Journal articles on the topic 'MEMS'
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Deckert, Martin, Michael Lippert, Kentaroh Takagaki, Andreas Brose, Frank Ohl, and Bertram Schmidt. "Fabrication of MEMS-based 3D-μECoG-MEAs." Current Directions in Biomedical Engineering 2, no. 1 (September 1, 2016): 83–86. http://dx.doi.org/10.1515/cdbme-2016-0021.
Full textZatta, G., M. Gallazzi, A. De Agostini, A. Albertini, Maria Radice, D. Alberti, and G. L. Tarolo. "Accuracy and Reproducibility of the Assessment of the Global Ejection Fraction Using 195mAu and a Single-Crystal Digital Gamma Camera: Influence of Collimator Design." Nuklearmedizin 26, no. 04 (1987): 167–71. http://dx.doi.org/10.1055/s-0038-1628883.
Full textSadiku, M. "MEMS." IEEE Potentials 21, no. 1 (2002): 4–5. http://dx.doi.org/10.1109/45.985317.
Full textShumway, Russell. "Assembly Standardization for the Diverse Packaging Requirements of MEMS & Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2013, DPC (January 1, 2013): 000571–91. http://dx.doi.org/10.4071/2013dpc-ta34.
Full textShumway, Russell. "Assembly Standardization for the Diverse Packaging Requirements of MEMS & Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2014, DPC (January 1, 2014): 000567–87. http://dx.doi.org/10.4071/2014dpc-ta31.
Full textBouissac, Paul. "On signs, memes and MEMS: Toward evolutionary ecosemiotics." Sign Systems Studies 29, no. 2 (December 31, 2001): 627–46. http://dx.doi.org/10.12697/sss.2001.29.2.12.
Full textJiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.
Full textTilmans, Harrie A. C., Walter De Raedt, and Eric Beyne. "MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP." Journal of Micromechanics and Microengineering 13, no. 4 (June 13, 2003): S139—S163. http://dx.doi.org/10.1088/0960-1317/13/4/323.
Full textKAERIYAMA, TOSHIYUKI. "MEMS Commercialization and Future Prospects. MEMS Display." Journal of the Institute of Electrical Engineers of Japan 120, no. 11 (2000): 677–79. http://dx.doi.org/10.1541/ieejjournal.120.677.
Full textChen, Kai, Li Qing Fang, and Hong Kai Wang. "The Primary Processing of MEMS Devices and Applications Analysis." Advanced Materials Research 418-420 (December 2011): 2134–38. http://dx.doi.org/10.4028/www.scientific.net/amr.418-420.2134.
Full textTadigadapa, Srinivas A., and Nader Najafi. "Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective." Journal of Manufacturing Science and Engineering 125, no. 4 (November 1, 2003): 816–23. http://dx.doi.org/10.1115/1.1617286.
Full textWang, Jie Xuan, and Xin Ming Qian. "Application and Development of MEMS in the Field of Aerospace." Applied Mechanics and Materials 643 (September 2014): 72–76. http://dx.doi.org/10.4028/www.scientific.net/amm.643.72.
Full textNur'aidha, Amalia Cemara, Didik R. Santoso, and Sukir Maryanto. "Pengembangan sensor seismik berbasis MEMS accelerometer." Jurnal Teras Fisika 3, no. 2 (September 8, 2020): 149. http://dx.doi.org/10.20884/1.jtf.2020.3.2.3080.
Full textWang, Haoran, Yifei Ma, Qincheng Zheng, Ke Cao, Yao Lu, and Huikai Xie. "Review of Recent Development of MEMS Speakers." Micromachines 12, no. 10 (October 16, 2021): 1257. http://dx.doi.org/10.3390/mi12101257.
Full textZhu, Jianxiong, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong, and Chengkuo Lee. "Development Trends and Perspectives of Future Sensors and MEMS/NEMS." Micromachines 11, no. 1 (December 18, 2019): 7. http://dx.doi.org/10.3390/mi11010007.
Full textHuff, Michael. "MEMS fabrication." Sensor Review 22, no. 1 (March 1, 2002): 18–33. http://dx.doi.org/10.1108/02602280210697087.
Full textTANAKA, Shuji, and Masayoshi ESASHI. "Power MEMS." Journal of the Surface Finishing Society of Japan 54, no. 12 (2003): 908–14. http://dx.doi.org/10.4139/sfj.54.908.
Full textVan Der Avoort, Casper. "MEMS RESONATORS." Journal of the Acoustical Society of America 131, no. 3 (2012): 2342. http://dx.doi.org/10.1121/1.3696730.
Full textEllis, Charles, Aubrey Beal, and Robert Dean. "Cu MEMS." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2011, DPC (January 1, 2011): 000952–73. http://dx.doi.org/10.4071/2011dpc-tp25.
Full textGad-el-Hak,, M., and WE Seemann,. "MEMS Handbook." Applied Mechanics Reviews 55, no. 6 (October 16, 2002): B109. http://dx.doi.org/10.1115/1.1508147.
Full textAgbenyega, Jonathan. "Flexible MEMs." Materials Today 13, no. 4 (April 2010): 8. http://dx.doi.org/10.1016/s1369-7021(10)70048-1.
Full textBryzek, J., S. Roundy, B. Bircumshaw, C. Chung, K. Castellino, J. R. Stetter, and M. Vestel. "Marvelous MEMs." IEEE Circuits and Devices Magazine 22, no. 2 (March 2006): 8–28. http://dx.doi.org/10.1109/mcd.2006.1615241.
Full textWood, Robert, Ramaswamy Mahadevan, Vijay Dhuler, Bruce Dudley, Allen Cowen, Ed Hill, and Karen Markus. "Mems microrelays." Mechatronics 8, no. 5 (August 1998): 535–47. http://dx.doi.org/10.1016/s0957-4158(98)00021-x.
Full textDe Wolf, Ingrid. "MEMS reliability." Microelectronics Reliability 43, no. 7 (July 2003): 1047–48. http://dx.doi.org/10.1016/s0026-2714(03)00117-3.
Full textESASHI, Masayoshi. "Micromachine/MEMS." Journal of the Japan Society for Precision Engineering 75, no. 1 (2009): 78–79. http://dx.doi.org/10.2493/jjspe.75.78.
Full textShoji, Shuichi. "MEMS Technology." IEEJ Transactions on Sensors and Micromachines 117, no. 8 (1997): 399–400. http://dx.doi.org/10.1541/ieejsmas.117.399.
Full textMajumder, S., J. Lampen, R. Morrison, and J. Maciel. "MEMS switches." IEEE Instrumentation & Measurement Magazine 6, no. 1 (March 2003): 12–15. http://dx.doi.org/10.1109/mim.2003.1184267.
Full textTamura, Hirokazu. "MEMS actuators." Journal of the Acoustical Society of America 118, no. 1 (2005): 23. http://dx.doi.org/10.1121/1.1999397.
Full textOHTAKA, Koichi. "MEMS Devices." Journal of the Society of Mechanical Engineers 113, no. 1105 (2010): 948–49. http://dx.doi.org/10.1299/jsmemag.113.1105_948.
Full textKanno, Isaku. "Piezoelectric MEMS: Ferroelectric thin films for MEMS applications." Japanese Journal of Applied Physics 57, no. 4 (March 9, 2018): 040101. http://dx.doi.org/10.7567/jjap.57.040101.
Full textBrown, Alan S. "MEMS Across the Valley of Death." Mechanical Engineering 128, no. 04 (April 1, 2006): 26–30. http://dx.doi.org/10.1115/1.2006-apr-1.
Full textNovikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (September 15, 2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.
Full textLiu, Zhenya, and Junchao Wang. "Computer-aided design of MEMS-FP based on reinforcement learning." Journal of Physics: Conference Series 2809, no. 1 (August 1, 2024): 012015. http://dx.doi.org/10.1088/1742-6596/2809/1/012015.
Full textLiang, Xin Jian, and S. Q. Gao. "A MEMS Capacitive Gyroscope with Improved Reliability." Materials Science Forum 628-629 (August 2009): 341–46. http://dx.doi.org/10.4028/www.scientific.net/msf.628-629.341.
Full textWang, Hao, Meng Nie, and Qing An Huang. "Design of Intelligent Meteorological System Based on MEMS." Key Engineering Materials 609-610 (April 2014): 801–6. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.801.
Full textYang, Le, and Xiao Ping Liao. "Effects of Packaging on RF MEMS Switch’s Return Loss." Advanced Materials Research 60-61 (January 2009): 94–98. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.94.
Full textXu, Fahu, Dayong Qiao, Changfeng Xia, Xiumin Song, and Yaojun He. "Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application." Micromachines 12, no. 11 (October 21, 2021): 1292. http://dx.doi.org/10.3390/mi12111292.
Full textJiang, Bo, Xing Lin Qi, and Zhi Ning Zhao. "Key Technologies Research of MEMS Pressure Sensor for Fuze." Applied Mechanics and Materials 472 (January 2014): 242–46. http://dx.doi.org/10.4028/www.scientific.net/amm.472.242.
Full textJin, Yu Feng, Hao Tang, and Zhen Feng Wang. "Micro/Nano Film Getters for Vacuum Maintenance of MEMS." Key Engineering Materials 353-358 (September 2007): 2924–27. http://dx.doi.org/10.4028/www.scientific.net/kem.353-358.2924.
Full textLiu, Jia Kai, Xing Lin Qi, Jin Jia, and Bo Fu. "Study on the Reliability Problem of MEMS Fuze Mechanism." Advanced Materials Research 628 (December 2012): 72–77. http://dx.doi.org/10.4028/www.scientific.net/amr.628.72.
Full textFeng, Xian Zhang, Liang Ji Chen, and Jun Wei Cheng. "Application and Prospects of Packaging Technology of MEMS." Key Engineering Materials 460-461 (January 2011): 274–79. http://dx.doi.org/10.4028/www.scientific.net/kem.460-461.274.
Full textFonseca, Daniel J., and Miguel Sequera. "On MEMS Reliability and Failure Mechanisms." International Journal of Quality, Statistics, and Reliability 2011 (November 3, 2011): 1–7. http://dx.doi.org/10.1155/2011/820243.
Full textYang, Jiaping. "MEMS-Based Probe Recording Technology." Journal of Nanoscience and Nanotechnology 7, no. 1 (January 1, 2007): 181–92. http://dx.doi.org/10.1166/jnn.2007.18014.
Full textVyas, Sarvesh, Ali K. Alhussainy, Y. Kamala Raju, Manjunatha, Arun Pratap Srivastava, Alok Jain, and T. Vijetha. "Analytical Review on Enhancing Sustainability in microsystems by Integrating MEMS for Compact Design." E3S Web of Conferences 552 (2024): 01108. http://dx.doi.org/10.1051/e3sconf/202455201108.
Full textChen, Ying Jian. "Advantages of MEMS and its Distinct New Applications." Advanced Materials Research 813 (September 2013): 205–9. http://dx.doi.org/10.4028/www.scientific.net/amr.813.205.
Full textXie, Hong, and Ying Jian Chen. "MEMS: Its Distinct Advantages and some New Applications." Advanced Materials Research 711 (June 2013): 550–55. http://dx.doi.org/10.4028/www.scientific.net/amr.711.550.
Full textHua, Yong, Shuangyuan Wang, Bingchu Li, Guozhen Bai, and Pengju Zhang. "Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR." Micromachines 12, no. 1 (January 9, 2021): 69. http://dx.doi.org/10.3390/mi12010069.
Full textBikonis, Krzysztof, and Jerzy Demkowicz. "Mems Technology Quality Requirements as Applied to Multibeam Echosounder." Polish Maritime Research 25, no. 4 (December 1, 2018): 59–64. http://dx.doi.org/10.2478/pomr-2018-0132.
Full textHua, Yong, Shuangyuan Wang, Bingchu Li, Guozhen Bai, and Pengju Zhang. "Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR." Micromachines 12, no. 1 (January 9, 2021): 69. http://dx.doi.org/10.3390/mi12010069.
Full textSullivan, J. P., T. A. Friedmann, and K. Hjort. "Diamond and Amorphous Carbon MEMS." MRS Bulletin 26, no. 4 (April 2001): 309–11. http://dx.doi.org/10.1557/mrs2001.68.
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