Relevant bibliographies by topics / Distributed voltage observer

Academic literature on the topic 'Distributed voltage observer'

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Published: 6 September 2023

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Journal articles on the topic "Distributed voltage observer"

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Liu, Jiayu, Min Tang, Jian Zhou, Qiqi Zhang, and Luyuan Zhang. "A novel distributed secondary voltage control method for AC microgrids based on voltage observer." Journal of Physics: Conference Series 2237, no. 1 (March 1, 2022): 012019. http://dx.doi.org/10.1088/1742-6596/2237/1/012019.

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Abstract Since the islanded AC Microgrid is affected by the impedance of line, it is difficult to coordinate the voltage regulation and reactive load distribution. A distributed secondary voltage controller based on observer is proposed for isolated AC Microgrids, and it does not need more voltage communications. This method can guarantee the estimated average voltage equals to average of actual output voltages that can converge to the nominal values, and realize accurate proportional load sharing in a microgrid. Then, the convergence of the voltage observer is proved. Finally, the proposed control method is verified by time-domain simulation.
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Liu, Weirong, Yu Song, Hongtao Liao, Heng Li, Xiaoyong Zhang, Yun Jiao, Jun Peng, and Zhiwu Huang. "Distributed Voltage Equalization Design for Supercapacitors Using State Observer." IEEE Transactions on Industry Applications 55, no. 1 (January 2019): 620–30. http://dx.doi.org/10.1109/tia.2018.2868539.

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Ghazzali, Mohamed, Mohamed Haloua, and Fouad Giri. "Fixed-time observer-based distributed secondary voltage and frequency control of islanded AC microgrids." International Journal of Electrical and Computer Engineering (IJECE) 10, no. 5 (October 1, 2020): 4522. http://dx.doi.org/10.11591/ijece.v10i5.pp4522-4533.

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This paper deals with the problem of voltage and frequency control of distributed generators (DGs) in AC islanded microgrids. The main motivation of this work is to obviate the shortcomings of conventional centralized and distributed control of micro-grids by providing a better alternative control strategy with better control performance than state-of-the art approaches. A distributed secondary control protocol based on a novel fixed-time observer-based feedback control method is designed for fixed-time frequency and voltage reference tracking and disturbance rejection. Compared to the existing secondary microgrid controllers, the proposed control strategy ensures frequency and voltage reference tracking and disturbance rejection before the desired fixed-time despite the microgrid initial conditions, parameters uncertainties and the unknown disturbances. Also, the controllers design and tuning is simple, straightfor-ward and model-free.i.e, the knowledge of the microgrid parameters, topology, loads or transmission lines impedance are not needed in the design procedure. The use of distributed control approach enhances the reliability of the system by making the control system geographically distributed along with the power sources, by using the neighboring DGs informations instead of the DG’s local informations only and by cooperatively rejecting external disturbances and maintaining the frequency and the voltage at their reference values at any point of the microgrid. The efficiency of the proposed approach is verified by comparing its performance in reference tracking and its robustness to load power variations to some of the works in literature that addressed distributed secondary voltage and frequency control.
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Yang, Chengshun, Tao Hua, Yuchen Dai, Guofu Liu, Xiaoning Huang, and Dongdong Zhang. "Disturbance-Observer-Based Adaptive Fuzzy Control for Islanded Distributed Energy Resource Systems." Mathematical Problems in Engineering 2022 (February 3, 2022): 1–12. http://dx.doi.org/10.1155/2022/1527705.

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With the aim to improve the antidisturbance ability of the islanded distributed energy resource (DER) systems, a disturbance-observer-based adaptive fuzzy sliding mode control (DAFSC) voltage controller is designed based on indirect vector control, which implements the voltage tracking and improves the self-regulation ability of the islanded DER systems. Firstly, the circuit diagram and the mathematical model of the DER system are presented. Then, the second-order sliding mode differentiator is designed to solve the problem of calculation expansion in the backstepping control method. To solve the influence of lumped disturbance on the system, a disturbance-observer is proposed to observe the unknown disturbance and compensate the controller feed-forward. Moreover, fuzzy control is proposed to reduce the dependence of the control effect on model accuracy. Finally, the stability of the controller is verified by Lyapunov stability theory, and the hardware in the loop results is given to verify that the control effect of the proposed DAFC controller has better dynamic performance compared with proportion-integral (PI) and the backstepping control strategy.
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Mao, Jingfeng, Chunyun Yin, Xiaotong Zhang, Aihua Wu, and Xudong Zhang. "Learning Observer-Based Sensor Fault-Tolerant Control of Distributed Generation in an Islanded Microgrid for Bus Voltage Stability Enhancement." Sensors 22, no. 18 (September 13, 2022): 6907. http://dx.doi.org/10.3390/s22186907.

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In order to improve robust operating performance and enhance bus voltage stability, a learning observer-based fault-tolerant control strategy is proposed for the distributed generation in islanded microgrid with sensor faults and uncertain disturbances. Firstly, the output feedback control theory and the linear matrix inequality method are used to design closed-loop controller for the voltage source inverter of distributed generation; secondly, a fault-tolerant model and control structure of the distributed generation in an islanded microgrid with sensor faults is analyzed. By employing the fault output signal conversion filter and proportional derivative type learning observer, the online estimation and real-time compensation of the sensor fault signal are realized. Thirdly, the system synthesis of output feedback control and fault-tolerant control is completed. Finally, the multi-scenario sensor fault scheme simulation experiment verifies that the proposed control strategy has strong sensor fault tolerance and adaptability.
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Xia, Yan, Yuchen Dai, Wenxu Yan, Dezhi Xu, and Chengshun Yang. "Adaptive-Observer-Based Data Driven Voltage Control in Islanded-Mode of Distributed Energy Resource Systems." Energies 11, no. 12 (November 26, 2018): 3299. http://dx.doi.org/10.3390/en11123299.

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In this paper, an adaptive observer based data driven control scheme is proposed for the voltage control of dispatchable distributed energy resource (DER) systems which work in islanded operation. In the design procedure of the proposed control scheme, we utilize the novel transformation and linearization technique for the islanded DER system dynamics, which is proper for the proposed data driven control algorithm. Moreover, the pseudo partial derivative (PPD) parameter matrix can be estimated online by multiple adaptive observers. Then, the adaptive constrained controller is designed only based on the online identification results derived from the input/output (I/O) data of the controlled DER system. It is theoretically proven that all the signals in the closed-loop control system are uniformly ultimately bounded based on the Lyapunov stability analysis approach. In addition, the results of the simulation comparison are given to verify the voltage control effect of the proposed control scheme.
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Yang, Minsheng, and Pengcheng Liu. "Research on Sliding Mode Control of Dual Active Bridge Converter Based on Linear Extended State Observer in Distributed Electric Propulsion System." Electronics 12, no. 16 (August 20, 2023): 3522. http://dx.doi.org/10.3390/electronics12163522.

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This paper focuses on the high-performance bidirectional DC-DC converter required in distributed electric propulsion (DEP) systems, with the dual active bridge (DAB) converter chosen as the subject of study. To achieve the goal of stabilizing the output voltage while improving the converter’s anti-interference ability and dynamic performance, this paper proposes a novel strategy. In particular, it combines the Linear Extended State Observer (LESO) with a sliding mode control (SMC), proposing a sliding mode control strategy based on the Linear Extended State Observer (LESO-SMC). Notably, this control strategy not only retains the fast dynamic performance of Linear Active Disturbance Rejection Control (LADRC) and the robustness of SMC but also addresses the significant chattering issue inherent in traditional SMC. Comparing the traditional PI, LADRC, and SMC strategies, the results show that when the load changes, the voltage fluctuation of the LESO-SMC strategy proposed in this paper is 0.165 V (0.25 V) in the Matlab/Simulink and RT-Lab platforms, and the average adjustment time is 4 ms (3.5 ms). In contrast, the average voltage fluctuations of PI and LADRC strategies were 3.7 V (4.9 V) and 0.55 V (1.35 V), and the average adjustment times were 99.5 ms (201 ms) and 71.5 ms (77.5 ms), respectively. When the input voltage changes, the proposed LESO-SMC strategy adjusts faster and has almost no voltage fluctuations, while the average voltage fluctuations of the PI and LADRC strategies in the simulation are 0.5 V and 0.1 V, and the average adjustment times are 89.5 ms and 35 ms, and the change in the input voltage in the RT-Lab platform has very little effect on the output voltage. Compared with SMC, the LESO-SMC strategy has no chattering problem. In summary, compared to the other three control strategies, the LESO-SMC strategy proposed in this paper exhibits superior performance in terms of voltage fluctuation and adjustment time during load changes and input voltage changes. It shows a robust anti-interference ability and a rapid dynamic response performance.
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Phan, Dinh Hieu, Minh Tuan Dao, Van Truong Nguyen, Huy Anh Bui, Ngoc Duy Le, and Thanh Lam Bui. "Design of super-twisting algorithm control and observer for three-phase inverter in standalone operation." International Journal of Power Electronics and Drive Systems (IJPEDS) 13, no. 1 (March 1, 2022): 368. http://dx.doi.org/10.11591/ijpeds.v13.i1.pp368-379.

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This paper develops a new control algorithm of a distributed generation system in the standalone operation. Behaviour of three-phase voltage source inverter is investigated and the guidelines for tuning the control parameters are presented. Based on Super-Twisting algorithm, the proposed controller guarantees the load voltage performance under different types of loads. The proposed controller is established for an inner-loop current controller and an outer-loop voltage controller in a dual control scheme. The proposed scheme is very simple, thus tuning control parameters is easy and the computational burden of the controllers is low. In order to validate the load current of the proposed system feasibility, a reduced-order observer is adopted. The simulation results indicate a more reliable and efficient performance compared to the standard sliding control and the adaptive control.
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Ge, Pudong, Xiaobo Dou, Xiangjun Quan, Qinran Hu, Wanxing Sheng, Zaijun Wu, and Wei Gu. "Extended-State-Observer-Based Distributed Robust Secondary Voltage and Frequency Control for an Autonomous Microgrid." IEEE Transactions on Sustainable Energy 11, no. 1 (January 2020): 195–205. http://dx.doi.org/10.1109/tste.2018.2888562.

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Narzary, Daijiry, and Kalyana C. Veluvolu. "Higher Order Sliding Mode Observer-Based Sensor Fault Detection in DC Microgrid’s Buck Converter." Energies 14, no. 6 (March 12, 2021): 1586. http://dx.doi.org/10.3390/en14061586.

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Fault detection in a Direct Current (DC) microgrid with multiple interconnections of distributed generation units (DGUs) is an interesting topic of research. The occurrence of any sensor fault in the DC microgrid should be detected immediately by the fault detection network to achieve an overall stable performance of the system. This work focuses on sensor fault diagnosis of voltage and current sensors in interconnected DGUs of the microgrid. Two separate higher order sliding mode observers (HOSM) based on model dynamics are designed to estimate the voltage and current and generate the residuals for detecting the faulty sensors in DGUs. Multiplicative single and multiple sensor faults are considered in voltage and current sensors. By appropriate selection of threshold, single and multiple sensor fault detection strategies are formulated. A hierarchical controller is designed to ensure equal sharing of current among the DGUs of the DC microgrid and stabilize the system. Simulations are performed to validate the proposed approach for various configurations of the DC microgrid under various load and off noise conditions.
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Dissertations / Theses on the topic "Distributed voltage observer"

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Al, Hosani Mohamed. "Transient and Distributed Algorithms to Improve Islanding Detection Capability of Inverter Based Distributed Generation." Doctoral diss., University of Central Florida, 2013. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/6235.

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Recently, a lot of research work has been dedicated toward enhancing performance, reliability and integrity of distributed energy resources that are integrated into distribution networks. The problem of islanding detection and islanding prevention (i.e. anti-islanding) has stimulated a lot of research due to its role in severely compromising the safety of working personnel and resulting in equipment damages. Various Islanding Detection Methods (IDMs) have been developed within the last ten years in anticipation of the tremendous increase in the penetration of Distributed Generation (DG) in distribution system. This work proposes new IDMs that rely on transient and distributed behaviors to improve integrity and performance of DGs while maintaining multi-DG islanding detection capability. In this thesis, the following questions have been addressed: How to utilize the transient behavior arising from an islanding condition to improve detectability and robust performance of IDMs in a distributive manner? How to reduce the negative stability impact of the well-known Sandia Frequency Shift (SFS) IDM while maintaining its islanding detection capability? How to incorporate the perturbations provided by each of DGs in such a way that the negative interference of different IDMs is minimized without the need of any type of communication among the different DGs? It is shown that the proposed techniques are local, scalable and robust against different loading conditions and topology changes. Also, the proposed techniques can successfully distinguish an islanding condition from other disturbances that may occur in power system networks. This work improves the efficiency, reliability and safety of integrated DGs, which presents a necessary advance toward making electric power grids a smart grid.
Ph.D.
Doctorate
Electrical Engineering and Computer Science
Engineering and Computer Science
Electrical Engineering
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Salve, Rima. "PV Based Converter with Integrated Battery Charger for DC Micro-Grid Applications." Thesis, 2014. http://hdl.handle.net/1805/6108.

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Indiana University-Purdue University Indianapolis (IUPUI)
This thesis presents a converter topology for photovoltaic panels. This topology minimizes the number of switching devices used, thereby reducing power losses that arise from high frequency switching operations. The control strategy is implemented using a simple micro-controller that implements the proportional plus integral control. All the control loops are closed feedback loops hence minimizing error instantaneously and adjusting efficiently to system variations. The energy management between three components, namely, the photovoltaic panel, a battery and a DC link for a microgrid, is shown distributed over three modes. These modes are dependent on the irradiance from the sunlight. All three modes are simulated. The maximum power point tracking of the system plays a crucial role in this configuration, as it is one of the main challenges tackled by the control system. Various methods of MPPT are discussed, and the Perturb and Observe method is employed and is described in detail. Experimental results are shown for the maximum power point tracking of this system with a scaled down version of the panel's actual capability.
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Conference papers on the topic "Distributed voltage observer"

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Song, Guanhong, Bo Cao, Liuchen Chang, and Riming Shao. "A Novel Adaptive Observer-Based DC-Link Voltage Control for Grid-Connected Power Converters." In 2019 IEEE 10th International Symposium on Power Electronics for Distributed Generation Systems (PEDG). IEEE, 2019. http://dx.doi.org/10.1109/pedg.2019.8807736.

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Huang, Lei, Wei Sun, Ziran Yan, Qiyue Li, and Weitao Li. "Average Voltage Observer Based Distributed Secondary Sliding Mode Control with Reactive Power Sharing for Microgrids." In 2023 IEEE 6th International Electrical and Energy Conference (CIEEC). IEEE, 2023. http://dx.doi.org/10.1109/cieec58067.2023.10166907.

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Dey, Satadru, Beshah Ayalew, and Pierluigi Pisu. "Estimation of Lithium-Ion Concentrations in Both Electrodes of a Lithium-Ion Battery Cell." In ASME 2015 Dynamic Systems and Control Conference. American Society of Mechanical Engineers, 2015. http://dx.doi.org/10.1115/dscc2015-9693.

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For control and estimation tasks in battery management systems, the benchmark Li-ion cell electrochemical pseudo-two-dimensional (P2D) model is often reduced to the Single Particle Model (SPM). The original SPM consists of two electrodes approximated as spherical particles with spatially distributed Li-ion concentration. However, the Li-ion concentration states in these two-electrode models are known to be weakly observable from the voltage output. This has led to the prevalent use of reduced models in literature that generally approximate Li-ion concentration states in one electrode as an algebraic function of that in the other electrode. In this paper, we remove such approximations and show that the addition of the thermal model to the electrochemical SPM essentially leads to observability of the Li-ion concentration states in both electrodes from voltage and temperature measurements. Then, we propose an estimation scheme based on this SPM coupled with lumped thermal dynamics that estimates the Li-ion concentrations in both electrodes. Moreover, these Li-ion concentration estimates also enable the estimation of the cell capacity. The estimation scheme consists of a sliding mode observer cascaded with an Unscented Kalman filter (UKF). Simulation studies are included to show the effectiveness of the proposed scheme.
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Mayyas, Mohammad, and Panos Shiakolas. "A Study on the Thermal Behavior of Electrothermal Microactuators Due to Various Voltage Inputs." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-15321.

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The steady state temperature profiles of U- and I-shaped electrothermal microactuators are analytically derived. The temperature profiles could be used to evaluate the performance sensitivity of the microactuator due to various parameter changes. In this work, the analysis assumes an unpackaged silicon microactuator with an air gap between the actuator and substrate and the profiles are evaluated for various input voltage amplitudes. It was found that at low voltage inputs the temperature profile is exponential in nature with the failure being due to thermo-structural stresses and/or structure melting. At voltages larger than a critical value, a combined sinusoidal and exponential temperature profile is observed with the failure being strongly due to structural melting as well. However, higher voltage excitation causes a fully distributed sinusoidal temperature profile. In this mode, failures occur at different locations and due to high localized thermal stresses causing the temperature to exceed the material melting point. The behavior of U- and I-shaped microactuators based on silicon on insulator (SOI) fabrication and femtosecond laser micromachining was experimentally examined with the results corroborating the conclusions drawn from the analysis.
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ChiuHuang, Cheng-Kai, Chuanzhen Zhou, and Hsiao-Ying Shadow Huang. "Exploring Lithium-Ion Intensity and Distribution via a Time-of-Flight Secondary Ion Mass Spectroscopy." In ASME 2013 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/imece2013-63013.

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For high rate-capability and low cost lithium-ion batteries, the prevention of capacity loss is one of major challenges facing by lithium-ion batteries today. During electrochemical processes, lithium ions diffuse from and insert into battery electrodes accompanied with the phase transformation, where ionic diffusivity and concentration are keys to the resultant battery capacity. In the current study, we first compare voltage vs. capacity curves at different C-rates (1C, 2C, 6C, 10C). Second, lithium-ion distributions and intensity are quantified via the Time-of-Flight Secondary Ion Mass Spectroscopy (ToF-SIMS). The result shows that voltage vs. capacity relations are C-rate dependent and larger hystereses are observed in the higher C-rate samples. Detailed quantification of lithium-ion intensity for the 1C sample is conducted. It is observed that lithium-ions are distributed uniformly inside the electrode. Therefore, the current study provides a qualitative and quantitative data to better understand C-rate dependent phenomenon of LiFePO4 battery cells.
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Rudd, Jonathan, Dustin Spayde, and Oliver Myers. "Experimental Nondestructive Testing Using Magnetostrictive Particles Embedded in Carbon Fiber Reinforced Polymer Beams." In ASME 2012 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/smasis2012-8010.

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In this paper, the experimental sensing results of damage testing using magnetostrictive particulate sensors, embedded in fiber reinforced polymer laminates, are presented. Carbon fiber reinforced polymer (CFRP) laminates (Hexcel AS4/3501-6) are embedded with terfenol-d particles and the ply count is varied to observe the change in the sensing. Sensing is observed using a non-contacting magnetostrictive strain sensor setup. The sensing parameter observed is the voltage induced in the secondary circuit. Two of the three batches presented have laminates that are embedded with .5″×.5″, release agent coated patches that prevent bonding between the terfenol-d and the CFRP layer. The laminate ply count ranges from 2–14 unidirectional plies. Two fabrication methods are used to distribute the particles in the laminate. The experimental results from the three batches reveal that the fabrication technique has a significant effect on the sensing signal. The effect of particle accumulation near the sensor dominates the sensing signal and makes the presence of a delamination difficult to assess. The experiments also show that when the ply count is varied, there is not much variation in the sensing signal.
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Ramlee, Raudhah Izatee, and Ahmad Fateh Mohamad Nor. "Voltage Stability Analysis of Electric Power System with Integration of Renewable Energy." In Conference on Faculty Electric and Electronic 2020/1. Penerbit UTHM, 2020. http://dx.doi.org/10.30880/eeee.2020.01.01.011.

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This study presents an analysis of voltage stability of the electrical power system with the integration of renewable energy and the improvement of the conventional analysis using the artificial neural network (ANN), which is mainly focused on the effect of distributed generator-solar (DG-Solar) towards the electric power system. Real power and reactive power margins of both voltage stability are expressed as VSM (P) and VSM (Q), respectively. They are obtained from the actual power-voltage (PV) and reactive-power (QV) curve, which is created for each series by a series of load flows by incrementing P and Q load. Then, the system will integrate with 5MW, 50MW and 100MW of DG-Solar to compare the electric power system before and after the integration. The results are observed and compared for both situations. After that, an analysis improvement is made by using ANN-based model to predict the values of VSM (P) and VSM (Q) without having to perform PV QV Curve and calculate VSM (P) and VSM (Q). IEEE 30-bus was chosen as the electrical power system. The load flow analysis and ANN-based model are simulated and developed by using MATLAB software.
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Zare, Saeid, and Omid Askari. "Instability Study of Repetitive Nanosecond Pulsed Discharge Plasma in a Plasma Assisted Burner." In ASME 2020 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/imece2020-24304.

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Abstract High velocity flows, as in aerospace applications require special techniques to stabilize and ignite diffusion flames. Some techniques focus on changing parameters like geometry, conditions of the flow, or fuel composition, but these techniques are usually too expensive or impossible due to major changes in the system. On the other hand, some techniques focus on generating a region of charged/excited species and active radicals upstream of the flame. That can substantially enhance the flame stability even under high strain rate or at lean-limit-flammability conditions. Repetitive nanosecond pulsed (RNP) discharge plasma is a nonthermal plasma technique with some remarkable potential to improve stability and ignitability of high velocity diffusion flames. This technique was used in previous papers in a plasma assisted coaxial inverse diffusion burner and showed some promising results by reducing the lift-off height and delaying detachment and blowout conditions. This burner is prepared to employ the discharges at the burner nozzle and simulate a single element of a multi-element methane burner. However, effectiveness of high-voltage high-frequency RNP plasma was limited by the mode of the discharge. During the tests, three different modes were observed at different combinations of plasma and flow conditions. These three modes are low energy corona, uniformly distributed plasma, and high-energy point-to-point discharge. Among these three, only well-distributed plasma significantly improved the flame. In other cases, plasma deployment was either ineffective or in some cases adversely affected the flame by producing undesirable turbulence advancing blow out. As a result, a comprehensive study of these modes is required. In this work, the transition between these three modes in a jet flame was discussed. It has been expressed as a function of plasma conditions, i.e. peak discharge voltage and discharge frequency. It was shown that increasing flow speed delays increases the voltage and frequency at which transition occurs from low-energy corona discharge to well distributed plasma discharge. Subsequently, the effective plasma conditions are thinned. On the other hand, by increasing the frequency of nanosecond discharges, the chance of unstable point-to-point discharges is decreased. In contrast, the discharge peak voltage causes two different consequences. If it is too low, the pulse intensity is too week that the system will experience no visible plasma discharges or the discharges will not pass the low-energy corona, no matter how high the frequency is. If too high, it will enhance the chance of point-to-point discharges and limits the stabilization outcome of the system. Therefore, an optimal region is found for peak discharge voltage.
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R. Utech, Guilherme, and Rafael R. Obelheiro. "Investigando o Uso de CoAP em ataques DRDoS." In XVIII Escola Regional de Redes de Computadores. Sociedade Brasileira de Computação - SBC, 2020. http://dx.doi.org/10.5753/errc.2020.15197.

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Ataques distribuídos de negação de serviço por reflexão (Distributed Reflection Denial of Service, DRDoS) são ataques realizados pela Internet que visam saturar vítimas com tráfego de rede, causando assim a indisponibilidade de serviços e/ou da própria rede. Um dos protocolos mais recentes no cenários de DRDoS é o CoAP (Constrained Application Protocol), voltado a dispositivos IoT. Este trabalho descreve um honeypot desenvolvido para observar ataques DRDoS usando o CoAP, e apresenta uma análise preliminar de dados coletados pelo honeypot durante um período de cinco meses.
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Kumar, Karthik, Luis P. Bernal, Seow Yuen Yee, Ali Besharatian, and Khalil Najafi. "Transient Performance and Coupled Acoustic Structural and Electrostatic Modeling of a Multistage Vacuum Micropump." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-64548.

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This paper describes the theoretical analysis used to design of a multistage peristaltic vacuum micro pump, comprising of two parts. First, three different designs for a 16 stage micropump to achieve a vacuum of 250 torr are investigated. One design produces an equal pressure distribution across each stage at steady state. A second design has equal volume ratio across each stage. The third design is a combination of the other two. The transient behavior of these designs is analyzed using a reduced order model. In the first two designs when the pressure difference across the pump is low most pumping occurs across the first few stages, while for the third design the load is almost equally distributed across all stages. The opposite is observed when the pressure difference across the pump is high. In the second part of the paper, the reduced order model is further developed to account for the effects of electrostatic actuation and membrane dynamics. A non-linear model is proposed for the motion of the membrane and used to study the steady state performance and resonance of a multistage vacuum micro pump as a function of input voltage. It is found that near the acoustic frequency, a lower voltage is required to produce a greater flow.
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