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Journal articles on the topic 'Capacitive humidity sensor with porous gold'

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Author: Grafiati

Published: 30 May 2022

Last updated: 31 May 2022

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1

Rittersma, Z. M., A. Splinter, A. Bödecker, and W. Benecke. "A novel surface-micromachined capacitive porous silicon humidity sensor." Sensors and Actuators B: Chemical 68, no. 1-3 (August 2000): 210–17. http://dx.doi.org/10.1016/s0925-4005(00)00431-7.

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2

Doroftei, Corneliu, and Liviu Leontie. "Porous Nanostructured Gadolinium Aluminate for High-Sensitivity Humidity Sensors." Materials 14, no. 22 (November 22, 2021): 7102. http://dx.doi.org/10.3390/ma14227102.

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This paper presents the synthesis of gadolinium aluminate (GdAlO3), an oxide compound with a perovskite structure, for applications as a capacitive and/or resistive humidity sensor. Gadolinium aluminate was synthesized by the sol-gel self-combustion method. This method allowed us to obtain a highly porous structure in which open pores prevail, a structure favorable to humidity sensors. Most of the materials studied as capacitive/resistive humidity sensors have significant sensitivities only with respect to one of these types of sensors. In the case of the studied gadolinium aluminate with p-type electric conductivity, the relative humidity of the air has a significant influence on both capacitive and resistive types of electric humidity sensors. The capacity increases about 10,000 times, and the resistance decreases about 8000 times as the relative humidity increases from 0 to 98%. The investigated gadolinium aluminate can be used successfully to obtain high-sensitivity capacitive and/or resistive humidity sensors.

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3

Zargar, Zubair Hassan, and Tarikul Islam. "A Thin Film Porous Alumina-Based Cross-Capacitive Humidity Sensor." IEEE Transactions on Instrumentation and Measurement 69, no. 5 (May 2020): 2269–76. http://dx.doi.org/10.1109/tim.2019.2921438.

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4

Yao, Wei, Xuejiao Chen, and Jian Zhang. "A capacitive humidity sensor based on gold–PVA core–shell nanocomposites." Sensors and Actuators B: Chemical 145, no. 1 (March 4, 2010): 327–33. http://dx.doi.org/10.1016/j.snb.2009.12.021.

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5

Oliveira, Rodrigo de Matos, Maria do Carmo de Andrade Nono, and Gustavo de Souza Oliveira. "A Capacitive-Type Humidity Sensor Using Porous Ceramics for Environmental Monitoring." Advanced Materials Research 975 (July 2014): 194–98. http://dx.doi.org/10.4028/www.scientific.net/amr.975.194.

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The growing interest for the environmental monitoring in order to minimize the potential risk of landslide in hillsides and to prevent new disasters, has led the improvement in the development of new materials for manufacturing of capacitive sensor devices more reliable, more versatile and at lower cost. In this sense, ceramics have shown advantages from the point of view of mechanical resistance, resistance to chemical attacks and physical and chemical stability in aggressive environments. In addition, these materials have a unique structure, consisting of grains, grain boundaries, surfaces and pores, the control of which permit the attainment of suitable microstructures to be used as moisture sensors. The goal of this work is to investigate the capability of porous ceramics sensor devices, developed in National Institute of Space Research (INPE), to monitor the soil water dynamics. For that, ceramics sensors microstructures were characterized through scanning electron microscopy (SEM), X-ray diffractometry (XRD) and Hg porosimetry techniques. Electrical measurements were performed in function of water addition in soil samples, up to the saturation limit, for different time intervals, in the same way it happens in area with landslide risk in periods of rain. The analyses of the results evidenced that the ceramics devices are promising ones concerning to their potential in the monitoring of environmental parameters.

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6

Tousi, Maryam Mesgarpour, Yujing Zhang, Shaowei Wan, Li Yu, Chong Hou, Ning Yan, Yoel Fink, Anbo Wang, and Xiaoting Jia. "Scalable Fabrication of Highly Flexible Porous Polymer-Based Capacitive Humidity Sensor Using Convergence Fiber Drawing." Polymers 11, no. 12 (December 2, 2019): 1985. http://dx.doi.org/10.3390/polym11121985.

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In this study, we fabricated a highly flexible fiber-based capacitive humidity sensor using a scalable convergence fiber drawing approach. The sensor’s sensing layer is made of porous polyetherimide (PEI) with its porosity produced in situ during fiber drawing, whereas its electrodes are made of copper wires. The porosity induces capillary condensation starting at a low relative humidity (RH) level (here, 70%), resulting in a significant increase in the response of the sensor at RH levels ranging from 70% to 80%. The proposed humidity sensor shows a good sensitivity of 0.39 pF/% RH in the range of 70%–80% RH, a maximum hysteresis of 9.08% RH at 70% RH, a small temperature dependence, and a good stability over a 48 h period. This work demonstrates the first fiber-based humidity sensor fabricated using convergence fiber drawing.

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7

Parangusan, Hemalatha, Jolly Bhadra, Zubair Ahmad, Shoaib Mallick, Farid Touati, and Noora Al-Thani. "Capacitive type humidity sensor based on PANI decorated Cu–ZnS porous microspheres." Talanta 219 (November 2020): 121361. http://dx.doi.org/10.1016/j.talanta.2020.121361.

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8

Alam, Noor, and S. S. Islam. "Development of Y-Shaped Porous Anodic Alumina Humidity Sensor to Enhance Lower Detection Limit and Sensitivity." ECS Transactions 107, no. 1 (April 24, 2022): 11991–2000. http://dx.doi.org/10.1149/10701.11991ecst.

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The amount of water vapours in the air can affect the productivity and safety of many manufacturing processes, such as agriculture, pharmaceuticals, and semiconductor industries, as well as human comfort. The humidity sensors based on porous materials, such as Porous Anodic Alumina (PAA), have persuaded much attention because of their high porosity and tuneable structure. In this work, we have developed a PAA capacitive sensor using phosphoric acid electrolyte by the Differential Pulse Voltammetry method of anodization. The PAA-based humidity sensor shows ultra-high sensitivity, fast response, and a wide detection range of relative humidity (RH). Response and recovery time of the sensor are ~ 16 s and ~ 4 s, respectively at 64 RH%, and the sensor is capable of sensing 1-100 RH%. These results advocate that PAA is a propitious applicant for various humidity sensing applications, especially where low humidity detection is required i.e., paper, lithium-ion battery, tea industries, etc.

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9

Islam, T., C. Pramanik, and H. Saha. "Modeling, simulation and temperature compensation of porous polysilicon capacitive humidity sensor using ANN technique." Microelectronics Reliability 45, no. 3-4 (March 2005): 697–703. http://dx.doi.org/10.1016/j.microrel.2004.09.010.

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10

Li, Jiawei, Xinhua Lin, Jie Li, Ying Liu, and Min Tang. "Capacitive humidity sensor with a coplanar electrode structure based on anodised porous alumina film." Micro & Nano Letters 7, no. 11 (November 1, 2012): 1097–100. http://dx.doi.org/10.1049/mnl.2012.0666.

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11

Islam, Tarikul, Lokesh Kumar, and Geetika Aswani. "Effect of Polyethylene Glycol in Porous Alumina Based Thin Film Capacitive Humidity Sensor and Its Modelling." Transactions of the Indian Ceramic Society 72, no. 1 (March 2013): 47–51. http://dx.doi.org/10.1080/0371750x.2013.793995.

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12

Liu, Ming-Qing, Cong Wang, and Nam-Young Kim. "High-Sensitivity and Low-Hysteresis Porous MIMType Capacitive Humidity Sensor Using Functional Polymer Mixed with TiO2 Microparticles." Sensors 17, no. 2 (February 2, 2017): 0284. http://dx.doi.org/10.3390/s17020284.

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13

Qiang, Tian, Cong Wang, Ming-Qing Liu, Kishor Kumar Adhikari, Jun-Ge Liang, Lei Wang, Yang Li, et al. "High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching." Sensors and Actuators B: Chemical 258 (April 2018): 704–14. http://dx.doi.org/10.1016/j.snb.2017.11.060.

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14

Sberveglieri, G., G. Rinchetti, S. Groppelli, and G. Faglia. "Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate." Sensors and Actuators B: Chemical 19, no. 1-3 (April 1994): 551–53. http://dx.doi.org/10.1016/0925-4005(93)01082-f.

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15

Ma, Liyun, Aniruddha Patil, Ronghui Wu, Yifan Zhang, Zhaohui Meng, Wenli Zhang, Lingqing Kong, Xiang Yang Liu, and Jun Wang. "A capacitive humidity sensor based on all-protein embedded with gold nanoparticles @ carbon composite for human respiration detection." Nanotechnology 32, no. 19 (February 19, 2021): 19LT01. http://dx.doi.org/10.1088/1361-6528/abe32d.

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16

Alrammouz, R., J. Podlecki, A. Vena, R. Garcia, P. Abboud, R. Habchi, and B. Sorli. "Highly porous and flexible capacitive humidity sensor based on self-assembled graphene oxide sheets on a paper substrate." Sensors and Actuators B: Chemical 298 (November 2019): 126892. http://dx.doi.org/10.1016/j.snb.2019.126892.

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17

Priyadharshini, Balashanmugam, and Prasad Valsalal. "An Improved Humidity Sensor with GO-Mn-Doped ZnO Nanocomposite and Dimensional Orchestration of Comb Electrode for Effective Bulk Manufacturing." Nanomaterials 12, no. 10 (May 12, 2022): 1659. http://dx.doi.org/10.3390/nano12101659.

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The measurement and control of humidity is a major challenge that affects the sensing properties of sensors used in high-precision equipment manufacturing industries. Graphene Oxide(GO)-based materials have been extensively explored in humidity sensing applications because of their high surface area and functional groups. However, there is a lack of effective bulk-manufacturing processes for the synthesis of 2D-based nanocomposites with comb electrodes. Moreover, water intercalation within the layers of 2D materials increases recovery time. This work demonstrates the enhanced sensing characteristics of a capacitive/resistive GO-MnZnO nanocomposite humidity sensor produced using a cost-effective single-pot synthesis process. The in-plane sensing layer consistently improves sensitivity and reduces response time for a wide range of relative humidity measurements (10% to 90%). Interdigitated gold electrodes with varying numbers of fingers and spacing were fabricated using photolithography on a Si/SiO₂ for a consistent sensor device platform. The choice of nanomaterials, dimension of the sensor, and fabrication method influence the performance of the humidity sensor in a controlled environment. GO nanocomposites show significant improvement in response time (82.67 times greater at 40% RH) and sensitivity (95.7 times more at 60% RH). The response time of 4.5 s and recovery time of 21 s was significantly better for a wider range of relative humidity compared to the reduced GO-sensing layer and ZnMnO. An optimized 6 mm × 3 mm dimension sensor with a 28-fingers comb was fabricated with a metal-etching process. This is one of the most effective methods for bulk manufacturing. The performance of the sensing layer is comparable to established sensing nanomaterials that are currently used in humidity sensors, and hence can be extended for optimal bulk manufacturing with minimum electrochemical treatments.

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18

Boudaden, Jamila, Armin Klumpp, Hanns-Erik Endres, and Ignaz Eisele. "Towards Low Cost and Low Temperature Capacitive CO2 Sensors Based on Amine Functionalized Silica Nanoparticles." Nanomaterials 9, no. 8 (July 31, 2019): 1097. http://dx.doi.org/10.3390/nano9081097.

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Hybrid materials based on inorganic particles and an organic polymer were developed and used as an efficient sensing material for carbon dioxide (CO2). The sensing material consists of fumed silica that is functionalized with an organic polymer, polyethylenimine, by means of the impregnation method. The organic polymer is effectively immobilized around the silica nanoparticles and confirmed by infrared spectroscopy. Thermogravimetric analysis proves the thermal stability of the sensing material. CO2 capacitive sensors operating at temperatures lower than 70 °C were fabricated by depositing a thin layer of hybrid sensing material on interdigitated gold electrodes. Impedance spectroscopy explored the sensing capability of the hybrid organic–inorganic material towards CO2 in the presence of different relative humidity levels, as well as its stability and reversibility. This strategy to couple organic and inorganic materials as a sensing layer for CO2 paves the way for the design of a low-cost CO2 sensor.

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19

Yu, Shuguo, Hongyan Zhang, Chu Chen, Jun Zhang, and Peng Li. "Preparation and mechanism investigation of highly sensitive humidity sensor based on two-dimensional porous Gold/Graphite carbon nitride nanoflake." Sensors and Actuators B: Chemical 307 (March 2020): 127679. http://dx.doi.org/10.1016/j.snb.2020.127679.

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20

GAVRILA, Ana Mihaela, Tanta Verona IORDACHE, Carmen LAZAU, Traian ROTARIU, Ileana CERNICA, Hermine STROESCU, Mihai STOICA, Corina ORHA, Cornelia Elena BANDAS, and Andrei SARBU. "Biomimetic Sensitive Elements for 2,4,6-Trinitrotoluene Tested on Multi-Layered Sensors." Coatings 10, no. 3 (March 15, 2020): 273. http://dx.doi.org/10.3390/coatings10030273.

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In spite of technological progress, most of the current techniques for 2,4,6-trinitrotoluene (TNT) detection are time consuming due to laborious sensor preparation. Thereby, the aim of this work was to enlarge the knowledge for preparing sensitive elements for TNT with the aid of molecular imprinting; a known technique used to deliver biomimetic materials. The study first depicts the auto-assembly mechanism of (TNT) with functional diamino-silanes (i.e., N-(2-aminoethyl)-3-aminopropyl methyl dimethoxysilane), via “double” Meisenheimer complexes. This mechanism is being described herein for the first time and applied further to obtain molecularly imprinted polymer (MIP) films for TNT recognition. For testing the potential application of films as chemical sensor elements, typical rebinding assays of TNT in a liquid state and the rebinding of TNT in a vapor state, using multilayered sensor chips composed of quartz-chromium (Cr)-gold (Au)-titanium oxide (TiO2), were employed. Batch rebinding experiments have shown that thinner films were more efficient on retaining TNT molecules in the first five min, with a specificity of about 1.90. The quartz-Cr-Au-TiO2-MIP capacitive sensors, tested in vapor state, registered short response times (less than 25 s), low sensitivity to humidity and high specificity for TNT.

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21

Matysiak, Wiktor, Tomasz Tański, and Weronika Monika Smok. "Morphology and structure characterization of crystalline SnO2 1D nanostructures." Photonics Letters of Poland 12, no. 3 (September 30, 2020): 70. http://dx.doi.org/10.4302/plp.v12i3.1019.

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In recent years, many attempts have been made to improve the sensory properties of SnO2, including design of sensors based on one-dimensional nanostructures of this material, such as nanofibers, nanotubes or nanowires. One of the simpler methods of producing one-dimensional tin oxide nanomaterials is to combine the electrospinning method with a sol-gel process. The purpose of this work was to produce SnO2 nanowires using a hybrid electrospinning method combined with a heat treatment process at the temperature of 600 °C and to analyze the morphology and structure of the one-dimensional nanomaterial produced in this way. Analysis of the morphology of composite one-dimensional tin oxide nanostructures showed that smooth, homogeneous and crystalline nanowires were obtained. Full Text: PDF ReferencesN. Dharmaraj, C.H. Kim, K.W. Kim, H.Y. Kim, E.K. Suh, "Spectral studies of SnO2 nanofibres prepared by electrospinning method", Spectrochim. Acta - Part A Mol. Biomol. Spectrosc. 64, (2006) CrossRef N. Gao, H.Y. Li, W. Zhang, Y. Zhang, Y. Zeng, H. Zhixiang, ... & H. Liu, "QCM-based humidity sensor and sensing properties employing colloidal SnO2 nanowires", Sens. Actuators B Chem. 293, (2019), 129-135. CrossRef W. Ge, Y. Chang, V. Natarajan, Z. Feng, J. Zhan, X. Ma, "In2O3-SnO2 hybrid porous nanostructures delivering enhanced formaldehyde sensing performance", J.Alloys and Comp. 746, (2018) CrossRef M. Zhang, Y. Zhen, F. Sun, C. Xu, "Hydrothermally synthesized SnO2-graphene composites for H2 sensing at low operating temperature", Mater. Sci. Eng. B. 209, (2016), 37-44. CrossRef Y. Zhang, X. He, J. Li, Z. Miao, F. Huang, "Fabrication and ethanol-sensing properties of micro gas sensor based on electrospun SnO2 nanofibers", Sens. Actuators B Chem. 132, (2008), 67-73. CrossRef W.Q. Li, S.Y. Ma, J. Luo, Y.Z. Mao, L. Cheng, D.J. Gengzang, X.L. Xu, S H. Yan, "Synthesis of hollow SnO2 nanobelts and their application in acetone sensor", Mater. Lett. 132, (2014), 338-341. CrossRef E. Mudra, I. Shepa, O. Milkovic, Z. Dankova, A. Kovalcikova, A. Annusova, E. Majkova, J. Dusza, "Effect of iron doping on the properties of SnO2 nano/microfibers", Appl. Surf. Sci. 480, (2019), 876-881. CrossRef P. Mohanapriya, H. Segawa, K. Watanabe, K. Watanabe, S. Samitsu, T.S. Natarajan, N.V. Jaya, N. Ohashi, "Enhanced ethanol-gas sensing performance of Ce-doped SnO2 hollow nanofibers prepared by electrospinning", Sens. Actuators B Chem. 188, (2013), 872-878. CrossRef W.Q. Li, S.Y. Ma, Y.F. Li, X.B. Li, C.Y. Wang, X.H. Yang, L. Cheng, Y.Z. Mao, J. Luo, D.J. Gengzang, G.X. Wan, X.L. Xu, "Preparation of Pr-doped SnO2 hollow nanofibers by electrospinning method and their gas sensing properties", J.Alloys and Comp. 605, (2014), 80-88. CrossRef X.H. Xu, S.Y. Ma, X.L. Xu, T. Han, S.T. Pei, Y. Tie, P.F. Cao, W.W. Liu, B.J. Wang, R. Zhang, J.L. Zhang, "Ultra-sensitive glycol sensing performance with rapid-recovery based on heterostructured ZnO-SnO2 hollow nanotube", Mater. Lett, 273, (2020), 127967. CrossRef F. Li, X. Gao, R. Wang, T. Zhang, G. Lu, Sens. "Study on TiO2-SnO2 core-shell heterostructure nanofibers with different work function and its application in gas sensor", Actuators B Chem, 248, (2017), 812-819. CrossRef S. Bai, W. Guo, J. Sun, J. Li, Y. Tian, A. Chen, R. Luo, D. Li, "Synthesis of SnO2–CuO heterojunction using electrospinning and application in detecting of CO", Sens Actuators B Chem, 226, (2016), 96-103. CrossRef H. Du, P.J. Yao, Y. Sun, J. Wang, H. Wang, N. Yu, "Electrospinning Hetero-Nanofibers In2O3/SnO2 of Homotype Heterojunction with High Gas Sensing Activity", Sensors, 17, (2017), 1822. CrossRef X. Wang, H. Fan, P. Ren, "Electrospinning derived hollow SnO2 microtubes with highly photocatalytic property", Catal. Commun. 31, (2013), 37-41. CrossRef L. Cheng, S.Y. Ma, T.T. Wang, X.B. Li, J. Luo, W.Q. Li, Y.Z. Mao, D.J Gengzang, "Synthesis and characterization of SnO2 hollow nanofibers by electrospinning for ethanol sensing properties", Mater. Lett. 131, (2014), 23-26. CrossRef P.H. Phuoc, C.M. Hung, N.V. Toan, N.V. Duy, N.D. Hoa, N.V. Hieu, "One-step fabrication of SnO2 porous nanofiber gas sensors for sub-ppm H2S detection", Sens. Actuators A Phys. 303, (2020), 111722. CrossRef A.E. Deniz, H.A. Vural, B. Ortac, T. Uyar, "Gold nanoparticle/polymer nanofibrous composites by laser ablation and electrospinning", Matter. Lett. 65, (2011), 2941-2943. CrossRef S. Sagadevan, J. Podder, "Investigation on Structural, Surface Morphological and Dielectric Properties of Zn-doped SnO2 Nanoparticles", Mater. Res. 19, (2016), 420-425. CrossRef

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22

Kelly, M. J., T. R. Guilinger, D. W. Peterson, M. R. Tuck, and J. N. Sweet. "Oxidized Porous Silicon Moisture Sensors for Evaluation of Microelectronic Packaging." MRS Proceedings 225 (1991). http://dx.doi.org/10.1557/proc-225-313.

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ABSTRACTAccurate moisture measurements in microelectronic assemblies are crucial in assessing reliability of integrated circuits (ICs). We describe the fabrication and use of a silicon-based device for evaluation of moisture barrier coatings. The capacitive moisture sensors use oxidized porous silicon (OPS) as the sensing element. Porous silicon (PS) is formed by anodization of Si in hydrofluoric acid (HF). Oxidation of PS in oxygen produces OPS, which is also porous if an appropriate starting microstructure and oxidation treatment are selected. Metallization layers on the OPS and the wafer back complete the capacitor structure. The capacitance of OPS sensors is functionally related to the moisture content of the surrounding atmosphere. For example, the capacitance of one sensor changed from 4 nF/cm2when exposed to a moisture level of 300 ppm by volume (ppmv) to 36 nF/cm2at 10,000 ppmv. In addition to this excellent sensitivity, capacitor response to step changes in moisture is rapid and reversible. The sensors are also rugged, as demonstrated by their consistent performance during accelerated testing at 85% relative humidity and 140°C. A silicon nitride IC moisture barrier coating was deposited on sensors of this type after normal ceramic dual in-line packaging. Sensor operability after coating deposition was confirmed following intentional introduction of a pinhole into the moisture barrier coating.

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