Journal articles on the topic 'Metal chemical etching'
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Kim, D. E., and N. P. Suh. "Chemical Smoothing of Rough Metal Surfaces." Journal of Engineering for Industry 114, no. 4 (November 1, 1992): 421–26. http://dx.doi.org/10.1115/1.2900693.
Full textWang, Qi, Kehong Zhou, Shuai Zhao, Wen Yang, Hongsheng Zhang, Wensheng Yan, Yi Huang, and Guodong Yuan. "Metal-Assisted Chemical Etching for Anisotropic Deep Trenching of GaN Array." Nanomaterials 11, no. 12 (November 24, 2021): 3179. http://dx.doi.org/10.3390/nano11123179.
Full textLi, Liyi, Colin M. Holmes, Jinho Hah, Owen J. Hildreth, and Ching P. Wong. "Uniform Metal-assisted Chemical Etching and the Stability of Catalysts." MRS Proceedings 1801 (2015): 1–8. http://dx.doi.org/10.1557/opl.2015.574.
Full textDai, Li Ping, Guo Jun Zhang, Shu Ya Wang, and Zhi Qin Zhong. "XPS Study on Barium Strontium Titanate (BST) Thin Films Etching in SF6/Ar Plasma." Advanced Materials Research 415-417 (December 2011): 1964–68. http://dx.doi.org/10.4028/www.scientific.net/amr.415-417.1964.
Full textChoi, Keorock, Yunwon Song, Ilwhan Oh, and Jungwoo Oh. "Catalyst feature independent metal-assisted chemical etching of silicon." RSC Advances 5, no. 93 (2015): 76128–32. http://dx.doi.org/10.1039/c5ra15745e.
Full textLee, Hun Hee, Min Sang Yun, Hyun Wook Lee, and Jin Goo Park. "Removing W Polymer Residue from BEOL Structures Using DSP+ (Dilute Sulfuric-Peroxide-HF) Mixture – A Case Study." Solid State Phenomena 195 (December 2012): 128–31. http://dx.doi.org/10.4028/www.scientific.net/ssp.195.128.
Full textTice, Scott, and Chan Geun Park. "Metal Etch in Advanced Immersion Tank with Precision Uniformity Using Agitation and Wafer Rotation." Solid State Phenomena 219 (September 2014): 138–42. http://dx.doi.org/10.4028/www.scientific.net/ssp.219.138.
Full textKim, Wungyeon, Hyunjeong Kim, and Gyu Tae Kim. "Ultra-Easy and Fast Method for Transferring Graphene Grown on Metal Foil." Nano 12, no. 11 (November 2017): 1750140. http://dx.doi.org/10.1142/s1793292017501405.
Full textLova, Paola, Valentina Robbiano, Franco Cacialli, Davide Comoretto, and Cesare Soci. "Black GaAs by Metal-Assisted Chemical Etching." ACS Applied Materials & Interfaces 10, no. 39 (September 7, 2018): 33434–40. http://dx.doi.org/10.1021/acsami.8b10370.
Full textPérez-Díaz, Oscar, and Enrique Quiroga-González. "Silicon Conical Structures by Metal Assisted Chemical Etching." Micromachines 11, no. 4 (April 11, 2020): 402. http://dx.doi.org/10.3390/mi11040402.
Full textAkan, Rabia, and Ulrich Vogt. "Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures." Nanomaterials 11, no. 11 (October 22, 2021): 2806. http://dx.doi.org/10.3390/nano11112806.
Full textLi, Yu Ping, Xiu Hua Chen, Wen Hui Ma, Shao Yuan Li, Ping Bi, Xue Mei Liu, and Fu Wei Xiang. "Research on Preparation of Porous Silicon Powders from Metallurgical Silicon Material." Materials Science Forum 847 (March 2016): 97–102. http://dx.doi.org/10.4028/www.scientific.net/msf.847.97.
Full textIatsunskyi, Igor, Valentin Smyntyna, Nykolai Pavlenko, and Olga Sviridova. "Peculiarities of Photoluminescence in Porous Silicon Prepared by Metal-Assisted Chemical Etching." ISRN Optics 2012 (November 1, 2012): 1–6. http://dx.doi.org/10.5402/2012/958412.
Full textLianto, Prayudi, Sihang Yu, Jiaxin Wu, C. V. Thompson, and W. K. Choi. "Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon." Nanoscale 4, no. 23 (2012): 7532. http://dx.doi.org/10.1039/c2nr32350h.
Full textHampden-Smith, Mark J., and Toivo T. Kodas. "Copper Etching: New Chemical Approaches." MRS Bulletin 18, no. 6 (June 1993): 39–45. http://dx.doi.org/10.1557/s088376940004731x.
Full textBerezhanskyi, Ye I., S. I. Nichkalo, V. Yu Yerokhov, and A. A. Druzhynin. "Nanotexturing of Silicon by Metal-Assisted Chemical Etching." Фізика і хімія твердого тіла 16, no. 1 (March 15, 2015): 140–44. http://dx.doi.org/10.15330/pcss.16.1.140-144.
Full textYasukawa, Yukiko, Hidetaka Asoh, and Sachiko Ono. "GaAs Microarrays by Noble-Metal Assisted Chemical Etching." ECS Transactions 16, no. 3 (December 18, 2019): 253–58. http://dx.doi.org/10.1149/1.2982563.
Full textHuang, Zhipeng, Nadine Geyer, Peter Werner, Johannes de Boor, and Ulrich Goesele. "ChemInform Abstract: Metal-Assisted Chemical Etching of Silicon." ChemInform 42, no. 14 (March 14, 2011): no. http://dx.doi.org/10.1002/chin.201114223.
Full textHuang, Zhipeng, Nadine Geyer, Peter Werner, Johannes de Boor, and Ulrich Gösele. "Metal-Assisted Chemical Etching of Silicon: A Review." Advanced Materials 23, no. 2 (September 21, 2010): 285–308. http://dx.doi.org/10.1002/adma.201001784.
Full textLipinski, M., J. Cichoszewski, R. P. Socha, and T. Piotrowski. "Porous Silicon Formation by Metal-Assisted Chemical Etching." Acta Physica Polonica A 116, Supplement (December 2009): S—117—S—119. http://dx.doi.org/10.12693/aphyspola.116.s-117.
Full textHildreth, Owen J., and Daniel R. Schmidt. "Vapor Phase Metal-Assisted Chemical Etching of Silicon." Advanced Functional Materials 24, no. 24 (March 14, 2014): 3827–33. http://dx.doi.org/10.1002/adfm.201304129.
Full textRomano, Lucia. "Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching." Micromachines 11, no. 11 (October 31, 2020): 988. http://dx.doi.org/10.3390/mi11110988.
Full textYoon, Sung-Soo, Yeong Bahl Lee, and Dahl-Young Khang. "Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching." Applied Surface Science 370 (May 2016): 117–25. http://dx.doi.org/10.1016/j.apsusc.2016.02.153.
Full textLai, Chang Quan, Wen Zheng, W. K. Choi, and Carl V. Thompson. "Metal assisted anodic etching of silicon." Nanoscale 7, no. 25 (2015): 11123–34. http://dx.doi.org/10.1039/c5nr01916h.
Full textArafat, Mohammad Yasir, Mohammad Aminul Islam, Ahmad Wafi Bin Mahmood, Fairuz Abdullah, Mohammad Nur-E-Alam, Tiong Sieh Kiong, and Nowshad Amin. "Fabrication of Black Silicon via Metal-Assisted Chemical Etching—A Review." Sustainability 13, no. 19 (September 28, 2021): 10766. http://dx.doi.org/10.3390/su131910766.
Full textCao, Dao Tran, Cao Tuan Anh, and Luong Truc Quynh Ngan. "Vertical-Aligned Silicon Nanowire Arrays with Strong Photoluminescence Fabricated by Metal-Assisted Electrochemical Etching." Journal of Nanoelectronics and Optoelectronics 15, no. 1 (January 1, 2020): 127–35. http://dx.doi.org/10.1166/jno.2020.2684.
Full textWang, Wei, Li Juan Zhao, Ping Xin Song, and Ying Jiu Zhang. "Etching Volume Effect on the Morphology of Silicon Etched by Metal-Assisted Chemical Method." Applied Mechanics and Materials 217-219 (November 2012): 1141–45. http://dx.doi.org/10.4028/www.scientific.net/amm.217-219.1141.
Full textDu, Fengming, Chengdi Li, Zetian Mi, Ruoxuan Huang, Xiaoguang Han, Yan Shen, and Jiujun Xu. "Friction Performance of Aluminum-Silicon Alloy Cylinder Liner after Chemical Etching and Laser Finishing." Metals 9, no. 4 (April 11, 2019): 431. http://dx.doi.org/10.3390/met9040431.
Full textLin, Hao, Ming Fang, Ho-Yuen Cheung, Fei Xiu, SenPo Yip, Chun-Yuen Wong, and Johnny C. Ho. "Hierarchical silicon nanostructured arrays via metal-assisted chemical etching." RSC Adv. 4, no. 91 (2014): 50081–85. http://dx.doi.org/10.1039/c4ra06172a.
Full textHu, Ya, Chensheng Jin, Ying Liu, Xiaoyu Yang, Zhiyuan Liao, Baoguo Zhang, Yilai Zhou, et al. "Metal Particle Evolution Behavior during Metal Assisted Chemical Etching of Silicon." ECS Journal of Solid State Science and Technology 10, no. 8 (August 1, 2021): 084002. http://dx.doi.org/10.1149/2162-8777/ac17be.
Full textXia, Weiwei, Jun Zhu, Haibo Wang, and Xianghua Zeng. "Effect of catalyst shape on etching orientation in metal-assisted chemical etching of silicon." CrystEngComm 16, no. 20 (2014): 4289–97. http://dx.doi.org/10.1039/c4ce00006d.
Full textZhang, Shiying, Zhenhua Li, and Qingjun Xu. "A systematic study of silicon nanowires array fabricated through metal-assisted chemical etching." European Physical Journal Applied Physics 92, no. 3 (December 2020): 30402. http://dx.doi.org/10.1051/epjap/2020200289.
Full textKim, Tae, Jee-Hwan Bae, Juyoung Kim, Min Cho, Yu-Chan Kim, Sungho Jin, and Dongwon Chun. "Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching." Micromachines 11, no. 8 (July 30, 2020): 744. http://dx.doi.org/10.3390/mi11080744.
Full textCui, Naiyuan, Fei Wang, Hanyuan Ding, and Lei Guo. "Investigation of 〈100〉-oriented etching pattern on diamond coated with Ni and Cu." International Journal of Modern Physics B 34, no. 17 (June 29, 2020): 2050155. http://dx.doi.org/10.1142/s0217979220501556.
Full textHatada, Ruriko, Stefan Flege, Berthold Rimmler, Christian Dietz, Wolfgang Ensinger, and Koumei Baba. "Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions." Coatings 9, no. 2 (February 18, 2019): 125. http://dx.doi.org/10.3390/coatings9020125.
Full textLubas, Malgorzata, Jaroslaw Jan Jasinski, Anna Zawada, and Iwona Przerada. "Influence of Sandblasting and Chemical Etching on Titanium 99.2–Dental Porcelain Bond Strength." Materials 15, no. 1 (December 24, 2021): 116. http://dx.doi.org/10.3390/ma15010116.
Full textZhou, Jie, Justinas Palisaitis, Joseph Halim, Martin Dahlqvist, Quanzheng Tao, Ingemar Persson, Lars Hultman, Per O. Å. Persson, and Johanna Rosen. "Boridene: Two-dimensional Mo4/3B2-x with ordered metal vacancies obtained by chemical exfoliation." Science 373, no. 6556 (August 12, 2021): 801–5. http://dx.doi.org/10.1126/science.abf6239.
Full textEgorova, L. M., V. I. Larin, and V. V. Datsenko. "Chemical Etching of Cu98Be Alloy in Electrolyte Solutions." Elektronnaya Obrabotka Materialov 58, no. 1 (February 2022): 22–29. http://dx.doi.org/10.52577/eom.2022.58.1.22.
Full textHanke, L. D., and K. Schenk. "Sputter etching for microstructure evaluation of small-diameter corrosion-resistant MP35N alloy wire." Proceedings, annual meeting, Electron Microscopy Society of America 54 (August 11, 1996): 1038–39. http://dx.doi.org/10.1017/s0424820100167652.
Full textSong, Yunwon, Bugeun Ki, Keorock Choi, Ilwhan Oh, and Jungwoo Oh. "In-plane and out-of-plane mass transport during metal-assisted chemical etching of GaAs." J. Mater. Chem. A 2, no. 29 (2014): 11017–21. http://dx.doi.org/10.1039/c4ta02189d.
Full textLi, Meicheng, Yingfeng Li, Wenjian Liu, Luo Yue, Ruike Li, Younan Luo, Mwenya Trevor, et al. "Metal-assisted chemical etching for designable monocrystalline silicon nanostructure." Materials Research Bulletin 76 (April 2016): 436–49. http://dx.doi.org/10.1016/j.materresbull.2016.01.006.
Full textHan, Hee, Zhipeng Huang, and Woo Lee. "Metal-assisted chemical etching of silicon and nanotechnology applications." Nano Today 9, no. 3 (June 2014): 271–304. http://dx.doi.org/10.1016/j.nantod.2014.04.013.
Full textSandu, Georgiana, Jonathan Avila Osses, Marine Luciano, Darwin Caina, Antoine Stopin, Davide Bonifazi, Jean-François Gohy, et al. "Kinked Silicon Nanowires: Superstructures by Metal-Assisted Chemical Etching." Nano Letters 19, no. 11 (October 8, 2019): 7681–90. http://dx.doi.org/10.1021/acs.nanolett.9b02568.
Full textLeng, Xidu, Chengyong Wang, and Zhishan Yuan. "Progress in metal-assisted chemical etching of silicon nanostructures." Procedia CIRP 89 (2020): 26–32. http://dx.doi.org/10.1016/j.procir.2020.05.114.
Full textQuiroga-González, Enrique, Miguel Ángel Juárez-Estrada, and Estela Gómez-Barojas. "(Invited) Light Enhanced Metal Assisted Chemical Etching of Silicon." ECS Transactions 86, no. 1 (July 20, 2018): 55–63. http://dx.doi.org/10.1149/08601.0055ecst.
Full textKim, Sang-Mi, and Dahl-Young Khang. "Bulk Micromachining of Si by Metal-assisted Chemical Etching." Small 10, no. 18 (May 13, 2014): 3761–66. http://dx.doi.org/10.1002/smll.201303379.
Full textCheung, Ho-Yuen, Hao Lin, Fei Xiu, Fengyun Wang, SenPo Yip, Johnny C. Ho, and Chun-Yuen Wong. "Mechanistic Characteristics of Metal-Assisted Chemical Etching in GaAs." Journal of Physical Chemistry C 118, no. 13 (March 25, 2014): 6903–8. http://dx.doi.org/10.1021/jp500968p.
Full textChartier, C., S. Bastide, and C. Lévy-Clément. "Metal-assisted chemical etching of silicon in HF–H2O2." Electrochimica Acta 53, no. 17 (July 2008): 5509–16. http://dx.doi.org/10.1016/j.electacta.2008.03.009.
Full textSmith, Zachary R., Rosemary L. Smith, and Scott D. Collins. "Mechanism of nanowire formation in metal assisted chemical etching." Electrochimica Acta 92 (March 2013): 139–47. http://dx.doi.org/10.1016/j.electacta.2012.12.075.
Full textYang, Xiaoyu, Ling Tong, Lin Wu, Baoguo Zhang, Zhiyuan Liao, Ao Chen, Yilai Zhou, Ying Liu, and Ya Hu. "Research progress of silicon nanostructures prepared by electrochemical etching based on galvanic cells." Journal of Physics: Conference Series 2076, no. 1 (November 1, 2021): 012117. http://dx.doi.org/10.1088/1742-6596/2076/1/012117.
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