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Relevant bibliographies by topics / Micro Electro Mechanical Systems

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Academic literature on the topic 'Micro Electro Mechanical Systems'

Author: Grafiati

Published: 4 June 2021

Last updated: 25 May 2024

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Journal articles on the topic "Micro Electro Mechanical Systems"

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Motamedi, M. Edward. "Micro-opto-electro-mechanical systems." Optical Engineering 33, no. 11 (November 1, 1994): 3505. http://dx.doi.org/10.1117/12.181572.

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Xie, Huikai, and Frederic Zamkotsian. "Editorial for the Special Issue on Optical MEMS." Micromachines 10, no. 7 (July 7, 2019): 458. http://dx.doi.org/10.3390/mi10070458.

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Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]

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Xu, Kaikai, Lukas W. Snyman, Jean-Luc Polleux, Hongda Chen, and Guannpyng Li. "Silicon Light-Emitting Device with Application in on-Chip Micro-opto-electro-mechanical and Chemical-opto-electro Micro Systems." International Journal of Materials, Mechanics and Manufacturing 3, no. 4 (2015): 282–86. http://dx.doi.org/10.7763/ijmmm.2015.v3.211.

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Mamilla, Venkata Ramesh, and Kommuri Sai Chakradhar. "Micro Machining for Micro Electro Mechanical Systems (MEMS)." Procedia Materials Science 6 (2014): 1170–77. http://dx.doi.org/10.1016/j.mspro.2014.07.190.

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Ravichandran, Niranjani, and R. Subhashini. "Micro electro mechanical systems in nephrology." International Journal of Bioinformatics Research and Applications 17, no. 5 (2021): 434. http://dx.doi.org/10.1504/ijbra.2021.10043923.

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Ravichandran, Niranjani, and R. Subhashini. "Micro electro mechanical systems in nephrology." International Journal of Bioinformatics Research and Applications 17, no. 5 (2021): 434. http://dx.doi.org/10.1504/ijbra.2021.120198.

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Gauthier, Robert C., R. Niall Tait, and Mike Ubriaco. "Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications." Applied Optics 41, no. 12 (February 20, 2002): 2361. http://dx.doi.org/10.1364/ao.41.002361.

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Helveg, S. "Micro-Electro-Mechanical Systems for Electron Microscopy in Catalysis." Microscopy and Microanalysis 19, S2 (August 2013): 1494–95. http://dx.doi.org/10.1017/s143192761300946x.

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Cho, Chong Du, and Byung Ha Lee. "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems." Key Engineering Materials 306-308 (March 2006): 1247–52. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1247.

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In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

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Meng, Guang, Wen-Ming Zhang, Hai Huang, Hong-Guang Li, and Di Chen. "Micro-rotor dynamics for micro-electro-mechanical systems (MEMS)." Chaos, Solitons & Fractals 40, no. 2 (April 2009): 538–62. http://dx.doi.org/10.1016/j.chaos.2007.08.003.

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Dissertations / Theses on the topic "Micro Electro Mechanical Systems"

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Dean, Julian Sebastian. "Magnetic micro electro-mechanical systems." Thesis, University of Sheffield, 2007. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.444255.

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Fu, Y. "Micro-electro-mechanical systems and nanotechnology." Thesis, University of Cambridge, 2004. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.599251.

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Micro-Electro-Mechanical-System (MEMS) and Nanotechnology have both received significant attention in recent years due to their potential for manufacturing highly miniaturised devices which consume less raw materials and energy in their production, and function with greater efficiency, speed, and reliability. The first project described in this thesis concerns the development of a novel, low cost, contamination-free nanofabrication system. This system is enabled by a MEMS-based device which has the dual functions of a high-precision AFM (Atomic Force Microscope) cantilever probe and a shadow mask. This MEMS device, which is referred to as the Nanostencil device in this thesis, has been integrated with nanoscale apertures and an AFM scanning tip using the Focussed Ion Beam (FIB) technique. The finished Nanostencil device has been used successfully for both parallel nanoscale depositions and high precision nanoscale alignments. The second project presented in this thesis is concerned with the application of MEMS technology to benefit the aircraft industry by providing a compact and robust pressure sensor capable of measuring high frequency turbulent flow velocities with improved accuracy. The information provided by such probes could be of considering help in improving the design of the next generation of aeroplanes. With the help of finite-element analysis, a pressure sensor has been designed which has a footprint of 0.7 mm, a frequency response of a few megahertz and a high thermal stability. The fabrication of this prototype has been realised through a specially developed process sequence utilising a Deep Reactive-Ion-Etching (DRIE) system. Mechanical testing of the deflection versus pressure response of the sensor provides preliminary indications that the fabricated device meets the design requirements.

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Wang, Xuan-Qi Tai Yu-Chong. "Integrated parylene micro electro mechanical systems (MEMS) /." Diss., Pasadena, Calif. : California Institute of Technology, 2000. http://resolver.caltech.edu/CaltechETD:etd-09062005-112235.

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Zohur, Abdul. "Micro-Electro-Mechanical Systems (MEMS) Integrated Frequency Reconfigurable Antenna." DigitalCommons@USU, 2013. https://digitalcommons.usu.edu/etd/1731.

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In this paper, the design, analysis, and characterization of reconfigurable antennas based on radio frequency micro-electro-mechanical systems (RF MEMS) operating in the United States' public safety (PS) bands are presented. The design methodology of these antennas, which are different from the normal antenna design, is also reported. In this thesis, two electrically small reconfigurable antenna designs have been presented, with two and three modes of operation, and central frequencies of 718 and 4960 MHz and of 857,809 and 4960 MHz, respectively. The maximum frequency tunable ratio achieved in these designs is 7. The recongurability between the modes is achieved by one and three RF MEMS switches in all three designs. These switches enable a change in the length of the current flow path, thereby changing the resonance frequencies. The measurement results for impedance and radiation characteristics of the fabricated antennas prototypes are also presented, and agree reasonably well with the simulations results from An-soft HFSS.

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Morgan, Christopher James. "MICRO ELECTRO-DISCHARGE MACHINING: TECHNIQUES AND PROCEDURES FOR MICRO FABRICATION." Lexington, Ky. : [University of Kentucky Libraries], 2004. http://lib.uky.edu/ETD/ukymeen2004t00197/MicroEDM.pdf.

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Thesis (m.s.)--University of Kentucky, 2004.
Title from document title page (viewed Jan. 5, 2005). Document formatted into pages; contains viii, 77p. : ill. Includes abstract and vita. Includes bibliographical references (p. 74-76).

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Martyniuk, Mariusz. "Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates." University of Western Australia. School of Electrical, Electronic and Computer Engineering, 2006. http://theses.library.uwa.edu.au/adt-WU2007.0042.

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[Truncated abstract] The salient feature of next generation infrared (IR) on-chip integrated sensors is likely to be sensitivity in a narrow wavelength band that is tuneable over a selected range of the IR spectrum. It is proposed that this can be achieved by the integration of present-day HgCdTe IR detectors with thin-film based microelectro- mechanical systems (MEMS) optical mirror technology. Narrow-band sensitivity is obtained by optical resonance phenomena within a Fabry-Perot (FP) cavity, that is created by two Bragg reflectors and is monolithically integrated with an HgCdTe IR detector. Electrostatic actuation of the thin-film membrane supported Bragg reflector is the means of providing wavelength discrimination of the incident IR photons which, for example, could be used for target discrimination or detection of various chemical/biological species via identification of narrow spectral features . . . The outcomes from this thesis have been incorporated into a monolithic integrated technology comprising low-temperature MEMS and HgCdTe IR detector technology. The integrated technology has been shown to be viable, and successful prototypes have been fabricated. Structural properties of the SiNx, SiOx, and Ge layers encompassed in the suspended IR reflector have allowed for IR photon detection in a narrow wavelength band with full-width at halfmaximum of ∼100nm that is tunable over a wavelength range from 2.2 to 1.85μm using a maximum tuning voltage of only 7.5V. Although the thesis objectives have been focused on a specific application related to multi-spectral IR detection technology as a demonstration vehicle, the findings of this thesis are directly applicable to any MEMS technologies that are to be merged with temperaturesensitive substrates/materials.

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Assadsangabi, Babak. "Investigation and development of ferrofluid enabled micro-electro-mechanical systems." Thesis, University of British Columbia, 2014. http://hdl.handle.net/2429/50339.

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Ferrofluids are magnetic fluids that can be manipulated using magnetic field. Ferrofluids have unique properties that have led to various interesting applications. Although, currently they are being used in few commercial products in macro-scale domain, there has been limited success in their applications in micro- devices and microactuators in specific. Literature review shows various efforts to develop ferrofluid-based microactuators however, most of them have utilized non-integrated means (e.g. external magnets or solenoids) to provide the necessary magnetic field for ferrofluid manipulation that inherently limit their application as a micro-device. Moreover, previous ferrofluid-based microactuators with integrated solutions (e. g. microfabricated coils) could only provide unidirectional forces which limited their application range. In the present thesis, development of integrated ferrofluid-based microactuators is investigated. A new actuation method that uses planar spiral coils with bias fields is proposed to enable bidirectional ferrofluid manipulation. To demonstrate the potentials of the proposed actuation method, two proof-of-concept devices were developed. Active mirror cells with variable reflectivity were demonstrated as the first device and then a variable planar inductor with ferrofluid as a moving magnetic core was developed and characterized. Another interesting application of ferrofluids in passive levitation of permanent magnets is also investigated for moving magnet based microactuators. Using this levitation mechanism a structurally simple and reliable microbearing is demonstrated. In order to demonstrate the effectiveness of such microbearing, a linear micromotor is first characterized and demonstrated. Also, frictional force and load carrying capacity of such microbearing is investigated showing very low frictional forces with good load bearing capabilities. Given the promising results in the developed linear micromotor, a rotary micromotor with small axial size is developed for minimally invasive endoscopy applications. The characterization of developed prototype shows its potential to be used for real time medical imaging.
Applied Science, Faculty of
Electrical and Computer Engineering, Department of
Embargo expired 2014-02-28. Embargo reinstated to 2015-03-31 by tara.stephens@ubc.ca on 2015-03-02 as per G+PS
Graduate

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Leong, Jonathan Yonghui. "Lubrication and tribological performance optimizations for micro-electro-mechanical systems." Thesis, Imperial College London, 2013. http://hdl.handle.net/10044/1/18067.

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Lubricants and lubrication have been of great interest to mankind since the introduction of machines with sliding/rolling surfaces into everyday life. With the recent trend of miniaturization, Micro-Electro-Mechanical Systems (MEMS) have taken centre stage, featuring components with scales in dimensions as small as nanometres. In this PhD study, two approaches to solving MEMS tribology problems have been pursued. First, a novel direct lubrication method using well-known lubricants such as perfluoropolyether (PFPE) and multiply alkylated cyclopentane (MAC) was developed and tested using reciprocating sliding and actual MEMS tribometry. The second approach utilized the concept of hydrodynamic lubrication and selective surface modification for MEMS. To combat spreading and starvation of lubricants in small contacts such as in MEMS, selective modification of the silicon surface with hydrophobic (non-wetting) and hydrophilic (wetting) portions was carried out and found to increase the force required to move a droplet of lubricant from a designated location on the surface. Octadecylamine and dodecylamine were also used as additives to successfully induce autophobicity in hexadecane, and the various spreading behaviours investigated. In conclusion, several new approaches to tackling tribological problems in MEMS have been researched. These methods are easily adapted to suitable MEMS devices and greatly reduce adhesion and friction, and increase wear and device life by several orders of magnitude.

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Yildirim, Alper. "Development Of A Micro-fabrication Process Simulator For Micro-electro-mechanical-systems(mems)." Master's thesis, METU, 2005. http://etd.lib.metu.edu.tr/upload/12606850/index.pdf.

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ABSTRACT DEVELOPMENT OF A MICRO-FABRICATION PROCESS SIMULATOR FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) Yildirim, Alper M.S, Department of Mechanical Engineering Supervisor: Asst. Prof. Dr. Melik Dö
len December 2005, 140 pages The aim of this study is to devise a computer simulation tool, which will speed-up the design of Micro-Electro-Mechanical Systems by providing the results of the micro-fabrication processes in advance. Anisotropic etching along with isotropic etching of silicon wafers are to be simulated in this environment. Similarly, additive processes like doping and material deposition could be simulated by means of a Cellular Automata based algorithm along with the use of OpenGL library functions. Equipped with an integrated mask design editor, complex mask patterns can be created by the software and the results are displayed by the Cellular Automata cells based on their spatial location and plane. The resultant etched shapes are in agreement with the experimental results both qualitatively and quantitatively. Keywords: Wet Etching, Anisotropic Etching, Doping, Cellular Automata, Micro-fabrication simulation, Material Deposition, Isotropic Etching, Dry Etching, Deep Reactive Ion Etching

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Tsao, Che-Chih. "Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems." Thesis, Massachusetts Institute of Technology, 1994. http://hdl.handle.net/1721.1/38039.

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Books on the topic "Micro Electro Mechanical Systems"

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Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-5945-2.

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Huang, Qing-An, ed. Micro Electro Mechanical Systems. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-2798-7.

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Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

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Micro electro mechanical system design. Boca Raton: Taylor & Francis, 2005.

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Bang, Lee Ki, ed. Principles of micro electro mechanical systems (MEMS). Hoboken, N.J: WILEY, 2010.

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Ekwall, Britt, and Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Edited by Ekwall Britt and Cronquist Mikkel. Hauppauge, N.Y: Nova Science Publishers, 2009.

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International, Conference on Micro Electro Opto Mechanical Systems and Components (5th 1996 Potsdam Germany). Micro systems technologies '96: 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996. Berlin: VDE-Verlag, 1996.

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International, Conference on Micro Electro Opto Mechanic Systems and Components (6th 1998 Potsdam Germany). Micro system technologies 98: 6th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998. Berlin: VDE-Verlag, 1998.

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International Conference on Micro Electro, Opto, Mechanical Systems and Components (4th 1994 Berlin, Germany). Micro system technologies '94: 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994. Edited by Reichl H, Heuberger A, Ausstellungs-Messe-Kongress-GmbH, MESAGO Messe & Kongress GmbH., and Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration. Berlin: vde-Verlag, 1994.

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IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., and IEEE Workshop on Micro Electro Mechanical Systems (1995 : Amsterdam, the Netherlands), eds. IEEE micro electro mechanical systems: Proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995. [New York]: Institute of Electrical and Electronics Engineers, 1995.

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Book chapters on the topic "Micro Electro Mechanical Systems"

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, et al. "MEMS (Micro-electro-Mechanical Systems)." In Encyclopedia of Nanotechnology, 1305. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100393.

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He, Yunqian, Aisheng Yu, Xuanjie Liu, and Yuelin Wang. "Micro Electro-Mechanical Systems (MEMS)." In Handbook of Integrated Circuit Industry, 895–911. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-99-2836-1_48.

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Kavallaris, Nikos I., and Takashi Suzuki. "Micro-Electro-Mechanical-Systems (MEMS)." In Non-Local Partial Differential Equations for Engineering and Biology, 3–63. Cham: Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-67944-0_1.

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Crary, Selden, and Sridhar Kota. "Conceptual Design of Micro-Electro-Mechanical Systems." In Micro System Technologies 90, 17–22. Berlin, Heidelberg: Springer Berlin Heidelberg, 1990. http://dx.doi.org/10.1007/978-3-642-45678-7_3.

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Kuwano, Hiroki. "Ion Beam Techniques for Micro Electro Mechanical Systems." In Micro System Technologies 90, 538–44. Berlin, Heidelberg: Springer Berlin Heidelberg, 1990. http://dx.doi.org/10.1007/978-3-642-45678-7_75.

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Cho, Chong Du, and Byung Ha Lee. "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems." In Fracture and Strength of Solids VI, 1247–52. Stafa: Trans Tech Publications Ltd., 2006. http://dx.doi.org/10.4028/0-87849-989-x.1247.

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Wallace, David B. "Manufacturing of Micro-Electro-Mechanical Systems (MEMS)." In Inkjet Technology for Digital Fabrication, 141–58. Chichester, UK: John Wiley & Sons, Ltd, 2014. http://dx.doi.org/10.1002/9781118452943.ch6.

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Rathaur, Anand Singh, Jitendra Kumar Katiyar, and Vinay Kumar Patel. "Tribo-mechanical Aspects in Micro-electro Mechanical Systems (MEMS)." In Tribology in Materials and Applications, 243–59. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-47451-5_13.

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Torres, Pedro J. "An Electrostatically Actuated Micro-electro-mechanical System." In Atlantis Briefs in Differential Equations, 15–20. Paris: Atlantis Press, 2015. http://dx.doi.org/10.2991/978-94-6239-106-2_2.

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Ansorge, F., J. Wolter, H. Hanisch, and H. Reichl. "Micro-Opto-Electro-Mechanical-Systems (MOEMS) in Automotive Applications." In Advanced Microsystems for Automotive Applications Yearbook 2002, 146–56. Berlin, Heidelberg: Springer Berlin Heidelberg, 2002. http://dx.doi.org/10.1007/978-3-642-18213-6_18.

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Conference papers on the topic "Micro Electro Mechanical Systems"

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Wu, Ming C. "Micro-Opto-Electro-Mechanical Systems." In Seventh International Conference and Exposition on Engineering, Construction, Operations, and Business in Space. Reston, VA: American Society of Civil Engineers, 2000. http://dx.doi.org/10.1061/40479(204)61.

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Janakos, C. N., F. T. Goericke, and A. P. Pisano. "Micro-Electro-Mechanical Systems (MEMS) Micro-Heater." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-85814.

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This research addresses the problem of not having access to a localized heating device that easily integrates a variety of testing needs with MEMS packaging. This device can heat MEMS while simultaneously in vacuum, exposed to harsh gases and on a rate table. The solution is a micro-heater built directly into its packaging with the capability to test MEMS at vacuum, which can be pumped down to 1 Torr in a fraction of a second and heats the device to approximately 170 degrees Celsius to simulate the temperatures MEMS devices endure. This packaging integrated with a testing device can accommodate a broad range of MEMS devices.

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"Proceedings of Micro Electro Mechanical Systems." In Proceedings of Micro Electro Mechanical Systems. IEEE, 1993. http://dx.doi.org/10.1109/memsys.1993.296934.

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Seshia, A. "Resonance in micro-electro-mechanical systems." In 2007 International Workshop on Physics of Semiconductor Devices (IWPSD '07). IEEE, 2007. http://dx.doi.org/10.1109/iwpsd.2007.4472609.

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"Proceedings IEEE Micro Electro Mechanical Systems. 1995." In Proceedings IEEE Micro Electro Mechanical Systems. 1995. IEEE, 1995. http://dx.doi.org/10.1109/memsys.1995.472609.

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Tadigadapa, Srinivas, and Nader Najafi. "Reliability of micro-electro-mechanical systems (MEMS)." In Micromachining and Microfabrication, edited by Rajeshuni Ramesham. SPIE, 2001. http://dx.doi.org/10.1117/12.443002.

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Esashi, Masayoshi, and Takahito Ono. "Application Oriented Micro-Nano Electro Mechanical Systems." In 2007 Digest of papers Microprocesses and Nanotechnology. IEEE, 2007. http://dx.doi.org/10.1109/imnc.2007.4456313.

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Kriebel, David, Henry Schmidt, Michael Schiebold, Markus Freitag, Benjamin Arnold, Michael Naumann, and Jan E. Mehner. "Design Automation for Micro-Electro-Mechanical Systems." In 2018 International Semiconductor Conference (CAS). IEEE, 2018. http://dx.doi.org/10.1109/smicnd.2018.8539777.

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Esashi, Massayoshi. "Application Oriented Micro-Nano Electro Mechanical Systems." In CANEUS 2004 Conference on Micro-Nano-Technologies. Reston, Virigina: American Institute of Aeronautics and Astronautics, 2004. http://dx.doi.org/10.2514/6.2004-6747.

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Möllendorf, Manfred. "Micro-Electro-Mechanical-Systems and Industrial Applications." In ASME 1996 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1996. http://dx.doi.org/10.1115/imece1996-0692.

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Abstract This paper gives an overview of Micro-Electro-Mechanical devices that are in the industrial stage for application in the automotive and the communication industry. We present a monolitic integrated pressure sensor, a massflow sensor and a monolithic integrated acceleration sensor. Also introduced is a novel process for surface micromachining which is offered as a foundry service to companies and universities. In the second part important optoelectrical components for the optical path network will be presented.

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Reports on the topic "Micro Electro Mechanical Systems"

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Bianco, Stephen G. Micro-Electro-Mechanical Systems: A Catalyst for Army Transformation. Fort Belvoir, VA: Defense Technical Information Center, April 2001. http://dx.doi.org/10.21236/ada394499.

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Smith, Gabriel, Sarah Bedair, Brian Schuster, and William Nothwang. Haltere Mechanics and Mechanical Logic for Micro-Electro-Mechanical Systems (MEMS) Scale Bio-inspired Navigation Sensors. Fort Belvoir, VA: Defense Technical Information Center, February 2012. http://dx.doi.org/10.21236/ada582586.

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Lee, Luke P., Albert P. Pisano, Lisa A. Pruitt, and Daniel T. Chiu. Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems. Fort Belvoir, VA: Defense Technical Information Center, June 2005. http://dx.doi.org/10.21236/ada436118.

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Comtois, John, Anis Husain, John Pollard, Charles Stevens, Steven Walker, John Zavada, Robert Leheny, Doran Smith, William Tang, and Elias Towe. Special Technology Area Review on Micro-Opto-Electro-Mechanical-Systems (MOEMS). Fort Belvoir, VA: Defense Technical Information Center, December 1997. http://dx.doi.org/10.21236/ada445320.

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Dorfman, B. F., P. Asoka-Kumar, Q. Zhu, F. H. Pollak, and J. Z. Wan. Hard quasiamorphous carbon -- A prospective construction material for micro-electro-mechanical systems. Office of Scientific and Technical Information (OSTI), January 1996. http://dx.doi.org/10.2172/432982.

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Datskos, Panos G., and Michael J. Sepaniak. Hybrid Micro-Electro-Mechanical Systems for Highly Reliable and Selective Characterization of Tank Waste. Office of Scientific and Technical Information (OSTI), June 2004. http://dx.doi.org/10.2172/838740.

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Panos G. Datskos, Michael J. Sepaniak, Nickolay Lavrik, Pampa Dutta, and Mustafa Culha. Hybrid Micro-Electro-Mechanical Systems for Highly Reliable and Selective Characterization of Tank Waste. Office of Scientific and Technical Information (OSTI), December 2005. http://dx.doi.org/10.2172/861904.

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Perry, Scott S. Miniaturization Science for Space: Lubrication of Micro-Electro-Mechanical Systems (MEMS) for Space Environments. Fort Belvoir, VA: Defense Technical Information Center, August 2006. http://dx.doi.org/10.21236/ada458531.

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Morse, J. D., J. C. Koo, R. T. Graff, A. F. Jankowski, and J. P. Hayes. Field-emission cathode micro-electro-mechanical system technology for sensors, diagnostics, and microelectronics. Office of Scientific and Technical Information (OSTI), March 1998. http://dx.doi.org/10.2172/305303.

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Cox, James V., Sam A. Candelaria, Michael Thomas Dugger, Michelle Ann Duesterhaus, Danelle Mary Tanner, Shannon J. Timpe, James Anthony Ohlhausen, et al. Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS). Office of Scientific and Technical Information (OSTI), June 2006. http://dx.doi.org/10.2172/923082.

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