds. Microelectromechanical systems (MEMS): Microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia. New York, N.Y: American Society of Mechanical Engineers, 1996.

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

Elamurugan, P. Micro Electro Mechanical Systems. Notion Press, 2020.

MEMS/NEMS: Micro electro mechanical systems/nano electro mechanical systems. New York: Springer, 2005.

Mems: Micro-Electro-Mechanical Systems. Independently Published, 2021.

Motamedi, Manouchehr E., ed. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE, 2005. http://dx.doi.org/10.1117/3.2265061.

MOEMS: Micro-opto-electro-mechanical systems. Bellingham, WA: SPIE Press, 2005.

IEEE International Conference on Micro Electro Mechanical Systems. 2000 IEEE Micro Electro Mechanical Systems. Institute of Electrical & Electronics Enginee, 2000.

Allen, James J. Micro Electro Mechanical System Design (Mechanical Engineering). CRC, 2005.