Academic literature on the topic 'Lifted-off films'

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the lists of relevant articles, books, theses, conference reports, and other scholarly sources on the topic 'Lifted-off films.'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Journal articles on the topic "Lifted-off films"

1

Fan, J. C., C. P. Lee, C. M. Tsai, S. Y. Wang, and J. S. Tsang. "Optical and structural properties of epitaxially lifted-off GaAs films." Journal of Applied Physics 83, no. 1 (January 1998): 466–68. http://dx.doi.org/10.1063/1.366662.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Jiang, De-Sheng, Xue-Ping Li, Bao-Quan Sun, and He-Xiang Han. "A Raman scattering study of GaAs : As films lifted off GaAs substrate." Journal of Physics D: Applied Physics 32, no. 6 (January 1, 1999): 629–31. http://dx.doi.org/10.1088/0022-3727/32/6/005.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Mateo, Cherry May N., Alipio T. Garcia, Flo Rykiel M. Ramos, Kristine I. Manibog, and Arnel A. Salvador. "Strain-induced splitting of the valence band in epitaxially lifted-off GaAs films." Journal of Applied Physics 101, no. 7 (April 2007): 073519. http://dx.doi.org/10.1063/1.2716869.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Slaughter, Liane S., Kevin M. Cheung, Sami Kaappa, Huan H. Cao, Qing Yang, Thomas D. Young, Andrew C. Serino, et al. "Patterning of supported gold monolayers via chemical lift-off lithography." Beilstein Journal of Nanotechnology 8 (December 8, 2017): 2648–61. http://dx.doi.org/10.3762/bjnano.8.265.

Full text
Abstract:
The supported monolayer of Au that accompanies alkanethiolate molecules removed by polymer stamps during chemical lift-off lithography is a scarcely studied hybrid material. We show that these Au–alkanethiolate layers on poly(dimethylsiloxane) (PDMS) are transparent, functional, hybrid interfaces that can be patterned over nanometer, micrometer, and millimeter length scales. Unlike other ultrathin Au films and nanoparticles, lifted-off Au–alkanethiolate thin films lack a measurable optical signature. We therefore devised fabrication, characterization, and simulation strategies by which to interrogate the nanoscale structure, chemical functionality, stoichiometry, and spectral signature of the supported Au–thiolate layers. The patterning of these layers laterally encodes their functionality, as demonstrated by a fluorescence-based approach that relies on dye-labeled complementary DNA hybridization. Supported thin Au films can be patterned via features on PDMS stamps (controlled contact), using patterned Au substrates prior to lift-off (e.g., selective wet etching), or by patterning alkanethiols on Au substrates to be reactive in selected regions but not others (controlled reactivity). In all cases, the regions containing Au–alkanethiolate layers have a sub-nanometer apparent height, which was found to be consistent with molecular dynamics simulations that predicted the removal of no more than 1.5 Au atoms per thiol, thus presenting a monolayer-like structure.
APA, Harvard, Vancouver, ISO, and other styles
5

Ren, Fang, Bingyao Liu, Zhaolong Chen, Yue Yin, Jingyu Sun, Shuo Zhang, Bei Jiang, et al. "Van der Waals epitaxy of nearly single-crystalline nitride films on amorphous graphene-glass wafer." Science Advances 7, no. 31 (July 2021): eabf5011. http://dx.doi.org/10.1126/sciadv.abf5011.

Full text
Abstract:
Van der Waals epitaxy provides a fertile playground for the monolithic integration of various materials for advanced electronics and optoelectronics. Here, a previously unidentified nanorod-assisted van der Waals epitaxy is developed and nearly single-crystalline GaN films are first grown on amorphous silica glass substrates using a graphene interfacial layer. The epitaxial GaN-based light-emitting diode structures, with a record internal quantum efficiency, can be readily lifted off, becoming large-size flexible devices. Without the effects of the potential field from a single-crystalline substrate, we expect this approach to be equally applicable for high-quality growth of nitrides on arbitrary substrates. Our work provides a revolutionary technology for the growth of high-quality semiconductors, thus enabling the hetero-integration of highly mismatched material systems.
APA, Harvard, Vancouver, ISO, and other styles
6

Kim, Sunjung. "Effect of Residual Stress of Thin and Thick Layers on Laser Lifted-Off Light Emitting Diodes." Journal of The Electrochemical Society 158, no. 9 (2011): H904. http://dx.doi.org/10.1149/1.3610360.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Tay, L., N. L. Rowell, D. Poitras, J. W. Fraser, D. J. Lockwood, and R. Boukherroub. "Bovine serum albumin adsorption on passivated porous silicon layers." Canadian Journal of Chemistry 82, no. 10 (October 1, 2004): 1545–53. http://dx.doi.org/10.1139/v04-129.

Full text
Abstract:
Hydrogen-terminated porous silicon (pSi-H) films were fabricated through electrochemical anodization of crystalline silicon in hydrofluoric-acid-based solutions. The pSi-H surface was chemically functionalized by thermal reaction with undecylenic acid to produce an organic monolayer covalently attached to the silicon surface through Si—C bonds and bearing an acid terminal group. Bovine serum albumin (BSA) was adsorbed onto such surface-modified pSi structures. The resulting surfaces were characterized using scanning electron microscopy (SEM), reflection FT-IR spectroscopy, and ellipsometry. SEM showed that the porous films were damaged and partially lifted off the silicon substrate after a prolonged BSA adsorption. Ellipsometry analysis revealed that the BSA penetrated ∼1.3 µm into the porous structure. The film damage is likely a result of BSA anchoring itself tightly through strong electrostatic interaction with the acid-covered Si sidewalls. A change in surface tension during BSA film formation then causes the pSi layer to buckle and lift off the underlying Si substrate. FT-IR results from the undecylenic-acid-modified pSi surfaces before and after BSA adsorption showed the presence of strong characteristic amide I, II, and III vibrational bands after BSA adsorption. The surface properties of the pSi matrix and its interactions with BSA are examined in this study.Key words: ellipsometry, porous silicon, protein adsorption, surface passivation.
APA, Harvard, Vancouver, ISO, and other styles
8

Chen, You, Zijing Quan, Yuhan Sun, Deqiang Chi, Delei Liu, Liang Zhou, Junqiu Zhang, et al. "Durable and Superhydrophobic Aluminium Alloy with Microscale Hierarchical Structures and Anti-Drag Function Inspired by Diving Bell Spider." Coatings 11, no. 10 (September 22, 2021): 1146. http://dx.doi.org/10.3390/coatings11101146.

Full text
Abstract:
Coating materials with special surface wettability are widely applied in marine paint systems used in the naval industry to reduce the corrosion and viscous drag of seawater. However, traditional coatings are inefficient and limited, either by poor durability or insufficient anti-drag capacity. Here, inspired by the diving bell spider, a bionic superhydrophobic coating with multiscale hierarchical architecture was successfully prepared on the surface of aluminium alloy. It possesses excellent mechanical abrasion durability, chemical durability, and low adhesion. Remarkably, the water contact angles could remain over 150.9° after more than 15 abrasion cycles or strong acid/alkali conditions. In addition, the impacting water droplet lifted off the surface of bionic superhydrophobic aluminium alloy (BSAA) within 13 ms, illustrating an excellent low adhesion property. In fact, when the BSAA is immersed in water, it could absorb bubbles and form a gas membrane. The existence of the gas membrane could prevent water and anaerobic organisms from contacting and even corroding the BSAA. Meanwhile, the gas membrane acts as a lubricant and significantly deceases friction at the solid–liquid interface, reducing the drag for BSAA. The BSAA proposed in this work has broad application prospects, such as medical devices, microfluidic chips, gas separation and collection in water.
APA, Harvard, Vancouver, ISO, and other styles
9

Ramadan, Rehab, Vicente Torres-Costa, and Raúl J. Martín-Palma. "Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon." Coatings 10, no. 6 (May 30, 2020): 529. http://dx.doi.org/10.3390/coatings10060529.

Full text
Abstract:
The luminescent properties of zinc oxide (ZnO) and nanostructured porous silicon (PSi) make these materials very appealing for photoemission applications. The current study reports on the fabrication of a composite of ZnO and nanostructured porous silicon micropatterns (ZnO + PSi micropatterns) onto heavily-doped silicon surfaces. The proposed composite micropattern is devoted to the future development of light-emitting diodes. The fabrication of the ZnO + PSi micropatterns was carried out in a two–step process. (1) A regular hexagonal micropattern of a photoresist/ZnO stack was fabricated by UV lithography on crystalline silicon substrates. (2) Before being lifted off the photoresist, nanostructured PSi micropatterns were fabricated by electrochemically etching the exposed areas of the silicon substrate. Subsequently, wet etching of the photoresist was carried out for the final development of the composite ZnO and PSi micropatterns. Further, thin films of ZnO and nanostructured PSi layers were characterized. In particular, their photoluminescent properties were analyzed, as well as their morphology and composition. The experimental PL results show that the ZnO layers have emission broadbands centered at (2.63 eV, blue), while the PSi layers show a band centered at (1.71 eV, red). Further, the emission peaks from the PSi layers can be tuned by changing their fabrication conditions. It was observed that the properties of the ZnO thin films are not influenced by either the surface morphology of PSi or by its PL emissions. Therefore, the PL properties of the composite ZnO + PSi micropatterns are equivalent to those featuring the addition of PSi layers and ZnO thin films. Accordingly, broadband optical emissions are expected to arise from a combination between the ZnO layer (blue band) and PSi (red band). Furthermore, the electrical losses associated with the PSi areas can be greatly reduced since ZnO is in contact with the Si surface. As a result, the proposed composite micropatterns might be attractive for many solid-state lighting applications, such as light-emitting diodes.
APA, Harvard, Vancouver, ISO, and other styles
10

Wu, Junwen, Wenfeng Jia, and Chenggang Xian. "Foaming Agent Developed for Gas Wells with Liquid Loading Problem Using New Surfactant and Nanotechnology." SPE Journal 25, no. 06 (July 13, 2020): 3138–44. http://dx.doi.org/10.2118/201249-pa.

Full text
Abstract:
Summary Liquid buildup in the wellbore is one of the major causes of production decline in gas wells, in which case additional energy is needed to drain off the liquid to solve this problem. Foaming agents offer a method to reduce the liquid density to make it easier to be lifted with the gas flow, unloading the accumulated liquid in gas wells. The main ingredient of foaming agents are surfactants. Foam stability is influenced by several factors, such as salinity, temperature, and pressure, so a foaming stabilizer is usually needed for a foam system. A foaming agent should be developed to form stable foams in the presence of a salt or sweet-water hydrocarbon phase at a given temperature and pressure. Recently, various kinds of foaming agents have been developed and discussed. Previous studies mainly focused on the complex interaction between an anionic surfactant and amphoteric ion surfactant; however, stability of the foam system formed by these foaming agents needs to be further improved (Nikolai et al. 2009). Therefore, development of a novel foaming agent with improved stability is necessary, especially for the application under downhole conditions. The complex interaction between the anionic and cationic surfactants is neglected in previous research. For example, the synergies between the anionic and cationic surfactants with appropriate methods can greatly improve the foam stability compared with the one-component system. A complex phase behavior and microstructure that has a high surface activity and foam stability can be obtained by the strong electrostatic interaction between the opposite charge ionic head groups and the hydrophobic interaction between the hydrocarbon groups. A gemini surfactant with a spacer can make the molecules pack tighter and increase the surfactant cohesion within the monolayer, which can greatly enhance the foam stability. The liquid film of foam formed by the surfactant is dynamically unstable because the liquid film cannot prevent the diffusion of gas, and the foam will burst quickly. However, solid films with particles adsorbed in the gas/water interface can weaken the foam drainage speed, so that the foam stability is greatly enhanced. In summary, a robust foaming agent is developed with the introduction of an anionic-nonionic surfactant complexed with a gemini cationic surfactant; moreover, nanoparticles with a certain hydrophilicity and size are also adopted as stabilizers.
APA, Harvard, Vancouver, ISO, and other styles

Book chapters on the topic "Lifted-off films"

1

"2. Adhesion of the plasma-polymerized fluorocarbon films to silicon substrates The adhesion properties of the plasma-polymerized FC coatings were determined by using a test, already employed by Yasuda and Sharma [13] (see Fig. 1 and Table 1) in which the silicon substrates coated with plasma FC-films were boiled in a0.9% sodium chloride solution. The FC thin films produced in the processes 1 and 2 were lifted after a very short time (15 minutes). Coatings generated in process 3 were lifted after the second cycle of boiling. The films produced in processes 4 and 5 withstood the complete test procedure. The results are shown in Fig. 3. The poor adhesion of the polymerized films in the first two processes is due to the fact that these processes do not involve a plasma pre-treatment process. The difference between processes 1 and 3 is only in the plasma pre-treatment (process 1 does not contain the pre-treatment step of the silicon surface). The fluorocarbon films deposited by processes 4 and 5 have shown the best adhesion. These test results indicate that the plasma pre-treatment is very important and necessary for a good adhesion of the FC coatings to the silicon surfaces. 2.3. Patterning of FC films 2.3.1. Patterning through resist mask. The patterning of the FC films through a photoresist mask (conventional All resist AR-P351) was examined after deposition for process No. 5. Different coating parameters were investigated to improve the adhesion of the resist to the FC surface. The best adhesion results were obtained using the process parameters, shown in Table 3. Differences in the thickness uniformity of so-deposited resists were in a range below 5%. The samples were etched in a pure oxygen plasma in an RIE-system after the lithography steps (pre-bake, exposure, development, post-bake). A resolution of 2 /xm was obtained. A significant increase in the surface energy was not observed after resist stripping. The sessile contact angle of water was 103°. 2.3.2. Lift-off process for patterning thin plasma polymerized FC films. A lift-off process was also examined to pattern the thin FC films. The lithography steps were used before the plasma polymerization process was carried out (Fig. 2). A standard resist AR-P351 was coated directly onto the Si substrates. After all lithography." In Adhesion Aspects of Thin Films, Volume 1, 275–78. CRC Press, 2014. http://dx.doi.org/10.1201/b11971-44.

Full text
APA, Harvard, Vancouver, ISO, and other styles

Conference papers on the topic "Lifted-off films"

1

Miyashita, Naoya, Nazmul Ahsan, Yoshitaka Okada, Rao Tatavarti, Andree Wibowo, and Noren Pan. "Epitaxial Lifted-Off Thin Film GaInP/GaAs/GaInNAsSb Lattice-Matched Triple Junction Solar Cells." In 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC). IEEE, 2019. http://dx.doi.org/10.1109/pvsc40753.2019.8980787.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Mayhew, James E., James W. Baughn, and Aaron R. Byerley. "The Effect of Freestream Turbulence on Film Cooling Adiabatic Effectiveness." In ASME Turbo Expo 2002: Power for Land, Sea, and Air. ASMEDC, 2002. http://dx.doi.org/10.1115/gt2002-30172.

Full text
Abstract:
The film-cooling performance of a flat plate in the presence of low and high freestream turbulence is investigated using liquid crystal thermography. High-resolution distributions of the adiabatic effectiveness are determined over the film-cooled surface of the flat plate using the hue method and image processing. Three blowing rates are investigated for a model with three straight holes spaced three diameters apart, with density ratio near unity. High freestream turbulence is shown to increase the area-averaged effectiveness at high blowing rates, but decrease it at low blowing rates. At low blowing ratio, freestream turbulence clearly reduces the coverage area of the cooling air due to increased mixing with the main flow. However, at high blowing ratio, when much of the jet has lifted off in the low turbulence case, high freestream turbulence turns its increased mixing into an asset, entraining some of the coolant that penetrates into the main flow and mixing it with the air near the surface.
APA, Harvard, Vancouver, ISO, and other styles
3

Rowell, David R., Joshua D. Wood, Christopher L. Stender, Ray Chan, Andree Wibowo, Mark Osowski, and Noren Pan. "Screen Printed Silver Contacts on III-V Bulk Pseudomorphic and Lifted Off Thin Film Foils for High Volume Low Cost Solar Cell Manufacturing." In 2020 IEEE 47th Photovoltaic Specialists Conference (PVSC). IEEE, 2020. http://dx.doi.org/10.1109/pvsc45281.2020.9300645.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Colban, W., A. Gratton, K. A. Thole, and M. Haendler. "Heat Transfer and Film-Cooling Measurements on a Stator Vane With Fan-Shaped Cooling Holes." In ASME Turbo Expo 2005: Power for Land, Sea, and Air. ASMEDC, 2005. http://dx.doi.org/10.1115/gt2005-68258.

Full text
Abstract:
In a typical gas turbine engine, the gas exiting the combustor is significantly hotter than the melting temperature of the turbine components. The highest temperatures in an engine are typically seen by the turbine inlet guide vanes. One method used to cool the inlet guide vanes is film-cooling, which involves bleeding comparatively low-temperature, high-pressure air from the compressor and injecting it through an array of discrete holes on the vane surface. To predict the vane surface temperatures in the engine, it is necessary to measure the heat transfer coefficient and adiabatic film-cooling effectiveness on the vane surface. This study presents heat transfer coefficients and adiabatic effectiveness levels measured in a scaled-up, two-passage cascade with a contoured endwall. Heat transfer measurements indicated that the behavior of the boundary layer transition along the suction side of the vane showed sensitivity to the location of film-cooling injection, which was simulated through the use of a trip wire placed on the vane surface. Single row adiabatic effectiveness measurements without any upstream blowing showed jet lift-off was prevalent along the suction side of the airfoil. Single row adiabatic effectiveness measurements on the pressure side, also without upstream showerhead blowing, indicated jet lifted-off and then reattached to the surface in the concave region of the vane. In the presence of upstream showerhead blowing, the jet lift-off for the first pressure side row was reduced, increasing adiabatic effectiveness levels.
APA, Harvard, Vancouver, ISO, and other styles
5

Thurman, Douglas R., Lamyaa A. El-Gabry, Philip E. Poinsatte, and James D. Heidmann. "Turbulence and Heat Transfer Measurements in an Inclined Large Scale Film Cooling Array: Part II—Temperature and Heat Transfer Measurements." In ASME 2011 Turbo Expo: Turbine Technical Conference and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/gt2011-46498.

Full text
Abstract:
The second of a two-part paper, this study focuses on the temperature field and surface heat transfer measurements on a large-scale models of an inclined row of film cooling holes. Detailed surface and flow field measurements were taken and presented in Part I. The model consists of three holes of 1.9-cm diameter that are spaced 3 hole diameters apart and inclined 30° from the surface. Additionally, another model with an anti-vortex adaptation to the film cooling holes is also tested. The coolant stream is metered and cooled to 20°C below the mainstream temperature. A thermocouple is used to obtain the flow temperatures along the jet centerline and at various streamwise locations. Steady state liquid crystal thermography is used to obtain surface heat transfer coefficients. Results are obtained for blowing ratios of up to 2 in order to capture off-design conditions in which the jet is lifted. Film cooling effectiveness values of 0.4 and 0.15 were found along the centerline for blowing ratios of 1 and 2 respectively. In addition, an anti-vortex design was tested and found to have improved film effectiveness. This paper presents the detailed temperature contours showing the extent of mixing between the coolant and freestream and the local heat transfer results.
APA, Harvard, Vancouver, ISO, and other styles
6

Mayhew, James E., James W. Baughn, and Aaron R. Byerley. "The Effect of Freestream Turbulence on Film Cooling Heat Transfer Coefficient and Adiabatic Effectiveness Using Compound Angle Holes." In ASME Turbo Expo 2004: Power for Land, Sea, and Air. ASMEDC, 2004. http://dx.doi.org/10.1115/gt2004-53230.

Full text
Abstract:
The film-cooling performance of a flat plate in the presence of low and high freestream turbulence is investigated using thermochromic liquid crystal thermography. Distributions of the convective heat transfer coefficient and adiabatic effectiveness are determined over the film-cooled surface of the flat plate. Three blowing rates are investigated for a model with one hole oriented at a compound angle of 45° and with an injection angle of 30° from the flat plate surface. An increase in heat transfer coefficient due to mass injection is clearly observed in the images and is quantitatively determined for both the low and high freestream turbulence cases. The increase in heat transfer coefficient is greater than in previously published research, possibly due to the use of different, more representative thermal boundary conditions upstream of the injection location. At low blowing ratio, freestream turbulence is shown to reduce the adiabatic effectiveness due to increased mixing between the cooling air and the main flow. However, at high blowing ratio, when much of the jet has lifted off in the low turbulence case, high freestream turbulence turns its increased mixing into an asset, entraining some of the coolant that penetrates into the main flow and mixing it with the air near the surface. This paper also contributes high-resolution contour plots that show the wider spreading of cooling air over the film-cooled surface as a result of high turbulence, and the asymmetric regions of high heat transfer.
APA, Harvard, Vancouver, ISO, and other styles
7

Ragab, Reda, and Ting Wang. "An Experimental Study of Mist Film Cooling With Fan-Shaped Holes on an Extended Flat Plate: Part 1 — Heat Transfer." In ASME Turbo Expo 2014: Turbine Technical Conference and Exposition. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/gt2014-26169.

Full text
Abstract:
Motivated by the need to further improve film cooling in terms of both cooling effectiveness and coolant coverage area, the mist/air film cooling scheme is investigated through experiments using fan-shaped holes over an extended downstream length in this study. Both an existing wind tunnel and test facility, used in previous work, have been retrofitted. The first modification was extending the length of the flat plate test section to cover longer distances downstream of the injection holes, up to X/D = 100, in order to investigate whether mist cooling can be harnessed farther downstream where single-phase film cooling is not effective. The second modification was to incorporate a fan-shaped diffusion hole geometry in order to investigate whether mist can further enhance the film cooling performance of the already highly effective fan-shaped holes. A Phase Doppler Particle Analyzer (PDPA) system is employed to measure droplet size, velocity, and turbulence information. An infrared camera and thermocouples are both used for temperature measurements. Part 1 is focused on the heat transfer result on the wall, and Part 2 is focused on the two-phase droplet multiphase flow behavior. Three blowing ratios are investigated. The results show that, at low blowing ratios when the film is attached to the surface, the enhancement of the mist film cooling effectiveness, compared to the air-only case, on the centerline of the hole ranges from 40% in the near hole region to over 170% at X/D = 100. Due to the diffusive nature of the fan-shaped hole, the laterally-averaged enhancement is on par with that on the centerline. The significant enhancement over the extended downstream distance from X/D = 40–100 is attributed to the evaporation time needed to evaporate all of the droplets. Each droplet acts as a cooling sink and flies over a distance before it completely vaporizes. This “distributed cooling” characteristic allows controlled cooling by manipulating the size distribution of the water droplets to extend the cooling effects of the droplets farther downstream from the injection location. At higher blowing ratios, when the cooling film is lifted off from the surface, the cooling enhancement drops below 40%. Although the enhancement in the near hole region X/D < 40 is about 20% lower than that achieved by using the cylindrical holes, the magnitudes of the mist adiabatic film cooling effectiveness using fan-shaped holes are still much higher than those of the cylindrical holes.
APA, Harvard, Vancouver, ISO, and other styles
8

Barbieri, Thomas J., James Wang, Mike Kottke, David Theodore, and Richard Wetz. "Vanishing TiN ARC Coating as an Indicator of EOS in Aluminum Top Metal Lines." In ISTFA 2006. ASM International, 2006. http://dx.doi.org/10.31399/asm.cp.istfa2006p0461.

Full text
Abstract:
Abstract Multiple parts failed during a 96 hour HAST (highly accelerated stress test) run. Electrical failure occurred on several pins stressed at 48V during the run. Visual inspection identified possible corrosion damage occurring on a top layer aluminum metal line linked to the failed pins. Additionally, significant lengths of this line and metallization at six other sites appeared white and reflective when viewed through an optical microscope. The device technology utilized a TiN ARC. Aluminum metal with a TiN ARC has a dull, amber color when viewed through an optical light microscope, as opposed to bare aluminum, which appears white and shiny. The initial assumption was that the passivation had lifted off during mold compound removal, along with the top TiN ARC layer at these seven locations. SEM inspection found that final passivation film was still intact over these shiny Al lines, but it was cracked extensively. Neighboring Al lines did not show cracked passivation. A hypothesis was generated that suggested that the TiN ARC was not removed, but rather was altered in some way so as to change its optical appearance. The change in the TiN was believed to be due to a combination of factors that resulted from electrical overstressing of the lines during HAST. A series of experiments utilizing FIB cross-sections, Auger mapping, Auger depth profiling, TEM inspection and EDS were used to show that the TiN ARC layer was still present on the affected lines but had been oxidized. The conclusions drawn from this investigation can be used to rapidly determine the root cause of failure through signature analysis. Shiny Al metal lines are easy to see with optical microscopes and are therefore a useful failure analysis tool to identify electrically and mechanically overstressed lines and circuits.
APA, Harvard, Vancouver, ISO, and other styles
We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!

To the bibliography