Dissertations / Theses on the topic 'CARRIER RELIABILITY'
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Tsarouchas, Ioannis. "Through life reliability of a bulk carrier." Thesis, University of Glasgow, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.368736.
Full textJiang, Wenjie 1963. "Hot-carrier reliability assessment in CMOS digital integrated circuits." Thesis, Massachusetts Institute of Technology, 1998. http://hdl.handle.net/1721.1/47514.
Full textChan, Vei-Han. "Hot-carrier reliability evaluation for CMOS devices and circuits." Thesis, Massachusetts Institute of Technology, 1995. http://hdl.handle.net/1721.1/36532.
Full textWang, Lei. "Reliability control of GNSS carrier-phase integer ambiguity resolution." Thesis, Queensland University of Technology, 2015. https://eprints.qut.edu.au/86976/1/Lei_Wang_Thesis.pdf.
Full textLe, Huy X. P. "Characterization of hot-carrier reliability in analog sub-circuit design." Thesis, Massachusetts Institute of Technology, 1996. http://hdl.handle.net/1721.1/41379.
Full textIncludes bibliographical references (leaves 52-54).
by Huy X.P. Le.
M.Eng.
Kim, SeokWon Abraham 1970. "Hot-carrier reliability of MOSFETs at room and cryogenic temperature." Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/28215.
Full textVita.
Includes bibliographical references.
Hot-carrier reliability is an increasingly important issue as the geometry scaling of MOSFET continues down to the sub-quarter micron regime. The power-supply voltage does not scale at the same rate as the device dimensions, and thus, the peak lateral E-field in the channel increases. Hot-carriers, generated by this high lateral E-field, gain more kinetic energy and cause damage to the device as the geometry dimension of MOSFETs shortens. In order to model the device hot-carrier degradation accurately, accurate model parameter extraction is critically important. This thesis discusses the model parameters' dependence on the stress conditions and its implications in terms of the device lifetime prediction procedure. As geometry scaling approaches the physical limit of fabrication techniques, such as photolithography, temperature scaling becomes a more viable alternative. MOSFET performance enhancement has been investigated and verified at cryogenic temperatures, such as at 77K. However, hot-carrier reliability problems have been shown to be exacerbated at low temperature. As the mean-free path increases at low temperature due to reduced phonon-scattering, hot-carriers become more energetic at low temperature, causing more device degradation. It is clear that various hot-carrier reliability issues must be clearly understood in order to optimize the device performance vs. reliability trade-off, both at short channel lengths and low temperatures. This thesis resolves numerous, unresolved issues of hot-carrier reliability at both room and cryogenic temperature, and develops a general framework for hot carrier reliability assessment.
by SeokWon Abraham Kim.
Ph.D.
Jiang, Liangjun. "HOT CARRIER EFFECT ON LDMOS TRANSISTORS." Doctoral diss., University of Central Florida, 2007. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/3230.
Full textPh.D.
School of Electrical Engineering and Computer Science
Engineering and Computer Science
Electrical Engineering
Le, Huy X. P. "On the methodology of assessing hot-carrier reliability of analog circuits." Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/84212.
Full textDas, A. G. Man Mohan. "Effect of wearout processes on the critical timing parameters and reliability of CMOS bistable circuits." Thesis, Durham University, 1997. http://etheses.dur.ac.uk/4701/.
Full textKoeppel, Gaudenz Alesch. "Reliability considerations of future energy systems : multi-carrier systems and the effect of energy storage /." Zürich : ETH, 2007. http://e-collection.ethbib.ethz.ch/show?type=diss&nr=17058.
Full textLiu, Yi. "STUDY OF OXIDE BREAKDOWN, HOT CARRIER AND NBTI EFFECTS ON MOS DEVICE AND CIRCUIT RELIABILITY." Doctoral diss., University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/3550.
Full textPh.D.
Department of Electrical and Computer Engineering
Engineering and Computer Science
Electrical Engineering
Steighner, Jason. "Investigation and trade study on hot carrier reliability of the PHEMT for DC and RF performance." Master's thesis, University of Central Florida, 2011. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/5048.
Full textID: 030423238; System requirements: World Wide Web browser and PDF reader.; Mode of access: World Wide Web.; Thesis (M.S.)--University of Central Florida, 2011.; Includes bibliographical references (p. 46-47).
M.S.
Masters
Electrical Engineering and Computer Science
Engineering and Computer Science
Raghunathan, Uppili Srinivasan. "TCAD modeling of mixed-mode degradation in SiGe HBTs." Thesis, Georgia Institute of Technology, 2014. http://hdl.handle.net/1853/54315.
Full textZhu, Chendong. "The mixed-mode reliability stress of Silicon-Germanium heterojunction bipolar transistors." Diss., Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/14647.
Full textHuang, Wei-Jie, and Wei-Jie Huang. "Towards Increased Photovoltaic Energy Generation Efficiency and Reliability: Quantum-Scale Spectral Sensitizers in Thin-Film Hybrid Devices and Microcracking in Monocrystalline Si." Diss., The University of Arizona, 2016. http://hdl.handle.net/10150/623175.
Full textCUI, ZHI. "MODELING AND SIMULATION OF LONG TERM DEGRADATION AND LIFETIME OF DEEP-SUBMICRON MOS DEVICE AND CIRCUIT." Doctoral diss., University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/2163.
Full textPh.D.
Department of Electrical and Computer Engineering
Engineering and Computer Science
Electrical Engineering
Chen, Chang-Chih. "System-level modeling and reliability analysis of microprocessor systems." Diss., Georgia Institute of Technology, 2014. http://hdl.handle.net/1853/53033.
Full textArora, Rajan. "Trade-offs between performance and reliability of sub 100-nm RF-CMOS technologies." Diss., Georgia Institute of Technology, 2012. http://hdl.handle.net/1853/50140.
Full textTran, Thi-Phuong-Yen. "CMOS 180 nm Compact Modeling Including Ageing Laws for Harsh Environment." Thesis, Bordeaux, 2022. http://www.theses.fr/2022BORD0185.
Full textIn the past decades, the demand for complicated functionality and high-density integration for Integrated Circuits (ICs) has resulted in metal-oxide-silicon (MOS) devices' scaling down. In this scenario, the reliability problems are the considerable concerns due to the device miniaturization, such as Hot Carrier Injection (HCI) and Bias Temperature Instability (BTI) that seriously impact the device performance. In some application fields where the cost of failure is extremely high such as space, oilfield, or healthcare, the device must be able to stably and reliably work, especially at an extensive temperature range. Although device failure mechanisms have been intensively investigated in the past, the investigations of these mechanisms at high temperatures are seldom studied.This thesis aims to develop the aging laws for 0.18µm CMOS technology to optimize circuit design for a targeted lifetime under extreme temperatures. We conducted an intensive aging test campaign for both nMOS and pMOS featuring several gate lengths. The intrinsic HCI and BTI mechanisms were characterized and modeled under typical operating voltage biases to avoid the risk of overaccelerating other wear-out mechanisms that are not supposed to be experienced in practical application. Our experiment is a long-term test with a stress time of up to 2,000 hours. This thesis presents measurement results up to 230°C that have never been studied before in the literature for this technology.The aging laws are finally integrated into an electronic design automation (EDA) environment to predict the evolution of the degraded transistor/circuit electrical parameters and the lifetime estimation due to the aging effects. In addition, the reliability test at the circuit level has been performed to validate and verify the proposed aging models. This approach offers the possibility to assess and simulate the IC specification drift due to the aging effect in the early design phase and optimize the circuit design over lifetime
Mamy, Randriamihaja Yoann. "Etude de la fiabilité des technologies CMOS avancées, depuis la création des défauts jusqu'à la dégradation des transistors." Thesis, Aix-Marseille, 2012. http://www.theses.fr/2012AIXM4781/document.
Full textReliability study is a milestone of microelectronic industry technology qualification. It is usually studied by following the degradation of transistors parameters with time, used to build physical models explaining transistors aging. We decided in this work to study transistors reliability at a microscopic scale, by focusing on atomic-bond-breaking mechanisms, responsible of defects creation into the gate-oxide. First, we identified defects nature and modeled their charge capture dynamics in order to reproduce their impact on complex electrical measurements degradation. This has allowed us developing a new methodology of defects localization, along the Si/SiO2 interface, and in the volume of the gate-oxide. Defects creation dynamics measurement, for Hot Carrier stress and stress conditions leading to the gate-oxide breakdown, has allowed us developing gate-oxide degradation models, predicting generated defect profiles at the interface and into the volume of the gate-oxide. Finally, we established an accurate link between a transistor degradation impact on circuit functionality loss.Reliability study and modeling at a microscopic scale allows having more physical models, granting a better confidence in transistors and products lifetime extrapolation
Arfaoui, Wafa. "Fiabilité Porteurs Chauds (HCI) des transistors FDSOI 28nm High-K grille métal." Thesis, Aix-Marseille, 2015. http://www.theses.fr/2015AIXM4335.
Full textAs the race towards miniaturization drives the industrial requirements to more performances on less area, MOSFETs reliability has become an increasingly complex topic. To maintain a continuous miniaturization pace, conventional transistors on bulk technologies were replaced by new MOS architectures allowing a better electrostatic integrity such as the FDSOI technology with high-K dielectrics and metal gate. Despite all the architecture innovations, degradation mechanisms remains increasingly pronounced with technological developments. One of the most critical issues of advanced technologies is the hot carrier degradation mechanism (HCI) and Bias Temperature Instability (BTI) effects. To ensure a good performance reliability trade off, it is necessary to characterize and model the different failure mechanisms at device level and the interaction with Bias Temperature Instability (BTI) that represents a strong limitation of scaled CMOS nodes. This work concern hot carrier degradation mechanisms on 28nm transistors of the FDSOI technology. Based on carrier’s energy, the energy driven model proposed in this manuscript can predict HC degradation taking account of substrate bias dependence (VB) including the channel length effects (L), gate oxide thickness (TOX) , back oxide BOX (TBox) and silicon film thickness (TSI ). This thesis opens up new perspectives of the model Integration into a circuit simulator, to anticipate the reliability of future technology nodes and check out circuit before moving on to feature design steps
Ndiaye, Cheikh. "Etude de la fiabilité de type negative bias temperature instability (NBTI) et par porteurs chauds (HC) dans les filières CMOS 28nm et 14nm FDSOI." Thesis, Aix-Marseille, 2017. http://www.theses.fr/2017AIXM0182/document.
Full textThe subject of this thesis developed on four chapters, aims the development of advanced CMOS technology nodes fabricated by STMicroelectronics in terms of speed performance and reliability. The main reliability issues as Bias Temperature Instability (BTI) and Hot-Carriers (HC) degradation mechanisms have been studied in the most recent 28nm and 14nm FDSOI technologies nodes. In the first chapter, we presents the evolution of transistor architecture from the low-power 130-40nm CMOS nodes on silicon substrate to the recent FDSOI technology for 28nm and 14nm CMOS nodes. The second chapter presents the specificity of BTI and HCI degradation mechanisms involved in 28nm and 14nm FDSOI technology nodes. In the third chapter, we have studied the impact of layout effects on device performance and reliability comparing symmetrical and asymmetrical geometries. Finally the trade-off between performance and reliability is studied in the fourth chapter using elementary circuits. The benefit of using double gate configuration with the use of back bias VB in FDSOI devices to digital cells, allows to compensate partially or totally the aging in ring oscillators (ROs) observed by the frequency reduction. This new compensation technique allows to extend device and circuit lifetime offering a new way to guaranty high frequency performance and long-term reliability
Guichard, Éric. "Contribution à l'étude de la sensibilité au vieillissement des technologies SOI durcies." Grenoble INPG, 1995. http://www.theses.fr/1995INPG0102.
Full textVincent, Emmanuel. "Étude des propriétés de dégradation du système SI/SIO#2 : application a la fiabilité des filières CMOS submicroniques." Grenoble INPG, 1996. http://www.theses.fr/1996INPG0126.
Full textShams, Kollol 3085942. "Understanding the Value of Travel Time Reliability for Freight Transportation to Support Freight Planning." FIU Digital Commons, 2016. http://digitalcommons.fiu.edu/etd/2828.
Full textMoras, Albero Miquel. "Caracterización de la variabilidad dependiente del tiempo de MOSFETs ultraescalados para su modelado compacto." Doctoral thesis, Universitat Autònoma de Barcelona, 2017. http://hdl.handle.net/10803/457581.
Full textMOSFET transistor is one of the most used device many applications thanks to its excellent operation characteristics, low power consumption and high miniaturization capability. The microelectronic technology progress has allowed reducing the MOSFET dimensions, which has led to improve the performance of integrated circuits (IC). However, when such dimensions reach the nanometric range, different physical phenomena such as short-channel effects, quantum processes and/or increase of electric fields in the device appear affecting the performance and reliability of transistors. During the device operation in the circuit, due to the large electric fields and temperature within the device, several aging mechanisms such as Bias Temperature Instability (BTI) or Channel Hot Carrier degradation (CHC), which progressively modify the initial device electrical characteristics, appear. Both mechanisms are characterized by the degradation of threshold voltage (shift, ΔVth) and other relevant electrical parameters of the MOSFET, like transconductance, when they are subjected to an electrical stress during its operation in an integrated circuit. BTI and CHC degradation, which are attributed to trap generation in the dielectric-bulk interface when high electric fields are applied to the transistor, are one of the main reliability problems of ultrascaled technologies that can limit the lifetime of devices and circuits The recovery of the threshold voltage is one of the issue that makes difficult the BTI characterization because of VTH changes very fast when the electrical stress is removed. For BTI studies, when the conventional characterization techniques are used, the degradation effects are underestimated due to fast recovery processes inherent to the phenomenon. To solve this problem, ultrafast characterization technique has been developed with the aim of studying the BTI degradation in pMOS transistors by acquiring the threshold voltage shift in very short times after the electrical stress removal. In addition, parameter extraction methodology based on Probabilistic Defect Occupancy model (PDO) for the BTI has been developed with the aim of reproducing and fitting the experimental ΔVth, as a function of time, and obtaining the defect distribution parameters and also the permanent part dependence which takes part during the stress/recovery stage. In this work, the influence of the temperature and the high electric fields at the gate and drain terminals (NBTI and CHC degradation, respectively) on the ΔVth has been analyzed in large area pMOSFETs. In addition, different stress conditions have been applied in order to know how those conditions modify the defect distribution that takes part in ΔVth. To obtain the distribution, a unified analysis of the results, regardless of the stress conditions (BTI and CHC) has been done in the context of the PDO model. By means of the methodology presented above, the defect distribution has been obtained and its dependence on the different stress conditions has been studied. Knowing how defect distribution changes with the stress conditions will allow to transfer the effects of NBTI and CHC degradation at device level up to the circuit level in order to evaluate how the device properties affect the circuit performance and reliability. Finally, the MOSFET small signal parameters have been analyzed when different NBTI stresses at the radiofrequency range are applied to the MOSFET. In order to get those parameters, a methodology that takes into account the small signal circuit and the measured [S] parameters has been developed. To transfer the small signal parameters shift, due to the stress, to the circuit level, a simple amplifier has been simulated and the gain bandwidth analyzed.
Jacquet, Thomas. "Reliability of SiGe, C HBTs operating at 500 GHz : characterization and modeling." Thesis, Bordeaux, 2016. http://www.theses.fr/2016BORD0354/document.
Full textThe SiGe:C HBT reliability is an important issue in present and future practical applications. To reduce the designtime and increase the robustness of circuit applications, a compact model taking into account aging mechanismactivation has been developed in this thesis. After an aging test campaign and physical TCAD simulations, onemain damage mechanism has been identified. Depending on the bias conditions, hot carriers can be generatedby impact ionization in the base-collector junction and injected into the interfaces of the device where trapdensity can be created, leading to device degradation. This degradation mechanism impacting the EB/spacerinterface has been implemented in the HICUM compact model. This compact model has been used to performreliability studies of a LNA circuit. The CPU simulation time is not impacted by the activation of the degradationcompact model with an increase in computation time lower than 1%. This compact model allows performing areliability analysis with conventional circuit simulators and can be used to assist the design of more robustcircuits, which could help in reducing the design time cycle
L’affidabilità dei transistori a eterogiunzione SiGe:C è un aspetto molto importante nella progettazione circuitale,sia per le tecnologie attuali che per quelle in fase di sviluppo. In questo lavoro di tesi è stato sviluppato un modellocompatto in grado di descrivere i principali meccanismi di degrado, in modo da contribuire alla progettazione dicircuiti relativamente più robusti rispetto a tali fenomeni, ciò che potrebbe favorire una riduzione dei tempi diprogetto. A seguito di una campagna sperimentale e di un’analisi con tecniche TCAD, è stato identificato unmeccanismo principale di degrado. In particolari condizioni di polarizzazione, i portatori ad elevata energiagenerati per ionizzazione a impatto nella regione di carica spaziale, possono raggiungere alcune interfacce deldispositivo e ivi provocare la formazione di trappole. Solo la generazione di trappole relativa allo spaceremettitore-base è stata considerata nella formulazione del modello, essendo il fenomeno più rilevante. Ilmodello è stato utilizzato per effettuare alcuni studi di affidabilità di un amplificatore a basso rumore. Il tempocomputazionale non è significativamente influenzato dall’attivazione del modello di degrado, aumentando solodell’1%. Il modello sviluppato è compatibile con i comuni programmi di simulazione circuitale, e può essereimpiegato nella progettazione di circuiti con una migliore immunità rispetto ai fenomeni di degrado,contribuendo così a un riduzione dei tempi di progetto
Laurent, Antoine. "Etude des mécanismes physiques de fiabilité sur transistors Trigate/Nanowire." Thesis, Université Grenoble Alpes (ComUE), 2018. http://www.theses.fr/2018GREAT024/document.
Full textBy continuing to follow Moore’s law, transistors have reached ever smaller dimensions. However, from 100nm gate length, parasitic effects called short channel effects appear. As a result new architectures named trigate, nanowires or finfets have been developed. The transition from planar technology used for the last fifty years to 3D devices is a major technological breakthrough. The special features of these architectures like conduction over various crystalline planes, corner effects or carrier confinement effects raise numerous questions about their reliability. Main reliability mechanisms have to be study in order to evaluate 3D transistor aging. In this way, MOS transistor evolution and planar architecture limits have first been reminded. The electrical degradation mechanisms and their characterization methods have also been exposed. As oxide defects represent an important part of device reliability, impact on threshold voltage VT of an elementary charge q has been simulated in accordance to its spatial localization. Thus we can notice that the defect influence on VT change with at once its position and the device dimensions. Next, this manuscript focuses on Bias Temperature Instabilities (BTI). A parallel has been done between narrow Trigate devices and wide ones which can be considered as planar transistors and a width effect on NBTI (Negative BTI) degradation has been highlighted. Another major reliability mechanism is called hot carrier degradation. Its principle models developed on planar architecture have been remembered and their validity on Trigate transistors has been verified. During HC stress, current density can be so high that self-heating effects appear and degrade device electrical parameters. Therefore this contribution has been decorrelate from HC degradation in order to obtain the result of HC stress only. As in BTI chapter, width effect has also been evaluated for this reliability mechanism. Finally strain effects in channel region have been analyzed from both performance and reliability point of view. As a conclusion the best tradeoff between these two items has been determined
Bonner, J. K. "Kirk", and Silveira Carl de. "Thermal Cycling Fatigue Investigation of Surface Mounted Components with Eutectic Tin-Lead Solder Joints." International Foundation for Telemetering, 1996. http://hdl.handle.net/10150/611418.
Full textEutectic (63% tin-37% lead) or near-eutectic (40% tin-60% lead) tin-lead solder is widely used for creating electrical interconnections between the printed wiring board (PWB) and the components mounted on the board surface. For components mounted directly on the PWB mounting pads, that is, surface mounted components, the tin-lead solder also constitutes the mechanical interconnection. Eutectic solder has a melting point of 183°C (361°F). It is important to realize that its homologous temperature, defined as the temperature in degrees Kelvin over its melting point temperature (T(m)), also in degrees Kelvin, is defined as T/T(m). At room temperature (25°C = 298K), eutectic solder's homologous temperature is 0.65. It is widely acknowledged that materials having a homologous temperature ≥ 0.5 are readily subject to creep, and the solder joints of printed wiring assemblies are routinely exposed to temperatures above room temperature. Hence, solder joints tend to be subject to both thermal fatigue and creep. This can lead to premature failures during service conditions. The geometry, that is, the lead configuration, of the joints can also affect failure. Various geometries are better suited to withstand failure than others. The purpose of this paper is to explore solder joint failures of dual in-line (DIP) integrated circuit components, leadless ceramic chip carriers (LCCCs), and gull wing and J-lead surface mount components mounted on PWBs.
Candelier, Philippe. "Contribution à l'amélioration de la fiabilité des mémoires non volatiles de type flash EEPROM." Université Joseph Fourier (Grenoble ; 1971-2015), 1997. http://www.theses.fr/1997GRE10245.
Full textCouret, Marine. "Failure mechanisms implementation into SiGe HBT compact model operating close to safe operating area edges." Thesis, Bordeaux, 2020. http://www.theses.fr/2020BORD0265.
Full textIn an ever-growing terahertz market, BiCMOS technologies have reached cut-off frequencies beyond 0.5 THz. These dynamic performances are achieved thanks to the current technological improvements in SiGe heterojunction bipolar transistors (HBTs). However, these increased performances lead to a shift of the transistors bias point closer to, or even beyond, the conventional safe-operating-area (SOA). As a consequence, several "parasitic" physical effects are encountered such as impact-ionization or self-heating which can potentially activate failure mechanisms, hence limiting the long-term reliability of the electric device. In the framework of this thesis, we develop an approach for the description and the modeling of hot-carrier degradation occurring in SiGe HBTs when operating near the SOA edges. The study aims to provide an in-depth characterization of transistors operating under static and dynamic operating conditions. Based on these measurements results, a compact model for the impact-ionization and the self-heating has been proposed, ultimately allowing to extend the validity domain of a commercially available compact model (HiCuM). Considering the operation as close as possible to the SOA, an aging campaign was conducted to figure out the physical origin behind such failure mechanism. As a result, it has been demonstrated that hot-carrier degradation leads to the creation of trap densities at the Si/SiO2interface of the emitter-base spacer which induces an additional recombination current in the base. A compact model integrating aging laws (HiCuM-AL) was developed to predict the evolution of the transistor/circuit electrical parameters through an accelerated aging factor. For ease of use in computer-aided design (CAD) tools, the aging laws have been scaled according to the geometry and architecture of the emitter-base spacer. The model has demonstrated its robustness and its accuracy for different SiGe HBT technologies under various aging conditions. In addition, a study on the reliability of several integrated circuits has been performed leading to a precise location of the most sensitive regions to the hot-carrier degradation mechanism. Thus, the HiCuM-AL model paves the way to perform circuit simulations optimizing the mm-wave circuit design not only in term of sheer performances but also in term of long-term reliability
Faynot, Olivier. "Caractérisation et modélisation du fonctionnement des transistors MOS ultra-submicroniques fabriqués sur films SIMOX très minces." Grenoble INPG, 1995. http://www.theses.fr/1995INPG0121.
Full textBestory, Corinne. "Développement de stratégies de conception en vue de la fiabilité pour la simulation et la prévision des durées de vie de circuits intégrés dès la phase de conception." Thesis, Bordeaux 1, 2008. http://www.theses.fr/2008BOR13627/document.
Full textDesign for reliability (DFR) consists in assessing the impact of electrical ageing of each elementary component, using electrical simulations, on performance degradations of a full device. According to DFR concept and reliability simulation, theses works present a new DFR strategy. This strategy based on the integration of two intermediate phases in the ICs and SoC design flow. The first phase is a bottom-up ageing behavioural modelling phase of a circuit (from transistor level to circuit level). The second phase is a « top-down reliability analyses » phase of this circuit, performing electrical simulations using its ageing behavioural models, in order to determine critical functional blocks and / or elementary components of its architecture according to a failure mechanism and a given mission profile. Theses analyses also allow determining the failure time of this circuit. Statistical dispersions on ICs performances, due to the used manufacturing process, have been taking into account in order to assess their impact on failure time dispersions of a ICs lot. The method has been applied on two degradation mechanisms: hot carriers and radiations
Tsao, Chih-Pin, and 曹志彬. "Hot-Carrier reliability in deep submicron CMOS device." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/16925700898041641574.
Full text國立成功大學
微電子工程研究所碩博士班
90
In this study, the effects of hot-carrier induced drain current degradation and gate leakage current induced by ultra-thin gate oxide on 0.18μm and 0.15μm CMOS devices will be investigated. In the first chapter, the background of hot-carrier effects will be discussed. Results show that in deep submicron device, the worst case of hot-carrier induced drain current degradation is characterized at drain voltage higher than 0.1V which was well known as the worst case condition in long channel device. The worst case of characterized Vd was found to lager at higher temperature and substrate bias. A simplified model was presented to explain this new observation. Results show that the lowering of quasi-fermi level and the effect of the velocity saturation region (DL) contribute to the monotonically decrease ΔID/ID (%) as a function of measured VD. However, Qinv near the drain side also decreases since Vc increases. This mechanism results in the increase in DId/Id. Hence, the value of the worst case of characterized Vd is determined by this two competing mechanisms. In the third chapter, enhanced hot-carrier induced Id degradation under high gate voltage stress was observed in pMOSFETs. Some mechanisms which may contribute to this phenomenon are discussed here。Results show that (I) F-N tunneling-current stress has finite effect on enhanced high gate voltage stress although gate oxide electric field as high as above 15MV/cm was applied. Anode hole injection model was adopted to explain the server F-N tunneling effect on pMOSFET than on nMOSFET. The hole component of the injected F-N tunneling-current was found to the dominant mechanism. (II) Electron tunneling from the gate due to ultra-thin gate oxide and Auger recombination assisted hot hole energy gain process were found to contribute to this phenomenon. Besides, this enhancement in Id degradation is more significant under high temperatures or lower supply voltages. Finally, in the last chapter, future work is discussed.
Lee, Jia-Rui, and 李佳叡. "Studies on Hot-Carrier Reliability in High-Voltage MOSFETs." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/46789891396748452586.
Full text國立成功大學
微電子工程研究所碩博士班
96
In this dissertation, the hot-carrier-induced degradation in 0.35 μm n-type self-aligned lateral double-diffused MOSFET (LDMOS) and p-type drain-extended MOSFET (DEMOS) devices are studied. When the nLDMOS device is used in a power switching circuits with an unclamped inductive load, the off-state avalanche breakdown occurs during on-state to off-state transient. The device degrades because of the high electric field and impact ionization located near the drain side poly-gate edge. The main mechanism of device degradation is the interface states and positive oxide-trapped charges created by breakdown-induced hole injection. The interface states degrade device turn-on resistance (Ron) however positive oxide-trapped charges reduce the series resistance. The degradation has the tendency to saturate, which in consistent with the saturation of interface states and oxide-trapped charges generation. Moreover, increasing the device drift drain (NDD) region dosage can reduce the generation of interface states, leading to an improved degradation. Besides Ron degradation, the off-state breakdown voltage (BVdss) increases while off-state avalanche breakdown occurs. It is suggested that the main mechanism of BVdss increase is the hole trapping created by hole injection. TCAD simulation reveals that hole trapping attract mirror electrons at Si/SiO2 surface and lower the potential contour crowding and reduce lateral and vertical electric field under drain side spacer. As a consequence, the impact ionization rate at breakdown point is lowered, leading to a higher breakdown voltage. While the nLDMOS devices operate on on-state, the devices degrade due to high operating voltage and high electric field. The location of hot-carrier-induced interface states varies with different stress gate voltage. The interface states located in accumulation region under poly-gate have little effect on Idlin degradation. As a result, interface states located in drain-side spacer region dominate Idlin degradation when interface states located in channel region are negligible. In our experiment, increasing NDD dosage results in improved Idlin degradation. TCAD simulations reveal that high NDD dosage increases impact ionization rate in accumulation and channel regions, but reduces impact ionization rate in spacer region, leading to an improved Idlin degradation. Finally, the drain current shifts after hot carrier stress in pDEMOS transistors is studied. The drain saturation (Idsat) and linear current (Idlin) both increase after hot carrier stress due to hot electron injection and electron trapping. Electron trapping reduces the resistance of p-drift region hence increases drain current. Moreover, the current shifts are dependent on the length of drain extended region under poly gate. Device with longer drain extended under poly produces less current increment after Igmax stressing. TCAD simulation reveals that the path of current flow under Idlin and Idsat condition can explain the relation between the drain extended overlap and the current shifts.
Li, Jian Fang, and 李劍芳. "Reliability analysis for mid-ship structure of bulk carrier." Thesis, 1995. http://ndltd.ncl.edu.tw/handle/49487316057887387484.
Full textPagey, Manish Prabhakar. "Hot-carrier reliability simulation in aggresively scaled MOS transistors." 2003. http://etd.library.vanderbilt.edu/ETD-db/available/etd-12032003-100902/.
Full textWu, Tai-Ching, and 吳泰慶. "Hot Carrier Reliability in 12V High Voltage P-LDMOS Transistors." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/30479749998144585484.
Full text國立成功大學
微電子工程研究所碩博士班
97
In this thesis, the experiment mainly studies on the hot-carrier reliability of a 0.35 μm p-type lateral double diffusion metal oxide semiconductor field-effect-transistor. Base on the degradation of every parameter, we can analyze the mechanism causing the device degradation. First, the differences between HV device structure and normal LV MOS structure are introduced. The development of LDMOS device is also introduced. As process scaling down, the reliability becomes an important issue to discuss. After hot carrier stress experiment on standard dimension device, some parameters under different gate bias result in different degradation trends. TCAD simulation and charge pumping method are used to confirm the damage location induced different degradation. At last we study on lifetime issue to compare the device reliability. First we need a degradation index in lifetime model. And then we process hot carrier stress experiment on different dimension devices (S, L, and C). Then the extracted lifetime results are compared to find out which dimension variation will improve the device reliability.
Chen, Shiang-Yu, and 陳翔裕. "Hot Carrier Reliability of 12V High Voltage n-LDMOS Transistors." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/34503827838537514146.
Full text國立成功大學
微電子工程研究所碩博士班
94
In recent years, LDMOS transistors have been widely used in high voltage integrated circuits (HVIC). That’s due to its process flow being compatible with low voltage CMOS devices. In some applications, LMDOS transistors operate under high gate and drain voltage, thus hot carrier reliability becomes a serious concern. In this thesis, hot carrier reliability of LDMOS transistors will be investigated in detail.
First of all, LDMOS transistors designed to operate at Vds=12V are studied. Substrate current (Isub) of the devices continually increases as measure gate voltage, thus indicates that Kirk effect is significant even at low gate voltage region. In addition, based on experiment and simulation results, two degradation mechanisms are observed in this device at low and high gate stress voltage. The degradation of device parameters such as Gm(max), on resistance(Ron) also supports our theory. At the same time, anomalous increase of saturation current (Id(sat)) is observed after low gate voltage stress.
To improve the lifetime of the LDMOS transistors, devices with longer drift region length (Ld) are also investigated. Owing to the large decrease of lateral electric field, degradation of device characteristics is significantly reduced. Isub in longer Ld device is also much lowered at low gate voltage region. In other words, it implies that Kirk effect occurs later in longer Ld devices. Moreover, based on experiment results damage is more uniformly distributed in the channel and drift region in this device.
Finally, depending on the various applications, devices with different gate oxide thickness are designed. In this part, hot carrier reliability of LDMOS transistors with thin gate oxide will be investigated. Based on experiment results, two competing mechanisms dominate the Ron degradation at low and high stress gate voltage. One mechanism will lead to the increase of Ron degradation, while the other one will result in the decrease of Ron degradation.
Hsiao, Mei-Yi, and 蕭美宜. "Effect of Oxygen Annealing on Hot-Carrier Reliability of HfO2 nMOSFETs." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/c46sx3.
Full text國立臺北科技大學
機電整合研究所
99
In order to avoid the short channel effect in the MOSFET, the thickness of the dielectric has gradually become thinner. However, the serious problems of leakage current and reliability due to the thinning oxide are also unavoidable. Therefore, using high-k materials passes into one of the most significant studies. After many years of researches, the Hafnium-based high-k materials emerge as the most promising candidates to replace SiO2 and SiON gate dielectrics. It has been reported that the oxygen vacancy defects of high-k dielectrics can be passivated by annealing process, and the device degradation of bias temperature instability (BTI) tests can be improved. However, the hot carrier injection (HCI) is still an important reliability issue. And only few literatures concerned about the channel hot carrier reliability for adding oxygen in post-deposition annealing. Hence, this study is concentrated on this subject. The nMOSEFT experimental samples were fabricated from 45 nm node high performance logic technology of UMC. The process of HfO2 dielectric layer was deposited by atomic layer deposition (ALD). The wafers were then annealed with and without oxygen after ALD. The channel width of the nMOSFETs is 10 μm and channel lengths are 10 μm and 0.1 μm. In this research, the different stress voltages and temperatures are included in the experiment. Consequently experimental data are used to figure out the dependence of degradation on stress voltage and temperature, and to determine the difference of two kinds of wafers. The experimental results show that the basic electric characteristics have no significant improvement for the process with oxygen post-deposition annealing. After the CHC stress, the degradation in those short channel nMOSFETs reveals larger than that in long channel. The threshold voltage shift becomes larger as stress voltage and temperature increasing. From the analyzed data, the process with oxygen post-deposition annealing can effectively reduce the degradation of the devices; it should be due to the passivation of oxygen vacancies during the oxygen annealing.
Yang, Hui-Ting, and 楊惠婷. "A Study on the Hot-Carrier Reliability of 200V SOI PLDMOS." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/17003352917403750503.
Full text亞洲大學
資訊工程學系碩士班
97
The reliability of the high voltage P-LDMOS is examined extensively by moving the impact ionization area and varying the surface electric field in the drift region. Breakdown walkout in high-voltage P-LDMOS devices on a thin SOI layer is demonstrated closely related to gate-metal field plate extension and gate channel length. The two field peaks along the channel can be reduced by varying the impact ionization area properly. N-well ion implantation dose monitoring and gate-metal field plate extensions are also studied to effectively improve the breakdown voltage and the reliability of the device with 12 micron P-drift length on SOI for 200V applications.
Liu, Xin-chang, and 劉信昌. "Reliability Analysis of a Maintained Bulk Carrier Subjected Corrosion and Fatigue." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/19944119167581906619.
Full text國立成功大學
系統及船舶機電工程學系碩博士班
97
In general the structure of large ships are made of steel, the corrosion and fatigue of the steel may occur due to the waves and harsh environment. The purpose of this study is to assess fatigue translate into structure failure and reliability analysis on the structure of maintained ships after failure under the effect of combined corrosion and fatigue crack. The reliability analysis of fatigue crack is broken down into two failure model, for one is concerning the reliability of the possession of initial crack in fatigue crack growth, the other is regarding fatigue reliability before initial crack. The process of corrosion also can be separated into two stages:the first is the time during which the coating protection is effective, the second starts when the effectiveness of the coating is ineffectual and general corrosion starts occurring. Since the time to crack initiation and the termination of coating life are random variables, and thus the reliability of initial crack and the probability of coating failure are taken into consideration when it comes to the reliability of ship’s structure. Finally, based on the combined effects of fatigue and corrosion, the reliability or the probability of failure of a bulk carrier is studied to make the improvements on repairing.
Kuo, Yu-Chen, and 郭育禎. "Characteristics and Hot Carrier Reliability in 40V n-type LDMOS Transistors." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/22495897312119913693.
Full text國立成功大學
微電子工程研究所碩博士班
97
In this thesis, device characteristics and hot carrier reliability of n-type LDMOS transistors with different device dimension are investigated. The device used in this thesis has four main layout parameters: channel length, accumulation length, length of drift region with gate control and length of drift region without gate control. As for device characteristics, the effect of parameters of channel length and accumulation length are more significant than that of parameters of drift region with gate control and length of drift region without gate control. The unexpected connection between Ron, BVoff and accumulation length can be explained by TCAD Simulation. Then we choose a standard device dimension to perform constant voltage hot carrier stress and discuss the hot carrier degradation phenomenon and mechanism. The degradation of Ron reveals different power index of degradation for different stressed bias. By means of TCAD simulation and charge pumping analysis, the phenomenon of anomalous degradation can be discussed and explained in detail. Besides, effects of device dimension on Ron lifetime are investigated. Among prodigious enhancement of lifetime is certain as accumulation length increased. So, accumulation length is reduced and the effect of this change on Ron and Idsat are discussed. Charge pumping analysis and TCAD simulation are used to evidence for the stress experimental results. Finally, compare with device characteristics and hot carrier stressed experiments. We can conclude that accumulation length is an important concern in this device when considering both device performance and hot carrier reliability. Such an analysis can provide useful feedback in designing LDMOS devices.
Yih, Cherng-Ming, and 易成名. "Investigation of Hot-Carrier Injection Induced Reliability Issues in Flash Memories." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/73427801549497138777.
Full text國立交通大學
電子工程系
87
Hot carrier induced reliability issues have become increasingly important for miniaturized flash memory design. These reliability issues include hot carrier related issues, such as oxide damage, program/erase cycling endurance, disturbance, and data retention. In this dissertation, the hot-carrier injection induced reliability problems in stacked-gate flash memories is investigated. First, a new model based on the charge-balance theory was proposed to accurately calculate the floating gate voltage. Based on the new model, the method to determine the capacitive coupling coefficients and a compact SPICE model was developed. Then, an oxide damage characterization method was developed for simultaneously determining the lateral distributions of interface states (Nit) and oxide charges (Qox) under both channel-hot-electron programming bias and source FN erase bias stress conditions. According to the extracted profiles of Nit and Qox, a new gate current model was successfully developed for the first time by taking the hot-electron stress generated Nit and Qox into account. In this model, we suggest that Nit filled with electrons will serve as a new scattering center and reduce the hot-electron injection probability. The generated Qox is also introduced as an additional factor affecting the potential barrier at the Si-SiO2 interface. Moreover, the oxide-field dependent stress-induced leakage current (SILC) as well as its related disturbance on the source FN erased flash memory has been studied by using a new approach. The salient features of the method are two fold. One is that the individual contributions of SILC and disturbance due to either carrier charging/discharging in the oxide or positive charge-assisted/trap-assisted tunneling (PCAT/TAT) of electrons into the floating gate can be separated. The other one is that it is very sensitive to determine the ultra-low SILC (< 10-20 A). In this study, we first observed that the generated Nit dominates the gate current degradation not only at the IB,max stress condition but also at the IG,max stress condition. The major programming degradation mechanisms of flash memory cells after P/E cycles due to Nit was also identified. In addition, we also observed that the carrier charging/discharging in the oxide is the main disturb mechanism at low oxide field. At high oxide field, PCAT/TAT of electrons into the floating gate is the major cause for the disturb failure.
Liu, Jun-Lin, and 劉駿霖. "Reliability Analysis of a Double Hull Bulk Carrier with Corrosion Effects." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/65529682437162812242.
Full text國立成功大學
系統及船舶機電工程學系碩博士班
93
Generally, the hull structures usually are made of steel, however the steel will deteriorate under the environment of the high salt and the high humidity. In order to solve the damage of ship due to corrosion, many experts have developed several kinds of linear or non-linear ship corrosion model respectively by way of material experiment、statistics data and various corrosion model. In general, non-linear corrosion model can explain the real corrosion process more than linear corrosion model. Therefore, the non-linear corrosion model is used in present investigation. In this study, the new time variant non-linear ship corrosion model is proposed and other two kinds of corrosion models are used to evaluate the corrosion effects on ship plates. A double hull bulk carrier is selected as an example to exam the method of FORM and SORM. The reliability index of the ship structure under various failure modes is studied. In addition, different recording periods are also considered, the comparison of corrosion reliability between the ship with stationary repair period and the ship without any repair is presented.
Kuo, Jui-Min, and 郭瑞旻. "Hot-carrier Induced Reliability Degradation in High Voltage P-LDMOS Transistors." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/44883155072548759819.
Full text國立清華大學
電子工程研究所
100
In this thesis, the p-type lateral diffused MOS (LDMOS) transistor used in this work is implemented with a 0.5 μm 2p3m high-voltage process. To investigate the reliability issue, charge pumping method is used to detect the interface states of the device. And to combine TCAD (Technology Computer Aided Design) simulation supports the analysis of the device. First, we have background review, which contains the introduction of the high-voltage device, the mechanism of hot-carrier degradation, and the methodology of charge pumping. Then the measurement set-up and the characteristic parameters extraction for the virgin devices are discussed. According to measurement result, we observe that Kirk effect will degrade the reliability in short channel (L = 1 μm) device. Due to Kirk effect, it produces a specific double-hump bulk current in short channel device. The hot-carrier degradation experiment is performed in long channel (L = 5 μm) and short channel (L = 1 μm) devices respectively. Both two channel lengths have mainly damage in the P-well region when stresses at the first peak. And when stressed at the second peak, there has serious degradation in whole device. The shift of electric field makes the degradation of on-resistance (Ron) and the shift of threshold voltage (VT, on). The simulation can give the reasonable explanation.
Lu, Ying-Hsin, and 盧頴新. "Investigation on the Reliability and Hot Carrier degradation in Advance MOSFET." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/56e373.
Full text國立中山大學
物理學系研究所
107
Since 1960, the world’s the first metal-oxide-semiconductor-field-effect transistors (MOSFETs) were invented by Kahng and Atalla in Bell Lab. The transistor length is 25 μm, and gate oxide thickness is 100nm. Nowadays, MOSFETs have become the dominant devices for ultra-large-scale integration (ULSI) circuits due to its low cost, power consumption and easy to scale down. In 1965, Gordon Moore, one of Intel''s founders, first proposed Moore’s Law: The number of components per integrated circuit will doubling every year. And with the advancement of technology, the 10 nm fin transistor (fin FET) has been mass-produced and applied to advance electronic products. In the micro-engineering of the integrated circuit, in addition to the miniaturization of the channel length as the primary key technology; the threshold voltage (Vth) in the modulated integrated circuit is also one of the key technologies. For example, ultra-thin oxide layers, ion implantation modulation of channels, gate stack modulation, etc. Different modulation methods will have different effects on the basic electrical properties and reliability of the transistor. Therefore, in the first part, we mainly study the metal annealing sequence in gate stack modulation. In this section, we study the effect of metal pre/post metal deposition annealing on the cerium oxide layer. In the initial electrical characteristics, the most apparent difference is threshold voltage (Vth) resulting from the work-function difference between the gate material and the semiconductor. Furthermore, fast I-V measurements indicate that the device with post-metal deposition annealing shows more degradation of Vth in NBTI, which originates from the more nitrogen interstitial defects in HfO2. This phenomenon is confirmed to be due to the process-related pre-existing defects by an analysis of double sweep fast I-V measurements. In order to further verify the effect of nitrogen interstitial defects on the MOSFET, in the second part we used fast I-V measurements to study the effect of different TiN gate nitrogen concentrations on the interstitial defect in the HfO2 layer. In the previous section, we discovered the existence of nitrogen interstitial defects through fast I-V measurement and NBTI. In this part, we can further find that the higher nitrogen content in the metal, and the nitrogen is affected by the thermal diffusion, the more nitrogen interstitial defects will exist in the HfO2 layer. In the reliability, the nitrogen interstitial defect takes the role of the hole trapping center in the HfO2 layer. Therefore, when performing NBTI at room temperature, we observed that the main cause of transistor degradation is mostly due to hole trapping, rather than the decline of Subthreshold Swing (S.S.) caused by the traditional Reaction-Diffusion Model. Moreover, through the fast I-V double sweep measurement after NBTI, it can be found that devices with more nitrogen interstitial defects have a large hysteresis after deterioration. This also means that the bond inside the HfO2 layer is affected by the nitrogen interstitial defect, and it is easier to break the bond to form a new hole capture center. Therefore, for the nitrogen interstitial defects for the first and second portions. In the third part, we eliminate the oxygen vacancies and nitrogen interstitial defects in the HfO2 layer by different nitridation process. Based on previous studies, the oxygen vacancy in hafnium oxide could be passivated by the diffusion nitrogen, thus, enhancing the performance and reliability of n-MOSFET. On the other hand, as for p-MOSFET device, the nitrogen diffuses into the channel interface to generate interface defects, causing S.S. degradation to the device. However, in the HfO2 thin film, the nitrogen interstitial defect will be generated when the concentration of nitrogen is higher. These interstitial defects are located in HfO2 with the energy level below the mid-gap. Therefore, the holes can be trapped into the nitrogen interstitial defects while they transport from the channel to the gate. This work investigates the reduction of nitridation time and annealing time to device to further verify the hafnium oxide layer of nitrogen and oxygen vacancies bonding to reduce nitrogen interface defects. The influence of different nitrogen concentration and annealing time to device performance and reliability are also investigated. Finally, In the evolution of MOSFET technology, in addition to the evolution of the transistor in Moore''s Law, another research direction is to increase the diversity of functions, called More than More. In its development, it contains many different functional components, such as RF, high voltage components, CMOS image sensor, etc. In this section we will discuss an abnormal recovery phenomenon induced by hole injection during hot carrier degradation in silicon-on-insulator n-type metal-oxide-semiconductor transistors. How the hole injection induces the abnormal recovery behavior can be clarified by different hot carrier degradation (HCD) measurement sequences. According to this HCD result, the channel surface energy band is drawn down and the interface defect will be temporarily shielded, an effect caused by the trapped hole. Furthermore, results of different stress voltage experiments indicate that the amount of hole injection is determined by the electric field between the gate and drain.
Ze-Wei, Jhou. "DC Hot Carrier Reliability at Elevated Temperatures for nMOSFETs Using 0.13Mum Technology." 2005. http://www.cetd.com.tw/ec/thesisdetail.aspx?etdun=U0006-2007200517293700.
Full textWu, Kuo-Ming, and 吳國銘. "Development and Hot-Carrier Reliability Study of Integrated High-Voltage MOSFET Transistors." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/16242266300247122086.
Full text國立成功大學
電機工程學系碩博士班
95
In this dissertation, the integrated high-voltage MOSFET with three different kinds of application, structure and operation voltage are studied and analyzed on hot-carrier reliability and process conditions correlations. Comparing the hot-carrier reliability of 0.5um 40V N-type drain extended MOSFET (DEMOS) transistors to the conventional low-voltage CMOS transistors; there are there kinds of obviously phenomena – Kick effect accelerated the device degradation, the degradation is proportional to the gate bias and degradation recovery. The hot-carrier reliability behavior of this DEMOS transistor is thus very different from the conventional CMOS transistors. According to the experimental results and two-dimensional process and electric simulation analysis, we identify that under a fixed drain voltage, devices stressed at a higher Vgs results in a greater maximum transconductance (Gmmax) and on-resistance (Ron,sp) degradation. Under higher Vgs, the increase in channel hot-carrier injection is responsible for the greater Gmmax degradation. On the other hand, Kirk effect induced increase in drain avalanche hot carriers near the drain as well as higher electric field in the channel is responsible for the greater Ron degradation. Second, AC lifetime is much longer than DC lifetime because of the recovery in degradation. An anomalous hot-carrier degradation phenomenon was observed in 0.5mm 12V N-type drain extended MOS transistors (N-DEMOS) with various n-type drain drift (NDD) implant dosage. Under the same stress condition, the device with higher NDD dosage produces higher substrate current, slightly higher transconductance degradation (Gmmax), but lower on-resistance (Ron,sp) degradation. Two degradation mechanisms are identified from the analysis of electrical data and two-dimensional device simulations. The first mechanism is hot electron injection in accumulation region near the junction of channel and accumulation region. The second mechanism is hot hole injection in the accumulation region near the spacer. This injection of hot holes creates positive charge trapping in the gate oxide, resulting in negative mirror charges in accumulation region that reduces Ron,sp. The second mechanism is identified to account for the anomalous lower Ron degradation. For high power management integrated circuit (PMIC) product, we develop a 0.35 um 12V N-type lateral double diffuse MOSFET (LDMOS) transistor, and study hot-carrier reliability accordingly. The maximum bulk current (Ib) occurs at different gate bias on various NDD dosages under the Poly gate accumulation region. Under higher NDD dosage, the first bulk current peak is higher, but the second peak is lower. When the gate bias under the first bulk current peak, both the acceptor-type and donor-type interface traps (Nit) are generated simultaneously by the hot hole injection at gate accumulation region and hot electron injection at channel region, respectively. Acceptor-type Nit induced positive charges and results in higher Ron, however, the stress in higher NDD device generated positive charge oxide traps that induced negative charges and results in lower Ron. When device is stressed under the gate bias at second bulk current peak, the additional channel high electric field damage results in serious Gmmax degradation and thus larger Ron degradation. Because of the special design of power management IC, the current surge and voltage spike occur on the drain of LDMOS transistors forced the unclamped device into the avalanche break down, when inductive load switching, and induced device degradation. With fixed current pulse stress, the break down voltage (BVdss), Ron,sp and threshold voltage (Vth) become higher and trend to saturate after several stress times. Break down induced hot holes injections generate a lot of acceptor-type Nit under Poly edge will dynamically change the micro electric field and increase the break down voltage. Acceptor-type Nit attracts electrons and increases the drain series resistance and results in Ron degradation. At last, we deliver an excellent high-voltage 035um 12V Bipolar, CMOS, DMOS (BCD) technology with 21V BVdss and 7 mW-mm2 Ron high performance N-type LDMOS, which demonstrates our technology capability and enable the fabless companies to design the smaller, higher efficiency and more competitive PMIC products.
Yeh, Chang Hua, and 葉昌樺. "Investigation of Hot Carrier Reliability Issues in STI and Strained-Silicon MOSFET's." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/52610615356862911344.
Full text長庚大學
電子工程研究所
92
This thesis addresses the issues related to hot carrier reliabilities in CMOS devices. At first, results on the width dependent hot-carrier (HC) degradation for shallow-trench-isolated (STI) CMOS devices are presented. This is a very crucial issue for the present and future CMOS ULSI using STI technologies. Both thick gate oxide and thin gate oxide exhibit different effects for STI CMOS devices. And then, the analysis of interface reliability in the most advanced strained-silicon devices will be studied. It is important to evaluate the electric property of the new structure device. For the study of STI induced reliability, we present new results on the width dependent hot-carrier (HC) reliabilities for shallow-trench-isolated (STI) p-MOSFET’s in a multiple oxide CMOS technology. For the first time, different phenomena in p-MOSFET’s for a multiple oxide process have been observed. Extensive studies have been made for ALD grown and plasma treated oxide p-MOSFET’s. Experimental data shows that the drain current degradation is enhanced for a reducing gate width. For thick gate oxide (above 30Å), the ID degradation is due to the channel length shortening, and electron trap is dominant for the device degradation. While for ultra-thin gate oxide (below 20Å), the ID degradation is due to width narrowing, and hole trap is dominant, in which both electron and hole trap induced VT are significant. The degradation in thick-oxide p-MOSFET’s causes an increase of off-state leakage current and an increase of VT for that in thin-oxide with reduced width. The final part of the thesis is focused on the reliability characterization of most advanced strained-silicon MOSFET's. In order to investigate the interface property of strained-silicon MOSFET's, an advanced charge-pumping measurement is performed. From the experimental data, we found a two-level maximum charge-pumping current for the first time. It reveals that two layers of interface, including gate oxide/silicon and silicon/silicon germanium, are detected. Finally we apply hot carrier stress to evaluate the electrical reliability of this new generation devices.