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1

International, Workshop on Microelectronics (6th 2007 Islamabad Pakistan), and Workshop on Microelectronics (6th 2007 Islāmābād Pakistan) International. Microelectronics: Micro and nano-electronics and photonics. New Delhi: Centre for Science & Technology of the Non-aligned and Other Developing Countries, 2009.

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2

International, Workshop on Microelectronics (6th 2007 Islamabad Pakistan). Microelectronics: Micro and nano-electronics and photonics. New Delhi: Centre for Science & Technology of the Non-Aligned and Other Developing Countries, 2009.

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3

International, Workshop on Microelectronics (6th 2007 Islāmābād Pakistan). Microelectronics: Micro and nano-electronics and photonics. New Delhi: Centre for Science & Technology of the Non-Aligned and Other Developing Countries, 2009.

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4

International Workshop on Microelectronics (6th 2007 Islāmābād, Pakistan). Microelectronics: Micro and nano-electronics and photonics. Edited by Lal Krishan 1941-, Centre for Science and Technology of the Non-Aligned and Other Developing Countries., and Institute of Information Technology (Islamabad, Pakistan). New Delhi: Centre for Science & Technology of the Non-Aligned and Other Developing Countries, 2009.

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5

Akhmetovich, Valiev Kamilʹ, Orlikovskiĭ A. A, Society of Photo-optical Instrumentation Engineers., Society of Photo-optical Instrumentation Engineers. Russian Chapter., Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a︡ akademii͡a︡ nauk), and Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ., eds. Micro- and nano-electronics 2003: 6-10 October 2003, Zvenigorod, Russia. Bellingham, Wash., USA: SPIE, 2004.

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6

Jalili, Nader. Piezoelectric-based vibration-control: From macro to micro/nano scale systems. New York: Springer, 2010.

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7

International Conference on Micro- and Nano-Electronics (2009 Zvenigorod, Russia). International Conference on Micro- and Nano-Electronics, 2009: 5-9 October 2009, Zvenigorod, Russian Federation. Edited by Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich), Valiev Kamilʹ Akhmetovich, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk), Rossiĭskai︠a︡ akademii︠a︡ nauk, and SPIE (Society). Bellingham, Wash: SPIE, 2010.

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8

IEEE International Conference on Nano/Micro Engineered and Molecular Systems (2nd 2007 Bangkok, Thailand). 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems: Bangkok, Thailand, 16-19 January 2007. Piscataway, NJ: IEEE, 2007.

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9

IEEE International Conference on Nano/Micro Engineered and Molecular Systems (3rd 2008 Sanya, China). 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, China 6-9 January 2008. Piscataway, N.J: IEEE, 2008.

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10

IEEE International Conference on Nano/Micro Engineered and Molecular Systems (1st 2006 Zhuhai, China). 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems: Zhuhai, China, 19-21 January 2006. Piecataway, NJ: IEEE, 2006.

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11

IEEE International Conference on Nano/Micro Engineered and Molecular Systems (3rd 2008 Sanya, China). 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, China 6-9 January 2008. Piscataway, N.J: IEEE, 2008.

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12

Y, Pauleau, ed. Chemical physics of thin film deposition processes for micro- and nano-technologies. Dordrecht: Kluwer Academic Publishers, 2002.

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13

G, Johnson Eric, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., Solid State Technology (Organization), and Sandia National Laboratories, eds. Micromachining technology for micro-optics and nano-optics: 28-29 January 2003, San Jose, California, USA. Bellingham, Washington, USA: SPIE, 2003.

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14

G, Johnson Eric, Nordin Gregory P, and Society of Photo-optical Instrumentation Engineers., eds. Micromachining technology for micro-optics and nano-optics II: 27-29 January 2004, San Jose, California, USA. Bellingham, Washington, USA: SPIE, 2004.

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15

G, Johnson Eric, Nordin Gregory P, Suleski Thomas J. 1969-, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., Solid State Technology (Organization), and Sandia National Laboratories, eds. Micromachining technology for micro-optics and nano-optics III: 25-27 January 2005, San Jose, California, USA. Bellingham, Washington: SPIE, 2005.

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16

Kang, Shinill. Micro/Nano Replication. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2012. http://dx.doi.org/10.1002/9781118146965.

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17

Endo, Isao, and Teruyuki Nagamune, eds. Nano/Micro Biotechnology. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-14947-4.

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18

Endō, Isao. Nano/Micro Biotechnology. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2010.

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19

Hans-Jörg, Fecht, and Werner Matthias Dr, eds. The nano-micro interface: Bridging the micro and nano worlds. Weinheim: Wiley-VCH, 2004.

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20

Mitsumasa, Iwamoto, ed. Nano-molecular electronics. Tokyo: Japanese Journal of Applied Physics, 1995.

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21

Van de Voorde, Marcel, Matthias Werner, and Hans-Jörg Fecht, eds. The Nano-Micro Interface. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2015. http://dx.doi.org/10.1002/9783527679195.

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22

Gatzen, Hans H., Volker Saile, and Jürg Leuthold. Micro and Nano Fabrication. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-662-44395-8.

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23

Pang, Huan, ed. Nano/Micro Metal-Organic Frameworks. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-16-4071-1.

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24

Chandra, Pranjal, ed. Biosensing and Micro-Nano Devices. Singapore: Springer Nature Singapore, 2022. http://dx.doi.org/10.1007/978-981-16-8333-6.

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25

Saka, Masumi, ed. Metallic Micro and Nano Materials. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15411-9.

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26

Yan, Jiwang, ed. Micro and Nano Fabrication Technology. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-13-0098-1.

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27

Rai, Mahendra, Anatoly Reshetilov, Yulia Plekhanova, and Avinash P. Ingle, eds. Macro, Micro, and Nano-Biosensors. Cham: Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-55490-3.

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28

Zhu, Yong, ed. Micro and Nano Machined Electrometers. Singapore: Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-13-3247-0.

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29

Barbillon, Gregory, Alain Bosseboeuf, Kukjin Chun, Rosaria Ferrigno, and Olivier Français, eds. Engineering of Micro/Nano Biosystems. Singapore: Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-13-6549-2.

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30

Yan, Jiwang, ed. Micro and Nano Fabrication Technology. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-6588-0.

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31

Anders, Jens, and Jan G. Korvink. Micro and Nano Scale NMR. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2018. http://dx.doi.org/10.1002/9783527697281.

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32

Lukichev, Vladimir, and Konstantin Rudenko. International Conference on Micro- and Nano-Electronics 2016. SPIE, 2017.

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33

Orlikovskiy, Aleksandr. International Conference on Micro- and Nano-Electronics 2014. SPIE, 2015.

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34

Zeng, De Huai. Micro Nano Devices, Structure and Computing Systems II. Trans Tech Publications, Limited, 2013.

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35

Knopf, George K., and Yukitoshi Otani. Optical Nano and Micro Actuator Technology. Taylor & Francis Group, 2017.

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36

Optical Nano And Micro Actuator Technology. CRC Press, 2012.

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37

Semiconductor Nanomaterials for Flexible Technologies Micro Nano Technologies. William Andrew Publishing, 2010.

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38

Semiconductor machining at the micro-nano scale. Kerala, India: Transworld Research Network, 2007.

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39

Semiconductor machining at the micro-nano scale. Kerala, India: Transworld Research Network, 2007.

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40

Jalili, Nader. Piezoelectric-Based Vibration Control: From Macro to Micro/Nano Scale Systems. Springer, 2011.

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41

Jalili, Nader. Piezoelectric-Based Vibration Control: From Macro to Micro/Nano Scale Systems. Springer London, Limited, 2009.

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42

Jalili, Nader. Piezoelectric-Based Vibration Control: From Macro to Micro/Nano Scale Systems. Springer, 2014.

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43

Leray, Jean-Luc, and Rémi Gaillard. Micro, Nano and Optoelectronics Components and Systems: Reliability and Ionizing Radiation. Wiley & Sons, Incorporated, John, 2015.

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44

Leray, Jean-Luc, and Rémi Gaillard. Micro, Nano and Optoelectronics Components and Systems: Reliability and Ionizing Radiation. Wiley & Sons, Incorporated, John, 2015.

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45

Leray, Jean-Luc, and Rémi Gaillard. Micro, Nano and Optoelectronics Components and Systems: Reliability and Ionizing Radiation. Wiley & Sons, Incorporated, John, 2015.

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46

Leray, Jean-Luc, and Rémi Gaillard. Micro, Nano and Optoelectronics Components and Systems: Reliability and Ionizing Radiation. Wiley & Sons, Incorporated, John, 2015.

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47

(Editor), Eric G. Johnson, Gregory P. Nordin (Editor), and Thomas J. Suleski (Editor), eds. Micromachining Technology for Micro-optics and Nano-optics IV (Proceedings of SPIE). SPIE-International Society for Optical Engine, 2006.

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48

of, American Society. ASME 2014 International Mechanical Engineering Congress and Exposition : Volume 10: Micro-And Nano-Systems Engineering and Packaging. American Society of Mechanical Engineers, The, 2014.

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49

Fukuda, Toshio, Masahiro Nakajima, Masaru Takeuchi, and Yasuhisa Hasegawa. Micro- and nanotechnology for living machines. Oxford University Press, 2018. http://dx.doi.org/10.1093/oso/9780199674923.003.0052.

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The chapter Micro- and nanotechnology for living machines describes research on new biohybrid technologies, engineered at the micro- and nano-scales, that combine some of the benefits of mechanical and electronic systems with those of biological systems. The chapter begins by reviewing some of the challenges of building devices at very small physical scales and discusses how new fabrication methodologies could impact on different classes of industrial, daily life, and biomedical products. We next explain how progress is being achieved through advances in micro- and nanomechatronics, particularly in the field of nanorobotic manipulation. Finally, we summarize recent progress towards building biohybrid living machines that combine nanomaterials with biological cells and outline the design of a micro- and nanorobotic manipulation system for cell assembly called the nanolaboratory.
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50

ASME. Print Proceedings of the ASME 2016 International Mechanical Engineering Congress and Exposition : Volume 10: Micro- and Nano-Systems Engineering and Packaging. A S M E Press, 2017.

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