Relevant bibliographies by topics / MEMS Piezoelectric Acoustic Transducers

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers

Academic literature on the topic 'MEMS Piezoelectric Acoustic Transducers'

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Published: 6 September 2023

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Journal articles on the topic "MEMS Piezoelectric Acoustic Transducers"

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XIAOMING, WU, YANG YI, ZHU YI PING, ZHANG NIN XING, REN TIANLING, and LIU LITIAN. "MEMS PIEZOELECTRIC ACOUSTIC TRANSDUCER." Integrated Ferroelectrics 89, no. 1 (April 18, 2007): 150–59. http://dx.doi.org/10.1080/10584580601077716.

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Chen, Shih-Jui, Youngki Choe, Lukas Baumgartel, Anderson Lin, and Eun Sok Kim. "Edge-released, piezoelectric MEMS acoustic transducers in array configuration." Journal of Micromechanics and Microengineering 22, no. 2 (January 13, 2012): 025005. http://dx.doi.org/10.1088/0960-1317/22/2/025005.

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Mina, Ioanna, Hyunsoo Kim, Insoo Kim, Sung Park, Kyusun Choi, Thomas Jackson, Richard Tutwiler, and Susan Trolier-McKinstry. "High frequency piezoelectric MEMS ultrasound transducers." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54, no. 12 (December 2007): 2422–30. http://dx.doi.org/10.1109/tuffc.2007.555.

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Sun, Cuimin, Menghua Zhang, Guangyong Huang, Ping Zhang, Ronghui Lin, Xiangjun Wang, and Hui You. "A Microfluidic System of Gene Transfer by Ultrasound." Micromachines 13, no. 7 (July 16, 2022): 1126. http://dx.doi.org/10.3390/mi13071126.

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Ultrasonic gene transfer has advantages beyond other cell transfer techniques because ultrasound does not directly act on cells, but rather pushes the gene fragments around the cells into cells through an acoustic hole effect. Most examples reported were carried out in macro volumes with conventional ultrasonic equipment. In the present study, a MEMS focused ultrasonic transducer based on piezoelectric thin film with flexible substrate was integrated with microchannels to form a microfluidic system of gene transfer. The core part of the system is a bowl-shaped curved piezoelectric film structure that functions to focus ultrasonic waves automatically. Therefore, the low input voltage and power can obtain the sound pressure exceeding the cavitation threshold in the local area of the microchannel in order to reduce the damage to cells. The feasibility of the system is demonstrated by finite element simulation and an integrated system of MEMS ultrasonic devices and microchannels are developed to successfully carry out the ultrasonic gene transfection experiments for HeLa cells. The results show that having more ultrasonic transducers leads a higher transfection rate. The system is of great significance to the development of single-cell biochip platforms for early cancer diagnosis and assessment of cancer treatment.
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Nastro, Alessandro, Marco Ferrari, Libor Rufer, Skandar Basrour, and Vittorio Ferrari. "Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency." Micromachines 13, no. 1 (January 8, 2022): 96. http://dx.doi.org/10.3390/mi13010096.

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The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode driving and sensing. The piezoelectric MEMS transducer has been fabricated using the PiezoMUMPs technology, and it operates in a plate flexural mode exploiting a 6 mm × 6 mm doped silicon diaphragm with an aluminum nitride (AlN) piezoelectric layer deposited on top. The piezoelectric layer can be actuated by means of electrodes placed at the edges of the diaphragm above the AlN film. By applying an adjustable bias voltage Vb between two properly-connected electrodes and the doped silicon, the d31 mode in the AlN film has been exploited to electrically induce a planar static compressive or tensile stress in the diaphragm, depending on the sign of Vb, thus shifting its resonant frequency. The working principle has been first validated through an eigenfrequency analysis with an electrically induced prestress by means of 3D finite element modelling in COMSOL Multiphysics®. The first flexural mode of the unstressed diaphragm results at around 5.1 kHz. Then, the piezoelectric MEMS transducer has been experimentally tested in both receiver and transmitter modes. Experimental results have shown that the resonance can be electrically tuned in the range Vb = ±8 V with estimated tuning sensitivities of 8.7 ± 0.5 Hz/V and 7.8 ± 0.9 Hz/V in transmitter and receiver modes, respectively. A matching of the series and parallel resonant frequencies has been experimentally demonstrated in voltage-mode driving and sensing by applying Vb = 0 in transmission and Vb = −1.9 V in receiving, respectively, thereby obtaining the optimal acoustic emission and detection effectiveness at the same operating frequency.
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Chang, Shun Hsyung, Fu Tai Wang, Jiing Kae Wu, Sergey N. Shevtsov, Igor V. Zhilyaev, and Maria S. Shevtsova. "The Multiobjective Design Optimization of pMUT Hydrophone." Applied Mechanics and Materials 727-728 (January 2015): 660–65. http://dx.doi.org/10.4028/www.scientific.net/amm.727-728.660.

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The paper presents some results of multi-objective optimization for the multilayered membrane-type piezoceramic MEMS based transducers with perforated active PZT and intermediate diaphragms, covered by the protective plates, and a vacuum chamber. An influence of the protective plate elastic and viscous properties, the dimensions and the relative areas of the perforated holes on the sensitivity’s frequency response of the hydrophone was studied for the broadening and equalizes the operating frequency band. We optimize the key design’s parameters using the Pareto approach with the finite element (FE) model of coupled piezoelectric-acoustic problem for the hydrophone.
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Zhou, Yongxin, Yuandong Gu, and Songsong Zhang. "Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection." Micromachines 13, no. 11 (November 5, 2022): 1916. http://dx.doi.org/10.3390/mi13111916.

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This paper introduces a novel nondestructive wafer scale thin film thickness measurement method by detecting the reflected picosecond ultrasonic wave transmitting between different interfacial layers. Unlike other traditional approaches used for thickness inspection, this method is highly efficient in wafer scale, and even works for opaque material. As a demonstration, we took scandium doped aluminum nitride (AlScN) thin film and related piezoelectric stacking layers (e.g. Molybedenum/AlScN/Molybdenum) as the case study to explain the advantages of this approach. In our experiments, a laser with a wavelength of 515 nm was used to first measure the thickness of (1) a single Molybdenum (Mo) electrode layer in the range of 100–300 nm, and (2) a single AlScN piezoelectric layer in the range of 600–1000 nm. Then, (3) the combined stacking layers were measured. Finally, (4) the thickness of a standard piezoelectric composite structure (Mo/AlScN/Mo) was characterized based on the conclusions and derivation extracted from the aforementioned sets of experiments. This type of standard piezoelectric composite has been widely adopted in a variety of Micro-electromechanical systems (MEMS) devices such as the Piezoelectric Micromachined Ultrasonic Transducer (PMUT), the Film Bulk Acoustic Resonator (FBAR), the Surface Acoustic Wave (SAW) and more. A comparison between measurement data from both in-line and off-line (using Scanning Electron Microscope) methods was conducted. The result from such in situ 8-inch wafer scale measurements was in a good agreement with the SEM data.
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Abdalla, Omer M. O., Gianluca Massimino, Fabio Quaglia, Marco Passoni, and Alberto Corigliano. "PMUTs Arrays for Structural Health Monitoring of Bolted-Joints." Micromachines 14, no. 2 (January 25, 2023): 311. http://dx.doi.org/10.3390/mi14020311.

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Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural system. For bolted joints to function properly, it is essential to maintain a suitable level of pre-tensioning. In this work, an array of PMUTs attached to the head and to the end of a bolt, serve as transmitter and receiver, respectively, in a pitch-catch Ultrasonic Testing (UT) scenario. The primary objective is to detect the Change in Time of Flight (CTOF) of the acoustic wave generated by the PMUT array and propagating along the bolt’s axis between a non-loaded bolt and a bolt in service. To model the pre-tensioning of bolted joints and the transmission of the acoustic wave to and from a group of PMUTs through the bolt, a set of numerical models is created. The CTOF is found to be linearly related to the amount of pre-tensioning. The numerical model is validated through comparisons with the results of a preliminary experimental campaign.
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Reid, Andrew. "Unnatural hearing—3D printing functional polymers as a path to bio-inspired microphone design." Journal of the Acoustical Society of America 153, no. 3_supplement (March 1, 2023): A195. http://dx.doi.org/10.1121/10.0018636.

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In nature, auditory organs are rarely passive transducers of their environment. Highly localized material properties and complex interdependencies mechanically filter the acoustic signal, reducing the burden of signal processing to the nervous system. Capturing these design traits in engineered systems is important for device miniaturization and energy efficiency, but manufacturing a functional electromechanical device, like a microphone, at the microscale using biologically inspired 3D designs and highly anisotropic materials remains extremely challenging. Our research uses one-pot synthesis methods for a variety of tissue-like hydrogels, polymers, and functionalized piezoelectric composites that are compatible with vat-based photopolymerization 3D printing. These materials can be used to produce reproductions of microphone designs using functional photopolymers for the conductive, piezoelectric, elastomeric, and structural elements. Used to produce mimetic structures, for example, in a device based on the directional sensitivity of the parasitoid fly Ormia ochracea, we can reproduce O. ochracea’s sound localization capability while addressing the impracticalities in frequency, sensitivity and scale of MEMS or micromachined designs. Each of the materials used has a unique set of acoustic, electrical and mechanical properties which can be tailored by altering the synthesis process leading to a truly vast design space which we are only beginning to explore.
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Vennerod, Jakob, and Matthieu Lacolle. "Miniature optical MEMS microphone with 14dBA noise floor." Journal of the Acoustical Society of America 153, no. 3_supplement (March 1, 2023): A144. http://dx.doi.org/10.1121/10.0018444.

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This paper explains the fundamental technology used to create an optical microphone transducer. In recent years, microelectromechanical system (MEMS) capacitive microphones have demonstrated improved performance. State-of-the-art capacitive MEMS microphones can achieve SNR in the order of 73 dBA (21 dBA noise floor) with overall dynamic range in the order of 101 dB. There are fundamental challenges to driving the performance of capacitive MEMS microphone technology in very small packages to new heights. Piezoelectric MEMS microphones have not demonstrated SNR performance >65 dBA. The next breakthrough in miniature microphone technology will come from optical MEMS microphone technology. 80dB SNR (14 dBA noise floor) with 132 dB dynamic range (146dB maximum sound pressure level) has been achieved in a very small package. This paper will review the fundamentals of optical acoustic transduction and describe some of the approaches to miniaturization of the technology.
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Dissertations / Theses on the topic "MEMS Piezoelectric Acoustic Transducers"

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Tabrizian, Roozbeh. "Temperature-compensated silicon-based bulk acoustic resonators." Diss., Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/52929.

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Microelectromechanical resonators have found widespread applications in timing, sensing and spectral processing. One of the important performance metrics of MEMS resonators is the temperature sensitivity of their frequency. The main objective of this dissertation is the compensation and control of the temperature sensitivity of silicon resonators through engineering of device geometry and structural composition. This has been accomplished through formation of composite platforms or novel geometries based on dispersion characteristics of guided acoustic waves in single crystalline silicon (SCS) microstructures. Furthermore, another objective of this dissertation is to develop efficient longitudinal piezoelectric transduction for in-plane resonance modes of SCS resonators that have lithographically-defined frequencies, to reduce their motional resistance (Rm). A uniformly distributed matrix of silicon dioxide pillars is embedded inside the silicon substrate to form a homogenous composite silicon-oxide platform (SilOx) with nearly perfect temperature-compensated stiffness moduli. Temperature-stable micro-resonators implemented in SilOx platform operating in any desired in- and out-of-plane resonance modes show full compensation of linear temperature coefficient of frequency (TCF). Overall frequency drifts as small as 80 ppm has been achieved over the industrial temperature range (-40°C to 80°C) showing a 40x improvement compared to uncompensated native silicon resonators. A 27 MHz temperature-compensated MEMS oscillator implemented using SilOx resonator demonstrated sub-ppm instability over the industrial temperature range. Besides this, a new formulation of different resonance modes of SCS resonators based on their constituent acoustic waves is presented in this dissertation. This enables engineering of the acoustic resonator to provide several resonance modes with mechanical energy trapped in central part of the resonator, thus obviating narrow tethers traditionally used for anchoring the cavity to the substrate. This facilitates simultaneous piezoelectric-transduction of multiple modes with different TCFs through independent electrical ports, which can realize highly accurate self-temperature sensing of the device using a beat frequency (fb) generated from linear combination of different modes. Piezoelectrically-transduced multi-port silicon resonators implemented using this technique provide highly temperature-sensitive fb with a large TCF of ~8500 ppm/°C showing 100x improvement compared to other Quartz/MEMS counterparts, suggesting these devices as highly sensitive temperature sensors for environmental sensing and temperature-compensated/oven-controlled crystal oscillator (TCXO/OCXO) applications. Another part of this dissertation introduces a novel longitudinal piezoelectric transduction technique developed for implementation of low Rm silicon resonators operating in lithographically defined in-plane modes. Aluminum nitride films deposited on the sidewalls of thick silicon microstructures provides efficient electromechanical transduction required to achieve low Rm. 100 MHz SCS bulk acoustic resonators implemented using this transduction technique demonstrates Rm of 33Ω showing a 100x improvement compared to electrostatically transduced counterparts. Low-loss narrow-band filters with tunable bandwidth and frequency have been implemented by electrical coupling of these devices, showing their potential for realization of truly reconfigurable and programmable filter arrays required for software-defined radios.
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Senesi, Matteo. "Frequency steerable acoustic transducers." Diss., Georgia Institute of Technology, 2012. http://hdl.handle.net/1853/44819.

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Structural health monitoring (SHM) is an active research area devoted to the assessment of the structural integrity of critical components of aerospace, civil and mechanical systems. Guided wave methods have been proposed for SHM of plate-like structures using permanently attached piezoelectric transducers, which generate and sense waves to evaluate the presence of damage. Effective interrogation of structural health is often facilitated by sensors and actuators with the ability to perform directional scanning. In this research, the novel class of Frequency Steerable Acoustic Transducers (FSATs) is proposed for directional generation/sensing of guided waves. The FSATs are characterized by a spatial arrangement of the piezoelectric material which leads to frequency-dependent directionality. The resulting FSATs can be employed both for directional sensing and generation of guided waves, without relying on phasing and control of a large number of channels. Because there is no need for individual control of transducer elements, hardware and power requirements are drastically reduced so that cost and hardware limitations of traditional phased arrays can be partially overcome. The FSATs can be also good candidates for remote sensing and actuation applications, due to their hardware simplicity and robustness. Validation of the proposed concepts first employs numerical methods. Next, the prototyping of the FSATs allows an experimental investigation confirming the analytical and numerical predictions. Imaging algorithm based on frequency warping is also proposed to enhance results representation.
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Sharapov, V. M., K. V. Bazilo, and R. V. Trembovetskaya. "Electro-Acoustic System with Piezoelectric Sensor." Thesis, Sumy State University, 2015. http://essuir.sumdu.edu.ua/handle/123456789/41006.

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Piezoelectric transducers are widely used in electro-acoustic, hydroacoustic, ultrasonic, medical and measuring techniques, security and control systems. One of the main characteristics of the piezoelectric transducers is operation frequency band. Despite the fact that it is used to be expanded, narrowband piezoelectric transducers also can be used. In particular, the fields of application of piezoelectric transducers are narrowband alarm systems, for example, glass breakage detectors [1].
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Larson, Gregg D. "The analysis and realization of a state switched acoustic transducer." Diss., Georgia Institute of Technology, 1996. http://hdl.handle.net/1853/16008.

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Clark, Robert L. "Advanced sensing techniques for active structural acoustic control /." This resource online, 1992. http://scholar.lib.vt.edu/theses/available/etd-05222007-091351/.

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Jenne, Kirk E. "Acoustic cymbal transducers-design, hydrostatic pressure compensation, and acoustic performance." Thesis, Monterey, Calif. : Springfield, Va. : Naval Postgraduate School ; Available from National Technical Information Service, 2004. http://library.nps.navy.mil/uhtbin/hyperion/04Mar%5FJenne.pdf.

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Thesis (M.S. in Engineering Acoustics)--Naval Postgraduate School, March 2004.
Thesis advisor(s): Thomas R. Howarth, Dehua Huang. Includes bibliographical references (p. 67-69). Also available online.
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Dhar, Romit. "Growth and optimization of piezoelectric single crystal transducers for energy harvesting from acoustic sources." Pullman, Wash. : Washington State University, 2009. http://www.dissertations.wsu.edu/Dissertations/Spring2009/R_Dhar_031309.pdf.

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Cortes, Correales Daniel H. "Elastic guided wave dispersion in layered piezoelectric plates application to ultrasound transducers and acoustic sensors /." Morgantown, W. Va. : [West Virginia University Libraries], 2009. http://hdl.handle.net/10450/10206.

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Thesis (Ph. D.)--West Virginia University, 2009.
Title from document title page. Document formatted into pages; contains vi, 84 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 79-84).
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Clark, Robert L. Jr. "Advanced sensing techniques for active structural acoustic control." Diss., Virginia Tech, 1992. http://hdl.handle.net/10919/37880.

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This study presents a basis for the analytical and experimental procedures as well as design techniques required in achieving adaptive structures for active structural acoustic control (ASAC). Test structures studied in this work included a baffled simply supported beam and a baffled simply supported plate which were subjected to a harmonic input disturbance created physically with a shaker and modelled by a point force input. Structural acoustic control was achieved with piezoelectric actuators bonded to the surface of the test structure. The primary focus of this work was devoted to studying alternative sensing techniques in feed forward control applications. Specifically, shaped distributed structural sensors constructed from polyvinylidene fluoride (PVDF), distributed acoustic near-field sensors constructed from PVDF, and accelerometers were explored as alternatives to microphones which are typically implemented as error sensors in the cost function of the control approach. The chosen control algorithm in this study was the feed forward filtered-x version of the adaptive LMS algorithm. A much lower level of system modelling is required with this method of control in comparison to state feedback control methods. As a result, much of the structural acoustic coupling (i.e. system modelling) must be incorporated into the sensor design.
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Naeli, Kianoush. "Optimization of piezoresistive cantilevers for static and dynamic sensing applications." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/28247.

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Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009.
Committee Chair: Brand, Oliver; Committee Member: Adibi, Ali; Committee Member: Allen, Mark G.; Committee Member: Bottomley, Lawrence A.; Committee Member: Degertekin, F. Levent.
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Books on the topic "MEMS Piezoelectric Acoustic Transducers"

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Koray, Akdoğan E., and SpringerLink (Online service), eds. Piezoelectric and Acoustic Materials for Transducer Applications. Boston, MA: Springer Science+Business Media, LLC, 2008.

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Piezoelectric sensorics: Force, strain, pressure, acceleration and acoustic emission sensors, materials and amplifiers. Berlin: Springer, 2002.

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Safari, Ahmad, and E. Koray Akdogan. Piezoelectric and Acoustic Materials for Transducer Applications. Springer, 2010.

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Book chapters on the topic "MEMS Piezoelectric Acoustic Transducers"

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Muralt, P. "Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films." In Electroceramic-Based MEMS, 37–48. Boston, MA: Springer US, 2005. http://dx.doi.org/10.1007/0-387-23319-9_3.

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Bassiri-Gharb, Nazanin. "Piezoelectric MEMS: Materials and Devices." In Piezoelectric and Acoustic Materials for Transducer Applications, 413–30. Boston, MA: Springer US, 2008. http://dx.doi.org/10.1007/978-0-387-76540-2_20.

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Adams, Thomas M., and Richard A. Layton. "Piezoelectric transducers." In Introductory MEMS, 255–82. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09511-0_10.

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Sharapov, Valeriy, Zhanna Sotula, and Larisa Kunickaya. "Electro-Acoustic Transducers." In Microtechnology and MEMS, 41–56. Cham: Springer International Publishing, 2013. http://dx.doi.org/10.1007/978-3-319-01198-1_3.

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Baborowski, J., N. Ledermann, S. Gentil, and P. Muralt. "Micromachining of Piezoelectric MEMS." In Transducers ’01 Eurosensors XV, 596–99. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_141.

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Niu, Meng-Nian, and Eun Sok Kim. "Bimorph Piezoelectric Acoustic Transducer." In Transducers ’01 Eurosensors XV, 110–13. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_25.

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Ferrari, Vittorio, and Ralf Lucklum. "Overview of Acoustic-Wave Microsensors." In Piezoelectric Transducers and Applications, 39–54. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-662-05361-4_2.

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Sharapov, Valeriy, Zhanna Sotula, and Larisa Kunickaya. "General Information About Electro-Acoustic Transducers." In Microtechnology and MEMS, 1–11. Cham: Springer International Publishing, 2013. http://dx.doi.org/10.1007/978-3-319-01198-1_1.

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Pappalardo, Massimo, Giosue Caliano, Alessandro S. Savoia, and Alessandro Caronti. "Micromachined Ultrasonic Transducers." In Piezoelectric and Acoustic Materials for Transducer Applications, 453–78. Boston, MA: Springer US, 2008. http://dx.doi.org/10.1007/978-0-387-76540-2_22.

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Jiménez, Yolanda, Marcelo Otero, and Antonio Arnau. "Data analysis and Interpretation in Bulk Acoustic Wave — Thickness Shear Mode Sensors." In Piezoelectric Transducers and Applications, 255–86. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-662-05361-4_16.

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Conference papers on the topic "MEMS Piezoelectric Acoustic Transducers"

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Li, Yongfang, Takahiro Omori, Kazuo Watabe, and Hiroshi Toshiyoshi. "Improved Piezoelectric MEMS Acoustic Emission Sensors." In 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, 2021. http://dx.doi.org/10.1109/transducers50396.2021.9495552.

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Shevtsov, Sergey, Shun-Hsyung (Stephen) Chang, Valery Kalinchuk, Igor Zhilyaev, and Maria Shevtsova. "Multiobjective Pareto-Based Optimization of pMUT Hydrophone With Piezoelectric Active Diaphragm." In ASME 2014 12th Biennial Conference on Engineering Systems Design and Analysis. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/esda2014-20281.

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The design of high-sensitive hydrophones is one of the research interests in underwater acoustics. Due to progress of micro- and nanotechnology the most attention of researchers is attracted by the transducers that use the micro-electromechanical system (MEMS) concept. Piezoelectric micro-machined ultrasonic transducers (pMUTs) present a new approach to sound detection and generation that can overcome the shortcomings of conventional transducers. For accurate ultrasound field measurement, small size hydrophones which are smaller than the acoustic wavelength are required for providing an omnidirectional response and avoid spatial averaging. This paper presents some results of multiobjective optimization for membrane-type piezoceramic MEMS based transducers. We investigate the miniaturized membrane-type sensor with perforated holes in the active PZT and intermediate membranes, with the protective plates and a vacuum chamber. An influence of the protective plate elastic and viscous properties, the dimensions and the relative area of the perforated holes on the sensitivity’s frequency response of the hydrophone was studied for the broadening and equalizes the operating frequency band. We optimize these key parameters using the Pareto approach with the finite element (FE) model of coupled piezoelectric-acoustic problem. Finally, the set of optimized hydrophone structures and some examples of obtained sensitivity frequency response are demonstrated.
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Turolla, Axel, Massimo Zampato, Stefano Carminati, and Paolo Ferrara. "Acoustic MEMS Transducers: Look Ahead of the Bit and Geopressure Monitoring." In Abu Dhabi International Petroleum Exhibition & Conference. SPE, 2021. http://dx.doi.org/10.2118/207841-ms.

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Abstract This paper describes the design and implementation of Acoustic Micro Electro Mechanical Systems (hereinafter referred to asA-MEMS)working in fluid-coupling mode for HP/HT specifications relevant to downhole applications such as drilling, well and reservoir monitoring. Many cutting edges applications ofA-MEMS in Oil & Gas industry are envisaged. The current work refers to the case study of a "Look Ahead of the Bit"/geopressure monitoring technique (hereinafter referred to asPPM) developed by the authors. A–MEMS with magnetic shuttle transducers have been designed so that they are not affected by environmental pressure like piezoelectric devices commonly used in MWD commercial sonic tools, which are impaired by volumetric shrinking/expansion working principle. This performance is also achieved by embedding an environmental pressure compensator tuned in the whole working bandwidth to grant pressure balance even with oscillatory motion at sonic frequencies (up to 5 kHz). Transmitter acoustic power and receiver sensitivity have been optimized in a bandwidth between 500 and 3500 Hz. A couple of A–MEMS prototypes have been built and successfully tested by using an oil filled pressure vessel at downhole T–P conditions (200 °C, 700bar) and an ad-hoc measurement setup including force, displacement, temperature sensors, transmitter (TX) driver, receiver (RX) lock-in amplifier and anacquisition system. Moreover, modal analysis at typical drilling conditions has been carried out by Stewart platform. Shock up to 1000 g and random vibrations up to 12 g RMS in 5 ÷400 Hz bandwidth have been tested. A–MEMS performance have turned out to be consistent with theoretical model predictions andhave exhibited robustness to T P variations and applied structural stress. PPM method has been validated through a triaxial compression cell in a rock mechanics laboratory, implementing a lab scale scenario with a cap rock located above a permeable rock, undergoing all geopressures of interest. However, piezo transducers used in the experiment underwent a significant failure/damage rate along with performance degrading at pressure increasing. These observations confirmed and motivated the need for A-MEMS technology development in downhole applications.
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Jia, Licheng, Lei Shi, Chengliang Sun, Sheng Liu, and Guoqiang Wu. "Aln Based Piezoelectric Micromachined Ultrasonic Transducers for Continuous Monitoring of the Mechano-Acoustic Cardiopulmonary Signals." In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2021. http://dx.doi.org/10.1109/mems51782.2021.9375135.

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Nguyen, Ngoc Minh, Chin-Yu Chang, Gayathri Pillai, and Sheng-Shian Li. "Design of Piezoelectric MEMS Bulk Acoustic Wave Mode-Matched Gyroscopes Based on Support Transducer." In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2021. http://dx.doi.org/10.1109/mems51782.2021.9375222.

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Onen, Onursal, Patricia Kruk, and Rasim Guldiken. "Design of Urinary Biomarker Sensor for Early Ovarian Cancer Detection." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-62818.

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In this paper, our efforts on the design, surface functionalization and characterization of ultrasonic MEMS sensor for early ovarian cancer is presented. The sensor detects urinary anti-apoptotic protein Bcl-2 level that has been presented as being elevated for different stages of ovarian cancer. Our novel biosensor approach employs a pair of MEMS ultrasound transducers for generating and sensing surface acoustic waves and a delay path in-between with oriented Bcl-2 antibodies (C8C) attached. Piezoelectric surface acoustic wave devices are employed for sensor for their high coupling efficiency and ease of fabrication. The sensor quantifies the cancer progression by detecting mass loading change generated by adhesion of Bcl-2 molecules to antibodies on the sensor surface. The device is fabricated using common MEMS fabrication techniques and a multi-step surface functionalization is utilized for effective protein adhesion. As a result, our biosensor platform has various unique advantages such as: ultra-sensitive (sub pg/ml), low cost, and simple operation (reminiscent of a pregnancy test) not necessitating trained personnel.
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Onen, Onursal, Alper Sisman, Patricia Kruk, and Rasim O. Guldiken. "An Urinary Biosensor for Early Stage Ovarian Cancer Detection: Experimental Characterization." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87850.

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In this study, an experimental characterization of a piezoelectric ultrasonic MEMS biosensor for detection of anti-apoptotic protein Bcl-2 in sub ng/ml scale is presented. Bcl-2 is demonstrated to be elevated at different stages of ovarian cancer in urine ranging from 0.5 to 12 ng/ml. Here, shear horizontal (SH) polarized surface acoustic waves (SAWs) were utilized by interdigital transducers (IDTs), which were micro fabricated on piezoelectric ST cut Quartz wafers. SH SAWs were generated and sensed by a pair of IDTs, separated by judiciously designed a delay path in-between with for most effective Bcl-2 capture. The Bcl-2 concentration is characterized with respect to the change in resonance frequency. The target sensitivity for diagnosis and quantifying the stage of ovarian cancer is achieved with successful detection of Bcl-2 levels as low as 0.5 ng/ml. The results are promising for the sensor system to be used in a lab-on-a-chip platform for point of care urinary ovarian cancer monitoring diagnosis.
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Rumschoettel, Dominik, Markus Kagerer, Franz Irlinger, and Tim C. Lueth. "Compact Model for the Static and Dynamic Behavior of a Piezoelectric Bimorph Actuator for Microfluidic MEMS." In ASME 2014 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/imece2014-36654.

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Piezoelectric actuators are commonly used in Micro-Electro-Mechanical Systems (MEMS). They can deliver high forces, large accelerations, and high power densities. However, one of their weaknesses is the comparatively small actuator travel that can be readily achieved. The elongation attainable by a slab of piezoelectric material is only a few tenth of a percent. Therefore, it is often useful to employ mechanical structures which are capable of amplifying those minute deflections. A particularly often used configuration is a sandwich structure consisting of either two differently poled strips of piezoelectric material or a single strip of piezoelectric and a layer of passive material. Such a structure is called a bimorph. If one of the layers is mounted above a cavity, the structure forms a membrane actuator. Because of their capability to displace fluid volume, those actuators are suitable for a wide range of applications in the area of microfluidics, including, but not limited to, micropumps, microvalves, microdroplet generators, and high frequency acoustic transducers. The directed design of those actuators demands the determination of their mechanical and electrical properties in advance. In the present paper a compact model for the characterization of such a bimorphic membrane actuator is presented. The model is based on an analytical description of the bending line of the membrane by means of Euler-Bernoulli-Beam theory. Relationships for the dependency of the actuator deflection and the volume displaced by the membrane on the geometry and the material properties of the actuator are established. Other model parameters like the moving mass and the effective stiffness are also determined. The identified parameters are used to create a behavioral model of the full dynamic characteristics of the actuator. This allows the prediction of the dynamic response to an arbitrary input excitation signal. The model is validated by comparing the predicted static and dynamic behavior of the membrane actuator with empirically derived results. For this purpose a number of test specimen with different actuator geometries are fabricated. The quasi-static deflection of the actuator is monitored with a laser-vibrometer for different drive voltages. Furthermore the dynamic behavior of the actuator is determined by recording its step response function. Overall, a model for the prediction of the static and dynamic behavior of a piezoelectrically driven bimorph membrane actuator is presented. The model validation shows good agreement between the predicted and measured behavior for the quasi-static deflection of the actuator and reasonable agreement for its dynamic properties.
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Kim, Jaehwan, Sang Yeol Yang, Min Hee Lee, Jung Hwan Kim, Zhijiang Cai, Joo Hyung Kim, and Kwang Sun Kang. "Cellulose Smart Material for Sensor, Actuator and MEMS Applications." In ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. ASMEDC, 2008. http://dx.doi.org/10.1115/smasis2008-381.

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Cellulose Electro-Active Paper (EAPap) has been discovered as a smart material that can be used as a sensor and actuator [1]. It has many advantages in terms of low voltage operation, light weight, low power consumption, low cost, biocompatibility and biodegradability. EAPap is made with cellulose paper coated with thin electrodes. EAPap shows a reversible and reproducible bending movement as well as longitudinal displacement under electric field. The out-of-plane bending deformation is useful for achieving flapping wings, micro-insect robots, and smart wall papers. On the other hand, in-plane strains, such as extension and contraction of EAPap materials are also promising for artificial muscle applications. The actuation principle of cellulose EAPap bending actuator is known to be a combination of piezoelectric effect and ion migration effect. This paper presents further investigation of cellulose EAPap for actuator, sensor and MEMS devices. Piezoelectricity is one of major actuating mechanism of cellulose EAPap. Cellulose is a complex anisotropic material. Aligning cellulose fibers in the fabrication process is a critical parameter to improve mechanical and electromechanical properties of EAPap such as stiffness, strength, piezoelectricity and so on. Cotton cellulose fibers are dissolved into a solution using NaOH/urea and DMAc/LiCl methods. In the later method, the dissolution and shaping of cellulose can be carried out by DMAc/LiCl. Cellulose pulp was mixed with lithium chloride (LiCl) and dehydrated by heating. After adding DMAc (N, N-dimethylacetamide) to the mixture, swell it in room temperature. By heating it a solution formation can be obtained. There are some issues on eliminating solvent and ions and regenerating a pure cellulose films. The material processing all about EAPap has been introduced [2, 3]. Wet drawn stretching method is used in the fabrication process of cellulose film to increase its mechanical and electromechanical properties. This wet-drawn cellulose EAPap is termed as Piezo-Paper. Cellulose EAPap material can be customized to satisfy the material requirement for specific applications. Piezo-Paper can be used for strain sensors, vibration sensors, ultrasonic transducers, SAW devices, speakers, microphones, stack actuators, bending actuators and MEMS devices. Figure 1 shows some applications. Piezoelectric charge constant of Piezo-Paper is 70 pC/N. Details of piezoelectric characteristics of Piezo-Paper and its applications are presented in this paper. Micro-fabrication on cellulose EAPap has many applications, for example, MEMS sensors, e-Paper, thin film transistor (TFT), and even microwave-driven EAPap actuator. To develop microwave-driven EAPap actuator, rectenna (rectifying antenna) has been developed [4]. Rectenna can rectify microwaves and feed dc power without wire. Thus, this technology has many applications. To fabricate the rectenna array on cellulose EAPap, micro patterning of metallic layer and Schottky diode fabrication were studied. The Schottky diode fabrication gives the possibility of TFT on cellulose sheet. Advancing from this technology, SAW (Surface Acoustic Wave) device fabrication for humidity sensor is possible. The devices fabrication along with the characterization and their demonstration will be shown. Cellulose EAPap technology will bring the dream of flying magic paper into real world in the near future.
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Bailo, Kelly C., Diann E. Brei, and Karl Grosh. "Polymeric piezoelectric acoustic semicircular transducers." In 5th Annual International Symposium on Smart Structures and Materials, edited by Mark E. Regelbrugge. SPIE, 1998. http://dx.doi.org/10.1117/12.316889.

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