Dissertations / Theses on the topic 'LPD'
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Wong, Yi Jim. "Link analyses and LPD/AJ strategies for IEEE 802.16a." Thesis, Monterey, California. Naval Postgraduate School, 2007. http://hdl.handle.net/10945/55209.
Full textIn military operations, covertness of operation is of paramount importance. The transmission power of the data link must be kept to the minimum to maintain a low probability of detection (LPD) from the adversary. However, a reduction in the transmitted power implies a reduction in the operating range, though the detection range by the enemy is also reduced. Therefore, to reduce the enemy’s detection range while maintaining operating distance, this thesis explores strategies to discriminate gain against an adversary’s sensor. The strategies involve using processing gain, directional antennas, polarization and the natural environment as a transmission shield. The processing gain strategy analyzed in this thesis uses a diversity technique called Maximal Ratio Combining (MRC) applied to an IEEE 802.16a link. Sinclair D. Smith carried out a study on the possible processing gain derivable from this technique and this thesis will bring his results to practical applications via link analyses. In the event that the link is detected and the enemy decides to carry out jamming, the thesis explores a possible anti-jamming (AJ) strategy by using MRC and a directional antenna. Daniel P. Zastrow carried out a study on the AJ capability of MRC and this thesis brings his results to practical applications via link analyses.
Major, Republic of Singapore Airforce
Hage, Todd W. "Prototype displays for the command function on board LPD-17." Thesis, Monterey, Calif. : Springfield, Va. : Naval Postgraduate School ; Available from National Technical Information Service, 1995. http://handle.dtic.mil/100.2/ADA300750.
Full textKellett, Daniel. "Random Sequence Encoding with OFDM for Covert Communication and Signal Reuse for LPI/LPD Radar: Theory & Experiments." Miami University / OhioLINK, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=miami1501120348908255.
Full textBabic, Branislav. "Genetic and biochemical characterization of dihydrolipoamide dehydrogenases (LPD) in Sinorhizobium meliloti." Thesis, McGill University, 2011. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=96895.
Full textAfin d'étudier la fonctionnalité des déshydrogénases du dihydrolipoamide de Sinorhizobium meliloti, les gènes lpdA1, lpdA2 et lpdA3 ont été mutés par la méthode de mutagenèse dirigée par le recombinaison cross-over unique, au moyen de plasmides suicides modifiés pVIK112. Le mutant lpdA1n'a pas été capable de croître sur le pyruvate, et sa croissance a été considérablement retardée sur les autres sources de carbone qui furent essayées. L'activité du complexe pyruvate déshydrogénase n'a pas été décelée dans ce mutant, et la régulation du lpdA1 ne dépendait pas de la présence de pyruvate. Ce mutant était Nod +, mais il paraissait être Fix-. Bien que le mutant lpdA2 s'avéra capable de pousser sur toutes les sources de carbone qui furent essayées, sa croissance fut ralentie de façon appréciable sur les milieux pyruvate, arabinose , glutamate et leucine. L'activité de la déshydrogénase α-ketglutarate était presque abolie, mais le mutant a été capable de fixer l'azote atmosphérique. L'expression du mutant lpdA2 a été augmentée au cours de la croissance sur l'arabinose, le malate et le succinate. L'expression du mutant lpdA3, autrement impossible à distinguer de la souche mère RMG212, a été considérablement retardée sur la leucine, qui a aussi augmenté l'expression du lpdA3. L'activité de la déshydrogénase à chaîne ramifiée α-cétoacide n'était pas détectable dans ce mutant, mais il a été capable de fixer l'azote atmosphérique. Cette étude a démontré que les gènes lpdA codent pour des protéines fonctionnelles qui sont des éléments constitutifs de trois complexes enzymatiques différents.
Philpott, Alan D. "Meeting the challenge of installing CANES during new ship construction on LPD 28." Thesis, Monterey, California: Naval Postgraduate School, 2015. http://hdl.handle.net/10945/45241.
Full textThe budget to build ships and modernize and sustain the C4I systems installed is limited. Lead times for contracting are long, while technology changes rapidly after contract award. The shipboard C4I network examined in this thesis typifies this dichotomy. The challenge is to provide the latest shipboard network that meets the C4I capability needs of the warfighter at ship delivery, while at the same time supporting the shipbuilder’s need for Government Furnished Information (GFI) and Government Furnished Equipment (GFE) supporting the Ship Construction schedule. This thesis analyzes whether to install the legacy Shipboard Wide Area Network (SWAN), where the FGI is firm, or install the newer Consolidated Afloat Network Enterprise System (CANES), where the GFI is evolving, on LPD 28 during New Ship Construction. Recommendations include implementation of the Design Budget Approach during New Ship Construction, use of the Systems Engineering (SE) V Method during C4I network system development to verify and validate warfighter requirements can be net, and a commitment to the GFE Program of Record (POR) C4I network solutions.
Wen, Xiao-Yan. "Characterization of a mouse insertional mutation lpd associated with a defect in triglyceride metabolism." Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1995. http://www.collectionscanada.ca/obj/s4/f2/dsk3/ftp04/NQ28158.pdf.
Full textWaldron, Christopher A. "Logistically sustaining afloat-staged special operations forces through an LPD-17 class single-ship seabase." Thesis, Monterey, Calif. : Naval Postgraduate School, 2007. http://bosun.nps.edu/uhtbin/hyperion.exe/07Mar%5FWaldron.pdf.
Full textThesis Advisor(s): Arnold H. Buss. "March 2007." Includes bibliographical references (p. 111-113 ). Also available in print.
Prodhomme, Jean-Philippe. "Business Development in the field of Low Current Technology at Cegelec Le Mans." Thesis, KTH, Industriella informations- och styrsystem, 2011. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-81406.
Full textHäkkinen, Markus. "Viktiga faktorer produktutveckling enligt set based concurrent engineering." Thesis, Högskolan i Skövde, Institutionen för ingenjörsvetenskap, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:his:diva-12104.
Full textProduct development usually has the same general approach: A specification for a new product is provided to the product development department from the marketing department. Product developers then generate concepts which are developed into prototypes before the products are manufactured and sold. The procedure usually differs by the use of different models such as Lean product development or integrated product development in the process. The part of Lean product development (LPD) that is used when developing concepts is called set based concurrent engineering (SBCE) and these are new concepts in Sweden. What is required to work with set based concurrent engineering in a successful manner? Is it possible to identify important factors when developing products using SBCE in companies? A literature study which resulted in a list with five potentially important factors when developing products using SBCE was created before a qualitative study was conducted at five companies. Semi structured interviews were conducted at Husqvarna, Saab, Furhoffs, Ericsson Radio and GKN Aerospace to gather data for an analysis. In the analysis, comparisons were made between the companies’ way of developing products with the list that was created in the end of the literature study. A conclusion of the study was a number of important factors when developing products using SBCE could be: Wide solution space, Knowledge based screening of concepts, Recycling of knowledge, Technically competent project management, Cross functional teams. The study also showed that an investment in the right type of leadership could potentially be an important factor when implementing SBCE since the company management need to understand the working model if SBCE is going to have a positive effect.
Cook, S. L. "Characterisation of the MuSIC muon beam and design of the Eu-XFEL LPD/CCC interface firmware." Thesis, University College London (University of London), 2014. http://discovery.ucl.ac.uk/1449076/.
Full textCamara, Jurado Mercedes. "Visual Planning in Lean Product Development." Thesis, KTH, Industriella informations- och styrsystem, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-116757.
Full textQualls, Isaiah Christopher. "OPTIMIZATION OF DUAL-USE RADARCOM SIGNALS AND AN ANALYSIS OF INTERCEPTOR PENALIZATION." Miami University / OhioLINK, 2019. http://rave.ohiolink.edu/etdc/view?acc_num=miami1565109330281541.
Full textApriliani, Putu Desy. "It Takes a Village to Do Microfinance Right: Effects of Microfinance on Gender Relations in Bali." Diss., Virginia Tech, 2019. http://hdl.handle.net/10919/102033.
Full textDoctor of Philosophy
Medeiros, Israel Lopes de. "Comparação entre as soluções de preservação pulmonar Perfadex® e LPD-G nacional em pulmões com um modelo de perfusão pulmonar ex vivo." Universidade de São Paulo, 2012. http://www.teses.usp.br/teses/disponiveis/5/5156/tde-25042012-104103/.
Full textINTRODUCTION: Pulmonary preservation techniques aim at improving graft quality and increasing tolerance during reperfusion and cold ischemia times. Currently, the most used technique consists of pulmonary artery anterograde perfusion with Perfadex. The high cost associated with the importation of this solution and the logistical difficulties of our ports and airports regarding medical supplies have caused problems for lung transplant centers in Brazil. Therefore there is need for a preservation solution manufactured in Brazil. The aim of this study is to compare the pulmonary preservation solutions Perfadex and LPD-G manufactured in Brazil in an ex vivo lung perfusion (EVLP) model. METHODS: Donors with brain death, whose lungs had been declined by transplantation teams were used. Cases were randomized into two groups: in Group 1, Perfadex was used for pulmonary preservation. In Group 2, LPDnac, a solution manufactured in Brazil and whose compositon is identical to Perfadex, was used. After harvesting, lungs were stored at 4 °C for 10 hours. An EVLP system was used and the pulmonary block was ventilated and perfused by an acellular solution at 37 °C for 60 minutes. Ischemic-reperfusion injury was measured by functional (blood gas, pulmonary vascular resistance, lung compliance, wet/dry weight ratio) and histological parameters. Pulmonary biopsies were performed at three time points: before harvesting, 10 hours after cold ischemia and 60 minutes after reperfusion. Samples were prepared for light microscopy analysis. Several criteria were used (alveolar edema, interstitial edema, hemorrhage etc.) to create a lung injury score (LIS). Apoptotic cell count was carried out using the TUNEL methodology (TdT-mediated dUTP nick end labeling). RESULTS: After reperfusion, mean oxygenation capacity was 406.0 mmHg in Group 2 and 405.3 mmHg in Group 1 (p = 0.98). Mean pulmonary vascular resistance in Group 2 lungs was 378.3 dina.s.cm-5, whereas in Group 1 it was 697.6 dina.s.cm-5 (p = 0.035). Mean pulmonary compliance by the end of reperfusion was 49.3 ml/cmH2O in Group 2 and 46.8 cmH2O in Group 1 (p = 0.816). Mean wet/dry weight ratio was 2.02 and 2.06 in Groups 2 and 1, respectively (p = 0.87). Mean LIS for the biopsy performed after reperfusion was 4.37 and 4.37 in Groups 2 and 1, respectively (p= 1.0); apoptotic cell count was 137.50/mm2 and 118.75/mm2 in Groups 2 and 1, respectively (p = 0.71). CONCLUSION: The preservation solution manufactured in Brazil proved to be as good as Perfadex. The clinical application for the new solution may reduce costs, favoring the maintenance and opening of pulmonary transplantation centers
Klamer, David. "Introducing Lean Product Development at Semcon : A qualitative study." Thesis, Linköpings universitet, Kvalitetsteknik, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-78892.
Full textArsyad, Lincolin, and arsy0002@flinders edu au. "AN ASSESSMENT OF PERFORMANCE AND SUSTAINABILITY OF MICROFINANCE INSTITUTIONS: A Case Study of Village Credit Institutions in Gianyar, Bali, Indonesia." Flinders University. Development Studies, 2006. http://catalogue.flinders.edu.au./local/adt/public/adt-SFU20060621.142512.
Full textBrattlöw, Johan, and Adam Forsberg. "Värdeflödesanalys : ett första steg mot lean produktutveckling." Thesis, Linköping University, Department of Management and Economics, 2005. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-2746.
Full textDetta examensarbete har utförts vid Ekonomiska institutionen på Linköpings tekniska högskola. Uppdragsgivare har varit Kongsberg Automotive AB och Saab Training Systems AB. Syftet med detta arbete har varit att undersöka om värdeflödesanalys inom produktutveckling kan hjälpa företag att effektivisera utvecklingen av produkter. Metoden för värdeflödesanalys som vi valt att prova har tagits fram av MIT. Arbetets syfte var att pröva denna metod, detta gjordes genom att utföra två studier. Modellen föreskriver att en kartläggning görs i tre steg: först genom ett ganttschema, därefter flödesschema och till sist en DSM. Datainsamlingen är gjord med hjälp av intervjuer och en enkät, enligt Millards rekommendation. Med hjälp av metoden och stöd av litteratur kartlades och analyserades flödet. Bland annat framkom följande åtgärdsförslag: Tydligare ansvarsområden och klara rutiner Utför FEM-beräkning mer parallellt med konstruktionsarbetet Tydligarepull event för att klargöra varje aktivitets syfte. Vi kan konstatera att resultaten av värdeflödesanalysen har tagits väl emot av företagen, både när det gäller kartläggning och åtgärdsförslag. Detta leder oss fram till vår slutsats att modellen har varit till hjälp för företagen och därmed får anses fungera.
Holinka, David. "Prototyp adaptivní zadní svítilny." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2019. http://www.nusl.cz/ntk/nusl-399452.
Full textProkš, Jiří. "Zákaznicky upravitelný modul zadní skupinové svítilny s HD rozlišením." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2017. http://www.nusl.cz/ntk/nusl-318409.
Full textTaccioli, Leonardo. "Sistemi innovativi per l'alimentazione di GPL in motori ad accensione comandata." Bachelor's thesis, Alma Mater Studiorum - Università di Bologna, 2017. http://amslaurea.unibo.it/12900/.
Full textKawada, Yutaka. "La présence de la politique dans les médias au Japon : l'ingérence de la politique et les stratégies médiatiques du pouvoir face à l'évolution des médias." Thesis, Paris 2, 2014. http://www.theses.fr/2014PA020023.
Full textNowadays in the society, the media are essential and very important for the activities of people. The media have developed with the evolution of social and economic systems as well as technological advancements. The media were used by the authorities to control the society during the war, when the freedom of expression was severely limited. However, after the period of the occupation, Japan won the state of a democratic regime, where the media could enjoy freedom of expression. The 1955 system, where domination by one party of Parliament ( the LDP ) continued without interruption for 38 years, was created by the unique conditions of politics in Japan. However, later, the media contributed greatly to the fall of this strong political system with long duration. Now the media have a tendency to exert a great influence on politics. On the other hand, the authorities began to take measures to control the media in favor of their policy, which is interference in the media and made considerable pressure on their expression activities. Under the situation where media freedom is limited, the people, however, reacted against the authorities with new means and the relationship between media and politics is becoming more serious for us today
Costa, Natalia de Souza Xavier. "Efeito da exposição ao material particulado atmosférico no desenvolvimento da lesão pulmonar aguda (LPA) induzida por LPS." Universidade de São Paulo, 2015. http://www.teses.usp.br/teses/disponiveis/5/5160/tde-24112015-102031/.
Full textEpidemiological and experimental studies show that the air pollution can cause several harmful outcomes to the health, which include systemic and pulmonary inflammation, cardiovascular diseases, and exacerbation of preexisting diseases. The acute respiratory distress syndrome is characterized by intense inflammatory response, alveolo-capillary barrier damage and hypoxemia and since it was described for the first time in 1967 it still has high mortality rates. This study aims to 1. Evaluate the impact of urban air pollution exposure on the acute lung injury progression and 2. Evaluate if the LPS-induced injury is altered in an individual previously exposed to the air pollution. The main findings regarding objective 1 show that when there is an interaction of the particulate matter on the acute phase of LPS-induced injury, the lesion is not as severe as in the group that received only LPS. The inflammatory parameters show that inflammatory cells and pro inflammatory cytokines are increased in the LPS 24 hour, whereas not, or not as much as, in the air pollution + LPS group. Based on these results, we can hypothesize that may have occurred a shift of the inflammatory profile or immunotoxicity. Results of the objective 2 show that the group LPS + air pollution remains in a persistent inflammatory condition with increased leucocytes in BALF and pro inflammatory cytokines (IL-1beta, IL-6 e IL-8) also increased in the lung tissue, while the LPS 5 weeks group shows these parameters levels closer to the control group. The tissue morphology displays a diminished alveolar air space and septal thickening. It is very likely that the air pollution interferes on the adequate LPS-induced lesion recovery and repair, once that the air pollution, specially the fine particulate matter, has a continuous pro-inflammatory role over the lesion. We can conclude that: the use of nebulized LPS is a feasible acute lung injury model; the exposure to the particulate matter could alter the profile of the immediate response (24 hours) of the acute lung injury and it can impair the lesion recovery. Additional studies are necessary to understand the possible role of the immunological response modulation mechanisms involved in these processes
Zadina, Martin. "Pokročilé nasazení OS xBSD v síti pro střední školu." Master's thesis, Vysoké učení technické v Brně. Fakulta informačních technologií, 2007. http://www.nusl.cz/ntk/nusl-412806.
Full textMartin, Samuel James Louis. "The 'Lad Lit' dilemma : institutional influences on creative writing practice." Queensland University of Technology, 2008. http://eprints.qut.edu.au/17032/.
Full textAlekic, Anis, and Andreas Carmvall. "Displayintegrering." Thesis, Linnaeus University, School of Computer Science, Physics and Mathematics, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:lnu:diva-2412.
Full textArbetet är ett examensarbete i högskoleingenjörsutbildningen, inriktning datateknik, på Linnéuniversitet. Arcoma AB är ett företag i Växjö som utvecklar och tillverkar kompletta röntgensystem. Företaget har som mål att förbättra användarvänligheten av systemet med hjälp av en LED-display. De kan förbättra systemet genom att byta ut en enhet som styr röntgengeneratorn mot LED-displayen. Detta leder till att användaren får bättre kontroll och styrning av systemet, samtidigt som patienten behandlas.
I rapporten beskrivs implementering av både hårdvara och mjukvara till displayen, samt den tekniska bakgrunden som till exempel HDMI och LED-tekniken. Mjukvaran har testats direkt mot displayen vilket har gjort testningen intressant. För att lösa uppgiften har vi fått använda Arcomas system och utvecklingsverktyg. Programspråket som användes var framförallt C++.
Resultatet blev ett system som byggs upp av Arcomas hårdvaruplattform, vår kringelektronik och displayen där de sistnämnda byggdes in i en låda. Utöver displayen utvecklades en demoapplikation för generatorstyrning som styrs av en USB-mus. Arcoma är nöjda över resultatet då vi löst huvuduppgiften med displayen, men även löst de extrauppgifter som fanns. Idag försöker Arcoma skapa en efterfrågan för lösningen i deras nya produkter.
This abstract describes the Bachelor of Science in engineering thesis for computer science at Linnaeus University. Arcoma AB in Växjö is a company that constructs and develops complete x-ray systems. The goal of the company is to improve the usability of the system with the help of a LED display. Arcoma can improve the system by exchange the unit that controls the x-ray generator with the LED display instead. This will give the user the ability to have better overview and control of the system, while treating the patient.
This report describes the implementation of both the software and the hardware for the display, but also the technical background for some standards like HDMI and the LED technologic. The software has been tested directly to the display, and therefore made the testing interesting. We have used the Arcoma system and the development tools to solve the problem. The programming language that was used to solve the problem was mainly C++.
The result was a system that is build up by the Arcoma hardware platform, our surrounding electronics and the display where the last ones were built in a box. Aside the display a demo application was developed for controlling the generator. This applications is controlled by a USB mouse. Arcoma is pleased with the result of the main problem with the display, and they are also pleased with us solving the additional problems that existed. Arcoma wants to create a demand of this solution in their new products.
Bohutínský, Jaroslav. "Řídicí a signalizační jednotka pro sportovní utkání." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2010. http://www.nusl.cz/ntk/nusl-218393.
Full textTian, Feng. "Etude et optimisation des systèmes d'éclairage pour la croissance des plantes en milieu contrôlé." Thesis, Toulouse 3, 2016. http://www.theses.fr/2016TOU30248/document.
Full textArtificial lighting systems can be used for plant growth in protected horticulture. Their main function is to improve the quality and quantity of agricultural products. Plant factory and greenhouse with supplemental lighting are the concrete manifestation of protected horticulture. The applications of Plant Artificial Radiation Sources (PARS) mean that the sunlight has not been the unique light source for agricultural production but can be replaced by PARS. Especially, Plant Factory with Artificial Lighting (PFAL) is an innovative technology for modern agriculture that fundamentally change the concept of farming. However, there are some problems for this new technique. First, some people do not understand well the characteristics of artificial light source. Second, photobiology mechanism under different spectra is not clear enough for all the species. Third, agricultural field is a large system of great complexity. As a result, the PARS usually have low efficiency and high energy consumption, which become the main obstacles for plant applications. PARS and their systems are the core technique to develop protected horticulture, especially for plant factory that can only use PARS for photosynthesis and agricultural production. However, the high energy consumption and design flaws become the bottleneck problems. Therefore, how to select the light sources and optimize the lighting systems are of great importance. Which kind of spectrum is optimal for plants or algae needs further study. Light emitting diode (LED) is the fourth (the latest) generation light source. Compared with traditional light sources, it has unparalleled advantages such as high efficiency, long lifetime, flexible spectrum, cool light, small size, robust, etc. Besides, LED lighting systems (LLS) use DC power supply, which is more reliable and easier to control. Therefore, LLS become more and more popular to the researchers, engineers, manufacturers and biologists. Particularly, LED applications for agricultural production also attract broad attention in the world in recent years. LED is known as the ideal choice to spread in the protected horticulture
Nascimento, Valtemir Emerencio do. "Aplicação da técnica LOD em métodos no domínio do tempo e freqüência para modelagem de meios convencionais e metamateriais." Universidade de São Paulo, 2007. http://www.teses.usp.br/teses/disponiveis/18/18133/tde-18122007-105116/.
Full textThis work focuses on developing efficient numerical methods, both in time and frequency domains, for modeling wave propagation in structures that present conventional media and/or metamaterial media combinations, particularly the metamaterials where both permeability and permittivity are simultaneously negative. In some cases, the simulation of such structures represent a great challenge, due to the great computational requirements. An efficient way of solving this problem is the usage of operator splitting techniques, specifically the alternate direction implicit (ADI) technique, already explored both in time and frequency domains, and recently the locally one-dimensional (LOD) . This work dedicates special attention to the LOD technique, where, for the first time, this one was applied in a finite difference frequency domain wide-angle propagation method, which was denominated LOD FD-BPM. The next step was to extend its application to the time domain, the first approach was used in a finite difference time domain wave propagation method, denominated LOD TD-WPM. Next, the LOD technique was applied to the FDTD method, resulting in an implicit formalism, denominated LOD-FDTD, which presents a better computational efficiency than the traditional ADI-FDTD. These approaches present an excellent computational efficiency, due to the possibility of using greater time steps than those permitted by the Courant-Friedrich-Levy (CFL) stability condition, being unconditionally stable as a consequence of applying the Crank-Nicolson (CN) scheme as well. The LOD-FDTD method restriction, referring to its first order accuracy in time, was circumvented by using the operator division scheme known as Strang splitting (SS), resulting in a second order time method LOD-FDTD-SS. The FDTD, ADI-FDTD, LOD-FDTD and LOD-FDTD-SS methods were also implemented with a lossy Drude model, making, this way, possible an adequate metamaterial media modeling. Another important contribution of this work was the implementation of the split PML contour condition in the LOD-FDTD formalism for the simulation of open electromagnetic problems.
Dargent, Auguste. "Rôle du PLPS au cours du sepsis : description des atux circulants de LPS par spectrométrie de masse au sein d'une cohorte de patients de réanimation, et perspectives d'épuration extracorporelle par LDL aphérèse." Thesis, Bourgogne Franche-Comté, 2019. http://www.theses.fr/2019UBFCI010.
Full textLipopolysaccharide’s (LPS) metabolism is complex, and it is still not used as a consistent biomarker or therapeutic target during sepsis. We used a novel LPS quantification method, able to detect lipoprotein-associated LPS in plasma, using 3-hydroxy myristate (3HM), a specific compound. We measured the 3HM levels in a cohort of patients admitted to intensive care and healthy volunteers. Septic patients had higher levels of 3HM, as did non-survivors of sepsis. Substantial levels of 3HM were also found in healthy subjects, suggesting that LPS is tightly integrated with human metabolism. Then, we demonstrated that the adsorption of LDL (low density lipoproteins) lipoproteins by LDL apheresis reduces the circulating levels of LPS, in vitro in the plasma of septic subjects, but also in vivo in hypercholesterolemic patients. Overall, these results provide important information for the understanding of endotoxemia, and open therapeutic perspectives for extracorporeal treatment during sepsis
Kančo, Jan. "LCD monitory." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-217462.
Full textKavouras, Alex M. Sr. "AN ELECTROLYTIC CAPACITOR-LESS APPROACH TO ELIMINATING FLICKER IN LED LIGHTING." Wright State University / OhioLINK, 2016. http://rave.ohiolink.edu/etdc/view?acc_num=wright1452360658.
Full textPokorný, Jiří. "Modernizace hlavních hodin pro řízení systémů podružných hodin." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-242182.
Full textJaník, Daniel. "Provozní parametry LED světelných zdrojů." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2017. http://www.nusl.cz/ntk/nusl-316394.
Full textSlažanský, Libor. "Měřicí anténa pro pásmo 1 - 6 GHz." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2009. http://www.nusl.cz/ntk/nusl-218037.
Full textShiu, Hong-Jie, and 許閎傑. "Performance Simulation and Analysis of LPD/LPI for Secure Communications." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/3h4b2k.
Full text國立中央大學
通訊工程研究所
94
Due to the requirements and developments of personal mobile communications for the past several decades, all kinds of global and local wireless/wire and military/civil communications systems are developing flourishingly in accordance with the novelties and breakthrough of all related electronic and communication techniques. Nevertheless, in order to fulfill specific tactical operations or objectives, especially for the tactical communications systems, and to decrease the intentions of the adversaries to detect and intercept the transmissions of some specified private information, secure communications systems should have the low probability of detection and interception capability to lower the probability of being detected and intercepted by the adversaries. Therefore, it’s a very important research topic of this thesis to evaluate the performance of low probability of detection and interception (LPD/I).
Ya, Zhen-Song, and 葉振松. "Characterization and fabrication of LPD-oxide GaAs MOSFET." Thesis, 2000. http://ndltd.ncl.edu.tw/handle/89067235860254821641.
Full text國立成功大學
電機工程學系
88
The volatilization of group V compounds is very serious at high temperatures. Therefore, we provide a low-temperature liquid phase deposition SiO2 (LPD-SiO2) method in this article. It can deposit thin silicon dioxide (~4nm) on GaAs substrate by optimizing control of the growth condition and have advantage of low temperature process lower than 60℃. The maximum temperature of fabrication MOSFET process is 400℃ in N2 for 33 minutes . We found that after annealing at this condition not only the quality of oxide can be improved but also obtains low ohmic contact resistance at the same time with corresponding to a specific contact resistance approximately 8.8 ×10-7Ω-cm2. This makes the fewer and simpler fabrication processes. The advantages of the large band gap and high electron mobility of GaAs have long been recognized and many efforts to fabricate MOSFET have been pursued. The fabricated GaAs MOSFET with LPD-SiO2 as gate insulator exhibit current-voltage curves with complete pinch-off and saturation characteristic and exhibiting a normalize transconductance in the vicinity of 280 mS/mm was obtained at room temperature for the 8μm gate length MOSFET. The unity current-gain cutoff frequency (ft) and the maximum frequency of oscillation (fmax)were measured to be 1.1 and 3.4 GHz for the channel length and width are 10 and 40μm, respectively. Finally, theoretical simulation of the MOSFET I-V characteristic is also introduced to compare with the practical experiments.
Chao, Ti-Kai, and 曹迪凱. "Characterization and Fabrication of LPD-oxide GaAs MOS." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/36735704953445254251.
Full text國立清華大學
電子工程研究所
91
Ⅲ-Ⅴ semiconductors have higher carrier mobility and better luminous characteristic compared with Ⅳ semiconductors, so it suits the application of high speed device and luminescent device. But it has been limited by the characteristic of its oxide, and by expensive fabrication for long time. In this paper, we used Liquid Phase Deposition technique with low cost, room-temperature, and high growth rate, to grow stably oxide on GaAs. This fabrication is cheaper than thermal oxidation and plasma enhanced chemical vapor deposition, and it has simpler fabrication processes, and it grows oxide at room temperature. Growth rate higher than 100nm/hr and LPD-oxide contains fluorine all prove the advantage of Liquid Phase Deposition. In this paper, we investigated the chemical compounds in solutions and temperature when growing oxide, how to affect growth rate, refractive index, breakdown electric field, leakage current density, flatband voltage shift, and effect charge density in oxide. We found the way to improve characteristic of LPD-oxide by observing the surface of oxide using SEM and analyzing chemical elements. To reform the quality of LPD-oxide by modifying the LPD method, optimizing the chemical compounds in solutions, controlling the temperature when growing oxide. We increased breakdown electric field up to 8.17MV/cm, reduced leakage current density down to 10-3A/cm at breakdown electric field is 4MV/cm. Flatband voltage shift was -0.4V, effect charge density in oxide was +2.25*1011/cm2 at 1MHz. We believe this low cost, low temperature, and high growth rate LPD method is a very good choice to grow oxide of Ⅲ-Ⅴ semiconductors in the future.
Yang, Chih-Kai, and 楊智凱. "LPD-TiO2 Thin Films on Si and GaAs." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/83506561841487128812.
Full text國立中山大學
電機工程學系
87
In recent years, owing to their outstanding properties of high refractive index, excellent transmittance in the visible and near-infrared range, as well as high chemical and abrasion resistance, titanium dioxide (TiO2) thin films have been studied extensively for using in numerous applications such as antireflection coatings, high temperature optical filters, protective layers on optical fibers, dielectrics of capacitors in memory cell, semiconductor electrode material in photoassisted electrolytic process, transparent electrode for solar cell and the active component in exhaust oxygen gas gauges. Furthermore, TiO2 have been considered as future candidates for dielectrics in dynamic random access memory( DRAM ) storage capacitors. Because liquid phase deposition (LPD), a new method to grow oxide layer, has the advantages of low temperature growth, good step coverage, and selective growth. We use this technique to deposit LPD-TiO2 film on silicon or gallium arsenide substrates instead of the conventional TiO2 film growth method. Some properties of LPD-TiO2 film are examined by using scanning electron microscopy (SEM), secondary ion mass spectroscope (SIMS), X-ray diffraction (XRD), energy dispersion X-ray microanalysis ( EDX ) and atomic force microscopy (AFM). When we deposit LPD-TiO2 on the metal patterned substrate, hydrofluoric acid (HF) in the Teflon vessel is a troublesome thing. Because hydrofluoric acid (HF) can etch metal pattern. So we try the electrode method to overcome this problem.
Su, Jwinn-Lein, and 蘇俊聯. "Investigation on Mechanism of Selective LPD and its Application." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/51110457029904106025.
Full text國立交通大學
電子研究所
84
Liquid Phase Deposition (LPD) is a low temperature technique. A LPD oxide can be prepared at room temperature (35 ℃ ). A unique property of selectivity deposition against photoresist has been found and developed. In this thesis, we investigate on the mechanism of selective deposition and develop its application. We have find out that there are three types of depositing LPD oxide: (1) no deposition, (2) blanket deposition, and (3) selective deposition. The process windows of selectivity with respect to the Si(OH)4 concentration and the deposition temperature have been constructed and a mechanism to explain the deposition mechanism has also been proposed. The mechanism of three deposition types is relied on the supersaturated degree of the immersing solution. A selective deposition can be obtained in a certain concentration of Si(OH)4. The concentration of Si(OH)4 can be controlled by the concentration of the added H3BO3 and the deposition temperature. The employment of selective LPD oxide grown at room temperature provides an alternative to conventional high temperature processes for certain application. We apply this technique to automatically form the contact holes in semiconductor devices. At first, we investigate the contact hole module by a p+-n junction and a Al/n-Si Schottky diode. Samples with contact hole fabricated by the conventional RIE process are also prepared for comparison. Conventionally, one is used to deposit the dielectric film followed by defining the pattern of contact holes via lithography, then RIE technique is used to open the contact holes with the photoresist as a mask. In contrast to the conventional fabrication flow for contact hole, we used an inverted process flow. We apply the lithography technique to define the pattern of contact holes prior to deposit a dielectric film. The photoresist is conserved on areas of the surface intended to form thereon a contact hole. Then selective LPD is employed to deposit an insulation layer on the surface not covered by the photoresist. Finally, photoresist is stripped and contact holes are automatically formed. We have found that both the performances of p+-n and Al/n-Si Schottky diodes with contact holes formed by the selective LPD method are much better than those fabricated by the RIE method. This is because that the selective LPD is capable of forming contact holes devoid of contamination and damage with compared to those fabricated by the conventional RIE process. In addition to the development of the selective LPD application in the contact hole modules, we have also successfully applied the selective LPD technique to an integral device, LTP TFT. A poly-Si TFTs was fabricated with LPD oxide as a gate insulator and selective LPD-SiO2-xFx as the capping layer in which the contact holes were automatically formed during the dielectric deposition . We find that the characteristics of TFT fabricated by the selective LPD are comparable with those fabricated by the RIE. Furthermore, the TFTs fabricated by selective LPD showed a better reliability than that by RIE.
Lin, Chien-Hua, and 林建華. "The development of Laser Projection Display (LPD) by MEMS technology." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/95697641912755995567.
Full text中華技術學院
機電光工程研究所碩士班
93
Many kinds of display technologies, including CRT(Cathode Ray Tube)、LCD(Liquid Crystal Display)、PDP(Plasma Display Panel)、DLP(Digital Light Processing) and LCOS(Liquid crystal on Silicon)…etc, have been developed so far. Nevertheless, all of these display technologies have to produce hundred thousands or even millions of image pixels like tiny jigsaw puzzle in order to construct a complete screen. As a consequence, manufacture procedure of these display technologies is very complicate and expensive. In this research, a Laser Projection Display(LPD) system, different form the other display technologies listed above, has been designed and fabricated to get a simple and low-cost manufacturing procedure. The key components are high frequency modulated Laser Diode, and Micro Scanning Mirror fabricated by MEMS technology. In the process, two kinds of Micro Scanning Mirror are fabricated by a series of special techniques basing on Excimer Laser. The Low Frequency Micro Scanning Mirror is used for vertical scanning, and the High Frequency Micro Scanning Mirror is used for horizontal scanning. In addition, the control circuits for Micro Scanning Mirror and Laser Diode have also been built. A unique Low frequency driving circuit has been developed to drive the Low Frequency Micro Scanning Mirror under a very low frequency, which is much lower than the resonant frequency of the mirror. The experimental results show the LPD can project image either in stationary or animation. The resolution of LPD is 46(horizontal) x 32(vertical), i.e. it has 1472 image pixels. Although there are some interesting issues yet to be solved in the future, for example, the power of Laser diode need to be increased, and the scanning angle of high frequency Micro Scanning Mirror also needed to be enlarged. But the LPD technology has shown its merits, in particularly, on its being inexpensive and simple to fabricate, and thus would be exiting to explore further toward high resolution and miniaturization projection display technology. Furthermore, the LPD can be use as a light source of DLP, LCD, barcode scanning or 3D scanning, and all of which are worth for further investigation.
Liao, Jyun-Shiang, and 廖俊翔. "Investigation of Characteristics for Al/LPD-TiO2/SiGe MOS Device." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/21318787601238747605.
Full text大葉大學
電機工程學系
97
Titanium oxide (TiO2 ) has been grown on SiGe film by using liquid-phase deposition ( LPD ) method with (NH4)2TiF6 and H3BO3 at room temperature. In this study, the concentration of (NH4)2TiF6 and H3BO3 were 0.05 and 0.25 M, respectively, and the temperature were 30 ℃. We found that the growth rate increases with the increasing of (NH4)2TiF6 and H3BO3 concentration. The electron spectroscopy of chemical analysis ( ESCA ) showed that the Ti2p peaks appeared at 458.6 and 464.5 eV. Moreover, the (NH4)2Sx treatment was used to reduce the leakage current of MOS devices. the leakage current density with and without sulfide treatment are 1.35×10-7 and 8.18×10-6 A/cm2 under positive electric field of 1 MV/cm, respectively. The significant reduction of leakage current about 60 was achieved in our study. We also found that TiO2 could be used as an antireflection coating. In this study, by capping a thin TiO2 layer with SiGe film, the photo-to-dark current ratio can be improved form 3.1 to 16.67.
LIN, TUNG-HSIEN, and 林東賢. "Investigation of Characteristics for Al/LPD-SiO2/Ge MOS Device." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/80148472307599432440.
Full text大葉大學
電機工程學系
97
The liquid-phase-deposition (LPD) oxide has been grown on Ge substrate under room temperature by using an aqueous solution of supersaturated hydrofluosilicic acid (H2SiF6) and boric acid (H3BO3). Before depositing silicon dioxide (SiO2), the Ge wafers were treated with (NH4)2Sx solution and it was found that the leakage current can be improved. In this study, the as-grown LPD samples were annealed at 200, 300 and 400℃ for 30 minutes under N2 environment to improve their electrical properties. We found that the breakdown voltage was increased, fixed oxide charge and interface trap densities were reduced. The current-voltage (I-V) and capacitance-voltage (C-V) characteristics were investigated to determine their electrical properties.
Hong, Tzy-Yan, and 洪梓晏. "Temperature and Supersaturated Degree on the Liquid-Phase Deposited (LPD) Oxide." Thesis, 1994. http://ndltd.ncl.edu.tw/handle/28131208933866992854.
Full text國立交通大學
電子研究所
82
The quality of liquid-phase deposited (LPD) oxide was promoted by the chemical purification system and the circulated deposition system, which was established for the preparation of the saturated solution and for the LPD oxide formation, respectively. We first investigated the deposition rate of LPD oxide and the degree of particle precipitated on the film. The deposition rate was reduced by decreasing the addition of H2O or by decreasing the deposition temperature. The degree of particle precipitation was reduced by decreasing the addition of H2O or by using the circulated deposition system. Second, we studied the effects of the deposition temperure, the volume ratio between H2O and the saturated solution, and the deposition time on the LPD oxide characteristics. On the other hand, we found that the circulated deposition system can improve the leakage current density and the breakdown field distribution. Finally, the LPD oxide was applied on the gate insulator of MOSFETs for the first time. The device parameters were investigated and compared with those using various deposited gate insulators.
Pan, Shing-Rui, and 潘星睿. "High Quality LPD Insulator and its Electrical Property Due to Micro Contamination." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/92921571116835209150.
Full text國立交通大學
電子工程系
90
As we pay more attention to effects of AMC in semiconductor manufacturing process, degradation of devices characteristics due to AMC should be avoided. We use the specially designed clean bench with different filter modules to supply different kinds of environment. In order to evaluate effect of AMC on oxide reliability, we expose samples in CB before LPD oxide film deposited. We fabricate MOS capacitor to measure the leakage current density (J-E), V-ramp stress test (Qbd) and C-V to evaluate the changes of device performance and reliability. After our experiments, we have found that NEUROFINE PTFE filter performs better than Low-Boron Glass-Fiber Filters (A/B). Through the analysis of electrical characteristics, samples exposed under NEUROFINE PTFE filter have higher breakdown field and lower leakage current density than those exposed under Low-Boron Glass-Fiber filters (A/B) in the same exposure time. In order to evaluate effects of AMC on devices characteristics precisely, we must use high quality and high performance low temperature LPD oxide films. We propose a novel LPD process by distilling high purity H2SiF6 solution. High purity SiO2 powder (99.9999%) form Japan is used, too. New industrial class SiO2 powder has fewer impurities than medical class SiO2 powder used before. It is expectable that using distilled H2SiF6 and high purity SiO2 powder can improve device electrical properties effectively. Leakage current density is lowered obviously, and breakdown field is slightly increased. Moreover, different ratios of pre-distilled solution will affect distillation rate and deposition rate very much. LPD oxide film quality has concern with the ratio, too. From experiments, the higher SiO2 proportion in pre-distilled solution, the lower distillation and deposition rate but the higher quality of LPD oxide film is observed. We also propose a reasonable mechanism to explain distillation method by analyzing the concentration of H2SiF6 and observation during whole process in this thesis.
Fan, Tso-Hung, and 范左鴻. "The Electrical Investigation of LPD Oxides on Single Crystal Silicon and Poly-silicon." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/72721520630846621308.
Full text國立交通大學
電子研究所
84
For the growth of silicon dioxide using the traditional thermal furnacetube, the interface damges caused by high temperature process such as ther-mal stress and dislocation growth will degrade the performance of the deviceand the integrated ciecuit. In paticular, the junction redistribution results from the high temperayure process will become more significant for smalll geometric devices. Therefore, the deduction of process temperature is nece-ssary for the growth of SiO2 in future. In order to reduce the process temperature , various CVD techniques withlow temperature are developed to substitute for thermal oxidation. The CVD oxide films have better breakdown characteristics than thermal oxides. Ingeneral, the as-deposited oxide film exhibits a higher interface state dens-ity. This drawback can reduced by further development. Neverthless, the conventional CVD oxide films produced from SiH4 and O2 and N2O contain NH, SiH, SiN and OH groups in the film create deeep traps or recombination centersin the oxide film from the infraded absorption spectrum. These chemical con- tainments act as defects. HOwever, the CVD oxidess without SiH, SiN and OHgroups can be obtained using He-diluted or ECR microwave plasma. These methodrequired high temperature(350C) process and expensive equipments. In addition, it has been reported that the fluroine incorpration in gate oxide can evidently reduce the interface trap density and increase immunity to hot-carrier-induced stress. We are interested in liquid-phase deposition method which can depositeoxide film without chemical containments as described above and obtain fluorine-contained oxide film without additional process. Moreever, the equipment of this method is inexpensive and easy to operate. The oxide film with perfact unifimity can be obtained by LPD method. The LPD has sucessful applied in gate insulator of MOSFET and polysilicon thin filmtransistor for LCD. However, few studies have been reported on electrical pro- perties of LPD oxide films, especially their leakage conduction mechanism. In order to improve the oxide quality, it is essential to clarify the leakage current conduction mechanism. In this studies, we will describe the and verifythe various leakage conducton mechanisms before and after thermal and RTPambient annealing. In addition, we also distinguish the difference of LPD oxidebetween the two kinds of substrates (single-Si and polysilicon. Finally, we use the previous results to deposite the LPD oxides companying with various annealing conditions. The deposited LPD oxide films shows better quality than before.
Liao, Hsin-Chih, and 廖星智. "Growth of LPD-BaTiO3 Films on Silicon Using Barium Nitrate and Hexafluorotitanic Acid." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/93343478686376594129.
Full text國立中山大學
電機工程學系
87
Barium titanate (BaTiO3) thin films have high dielectric constant, which can be used as an insulating material in the future ultra-large scale dynamic random access memory (DRAM) and optoelectronic devices. But, high process temperature of the traditional techniques will induce damages to devices, such as sol-gel, sputtering, MBE and CVD. We develop a new method-liquid phase deposition (LPD), to grow oxide layer. It has the advantages of low temperature deposition, good step coverage, and selective growth. The parameters that affect the deposition rate and refractive index of LPD-BaTiO3 films are investigated in this work. We examine the LPD-BaTiO3 films structure by the X-RAY diffraction and observe the cross-sectional view by scanning electron microscopic (SEM). Besides, the SIMS depth profile and ESCA-XPS composition analysis examine the composition of LPD-BaTiO3 film. We can clearly observe an uniform distribution of the elements of Ba、Ti and O in the film. By capacitance-voltage measurement, the flat band voltage shift and the effective oxide charges of LPD-BaTiO3 film are 0.25V and 3.06 ×1011 cm-2.The static dielectric constant (i) is about 22.1. The effects of rapid thermal annealing (RTA) and rapid thermal oxidation (RTO) on the quality of films are also investigated, such as thickness, refractive index and leakage current density.
Chen, Chu-Hsuan, and 陳巨軒. "Using LPD-TiO2 Nanorods Array and Dye to Improve the Inverted Heterojunction Solar cell." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/88527418322418806659.
Full text國立臺灣大學
電子工程學研究所
99
This thesis is about using P3HT:PCBM as the active layer in different kinds of organic bulk heterojunction solar cell structures, including conventional structure, inverted structure, inverted structure hybrid with dye, inverted structure having nanorods array. In the fabricating of conventional structure cell, the introducing of a long time pre-annealing process solved the structure damage caused by solvent, which hard to vaporize from organic layers completely. And the convention efficiency was improved from 0.2% to more than 2%. In the fabricating of inverted structure cell, the introducing of a short time post-annealing process eliminated the contact resistant between e-gun evaporated Ag and organic layer. And the convention efficiency was improved from 0.03% to more than 2%. In the fabricating of the inverted structure cell hybrid with N719, N719 modified the surface of TiO2 and enhance the yield rate. And the average conversion efficiency was improved from 1.86% to 2.1%. In the fabricating of inverted structure cell having nanorods array, water bath method was introduced to get ZnO nanorods array. And TiO2 nanorods array was obtained by converting the ZnO nanorods template with LPD method. However, this kind of structure had unsolved contact problem between layers, and finally its conversion efficiency was less than 0.4% All the fabricating processes above are cheap, simple, and can be used in large areas producing.
Chang, Chi-Wen, and 張綺文. "Stencil-LPD Method for High Quality Color Filter-Less 120Hz Field-Sequential-Color Displays." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/21233589817381520625.
Full text國立交通大學
照明與能源光電研究所
100
Since a field-sequential-color LCD (FSC-LCD) does not require color filters, it has potential to be the next-generation eco-display. The conventional FSC-LCD sequentially flashes red, green, and blue field images at 180Hz field rate to form a full color image by the integration on the retina. Considering the currently used LC modes, a two-field method driving at a field rate of 120Hz has been the mainstream to develop. However, only two fields to display full color images formed by the three primaries, it is lack of a degree of freedom resulting image distortion. Thus, in the previous solutions, a specific color filter was applied, known as the 2F2CF method proposed by Phillips. By doing so, it can reproduce exactly the same image with the original one but still needs color filters. The other method, two-color-field proposed by NCTU, is to divide the blue information, which is the least sensitive color to human eyes, into two parts and to combine them with red and green information individually. This method does not require color filters but cause color distortion. In this thesis, a novel two-field display method, Stencil-LPD, was proposed without color filters. The Stencil-LPD method can provide proper backlight colors according to the image content that can decrease the color difference caused by the lack of degree of freedom. Compared to the two-color-field method, the proposed method reduced the color distortion by 53%. Besides, Stencil-LPD method provided less but sufficient saturation colors as backlight signals, the chrominance difference was lowered that diminishes the relative CBU value to 64% while it is 89% in the two-color-field method.
Lu, Jun-Xian, and 呂俊賢. "Study of Nitridation on Liquid-Phase-Deposited (LPD) oxide by High Temperature Rapid Thermal Processing." Thesis, 2000. http://ndltd.ncl.edu.tw/handle/24444005918122645693.
Full text國立成功大學
電機工程學系
88
Recently, liquid-phase deposited (LPD) oxide has been accepted much attention for the advantages of room temperature process and has been successfully applied as gate insulator in poly-Si TFTs, MOSFET, and as interlayer dielectric in multilevel interconnection. LPD oxide incorporated fluorine (SiOxFy) has several advantages such as radiation hardness and hot-carrier-effect immunity but also has disadvantages. Comparing to pure SiO2, the Si-F or Si-F2 bonds make spare space in the network of SiOxFy. It supplies the path of direct-tunneling leakage current and makes LPD films unstable. In order to get high quality LPD oxide, rapid thermal process (RTP) in N2 ambient is used to improve oxide quality by annealing in high temperature but very short time. Annealing temperature of 800℃ seems to be a practical temperature of decomposition of fluorine. This change reduces the spare space in the SiOxFy system and densifies the structure of LPD oxide. Thus LPD oxides with lower leakage current and higher breakdown strength can be obtained through RTP process. Furthermore, LPD oxide following rapid thermal nitridation (RTN) in N2O ambient has the higher quality, even better than N2-RTP. During RTN, not only thermal treatment densifies the structure of bulk oxide but also incorporation of nitrogen reduces the traps and defects in SiO2-Si interface. These changes can be responsible for the excellent electrical properties, such as high electrical breakdown strength (of ~10.5MV/cm), low leakage current density (of 10-9A/cm2 order at 2MV/cm), low charge-trapping rate, and low interface state density of the nitrided LPD oxide. In particular, higher electrical breakdown strength indicates that the electrical breakdown limit of LPD oxide can be modified in thinner film region.
Chen, Chi-Ming, and 陳啟明. "Reliability of Novel Barrier Dielectric Liner Prepared by TD-LPD FSG with NH3-Plasma Annealing." Thesis, 2000. http://ndltd.ncl.edu.tw/handle/74860877732373744491.
Full text國立交通大學
電子工程系
88
As device geometry is scaled down to deep submicron region, the resistance-capacitance (RC) delay of interconnection becomes a dominant part of the total delay for device switching. A novel IMD with a low dielectric constant(Low-K) is required to replace the conventional SiO2 and Cu is also used as metal material to replace Al, which are effective solutions to improve the RC delay of interconnection. MSQ is a Low-K material, however, leakage current is awful according to porous film. Therefore, A novel barrier dielectric liner prepared by TD-LPD and NH3-plasma annealing for a reliable Cu/MSQ damascene integration is proposed and qualified. The liner can effectively reduce the leakage current by a factor of ~2.5, and the effective dielectric constant of MSQ after being capped with the 30nm liner is slightly increased by ~0.17 to 2.94. SIMS and TDDB results demonstrate that the liner can effectively block Cu penetration. Thermal stability of Cu/liner stack achieves 550℃. The mechanism of the barrier property is due to formation of the surface (10~13 nm) SiON layer on SiOF film during NH3-plasma annealing. The effect of NH3-plasma annealing time on the barrier property has also been studied. The preferable NH3-plasma annealing time is less than 15 min, beyond which the barrier property in terms of TDDB lifetime is not further improved. 15-min NH3-plasma annealing corresponds to a surface nitrogen concentration of about 33.5 atom %. The liner as a capping is thus very promising to be applied on Cu/MSQ interconnection.