Dissertations / Theses on the topic 'Al/AlN'
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DEPARDIEU, GILLES. "Proprietes optiques des nanocomposites al-aln." Paris 6, 1995. http://www.theses.fr/1995PA066580.
Full textBANAL, RYAN GANIPAN. "MOVPE Growth of AlN and AlGaN/AlN Quantum Wells and their Optical Polarization Properties." 京都大学 (Kyoto University), 2009. http://hdl.handle.net/2433/78005.
Full textTABARY, PATRICK. "Etude du diagramme de phases al#2o#3-aln." Paris 11, 1997. http://www.theses.fr/1997PA112219.
Full textTroadec, Carole. "Composite à matrice métallique Al-AlN : de la poudre au matériau." Grenoble INPG, 1996. http://www.theses.fr/1996INPG4205.
Full textŘihák, Radek. "Depozice Al a AlN ultratenkých vrstev na křemíkový a grafenový substrát." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2016. http://www.nusl.cz/ntk/nusl-254277.
Full textNepal, Neeraj. "Deep ultraviolet photoluminescence studies of Al-rich AlGaN and AlN epilayers and nanostructures." Diss., Manhattan, Kan. : Kansas State University, 2006. http://hdl.handle.net/2097/221.
Full textAl, Tahtamouni Talal Mohammed Ahmad. "MOCVD growth and characterization of al-rich ALN/ALGAN epilayers and quantum wells." Diss., Manhattan, Kan. : Kansas State University, 2007. http://hdl.handle.net/2097/431.
Full textXiao, Xiaoling, and S3060677@student rmit edu au. "Characterization of nano-structured coatings containing aluminium, aluminium-nitride and carbon." RMIT University. Applied Sciences, 2008. http://adt.lib.rmit.edu.au/adt/public/adt-VIT20081217.100453.
Full textIve, Tommy. "Growth and investigation of AlN/GaN and (Al,In)N/GaN based Bragg reflectors." [S.l.] : [s.n.], 2005. http://deposit.ddb.de/cgi-bin/dokserv?idn=978915607.
Full textBurghartz, S. [Verfasser]. "Thermophysikalische Eigenschaften von α-Al₂O₃, MgAl₂O₄ und AlN im Tieftemperaturbereich / S. Burghartz." Karlsruhe : KIT-Bibliothek, 1995. http://d-nb.info/1099432189/34.
Full textIve, Tommy. "Growth and investigation of AlN/GaN and (Al,In)N/GaN based Bragg reflectors." Doctoral thesis, Humboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät I, 2006. http://dx.doi.org/10.18452/15395.
Full textWe study the synthesis of AlN/GaN and (Al,In)N/GaN Bragg reflectors. The structures were grown by plasma-assisted molecular beam epitaxy (MBE) on 6H-SiC(0001) substrates. In addition, we study the impact of Si-doping on the surface morphology and the structural and electrical properties of the AlN/GaN Bragg reflectors. Crack-free and high-reflectance (R>99%) Bragg reflectors were achieved with a stopband centered at 450 nm. The Si-doped structures exhibit ohmic I-V behavior in the entire measurement range. The specific series resistance is 2-4 mOhmcm2. The results of the (Al,In)N growth experiments are summarized in a phase diagram which clearly shows the optimum growth window for (Al,In)N.
Rudolph, Pascale. "Physikalische Chemie der Laser-Material-Wechselwirkung mit Ba-Al-Borosilikatglas, AlN, SiC, SiC-TiC-TiB2." [S.l.] : [s.n.], 2001. http://www.diss.fu-berlin.de/2002/31/index.html.
Full textSperisen, Thierry. "Composites Al₂O₃/TiN préparés à partir de mélanges AlN/TiO₂ : mécanismes de la réaction et propriétés /." Lausanne, 1990. http://library.epfl.ch/theses/?nr=846.
Full textGranon, Arielle. "Étude du frittage réactif dans le système Al₂O₃-AlN-MgO : application à l'élaboration d'une céramique spinelle oxynitrurée transparente." Grenoble INPG, 1994. http://www.theses.fr/1994INPG4202.
Full text石井, 良太. "GaN およびAlNの励起子変形ポテンシャルの同定と(Al,Ga)N系歪量子構造の物性予測." 京都大学 (Kyoto University), 2013. http://hdl.handle.net/2433/174940.
Full textYu, Kuan-Hung. "Optical Spectroscopy of GaN/Al(Ga)N Quantum Dots Grown by Molecular Beam Epitaxy." Thesis, Department of Physics, Chemistry and Biology, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-19821.
Full textGaN quantum dots grown by molecular beam epitaxy are examined by micro-photoluminescence. The exciton and biexciton emission are identified successfully by power-dependence measurement. With two different samples, it can be deduced that the linewidth of the peaks is narrower in the thicker deposited layer of GaN. The size of the GaN quantum dots is responsible for the binding energy of biexciton (EbXX); EbXX decreases with increasing size of GaN quantum dots. Under polarization studies, polar plot shows that emission is strongly linear polarized. In particular, the orientation of polarization vector is not related to any specific crystallography orientation. The polarization splitting of fine-structure is not able to resolve due to limited resolution of the system. The emission peaks can be detected up to 80 K. The curves of transition energy with respect to temperature are S-shaped. Strain effect and screening of electric field account for blueshift of transition energy, whereas Varshni equation stands for redshifting. Both blueshifting and redshifting are compensated at temperature ranging from 4 K to 40 K.
Widmann, Frédéric. "Epitaxie par jets moléculaires de GaN, AlN, InN et leurs alliages : physique de la croissance et réalisation de nanostructures." Université Joseph Fourier (Grenoble), 1998. http://www.theses.fr/1998GRE10234.
Full textMohammad, Rezek Mahmoud Salim. "The Electronic Band Structure Of Iii (in, Al, Ga)-v (n, As, Sb) Compounds And Ternary Alloys." Phd thesis, METU, 2005. http://etd.lib.metu.edu.tr/upload/12606292/index.pdf.
Full texthere, the conduction band minima of both AlN and AlAs are located at X symmetry point, while that of AlSb is at a position lying along Gamma- X direction. An important part of this work consists of ETB calculations which have been parameterized for sp3d2 basis and nearest neighbor interactions to study the band gap bowing of III(In
Al)- V(N
As
Sb) ternary alloys. This ETB model provides a satisfactory electronic properties of alloys within reasonable calculation time compared to the calculations of DFT. Since the present ETB energy parameters reproduce successfully the band structures of the compounds at ¡
and X symme- try points, they are considered reliable for the band gap bowing calculations of the ternary alloys. In the present work, the band gap engineering of InNxAs1¡
x, InNxSb1¡
x, InAsxSb1¡
x, Al1¡
xInxN, Al1¡
xInxSb and Al1¡
xInxAs alloys has been studied for total range of constituents (0 <
x <
1). The downward band gap bowing seems the largest in InNxAs1¡
x alloys among the alloys considered in this work. A metallic character of InNxAs1¡
x, InNxSb1¡
x and InAsxSb1¡
x has been ob- tained in the present calculations for certain concentration range of constituents (N
As) as predicted in the literature. Even for a small amount of contents (x), a decrease of the electronic e®
ective mass around ¡
symmetry point appears for InNxAs1-x, InNxSb1-x and InAsxSb1-x alloys manifesting itself by an increase of the band curvature. The calculated cross over from indirect to direct band gap of ternary Al alloys has been found to be consistent with the measurements. As a last summary, the determinations of the band gaps of alloys as a function of contents, the concentration range of con- stituents leading to metallic character of the alloys, the change of the electronic effective mass around the Brillioun zone center (Gamma) as a function of alloy contents, the cross over from indirect to direct band gap of the alloys which are direct on one end, indirect on the other end, are main achievements in this work, indispensable for the development of mate- rials leading to new modern circuit components.
Rossner, Ulrike. "Epitaxie des nitrures de gallium et d'aluminium sur silicium par jets moléculaires : caractérisation structurale et optique." Université Joseph Fourier (Grenoble), 1995. http://www.theses.fr/1995GRE10181.
Full textLee, Chan-Shang, and 李慶雄. "Investigation of microstructure and mechanical property of Al/AlN composite." Thesis, 1993. http://ndltd.ncl.edu.tw/handle/95671974583660049875.
Full textYang, Tsung-yeh, and 楊宗燁. "PROCESSING OF Al/SiC-AlN ALLOY COMPOSITE FOR HEAT SINK APPLICATION." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/86803526744535924474.
Full text大同大學
材料工程學系(所)
101
High content of silicon carbide-reinforced aluminum composite was widely used because its high thermal conductivity, low coefficient of thermal expansion. However, current performance of Al/SiC substrate will not be enough to meet the thermal management requirement in the future. Further improvements on the thermal conductivity of Al/SiC composites is a must. Adding AlN into SiC to fabricate Al/SiC-AlN appears to be a potential way to improve thermal conductivity of the composites. In the first part of this study, Al/SiC was fabricated using various particle sizes and different purities of silicon carbide by squeeze casting method. The influences of processing parameters such as temperature, particle size, casting pressure were also investigated. In the second part of study, -150+325 mesh silicon carbide was blended with 20μm aluminum nitride with different weight fraction and were used to fabricate Al/SiC-AlN composites. In order to investigate the effects of surface condition of AlN on the thermal properties, silicon alkoxide-coated aluminum nitride was used in third part of the study. The results showed that the best squeeze casting conditions were:temperature, 800℃; pressure, 50MPa; holding time, 10 minutes. The powder particle size range should be narrow. With this condition, the best relative density of composites of Al/SiC-AlN could reach 97%. The microstructure and XRD analyses showed SiC and AlN distributed uniformly and there was no Al4C3 phase detected. In the Al/SiC specimen, the Al/LgSiC had the highest thermal conductivity which could reach 189 W/mK but the flexural strength was only 225 MPa; In contrast, Al/FbSiC had the lowest thermal conductivity of 129 W/mK but the highest flexural strength was up to 343 MPa. Due to the poor wettability and high thermal resistant between Al alloy and AlN, the thermal conductivity of Al/gSiC-AlN decreased with the AlN content. On the contrary, as the amount of surface coated AlN increased in Al/gSiC-sAlN, the thermal conductivity increased to a highest value of 208W/mK. The flexural strength of Al/gSiC-AlN and Al/gSiC-sAlN increase as the content of aluminum nitride increase. But Al/gSiC-sAlN had higher flexural strength than Al/gSiC-AlN. The highest flexural strength reached 303MPa.
Chen, Chia-Wei, and 陳佳緯. "Fabrication of AlN Films Deposited on Al Substrate by Microwave Plasma." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/97673611134893326479.
Full text龍華科技大學
工程技術研究所
101
In this study, the microwave plasma nitriding method will be carried out for the aluminum nitride surface treatment way to explore the formation and research. Research methods to change process parameters include base temperature, reaction gas ratio,microwave power to microwave plasma nitriding treatment. Analysis results base temperature 550℃, reaction gas ratio N2:H2=50:150sccm, microwave power 1000W to better nitridation reaction Finally, In this study, the best parameters are: microwave power 1000W, Reaction gas N2:H2=50:150sccm and base temperature 550℃to microwave plasma nitriding treatment, nitrided aluminum plate specimen analysis,the results showed that nitrogen ratio can be as high as 23.38% and a thickness of 15μm.
Yao, Li-Ren, and 姚力仁. "Low-vacuum preparation of Al and AlN thin films by magnetron sputtering." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/80713755696017924667.
Full textChang, Wei-kai, and 張為凱. "Applying PIII process to study the Growth Mechanism of AlN / Al Alloys." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/32806901530820154554.
Full text國立臺灣科技大學
機械工程系
101
The objective of this study is to investigate the growth mechanism of AlN on Aluminum alloys by applying Nitrogen Plasma Immersion Ion Implantation (N-PIII) technique to treat the surface layer of the aluminum alloy. AA7005、commercially pure aluminum (1N30) and super high purity aluminum(5N) are used as the substrate material in this study. Effects of bias voltage 10 kV, 20kV and 30kV of N-PIII process on the thickness, growth rate and microstructure of the modified layer was studied. The influences post-process heat-treatment on the microstructure and the surface characteristics of the modified layer were investigated and analyzed. Nano-indentation test and Glow Discharge Spectrometer (GDS) test were conducted on the treated specimens to obtain the depth evolution profiles of the hardness and the depth profiles of nitrogen element from the surface of specimen, respectively. The friction coefficients of the modified layer were measured by Flat-on-Flat method. Specimens being N-PIII treated were subjected to heat treatments. Then, nano-indentation test, GDS test, Flat-on-Flat test were conducted on these heat-treated specimens to examine the effects of post-process heat treatment on the surface properties of the modified layer. Experimental results showed that the penetration depth of nitrogen ion is related to the bias voltage and the impurity contents of aluminum alloy. The higher bias voltage, the deeper penetration depth and the larger nitrogen ions dosage. High bias voltage can significantly increase the surface hardness of treated specimens; the effect is highly profound in 5N specimens. After the heat-treatment, internal nitrogen in the specimen would diffuse to the external, and reduce the width of modified layer. This phenomenon can promote the formation of aluminum nitride, and to get better surface property. The microstructure observation showed that, after heat treatment bubbles were generated in the white layer which is a compound layer of AlN, εnitrateγ'nitrate. The generate of bubbles will severely affect the flatness of the aluminum nitride layer, increasing the coefficient of friction of the specimen. Specimen subjected to PIII treatment plus laser surface heat treatment, failed to improve the surface hardness, and the value of surface hardness reduced to the hardness values of unmodified specimen.
Chang, S. T., and 張韶廷. "A Study of the Mechanical Properties on Squeeze Casting AlN/Al Composites Materials." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/22323163057277296616.
Full text國立成功大學
材料科學及工程學系
87
Aluminum Nitride (AlN) has been used for substrate application because its extremely high conductivity, good electrical resistance and low thermal expansion coefficient. This ceramic is also know as good millitary armor material for reasons that is still under investigation. One drawback with this material for structural application is its low fracture toughness. Aluminum metal is therefore added into AlN in this study for the purpose of improving toughness. This study is on mechanical properties of AlN/Al composites. The experimental process is described as follows. First, sintering porous AlN preform in N2、1500℃、1 hour, then by squeeze casting process, molten pure Al was infiltrated into AlN preform to make AlN/Al composite. The produce materials were subjected to examination, microstructure, physical and mechanical properties.
Chang, Cheng-Chieh, and 張政傑. "Study on the Effect of AlN/Al Diffusion Bonding with Rare Earth Element." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/23xzcv.
Full text國立臺北科技大學
製造科技研究所
106
In this study, the effect of adding different content of La of titanium film on AlN substrate was examined. Then, substrate direct bonding with AlN/Al. Ceramic surface was pre-metallized by Physical Vapor Deposition (PVD). The effect of different content on substrate were examined by heat treatment (350℃-550℃) and XRD measurement. Solid-state diffusion bonding carried out through vacuum hot press at the temperature of 350℃, 450℃ and 550℃ for 2 hours. Bonding mechanism, tensile bonding effect, thermal resistance properties and mechanical properties were inspected. The XRD results show that the TiN phase generate after heat treatment at 550 °C. This proves that the rare earth element La can increase the wettability and enhance the reaction with AlN, resulting in a relatively stable TiN phase. Observing cross section of the sample through EPMA, atomic diffusion distance will be increased by adding more content of La. Adding the content of 2 wt% La, increasing the diffusion distance by 67%.Moreover, the results from TEM indicated that the primary interfacial reaction layers were composed of AlN/TiN/Al3Ti/CuTi/Al4Cu9,Al2Cu,AlCu/Al. Through the thermal resistance detection and analysis, it is reveal that the thermal resistance value is 0.54℃/W at 450℃, and the thermal resistance value becomes higher due to the thickening of the reaction layer at 550℃. The thermal resistance value is 0.72℃ /W. The tensile strength at a temperature of 350 ° C is 6.14 ~ 8.51 MPa, and tensile strength is greatly increased over 28 MPa of 450 ° C.
Huang, Kuo-Hsiung, and 黃國雄. "Production of Ultrafine Al Powders and its Application on the Sintering of AlN Substrates." Thesis, 1994. http://ndltd.ncl.edu.tw/handle/73528197765693413689.
Full textChing-HsinLin and 林靜欣. "Process Development for Combustion Synthesis of AlN Powder Using Al Reactant with Different Morphology." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/63075999281471129810.
Full text國立成功大學
化學工程學系碩博士班
98
Process development for combustion synthesis of AlN powder using Al reactant with different morphology. The reactant of experiment is different from the aluminium powder used in laboratory, the raw materials used are A-2 and A-3. A-2: The raw materials used are the 75 μm flaky aluminium powder, using programmble temperature and humidity chamber to take the surface treatment of aluminium powder. A combustion synthesis reaction was ignited by heating and lead air to fire, produce AlN under the appropriate reaction condition, the conversion ratio of product is in above 99. A-3: 15 ~ 85 μm gray irregular particle form aluminium powder, added with aluminium nitrogen process a combustion synthesis reaction, then produce AlN. The conversion ratio of product is 97.97. It is APS, GPS and phosphoric acid to take the nitrogen aluminium powder surface treatment used in the laboratory, analyze its ESCA picture, and then analyze ESCA picture of the commercial aluminium nitrogen powder.
Nagendra, N. "Processing, Microstructure And Fracture Characteristics Of High Volume Fraction Al2O3/(Al-AlN)Matrix Composites." Thesis, 1997. http://etd.iisc.ernet.in/handle/2005/1796.
Full textLin, Chen-feng, and 林辰峰. "The study of estimate life of LED modules on the AlN, Al2O3 and Al substrates." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/436e84.
Full text國立中央大學
光電科學與工程學系
102
This study is to establish the aluminum nitride substrate, the alumina substrate and the aluminum substrate LED module to estimate its lumen maintenance of life model. Refer to IES LM-80-08 lumen maintenance light measurement methods. The aluminum nitride substrates, alumina substrates, aluminum substrates, each type for 10 pcs, placed under 55 and 85 degrees environment. Using the IES LM-79-08 light emitting diodes electrical and photometric characteristics measuring method, every 1000 hours recording lumen maintenance until 6000 hours. The resulting data use IES TM-21-11 estimate diode light source LED lumen maintenance performed life prediction module. LED modules to build three different models to estimate the life of the substrate, and the results can be applied in future in situ temperature measurement test (ISTMT) combined interpolation method to estimate the overall life of the lighting system. The result of curve fitting L70(6K):At 55 °C, AlN substrate is 36,642 hours, Al2O3 substrate is 27116 h, Al substrate is 26932 h, At 85 °C, Al2O3 substrate is 5422 h, AlN substrate is 5379 h, Al substrate is 5035 h. Data interpolating the temperature 70 ° C results, AlN substrate is 13724 h, Al2O3 substrate is 11886 h, Al substrate is 11401 h.
Jaw, Jyh-Hong, and 趙志鴻. "Growth Mechanisms and Wear Behavior of AlN Crystals in Fe-Mn-Al-C Alloys after Nitridation." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/46707170788982266308.
Full text國立臺灣科技大學
機械工程系
92
The nitriding kinetics and the interface microstructure of the high toughness austenitic Fe-Mn-Al-C-(Cr) alloys were studied at 900, 1000, and 1050°C in a flowing atmosphere of pure nitrogen for 1, 9, 16, and 25 hr. The wear behavior of the alloys with/without nitridation as also examined. The plate-shaped h.c.p. AlN is the major product of the chemical reaction in the nitriding process of the alloys. The growth kinetics of the nitride layer obeys the parabolic law. On the one hand, the N atoms diffuse into the alloy matrix by volume diffusion. AlN is a stoichiometric ionic-compound which can prevent the diffusion of N atoms. Because the area fraction of AlN increased with increasing Al content, the area for N atoms diffusion decreased. Thus, the more the Al content in alloys, the less the depth of the nitride layer. On the other hand, the N atoms diffuse to the front of the AlN crystals at the reaction front quickly along in the phase interface between the AlN crystal and the matrix. Then AlN formed via the chemical reaction between N and Al. The more the Al content in alloys, the more the number of the trapped N atoms, and the less the diffusion depth of the N atoms. Therefore, it is pointed out that the depth of the nitride layer decreased with increasing Al content again. The orientation relationship between the AlN and f.c.c. matrix is (0001)AlN // (1-11)matrix, (2-1-10)AlN // (110)matrix, and [01-10]AlN // [-112]matrix. The ledge mechanism controls the growth behavior of the AlN in the alloy matrix. The terrace planes of the ledge structure are (0001)AlN // {111}matrix, and the ledge planes are {01-10}AlN // {-112}matrix. There are four different {111} planes in the f.c.c. crystal structure, and just only one (0001) plane in the h.c.p. AlN. The result in the AlN precipitated in the form of Widmanstätten-plate structure. The hardness of the raw alloys of the Fe-Mn-Al-C systems increased with increasing Al content. When oxide film was absent on the worn surface, the wear resistance increased with increasing hardness of the raw alloy. However, when oxide was absent on the worn surface, the governing wear mechanisms were abrasion, surface fatigue, shear fracture, or delamination, which cause severe wear. On the contrary, when oxide formed on the worn surface due to the alloys have been nitridized or the Al content was smaller in alloys, the governing wear mechanism was tribooxidation, which causes less wear.
Ive, Tommy [Verfasser]. "Growth and investigation of AlN/GaN and (Al,In)N/GaN based Bragg reflectors / von Tommy Ive." 2005. http://d-nb.info/978915607/34.
Full textChiang, Li-Wei, and 姜禮維. "Effect of the AuSn Eutectic Bonding Joint by Studying the Underneath Al/AlN Multiple Strain Release Layers." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/3u5xs3.
Full text國立虎尾科技大學
光電與材料科技研究所
101
In this thesis, the Al/AlN multiple-layer films were used as the strain release layers between glass substrate and AuSn eutectic metal. Due to a great amount of heterostructural interface change, it is beneficial to increase the material toughness, stop the fissure expansion, and enhance the abrasion resistance. In addition, Al is a soft metal with extraordinary ductility, and AlN, as a ceramic material, shows extremely high heat transfer coefficient and hardness. The integration of these two materials can form a structure that is applicable to create the strain release layers so as to enhance the later deposited film reliability. This study utilized sputtering to deposit one set, two sets, and three sets of Al/AlN multiple-layer films onto the glass substrates, and finalize an Al cap layer. After the aluminum film surfaces were chemically processed. The electroplating technique was used to prepare the required AuSn eutectic bonding layers. The optimized shear stress and bonding temperature were discussed for various release layers. It was found that the optimal bonding temperature and shear stress increased with increasing the number of film layers. Subsequently, the SEM and XRD analysis were performed on various films to find more the optimal eutectic phase ζ (Au5Sn). In the final, the photolithography was used to define the pattern of flip-chip LED bounding carrier. The encapsulated LED sample was operated at 20 mA, and the forward voltage was measured as 4.09 V.
Rudolph, Pascale [Verfasser]. "Physikalische Chemie der Laser-Material-Wechselwirkung mit Ba-Al-Borosilikatglas, AlN, SiC, SiC-TiC-TiB2 / von Pascale Rudolph." 2001. http://d-nb.info/964150204/34.
Full textLumbantoruan, Franky Juanda, and 盧釩達. "The Growth of Ultrathin Al(Ga,In)N/AlN/GaN Heterostructures by MOCVD for High Electron Mobility Transistor Applications." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/aq76sm.
Full text國立交通大學
材料科學與工程學系所
107
Due to the characteristic of wide bandgap, high breakdown field, high electron mobility and excellent thermal conductivity, GaN has turned into one of candidates to exceed the limit of silicon to pursue the groundbreaking high-frequency, high-efficiency, and high power density conversion. GaN high electron mobility transistors (HEMT) have already attracted a lot of attentions due to the generation 2 Dimensional Electron Gas at the interface. Compared to AlGaN as the barrier layer, the use of InAlN and InAlGaN as barrier layer is attractive due to the higher free carrier at the interface attributed to the strong polarization of barrier layer. The objective of this thesis is to investigate, understand and control the mechanism that limits the performance of AlGaN/GaN and InAlGaN/GaN transistors. Particular attention will be given to the optimization growth condition for both AlGaN barrier layer and InAlGaN barrier layer and the gate leakage analysis for InAlGaN HEMT. In the first part, we report the influence of TMAl preflow to the AlN buffer layer and GaN thin film was studied by Optical Microscope, Atomic Force Microscope, X-ray diffraction and Transmission Electron Microscope. Different duration of TMAl preflow lead to substantially differences of the AlN buffer layer and GaN film properties in terms of surface morphology and crystal quality. With the optimum duration of TMAl preflow, crystal quality and surface roughness of GaN can be improved In the second part we describe the effect of NH3 flow rate during the AlGaN barrier layer growth on the material properties of AlGaN/GaN HEMT. NH3 flow rate during AlGaN barrier growth not only affects the growth efficiency and surface morphology of the AlGaN barrier layer but also the influences the concentration of carbon impurity in the AlGaN barrier layer. Carbon, origination from the metal precursor, plays a role in the electron compensation for AlGaN/GaN HEMT. Optimized NH3 flow results in the improvement of surface morphology and recovered free carrier 2 Dimensional Electron Gas. In the third part, the gate leakage mechanism for InAlGaN/GaN high electron mobility transistors is systematically studied using temperature-dependent gate current- voltage characteristics. The gate current of the InAlGaN/GaN HEMT was analyzed by fitting the experimental data using Themionic Emission (TE), Poole Frenkel (PF) and Fowler-Nordheim (FN) tunneling. The results show that (1) reverse leakage current in the thin InAlGaN barrier layer is dominated by FN tunneling due to triangular barrier formation; (2) for thicker barrier layer, the reverse leakage current at low electric field (<2.23MV/cm) is dominated by PF emission; (3) at high electric field near the threshold voltage the FN tunneling dominates. Finally, the effects of the growth temperature on the structural and electrical properties of the InAlGaN/GaN heterostructures grown on c-plane sapphire substrates are investigated. It is observed that the Gallium incorporation increases with the increase of the growth temperature. Meanwhile, the surface roughness decreases from 0.49 nm to 0.34 nm with the increase of growth temperature. The variation of structural properties, composition and surface morphology influences the transport properties of the InAlGaN/GaN heterostructures. The experiement shows that optimized temperature window is between 900°C and 950°C.
Tsai, Bing-Fu, and 蔡秉富. "The Effect of AlN Layer on the Electrical Properties of Ni-Cr-Si-Al Thin Film by DC Magnetron Sputtering." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/89392747959657533480.
Full text國立高雄應用科技大學
機械與精密工程研究所
101
In this study, aluminum nitride and nickel-chromium-silicon- aluminum thin films are prepared using DC magnetron sputtering deposition, respectively. To obtain different compositions of AlN thin film, the sputtering conditions are adjusted such as sputtering power, concentration of nitrogen ratio and annealing temperature. The effects of sputtering parameters on the phase transformation, microstructure and mechanical property, and electrical property of AlN and Ni-Cr-Si-Al thin films are investigated. The results show that as-deposited films with amorphous structure are observed using X-ray diffraction analysis. When 500 W sputtering power is applied to prepare AlN thin films, the AlN peaks are appeared at 500 ℃ annealing. The AlN crystalline is enhanced in thin films at 600 ℃ annealing. In addition, pure AlN phase with hexagonal can be obtained at 500 ℃ annealing when the sputtering power is enhanced from 500 W to 800 W. In mechanical analysis, the micro-hardness is increased from 32 Hv (500 W) to 70 Hv (800 W), and the scratch width is decrease from 90 μm (500 W) to 15μm (800 W). Based on the optimum processes of AlN thin films, the Ni-Cr-Si-Al thin films are deposited on AlN thin film/Al2O3 substrates. The effects of Ar/N2 ratio, sputtering power and annealing temperature of AlN thin film on the electrical properties of Ni-Cr-Si-Al thin films are investigated. The results showed that the resistivity of Ni-Cr-Si-Al thin films with AlN film as middle layer is 9962 μΩ-cm with -205 ppm/℃TCR after 360 ℃/4 h annealing. However, the resistivity of Ni-Cr-Si-Al thin films without AlN film as middle layer is 10789 μΩ-cm with -180 ppm/℃TCR after 360 ℃/4 h annealing.