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Academic literature on the topic 'CMUT arrays'

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Published: 10 March 2023

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Journal articles on the topic "CMUT arrays"

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Wang, Ziyuan, Changde He, Wendong Zhang, Yifan Li, Pengfei Gao, Yanan Meng, Guojun Zhang, et al. "Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding." Micromachines 13, no. 1 (January 8, 2022): 99. http://dx.doi.org/10.3390/mi13010099.

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Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent array devices were isolated by an isolation slot, which was cut through the silicon film. The CMUT device fabricated following this process is a 4 × 16 array with a single element size of 1 mm × 1 mm. Device performance tests were conducted, where the center frequency of the transducer was 3.8 MHz, and the 6 dB fractional bandwidth was 110%. The static capacitance (29.4 pF) and center frequency (3.78 MHz) of each element of the array were tested, and the results revealed that the array has good consistency. Moreover, the transmitting and receiving performance of the transducer was evaluated by acoustic tests, and the receiving sensitivity was −211 dB @ 3 MHz, −213 dB @ 4 MHz. Finally, reflection imaging was performed using the array, which provides certain technical support for the research of two-dimensional CMUT arrays in the field of 3D ultrasound imaging.
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Yashvanth, Varshitha, and Sazzadur Chowdhury. "An Investigation of Silica Aerogel to Reduce Acoustic Crosstalk in CMUT Arrays." Sensors 21, no. 4 (February 19, 2021): 1459. http://dx.doi.org/10.3390/s21041459.

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This paper presents a novel technique to reduce acoustic crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. The technique involves fabricating a thin layer of diisocyanate enhanced silica aerogel on the top surface of a CMUT array. The silica aerogel layer introduces a highly nanoporous permeable layer to reduce the intensity of the Scholte wave at the CMUT-fluid interface. 3D finite element analysis (FEA) simulation in COMSOL shows that the developed technique can provide a 31.5% improvement in crosstalk reduction for the first neighboring element in a 7.5 MHz CMUT array. The average improvement of crosstalk level over the −6 dB fractional bandwidth was 22.1%, which is approximately 5 dB lower than that without an aerogel layer. The results are in excellent agreement with published experimental results to validate the efficacy of the new technique.
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Atalar, Abdullah, Hayrettin Köymen, and H. Kaan Oğuz. "Rayleigh–bloch waves in CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61, no. 12 (December 2014): 2139–48. http://dx.doi.org/10.1109/tuffc.2014.006610.

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Demirci, U., A. S. Ergun, O. Oralkan, M. Karaman, and B. T. Khuri-Yakub. "Forward-viewing CMUT arrays for medical imaging." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, no. 7 (July 2004): 887–95. http://dx.doi.org/10.1109/tuffc.2004.1320749.

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Oralkan, O., A. S. Ergun, Ching-Hsiang Cheng, J. A. Johnson, M. Karaman, T. H. Lee, and B. T. Khuri-Yakub. "Volumetric ultrasound imaging using 2-D CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 50, no. 11 (November 2003): 1581–94. http://dx.doi.org/10.1109/tuffc.2003.1251142.

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Caronti, Alessandro, G. Caliano, R. Carotenuto, A. Savoia, M. Pappalardo, E. Cianci, and V. Foglietti. "Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging." Microelectronics Journal 37, no. 8 (August 2006): 770–77. http://dx.doi.org/10.1016/j.mejo.2005.10.012.

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Pei, Yu, Guojun Zhang, Yu Zhang, and Wendong Zhang. "Breast Acoustic Parameter Reconstruction Method Based on Capacitive Micromachined Ultrasonic Transducer Array." Micromachines 12, no. 8 (August 14, 2021): 963. http://dx.doi.org/10.3390/mi12080963.

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Ultrasound computed tomography (USCT) systems based on capacitive micromachined ultrasonic transducer (CMUT) arrays have a wide range of application prospects. For this paper, a high-precision image reconstruction method based on the propagation path of ultrasound in breast tissue are designed for the CMUT ring array; that is, time-reversal algorithms and FBP algorithms are respectively used to reconstruct sound speed distribution and acoustic attenuation distribution. The feasibility of this reconstruction method is verified by numerical simulation and breast model experiments. According to reconstruction results, sound speed distribution reconstruction deviation can be reduced by 53.15% through a time-reversal algorithm based on wave propagation theory. The attenuation coefficient distribution reconstruction deviation can be reduced by 61.53% through FBP based on ray propagation theory. The research results in this paper will provide key technological support for a new generation of ultrasound computed tomography systems.
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Oguz, H. Kagan, A. Atalar, and H. Koymen. "Equivalent circuit-based analysis of CMUT cell dynamics in arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 60, no. 5 (May 2013): 1016–24. http://dx.doi.org/10.1109/tuffc.2013.2660.

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Satir, Sarp, and F. Levent Degertekin. "A nonlinear lumped model for ultrasound systems using CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 62, no. 10 (October 2015): 1865–79. http://dx.doi.org/10.1109/tuffc.2015.007145.

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Jung, Gwangrok, Coskun Tekes, Amirabbas Pirouz, F. Levent Degertekin, and Maysam Ghovanloo. "Supply-Doubled Pulse-Shaping High Voltage Pulser for CMUT Arrays." IEEE Transactions on Circuits and Systems II: Express Briefs 65, no. 3 (March 2018): 306–10. http://dx.doi.org/10.1109/tcsii.2017.2691676.

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Dissertations / Theses on the topic "CMUT arrays"

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Hochman, Michael. "Investigation of acoustic crosstalk effects in CMUT arrays." Thesis, Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/42782.

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Capacitive Micromachined Ultrasonic Transducers (CMUTs) have demonstrated significant potential to advance the state of medical ultrasound imaging beyond the capabilities of the currently employed piezoelectric technology. Because they rely on well-established micro-fabrication techniques, they can achieve complex geometries, densely populated arrays, and tight integration with electronics, all of which are required for advanced intravascular ultrasound (IVUS) applications such as high-frequency or forward-looking catheters. Moreover, they also offer higher bandwidth than their piezoelectric counterparts. Before CMUTs can be effectively used, they must be fully characterized and optimized through experimentation and modeling. Unfortunately, immersed transducer arrays are inherently difficult to simulate due to a phenomenon known as acoustic crosstalk, which refers to the fact that every membrane in an array affects the dynamic behavior of every other membrane in an array as their respective pressure fields interact with one another. In essence, it implies that modeling a single CMUT membrane is not sufficient; the entire array must be modeled for complete accuracy. Finite element models (FEMs) are the most accurate technique for simulating CMUT behavior, but they can become extremely large considering that most CMUT arrays contain hundreds of membranes. This thesis focuses on the development and application of a more efficient model for transducer arrays first introduced by Meynier et al. [1], which provides accuracy comparable to FEM, but with greatly decreased computation time. It models the stiffness of each membrane using a finite difference approximation of thin plate equations. This stiffness is incorporated into a force balance which accounts for effects from the electrostatic actuation, pressure forces from the fluid environment, mass and damping from the membrane, etc. For fluid coupling effects, a Boundary Element Matrix (BEM) is employed that is based on the Green's function for a baffled point source in a semi-infinite fluid. The BEM utilizes the nodal mesh created for the finite difference method, and relates the dynamic displacement of each node to the pressure at every node in the array. Use of the thin plate equations and the BEM implies that the entire CMUT array can be reduced to a 2D nodal mesh, allowing for a drastic improvement in computation time compared with FEM. After the model was developed, it was then validated through comparison with FEM. From these tests, it demonstrated a capability to accurately predict collapse voltage, center frequency, bandwidth, and pressure magnitudes to within 5% difference of FEM simulations. Further validation with experimental results revealed a close correlation with predicted impedance/admittance plots, radiation patterns, frequency responses, and noise current spectrums. More specifically, it accurately predicted how acoustic crosstalk would create sharp peaks and notches in the frequency responses, and enhance side lobes and nulls in the angular radiation pattern. Preliminary design studies with the model were also performed. They revealed that membranes with larger lateral dimensions effectively increased the bandwidth of isolated membranes. They also demonstrated potential for various crosstalk reduction techniques in array design such as disrupting array periodicity, optimizing inter-membrane pitch, and adjusting the number of membranes per element. It is expected that the model developed in this thesis will serve as a useful tool for future iterations of CMUT array optimizations.
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Xu, Toby Ge. "Material and array design for CMUT based volumetric intravascular and intracardiac ultrasound imaging." Diss., Georgia Institute of Technology, 2015. http://hdl.handle.net/1853/54861.

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Recent advances in medical imaging have greatly improved the success of cardiovascular and intracardiac interventions. This research aims to improve capacitive micromachined ultrasonic transducers (CMUT) based imaging catheters for intravascular ultrasound (IVUS) and intra-cardiac echocardiography (ICE) for 3-D volumetric imaging through integration of high-k thin film material into the CMUT fabrication and array design. CMUT-on-CMOS integration has been recently achieved and initial imaging of ex-vivo samples with adequate dynamic range for IVUS at 20MHz has been demonstrated; however, for imaging in the heart, higher sensitivities are needed for imaging up to 4-5 cm depth at 20MHz and deeper at 10MHz. Consequently, one research goal is to design 10-20MHz CMUT arrays using integrated circuit (IC) compatible micro fabrication techniques and optimizing transducer performance through high-k dielectrics such as hafnium oxide (HfO2). This thin film material is electrically characterized for its dielectric properties and thermal mechanical stress is measured. Experiments on test CMUTs show a +6dB improvement in receive (Rx) sensitivity, and +6dB improvement in transmit sensitivity in (Pa/V) as compared to a CMUT using silicon nitride isolation (SixNy) layer. CMUT-on-CMOS with HfO2 insulation is successfully integrated and images of a pig-artery was successfully obtained with a 40dB dynamic range for 1x1cm2 planes. Experimental demonstration of side looking capability of single chip CMUT on CMOS system based FL dual ring arrays supported by large signal and FEA simulations was presented. The experimental results which are in agreement with simulations show promising results for the viability of using FL-IVUS CMUT-on-CMOS device with dual mode side-forward looking imaging. Three dimensional images were obtained by the CMUT-on-CMOS array for both a front facing wire and 4 wires that are placed perpendicular to the array surface and ~4 mm away laterally. For a novel array design, a dual gap, dual frequency 2D array was designed, fabricated and verified against the large signal model for CMUTs. Three different CMUT element geometries (2 receive, 1 transmit) were designed to achieve ~20MHz and ~40MHz bands respectively in pulse-echo mode. A system level framework for designing CMUT arrays was described that include effects from imaging design requirements, acoustical cross-talk, bandwidths, signal-to-noise (SNR) optimization and considerations from IC limitations for pulse voltage. Electrical impedance measurements and hydrophone measurements comparisons between design and experiment show differences due to inaccuracies in using SixNy homogenous material in simulation compared to fabricated thin-film stacks (HfO2-AlSi-SixNy). It is concluded that for “thin” membranes the effect of stiffness and mass of HfO2 and AlSi (top electrode) cannot be ignored in the simulation. Also, it is understood that aspect ratio (width to height) <10 will have up to 15% error for center frequency predicted in air when the thin-plate approximation is used for modelling the bending stiffness of the CMUT membrane.
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Li, Yingchun Verfasser], Reinhard H. H. [Akademischer Betreuer] [Neubert, Maximilian [Akademischer Betreuer] Fleischer, and Ralf [Akademischer Betreuer] Lucklum. "Surface modification technique for acoustic chemical sensor arrays based on CMUTs / Yingchun Li. Betreuer: Reinhard Neubert ; Maximilian Fleischer ; Ralf Lucklum." Halle, Saale : Universitäts- und Landesbibliothek Sachsen-Anhalt, 2011. http://d-nb.info/1025135121/34.

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Book chapters on the topic "CMUT arrays"

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He, Xiaoling, Yan Ma, Jiali Lu, Mei Long, Xing Deng, and Nian Zhang. "Determination of Five Isothiazolinone Preservatives in Liquid Detergents by High Performance Liquid Chromatography." In Advances in Transdisciplinary Engineering. IOS Press, 2022. http://dx.doi.org/10.3233/atde220364.

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In this study, an associate analytical approach supported by high performance liquid chromatography (HPLC) was developed to analyze five isothiazolinones in liquid detergents in the meanwhile. The isothiazolinones were extracted from liquid detergents by ultrasound with methanol as the extraction solvent and analyzed by HPLC. The gradient elution procedure uses acetonitrile-water as the mobile phase. The isothiazolinones were effectively separated by Agilent ZORBAX SB-C18 column (4.6 mm × 250 mm, 5 µm), and detected by diode array detector. The maximum absorption detection wavelengths of MIT, CMIT, OIT, DCOIT, and BIT were 275 nm, 275 nm, 282 nm, 285 nm, and 318 nm, severally. Quantitative analysis use of external standard method. The method was illustrated the excellent linearity with the standard curve correlation coefficients of determination (R2, 0.9992–1.0), LOD ranged from 0.06–0.19 µg/g. The spiked recoveries were 92.73%–109.92% with the RSD (n = 7) varied from 0.06%–2.26%. A total of 30 liquid detergents samples were inspected, the results demonstrated that MIT, CMIT, and BIT were contained with the concentration varied from 4.26 µg/g to 102.62 µg/g. And, it described the matrix effects of liquid detergents. Conclusion this method was recognized by excellent linearity, precision, accuracy, and was validated as a suitable and reliable technique for determination of isothiazolinone preservatives in liquid detergents.
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Conference papers on the topic "CMUT arrays"

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Moini, Azadeh, Amin Nikoozadeh, Jung Woo Choe, Butrus T. Khuri-Yakub, Chienliu Chang, Doug Stephens, L. Scott Smith, and David Sahn. "Fabrication, Packaging, and Catheter Assembly of 2D CMUT Arrays for Endoscopic Ultrasound and Cardiac Imaging." In ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels. American Society of Mechanical Engineers, 2015. http://dx.doi.org/10.1115/ipack2015-48611.

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Ultrasound is increasingly in demand as a medical imaging tool and can be particularly beneficial in the field of intracardiac echocardiography (ICE). However, many challenges remain in the development of a 3D ultrasound imaging system. We have designed and fabricated a quad-ring capacitive micromachined ultrasound transducer (CMUT) for real-time, volumetric medical imaging. Each CMUT array is composed of four concentric, independent ring arrays, each operating at a different frequency, with 128 elements per ring. In this project, one ring will be used for imaging. A large (5mm diameter) lumen is available for delivering other devices, including high intensity focused ultrasound transducers for therapeutic applications or optical fibers for photoacoustic imaging. We address several challenges in developing a 3D imaging system. Through wafer vias are incorporated in the fabrication process for producing 2D CMUT arrays. Device integration with electronics is achieved through solder bumping the arrays, designing a flexible PCB, and flip chip bonding CMUT and ASICs to the flexible substrate. Finally, we describe a method for integrating the flex assembly into a catheter shaft. The package, once assembled, will be used for in-vivo open chest experiments.
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Tasdelen, Akif Sinan, Abdullah Atalar, Kerem Enhos, and Hayrettin Koymen. "Acoustical tuning of CMUT receiver arrays." In 2016 IEEE International Ultrasonics Symposium (IUS). IEEE, 2016. http://dx.doi.org/10.1109/ultsym.2016.7728556.

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Khuri-Yakub, Butrus T., Ching-Hsiang Cheng, Fahrettin-Levent Degertekin, Sanli Ergun, Sean Hansen, Xue-Cheng Jin, and Omer Oralkan. "Silicon Micromachined Ultrasonic Transducers." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1602.

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Abstract This paper reviews capacitor micromachined ultrasonic transducers (cMUTs). Transducers for air-borne and immersion applications are made from parallel-plate capacitors whose dimensions are controlled through traditional integrated circuit manufacturing methods. Transducers for airborne ultrasound applications have been operated in the frequency range of 0.1–11 MHz, while immersion transducers have been operated in the frequency range of 1–20 MHz. The Mason model is used to represent the cMUT and highlight the important parameters in the design of both airborne and immersion transducers. Theory is used to compare the dynamic range and the bandwidth of the cMUTs to piezoelectric transducers. It is seen that cMUTs perform at least as well if not better than piezoelectric transducers. Examples of single-element transducers, linear-array transducers, and two-dimensional arrays of transducers will be presented.
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Tekes, Coskun, Mustafa Karaman, and F. Levent Degertekin. "Co-array optimization of CMUT arrays for Forward-Looking IVUS." In 2009 IEEE International Ultrasonics Symposium. IEEE, 2009. http://dx.doi.org/10.1109/ultsym.2009.5441519.

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Xiao Zhang, F. Yalcin Yamanery, Oluwafemi Adelegan, and Omer Oralkan. "Design of high-frequency broadband CMUT arrays." In 2015 IEEE International Ultrasonics Symposium (IUS). IEEE, 2015. http://dx.doi.org/10.1109/ultsym.2015.0167.

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Engholm, Mathias, Andrew Tweedie, Jonas Jensen, Gerald Harvey, Soren Elmin Diederichsen, Jorgen Arendt Jensen, and Erik Vilain Thomsen. "Simulating CMUT arrays using time domain FEA." In 2017 IEEE International Ultrasonics Symposium (IUS). IEEE, 2017. http://dx.doi.org/10.1109/ultsym.2017.8092395.

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Engholm, Mathias, Andrew Tweedie, Soren E. Diederichsen, Gerald Harvey, Jorgen A. Jensen, and Erik V. Thomsen. "Simulating CMUT arrays using time domain FEA." In 2017 IEEE International Ultrasonics Symposium (IUS). IEEE, 2017. http://dx.doi.org/10.1109/ultsym.2017.8092430.

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Enhos, Kerem, A. Sinan Tasdelen, Mehmet Yilmaz, Abdullah Atalar, and Hayrettin Koymen. "Transmitting CMUT Arrays without a DC Bias." In 2019 IEEE International Ultrasonics Symposium (IUS). IEEE, 2019. http://dx.doi.org/10.1109/ultsym.2019.8926278.

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Thranhardt, Marcel, Peter-Christian Eccardt, Hubert Mooshofer, Peter Hauptmann, and Levent Degertekin. "Sensing physical fluid properties with CMUT arrays." In 2009 IEEE International Ultrasonics Symposium. IEEE, 2009. http://dx.doi.org/10.1109/ultsym.2009.5441689.

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Choe, Jung Woo, Omer Oralkan, Amin Nikoozadeh, Anshuman Bhuyan, Byung Chul Lee, Mustafa Gence, and Butrus T. Khuri-Yakub. "Real-time volumetric imaging system for CMUT arrays." In 2011 IEEE International Ultrasonics Symposium (IUS). IEEE, 2011. http://dx.doi.org/10.1109/ultsym.2011.0261.

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