Relevant bibliographies by topics / Dry etch

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Dry etch'

Author: Grafiati
Published: 28 September 2024

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Journal articles on the topic "Dry etch"

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Lee, Jong Seok, Geun Min Choi, Ji Nok Jung, Dong Duk Lee, Gin Yung Hur, Jai Ho Lee, Che Hyuk Chi, and Dae Hee Gimm. "Development of a Integrated Dry/Wet Hybrid Cleaning System." Solid State Phenomena 195 (December 2012): 21–24. http://dx.doi.org/10.4028/www.scientific.net/ssp.195.21.

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With scaling of ULSI devices, the process temperatures are continuously lowered. The oxide films, which were deposited at low temperature, show fast etching rates during wet etching compared to high temperature films. Also, the etch rates differ largely from other film deposition conditions. In order to overcome these etch rate differences during surface preparation, dry cleaning processes had been introduced where the etch selectivity of the soft oxide films to the thermal oxide are very similar, regardless of the film deposition conditions and the deposition temperature.
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Castro, Marcelo S. B., Sebastien Barnola, and Barbara Glück. "Selective and Anisotropic Dry Etching of Ge over Si." Journal of Integrated Circuits and Systems 8, no. 2 (December 28, 2013): 104–9. http://dx.doi.org/10.29292/jics.v8i2.380.

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Inductively coupled plasma (ICP) etching of Ge with high selectivity over Si and anisotropic etched profiles using CF4, HBr, SF6, and Cl2 reactive gases has been studied. Because pressure and biased power should be the most important parameters to drive selectivity and etch profile, they were varied from 4 to 50 mTorr and from 0 to 50 W, respectively, so as to investigate their influence on process. Total gas flow (100 sccm) and source power (350 W) were initially held constant. Selectivity greater than 100:1 of Ge over Si was achieved using 100 % Cl2 etch gas at 50 mTorr and zero bias power but the profile of the etched features was isotropic. With the addition of N2 to the feed gas (Cl2) the profile became more anisotropic. A three steps ICP etch process was developed with a final Ge/Si etch selectivity of 5:1 and anisotropic profiles.
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PARK, JONG CHEON, JIN KON KIM, TAE GYU KIM, DEUG WOO LEE, HYUN CHO, HYE SUNG KIM, SU JONG YOON, and YEON-GIL JUNG. "DRY ETCHING OF SnO2 AND ZnO FILMS IN HALOGEN-BASED INDUCTIVELY COUPLED PLASMAS." International Journal of Modern Physics B 25, no. 31 (December 20, 2011): 4237–40. http://dx.doi.org/10.1142/s0217979211066660.

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High density plasma etching of SnO 2 and ZnO films was performed in chlorine- ( Cl 2/ Ar and BCl 3/ Ar ) and fluorine-based ( CF 4/ Ar and SF 6/ Ar ) inductively coupled plasmas. The etch process window for fabricating metal oxide nanowires with high aspect ratios including high and controllable etch rates, high etch selectivities to mask material and high anisotropy was established. Maximum etch rates of ~2050 Å/minute ( BCl 3/ Ar ) and ~1950 Å/minute ( SF 6/ Ar ) for ZnO , and ~1950 Å/minute ( Cl 2/ Ar ) and ~2000 Å/minute ( SF 6/ Ar ) for SnO 2 were obtained. Ni was found to provide very high etch selectivities with maximum values of ~67 to SnO 2 and ~17 to ZnO , respectively.
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Lenzi, Tathiane Larissa, Fabio Zovico Maxnuck Soares, and Rachel de Oliveira Rocha. "Does Bonding Approach Influence the Bond Strength of Universal Adhesive to Dentin of Primary Teeth?" Journal of Clinical Pediatric Dentistry 41, no. 3 (January 1, 2017): 214–18. http://dx.doi.org/10.17796/1053-4628-41.3.214.

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Objective: To evaluate the effect of bonding strategy on microtensile bond strength (μTBS) of a new universal adhesive system to primary tooth dentin. Study design: Flat dentin surfaces from 25 primary molars were assigned to 5 groups according to the adhesive and bonding approach: Adper Single Bond 2 (two-step etch-and-rinse adhesive) and Clearfil SE Bond (two-step self-etch system), as controls; Scotchbond Universal Adhesive–self-etch, dry or wet-bonding etch-and-rinse strategies. Composite buildups were constructed and the teeth were sectioned to obtain bonded sticks (0.8 mm2) to be tested under tension at 1mm/min. The μTBS means were analyzed by one-way ANOVA and Tukey's tests (α = 0.05). Failure mode was evaluated using a stereomicroscope (400×). Results: Universal adhesive applied following both dry and wet-bonding etch-and-rinse strategies showed similar bond strength compared with control adhesive systems. Self-etch approach resulted in the lowest μTBS values. For all groups, adhesive/mixed failure prevailed. The percentage of premature debonded specimens was higher when the universal adhesive was used as self-etch mode. Conclusion: The universal adhesive does not share the same versatility of being used in the etch-and-rinse and self-etch approaches; however, the use of the new adhesive following either wet or dry-bonding may be a suitable option as alternative to two-step etch-and-rinse adhesive protocol.
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Szweda, Roy. "Dry etch processes for optoelectronic devices." III-Vs Review 14, no. 1 (January 2001): 42–47. http://dx.doi.org/10.1016/s0961-1290(01)89007-4.

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Chiang, Chao-Ching, Xinyi Xia, Jian-Sian Li, Fan Ren, and Stephen J. Pearton. "Selective Wet and Dry Etching of NiO over β-Ga2O3." ECS Transactions 111, no. 2 (May 19, 2023): 73–83. http://dx.doi.org/10.1149/11102.0073ecst.

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Patterning of NiO/Ga2O3 heterojunctions requires the development of selective wet and dry etch processes. Solutions of 1:4 HNO3 :H2O exhibited measurable etch rates for NiO above 40 °C and activation energy for wet etching of 172.9 kJ.mol-1 (41.3 kCal.mol-1, 1.8 eV/atom), which is firmly in the reaction-limited regime. The selectivity over β-Ga2O3 was infinite for temperatures up to 55°C. The strong negative enthalpy for producing the etch product Ga(OH)4 suggests that HNO3-based wet etching of NiO occurs via the formation and dissolution of hydroxides. For dry etching, Cl2/Ar Inductively Coupled Plasmas produced etch rates for NiO up to 800Å.min-1, with maximum selectivities of < 1 over β-Ga2O3. The ion energy threshold for initiation of the etching of NiO was ~55 eV and the etch mechanism was ion-driven, as determined by the linear dependence of etch rate on the square root of ion energy incident on the surface.
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Altamirano-Sanchez, Efrain, Yoko Yamaguchi, Jeffrey Lindain, Naoto Horiguchi, Monique Ercken, Marc Demand, and Werner Boullart. "Dry Etch Fin Patterning of a Sub-22nm Node SRAM Cell: EUV Lithography New Dry Etch Challenges." ECS Transactions 34, no. 1 (December 16, 2019): 377–82. http://dx.doi.org/10.1149/1.3567607.

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Farrow, Woodrow D., and Jay Richman. "Summary Abstract: Advanced dry etch processing with a DRY pump." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 6, no. 3 (May 1988): 1263. http://dx.doi.org/10.1116/1.575686.

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Heidenblut, Maria, D. Sturm, Alfred Lechner, and Franz Faupel. "Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch." Solid State Phenomena 145-146 (January 2009): 349–52. http://dx.doi.org/10.4028/www.scientific.net/ssp.145-146.349.

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The subject of this report is the characterization of plasma etch residues after a metal etch process with Cl2/BCl3 etch gases. One of the interactive factors in the removability of the residues is the photo-mask removal process (DSQ). Depending on the DSQ process the molecular structure of the residues will differ. For our findings, we used laser spectroscopy and Fourier-transformed infrared spectroscopy to obtain information about the degree of the cross-linking of the molecular structure of residues in a post-metal etch cleaning process. The post-etch cleaning is important for removing residues remaining after the metal structuring process. The main goal is to use emission spectroscopy for studying the compounds of the dry-etch related residues. Finally, it was shown that small variations in wafer treatment directly after dry-etching results in different solubilities of residues in HDA (hydroxylamine) based solutions. [1]
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Kang, In Ho, Wook Bahng, Sung Jae Joo, Sang Cheol Kim, and Nam Kyun Kim. "Post Annealing Etch Process for Improved Reverse Characteristics of 4H-SiC Diode." Materials Science Forum 615-617 (March 2009): 663–66. http://dx.doi.org/10.4028/www.scientific.net/msf.615-617.663.

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The effects of post annealing etch process on electrical performances of a 4H-SiC Schottky diodes without any edge termination were investigated. The post etch was carried out using various dry the dry etch techniques such as Inductively Coupled Plasma (ICP) and Neutral Beam Etch (NBE) in order to eliminate suspicious surface damages occurring during a high temperature ion activation process. The leakage current of diodes treated by NBE measured at -100V was about one order lower than that of diode without post etch and a half times lower than that of diode treated by ICP without a significant degradation of forward electrical characteristics. Based on the above results, the post annealing process was adapted to a junction barrier Schottky diode with a field limiting ring. The blocking voltages of diode without post annealing etch and diodes treated by ICP and NBE were -1038V, -1125V, and -1595V, respectively.
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Dissertations / Theses on the topic "Dry etch"

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Nilgianskul, Tan. "Control of a semiconductor dry etch process using variation and correlation analyses." Thesis, Massachusetts Institute of Technology, 2016. http://hdl.handle.net/1721.1/107025.

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Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2016.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 67-69).
Statistical process control (SPC) is one of the traditional quality control methods that, if correctly applied, can be effective to improve and maintain quality and yield in any manufacturing facility. The purpose of this project is to demonstrate how to effectively apply SPC to a dry etch process (in this case plasma ashing), at Analog Devices, Inc., a company that runs large-scale fabrication sites in the Boston area. This thesis focuses on spatial and run-to-run variation across multiple measurement sites on a wafer and validates the assumptions of normality and correlation between sites within a wafer in order to justify and confirm the value of employing SPC theories to the plasma ashing process. By plotting control charts on past data, outlier data points are detected using Analog's current monitoring system. Further, irregularities in the process that would not have been detected using traditional x-bar Shewhart charts are detected by monitoring non-uniformity. Finally, cost analysis suggests that implementing SPC would be a modest investment relative to the potential savings.
by Tan Nilgianskul.
M. Eng. in Manufacturing
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Muthukrishnan, N. Moorthy. "Characterization and modeling of dry etch processes for titanium nitride and titanium films in Cl₂/N₂ and BCl₃ plasmas." Diss., This resource online, 1996. http://scholar.lib.vt.edu/theses/available/etd-06062008-151045/.

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Catala, Antoine. "Gravure Plasma du Nitrure de Gallium pour la réalisation de micro LEDs à hautes performances." Electronic Thesis or Diss., Université Grenoble Alpes, 2024. http://www.theses.fr/2024GRALT041.

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Avec le développement de l’internet des objets et des réalités augmentées et virtuelles, la demande en micro-écran très résolu est apparue. Des microLED (µLED) à base de Nitrure de Gallium (GaN) semble une solution prometteuse grâce à ses propriétés électro optiques, notamment son grand gap direct. Les µLED à base de GaN subissent cependant une chute drastique de leur efficacité lorsque leur dimension diminue en raison, au moins partiellement, de dommages induits sur les flancs par l’étape de singularisation.Ces travaux de thèse se concentrent sur la compréhension et la réduction de l’endommagement du GaN au cours de l’étape de gravure plasma. Afin d’étudier la dégradation des flancs par la gravure, un nouveau protocole de caractérisation de ces derniers par cathodoluminescence a été développé. Un procédé standard à base de Cl2/BCl3/Ar a été étudié pour caractériser l’endommagement du GaN. L’un des principaux dommages relevés est la perte de la stœchiométrie lors de la gravure. Puis une dichotomie de la chimie de gravure a été réalisée pour déterminer l’espèce chimique prépondérante dans l’apparition de l’endommagement. Le chlore est apparu comme l’espèce la plus endommageante pour le fond de gravure comme les flancs des mesas. Les paramètres plasma (densité et énergie de bombardement) et l’impact du matériau du masque dur sont ensuite étudiés avec une chimie de gravure alors réduite au chlore. Constatant des contradictions entre les résultats obtenus et ceux rapportés dans la littérature, une étude comparative entre les polarités Ga et N du plan c a été menée. Il ressort notamment que la composante chimique (espèces réactives) est prépondérante dans l’endommagement de la polarité N tandis que c’est la composante physique (bombardement ionique) qui l’est pour la polarité Ga. Un mécanisme de gravure est proposé afin d’expliquer les différences constatées
Through the development of the internet of things and virtual and augmented reality, increase of microdisplay need appeared. Gallium Nitride (GaN) microLED (µLED) seem to be a promising solution thanks to its electro-optical properties like its wide direct band gap. Nevertheless, GaN µLED efficiency drop significantly when their size shrinks, due to damages induced by singularization process.This thesis aims to understand GaN damages apparition during the plasma etching process and then their reduction. To study mesas sidewall damage after the etching, a new experimental set up using cathodoluminescence has been developed. A standard process using Cl2/BCl3/Ar chemistry is studied to characterize GaN damages. Then through a dichotomy of the chemistry, chlorine turns out to be the main damaging species within the plasma, both on sidewall and bottom trench. Plasma parameters (density and ion bombardment energy) and the damaging effect of the hard mask material have been studied with a plasma chemistry reduced to chlorine only. Noting divergent results with the ones reported in the literature, a comparative study between plan c Ga and N polarities have been carried. This study highlight that N face GaN is mainly damaged by plasma chemical component (reactive species) while Ga face GaN is by plasma physical component (ion bombardment). An etching mechanism is finally proposed to explain those differences
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Villa, Katherine. "The use of wet-to-dry dressings for mechanical debridement." Honors in the Major Thesis, University of Central Florida, 2013. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/928.

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Clinical management of complex wounds is essential to promote wound healing. Prolonged healing time may lead to longer and more costly hospitalizations and poorer patient outcomes. The removal of nonviable, necrotic tissue via debridement is vital to the healing process. One of the most common debridement techniques, in the United States, is the use of wet-to-dry dressings. There are no defined guidelines or protocols for the timing of dressing changes and subsceequent debridement. The purpose of this study was to perform a review of literature to determine the rationale for the use of wet-to-dry dressings, explore alternative time sequences of treatment, and to identify the risks and benefits for this methodology of debridement in an adult population with acute traumas. Inclusion criteria consisted of peer reviewed, English Language, research articles published within the last 5 years (2007-2012), adults with acute wounds treated by wet-to-dry dressing debridement. This review of literature was conducted using CINAHL and MEDLINE databases using the following search terms: Wound debridement, wet-to-dry dressing', timing, sequencing, schedul', standard', debridement, acute wound', and mechanical debridement. The review of literature yielded zero results meeting the search criteria therefore, a second review of literature was performed using the same search criteria but expanded to include articles published within the past 15 years (1997 -2012). The second review of literature also yielded zero results that met the search criteria. A lack of evidence supporting the use of wet-to-dry dressings for the purpose of debridement suggests that healthcare providers are following tradition rather than evidence based practices. Nurses and healthcare providers need education on best practices in wound care to advocate for their patients to ensure the best possible outcome. Further research on wound care modalities that are clinically efficient is needed.
B.S.N.
Bachelors
Nursing
Nursing
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Hamlett, Anna. "Human trafficking : a modern day slavery." Honors in the Major Thesis, University of Central Florida, 2009. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1270.

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This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf.edu/Systems/DigitalInitiatives/DigitalCollections/InternetDistributionConsentAgreementForm.pdf You may also contact the project coordinator, Kerri Bottorff, at kerri.bottorff@ucf.edu for more information.
Bachelors
Sciences
Political Science
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Torres, Gabriella. "An exploratory study : romanticism in modern day men and women." Honors in the Major Thesis, University of Central Florida, 2010. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1509.

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This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf.edu/Systems/DigitalInitiatives/DigitalCollections/InternetDistributionConsentAgreementForm.pdf You may also contact the project coordinator, Kerri Bottorff, at kerri.bottorff@ucf.edu for more information.
Bachelors
Sciences
Psychology
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Miniello, Jonathan. "Missing the consequences misperceptions of the 1967 six-day israeli-arab war." Honors in the Major Thesis, University of Central Florida, 2011. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/478.

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In recent times, the issues surrounding the "67 borders" have become part of the public debate. In recent speeches, President Obama has suggested that Israel should return to pre-1967 borders with "land-swaps" in exchange for some form of peace with the Palestinians living within current Israeli territory. The validity of Obama's suggestion has been questioned by both members of the political left and right and in the opinion of this author, with considerable merit. However, the ultimate judgment on the validity of Obama's suggestion should be based on a study encompassing the decisions, both correct and flawed, of the leaders during the 1967 war. For this, a study of collective misperceptions, decision making, and the eventual consequences such decisions brought is necessary. That is the purpose of this thesis. For a proper analysis of the misperceptions and decision making surrounding the 1967 war, its proper to review the source material. In that light, there is no shortage of material written about the 1967 war; American, Israel, and Arab authors have all contributed to the historical records. However, much of the material is focused on a historical perspective and not on the decision-making process. There are not many exceptions. Therefore, it becomes important to compare the newer analyzed material against the primary source material and discuss the discrepancies. At the end, it will be determined whether the collective governmental decisions based upon misperceptions accelerated, decelerated, or had a neutral effect on the outbreak of the war. Comparing the source material and viewing it through the filter of newly released information will constitute the methodology whenever possible. The results of this study have revealed a mixed bag of results depending on the nation in question. This was to be expected because individual nations are subject to different misperceptions.; Nations falling under the spell of different misperceptions experience different consequences and outcomes than those who do not. Additionally, even if two separate nations are exposed to the same stimulus, their response may be completely different. In terms of the 1967 war, it can be stated that Israeli misperceptions staved off the start of the 1967 War, whereas Soviet and Arab misperceptions served to accelerate it. By contrast American misperceptions seemed to have little if any affect whatsoever. The purpose of thesis is to expose and documents misperceptions and the resulting consequences that arose from them. It is not designed to make judgments about the current political situation. However, it is the sincere hope of this author that when a situation runs parallel to the events of the 1967, some of the same mistakes can be avoided. Exactly what runs parallel, and what is significant in today's world, is left to the reader's own judgment.
B.S.
Bachelors
Sciences
Psychology
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Ahmed, Shameem. "Day in and day out : women's experience in the family and the reconstruction of their secondary status." Thesis, McGill University, 1991. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=59959.

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The basic research question this thesis addresses is how the secondary status of Bangladeshi women is reinforced through household labour. It is argued that gender relations and housework shape each other. To develop this, it examines the degree of participation of women in different areas of housework and family decisions. The thesis further explores whether the autonomy of women coming from the traditional Bangladeshi family set-up has increased as a result of their immigration to Canada and their exposure to Canadian family values. This is done by a comparison of the family experiences of Canadian and Bangladeshi women. Finally, it is suggested that age, position in the family and length of immigration are the indices of the autonomy of Bangladeshi women in Canada.
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Guijarro, de Ortiz Myriam. "Literacy Activities that Parents of Preschool Children Attending Day Care Promote at Home and Community Settings." Honors in the Major Thesis, University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/760.

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This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf
Bachelors
Education
Exceptional Education
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Alabed, Hadhom Mohamed. "The effects of fasting for a single day, and during Ramadan, upon performance." Thesis, Liverpool John Moores University, 2010. http://researchonline.ljmu.ac.uk/5958/.

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Ramadan requires individuals to abstain from food and fluid intake between sunrise and sunset; physiological considerations predict that poorer mood, physical performance and mental performance will result. In addition, any difficulties will be worsened because preparations for fasting and recovery from it often mean that nocturnal sleep is decreased in length, and this independently affects mood and performance. Previous field studies have indicated that some of these predictions are borne out in practice; in the first study of the present thesis, a field study performed in Libya, these predictions were tested further by adding more physiological measurements and tests of performance. Findings indicated that Ramadan was associated with negative effects upon a wide range of variables, including rising urine daytime osmolality (indicative of progressive dehydration), subjective estimates of amounts of activities actually performed and those wished to be done (indicating less activity in the daytime), and metabolic and subjective responses to a short bout of exercise (increased effort required and metabolism tending towards fat rather than glucose catabolism). Because of the difficulties of performing a battery of tasks in a field study, two laboratory-based experiments were then performed, the second differing from the first in studying a greater range of variables and more time-points during the daytime. These two studies also differed from the situation in Ramadan in that non-Muslim students were volunteers and fasting was performed for only one day. Many of the changes previously found in Ramadan were duplicated in this work, so justifying the use of laboratory experiments lasting one day and using non-Muslim subjects as a model for some of the problems present in Ramadan. However, it was also found that preparations before the fast were often less marked than was the case with Muslims in Ramadan, a difference that can be attributed to subjects' lack of experience of fasting as well as the amount of time spent fasting. A difficulty of interpretation in all these studies was that changes could be due to fasting and/or the length of sleep, which tends to decrease. These two factors were separated in the final experiment, an intervention study performed in the laboratory. This study compared effects of different durations of fasting (4, 8 or 16 h) upon a wide variety of measures (including subjective and objective assessments of performance, dehydration and responses to a short bout of exercise) - but with an unchanged amount of nocturnal sleep and daytime naps not allowed. Many of the negative effects observed in previous studies were present in this experiment also. These findings indicate that fasting was responsible for much of the change previously observed, though some effect of sleep loss, particularly if occurring on successive days (as would occur in Ramadan) cannot be excluded. One finding common to all studies was that tests of performance that had shown variations due to the combination of circadian influences, time awake and sleep loss in other experiments (including grip strength, the Stroop test and accuracy at throwing darts) seemed little affected. Possible reasons for these negative findings are discussed, together with further experiments to separate out effects of sleep loss and fasting, and the role of subjects' experience in studies of fasting. In addition, more detailed studies to investigate changes in sleep and the type and level of physical activities when fasting are proposed.
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Books on the topic "Dry etch"

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Deepak, Ranadive, and Society of Photo-optical Instrumentation Engineers., eds. Dry etch technology: 9-10-September 1991, San Jose, California. Bellingham, Wash: SPIE, 1992.

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Andrews, Mark. Dry suit diver manual. [United States?]: PSA International, 2005.

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Rowney, Eddie. The guide to dry stone walling. [Middlesbrough?]: E. Rowney, 2000.

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Ross, Kathy. Every day is Earth Day. Brookfield, Conn: Millbrook Press, 1994.

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Henry, Mitchell. Any day. Bloomington: Indiana University Press, 1997.

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Ross, Kathy. Every day is Earth Day: A craft book. Brookfield, Conn: Millbrook Press, 1994.

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Ross, Kathy. Every day is Earth Day: A craft book. Brookfield, Conn: Millbrook Press, 1995.

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Edward, Miller. Recycling day. New York: Holiday House, 2015.

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Parker, Marjorie. Jasper's day. Toronto: Kids Can Press, 2002.

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Parker, Marjorie. Jasper's day. Toronto: Kids Can Press, 2002.

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Book chapters on the topic "Dry etch"

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van Roosmalen, A. J., J. A. G. Baggerman, and S. J. H. Brader. "Etch Processes." In Dry Etching for VLSI, 99–135. Boston, MA: Springer US, 1991. http://dx.doi.org/10.1007/978-1-4899-2566-4_6.

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Pearton, S. J., and R. J. Shul. "Dry Etch Damage in Widegap Semiconductor Materials." In Defects in Optoelectronic Materials, 87–143. Boca Raton: CRC Press, 2022. http://dx.doi.org/10.1201/9780367811297-5.

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Mansfield, William M. "Enhancement of Dry-Etch Resistance of Poly(butene-1 sulfone)." In Polymers for High Technology, 317–33. Washington, DC: American Chemical Society, 1987. http://dx.doi.org/10.1021/bk-1987-0346.ch027.

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Claes, Martine, Quoc Toan Le, J. Keldermans, E. Kesters, Marcel Lux, A. Franquet, Guy Vereecke, et al. "Photoresist Characterization and Wet Strip after Low-k Dry Etch." In Solid State Phenomena, 325–28. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/3-908451-46-9.325.

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Schaedeli, U., M. Hofmann, E. Tinguely, and N. Münzel. "A Top-Surface Imaging Approach Based on the Light-Induced Formation of Dry-Etch Barriers." In ACS Symposium Series, 299–317. Washington, DC: American Chemical Society, 1995. http://dx.doi.org/10.1021/bk-1995-0614.ch020.

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Ito, Hiroshi, Mitsuru Ueda, and Mayumi Ebina. "Copolymer Approach to Design of Sensitive Deep-UV Resist Systems with High Thermal Stability and Dry Etch Resistance." In ACS Symposium Series, 57–73. Washington, DC: American Chemical Society, 1989. http://dx.doi.org/10.1021/bk-1989-0412.ch004.

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Claes, M., Vasile Paraschiv, S. Beckx, M. Demand, W. Deweerd, Sylvain Garaud, H. Kraus, et al. "Selective Wet Removal of Hf-Based Layers and Post-Dry Etch Residues in High-k and Metal Gate Stacks." In Solid State Phenomena, 93–96. Stafa: Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/3-908451-06-x.93.

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Breuker, Remco E. "North Korean Slavery and Forced Labor in Present-Day Europe." In The Palgrave Handbook of Global Slavery throughout History, 643–60. Cham: Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-13260-5_36.

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AbstractThis chapter deals with the practice of exploiting North Korean workers in the European Union through human trafficking, forced labor, and the suspension of most personal liberties. As a form of state-driven contemporary slavery, it starts from legal premises: the workers arrive with valid visas, residence permits, and work permits. They then find themselves in a miniaturized reproduction of North Korean society: with their minder came the entire socio-ideological structure of constraint—daily compulsory meetings, confession and criticism sessions, ideology instruction lectures, etc.—, which is recreated in situ in order to legitimize and make practically possible the extraction of labor and the removal of personal freedoms.
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Mohammed, S. G., M. Halliru, J. M. Jibrin, I. Kapran, and H. A. Ajeigbe. "Impact Assessment of Developing Sustainable and Impact-Oriented Groundnut Seed System Under the Tropical Legumes (III) Project in Northern Nigeria." In Enhancing Smallholder Farmers' Access to Seed of Improved Legume Varieties Through Multi-stakeholder Platforms, 81–96. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-15-8014-7_6.

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AbstractTropical Legumes III project as a development intervention focused on enhancing smallholder farmers’ access to seeds of improved groundnut varieties using multi-stakeholder platforms. Open Data Kit was used to collect information from the platform members using structured questionnaires and focus group discussions (FGDs). Descriptive statistics and adoption score were used to analyze the data. Selection of appropriate project location, reliable beneficiaries, timely supply of seeds, and training on good agronomic practices (GAPs) and effective supervision on production were the major thrusts of the TL III project. The results indicated that the IP members accrued additional income ranging from $214 to $453 per hectare for wet season. The same increase in beneficiaries’ income was reported per hectare for dry season from $193 to $823, respectively; all due to the TL III intervention. The results further indicated increasing access by farmers to services (e.g., improved seeds, extension, credit facilities, market, etc.) and enhanced productivity (farm size, pod and haulm yields). Findings further revealed an average increased market price of 21.5% and 18% for dry and wet season groundnut production, respectively. There was high adoption score (78%) of improved seeds and other GAPs. The study recommends the need to replicate similar interventions in other areas. Continued capacity building on GAPs and improved business management skills to Extension Agents and farmer groups will sustain the successes achieved by the TL III project.
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Leape, Lucian L. "A Community of Concern: The Massachusetts Coalition for the Prevention of Medical Errors." In Making Healthcare Safe, 105–25. Cham: Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-71123-8_8.

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AbstractOne day in January 1997, John Noble, an internist from Boston City Hospital who I knew from somewhere—perhaps residency days—walked into my office and said, “We should form a state coalition for the prevention of medical errors.” His idea was to bring to the table the key players in health who tended not to talk much with one another—regulators and the regulated, academics and practitioners, etc.
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Conference papers on the topic "Dry etch"

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Cho, Kyoung Y., and Dong W. Im. "ECR plasma and etch characterization of photoresist dry etch processes." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56918.

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Turner, Terry R. "Correlation of real-time-monitored process module parameters and wafer results." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56921.

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Nulty, James E., and Joseph A. Maher. "Application-specific integrated processing for ULSI." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56920.

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Yoneda, Masahiro, K. Kawai, Hiroshi Miyatake, Nobuo Fujiwara, K. Nishioka, and Haruhiko Abe. "Evaluation of silicon surface damage induced by plasma radiation." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56910.

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Namura, Takashi, Hirofumi Uchida, Hiroyuki Okada, Atsushi Koshio, Satoshi Nakagawa, Yoshihiro Todokoro, and Morio Inoue. "Wafer charging in different types of plasma etchers." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56911.

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Hasan, Zia, Joseph A. Maher, James E. Nulty, and Larry Krynski. "In-situ auto ash: a key to reducing process-generated particles." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56912.

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Reinhardt, Karen A., and Francois M. Dumesnil. "Characterization of silicon damage during LDD oxide spacer etch with the use of thermal-wave-modulated reflectance." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56913.

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Miyatake, Hiroshi, K. Kawai, Nobuo Fujiwara, Masahiro Yoneda, K. Nishioka, and Haruhiko Abe. "Surface contamination control during plasma etching." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56914.

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Tanimoto, Keisuke, Hiroyuki Komeda, Daisuke Takehara, Ryohei Kawabata, and Hikou Shibayama. "Consideration on the resolution limit of the resist silylated process." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56915.

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Nicolau, Dan V., Gheorghita Jinescu, Florin Fulga, and Mircea V. Dusa. "Mathematical model of the plasma etching of resists containing silicon." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56916.

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Reports on the topic "Dry etch"

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Ohta, Taisuke. LaB6 nanostructures - wet vs dry etch. Office of Scientific and Technical Information (OSTI), January 2019. http://dx.doi.org/10.2172/1491599.

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Zhang, Linlin, Xiaoming Xi, Xihua Liu, Xinjie Qu, Qing Wang, Haihao Cao, Limin Wang, et al. Should aerobic and resistance training interventions for Multiple sclerosis be performed on the same day: A protocol for systematic review and network meta-analysis. INPLASY - International Platform of Registered Systematic Review and Meta-analysis Protocols, December 2021. http://dx.doi.org/10.37766/inplasy2021.12.0126.

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Review question / Objective: P (Population) : patients diagnosed with multiple sclerosis; I (Intervention) : aerobic training and resistance training; C (Comparison) : the efficacy and safety were compared on the same day and different days; O (Outcome) : Evaluates dysfunction, quality of life, fatigue, aerobic capacity or muscle function, mood, cognition, and safety. S (Study Design) : Systematic review and Network meta-analysis. Eligibility criteria: Measures in the intervention group: aerobic training (taijiquan, Baduanjin, qigong, yoga, swimming, cycling, jogging, brisk walking, etc.) and resistance training were used simultaneously, including studies conducted on the same day and on different days. There are no restrictions on training time, frequency and intensity.Control group measures: no intervention or conventional treatment.
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Marlow, Thomas. PR-000-18COMP-R03 Damage Prevention Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011548.

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The PRCI Technical Committees have carried many research projects related to the subject of Damage Prevention. This report; therefore, presents a summary of past PRCI-funded studies in the area of Damage Prevention. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day damage prevention issues.
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Greaney, Carrie. PR-000-18COMP-R04 Geohazards Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011549.

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The PRCI Technical Committees have carried many research projects related to the subject of Geohazards. This report; therefore, presents a summary of past PRCI-funded studies in the area of Geohazards. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day Geohazard issues.
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Marlow, Thomas, Laurie Perry (Archived), and Carrie Greaney. PR-000-18COMP-R05 Horizontal Directional Drilling Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011550.

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The PRCI Technical Committees have carried many research projects related to the subject of horizontal directional drilling (HDD). This report; therefore, presents a summary of past PRCI-funded studies in the area of HDD. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day HDD issues.
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Marlow, Thomas. PR-000-18COMP-R06 Pipeline Repair Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011551.

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The PRCI Technical Committees have carried many research projects related to the subject of Pipeline Repairs. This report; therefore, presents a summary of past PRCI-funded studies in the area of Pipeline Repairs. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day Pipeline Repair issues.
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Marlow, Thomas. PR-000-18COMP-R02 Composite Repairs Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011547.

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The PRCI Technical Committees have carried many research projects related to the subject of Composite Repairs. This report; therefore, presents a summary of past PRCI-funded studies in the area of Composite Repairs. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day composite repair issues.
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Choquette, Gary. PR-000-18COMP-R01 Gas Engine Emissions Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 2019. http://dx.doi.org/10.55274/r0011546.

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The PRCI Technical Committees have carried out many research projects related to the subject of natural gas fueled engine emissions. This report, therefore, presents a summary of past PRCI funded studies in the area of Gas Engine Emissions. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day Gas Engine Emissions issues.
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Choquette, Gary. PR-000-21COMP-R04 Valve Spacing and Automation Compendium. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), September 2021. http://dx.doi.org/10.55274/r0012149.

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The PRCI Technical Committees have carried multiple research projects related to the subject of valve spacing and automation. This report, therefore, presents a summary of past PRCI funded studies in the area of valve spacing and automation. Since not all studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their current day-to-day valve spacing, the related noise issues, and automation issues.
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Ripey, Mariya. NUMBERS IN THE NEWS TEXT (BASED ON MATERIAL OF ONE ISSUE OF NATIONWIDE NEWSPAPER “DAY”). Ivan Franko National University of Lviv, March 2021. http://dx.doi.org/10.30970/vjo.2021.50.11106.

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The article is devoted to the analysis of the digital content of publications of one issue of the daily All-Ukrainian newspaper “Den” (March 13-14, 2020). The author aims to identify the main thematic groups of digital designations, as well as to consider cases of justified and unsuccessful use of digital designations. Applying the content analysis method, the author identifies publications that contain numerical notations, determines the number of such notations and their affiliation with the main subject groups. Finds that the thematic group of digital designations “time” (58.6% of all digital designations) is much more dominant. This indicates that timing is the most important task of a newspaper text. The second largest group of digital designations is “measure” (15.8% of all digital designations). It covers dimensions and proportions, measurements of distance, weight, volume, and more. The third largest group of digital signage is money (8.2% of all digital signage), the fourth is numbering (5.2% of all digital signage), and the fifth is people (4.4% of all digital signage). The author focuses on the fact that the digits of the journalist’s text are both a source of information and a catch for the reader. Vivid indicators give the text a sense of accuracy. When referring digital data to the text, journalists must adhere to certain rules for the writing of ordinal numbers with incremental graduation; submission of dates; pointing to unique integers that are combined (or not combined) with units of physical quantities, monetary units, etc.; writing a numerator at the beginning of a sentence; unified presentation of data. This will greatly facilitate the reader’s perception of the information.
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