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Relevant bibliographies by topics / Micro-electro mechanical system - Radio frequency

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Academic literature on the topic 'Micro-electro mechanical system - Radio frequency'

Author: Grafiati

Published: 6 September 2023

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Journal articles on the topic "Micro-electro mechanical system - Radio frequency"

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Li Muhua, 李沐华, 赵嘉昊 Zhao Jiahao, and 尤政 You Zheng. "Loss mechanisms of radio frequency micro-electro-mechanical systems capacitive switches." High Power Laser and Particle Beams 27, no. 2 (2015): 24132. http://dx.doi.org/10.3788/hplpb20152702.24132.

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Shirane, Atsushi, Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, and Kazuya Masu. "A Study of Digitally Controllable Radio Frequency Micro Electro Mechanical Systems Inductor." Japanese Journal of Applied Physics 50, no. 5S1 (May 1, 2011): 05EE01. http://dx.doi.org/10.7567/jjap.50.05ee01.

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Shirane, Atsushi, Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, and Kazuya Masu. "A Study of Digitally Controllable Radio Frequency Micro Electro Mechanical Systems Inductor." Japanese Journal of Applied Physics 50, no. 5 (May 20, 2011): 05EE01. http://dx.doi.org/10.1143/jjap.50.05ee01.

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Cho, Hyunok, Minkyu Yoon, and Jae Yeong Park. "Radio Frequency Micro-Electro-Mechanical System Capacitive Shunt Switch Using Actively Formed Wrinkled Hinge Structures." Journal of Nanoscience and Nanotechnology 16, no. 11 (November 1, 2016): 11425–28. http://dx.doi.org/10.1166/jnn.2016.13522.

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Sharma, Ashish Kumar, and Navneet Gupta. "Analytical Modeling for Spring Constant of Non-Uniform Serpentine Radio Frequency-Micro Electro Mechanical System Switch." Advanced Science, Engineering and Medicine 5, no. 12 (December 1, 2013): 1322–25. http://dx.doi.org/10.1166/asem.2013.1433.

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Sampe, Jahariah, Noor Hidayah Mohd Yunus, Jumril Yunas, and Ahmad G. Ismail. "Design and performance of radio frequency micro energy harvesting MEMS antenna for low power electronic devices." Jurnal Kejuruteraan 35, no. 2 (March 30, 2023): 265–73. http://dx.doi.org/10.17576/jkukm-2023-35(2)-01.

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Radio Frequency (RF) ambient energy has become the choice as a source of green energy for energy harvesting systems due to the existence of electromagnetic wave signals that are always present in the environment without incurring cost. This RF energy is very low usually less than 190 µW. However, the antenna needs to supply sufficient power to the RF energy harvesting system to power low-power electronic devices. Therefore, the antenna needs to be designed to capture and transfer energy to the RF micro energy harvesting circuit to supply optimal power to the electronic device. The micro-strip antenna design using Micro Electro Mechanical (MEMS) fabrication technology process is the most suitable choice because of its small size, light weight and high performance. This MEMS antenna design uses Computer Simulation TechnologyMicrowave-Studio software(CST-MWS). Comparisons were made for four types of antennas namely silicon surface micromachine, silicon bulk micro-machine with air cavity, glass surface micro-machine and RT/Duroid 5880 as reference. The simulation results show that the glass surface micro-machine antenna is the smallest in size compared to the other three antennas. The return loss of this antenna is also better which is increased by 55.1% and 5.6% compared to silicon surface micro-machine antennas and conventional RT/Duroid antennas respectively. The antenna also has a large bandwidth of 117 MHz, a gain of more than 5 dB and a direction of more than 5 dBi. The glass surface micro-machine antenna has been successfully fabricated using MEMS technology which produces a transparent antenna measuring (L/W) 19 mm x 19 mm. This small sized MEMS antenna is highly sensitive and highly effective for capturing ambient RF signals and is capable of supplying sufficient power to the RF energy harvester system.

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Mizuochi, Yutaka, Shuhei Amakawa, Noboru Ishihara, and Kazuya Masu. "Radio Frequency Micro Electro Mechanical Systems Inductor Configurations for Achieving Large Inductance Variations and HighQ-factors." Japanese Journal of Applied Physics 49, no. 5 (May 20, 2010): 05FG02. http://dx.doi.org/10.1143/jjap.49.05fg02.

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Figur, S. A., F. van Raay, R. Quay, L. Vietzorreck, and V. Ziegler. "Simulation of RF MEMS based matching networks and a single pole double throw switch for Multiband T/R Modules." Advances in Radio Science 11 (July 4, 2013): 197–206. http://dx.doi.org/10.5194/ars-11-197-2013.

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Abstract. This work presents concepts and designs for two essential components of a frequency agile transmit and receive module based on Radio Frequency Micro Electro Mechanical System (RF MEMS) switches for the frequency range from 3.5 GHz up to 8.5 GHz. The advantages of a variable power amplifier (PA) matching compared to a fixed broadband solution are examined and discussed in context with the designed components. To demonstrate the principle functionality, an assembly concept is presented, which allows for the integration of a frequency agile 6 W power amplifier with surrounding components like phase shifters, switches and antennas. An RF MEMS switching element is introduced as a high isolation polarization switch, featuring low insertion loss as well as almost no DC power consumption.

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Sheng, Zhong Qi, Ze Zhong Liang, Chao Biao Zhang, and Liang Dong. "LabVIEW-Based Wireless Monitoring System of CNC Machine Tools." Applied Mechanics and Materials 121-126 (October 2011): 2075–79. http://dx.doi.org/10.4028/www.scientific.net/amm.121-126.2075.

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As the development of industry wireless networks, sensor network, innovative sensors, radio frequency identification (RFID), and micro-electro-mechanical system (MEMS) technologies, the industry sector has made great progress in data acquisition, treatment, transfer and analysis, greatly expanded people’s ability to access information, and to control and use them. This paper developed a wireless data acquisition and storage system of CNC machine tools based on LabVIEW graphical programming language and IEEE 802.11 wireless communication protocol, effectively expanded the ability to access and use the CNC machine status information; solved the problem of data collection caused by the environment complexity of manufacture workshop and the hardness of wiring; eliminated the dead zone of manufacture workshop in the processing of the data acquisition of state information of bottom processing equipment; made the bottom machining unit no longer be the information island for manufacturing enterprises.

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Papandreou, Eleni, George Papaioannou, and Tomas Lisec. "A correlation of capacitive RF-MEMS reliability to AlN dielectric film spontaneous polarization." International Journal of Microwave and Wireless Technologies 1, no. 1 (February 2009): 43–47. http://dx.doi.org/10.1017/s1759078709000154.

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This paper investigates the effect of spontaneous polarization of magnetron-sputtered aluminum nitride on the electrical properties and reliability of Radio Frequency – Micro-Electro-Mechanical Systems capacitive switches. The assessment is performed with the aid of application of thermally stimulated polarization currents in metal-insulator-metal capacitors and temperature dependence of device capacitance. The study reveals the presence of a surface charge, which is smaller than that expected from material spontaneous polarization, but definitely is responsible for the low degradation rate under certain bias polarization life tests.

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Dissertations / Theses on the topic "Micro-electro mechanical system - Radio frequency"

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Kifle, Fiseha Teweldebrhan. "Modeling, fabrication and characterization of RF mems–based inductors and thin–film bulk acoustic resonators." Thesis, IIT Delhi, 2016. http://localhost:8080/iit/handle/2074/7006.

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Kim, Tae Young [Verfasser], Thomas [Akademischer Betreuer] Eibert, Thomas [Gutachter] Eibert, and Georg [Gutachter] Fischer. "Radio Frequency Device and System Design Using Radio Frequency Switches Based on Micro Electro Mechanical Systems / Tae Young Kim ; Gutachter: Thomas Eibert, Georg Fischer ; Betreuer: Thomas Eibert." München : Universitätsbibliothek der TU München, 2018. http://d-nb.info/1167402235/34.

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Kim, Tae Young Verfasser], Thomas [Akademischer Betreuer] [Eibert, Thomas [Gutachter] Eibert, and Georg [Gutachter] Fischer. "Radio Frequency Device and System Design Using Radio Frequency Switches Based on Micro Electro Mechanical Systems / Tae Young Kim ; Gutachter: Thomas Eibert, Georg Fischer ; Betreuer: Thomas Eibert." München : Universitätsbibliothek der TU München, 2018. http://d-nb.info/1167402235/34.

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Proffitt, Donnie E. II. "EXPERIMENTAL INVESTIGATION TO INFORM OPTIMAL CONFIGURATIONS FOR DYNAMIC NEAR-FIELD PASSIVE UHF RFID SYSTEMS." UKnowledge, 2013. http://uknowledge.uky.edu/me_etds/29.

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RFID has been characterized as a “disruptive technology” that has the potential to revolutionize numerous key sectors. A key advantage of passive RFID applications is the ability to wirelessly transmit automatic identification and related information using very little power. This paper presents an experimental investigation to inform the optimal configuration for programming passive ultra-high frequency (UHF) RFID media in dynamic applications. Dynamic programming solutions must be designed around the tag’s functionality, the physical programming configuration and environment. In this investigation, we present a methodology to determine an optimal configuration to maximize the systems programming efficiency for dynamic applications.

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Silva, Maurício Weber Benjó da 1980. "MEMS-PCB : tecnologia e implementação fisica de micro-chaves em placa de circuito impresso para aplicação em RF e micro-ondas." [s.n.], 2009. http://repositorio.unicamp.br/jspui/handle/REPOSIP/261506.

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Orientador: Luiz Carlos Kretly
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação
Made available in DSpace on 2018-08-14T12:34:11Z (GMT). No. of bitstreams: 1 Silva_MauricioWeberBenjoda_M.pdf: 7910629 bytes, checksum: ba689f61e380994adce43b3aad0b347c (MD5) Previous issue date: 2009
Resumo: O desenvolvimento de chaves MEMS (Micro Electro Mechanical System) de RF, usando os conceitos e a tecnologia de placa de circuito impresso (PCB) é objeto desta pesquisa. Foram fabricadas micro-chaves na configuração paralela, sobre guias de onda coplanares (CPW). Recentemente, suas aplicações vêm sendo direcionadas a circuitos mais sofisticados, onde são monoliticamente integrados com outros componentes de RF, como antenas e deslocadores de fase. As chaves desenvolvidas são projetadas para operar com baixa tensão de ativação, e fabricadas usando a técnica surface micromachining, que consiste em construir as estruturas em camadas de filmes finos, e removendo as camadas sacrificiais até a liberação da parte flexível do dispositivo. Neste trabalho é apresentada toda a metodologia do projeto, incluindo as simulações eletromecânicas e eletromagnéticas das chaves MEMS em PCB, bem como s caracterizações. As chaves mostraram desempenho compatível com dispositivos equivalentes comerciais de RF, apresentando larga banda de operação de 1,8 - 18 GHz. Tendo em vista o desempenho físico e operacional dos dispositivos fabricados, essa tecnologia mostra-se viável com tecnologias dominadas localmente e se aplica tanto para Rádio Freqüência como para micro-ondas.
Abstract: The development of RF MEMS (Micro Electro Mechanical System) switches, using the concepts and technology of Printed Circuited Board (PCB) is the object of this research. Micro switches in the shunt configuration through the Coplanar Waveguide (CPW) were manufactured. Recently, its applications have been directed to more sophisticated circuits, which are monolithic integrated with other RF components such as antennas and phase shifters. The developed switches are designed to operate with low actuation voltage and manufactured using the surface micromachining technique, which consists to build the structures in thin film layers, and removing the sacrificial layers to the release of the flexible device part. In this work is presented all the methodology of the project, including the electromechanical and electromagnetic simulations of the MEMS switches on PCB, as well as the characterizations. The switches had shown compatible performance when compared with equivalent RF devices available in the market, showing broadband operation from 1,8 - 18 GHz. Due the physical and operational performance of the manufactured devices, this technology shows viable with locally known technologies and feasible for applications in both Radio Frequency and microwave.
Mestrado
Eletrônica, Microeletrônica e Optoeletrônica
Mestre em Engenharia Elétrica

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Silva, Andre Tavora de Albuquerque. "Desenvolvimento de tecnologia de dispositivos chaves MEMS - MicroelectromechanicalSystems - para RF - Radio Frequencia - e novas topologias para circuitos integrados CMOS de RF em sub-sistemas de entrada de radio receptores." [s.n.], 2008. http://repositorio.unicamp.br/jspui/handle/REPOSIP/260965.

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Orientador: Luiz Carlos Kretly
Tese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação
Made available in DSpace on 2018-08-11T01:55:52Z (GMT). No. of bitstreams: 1 Silva_AndreTavoradeAlbuquerque_D.pdf: 5543671 bytes, checksum: 26990143f84fbd9e80d60304ebc8febc (MD5) Previous issue date: 2008
Resumo: Este trabalho apresenta dois tópicos de pesquisa, o primeiro é referente ao projeto e desenvolvimento da tecnologia de fabricação de Chaves MEMS (Micro Electro Mechanical System) de RF e o segundo é o projeto de circuitos integrados. No que se refere a chaves MEMS, descreve-se o processo e a metodologia para projeto de Chaves MEMS paralela sobre linha de transmissão coplanar (CPW). A estrutura é composta de uma ponte metálica suspensa em ambos os lados por dois postes metálicos conectados ao plano de terra. As chaves são projetadas para uma baixa tensão de ativação (16 V) e com larga banda de operação em freqüência (400 MHz ¿ 4GHz) possibilitando seu uso na maioria dos padrões de sistemas de comunicação. Também é descrita a metodologia do projeto auxiliado por simulações eletromecânicas e eletromagnéticas e finalmente é apresentada a caracterização de 4 chaves construídas. Após extensa pesquisa na literatura técnico-científica, foi identificado que este é o primeiro trabalho no Brasil dedicado ao desenvolvimento de tecnologia de fabricação de chaves MEMS. Os projetos de circuitos integrados foram realizados em tecnologia CMOS 0,35 µm e incluem: multiplicador de tensão e oscilador em anel, chaveador SPDT (Single Pole Double Through), amplificador de baixo ruído e modulador BPSK. Sendo os circuitos multiplicador de tensão e oscilador em anel projetados para aplicações em chaves MEMS. Os circuitos SPDT, amplificador de baixo ruído e modulador BPSK são parte integrante de Front-End de RF, com recepção em 1,8 GHz (banda D - GSM) e transmissão em 868,3 MHz (padrão Zigbee). São descritos os guias de projeto para cada circuito com simulações e desenho de layout. Especificamente para os circuitos, multiplicador de tensão e amplificador de baixo ruído são apresentadas novas topologias. Estes dois circuitos estão em via de preparação de patente. Finalmente, as caracterizações de cada circuito são apresentadas, com exceção do modulador BPSK
Abstract: This work presents two main research topics: the first refers to the design and the development of a fabrication technology for RF MEMS (Micro Electromechanical Systems) Switches and the second to the design of RF integrated circuits. In relation to MEMS switches, it describes the fabrication process and the design methodology of Shunt MEMS switches over a coplanar transmission line (CPW). The structure is composed by a metallic bridge anchored on both ends by two metallic posts connected to the ground plane. The switches are designed to operate at low activation voltage (16 V) and with a large band of operating frequency (400 MHz ¿ 4GHz), making possible its use in many communication systems. It is also described a design methodology assisted by electromechanical and electromagnetic simulations, and finally it is presented the characterization of 4 switches. After extensive search in technical literature, it was identified that this is the first work in Brazil dedicated to the technology development and fabrication of MEMS switches. The integrated circuits designs are realized in CMOS 0.35 µm technology and includes: charge pump and ring oscillator, SPDT switcher (Single Pole Double Through), low noise amplifier and BPSK modulator. The circuits charge pump and ring oscillator are intended to MEMS switches applications. The circuits SPDT, low noise amplifier and BPSK modulator are integrating parts of a RF Front-End, with reception at 1.8 GHz (band D ¿ GSM) and transmission at 868.3 MHz (ZigBee standard). The design guidelines to each circuit are described, with simulations and layout drawing. Specifically to the circuits charge pump and low noise amplifier, it is presented new topologies with innovation in the area. These two circuits have their patent process under preparation. Finally, the characterization of each circuit is presented, with exception of the BPSK modulator
Doutorado
Eletrônica, Microeletrônica e Optoeletrônica
Doutor em Engenharia Elétrica

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Books on the topic "Micro-electro mechanical system - Radio frequency"

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Deployment of Rare Earth Materials in Microware Devices, RF Transmitters, and Laser Systems. Taylor & Francis Group, 2019.

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Jha, A. R. Deployment of Rare Earth Materials in Microware Devices, RF Transmitters, and Laser Systems. Auerbach Publishers, Incorporated, 2019.

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Jha, A. R. Deployment of Rare Earth Materials in Microware Devices, RF Transmitters, and Laser Systems. Auerbach Publishers, Incorporated, 2019.

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Book chapters on the topic "Micro-electro mechanical system - Radio frequency"

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Karthick, R., and S. P. K. Babu. "Review on Radio Frequency Micro Electro Mechanical Systems (RF-MEMS) Switch." In Lecture Notes in Electrical Engineering, 437–53. Singapore: Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-15-2612-1_43.

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Sundharajan, Kanthamani. "Scope of RF MEMS Technology for Microwave Circuits and Systems." In Advances in Wireless Technologies and Telecommunication, 1–22. IGI Global, 2021. http://dx.doi.org/10.4018/978-1-7998-7611-3.ch001.

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Micro-electro mechanical systems (MEMS) technology has facilitated the need for innovative approaches in the design and development of miniaturized, effective, low-cost radio frequency (RF) microwave circuits and systems. This technology is expected to have significant role in today's 5G applications for the development of reconfigurable architectures. This chapter presents an overview of the evolution of MEMS-based subsystems and devices, especially switches and phased array antennas. This chapter also discusses the key issues in design and analysis of RF MEMS-based devices, particularly with primary emphasis on RF MEMS switches and antennas.

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Swaminathan, Lakshmi. "RF MEMS Switch Fabrication and Packaging." In Nanofibers [Working Title]. IntechOpen, 2020. http://dx.doi.org/10.5772/intechopen.95003.

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RF (Radio Frequency) MEMS (Micro Electro Mechanical Systems) technology is the application of micromachined mechanical structures, controlled by electrical signals and interacting with signals in the RF range. The applications of these devices range from switching networks for satellite communication systems to high performance resonators and tuners. RF MEMS switches are the first and foremost MEMS devices designed for RF technology. A specialized method for fabricating microsturctures called surface micromachining process is used for fabricating the RF MEMS switches. Die level packaging using available surface mount style RF packages. The packaging process involved the design of RF feed throughs on the Alumina substrates to the die attachment, wire bonding and hermetic sealing using low temperature processes.

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Nordin, Anis Nurashikin. "RF-MEMS Based Oscillators." In Advances in Wireless Technologies and Telecommunication, 120–55. IGI Global, 2012. http://dx.doi.org/10.4018/978-1-4666-0083-6.ch006.

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Today’s high-tech consumer market demand complex, portable personal wireless consumer devices that are low-cost and have small sizes. Creative methods of combining mature integrated circuit (IC) fabrication techniques with innovative radio-frequency micro-electro-mechanical systems (RF-MEMS) devices has given birth to wireless transceiver components, which operate at higher frequencies but are manufactured at the low-cost of standard ICs. Oscillators, RF bandpass filters, and low noise amplifiers are the most critical and important modules of any wireless transceiver. Their individual characteristics determine the overall performance of a transceiver. This chapter illustrates RF-oscillators that utilize MEMS devices such as resonators, varactors, and inductors for frequency generation. Emphasis will be given on state of the art RF-MEMS components such as film bulk acoustic wave, surface acoustic wave, flexural mode resonators, lateral and vertical varactors, and solenoid and planar inductors. The advantages and disadvantages of each device structure are described, with reference to the most recent work published in the field.

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Baghelani, Masoud, Habib Badri Ghavifekr, and Afshin Ebrahimi. "RF-MEMS Components for Wireless Transceivers." In Advances in Wireless Technologies and Telecommunication, 156–88. IGI Global, 2012. http://dx.doi.org/10.4018/978-1-4666-0083-6.ch007.

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The application of Micro-Electro-Mechanical-Systems (MEMS) in the fields of radio frequency and microwave is offensively spreading. Nowadays a large amount of scientists and research centers worldwide are involved with development, design, and fabrication of MEMS components for RF applications. RF-MEMS show numerous capabilities for improving the performance of RF transceivers. Their excellent features such as extremely low power consumption, low loss, simple and cheap fabrication process, the ability to work at UHF and SHF frequencies, and compatibility with standard CMOS process make them ideal devices replacing the bulky off-chip components and enhancing the performance of on-chip circuits of transceivers. Therefore they can realize the idea of a transceiver on a chip. The aim of this chapter is to provide a reader with deep information in the field of RF-MEMS, covering their current and possible applications, design, modeling, and simulation. Also their problems such as power handling, packaging, frequency extension, et cetera, are discussed. In addition, this chapter will introduce case studies in RF-MEMS area for researchers.

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Nambobi, Mutwalibi, Rajab Ssemwogerere, and Badru K. Ramadhan. "Implementation of Autonomous Library Assistants Using RFID Technology." In Advances in Library and Information Science, 140–50. IGI Global, 2020. http://dx.doi.org/10.4018/978-1-7998-4742-7.ch008.

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This is an interesting time to innovate around disruptive technologies like the internet of things (IoT), machine learning, blockchain. Autonomous assistants (IoT) are the electro-mechanical system that performs any prescribed task automatically with no human intervention through self-learning and adaptation to changing environments. This means that by acknowledging autonomy, the system has to perceive environments, actuate a movement, and perform tasks with a high degree of autonomy. This means the ability to make their own decisions in a given set of the environment. It is important to note that autonomous IoT using radio frequency identification (RFID) technology is used in educational sectors to boost the research the arena, improve customer service, ease book identification and traceability of items in the library. This chapter discusses the role, importance, the critical tools, applicability, and challenges of autonomous IoT in the library using RFID technology.

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Charry, Edgar, and Daniel T. H. Lai. "Methods for Improving Foot Displacement Measurements Calculated from Inertial Sensors." In Biomedical Engineering and Information Systems, 93–116. IGI Global, 2011. http://dx.doi.org/10.4018/978-1-61692-004-3.ch005.

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The use of inertial sensors to measure human movement has recently gained momentum with the advent of low cost micro-electro-mechanical systems (MEMS) technology. These sensors comprise accelerometer and gyroscopes which measure accelerations and angular velocities respectively. Secondary quantities such as displacement can be obtained by integration of these quantities, a method which presents challenging issues due to the problem of accumulative sensor errors. This chapter investigates the spectral evaluation of individual sensor errors and looks at the effectiveness of minimizing these errors using static digital filters. The primary focus is on the derivation of foot displacement data from inertial sensor measurements. The importance of foot, in particular toe displacement measurements is evident in the context of tripping and falling which are serious health concerns for the elderly. The Minimum Toe Clearance (MTC) as an important gait variable for falls-risk prediction and assessment, and therefore the measurement variable of interest. A brief sketch of the current devices employing accelerometers and gyroscopes is presented, highlighting the problems and difficulties reported in literature to achieve good precision. These have been mainly due to the presence of sensor errors and the error accumulative process employed in obtaining displacement measurements. The investigation first proceeds to identify the location of these sensor errors in the frequency domain using the Fast Fourier Transform (FFT) on raw inertial sensor data. The frequency content of velocity and displacement measurements obtained from integrating the inertial data using a well known strap-down method is then explored. These investigations revealed that large sensor errors occurred mainly in the low frequency spectrum while white noise exists in all frequency spectra. The efficacy of employing a band-pass filter to remove a large portion of these errors and their effect on the derived displacements is elaborated on. The cross-correlation of the FFT power spectra from a highly accurate optical measurement system and processed sensor data is used as a metric to evaluate the performance of the band-pass filter at several stages of the processing stage. The motivation is that a more fundamental method would require less computational demand and could lead to more efficient implementations in low-power and systems with limited resources, so that portable sensor based motion measurement system would provide a good degree of measurement accuracy.

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Conference papers on the topic "Micro-electro mechanical system - Radio frequency"

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Sato, H., Y. Peeri, E. Baghoomian, C. W. Berry, and M. M. Maharbiz. "Radio-Controlled Cyborg Beetles: A Radio-Frequency System for Insect Neural Flight Control." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805357.

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Walraven, Jeremy A., Edward I. Cole, Jr., Lynn R. Sloan, Susan L. Hietala, Chris P. Tigges, and Christopher W. Dyck. "Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)." In Micromachining and Microfabrication, edited by Rajeshuni Ramesham. SPIE, 2001. http://dx.doi.org/10.1117/12.442999.

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Yu, Yao, Giuseppe Michetti, Ahmed Kord, Dimitrios Sounas, Flavius V. Pop, Piotr Kulik, Michele Pirro, Zhenyun Qian, Andrea Alu, and Matteo Rinaldi. "Magnetic-free radio frequency circulator based on spatiotemporal commutation of MEMS resonators." In 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2018. http://dx.doi.org/10.1109/memsys.2018.8346507.

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Hirano, Toshiki, Long-Sheng Fan, Wen Y. Lee, John Hong, Tetsuo Semba, Wayne Imaino, Surya Pattanaik, Susanna Chan, and Patrick Webb. "A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo." In ASME 1998 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1998. http://dx.doi.org/10.1115/imece1998-1250.

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Abstract This paper reports on the design, fabrication and testing of an electrostatic micro-actuator for a magnetic Hard-Disk Drive (HDD) tracking servo. First, the design requirements for a micro-actuator in this application were investigated. These include high Z-directional stiffness, low in-plane stiffness, high structural aspect ratio, large output force, high area-efficiency, low cost, and mass-production by a batch process. A novel area-efficient rotary micro-actuator design was devised, and micro-actuators were successfully fabricated using innovative processing technologies such as high-aspect ratio polymer etching and thick metal electro-deposition. The fabricated micro-actuator has a structural thickness of 40 μm with a minimum gap/structure width of approximately 2 μm (aspect ratio of 20:1). The micro-actuator’s frequency response was measured and it was confirmed that the micro-actuator has extremely clean response up to very high frequency region, and this fact enables the design of a servo system that exceeds a 5 kHz servo bandwidth, which is adequate to achieve a track density of more than 25 kilo-track-per-inch (kTPI). The micro-actuator/slider assembly was also tested on a spinning disk, with its position controlled by a PID controller using the magnetic position error signal (PES) written on the disk. A position accuracy of about 0.05 μm was observed when the servo controller was turned on. This result confirms that this micro-actuator can be used in a servo system which is capable of more than 25 kTPI.

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Kolis, Peter A., Marisol Koslowski, and Anil K. Bajaj. "Quantification of Uncertainty in Creep Failure in RF-MEMS Switches." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-88160.

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We present simulations of the dynamic response of radio frequency micro-electro-mechanical-systems (RF-MEMS) switches undergoing creep deformation. The model includes a microscale-informed Coble creep formulation incorporated in a beam model of an electrostatically actuated RF-MEMS switch, and it is solved using a Ritz-Galerkin based modal expansion. The resulting effects on the long-term device behavior as well as the implications of uncertainty in the device geometry and material parameters are studied. We find that the addition of creep to the beam model results in an undesired degradation of the device performance, as evidenced by decreases in the closing and release voltages.

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Venkattraman, Ayyaswamy, and Alina Alexeenko. "Simulations of Impulsive Dynamics in RF MEMS Capacitive Switches." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-64693.

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Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) have emerged as a promising enabling technology for low-cost and low-power switches, actuators, and sensors. However, the reliability of these devices, especially those involving repeated contacting events, remains a major stumbling block for their widespread adaptation. In this work we present dynamic simulations of RF MEMS switch response due to electrostatic actuation in the presence of gas damping and residual stress. The dynamics emerging from the interaction between the beam structure and gas environment shows generation of stress waves induced by contact. It has been observed that these impulsive effects could lead to transient stresses that are significantly greater than the steady state bending stress. S-N curves for LIGA Nickel are used to make predictions for the lifetime at various voltages and operating gas pressures that show pressure dependence consistent with earlier experimental observations.

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Chung, So-Ra, Sangtak Park, Eihab M. Abdel-Rahman, John Yeow, and Mahmoud Khater. "MEMS Demodulator." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87968.

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This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.

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Akanegbu, Stanley, James Akinpelu, Okechukwu Ogueli, Andrew Edwards, Oluseyi Ologunkeji, Yahaya Ibrahim, Bruce Robertson, Joseph Ekpuk, and Augustine Ekwedike. "Hydro-Mechanical and Electro-Hydraulic Single Trip Completions, An Affordable Reality." In SPE Nigeria Annual International Conference and Exhibition. SPE, 2022. http://dx.doi.org/10.2118/212032-ms.

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Abstract Recent papers describe successful Single-Trip Completions (STC) operations carried out offshore Nigeria and other locations and has successfully shed light on implementation of this advanced technology, which represents a step change in operational efficiency. However, the cost of these STC equipment may be prohibitive for wells drilled in shelf or swamp environments. The delivery of STC relies on different communication methods to communicate with and function the down-hole tools that make up part of the STC assemblies such as the "hydraulically actuated sand screens", the "radio frequency identification (RFID) actuated sleeves", and "valves". These different communication methods permit the running of a closed-loop system to ensure well integrity through-out the deployment and commissioning of the completion system. This paper will discuss pre-job planning, field execution and lessons learned from technologies developed to fit this environment while simultaneously challenging conventional thinking around open hole and cased hole completions systems, while addressing the operator's key drive towards capital efficiency through reduction of rig-days by as much as 50%. While several of the components incorporated in the STC system had been run previously in isolation, this paper will discuss the steps taken to facilitate the first full system approach to the application of sand screens fitted with hydro-mechanical inflow control device sleeves designed to actuate on pressure bleed-off, RFID enabled tools in the first hybrid single trip interventionless sand control completion system, and the time savings realized while ensuring well integrity through-out the deployment. Several components within the completion system have been equipped with novel enabling technology, RFID operated reservoir isolation valve at toe of the completion, wire wrapped sand screens fitted with hydro-mechanical sleeves designed to actuate on pressure bleed down complete with inflow control devices, and fuse actuated remote operated circulating sleeves for annular fluid displacement, which will all be discussed within.

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Mohite, Suhas S., Mukesh Madhewar, and Vishram B. Sawant. "Modeling and Validation of Capacitive Type RF MEMS Switches for Low Actuation Voltage and High Isolation." In ASME 2018 Dynamic Systems and Control Conference. American Society of Mechanical Engineers, 2018. http://dx.doi.org/10.1115/dscc2018-8939.

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Design objectives in capacitive type radio frequency micro electro mechanical switches (RF-MEMS) are to reduce actuation voltages and to obtain low insertion losses with high isolation. In this study, we report design, modeling and simulation of three new structural configurations using ANSYS to obtain the optimum geometry; further high frequency simulations are performed using HFSS to obtain low insertion losses and high isolation. The designed switches require only 3.9 to 5 V as pull-in voltage for actuation. The mechanical resonant frequency and quality factor are in the range of 6.5 to 8.7 kHz and 1.1 to 1.2, respectively. Switching times for all the designs are 32 to 38 μs at their respective pull-in voltages. Two of the switch designs have insertion loss of less than 0.25 to 0.8 dB at 60 and 50 GHz, and isolation greater than 58 dB for all three designs.

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Pusch, Tim P., Mario D’Auria, Nima Tolou, and Andrew S. Holmes. "Laser Micromachining of Thin Beams for Silicon MEMS: Optimization of Cutting Parameters Using the Taguchi Method." In ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2015. http://dx.doi.org/10.1115/detc2015-48100.

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While thin beams are widely used structural elements in Micro-Electro-Mechanical-Systems (MEMS) there are very few studies investigating the laser machining of clean high aspect ratio silicon beams. This work presents a systematic study of selected influencing cutting parameters with the goal of machining high aspect ratio beams with low side wall surface roughness (Ra) and high cross section verticality, i.e. low taper angle. The Taguchi method was used to find the optimal setting for each of the selected parameters (pulse frequency, laser diode current, pulse overlap, number of patterns to be marked, gap size between patterns) utilizing orthogonal arrays and signal-to-noise (S/N) ratio analysis. Double-sided clamped beams of 100μm width and 10mm length were machined in silicon wafers of 525μm thickness using a nanosecond solid-state UV laser system (355nm wavelength). Our experimental results show that beams with an aspect ratio as high as 17.5 can be manufactured. Furthermore, a surface roughness of Ra = 0.37μm and taper angle of α = 2.52 degrees can be achieved. This will make the fast fabrication of MEMS devices with aspect ratios as high as those from deep reactive ion etching possible.

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