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Journal articles on the topic 'Heavy Ion Elastic Recoil Detection Analysis'

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Published: 4 June 2021

Last updated: 12 February 2022

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1

Davies, J. A., J. S. Forster, and S. R. Walker. "Elastic recoil detection analysis with heavy ion beams." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 136-138 (March 1998): 594–602. http://dx.doi.org/10.1016/s0168-583x(97)00872-0.

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2

Siegele, R., I. Orlic, and David D. Cohen. "Elastic recoil detection analysis on the ANSTO heavy ion microprobe." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 190, no. 1-4 (May 2002): 301–5. http://dx.doi.org/10.1016/s0168-583x(01)01230-7.

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3

Arstila, K., J. Julin, M. I. Laitinen, J. Aalto, T. Konu, S. Kärkkäinen, S. Rahkonen, et al. "Potku – New analysis software for heavy ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 331 (July 2014): 34–41. http://dx.doi.org/10.1016/j.nimb.2014.02.016.

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4

Weijers, T. D. M., R. G. Elliman, and H. Timmers. "Heavy ion elastic recoil detection analysis of silicon-rich silica films." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 219-220 (June 2004): 680–85. http://dx.doi.org/10.1016/j.nimb.2004.01.142.

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5

Walker, S. R., P. N. Johnston, I. F. Bubb, W. B. Stannard, D. N. Jamieson, S. P. Dooley, D. D. Cohen, N. Dytlewski, and J. W. Martin. "Damage in semiconductor materials during heavy-ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 113, no. 1-4 (June 1996): 312–16. http://dx.doi.org/10.1016/0168-583x(95)01398-9.

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6

Walker, S. R., P. N. Johnston, I. F. Bubb, W. B. Stannard, Z. Jin, D. N. Jamieson, S. P. Dooley, D. D. Cohen, and N. Dytlewski. "Ion beam induced damage in InP during heavy-ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 130, no. 1-4 (July 1997): 166–70. http://dx.doi.org/10.1016/s0168-583x(97)00167-5.

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7

Dunselman, C. P. M., W. M. Arnold Bik, F. H. P. M. Habraken, and W. F. van der Weg. "Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection." MRS Bulletin 12, no. 6 (September 1987): 35–39. http://dx.doi.org/10.1557/s0883769400067208.

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AbstractThe fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.

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8

Walker, S. R., J. A. Davies, J. S. Forster, S. G. Wallace, and A. C. Kockelkoren. "Radiation damage during heavy ion elastic recoil detection analysis of insulating materials." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 136-138 (March 1998): 707–12. http://dx.doi.org/10.1016/s0168-583x(97)00886-0.

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9

Franich, R. D., P. N. Johnston, and I. F. Bubb. "Efficient Monte Carlo simulation of heavy ion elastic recoil detection analysis spectra." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 219-220 (June 2004): 87–94. http://dx.doi.org/10.1016/j.nimb.2004.01.033.

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10

Ghosh, S., D. K. Avasthi, A. Tripathi, D. Kabiraj, P. Sugathan, G. K. Chaudhary, and P. Barua. "Heavy ion elastic recoil detection analysis set up for electronic sputtering studies." Radiation Effects and Defects in Solids 161, no. 4 (April 2006): 247–55. http://dx.doi.org/10.1080/10420150600668564.

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11

Elliman, R. G., H. Timmers, G. R. Palmer, and T. R. Ophel. "Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 136-138 (March 1998): 649–53. http://dx.doi.org/10.1016/s0168-583x(97)00879-3.

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12

Weijers, T. D. M., K. Gaff, H. Timmers, T. R. Ophel, and R. G. Elliman. "Heavy-ion elastic-recoil detection analysis of doped-silica films for integrated photonics." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 161-163 (March 2000): 624–28. http://dx.doi.org/10.1016/s0168-583x(99)00850-2.

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13

Johnston, P. N., M. El Bouanani, W. B. Stannard, I. F. Bubb, D. D. Cohen, N. Dytlewski, and R. Siegele. "Complementary scattered and recoiled ion data from ToF-E heavy ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 136-138 (March 1998): 669–73. http://dx.doi.org/10.1016/s0168-583x(97)00779-9.

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14

Martínez, F. L., M. Toledano, E. San Andrés, I. Mártil, G. González-Díaz, W. Bohne, J. Röhrich, and E. Strub. "Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis." Thin Solid Films 515, no. 2 (October 2006): 695–99. http://dx.doi.org/10.1016/j.tsf.2005.12.239.

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15

Johnston, P. N., R. D. Franich, I. F. Bubb, M. El Bouanani, D. D. Cohen, N. Dytlewski, and R. Siegele. "The effects of large angle plural scattering on heavy ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 161-163 (March 2000): 314–17. http://dx.doi.org/10.1016/s0168-583x(99)00977-5.

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16

Franich, R. D., P. N. Johnston, I. F. Bubb, N. Dytlewski, and D. D. Cohen. "Efficiency enhancements to Monte Carlo simulation of heavy ion elastic recoil detection analysis spectra." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 190, no. 1-4 (May 2002): 252–55. http://dx.doi.org/10.1016/s0168-583x(01)01176-4.

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17

Nuru, Z. Y., M. Msimanga, C. J. Arendse, and M. Maaza. "Heavy ion elastic recoil detection analysis of AlxOy/Pt/AlxOy multilayer selective solar absorber." Applied Surface Science 298 (April 2014): 176–81. http://dx.doi.org/10.1016/j.apsusc.2014.01.156.

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18

Hong, Wan, Shinjiro Hayakawa, Kuniko Maeda, Shigekazu Fukuda, and Yohichi Gohshi. "Light element analysis in steel by high–energy heavy–ion time of flight elastic recoil detection analysis." Spectrochimica Acta Part B: Atomic Spectroscopy 54, no. 1 (January 1999): 151–57. http://dx.doi.org/10.1016/s0584-8547(98)00204-3.

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19

Johnston, PN, M. El Bouanani, WB Stannard, IF Bubb, DD Cohen, N. Dytlewski, and R. Siegele. "Si detector pulse height shift and multiple scattering problems in heavy ion elastic recoil detection analysis." Vacuum 48, no. 12 (December 1997): 1017–21. http://dx.doi.org/10.1016/s0042-207x(97)00115-2.

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20

Loussouarn, T., L. Beck, P. Trocellier, D. Brimbal, F. Leprêtre, E. Bordas, S. Vaubaillon, Y. Serruys, and H. Lefaix-Jeuland. "Implementation of heavy-ion elastic recoil detection analysis at JANNUS-Saclay for quantitative helium depth profiling." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 360 (October 2015): 9–15. http://dx.doi.org/10.1016/j.nimb.2015.07.040.

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21

Kramer, Edward J. "Ion-Beam Analysis of Polymer Surfaces and Interfaces." MRS Bulletin 21, no. 1 (January 1996): 37–42. http://dx.doi.org/10.1557/s0883769400035144.

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Ion-beam analysis of chemical composition as a function of depth is by now well-established for inorganic materials and is an important method of investigating growth of thin films. It has been applied to polymers much more recently, perhaps because fairly obvious problems with radiation damage discouraged workers in this field initially. Ion-beam analysis has developed, however, into a analytical tool that complements other methods, such as x-ray photoelectron spectroscopy and neutron reflection, very well. The purpose of this short article is to give the reader an introduction to its current uses in polymers.The ion beams of ion-beam analysis are typically highly energetic (1–5 MeV) beams of 4He++. While other beams are used, for example, 3He and 15N, alpha particle beams are used in the vast majority of experiments reported in the literature. Two major categories of experiments are carried out with such beams. Rutherford backscattering (RBS) spectrometry to detect heavy elements in the polymer and forward recoil spectrometry (FRES) (also known as elastic recoil detection) to detect the isotopes hydrogen and deuterium. The basic principles for each method are similar.

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22

Timmers, H., R. G. Elliman, G. R. Palmer, T. R. Ophel, and D. J. O'Connor. "The development of a facility for heavy-ion elastic recoil detection analysis at the Australian National University." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 136-138 (March 1998): 611–15. http://dx.doi.org/10.1016/s0168-583x(97)00811-2.

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23

Giangrandi, S., B. Brijs, T. Sajavaara, H. Bender, F. Iacopi, A. Vantomme, and W. Vandervorst. "Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 249, no. 1-2 (August 2006): 189–92. http://dx.doi.org/10.1016/j.nimb.2006.03.111.

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24

Lindner, S., W. Bohne, A. Jäger-Waldau, M. Ch Lux-Steiner, J. Röhrich, and G. Vogl. "Investigations of atomic diffusion at CIGSSe/ZnSe interfaces with heavy ion elastic recoil detection analysis (HI-ERDA)." Thin Solid Films 403-404 (February 2002): 432–37. http://dx.doi.org/10.1016/s0040-6090(01)01540-1.

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25

Eschbaumer, S., A. Bergmaier, D. Seiler, and G. Dollinger. "Time of flight assistedΔE-Emethod for enhanced isotope separation capabilities in heavy ion elastic recoil detection analysis." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 406 (September 2017): 10–14. http://dx.doi.org/10.1016/j.nimb.2017.02.056.

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26

Borrmann, Thomas, Andrew James McFarlane, James Howard Johnston, Andreas Markwitz, and Nikolai Dytlewski. "Heavy-ion elastic recoil detection analysis as a useful tool for tracking experimental modifications in bulk calcium silicates." Surface and Interface Analysis 37, no. 8 (2005): 695–98. http://dx.doi.org/10.1002/sia.2066.

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27

Karlušić, Marko, Sigrid Bernstorff, Zdravko Siketić, Branko Šantić, Ivančica Bogdanović-Radović, Milko Jakšić, Marika Schleberger, and Maja Buljan. "Formation of swift heavy ion tracks on a rutile TiO2 (001) surface." Journal of Applied Crystallography 49, no. 5 (September 23, 2016): 1704–12. http://dx.doi.org/10.1107/s1600576716013704.

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Nanostructuring of surfaces and two-dimensional materials using swift heavy ions offers some unique possibilities owing to the deposition of a large amount of energy localized within a nanoscale volume surrounding the ion trajectory. To fully exploit this feature, the morphology of nanostructures formed after ion impact has to be known in detail. In the present work the response of a rutile TiO2 (001) surface to grazing-incidence swift heavy ion irradiation is investigated. Surface ion tracks with the well known intermittent inner structure were successfully produced using 23 MeV I ions. Samples irradiated with different ion fluences were investigated using atomic force microscopy and grazing-incidence small-angle X-ray scattering. With these two complementary approaches, a detailed description of the swift heavy ion impact sites, i.e. the ion tracks on the surface, can be obtained even for the case of multiple ion track overlap. In addition to the structural investigation of surface ion tracks, the change in stoichiometry of the rutile TiO2 (001) surface during swift heavy ion irradiation was monitored using in situ time-of-flight elastic recoil detection analysis, and a preferential loss of oxygen was found.

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28

Ström, Petter, Per Petersson, Marek Rubel, and Göran Possnert. "A combined segmented anode gas ionization chamber and time-of-flight detector for heavy ion elastic recoil detection analysis." Review of Scientific Instruments 87, no. 10 (October 2016): 103303. http://dx.doi.org/10.1063/1.4963709.

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29

Rose-Koga, Estelle F., Kenneth T. Koga, Jean-Luc Devidal, Nobumichi Shimizu, Marion Le Voyer, Celia Dalou, and Max Döbeli. "In-situ measurements of magmatic volatile elements, F, S, and Cl, by electron microprobe, secondary ion mass spectrometry, and heavy ion elastic recoil detection analysis." American Mineralogist 105, no. 5 (May 1, 2020): 616–26. http://dx.doi.org/10.2138/am-2020-7221.

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Abstract Electron probe and ion probe are the two most used instruments for in situ analysis of halogens in geological materials. The comparison of these two methods on widely distributed glass standards (example: MPI-DING glasses, Jochum et al., G-cubed, 2006) provides a basis for establishing laboratory method, independent geochemical data sets for these elements. We report analyses of F, S, and Cl concentrations in three geological glass samples (EPMA) and 10 referenced standards (EPMA and SIMS). Furthermore, F and Cl absolute abundances have been determined independently for three of the standards (KL2-G, ATHO-G, and KE12), via heavy ion elastic recoil detection analysis (HIERDA), to certify the accuracy of the cross-calibration EPMA-SIMS. The detection limits for EPMA are a 150 μg·g-1 for F, 20 μg·g-1 for S and Cl, and for SIMS < 48 μg·g-1 for F, < 3 μg·g-1 for S, and <19 μg·g-1 for Cl. On SiO2-rich glass-standards, F and Cl measurements by HIERDA highlight a weak matrix effect during SIMS analysis of F and Cl. With the HIERDA independently measured value, we therefore propose an alternative calibration function to empirically correct this matrix effect on the SIMS measurements of F, S, and Cl.

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30

Gujrathi, S. C., P. Aubry, L. Lemay, and J. P. Martin. "Nondestructive surface analysis by nuclear scattering techniques." Canadian Journal of Physics 65, no. 8 (August 1, 1987): 950–55. http://dx.doi.org/10.1139/p87-149.

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An elastic-recoil detection (ERD) technique is developed and successfully applied in the simultaneous, nondestructive multielement depth-profile studies of thin films with thicknesses up to 2 μm, used in various material technologies. In this technique, the light elements are knocked out of the target by using an energetic heavy-ion beam obtained from the Tandom Accelerator Facility of the Nuclear Physics Laboratory. A time-of-flight method is used to separate the masses and the energies of the recoiled elements as well as the Rutherford backscattering incident ions. Using 30 MeV35Cl as the beam probe, we get an observed surface resolution of better than 100 Å at a 30° detection angle. Typical mass resolutions for energies >5 MeV are 0.2 amu in the C region and 0.7 amu in the Si region. The factors related to the mass and depth resolutions, probing depth, and approximate detection limit are systematically studied using 19F, 35Cl, and 79Br as incident beams. This newly developed ERD method, along with the already existing Rutherford backscattering (RBS) technique, makes the Nuclear Scattering Facility at the Université de Montréal unique for surface analysis.

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31

Hong, Wan, Shinjiro Hayakawa, Kuniko Maeda, Shigekazu Fukuda, Minoru Yanokura, Michi Aratani, Kazuie Kimura, Yohichi Gohshi, and Isao Tanihata. "Determination of the Mass Resolution and the Depth Resolution of Time of Flight Elastic Recoil Detection Analysis Using Heavy Ion Beams." Japanese Journal of Applied Physics 36, Part 1, No. 9A (September 15, 1997): 5737–40. http://dx.doi.org/10.1143/jjap.36.5737.

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32

Grigull, S., R. Behrisch, U. Kreissig, and M. Harz. "Simultaneous analysis of low-Z impurities in the near-surface region of solid materials by heavy ion elastic recoil detection (HIERD)." Fresenius' Journal of Analytical Chemistry 353, no. 5-8 (1995): 578–81. http://dx.doi.org/10.1007/bf00321327.

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33

Brijs, B., T. Sajavaara, S. Giangrandi, T. Janssens, T. Conard, K. Arstila, K. Nakajima, et al. "The analysis of a thin SiO2/Si3N4/SiO2 stack: A comparative study of low-energy heavy ion elastic recoil detection, high-resolution Rutherford backscattering and secondary ion mass spectrometry." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 249, no. 1-2 (August 2006): 847–50. http://dx.doi.org/10.1016/j.nimb.2006.03.191.

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34

Ström, Petter, Per Petersson, Marek Rubel, and Göran Possnert. "Erratum: “A combined segmented anode gas ionization chamber and time-of-flight detector for heavy ion elastic recoil detection analysis” [Rev. Sci. Instrum. 87, 103303 (2016)]." Review of Scientific Instruments 89, no. 4 (April 2018): 049901. http://dx.doi.org/10.1063/1.5030502.

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35

Grötzschel, R., U. Kreissig, and Ch Neelmeijer. "Appied Nuclear Physics-Advanced Ion Beam Materials Analysis at small Accelerators." HNPS Proceedings 13 (February 20, 2020): 43. http://dx.doi.org/10.12681/hnps.2956.

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The ossendorf Ion Beam Laboratory has been developed to an international large scale user facility in the field of ion beam physics and ion beam materials research. The laboratory operates a large number of modern experimental equipment at three MeV accelerators, three implanters, an ECR source and a FIB which together pro- vide almost all ions species in a wide energy range from a few hundred eV to a few ten MeV. Also IBAD and PHI devices were installed for various purposes. The re- search stations at the accelerators are supplemented by complementary techniques like TEM, SEM, AUGER, AFM etc., all contributing useful information to thin film investigations. In this paper a short overview of the laboratory is given and a few recent experiments and their results are shown. Rutherford Backscattering Spec- trometry ( RBS) and Elastic Recoil Detection Analysis (ERDA) are well established techniques for quantitative thin film. The advantage of these methods consists in the simple physics they are basing on, namely the stopping of energetic ions in matter and the binary scattering of at the Coulomb potential of atomic nuclei. The increasing importance of ultra-thin layers for novel technologies demands quantita- tive analysis techniques with a depth resolution of atomic monolayers, which can be obtained for RBS and ERDA by magnetic spectrometers only. The magnetic spec- trometers we have installed at the 3 MV Tandetron and at the 5 MV tandem are described , recent applications are shown and a few problems to achieve high depth resolution will be discussed. Heavy ion detectors as Bragg IC, dE-Erest-telescopes and ToF spectrometers, developed for nuclear physics experiments, are now applied for ERDA, providing an efficient analysis of thin films containing light elements. The lateral position resolution of such detectors enables kinematic corrections and allows large solid angles. Thus by ERDA in situ studies during surface modification processes are possible like in the case of the nitridation of aluminum and stainless steel. At the external beam mainly objects of fine arts or of historical value are analysed. It will be shown, how the complementary application of PIXE, RBS and PIGE can help to detect the beginning corrosion of mediaeval glass objects.

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36

Assmann, W., H. Huber, Ch Steinhausen, M. Dobler, H. Glückler, and A. Weidinger. "Elastic recoil detection analysis with heavy ions." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 89, no. 1-4 (May 1994): 131–39. http://dx.doi.org/10.1016/0168-583x(94)95159-4.

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37

Dollinger, G., M. Boulouednine, A. Bergmaier, T. Faestermann, and C. M. Frey. "Limits in elastic recoil detection analysis with heavy ions." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 118, no. 1-4 (September 1996): 291–300. http://dx.doi.org/10.1016/0168-583x(95)01469-1.

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38

Ermer, H., O. Pfaff, W. Straub, M. Geoghegan, and R. Brenn. "Deuterium depth profiling in polymers using heavy ion elastic recoil detection." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 134, no. 2 (February 1998): 237–48. http://dx.doi.org/10.1016/s0168-583x(98)00557-6.

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39

Timmers, H., T. R. Ophel, and R. G. Elliman. "Simplifying position-sensitive gas-ionization detectors for heavy ion elastic recoil detection." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 161-163 (March 2000): 19–28. http://dx.doi.org/10.1016/s0168-583x(99)00667-9.

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40

Timmers, H., T. D. M. Weijers, and R. G. Elliman. "Unique capabilities of heavy ion elastic recoil detection with gas ionization detectors." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 190, no. 1-4 (May 2002): 393–96. http://dx.doi.org/10.1016/s0168-583x(01)01281-2.

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41

Zounek, Alex, Jörg Kressler, Eichi Arai, and Takashi Inoue. "Oxygen enrichment on polymer surfaces measured by heavy ion elastic recoil detection." Polymer 34, no. 18 (September 1993): 3948–50. http://dx.doi.org/10.1016/0032-3861(93)90525-f.

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42

Dollinger, G., A. Bergmaier, T. Faestermann, and C. M. Frey. "High resolution depth profile analysis by elastic recoil detection with heavy ions." Analytical and Bioanalytical Chemistry 353, no. 3-4 (October 1, 1995): 311–15. http://dx.doi.org/10.1007/s0021653530311.

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43

Dollinger, G., A. Bergmaier, T. Faestermann, and C. M. Frey. "High resolution depth profile analysis by elastic recoil detection with heavy ions." Fresenius' Journal of Analytical Chemistry 353, no. 3-4 (1995): 311–15. http://dx.doi.org/10.1007/bf00322058.

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44

Benka, O., A. Brandstötter, and E. Steinbauer. "Elastic recoil detection analysis using ion-induced electron emission for particle identification." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85, no. 1-4 (March 1994): 650–54. http://dx.doi.org/10.1016/0168-583x(94)95899-8.

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45

Espeso-Gil, O., G. Garcı́a, F. Agulló-López, A. Climent-Font, T. Sajavaara, M. Domenech, E. Cantelar, and G. Lifante. "Characterization of surface layers in Zn-diffused LiNbO3 waveguides by heavy ion elastic recoil detection." Applied Physics Letters 81, no. 11 (September 9, 2002): 1981–83. http://dx.doi.org/10.1063/1.1506405.

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46

Espeso-Gil, O., T. Sajavaara, G. De La Paliza, G. García, F. Agulló-López, J. M. Cabrera, and A. Climent-Font. "Compositional Characterization of Proton-Exchanged Waveguides in LiNbO 3 by Heavy Ion Elastic Recoil Detection." Ferroelectrics 269, no. 1 (January 1, 2002): 63–68. http://dx.doi.org/10.1080/00150190211170.

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47

OURA, Kenjiro. "Fundamentals and Present Aspects of Ion Beam Technology. IV. Ion Beam Analysis. 7. Elastic recoil detection analysis." RADIOISOTOPES 44, no. 5 (1995): 364–68. http://dx.doi.org/10.3769/radioisotopes.44.364.

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48

Liu, Chao Zhuo. "Analysis of Hydrogen Content in Hydride Film by Elastic Recoil Method." Advanced Materials Research 457-458 (January 2012): 170–73. http://dx.doi.org/10.4028/www.scientific.net/amr.457-458.170.

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The essential principle of elastic recoil detection analysis (ERDA) of hydrogen content in the film and the experimental method were described briefly. The energy spectrum of the recoiled hydrogen atom can be obtained by the elastic collision of incident ion beam with hydrogen atoms in film, and the spectrum can be transferred easily into hydrogen concentration and depth profile. For illustrating the application of ERDA in hydrogen storage research, a beam of helium ion was used to recoil hydrogen in titanium hydride and deuteride film to obtain hydrogen contents and depth profiles. This technique was believed to be powerful in determining hydrogen content in hydride films.

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49

Phu, Vu Duc, Le Hong Khiem, A. P. Kobzev, and M. Kulik. "Analytical Possibilities of Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis Methods." Communications in Physics 26, no. 1 (July 20, 2016): 83. http://dx.doi.org/10.15625/0868-3166/26/1/8287.

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This paper presents the results of an experimental study of three samples containing various elements in the near-surface layers. The depth profiles of all the elements of different atomic masses from hydrogen to silver were investigated by Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The experiments were performed by using the low-energy (about 2 MeV) 4He+ ion beams. The obtained results demonstrate the possibility of the RBS and ERDA methods in the investigation of depth profiles of any mass element with an atomic concentration of about 0.01 at.% and a depth resolution close to 10 nm.

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Mändl, S., J. W. Gerlach, W. Assmann, and B. Rauschenbach. "Thickness of ion implanted layers as determined by elastic recoil detection analysis and spectroscopic ellipsometry." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 206 (May 2003): 668–72. http://dx.doi.org/10.1016/s0168-583x(03)00817-6.

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