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1

Hensler, Ralph. MEMS technology: Where to? Norwalk, CT: Business Communications Co., 2002.

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2

RF MEMS: Theory, design, and technology. Hoboken, N.J: Wiley-Interscience, 2003.

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3

H, Baltes, ed. Enabling technology for MEMS and nanodevices. Weinheim, Germany: Wiley-VCH, 2004.

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4

Adhesion aspects in MEMS-NEMS. Leiden: Brill, 2010.

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5

1949-, Setter N., ed. Electroceramic-based MEMS: Fabrication technology and applications. New York: Springer, 2005.

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6

Stephen, Beeby, ed. MEMS mechanical sensors. Boston: Artech House, 2004.

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7

Cornet, A. Physique et inge nierie des surfaces. Les Ulis: EDP sciences, 1998.

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8

Suni, Tommi. Direct wafer bonding for MEMS and microelectronics. [Espoo, Finland]: VTT Technical Research Centre of Finland, 2006.

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9

Whitehouse, D. J. (David J.)., ed. Handbook of surface and nanometrology. 2nd ed. Boca Raton: CRC Press, 2011.

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10

Archer, Renato. Quem tem medo da informática brasileira. [Brasília]: Ministério da Ciência e Tecnologia : Conselho Nacional de Desenvolvimento Científico e Tecnológico, 1986.

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11

1943-, Masuda Hiroaki, Higashitani Kō 1944-, and Yoshida Hideto 1952-, eds. Powder technology: Fundamentals of particles, powder beds, and particle generation. Boca Raton: CRC Press/Taylor & Francis, 2007.

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1943-, Masuda Hiroaki, Higashitani Kō 1944-, and Yoshida Hideto 1952-, eds. Powder technology: Handling and operations, process instrumentation, and working hazards. Boca Raton: CRC Press/Taylor & Francis, 2007.

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13

H, Bernstein David, ed. Modeling MEMS and NEMS. Boca Raton, FL: Chapman & Hall/CRC, 2003.

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14

1945-, Gad-el-Hak Mohamed, ed. MEMS: Introduction and fundamentals. 2nd ed. Boca Raton: CRC/Taylor & Francis, 2006.

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15

S, Iyer Subramanian, Auberton-Hervé Andre J, Institution of Electrical Engineers, and INSPEC (Information service). EMIS Group, eds. Silicon wafer bonding technology: For VLSI and MEMS applications. London: Institution of Electrical Engineers, 2002.

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16

H, Bernstein David, ed. Modeling MEMS and NEMS. Boca Raton, FL: Chapman & Hall/CRC, 2003.

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17

A guide to hands-on MEMS design and prototyping. Cambridge: Cambridge University Press, 2011.

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18

Morgan, Hywel. AC electrokinetics: Colloids and nanoparticles. Philadelphia, PA: Research Studies Press, 2003.

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19

Ekwall, Britt, and Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Edited by Ekwall Britt and Cronquist Mikkel. Hauppauge, N.Y: Nova Science Publishers, 2009.

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20

Aiqun, Liu, ed. MEMS technology and devices: Suntec, Singapore, 1-6 July 2007. Singapore: Pan Stanford Pub., 2007.

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21

Wang, Xiao Hao. MEMS/NEMS Nano Technology. Trans Tech Publications, Limited, 2011.

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22

Wang, Xiaohao. MEMS/NEMS Nano Technology. Trans Tech Publications, Limited, 2011.

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23

Higashitani, Ko, Hideto Yoshida, and Hiroaki Masuda. Powder Technology. Taylor & Francis Group, 2019.

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24

Choudhary, Vikas. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2013.

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25

Iniewski, Krzysztof, and Vikas Choudhary. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2017.

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26

Iniewski, Krzysztof, and Vikas Choudhary. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2017.

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27

Iniewski, Krzysztof, and Vikas Choudhary. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2017.

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28

Iniewski, Krzysztof, and Vikas Choudhary. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2017.

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29

Iniewski, Krzysztof, and Vikas Choudhary. Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2017.

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30

Mems: Fundamental Technology and Applications. Taylor & Francis Group, 2013.

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31

Higashitani, Ko, Hideto Yoshida, and Hiroaki Masuda. Powder Technology Handbook. Taylor & Francis Group, 2006.

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32

Masuda, Hiroaki. Powder Technology Handbook. Taylor & Francis Group, 2006.

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33

Rai-Choudhury, Prosenjit. MEMS and MOEMS Technology and Applications. SPIE, 2000.

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34

Rai-Choudhury, Prosenjit, ed. MEMS and MOEMS Technology and Applications. SPIE, 2000. http://dx.doi.org/10.1117/3.2265068.

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35

Rebeiz, Gabriel M. RF Mems: Theory, Design, and Technology. Wiley & Sons, Incorporated, John, 2008.

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36

Baltes, H., O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, and O. Tabata, eds. Enabling Technology for MEMS and Nanodevices. Wiley, 2004. http://dx.doi.org/10.1002/9783527616701.

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37

MEMS Technology for Biomedical Imaging Applications. MDPI, 2019. http://dx.doi.org/10.3390/books978-3-03921-605-5.

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38

IANNACCI. Rf-Mems Technology High-performance Pahb. Institute of Physics Publishing, 2022.

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39

Khine, Lynn, and Julius M. Tsai. NEMS/MEMS Technology and Devices, ICMAT2011. Trans Tech Publications, Limited, 2011.

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40

Rebeiz, Gabriel M. RF MEMS: Theory, Design, and Technology. Wiley-Interscience, 2002.

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41

Rebeiz, Gabriel M. RF Mems: Theory, Design, and Technology. Wiley & Sons, Incorporated, John, 2004.

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42

Butterfield. Biological & Synth Memb. WILEY-LISS, 1989.

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43

Preuitt, Sheela. 20-Minute (or Less) Meme Hacks. Lerner Publishing Group, 2020.

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44

Jones, T. B. Electromechanics and MEMS. 2012.

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45

Surface Treatment of Materials for Adhesion Bonding. William Andrew Publishing, 2006.

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46

Gad-el-Hak, Mohamed, and Frank Kreith. MEMS Handbook. Taylor & Francis Group, 2005.

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47

Teo, Selin H. G., Tarik Bourouina, Hua Li, and Ai-Qun Liu. NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009. Trans Tech Publications, Limited, 2009.

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48

Iannacci, Jacopo. RF-MEMS Technology for High-Performance Passives. Iop Publishing Ltd, 2018.

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49

Setter, Nava. Electroceramic-Based MEMS: Fabrication-Technology and Applications. Springer, 2010.

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50

Canham, Leigh. Biomedical Mems: Clinical Applications of Silicon Technology. Inst of Physics Pub Inc, 2003.

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