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Journal articles on the topic 'Dual-beam FIB-SEM'

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Author: Grafiati

Published: 25 May 2024

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1

Gu, Lixin, Nian Wang, Xu Tang, and H. G. Changela. "Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials." Scanning 2020 (July 25, 2020): 1–15. http://dx.doi.org/10.1155/2020/8406917.

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Advanced microanalytical techniques such as high-resolution transmission electron microscopy (HRTEM), atom probe tomography (APT), and synchrotron-based scanning transmission X-ray microscopy (STXM) enable one to characterize the structure and chemical and isotopic compositions of natural materials down towards the atomic scale. Dual focused ion beam-scanning electron microscopy (FIB-SEM) is a powerful tool for site-specific sample preparation and subsequent analysis by TEM, APT, and STXM to the highest energy and spatial resolutions. FIB-SEM also works as a stand-alone technique for three-dimensional (3D) tomography. In this review, we will outline the principles and challenges when using FIB-SEM for the advanced characterization of natural materials in the Earth and Planetary Sciences. More specifically, we aim to highlight the state-of-the-art applications of FIB-SEM using examples including (a) traditional FIB ultrathin sample preparation of small particles in the study of space weathering of lunar soil grains, (b) migration of Pb isotopes in zircons by FIB-based APT, (c) coordinated synchrotron-based STXM characterization of extraterrestrial organic material in carbonaceous chondrite, and finally (d) FIB-based 3D tomography of oil shale pores by slice and view methods. Dual beam FIB-SEM is a powerful analytical platform, the scope of which, for technological development and adaptation, is vast and exciting in the field of Earth and Planetary Sciences. For example, dual beam FIB-SEM will be a vital technique for the characterization of fine-grained asteroid and lunar samples returned to the Earth in the near future.

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2

Giannuzzi, Lucille A. "FIB/SEM Dual Beam Instrumentation: Slicing, Dicing, Imaging, and More." Microscopy and Microanalysis 7, S2 (August 2001): 796–97. http://dx.doi.org/10.1017/s1431927600030051.

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In a focused ion beam (FIB) instrument, ions (typically Ga+) obtained from a liquid metal ion source are accelerated down a column at energies up to ∽ 50 keV. The beam of ions is focused by electrostatic and octopole lens systems and the ion dose (and beam diameter) is controlled using real and/or virtual apertures. Beam sizes in FIB instruments on the order of 5-7 nm may be achieved.The versatility of the FIB instrument enables large regions of material (e.g., 500 μm3) to be removed at high beam currents in just a couple of minutes. Lower beam currents (i.e., beam diameters) are usually used to remove smaller amounts of material within the same time frame (e.g., ∽ 5μm3). The introduction of an organometallic gas in close proximity to the target allows for the deposition of metals, SiO2, and other materials, by an ion beam assisted chemical vapor deposition process.

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3

Lee, E., R. Williams, G. B. Viswanathan, R. Banerjee, and H. L. Fraser. "3D Materials Characterization using Dual-Beam FIB/SEM Techniques." Microscopy and Microanalysis 10, S02 (August 2004): 1128–29. http://dx.doi.org/10.1017/s1431927604884204.

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4

SIVEL, V. G. M., J. VAN DEN BRAND, W. R. WANG, H. MOHDADI, F. D. TICHELAAR, P. F. A. ALKEMADE, and H. W. ZANDBERGEN. "Application of the dual-beam FIB/SEM to metals research." Journal of Microscopy 214, no. 3 (June 2004): 237–45. http://dx.doi.org/10.1111/j.0022-2720.2004.01329.x.

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5

Carl, Matthew, Chris A. Smith, and Marcus L. Young. "Dual-Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB): A Practical Method for Characterization of Small Cultural Heritage Objects." MRS Proceedings 1656 (September 15, 2014): 355–69. http://dx.doi.org/10.1557/opl.2014.873.

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ABSTRACTKnowledge of the composition of many cultural heritage objects is limited, resulting in many unanswered questions in regards to the provenance, composition, and production methods. In this paper, our objective is to show that dual beam scanning electron microscope (SEM) and focused ion beam (FIB) can be used rapidly and non-destructively to determine the surface and bulk metal compositions in small cultural heritage objects. We show, for the first time, that this novel FIB technique can be successfully applied non-destructively to cultural heritage objects by examining three representative silver plated objects (Candelabra, “Century” spoon, and New York World’s Fair spoon) from the Dallas Museum of Art’s unparalleled collection of modern American silver. In each case, we successfully reveal and characterize the bulk metal as well as the Ag-plating, up to ∼80 µm deep and show that there is no visual damage resulting from the milling process of the FIB. This novel characterization technique can be applied, due to its ease of availability and rapid use, to many other problems in addition to silver plated objects, making dual beam SEM/FIB a possible cornerstone technique in the study of cultural heritage objects.

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6

Mahmoud, Morsi M. "Characterization of the Native Oxide Shell of Copper Metal Powder Spherical Particles." Materials 15, no. 20 (October 17, 2022): 7236. http://dx.doi.org/10.3390/ma15207236.

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The native oxide layer that forms on copper (Cu) metal spherical particle surfaces under ambient handling conditions has been shown to have a significant effect on sintering behavior during microwave heating in a previous study, where an abnormal expansion was observed and characterized during sintering of Cu compacts using reducing gases. Because microwave (MW) heating is selective and depends greatly on the dielectric properties of the materials, this thin oxide layer will absorb MW energy easily and can consequently be heated drastically starting from room temperature until the reduction process occurs. In the current study, this oxide ceramic layer was qualitatively and quantitatively characterized using the carrier gas hot extraction (CGHE) method, Auger electron spectroscopy (AES), and a dual-beam focused ion beam (FIB)/scanning electron microscope (SEM) system that combines both FIB and SEM in one single instrument. Two different commercial gas-atomized spherical Cu metal powders with different particle sizes were investigated, where the average oxygen content of the powders was found to be around 0.575 wt% using the CGHE technique. Furthermore, AES spectra along with depth profile measurements were used to qualitatively characterize this oxide layer, with only a rough quantitative thickness approximation due to method limitations and the electron beam reduction effect. For the dual-beam FIB-SEM system, a platinum (Pt) coating was first deposited on the Cu particle surfaces prior to any characterization in order to protect and to preserve the oxide layer from any possible beam-induced reduction. Subsequently, the Pt-coated Cu particles were then cross-sectioned in the middle in situ using an FIB beam, where SEM micrographs of the resulted fresh sections were characterized at a 36° angle stage tilt with four different detector modes. Quantitative thickness characterization of this native oxide layer was successfully achieved using the adapted dual-beam FIB-SEM setup with more accuracy. Overall, the native Cu oxide layer was found to be inhomogeneous over the particles, and its thickness was strongly dependent on particle size. The thickness ranged from around 22–67 nm for Cu powder with a 10 µm average particle size (APS) and around 850–1050 nm for one with less than 149 µm.

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7

Grandfield, Kathryn, and Håkan Engqvist. "Focused Ion Beam in the Study of Biomaterials and Biological Matter." Advances in Materials Science and Engineering 2012 (2012): 1–6. http://dx.doi.org/10.1155/2012/841961.

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The application of focused ion beam (FIB) techniques in the life sciences has progressed by leaps and bounds over the past decade. A once dedicated ion beam instrument, the focused ion beam today is generally coupled with a plethora of complementary tools such as dual-beam scanning electron microscopy (SEM), environmental SEM, energy dispersive X-ray spectroscopy (EDX), or cryogenic possibilities. All of these additions have contributed to the advancement of focused ion beam use in the study of biomaterials and biological matter. Biomaterials, cells, and their interfaces can be routinely imaged, analyzed, or prepared for techniques such as transmission electron microscopy (TEM) with this comprehensive tool. Herein, we review the uses, advances, and challenges associated with the application of FIB techniques to the life sciences, with particular emphasis on TEM preparation of biomaterials, biological matter, and their interfaces using FIB.

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8

Lin, Jui-Ching, William Heeschen, John Reffner, and John Hook. "Three-Dimensional Characterization of Pigment Dispersion in Dried Paint Films Using Focused Ion Beam–Scanning Electron Microscopy." Microscopy and Microanalysis 18, no. 2 (February 1, 2012): 266–71. http://dx.doi.org/10.1017/s143192761101244x.

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AbstractThe combination of integrated focused ion beam–scanning electron microscope (FIB-SEM) serial sectioning and imaging techniques with image analysis provided quantitative characterization of three-dimensional (3D) pigment dispersion in dried paint films. The focused ion beam in a FIB-SEM dual beam system enables great control in slicing paints, and the sectioning process can be synchronized with SEM imaging providing high quality serial cross-section images for 3D reconstruction. Application of Euclidean distance map and ultimate eroded points image analysis methods can provide quantitative characterization of 3D particle distribution. It is concluded that 3D measurement of binder distribution in paints is effective to characterize the order of pigment dispersion in dried paint films.

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9

Repetto, Luca, Renato Buzio, Carlo Denurchis, Giuseppe Firpo, Emanuele Piano, and Ugo Valbusa. "Fast three-dimensional nanoscale metrology in dual-beam FIB–SEM instrumentation." Ultramicroscopy 109, no. 11 (October 2009): 1338–42. http://dx.doi.org/10.1016/j.ultramic.2009.06.009.

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10

Kotula, Paul G., Michael R. Keenan, and Joseph R. Michael. "Tomographic Spectral Imaging with a Dual-Beam FIB/SEM: 3D Microanalysis." Microscopy and Microanalysis 10, S02 (August 2004): 1132–33. http://dx.doi.org/10.1017/s1431927604880619.

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11

Uchic, Michael D., Michael Groeber, Robert Wheeler IV, Frank Scheltens, and Dennis M. Dimiduk. "Augmenting the 3D Characterization Capability of the Dual Beam FIB-SEM." Microscopy and Microanalysis 10, S02 (August 2004): 1136–37. http://dx.doi.org/10.1017/s1431927604886859.

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12

Miller, M. K., and K. F. Russell. "Atom probe specimen preparation with a dual beam SEM/FIB miller." Ultramicroscopy 107, no. 9 (September 2007): 761–66. http://dx.doi.org/10.1016/j.ultramic.2007.02.023.

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13

WEST, G. D., and R. C. THOMSON. "Combined EBSD/EDS tomography in a dual-beam FIB/FEG-SEM." Journal of Microscopy 233, no. 3 (March 2009): 442–50. http://dx.doi.org/10.1111/j.1365-2818.2009.03138.x.

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14

Yao, Bao Yin, Hu Luo, Li Shuang Feng, Zhen Zhou, Rong Ming Wang, and Yuan Yuan Chi. "Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System." Key Engineering Materials 483 (June 2011): 66–69. http://dx.doi.org/10.4028/www.scientific.net/kem.483.66.

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The uniform, well designed nano-gratings have been successfully fabricated by using a dual beam focused ion beam (FIB)/scanning electron microscopy (SEM) system on the silicon substrates coated with 15 nm thick Au layer. The nano-gratings were designed with period of 840 nm, groove of 425 nm and beam of 415 nm. By adjusting the FIB parameters of milling like beam current, dwell time and scanning model, the fabricated nano-gratings were uniform in width and the side wall had good verticality. The currently fabricated nano-gratings using focused ion beam can be adjusted to serve as sub-wavelength optical resonant sensor which can be extended to nano-grating accelerometer with resolution of 10-9g.

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15

Young, Richard J. "Site-Specific Analysis of Advanced Packaging Enabled by Focused Ion Beams." EDFA Technical Articles 13, no. 1 (February 1, 2011): 12–19. http://dx.doi.org/10.31399/asm.edfa.2011-1.p012.

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Abstract Packaging integration continues to increase in complexity, driving more samples into FA labs for development support and analysis. For many of the jobs, there is also a need for larger removal volumes, compounding the demand for tool time and throughput. Focused ion beam (FIB) and dual-beam FIB/SEM systems are helping to relieve the pressure with their ability to create site-specific cross sections and to facilitate gate-level circuit rewire and debug. This article reviews the impact of packaging trends on failure analysis along with recent improvements in FIB technology. It also presents examples that illustrate how these new FIB techniques are being applied to solve emerging packaging challenges.

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16

Jeanvoine, Nicolas, Christian Holzapfel, Flavio Soldera, and Frank Mücklich. "3D Investigations of Plasma Erosion Craters using FIB/SEM Dual-Beam Techniques." Practical Metallography 43, no. 9 (September 2006): 470–82. http://dx.doi.org/10.3139/147.100314.

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17

Iwai, Hiroshi, Naoki Shikazono, Toshiaki Matsui, Hisanori Teshima, Masashi Kishimoto, Ryo Kishida, Daisuke Hayashi, et al. "Quantification of SOFC anode microstructure based on dual beam FIB-SEM technique." Journal of Power Sources 195, no. 4 (February 2010): 955–61. http://dx.doi.org/10.1016/j.jpowsour.2009.09.005.

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18

Uchic, MD, and PA Shade. "Serial Sectioning of Deformed Microcrystals using a Dual-Beam FIB-SEM Microscope." Microscopy and Microanalysis 15, S2 (July 2009): 610–11. http://dx.doi.org/10.1017/s1431927609099498.

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19

Jeanvoine, N., C. Holzapfel, F. Soldera, and F. Mücklich. "Microstructure Characterisation of Electrical Discharge Craters using FIB/SEM Dual Beam Techniques." Advanced Engineering Materials 10, no. 10 (October 2008): 973–77. http://dx.doi.org/10.1002/adem.200800108.

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20

Reagan, Brandon C., Paul J. Y. Kim, Preston D. Perry, John R. Dunlap, and Tessa M. Burch-Smith. "Spatial distribution of organelles in leaf cells and soybean root nodules revealed by focused ion beam-scanning electron microscopy." Functional Plant Biology 45, no. 2 (2018): 180. http://dx.doi.org/10.1071/fp16347.

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Analysis of cellular ultrastructure has been dominated by transmission electron microscopy (TEM), so images collected by this technique have shaped our current understanding of cellular structure. More recently, three-dimensional (3D) analysis of organelle structures has typically been conducted using TEM tomography. However, TEM tomography application is limited by sample thickness. Focused ion beam-scanning electron microscopy (FIB-SEM) uses a dual beam system to perform serial sectioning and imaging of a sample. Thus FIB-SEM is an excellent alternative to TEM tomography and serial section TEM tomography. Animal tissue samples have been more intensively investigated by this technique than plant tissues. Here, we show that FIB-SEM can be used to study the 3D ultrastructure of plant tissues in samples previously prepared for TEM via commonly used fixation and embedding protocols. Reconstruction of FIB-SEM sections revealed ultra-structural details of the plant tissues examined. We observed that organelles packed tightly together in Nicotiana benthamiana Domin leaf cells may form membrane contacts. 3D models of soybean nodule cells suggest that the bacteroids in infected cells are contained within one large membrane-bound structure and not the many individual symbiosomes that TEM thin-sections suggest. We consider the implications of these organelle arrangements for intercellular signalling.

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21

Dravid, Vinayak P., Steven Kim, and Luke N. Brewer. "Focused Ion Beam (FIB): More than Just a Fancy Ion Beam Thinner." Microscopy and Microanalysis 6, S2 (August 2000): 504–5. http://dx.doi.org/10.1017/s1431927600035017.

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The potential utility of FIB for routine (and novel) applications has come to forefront recently due to advances in ion optics which now allow formation of focused ion probe of better than ∼10-20 nm containing current density exceeding several A/cm2, with a liquid metal source (typically Gallium). The small ion probe size, coupled with shallow sputtering depth - yet high sputtering yield of ions, has opened several opportunities in machining, lithography and ion-assisted deposition[ 1-3] These developments, including automation, multi-specimen stages, cross-compatible specimen holders for FIB/TEM/SEM, use of in-situ electron beam (so-called dual beam), coupled with innovations such as the “lift-off process[4], have provided an invaluable set of tools for microelectronic defect characterization. However, re-deposition (contamination), ion implantation/damage especially for desirable thinner sections (<∼50 nm) remain major concerns for further applications.While much of the excitement in TEM community for FIB is due to thin foil specimen preparation (especially in microelectronics),

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22

Grünewald, Lukas, Daniel Nerz, Marco Langer, Sven Meyer, Nico Beisig, Pablo Cayado, Ruslan Popov, Jens Hänisch, Bernhard Holzapfel, and Dagmar Gerthsen. "Analysis of superconducting thin films in a modern FIB/SEM dual-beam instrument." Microscopy and Microanalysis 27, S1 (July 30, 2021): 1056–58. http://dx.doi.org/10.1017/s1431927621003986.

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23

Iwai, Hiroshi, Naoki Shikazono, Toshiaki Matsui, Hisanori Teshima, Masashi Kishimoto, Ryo Kishida, Daisuke Hayashi, et al. "Quantification of Ni-YSZ Anode Microstructure Based on Dual Beam FIB-SEM Technique." ECS Transactions 25, no. 2 (December 17, 2019): 1819–28. http://dx.doi.org/10.1149/1.3205723.

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24

Ignatov, A., A. Komissar, and R. Geurts. "On-line Scanned Probe Microscopy Transparently Integrated with Dual Beam SEM/FIB Systems." Microscopy and Microanalysis 18, S2 (July 2012): 640–41. http://dx.doi.org/10.1017/s1431927612005053.

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25

Uchic, M. "How to use the Dual Beam FIB-SEM to Characterize Microstructure in 3D." Microscopy and Microanalysis 12, S02 (July 31, 2006): 122–23. http://dx.doi.org/10.1017/s1431927606069054.

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26

Yang, G. Y., P. J. Moses, E. C. Dickey, and C. A. Randall. "Local impedance and microchemical analysis of electrical heterogeneities in multilayer electroceramic devices." Journal of Materials Research 22, no. 12 (December 2007): 3507–15. http://dx.doi.org/10.1557/jmr.2007.0443.

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We present an experimental methodology for locating and studying local failure sites in multilayer electroceramic devices at the submicron-length scale. In particular, the inhomogeneous degradation of multilayer ceramic capacitors is studied using a judicious combination of scanning electron microscopy (SEM), local-probe electrical measurements, focused ion beam (FIB) extraction, and transmission electron microscopy (TEM). Voltage-contrast SEM permits the identification of regions of different electrical potential within degraded multilayer devices. The local impedance from specific regions is measured in situ between a tungsten probe and the internal device electrodes, while impedance spectra are extracted for more detailed analysis. Because implementation occurs in dual-beam FIB/SEM, these locally defective sites can be extracted and thinned to electron transparency for further investigation by TEM. In this study, degraded sites in BaTiO3 multilayer capacitors are found to be associated with local oxygen deficiencies in BaTiO3, as measured by electron energy loss spectroscopy.

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27

Jakubéczyová, Dagmar, and Beáta Ballóková. "The Analyse of Nanocomposite Thin Coatings Using Specimens Prepared by Focused Ion Beam Milling." Materials Science Forum 891 (March 2017): 579–85. http://dx.doi.org/10.4028/www.scientific.net/msf.891.579.

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The microstructure of physical vapour deposition (PVD) coatings deposited by duplex technology was investigated by Dual Beam FIB/SEM system (focused ion beam / scanning electron microscope), which allows one to examine cross sections of specimens from their surface down to the substrate. Examined were PVD coatings of nanocomposite type: duplex AlXN3 (X=Cr) and duplex nACRo3, deposited by LARC and CERC technologies. Duplex coating is a modern technology, which combines plasma nitriding and PVD coating in one cycle. The FIB analysis can be widely used in the field of study of basic materials and technological applications as it is based on highly focused ion beam which enables accurate machining of the investigated specimens and flexible processing at a micro/nanometric level. Cross sections of specimens obtained by FIB-SEMs document the arrangement of individual deposited nanomultilayers within the nanocomposite coatings and their EDS analysis in specific locations.

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28

Cao, Shan Shan, Minoru Nishida, and Dominique Schryvers. "FIB/SEM Applied to Quantitative 3D Analysis of Precipitates in Ni-Ti." Solid State Phenomena 172-174 (June 2011): 1284–89. http://dx.doi.org/10.4028/www.scientific.net/ssp.172-174.1284.

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Ni4Ti3 precipitates with a heterogeneous distribution growing in a polycrystalline Ni50.8Ti49.2 alloy have been investigated in a Dual-Beam FIB/SEM system. The volume ratio, mean volume, central plane diameter, thickness, aspect ratio and sphericity of the precipitates in the grain interior as well as near to the grain boundary were measured or calculated. The morphology of the precipitates was classified according to the Zingg scheme. The multistage martensitic transformation occurring in these kinds of samples is interpreted in view of the data of this heterogeneous microstructure of matrix and precipitates.

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29

Dravid, Vinayak P. "Focused Ion Beam (FIB): More than Just a Fancy Ion Beam Thinner." Microscopy and Microanalysis 7, S2 (August 2001): 926–27. http://dx.doi.org/10.1017/s1431927600030701.

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The potential utility of FIB for routine (and novel) applications has come to forefront recently due to advances in ion optics which now allow formation of focused ion probe of better than ∼10-20 nm containing current density exceeding several A/cm2, with a liquid metal source (typically Gallium). The small ion probe size, coupled with shallow sputtering depth - yet high sputtering yield of ions, has opened several opportunities in machining, lithography and ion-assisted deposition.[1-3] These developments, including automation, multi-specimen stages, cross-compatible specimen holders for FIB/TEM/SEM, use of in-situ electron beam (so-called dual beam), coupled with innovations such as the “lift-off” process[4], have provided an invaluable set of tools for microelectronic defect characterization. However, re-deposition (contamination), ion implantation/damage especially for desirable thinner sections (<∼50 nm) remain major concerns for further applications.While much of the excitement in TEM community for FIB is due to thin foil specimen preparation (especially in microelectronics), we have been exploiting the site-specific micromachining aspect of FIB beyond specimen preparation for TEM, which is the focus of this contribution. Two broad themes will be presented: One exploits the site-specificity of FIB in making thin sections (including lift-off) at and across localized deformation as in indentation response of micro/nanocomposites. The other involves FIB as a fabrication tool for sputtering/drilling arbitrary shapes and sizes down to 20-50 nm, to enhance functional aspects.

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30

Kazak, Andrey, Kirill Simonov, and Victor Kulikov. "Machine-Learning-Assisted Segmentation of Focused Ion Beam-Scanning Electron Microscopy Images with Artifacts for Improved Void-Space Characterization of Tight Reservoir Rocks." SPE Journal 26, no. 04 (March 8, 2021): 1739–58. http://dx.doi.org/10.2118/205347-pa.

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Summary The modern focused ion beam-scanning electron microscopy (FIB-SEM) allows imaging of nanoporous tight reservoir-rock samples in 3D at a resolution up to 3 nm/voxel. Correct porosity determination from FIB-SEM images requires fast and robust segmentation. However, the quality and efficient segmentation of FIB-SEM images is still a complicated and challenging task. Typically, a trained operator spends days or weeks in subjective and semimanual labeling of a single FIB-SEM data set. The presence of FIB-SEM artifacts, such as porebacks, requires developing a new methodology for efficient image segmentation. We have developed a method for simplification of multimodal segmentation of FIB-SEM data sets using machine-learning (ML)-based techniques. We study a collection of rock samples formed according to the petrophysical interpretation of well logs from a complex tight gas reservoir rock of the Berezov Formation (West Siberia, Russia). The core samples were passed through a multiscale imaging workflow for pore-space-structure upscaling from nanometer to log scale. FIB-SEM imaging resolved the finest scale using a dual-beam analytical system. Image segmentation used an architecture derived from a convolutional neural network (CNN) in the DeepUNet (Ronneberger et al. 2015) configuration. We implemented the solution in the Pytorch® (Facebook, Inc., Menlo Park, California, USA) framework in a Linux environment. Computation exploited a high-performance computing system. The acquired data included three 3D FIB-SEM data sets with a physical size of approximately 20 × 15 × 25 µm with a voxel size of 5 nm. A professional geologist manually segmented (labeled) a fraction of slices. We split the labeled slices into training, validation, and test data. We then augmented the training data to increase its size. The developed CNN delivered promising results. The model performed automatic segmentation with the following average quality indicators according to test data: accuracy of 86.66%, precision of 54.93%, recall of 83.76%, and F1 score of 55.10%. We achieved a significant boost in segmentation speed of 14.5 megapixel (MP)/min. Compared with 0.18 to 1.45 MP/min for manual labeling, this yielded an efficiency increase of at least 10 times. The presented research work improves the quality of quantitative petrophysical characterization of complex reservoir rocks using digital rock imaging. The development allows the multiphase segmentation of 3D FIB-SEM data complicated with artifacts. It delivers correct and precise pore-space segmentation, resulting in little turn-around-time saving and increased porosity-data quality. Although image segmentation using CNNs is mainstream in the modern ML world, it is an emerging novel approach for reservoir-characterization tasks.

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31

Liu, Mei Hua, Di Feng, Yan Li, Bao Yin Yao, Shuai Zhong, and Li Shuang Feng. "The Experiment Research of Gas-Assisted Ion Etching Nanograting." Key Engineering Materials 609-610 (April 2014): 32–38. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.32.

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By using scanning electron microscope and focused ion beam (SEM-FIB) dual beam system which was self-assembled, with xenon diflouride, nanograting structure has been successfully processed on the gilded silicon wafer. The grating period is 950 nm, and the width of single etched groove is 652 nm. Gas-assisted ion etching is also known as focused ion beam assisted etching (FIBAE). The working principle of FIBAE was analyzed firstly. The different experimental results of nanograting structures which were fabricated by FIBAE and FIB alone were investigated. And the effect of exposure time on nanograting structures was also studied detailed in the FIBAE process. The Results showed that FIBAE has the technology advantage of high reaction rate, saving time, reducing costs, and deep etching, and it provides an effective method for processing nanograting of high depth in the future.

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32

Jang, Seungsoo, Kyung Taek Bae, Dongyeon Kim, Hyeongmin Yu, Seeun Oh, Ha-Ni Im, and Kang Taek Lee. "Microstructural Analysis of Solid Oxide Electrochemical Cells via 3D Reconstruction Using a FIB-SEM Dual Beam System." ECS Transactions 111, no. 6 (May 19, 2023): 1265–69. http://dx.doi.org/10.1149/11106.1265ecst.

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Solid oxide electrochemical cells (SOCs) have attracted increasing attention as energy conversion devices due to their high efficiency. The microstructures of SOCs play a critical role in their electrochemical performance, however, characterizing them is challenging due to their heterogeneous microstructure. This paper describes a quantitative analysis of SOC microstructures via 3D reconstruction technique using a focused ion beam-scanning electron microscope (FIB-SEM) dual beam system. The reconstructed SOC electrodes offer microstructural characteristics, including particle and pore size, tortuosity, connectivity, and triple-phase boundary (TPB) density. These in-depth analyses contribute to better understanding of the electrochemical behavior of SOCs.

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33

Chen, Yi Qing, Feng Zai Tang, and Liang Chi Zhang. "A Preparation Method of Diamond Specimens Using an Advanced FIB Microscopy for Micro and Nanoanalysis." Key Engineering Materials 531-532 (December 2012): 592–95. http://dx.doi.org/10.4028/www.scientific.net/kem.531-532.592.

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This paper reports the specimen preparation using an advanced dual beam focused ion beam (FIB) technique for bulk polycrystalline diamond (PCD) composites after dynamic friction polishing (DFP). The technique adapted allows for precisely processing diamond materials at the specific polishing track sites of PCD surface, from which large cross-sectional specimens for SEM/EDS/Raman microanalysis could be successfully created. In addition, an in-situ lift-out method was developed to prepare the site-specific HRTEM specimens which were thin enough for imaging the atomic lattice of diamond and for conducting EELS analysis.

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Tseluyko, S. S., V. Ya Shklover, V. A. Kurushin, and P. R. Kazanskiy. "3D-RECONSTRUCTION OF THE MUCOUS MEMBRANE OF THE TRACHEA WITH THE USE OF DUAL BEAM FIB/ SEM QUANTA 3D FEG." Amur Medical Journal, no. 15-16 (2016): 112–15. http://dx.doi.org/10.22448/amj.2016.15-16.112-115.

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Uchic, Michael D., Michael A. Groeber, Dennis M. Dimiduk, and J. P. Simmons. "3D microstructural characterization of nickel superalloys via serial-sectioning using a dual beam FIB-SEM." Scripta Materialia 55, no. 1 (July 2006): 23–28. http://dx.doi.org/10.1016/j.scriptamat.2006.02.039.

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Goto, Toichiro, Nahoko Kasai, Rick Lu, Roxana Filip, and Koji Sumitomo. "Scanning Electron Microscopy Observation of Interface Between Single Neurons and Conductive Surfaces." Journal of Nanoscience and Nanotechnology 16, no. 4 (April 1, 2016): 3383–87. http://dx.doi.org/10.1166/jnn.2016.12311.

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Interfaces between single neurons and conductive substrates were investigated using focused ion beam (FIB) milling and subsequent scanning electron microscopy (SEM) observation. The interfaces play an important role in controlling neuronal growth when we fabricate neuron-nanostructure integrated devices. Cross sectional images of cultivated neurons obtained with an FIB/SEM dual system show the clear affinity of the neurons for the substrates. Very few neurons attached themselves to indium tin oxide (ITO) and this repulsion yielded a wide interspace at the neuron-ITO interface. A neuron-gold interface exhibited partial adhesion. On the other hand, a neuron-titanium interface showed good adhesion and small interspaces were observed. These results are consistent with an assessment made using fluorescence microscopy. We expect the much higher spatial resolution of SEM images to provide us with more detailed information. Our study shows that the interface between a single neuron and a substrate offers useful information as regards improving surface properties and establishing neuron-nanostructure integrated devices.

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Zhang, G. P., Bin Zhang, Q. Y. Yu, and J. Tan. "In Situ Thermal-Mechanical Fatigue Testing of Thin Au Lines." Key Engineering Materials 353-358 (September 2007): 2916–19. http://dx.doi.org/10.4028/www.scientific.net/kem.353-358.2916.

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An in-situ testing system for thermal-mechanical fatigue of thin metal lines was setup inside a dual-beam focused ion beam (FIB)/scanning electron microscope (SEM) system. Alternating currents (AC) were applied to narrow Au lines 200-nm-thick through nanomanipulator needles. Preliminary results show that severe thermal-mechanical fatigue damage can be generated by the action of the applied AC. The in-situ recording of the evolution of the damage has been carried out and the possible mechanism of the thermal-mechanical fatigue damage in the Au lines resulted from the joule heating was discussed.

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Ollivier, Maelig, Laurence Latu-Romain, Edwige Bano, Arnaud Mantoux, and Thierry Baron. "Conversion of Si Nanowires into SiC Nanotubes." Materials Science Forum 717-720 (May 2012): 1275–78. http://dx.doi.org/10.4028/www.scientific.net/msf.717-720.1275.

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Carburization of silicon nanowires (NWs), with diameters of about 800 nm and lengths of about 10 µm, under methane at high temperature in order to obtain silicon carbide (SiC) nanostructures is reported here. The produced SiC nanostructures display a tubular shape and are polycrystalline. The as-prepared silicon carbide nanotubes (NTs) were characterized and studied by scanning electron microscopy (SEM), dual focused ion beam – scanning electron microscope (FIB-SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The formation of nanotubes can be explained by the out-diffusion of Si through the SiC during the carburization process.

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Oliveira, Marcos L. S., Diana Pinto, Maria Eliza Nagel-Hassemer, Leila Dal Moro, Giana de Vargas Mores, Brian William Bodah, and Alcindo Neckel. "Brazilian Coal Tailings Projects: Advanced Study of Sustainable Using FIB-SEM and HR-TEM." Sustainability 15, no. 1 (December 23, 2022): 220. http://dx.doi.org/10.3390/su15010220.

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The objective of this study is to obtain a more detailed assessment of particles that contain rare-earth elements (REEs) in abandoned deposits of Brazilian fine coal tailings (BFCTs), so as to aid current coal mining industries in the identification of methodologies for extracting such elements (Santa Catarina State, Brazil). The BFCT areas were sampled for traditional mineralogical analysis by X-ray Diffraction, Raman Spectroscopy and nanomineralogy by a dual beam focused ion beam (FIB) coupled with field emission scanning electron microscopy (FE-SEM) and high-resolution transmission electron microscopy (HR-TEM) coupled with an energy dispersive X-ray microanalysis system (EDS). The results show that the smaller the sampled coal fines were, the higher the proportion of rare-earth elements they contained. Although the concentration of REEs is below what would normally be considered an economic grade, the fact that these deposits are already ground and close to the surface negate the need for mining (only uncovering). This makes it significantly easier for REEs to be extracted. In addition, owing to their proximity to road and rail transport in the regions under study, the opportunity exists for such resources (BFCTs) to be utilized as a secondary market as opposed to simply being discarded as has been done in the past.

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Singh, R., A. R. Akhgar, P. C. Sui, K. J. Lange, and N. Djilali. "Dual-Beam FIB/SEM Characterization, Statistical Reconstruction, and Pore Scale Modeling of a PEMFC Catalyst Layer." Journal of The Electrochemical Society 161, no. 4 (2014): F415—F424. http://dx.doi.org/10.1149/2.036404jes.

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Chee, K. W. A., R. Beanland, P. A. Midgley, and C. J. Humphreys. "Site-selective dopant profiling of p-n junction specimens in the dual-beam FIB/SEM system." Journal of Physics: Conference Series 209 (February 1, 2010): 012069. http://dx.doi.org/10.1088/1742-6596/209/1/012069.

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Zhou, Qinghua, Lechun Xie, Xueli Wang, Xiaoqing Jin, Zhanjiang Wang, Jiaxu Wang, Zhihong Jia, Leon M. Keer, and Qian Wang. "Modeling rolling contact fatigue lives of composite materials based on the dual beam FIB/SEM technique." International Journal of Fatigue 83 (February 2016): 201–8. http://dx.doi.org/10.1016/j.ijfatigue.2015.10.014.

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Novo, Sergi, Leonardo Barrios, Elena Ibáñez, and Carme Nogués. "The Zona Pellucida Porosity: Three-Dimensional Reconstruction of Four Types of Mouse Oocyte Zona Pellucida Using a Dual Beam Microscope." Microscopy and Microanalysis 18, no. 6 (December 2012): 1442–49. http://dx.doi.org/10.1017/s1431927612013487.

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AbstractIn the last decade, the applicability of focus ion beam–field emission scanning electron microscopy (FIB-FESEM) in the biological field has begun to get relevance. Among the possibilities offered by FIB-FESEM, high-resolution three-dimensional (3D) reconstruction of biological structures is one of the most interesting. Using this tool, the 3D porosity of four different types of mouse oocyte zona pellucida (ZP) was analyzed. A surface analysis of the mouse oocyte ZP was first performed by SEM. Next, one oocyte per ZP type was selected, and an area of its ZP was completely milled, using the cut and view mode, in the FIB-FESEM. Through a 3D reconstruction of the milled area, a map of the distribution of the pores across the ZP was established and the number and volume of pores were quantified, thus enabling for the first time the study of the inner porosity of the mouse ZP. Differences in ZP porosity observed among the four types analyzed allowed us to outline a model to explain the changes that the ZP undergoes through immature, mature, predegenerative, and degenerative stages.

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Jang, Seungsoo, Kyung Taek Bae, Dongyeon Kim, Hyeongmin Yu, Seeun Oh, Ha-Ni Im, and Kang Taek Lee. "Microstructural Analysis of Solid Oxide Electrochemical Cells via 3D Reconstruction Using a FIB-SEM Dual Beam System." ECS Meeting Abstracts MA2023-01, no. 54 (August 28, 2023): 194. http://dx.doi.org/10.1149/ma2023-0154194mtgabs.

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The 3D reconstruction based on tomography technology enables quantitative and qualitative microstructural analysis of complex multiphase oxide structures. This powerful approach is widely investigated in diverse areas, in particular, gaining more importance in solid oxide electrochemical cells (SOCs) fields. SOCs are promising energy conversion devices with high efficiency, however, they have complex and porous/dense multilayered microstructures, which are closely related to the electrochemical reaction in the electrodes, thus, one of the major factors determining overall output performance of SOCs. Therefore, it is necessary to quantify the microstructural parameters of the cell. A focused ion beam-scanning electron microscope (FIB-SEM) dual beam system is one well-established method to obtain tomographic images to reconstruct 3D microstructures. It has an appropriate scale of tenth of nm to μm-level with high spatial resolution to represent the microstructural characteristics of the SOC electrodes. This presentation is intended to introduce our progress on 3D reconstruction techniques to quantitatively analyse SOCs, obtaining microstructural features such as particle size, connectivity, tortuosity, contact area, and triple phase boundary density. These in-depth analyses are helpful in extensively understanding electrochemical behavior in SOC electrodes.

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Lim, Seungmin, Han-Seung Lee, and Shiho Kawashima. "Pore structure refinement of cement paste incorporating nanosilica: Study with dual beam scanning electron microscopy/focused ion beam (SEM/FIB)." Materials Characterization 145 (November 2018): 323–28. http://dx.doi.org/10.1016/j.matchar.2018.08.045.

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Bae, Kyung Taek, Joonam Park, Dong Woo Joh, Jeong Hwa Park, Dohwan Kim, Wooyoung Jeong, Ji-Eun Nam, et al. "Quantitative Analysis of Solid-State Energy Devices Via 3D Reconstruction Using a FIB/SEM Dual Beam System." ECS Meeting Abstracts MA2021-03, no. 1 (July 23, 2021): 253. http://dx.doi.org/10.1149/ma2021-031253mtgabs.

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Tordoff, B., C. Hartfield, S. Krauss, L. Abdellaoui, S. Kelly, and H. Bale. "10 years of LaserFIB: The Latest Developments in a Dual Chamber, 3 Beam FIB-SEM for Large Volume Material Removal and Semi-Automated FIB Integration." Microscopy and Microanalysis 29, Supplement_1 (July 22, 2023): 547. http://dx.doi.org/10.1093/micmic/ozad067.258.

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Schryvers, Dominique, Wim Tirry, and Shan Shan Cao. "Advanced TEM and SEM Methods Applied to 3D Nano- and Microstructural Investigations of Ni₄Ti₃ Precipitates in Ni-Ti (SMA)." Solid State Phenomena 172-174 (June 2011): 229–35. http://dx.doi.org/10.4028/www.scientific.net/ssp.172-174.229.

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Two different kinds of experimental approaches yielding three-dimensional structural information on metastable semi-coherent precipitates are demonstrated. By combining high-resolution images from two independent viewing directions a full description of the strain field surrounding a nano-sized Ni4Ti3precipitate in Ni-Ti can be obtained. The principal axes and strains correlate well with the transformation strain of the observed R-phase transformation close to the precipitate. Using a slice-and-view procedure in a FIB/SEM dual-beam instrument, a three-dimensional voxel dataset is produced from which morphological and distributional information on the same precipitates can be obtained yielding new insight into the particular transformation paths of these alloys, relevant for their functional behaviour.

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Zhao, Y. Z., Q. J. Wang, P. K. Tan, H. H. Yap, B. H. Liu, H. Feng, H. Tan, et al. "Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system." Microelectronics Reliability 64 (September 2016): 362–66. http://dx.doi.org/10.1016/j.microrel.2016.07.060.

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Clarke, James S., Michael B. Schmidt, and Ndubuisi G. Orji. "Photoresist cross-sectioning with negligible damage using a dual-beam FIB-SEM: A high throughput method for profile imaging." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 25, no. 6 (2007): 2526. http://dx.doi.org/10.1116/1.2804516.

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