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1

Foster, C. P. J. A comparison of electro discharge machining, laser & focused ion beam micromachining technologies. Cambridge: TWI, 1998.

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2

Yao, Nan, ed. Focused Ion Beam Systems. Cambridge: Cambridge University Press, 2007. http://dx.doi.org/10.1017/cbo9780511600302.

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3

Nan, Yao, ed. Focused ion beam systems: Basics and applications. Cambridge: Cambridge University Press, 2007.

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4

Bachmann, Maja D. Manipulating Anisotropic Transport and Superconductivity by Focused Ion Beam Microstructuring. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-51362-7.

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5

Córdoba Castillo, Rosa. Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-02081-5.

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6

Orloff, Jon. High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology. Boston, MA: Springer US, 2003.

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7

1934-, Swanson Lynwood, and Utlaut Mark William 1949-, eds. High resolution focused ion beams: FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology. New York: Kluwer Academic/Plenum Publishers, 2003.

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8

Orloff, Jon. High resolution focused ion beams: FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology. New York, NY: Kluwer Academic/Plenum Publishers, 2003.

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9

Fernandez-Pacheco, Amalio. Studies of Nanoconstrictions, Nanowires and Fe₃O₄ Thin Films: Electrical Conduction and Magnetic Properties. Fabrication by Focused Electron/Ion Beam. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2011.

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10

Japan-U.S. Seminar on Focused Ion Beam Technology and Applications (1987 Osaka, Japan and Mie-ken, Japan). Proceedings of the Japan-U.S. Seminar on Focused Ion Beam Technology and Applications: 15-19 November 1987, Senri Hankyu Hotel, Osaka, and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan. Edited by Harriott Lloyd R, Nihon Gakujutsu Shinkōkai, National Science Foundation (U.S.), and American Vacuum Society. New York: Published for the American Vacuum Society by the American Institute of Physics, 1988.

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11

Yao, Nan. Focused Ion Beam Systems. Cambridge University Press, 2011.

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12

Cox, David C. Introduction to Focused Ion Beam Nanometrology. Morgan & Claypool Publishers, 2015.

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13

Cox, David C. Introduction to Focused Ion Beam Nanometrology. Morgan & Claypool Publishers, 2015.

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14

Cox, David C. Introduction to Focused Ion Beam Nanometrology. Morgan & Claypool Publishers, 2015.

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15

Yao, Nan. Focused Ion Beam Systems: Basics and Applications. Cambridge University Press, 2010.

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16

Yao, Nan. Focused Ion Beam Systems: Basics and Applications. Cambridge University Press, 2011.

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17

Vijgen, Lucas Joseph. Coulomb Interactions in Focused Ion Beam Systems. Delft Univ Pr, 1994.

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18

Finch, Dudley, and Alexander Buxbaum. Focused Ion Beam Instrumentation: Techniques and Applications. Wiley & Sons, Limited, John, 2014.

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19

Finch, Dudley, and Alexander Buxbaum. Focused Ion Beam Instrumentation: Techniques and Applications. Wiley & Sons, Incorporated, John, 2019.

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20

Yao, Nan. Focused Ion Beam Systems: Basics and Applications. Cambridge University Press, 2007.

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21

Keskinbora, Kahraman. Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography. SPIE, 2019. http://dx.doi.org/10.1117/3.2531118.

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22

Castillo, Rosa Córdoba. Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition. Springer, 2013.

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23

Castillo, Rosa Córdoba Córdoba. Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition. Springer, 2016.

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24

Castillo, Rosa Córdoba. Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition. Springer London, Limited, 2013.

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25

Bachmann, Maja D. Manipulating Anisotropic Transport and Superconductivity by Focused Ion Beam Microstructuring. Springer, 2020.

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26

Bachmann, Maja D. Manipulating Anisotropic Transport and Superconductivity by Focused Ion Beam Microstructuring. Springer International Publishing AG, 2021.

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27

Fernandez-Pacheco, Amalio. Studies of Nanoconstrictions, Nanowires and Fe3O4 Thin Films: Electrical Conduction and Magnetic Properties. Fabrication by Focused Electron/Ion Beam. Springer, 2013.

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28

Fernandez-Pacheco, Amalio. Studies of Nanoconstrictions, Nanowires and Fe3O4 Thin Films: Electrical Conduction and Magnetic Properties. Fabrication by Focused Electron/Ion Beam. Springer, 2011.

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29

Fernández-Pacheco Chicón, Amalio. Electrical conduction and magnetic properties of nanoconstrictions and nanowires created by focused electron/ion beam and of Fe3O4 thin films. Prensas Universitarias de Zaragoza, 2009. http://dx.doi.org/10.26754/uz.978-84-92774-52-4.

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30

Proceedings of the Japan-U.S. Seminar on Focused Ion Beam Technology and Applications: 15-19 November 1987, Senri Hankyu Hotel, Osaka, and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan. Published for the American Vacuum Society by the American Institute of Physics, 1988.

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31

The 2006-2011 World Outlook for Pattern-Generating Wafer Processing Equipment Used to Produce Masks and Reticles from Photoresist Coated Substrates Excluding Focused Ion Beam Milling Machines. Icon Group International, Inc., 2005.

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32

Parker, Philip M. The 2007-2012 World Outlook for Pattern-Generating Wafer Processing Equipment Used to Produce Masks and Reticles from Photoresist Coated Substrates Excluding Focused Ion Beam Milling Machines. ICON Group International, Inc., 2006.

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33

Gallop, J., and L. Hao. Superconducting Nanodevices. Edited by A. V. Narlikar. Oxford University Press, 2017. http://dx.doi.org/10.1093/oxfordhb/9780198738169.013.17.

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This article reviews recent progress in superconducting nanodevices, with particular emphasis on fabrication methods developed for superconducting nanowires and nanoscale Josephson junctions based on different barrier materials. It evaluates the future potential of superconducting nanodevices, including nano-superconducting quantum interference devices (nanoSQUIDs), in light of improvements in nanoscale fabrication and manipulation techniques, along with their likely impacts on future quantum technology and measurement. The article first considers efforts to realize devices at the physical scale of 100 nm and below before discussing different types of Josephson junction such as trilayer junctions. It also describes the use of focused ion beam milling and electron beam lithography techniques for junction fabrication at the nanoscale and the improved energy sensitivity detectable with a nanoSQUID. Finally, it looks at a range of applications for nanoSQUIDs, superconducting single photon detectors, and other superconducting nanodevices.
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34

Hong, M. H. Laser applications in nanotechnology. Edited by A. V. Narlikar and Y. Y. Fu. Oxford University Press, 2017. http://dx.doi.org/10.1093/oxfordhb/9780199533060.013.24.

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This article discusses a variety of laser applications in nanotechnology. The laser has proven to be one of many mature and reliable manufacturing tools, with applications in modern industries, from surface cleaning to thin-film deposition. Laser nanoengineering has several advantages over electron-beam and focused ion beam processing. For example, it is a low-cost, high-speed process in air, vacuum or chemical environments and also has the capability to fulfill flexible integration control. This article considers laser nanotechnology in the following areas: pulsed laser ablation for nanomaterials synthesis; laser nanoprocessing to make nanobumps for disk media nanotribology and anneal ultrashort PN junctions; surface nanopatterning with near-field, and light-enhancement effects; and large-area parallel laser nanopatterning by laser interference lithography and laser irradiation through a microlens array. Based on these applications, the article argues that the laser will continue to be one of the highly potential nanoengineering means in next-generation manufacturing.
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