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Academic literature on the topic 'Light-sheet Lithography'
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Journal articles on the topic "Light-sheet Lithography"
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Mohan, Kavya, Ayush Tyagi, and Partha Pratim Mondal. "Note: Multi-sheet light enables optical interference lithography." Review of Scientific Instruments 89, no. 6 (June 2018): 066106. http://dx.doi.org/10.1063/1.5022499.
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Mohan, Kavya, and Partha Pratim Mondal. "Light‐sheet based lithography technique for patterning an array of microfluidic channels." Microscopy Research and Technique 81, no. 9 (February 8, 2017): 936–40. http://dx.doi.org/10.1002/jemt.22823.
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Mohan, Kavya, and Partha Pratim Mondal. "MRT Letter: Two-photon excitation-based 2pi Light-sheet system for nano-lithography." Microscopy Research and Technique 78, no. 1 (November 27, 2014): 1–7. http://dx.doi.org/10.1002/jemt.22452.
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Boane, Jenny L. N., Pedro Centeno, Ana Mouquinho, Miguel Alexandre, Tomás Calmeiro, Elvira Fortunato, Rodrigo Martins, Manuel J. Mendes, and Hugo Águas. "Soft-Microstructured Transparent Electrodes for Photonic-Enhanced Flexible Solar Cells." Micro 1, no. 2 (October 11, 2021): 215–27. http://dx.doi.org/10.3390/micro1020016.
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Microstructured transparent conductive oxides (TCOs) have shown great potential as photonic electrodes in photovoltaic (PV) applications, providing both optical and electrical improvements in the solar cells’ performance due to: (1) strong light trapping effects that enhance broadband light absorption in PV material and (2) the reduced sheet resistance of the front illuminated contact. This work developed a method for the fabrication and optimization of wavelength-sized indium zinc oxide (IZO) microstructures, which were soft-patterned on flexible indium tin oxide (ITO)-coated poly(ethylene terephthalate) (PET) substrates via a simple, low-cost, versatile, and highly scalable colloidal lithography process. Using this method, the ITO-coated PET substrates patterned with IZO micro-meshes provided improved transparent electrodes endowed with strong light interaction effects—namely, a pronounced light scattering performance (diffuse transmittance up to ~50%). In addition, the photonic-structured IZO mesh allowed a higher volume of TCO material in the electrode while maintaining the desired transparency, which led to a sheet resistance reduction (by ~30%), thereby providing further electrical benefits due to the improvement of the contact conductance. The results reported herein pave the way for a new class of photonic transparent electrodes endowed with mechanical flexibility that offer strong potential not only as advanced front contacts for thin-film bendable solar cells but also for a much broader range of optoelectronic applications.
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Behrens, Bernd Arno, Richard Krimm, Jan Jocker, Eduard Reithmeier, Bernhard Roth, and Maik Rahlves. "Method to Emboss Holograms into the Surface of Sheet Metals." Key Engineering Materials 549 (April 2013): 125–32. http://dx.doi.org/10.4028/www.scientific.net/kem.549.125.
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Holograms are industrially used as decorative design elements to increase the value of products. As they are hard to copy, holograms are also used for brand protection and product identification. The state-of-the-art is to emboss holograms in the surface of polymeric foils and to apply them to products by adhesive bonding. Examples are holograms on credit cards, banknotes or identification cards. In this paper, a new method to emboss holograms in the surface of sheet metals is presented. By this, parts made of sheet metal such as decorative interior parts of cars, battery housings or packaging of cosmetic products can be equipped with holograms during their production process. Hence, adhesive bonding and the required additional handling operations are not necessary. An embossing tool and the results of experimental hologram embossing are described. Aluminium Al99.9, aluminium-magnesium alloy AW-5505, copper and zinc-coated deep drawing steel DC05 were used as sheet metals to be embossed. Furthermore, a new method and a device to produce master holograms are presented. Master holograms are required to produce embossing dies with the hologram on its surface (referred to as shim). The device is based on a laser light source and a spatial light modulator (SLM). With help of the SLM, simultaneous transfer of 1920 x 1080 pixels of a Computer Generated Holograms (CGH) topography to a plate coated with photoresist is possible. Compared to todays industrial mastering of holograms which is done pixel by pixel, the time required for the process is much shorter. In addition, investment costs are lower compared to currently used electron-beam-lithography devices.
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Peng, Kai-Yu, and Da-Hua Wei. "Improving Light Extraction of Organic Light-Emitting Devices by Attaching Nanostructures with Self-Assembled Photonic Crystal Patterns." International Journal of Photoenergy 2014 (2014): 1–9. http://dx.doi.org/10.1155/2014/936049.
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A single-monolayered hexagonal self-assembled photonic crystal (PC) pattern fabricated onto polyethylene terephthalate (PET) films by using simple nanosphere lithography (NSL) method has been demonstrated in this research work. The patterned nanostructures acted as a scattering medium to extract the trapped photons from substrate mode of optical-electronic device for improving the overall external quantum efficiency of the organic light-emitting diodes (OLEDs). With an optimum latex concentration, the distribution of self-assembled polystyrene (PS) nanosphere patterns on PET films can be easily controlled by adjusting the rotation speed of spin-coater. After attaching the PS nanosphere array brightness enhancement film (BEF) sheet as a photonic crystal pattern onto the device, the luminous intensity of OLEDs in the normal viewing direction is 161% higher than the one without any BEF attachment. The electroluminescent (EL) spectrum of OLEDs with PS patterned BEF attachment also showed minor color offset and superior color stabilization characteristics, and thus it possessed the potential applications in all kinds of display technology and solid-state optical-electronic devices.
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Xu, Tianqi, Jiachen Zhang, Mohammad Salehizadeh, Onaizah Onaizah, and Eric Diller. "Millimeter-scale flexible robots with programmable three-dimensional magnetization and motions." Science Robotics 4, no. 29 (April 24, 2019): eaav4494. http://dx.doi.org/10.1126/scirobotics.aav4494.
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Flexible magnetic small-scale robots use patterned magnetization to achieve fast transformation into complex three-dimensional (3D) shapes and thereby achieve locomotion capabilities and functions. These capabilities address current challenges for microrobots in drug delivery, object manipulation, and minimally invasive procedures. However, possible microrobot designs are limited by the existing methods for patterning magnetic particles in flexible materials. Here, we report a method for patterning hard magnetic microparticles in an elastomer matrix. This method, based on ultraviolet (UV) lithography, uses controlled reorientation of magnetic particles and selective exposure to UV light to encode magnetic particles in planar materials with arbitrary 3D orientation with a geometrical feature size as small as 100 micrometers. Multiple planar microrobots with various sizes, different geometries, and arbitrary magnetization profiles can be fabricated from a single precursor in one process. Moreover, a 3D magnetization profile allows higher-order and multi-axis bending, large-angle bending, and combined bending and torsion in one sheet of polymer, creating previously unachievable shape changes and microrobotic locomotion mechanisms such as multi-arm power grasping and multi-legged paddle crawling. A physics-based model is also presented as a design tool to predict the shape changes under magnetic actuation.
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Wang, Min Wen, Wei Chuang Lin, and Ming Hsiao Lee. "Development of a Light Guide Film with Optimal Design and Roll to Roll Microfabrication Technology." Applied Mechanics and Materials 284-287 (January 2013): 2729–34. http://dx.doi.org/10.4028/www.scientific.net/amm.284-287.2729.
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Neural network optimal optical design and Roll to Roll (R2R) microfabrication has been integrated in the development of a light guide film (LGF) for liquid crystal display application in this study. TracePro software was used for optical simulation work for the light guide film. Back-propagation neural network (BPNN) was applied to establish a light guide film optical quality predictor. Combined with genetic algorithms (GA), global optimization of the optical quality was achieved. The optimal pattern radii of different zones range from 40 μm to 210 μm were first transferred to an 80 μm thick stainless steel sheet through lithograpgy and etching process. The patterned sheet was then wrapped around the stainless steel roller for R2R fabrication of the patterns on a 188 μm thick PET substrate with UV resin. When operated with imprinting pressure of 0.61 MPa and substrate speed of 0.251 m/min, the LGF measurement results showed that the replication rate is around 98% while the luminace uniformity reaches 74.9%.
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Hokari, Ryohei, Kyohei Takakuwa, Hirohisa Kato, Akitaka Yamamoto, Yusuke Yamaguchi, and Kazuma Kurihara. "Low-reflective wire-grid polariser sheet in the visible region fabricated by a nanoprinting process." Scientific Reports 11, no. 1 (January 22, 2021). http://dx.doi.org/10.1038/s41598-021-81750-2.
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AbstractFor the construction of next-generation optical products and systems, the evolution of polariser sheets is a necessary requirement. To this end, a low-reflective wire-grid polariser (WGP) sheet for the visible light region is demonstrated, the nanowires of which consist of a sintered body of silver nanoparticle ink. The nanowires are formed by a nanoprinting process using a thermal nanoimprint method and ink filling. This process makes it easier to achieve multiple wafer-scale productions without using sophisticated equipment compared to conventional WGP nanofabrication techniques, which typically employ lithography and elaborate etching processes. The optical characteristics are controlled by the shape of the printed nanowires. A WGP sheet with a luminous degree of polarisation of 99.0%, a total luminous transmittance of 13.6%, and a luminous reflectance of 3.6% is produced. Its low reflectance is achieved through the uneven surface derived from the sintered body of the nanoparticle ink, and the shape of the bottom of the nanowire is derived from the tip shape of the mould structure. Furthermore, the printed WGP sheet has the durability required for the manufacturing of curved products, including sunglasses. The optical structures made of nanoparticle ink using this nanoprinting process have the potential to significantly contribute to the development of fine-structured optical elements with unprecedented functionality.
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Bai Jing, Ge Cheng-Xian, He Lang, Liu Xuan, and Wu Zhen-Sen. "Analysis of trapping force exerted on multi-layered chiral sphere induced by laser sheet." Acta Physica Sinica, 2022, 0. http://dx.doi.org/10.7498/aps.71.20212284.
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Theoretical study on optical trapping of multi-layered chiral sphere has attracted more and more attention for its important applications in many frontier scientific fields such as chemical engineering, biomedicine, optical tweezers, micro/nano lithography etc. In order to trap and manipulate chiral multi-layered particles efficiently, the present paper aims at developing the theoretical research of trapping force (TF) exerted on a multi-layered chiral sphere induced by laser sheet which might have great potential to improve the light performance in optical trapping as well as capture, suspension, and high-precision delivery of chiral cells. Here, based on the Generalized Lorenz Mie theory and the completeness of spherical vector wave functions (SVWFs), the electromagnetic field of incident laser sheet are expanded in terms of SVWFs. Accordingly, by introducing the beam scattering theory and the conservation law of electromagnetic momentum (EM), the analysis of TF exerted on multi-layered chiral sphere can be analytically expressed in terms of the incident and scattering coefficients. Taking the chiral cell as an example, the TF induced by laser sheet is simulated numerically. Numerical effects of the varying chirality, polarization states, beam waist width, inner material loss and outmost size on the TF induced by laser sheet are analyzed and compared with those by circular Gaussian beam incidence in detail. It is found that the introduction of chirality parameter may reduce the axial TF exerted on chiral multi-layered cell. Thus, it is more difficult to trap and manipulate stratified chiral cells than to trap general isotropic cells. Also it is shown that the TF of chiral cells can be significantly discriminatory in nature, depending upon both the handedness of the interacting particles and the polarization of the incident light. Thus, an appropriately polarized beam should be considered in trapping chiral cells. For chiral multi-layered cells with small loss in the inner layer, when the inner refractive indices are less than the outmost refractive index, the TF of multi-layered chiral cell becomes stronger with the outmost radius decreasing. Conversely, for the inner refractive indices are greater than the outer refractive index, TF becomes weaker as the outmost radius decreases. Besides, compared with the traditional circular Gaussian beam, the strong convergence of elliptical Gaussian beam can be easier to achieve three-dimensional capture of stratified chiral cells, which may provide a recipe to understand the light interaction with more complex chiral cells with the aid of the analytical approach and could be a promising avenue for the design of optical trapping systems.
Conference papers on the topic "Light-sheet Lithography"
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Srituravanich, W., N. Fang, C. Sun, S. Durant, M. Ambati, and X. Zhang. "Plasmonic Lithography." In ASME 2004 3rd Integrated Nanosystems Conference. ASMEDC, 2004. http://dx.doi.org/10.1115/nano2004-46023.
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As the next-generation technology moves below 100 nm mark, the need arises for a capability of manipulation and positioning of light on the scale of tens of nanometers. Plasmonic optics opens the door to operate beyond the diffraction limit by placing a sub-wavelength aperture in an opaque metal sheet. Recent experimental works [1] demonstrated that a giant transmission efficiency (>15%) can be achieved by exciting the surface plasmons with artificially displaced arrays of sub-wavelength holes. Moreover the effectively short modal wavelength of surface plasmons opens up the possibility to overcome the diffraction limit in the near-field lithography. This shows promise in a revolutionary high throughput and high density optical lithography. In this paper, we demonstrate the feasibility of near-field nanolithography by exciting surface plasmon on nanostructures perforated on metal film. Plasmonic masks of hole arrays and “bull’s eye” structures (single hole surrounded by concentric ring grating) [2] are fabricated using Focused Ion Beam (FIB). A special index matching spacer layer is then deposited onto the masks to ensure high transmissivity. Consequently, an I-line negative photoresist is spun on the top of spacer layer in order to obtain the exposure results. A FDTD simulation study has been conducted to predict the near field profile [3] of the designed plasmonic masks. Our preliminary exposure test using these hole-array masks demonstrated 170 nm period dot array patterns, well beyond the resolution limit of conventional lithography using near-UV wavelength. Furthermore, the exposure result obtained from the bull’s eye structures indicated the characteristics of periodicity and polarization dependence, which confirmed the contribution of surface plasmons.
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Jia, Shuhai, Yigui Li, Xiao Sun, and Jun Zhu. "Study on Novel MEMS Hollow Microneedle Array." In 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. ASMEDC, 2007. http://dx.doi.org/10.1115/mnc2007-21415.
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A novel MEMS hollow microneedle array is fabricated through the exposure technique in deep X-ray lithography and development procedure in this paper. The method to fabricate microneedle array presented in this paper needn’t any special apparatuses, and is very easy to operate. A method to compensate the beam distribution of synchrotron radiation light source is described. The PMMA (polymethylmethacrylate) sheet is chosen as the material of microneedle. The length of the hollow microneedle fabricated is 160μ m. The outer diameter of microneedle is 80μm, and the inner diameter of microneedle is 40μm. The mechanical characters of microneedle, such as the force withstanding capabilities, are studied through both the theoretical analysis and numerical simulation of finite element method. The analysis results of the mechanical character show that the strength of microneedles fabricated in this paper is enough to pierce human skin.
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Berghmans, Francis, Marc Decréton, Hugo Thienpont, Tomasz Nasilowski, Krzysztof Zdrodowski, Kornel Radomski, Artur Bekiesza, et al. "Demonstration of a compact polarisation based two-dimensional multimode optical fibre space switch as optical fibre sensor multiplexer." In The European Conference on Lasers and Electro-Optics. Washington, D.C.: Optica Publishing Group, 1998. http://dx.doi.org/10.1364/cleo_europe.1998.cwp4.
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We constructed two polarisation based space division switches, using nematic liquid crystal variable retarders (LCVR) or ferro-electric liquid crystal polarisation rotators (FLC). Our systems have the potential of establishing a bandwidth transparent relation between 1 input and 9 output multimode optical fibres. [1] To shift a polarised light beam from the input to one of the nine possible outputs, we use a combination of commercially available large aperture LCVRs or FLCs and birefringent calcite [CaCO3] crystals (BC). This yields easily controllable modules for unidirectional beam displacement. Since each LCVR or FLC only needs two control voltage amplitudes, one for zero phase retardance and one for π phase retardance the complete system can be controlled with only four bits. The input light is provided through a GRIN collimating lens terminated singlemode optical fibre, whereas the light exiting the last BC is coupled in 1 out of 9 possible output fibres located in a two-dimensional PMMA (PolyMethyl MethAcrylate) fibre array holder fabricated with deep proton lithography. This technique allows to position the fibres with a ± 2 pm accuracy. The compact system construction is depicted in figure 1. The maximum frequency at which the LCVRs can be driven and hence, at which switching between two fibres is possible, is on the order of 30 Hz. Using a Nippon Sheet Glass Planar Microlens (DI-PML®) array to couple light exiting the last BC in the optical fibres located in the PMMA array holder, we obtain the losses and cross-talk ratios given in table 1.
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Kubacki, Frank, Dirk Hauschild, Mikhail Ivanenko, Jens Meinschien, Andreas Bayer, and Vitalij Lissotschenko. "Dynamic Thermal Thin Film Processing of Large Areas With High Power Laser Sources." In ASME 2009 International Manufacturing Science and Engineering Conference. ASMEDC, 2009. http://dx.doi.org/10.1115/msec2009-84105.
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High power laser sources are used in various production tools for cutting, welding and hardening of metal parts and patterning, annealing and lithography of flat panel displays, solar cells and microelectronic devices. Beside the right choice of the laser source suitable high performance optical beam delivery and shaping systems are needed for generating the appropriate beam profile and intensity distribution are of high importance for the right processing speed, quality and yield. In addition to the typical laser processes with circular beam shapes LIMO has developed laser sources with line shaped beams for large area processing for e.g. crystallization and tempering of conducting and semi-conducting films on glass for FPD, PV and thermal processing of semiconductor wafer, coated float glass and sheet metal. Due to the high power density of several 100kW/cm2 and line length up to several hundred millimetres a treatment capacity of several m2 per minute and processing speeds up to 1 m/s can be achieved per laser head with typical scan & repeat processes. The use of multiple laser heads in one machine scales the productivity to the individual needs. The high scanning speed together with line widths of 0,01mm to 0,1mm is the basis for heating only a few microns of the surfaces layers and no costly cooling time is needed like with regular heating technologies. With this controlled surface heating even more sensitive materials can be processes like inks on polymers and paper for RFIDs, printed solar absorbers and coatings. For industrial applications equally important is an adequate understanding of the physics of the light-matter interaction behind the process. In advance simulations of the tool performance can minimize technical and financial risk as well as lead times for prototyping and introduction into series production. Based on this knowledge together with a unique free-form micro-lens array production technology and patented micro-optics beam shaping designs a number of novel production tool sub-systems have been built by LIMO: 1. a multi-kilowatt direct diode illumination modules for solar cell annealing, and crystallization; 2. a novel green laser beam line for the annealing of silicon thin films on glass; 3. a novel wavefront shaping optics that generates a top hat beam profile from a TEM00 high-power laser source for accurate thin film structuring. For each of these sub-system basic functionalities, design principles and performance results are presented with a special emphasis on resilience, cost reduction and process reliability.