Relevant bibliographies by topics / MEMS

Academic literature on the topic 'MEMS'

Author: Grafiati
Published: 4 June 2021
Last updated: 7 September 2024

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Journal articles on the topic "MEMS"

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Deckert, Martin, Michael Lippert, Kentaroh Takagaki, Andreas Brose, Frank Ohl, and Bertram Schmidt. "Fabrication of MEMS-based 3D-μECoG-MEAs." Current Directions in Biomedical Engineering 2, no. 1 (September 1, 2016): 83–86. http://dx.doi.org/10.1515/cdbme-2016-0021.

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AbstractThe microfabrication and packaging of novel, three-dimensional, polyimide-based, highly flexible, microscale electrocorticography multi-electrode arrays for enhanced epicortical recording of local field potentials is presented. A polyimide foil embeds metallic structures relating to 32 taper-type electrode sites, contact pads as well as interconnecting conductor paths which are integrated in the planar portion of the electrode substrate material. Circular exposed and, thus, active electrode sites are 50 μm in diameter and employed center-to-center pitches range from 250 μm to 1 mm, respectively. As-fabricated 3D-μECoG-MEAs provide taper heights of approximately 4 μm as well as 59 μm being distinguished by characteristic impedances of about 368.9 kΩ at 1 kHz measured in saline electrolyte. The applied packaging strategies favor flip-chip bonding and vapor phase soldering of the polymer substrates to customized printed circuit boards.
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Zatta, G., M. Gallazzi, A. De Agostini, A. Albertini, Maria Radice, D. Alberti, and G. L. Tarolo. "Accuracy and Reproducibility of the Assessment of the Global Ejection Fraction Using 195mAu and a Single-Crystal Digital Gamma Camera: Influence of Collimator Design." Nuklearmedizin 26, no. 04 (1987): 167–71. http://dx.doi.org/10.1055/s-0038-1628883.

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A sequence of RAO first-pass studies (first with 99mTc and then twice with 195mAu) was performed in 18 normal volunteers and in 12 CAD patients using two different types of collimator for medium energy: a standard collimator (MEMS) and a special high-sensitivity collimator (MEHS). The following data were compared: the peak count rate, the net LV end-diastolic counts and the LVEF. Using MEMS the end-diastolic counts acquired were so low (12% of 99mTc average value) that EF standard deviation had a mean value of 0.061 (range 0.045-0.081). With MEHS the following results were obtained: 1. the peak count rate and LV net end-diastolic counts with 195mAu were 55% and 50% respectively, of 99mTc values; 2. a good correlation was shown between LVEF values either with 99mTc and 195mAu (r =.97), or with 195mAu sequential studies (r =.98).
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Sadiku, M. "MEMS." IEEE Potentials 21, no. 1 (2002): 4–5. http://dx.doi.org/10.1109/45.985317.

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Shumway, Russell. "Assembly Standardization for the Diverse Packaging Requirements of MEMS & Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2013, DPC (January 1, 2013): 000571–91. http://dx.doi.org/10.4071/2013dpc-ta34.

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Abstract not provided. Outline of topics: MEMS Package Relative Growth; Commonalities between MEMS & IC Packaging; Differences between MEMS & IC Packaging; Explosive growth of MEMS Opportunities; MEMS Diversity of Assembly Materials; MEMS Packaging Complexity; Standardization in MEMS Fab, Assembly & Test; Amkor MEMS & Sensor Packaging Evolution; MEMS Package Selection
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Shumway, Russell. "Assembly Standardization for the Diverse Packaging Requirements of MEMS & Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2014, DPC (January 1, 2014): 000567–87. http://dx.doi.org/10.4071/2014dpc-ta31.

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Abstract not provided. Outline of topics: MEMS Package Relative Growth; Commonalities between MEMS & IC Packaging; Differences between MEMS & IC Packaging; Explosive growth of MEMS Opportunities; MEMS Diversity of Assembly Materials; MEMS Packaging Complexity; Standardization in MEMS Fab, Assembly & Test; Amkor MEMS & Sensor Packaging Evolution; MEMS Package Selection
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Bouissac, Paul. "On signs, memes and MEMS: Toward evolutionary ecosemiotics." Sign Systems Studies 29, no. 2 (December 31, 2001): 627–46. http://dx.doi.org/10.12697/sss.2001.29.2.12.

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The first issue raised by this paper is whether semiotics can bring any added value to ecology. A brief examination of the epistemological status of semiotics in its current forms suggests that semiotics' phenomenological macroconcepts are incommensurate with the complexity of the sciences comprising ecology and are too reductive to usefully map the microprocesses through which organisms evolve and interact. However, there are at least two grounds on which interfacing semiotics with ecology may prove to be scientifically productive: the very looseness of semiotic discourse can be an important catalyser for multidisciplinary interactions, an important condition for the emergence of truly holistic ecology; the present semiotic conceptual apparatus is not carved in stone. All its notions, frames of reference and types of reasoning can evolve in contact with the problems encountered in evolutionary ecological research. Semiotics, as an open-ended epistemological project, remains a proactive intellectual resource. The second issue raised by this paper is precisely to call attention to the opportunity provided by recent developments for rethinking and furthering semiotic inquiry. An attempt is made to show that counterintuitive theories such as memetics and new frontiers in teclmology such as nanotechnology, could help recast ecosentioticsalong more intellectually exciting lines of inquiry than the mere rewriting of ecological discourse in terms of the traditional semiotic macroconcepts. It goes without saying that memetics and nanotechology are not presented here as definitive solutions but simply as indicative of possible directions toward acomprehensive evolutionary ecosentiotics that would radically transform the basis of the 20th century sentiotic discourse and its ideological agenda.
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Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.
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Tilmans, Harrie A. C., Walter De Raedt, and Eric Beyne. "MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP." Journal of Micromechanics and Microengineering 13, no. 4 (June 13, 2003): S139—S163. http://dx.doi.org/10.1088/0960-1317/13/4/323.

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KAERIYAMA, TOSHIYUKI. "MEMS Commercialization and Future Prospects. MEMS Display." Journal of the Institute of Electrical Engineers of Japan 120, no. 11 (2000): 677–79. http://dx.doi.org/10.1541/ieejjournal.120.677.

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Chen, Kai, Li Qing Fang, and Hong Kai Wang. "The Primary Processing of MEMS Devices and Applications Analysis." Advanced Materials Research 418-420 (December 2011): 2134–38. http://dx.doi.org/10.4028/www.scientific.net/amr.418-420.2134.

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This paper details the system of MEMS technology, focusing on analysis MEMS device processing and application status. Through the analysis of MEMS technology in the application of MEMS devices, MEMS devices described in the application of the status in modern life, while the survey data produced a MEMS device in the next few years the proportion of market share, and analyse the developments of MEMS devices and development trend.
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Dissertations / Theses on the topic "MEMS"

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Midtflå, Roar. "RF MEMS." Thesis, Norwegian University of Science and Technology, Department of Electronics and Telecommunications, 2007. http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-10337.

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Fagområdet RF MEMS er i rask utvikling og det finnes et utall forskjellige patenter innen dette området. Denne oppgaven fokuserer på en type nemlig radial contour mode diskresonator med sikte på å bruke den i SMiDA prosjektet Mer spesifikt går oppgaven ut på å teste forskjellige diskparametre for å finne ut hvilken som er best egnet. Noe konkret svar på dette finnes ikke, men det kan være interessant å bruke 2.mode til en disk på 16μm eller 3.mode til en disk på 20μm. En fant også frem til et spesielt design som gav veldig høy radiell amplitude i 1.mode.

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Adamec, Richard. "MEMS Anemometer." Thesis, Griffith University, 2007. http://hdl.handle.net/10072/365273.

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A MEMS hot wire anemometer was designed, simulated, fabricated and tested. The device was of a planar silicon substrate construction measuring wind direction in two dimensions. Wind velocity and temperature were also measured with the same sensing elements on the device. This anemometer formed part of a multisensor incorporating other sensing functions such as humidity and light onto a common silicon substrate compatible with active electronics integration. Of these sensors only temperature, wind speed and direction are presented as the work of this thesis, however integration of each of these sensors within the larger multisensor was a necessary consideration. Also presented are the results of the prototype devices constructed from discrete surface mount components offering device alternatives dependant on application. Simulation and development was aided with Coventorware multiphysics modelling software providing virtual analysis in electrical, thermal and fluidic domains. Fabrication was primarily conducted within the Griffith University fabrication laboratory with a subsequent fabrication run of four wafers in a commercial foundry hosted by Motorola. Packaging options were developed for the silicon die consisting of either conventional chip carriers or application specific fibreglass carriers. Prototype packaging was also developed for the larger complete system incorporating the interface electronics and communications system. Testing was conducted in the laboratory in a controlled environmental chamber and wind tunnel built to calibrate the devices. Laboratory results are reported for the controlled environment response to demonstrate the consistency and accuracy obtained during testing. Wind tunnel testing was conducted both on the carrier mounted die and on the larger self contained system to be deployed into the field trial incorporating all interface electronics and the communications system. Field trial testing was employed to evaluate the devices under continued operation when exposed to typical environmental abuse such as thermal cycling and physical contamination over time. The field trial results present a typical 24 hour period of operation measured against a commercially available weather station mounted in the same location for reference. The results from the laboratory and field trial testing demonstrated the sensor operational and meeting the design requirements, showing a velocity range exceeding 0-30m/s ±10%, directional accuracy of better than 8° and power consumption of 45mW. This was achieved in a die size 42% of that allowable in the design requirements. Fabrication process requirements were largely CMOS compatible and was demonstrated with the integration of a diode on the same silicon die.
Thesis (PhD Doctorate)
Doctor of Philosophy (PhD)
Griffith School of Engineering
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Saha, Shimul Chandra. "RF MEMS Switches and Switch Circuits : Modeling of RF MEMS switches and development of RF MEMS capacitive switches and MEMS tunable filters." Doctoral thesis, Norwegian University of Science and Technology, Department of Electronics and Telecommunications, 2008. http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-2297.

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Hedestig, Joel. "MEMS baserad referensoscillator." Thesis, Linköpings universitet, Institutionen för systemteknik, 2005. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-2780.

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The interest in tiny wireless applications raises the demand for an integrated reference oscillator with the same performance as the macroscopic quartz crystal reference oscillators. The main challenge of the thesis is to prove that it is possible to build a MEMS based oscillator that approaches the accuracy level of existing quartz crystal oscillators. The MEMS resonator samples which Philips provides are measured and an equivalent electrical model is designed for them. This model is used in the simulations of the Pierce oscillator and the transresistance amplifier oscillator that are evaluated in this thesis. Finally the Pierce oscillator is implemented in the A BCD2 process and manufactured at Philips Semiconductors in Nijmegen, The Netherlands. A test board, for measuring the Pierce oscillator together with a MEMS resonator or a quartz crystal resonator, is built. The Pierce oscillator is then measured with a quartz crystal resonator. In order to simulate the higher series resistance of the MEMS resonators a resistor is put in series with the quartz crystal. The Pierce oscillator is working with a series resistance of 1 kΩ. With higher series resistance the Pierce oscillator stops working. In circuit simulations the Pierce oscillator is working with a series resistance of about 5 kΩ in the MEMS resonator model. To be sure whether the Pierce oscillator has enough gain for the MEMS resonators, it needs to be measured with them. Temperature variations in the MEMS resonators need to be handled and the phase noise performance of the oscillator must be improved, in order for the MEMS based reference oscillator to be a successful replacement for the quartz crystal reference oscillator.
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Larsson, Michael Peter. "MEMS electrical connectors." Thesis, Imperial College London, 2006. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.439300.

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Cao, J. "Magnetic MEMS actuators." Thesis, University of Cambridge, 2010. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597277.

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Magnetic MEMS actuators are presently still relatively under-researched as compared to their electrostatic, piezoelectric and electro-thermal counterparts. Most existing magnetic MEMS actuators are limited to simply delivering a rotational output. The research presented in this thesis aims to develop novel magnetic MEMS actuators with complex structures that are capable of delivering more sophisticated and useful mechanical outputs than the existing devices. The study begins with an attempt to solve the problem of bending a freestanding ferromagnetic cantilever beam with an applied magnetic field. Analytical and numerical models have been constructed and the modelling results are compared to experimental results obtained from a microscopic and a laser measurement system. NiFe alloy has been used as both the magnetic and mechanical element. The magnetic and mechanical properties of electroplated NiFe have been experimentally characterized. Fabrication processes for creating freestanding NiFe structures have been designed and optimized via a parametric experimental study. Finally, novel ferromagnetic microstructures have been designed by combining the motions of more than one ferromagnetic beam. Preliminary magnetic actuation tests have been carried out in order to verify the design ideas.
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Ismail, Abd Khamim. "MEMS mass sensor." Thesis, University of Newcastle Upon Tyne, 2006. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.430353.

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Hasík, Stanislav. "Testování MEMS gyroskopů." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-240919.

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This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.
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Izham, Zaki. "Resonant MEMS magnetometer." Thesis, University of Birmingham, 2004. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.436751.

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Mihaľko, Juraj. "MEMS inerciální snímače." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2012. http://www.nusl.cz/ntk/nusl-219724.

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The aim of this master’s thesis is to describe the basic measurement methods of micro-electromechanical inertial sensor, their physical principles and errors. Measurement of inertial sensors is very important for the parameterization of their errors and their subsequent mathematical model by which it is possible to minimize the measurement error impact on inertial navigation. The practical part is dedicated to create automated measurement setup for measurement stability of the offset. Hardware and software from National Instruments is used in measurement chain. The work is next focused on measuring seven inertial sensors based on three different physical principles. In addition to creating measurement setup, we also defined three inertial sensor parameters, describing theoretical behavior of the sensor output.
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Books on the topic "MEMS"

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Brand, Oliver, Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse, eds. Resonant MEMS. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2015. http://dx.doi.org/10.1002/9783527676330.

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Hesketh, Peter J., ed. BioNanoFluidic MEMS. Boston, MA: Springer US, 2008. http://dx.doi.org/10.1007/978-0-387-46283-7.

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Munro, Deborah. DIY MEMS. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-33073-6.

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Hartzell, Allyson L., Mark G. da Silva, and Herbert R. Shea. MEMS Reliability. Boston, MA: Springer US, 2011. http://dx.doi.org/10.1007/978-1-4419-6018-4.

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Leondes, Cornelius T., ed. MEMS/NEMS. Boston, MA: Springer US, 2006. http://dx.doi.org/10.1007/b136111.

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Adams, Thomas M., and Richard A. Layton. Introductory MEMS. Boston, MA: Springer US, 2010. http://dx.doi.org/10.1007/978-0-387-09511-0.

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Zhang, John X. J. Plasmonic MEMS. Cham: Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-23137-7.

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service), INSPEC (Information, and Knovel (Firm), eds. MEMS packaging. London: INSPEC, 2004.

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1964-, Brand Oliver, and Fedder G. K, eds. CMOS-MEMS. Weinheim: Wiley-VCH, 2005.

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Brand, Oliver, and Gary K. Fedder. CMOS-MEMS. Weinheim: Wiley-VCH, 2005.

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Book chapters on the topic "MEMS"

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Huff, Michael A. "MEMS." In Internet of Things and Data Analytics Handbook, 147–66. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2016. http://dx.doi.org/10.1002/9781119173601.ch9.

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Elwenspoek, Miko, and Remco Wiegerink. "MEMS." In Microtechnology and MEMS, 5–23. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-662-04321-9_2.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, Martino Poggio, Christian L. Degen, Li Zhang, Bradley J. Nelson, et al. "MEMS." In Encyclopedia of Nanotechnology, 1305. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100392.

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Brown, Margaret, and Hakan Urey. "MEMS Microdisplays." In Handbook of Visual Display Technology, 2843–57. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-14346-0_128.

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Brown, Margaret, and Hakan Urey. "MEMS Microdisplays." In Handbook of Visual Display Technology, 1–15. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-642-35947-7_128-2.

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Armenise, M. N. "MEMS Gyroscopes." In Advances in Gyroscope Technologies, 83–102. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-15494-2_6.

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Martinez-Duarte, Rodrigo, Monsur Islam, and Rucha Natu. "Carbon MEMS." In Encyclopedia of Nanotechnology, 1–8. Dordrecht: Springer Netherlands, 2015. http://dx.doi.org/10.1007/978-94-007-6178-0_101022-1.

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George, Derosh, and Marc J. Madou. "Origami MEMS." In Mechanical Sciences, 197–239. Singapore: Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-15-5712-5_9.

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Su, Yu-Chuan, and Liwei Lin. "MEMS Design." In Microsystems and Nanotechnology, 261–85. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-18293-8_8.

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Mekid, Samir, and Zhenhuan Zhu. "MEMS Sensors." In E-maintenance, 125–71. London: Springer London, 2010. http://dx.doi.org/10.1007/978-1-84996-205-6_6.

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Conference papers on the topic "MEMS"

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Conner, Rick. "MEMS/MEOMS: metrology and machine vision." In Micromachining and Microfabrication, edited by M. Edward Motamedi and Rolf Goering. SPIE, 2000. http://dx.doi.org/10.1117/12.396495.

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Jachowicz, Ryszard S. "MEMS in metrology, metrology in MEMS." In 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007. IEEE, 2007. http://dx.doi.org/10.1109/imtc.2007.379268.

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Weber, Werner, and Thomas A. Friedman. "Displays, Sensors, and MEMS - RF MEMS." In 2007 IEEE International Electron Devices Meeting. IEEE, 2007. http://dx.doi.org/10.1109/iedm.2007.4418959.

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Hanrahan, B., J. Feldman, S. Misra, C. M. Waits, P. D. Mitcheson, and R. Ghodssi. "Off-The-Shelf MEMS for rotary MEMS." In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2012. http://dx.doi.org/10.1109/memsys.2012.6170241.

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"Displays, Sensors, and MEMS -- MEMS and NEMS." In 2006 International Electron Devices Meeting. IEEE, 2006. http://dx.doi.org/10.1109/iedm.2006.346825.

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Markus, Karen W., David A. Koester, Allen Cowen, Ramu Mahadevan, Vijayakumar R. Dhuler, D. Roberson, and L. Smith. "MEMS infrastructure: the multiuser MEMS processes (MUMPs)." In Micromachining and Microfabrication, edited by Karen W. Markus. SPIE, 1995. http://dx.doi.org/10.1117/12.221300.

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"MEMS 2008." In 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems. IEEE, 2008. http://dx.doi.org/10.1109/memsys.2008.4443571.

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Vigna, Benedetto. "MEMS Epiphany." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805304.

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Chung, So-Ra, Sangtak Park, Eihab M. Abdel-Rahman, John Yeow, and Mahmoud Khater. "MEMS Demodulator." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87968.

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This paper presents research focusing on developing and simulating a new way of digital demodulation for the front end Radio frequency (RF) mechanically using MEMS electrostatic actuator by sensing the displacement of a parallel-plates. The operating principle based on the coupling multi-physics of the proposed demodulation device is explained. The analytical modeling and simulation results with experimental data are presented. Recent developments in the Micro Electro Mechanical Systems (MEMS) technology have shown the benefits of reliable mechanical strength that merges with electrical properties. Interest has increased and thus on to improve their performance by applying MEMS technology as to replace existing industrial parts and tools. A typical RF receiver consists of a front end, a band-pass filter, low noise amplifier (LNA), a local oscillator, and a mixer that recovers a baseband signal from a modulated RF signal. In a heterodyne receiver there is more than one intermediate stage. ASK and FSK digital demodulation using electrostatic actuator indicates better feasibility at lower frequency lower than 100 Hz for digital demodulation while indicating wide range of potential baseband range up to 1 kHz.
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Stanimirovic, I., and Z. Stanimirovic. "MEMS reliability." In 2012 28th International Conference on Microelectronics (MIEL 2012). IEEE, 2012. http://dx.doi.org/10.1109/miel.2012.6222826.

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Reports on the topic "MEMS"

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Hanser, Andrew, and John Bumgarner. Power Mems Development. Fort Belvoir, VA: Defense Technical Information Center, November 2010. http://dx.doi.org/10.21236/ada533712.

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Hanser, Andrew, and John Bumgarner. Power Mems Development. Fort Belvoir, VA: Defense Technical Information Center, December 2010. http://dx.doi.org/10.21236/ada535194.

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Hanser, Drew, and John Bumgarner. Power Mems Development. Fort Belvoir, VA: Defense Technical Information Center, March 2011. http://dx.doi.org/10.21236/ada541013.

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Hanser, Drew, and John Bumgarner. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, April 2011. http://dx.doi.org/10.21236/ada542949.

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Bumgarner, John. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, August 2009. http://dx.doi.org/10.21236/ada506572.

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Bumgarner, John. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, November 2009. http://dx.doi.org/10.21236/ada510292.

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Bumgarner, John. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, December 2009. http://dx.doi.org/10.21236/ada511507.

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8

Bumgarner, John. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, January 2010. http://dx.doi.org/10.21236/ada513759.

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Burngarner, John. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, February 2010. http://dx.doi.org/10.21236/ada514846.

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10

Hanser, Drew. Power MEMS Development. Fort Belvoir, VA: Defense Technical Information Center, May 2011. http://dx.doi.org/10.21236/ada544607.

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