Dissertations / Theses on the topic 'Actuation thermale'
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Razzaq, Wasif. "Microfluidic spinning of polymer microfibers : effect of operating parameters on morphology and properties towards the development of novel and smart materials." Thesis, Strasbourg, 2022. http://www.theses.fr/2022STRAE004.
Full textMicrofluidic spinning is an emerging technology to produce micro/nanofibers which have a significant potential in advanced applications such as tissue engineering, wearable electronics, drug delivery, and water harvesting. In microfluidic spinning, fibers with controlled diameters and morphologies could be easily produced by precisely manipulating the fluids flow and the geometry of the microfluidic device. The purpose of this doctoral project was to develop expertise and skills in the field of microfluidic spinning to produce polymer fibers using UV photopolymerization of the monomers using a capillary-based microfluidic device with the following objectives : (1) the development of an empirical relationship to predict the fiber diameter considering the different operating and materials parameters, (2) the production of Janus/Hecate fibers from monomers with different chemical and physical properties with controllability of morphological and mechanical properties that were explored to remove simultaneously cationic and anionic dyes and to prepare thermoresponsive Janus fiber actuators, and (3) the development of an in-process rapid surface modification approach to modify the surface of fibers
Miralles, Vincent. "Migration of biphasic systems by thermal actuation in microconfinement." Thesis, Paris 6, 2015. http://www.theses.fr/2015PA066365/document.
Full textThis thesis offers two original applications involving temperature control in microsystems, dealing with hydrodynamics and soft matter. The first part focuses on the drainage control of 2D microfoams by Marangoni effect. To this end, we apply a constant temperature gradient throughout a 2D foam confined in a Hele-Shaw cell, and observe that the induced thermocapillary stress is strong enough to counterbalance and even overcome the natural effect of gravity drainage. The mass conservation in the cell leads to the definition of characteristic drainage times inherent to each effect at play, paving the way to the accurate control of the drainage dynamics in our model system.In a second part, we develop a versatile technology for digital microfluidics, based on thermomechanical effect. This effect consists in locally heating a deformable material (i.e. PDMS), which dilation is used to perform all the elementary operations encountered in digital microfluidics, such as droplet generation, motion, storage, sorting, splitting ... our technology being effective for both oil-in-water and water-in-oil droplets
Baker, Michael S. "On-Chip Actuation of Compliant Bistable Micro-Mechanisms." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/52.
Full textWilcox, Daniel L. "Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation." Diss., CLICK HERE for online access, 2004. http://contentdm.lib.byu.edu/ETD/image/etd526.pdf.
Full textLammers, Zachary A. "Thermal Management of Electromechanical Actuation System for Aircraft Primary Flight Control Surfaces." University of Dayton / OhioLINK, 2014. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1399021324.
Full textSmith, Byron Fitzgerald. "Development and Characterization of a Mechanically Prestressed Piezoelectric Composite." VCU Scholars Compass, 2008. http://scholarscompass.vcu.edu/etd/869.
Full textMinav, Tatiana, Luca Papini, and Matti Pietola. "A Thermal Analysis of Direct Driven Hydraulics." Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2016. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-200125.
Full textLott, Christian D. "Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator." BYU ScholarsArchive, 2005. https://scholarsarchive.byu.edu/etd/306.
Full textCragun, Rebecca. "Thermal Microactuators for Microelectromechanical Systems (MEMS)." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/54.
Full textMessenger, Robert K. "Modeling and Control of Surface Micromachined Thermal Actuators." Diss., CLICK HERE for online access, 2004. http://contentdm.lib.byu.edu/ETD/image/etd434.pdf.
Full textMarzette, Russell K. Jr. "A Feasibility Study of Thin-Shell Deformable Mirrors with Adaptive Truss Support for Spaced-Based Telescopes." Thesis, Georgia Institute of Technology, 2006. http://hdl.handle.net/1853/16214.
Full textUpadhyay, Vandana. "Design and fabrication of a re-configurable micromirror array for an optical microspectrometer." [Tampa, Fla.] : University of South Florida, 2005. http://purl.fcla.edu/fcla/etd/SFE0001138.
Full textDhakal, Binod. "Characterization of a 3D Multi-Mechanism SMA Material Model for the Prediction of the Cyclic "Evolutionary" Response of NiTi for Use in Actuations." University of Akron / OhioLINK, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=akron1384506213.
Full textQiu, Shipeng. "INVESTIGATION OF THERMAL, ELASTIC AND LOAD-BIASED TRANSFORMATION STRAINS IN NITI SHAPE MEMORY ALLOYS." Doctoral diss., University of Central Florida, 2010. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/3338.
Full textPh.D.
Department of Mechanical, Materials and Aerospace Engineering
Engineering and Computer Science
Materials Science & Engr PhD
Eckert, Paulo Roberto. "Metodologia de projeto de atuador eletromagnético linear para sistemas de suspensão semiativa e ativa." reponame:Biblioteca Digital de Teses e Dissertações da UFRGS, 2016. http://hdl.handle.net/10183/143941.
Full textThis work presents an innovative linear electromagnetic actuator design methodology for application in semi-active and active suspension systems. The methodology, synthesized in a flowchart, sets criteria to determine requirements such as axial force and stroke that an actuator should develop considering a vibration system with one degree of freedom with harmonic base excitation when the skyhook control method is applied. A linear moving-coil electromagnetic actuator with dual quasi-Halbach arrays of permanent magnets that presents high force density, low moving-mass, no reluctance force and low force ripple is defined as a case study. A finite element numerical parameterized model that describes the electromagnetic behavior of one pole pitch of the device is created and analyzed, considering dimensional constraints, with the design objectives defined as: high force density and low ripple of force with brushless AC drive. Based on the model of one pole pitch of the device the active volume and all dimensions are defined in order to meet the design requirements. Once the actuator dimensions are defined, based on the electromagnetic model, a numerical thermal model was constructed, which allows to evaluate the maximum applicable electric current density so that the maximum temperature at the windings is not exceeded. Furthermore, the thermal distribution gives the operating temperature of the permanent magnets, which present performance highly dependent on temperature. With the results of the thermal simulation, the electromagnetic-thermal coupling is performed by correcting permanent magnet properties and by applying a parametric-dependent effective current density. The coupled model is simulated and analyzed so that the final dimensions of the actuator can be obtained with the same design objectives previously mentioned, while respecting thermal operating limits. In addition, the work presents analytical models of the electromagnetic and thermal behavior of the actuator that can be the basis for implementation of the proposed methodology, if it is based on analytical models, and can further be used for the application of mathematical optimization of the device. Finally, a prototype was built to validate the proposed method. Measurements were carried out to assess magnetic flux density in the air gap, open-circuit induced voltage, static force and dynamic tests with the device installed in a test bench that was developed during this work. The results show the effectiveness of the proposed method since experimental results have shown good agreement with the expected results.
Colmenares, David. "Design and Control of a Resonant, Flapping Wing Micro Aerial Vehicle Capable of Controlled Flight." Research Showcase @ CMU, 2017. http://repository.cmu.edu/dissertations/1032.
Full textJensen, Kimberly A. "Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/230.
Full textSamel, Björn. "Novel Microfluidic Devices Based on a Thermally Responsive PDMS Composite." Doctoral thesis, KTH, Mikrosystemteknik, 2007. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4470.
Full textQC 20100817
Belháč, Jakub. "Optimalizace pohybu termoelektrického lineárního aktuátoru." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2011. http://www.nusl.cz/ntk/nusl-229391.
Full textDeng, Kangfa, Gerald Gerlach, and Margarita Guenther. "Force-compensated hydrogel-based pH sensor." SPIE, 2015. https://tud.qucosa.de/id/qucosa%3A35185.
Full textCasalena, Lee. "Multimodal Nanoscale Characterization of Transformation and Deformation Mechanisms in Several Nickel Titanium Based Shape Memory Alloys." The Ohio State University, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=osu1499568013015563.
Full textБайда, Євген Іванович. "Мультифізичні моделі високовольтних вакуумних вимикачів з бістабільними поляризованими актуаторами в динамічних режимах." Thesis, НТУ "ХПІ", 2018. http://repository.kpi.kharkov.ua/handle/KhPI-Press/37466.
Full textDissertation for the degree of Doctor of Technical Sciences in specialty 05.09.01 "Electric Machines and Apparatus" (141 – Electrical Engineering). – National Technical University "Kharkov Polytechnic Institute", Kharkov, 2018. In the dissertation work the problems of creation of multiphysical models used in the research and designing of medium voltage vacuum switching devices are considered. The object of the study is transient electromagnetic processes in a heterogeneous, nonlinear, moving medium conducting electric current and including high-coercive permanent magnets; processes related to the theory of elasticity, solid state mechanics, phenomena in non-stationary thermal fields, and the theory of continuum mechanics. Subject of research – vacuum switching devices with bistable polarized actuators; dynamics of actuators; static and dynamic deformation of the contact system of the circuit breaker and the mechanism under the influence of the actuator; the ability of the circuit breaker to switch on and the thermal stability of the circuit breaker under the influence of emergency overvoltage's; liquid dampers; electromagnetic actuator’s control circuit. Research methods – the investigations of electromagnetic, mechanical, thermal processes and fluid flow processes are based on analytical and numerical mathematical models that take into account the most significant linear and nonlinear interconnections between phenomena. Numerical solutions of partial differential equations are carried out using special application software packages, the reliability of which is repeatedly confirmed and does not cause doubts, as well as codes written by the applicant. The following scientific results have been obtained in the work. For the first time a model of dynamics of a polarized bistable actuator with permanent magnets has been developed based on calculations of transient electromagnetic field in a nonlinear non-uniform medium conducting electric current and containing permanent magnets taking into account the motion of parts of the actuator in conjunction with nonlinear equations of electric circuit and motion. The parameters of forced switching on of actuators are calculated and recommendations on the design and parameters of actuators are given. The multiphysical models of studying the influence of actuator parameters on static and dynamic mechanical stresses in a vacuum chamber bellows have been developed, recommendations have been obtained for choosing the optimal structure of a bellows and its durability, its fatigue endurance is calculated. A model of the influence of actuator parameters on dynamic mechanical stresses in the contact system and the switching mechanism based on the theory of elasticity was developed, due to which the geometry of the drive shaft was calculated and its material was chosen. For the first time, multiphysical models have been developed to determine the effect of the actuator's dynamic characteristics on the ability of the circuit breaker to activate the emergency overloads: shock dynamics and contact vibration time are defined; the Stefan thermal problem solved, the heat of phase transitions is taken into account, and the possible strength of contact welding is determined; recommendations for reducing the contact collision rate due to the use of a liquid damper based on the Navies-Stokes equation and dynamics of the actuator are given; the model of heating and deformation of the contact surface was developed and on its basis recommendations were given regarding calculations of the required force of contact pressure and the geometry of the contacts in the conditions of thermal stability. The original models of circuits connecting actuator coils to different sources of electric energy have been investigated and analyzed, and recommendations on their practical implementation have been given. The results of the study were checked on layouts, prototypes and used in the development of vacuum circuit breakers, tests of which models were confirmed by the obtained recommendations and conclusions. Implementation of the main scientific and practical results of the dissertation work was reflected: in agreement with «ABM Ampere», Kremenchk agreement No. 33/98-12 between NTU «KhPI» and «ABM Ampere» LLC «Influence of the parameters of a bistable polarized vacuum actuator of the circuit breaker on its ability to switch on», research and development work performed by order of Ukrenergokompleks-2 LLC, Kharkov «Bistable actuators in control plants and distribution of liquid flows», the acts of implementation are added.
Байда, Євген Іванович. "Мультифізичні моделі високовольтних вакуумних вимикачів з бістабільними поляризованими актуаторами в динамічних режимах." Thesis, НТУ "ХПІ", 2018. http://repository.kpi.kharkov.ua/handle/KhPI-Press/37464.
Full textDissertation for the degree of Doctor of Technical Sciences in specialty 05.09.01 "Electric Machines and Apparatus" (141 – Electrical Engineering). – National Technical University "Kharkov Polytechnic Institute", Kharkov, 2018. In the dissertation work the problems of creation of multiphysical models used in the research and designing of medium voltage vacuum switching devices are considered. The object of the study is transient electromagnetic processes in a heterogeneous, nonlinear, moving medium conducting electric current and including high-coercive permanent magnets; processes related to the theory of elasticity, solid state mechanics, phenomena in non-stationary thermal fields, and the theory of continuum mechanics. Subject of research – vacuum switching devices with bistable polarized actuators; dynamics of actuators; static and dynamic deformation of the contact system of the circuit breaker and the mechanism under the influence of the actuator; the ability of the circuit breaker to switch on and the thermal stability of the circuit breaker under the influence of emergency overvoltage's; liquid dampers; electromagnetic actuator’s control circuit. Research methods – the investigations of electromagnetic, mechanical, thermal processes and fluid flow processes are based on analytical and numerical mathematical models that take into account the most significant linear and nonlinear interconnections between phenomena. Numerical solutions of partial differential equations are carried out using special application software packages, the reliability of which is repeatedly confirmed and does not cause doubts, as well as codes written by the applicant. The following scientific results have been obtained in the work. For the first time a model of dynamics of a polarized bistable actuator with permanent magnets has been developed based on calculations of transient electromagnetic field in a nonlinear non-uniform medium conducting electric current and containing permanent magnets taking into account the motion of parts of the actuator in conjunction with nonlinear equations of electric circuit and motion. The parameters of forced switching on of actuators are calculated and recommendations on the design and parameters of actuators are given. The multiphysical models of studying the influence of actuator parameters on static and dynamic mechanical stresses in a vacuum chamber bellows have been developed, recommendations have been obtained for choosing the optimal structure of a bellows and its durability, its fatigue endurance is calculated. A model of the influence of actuator parameters on dynamic mechanical stresses in the contact system and the switching mechanism based on the theory of elasticity was developed, due to which the geometry of the drive shaft was calculated and its material was chosen. For the first time, multiphysical models have been developed to determine the effect of the actuator's dynamic characteristics on the ability of the circuit breaker to activate the emergency overloads: shock dynamics and contact vibration time are defined; the Stefan thermal problem solved, the heat of phase transitions is taken into account, and the possible strength of contact welding is determined; recommendations for reducing the contact collision rate due to the use of a liquid damper based on the Navies-Stokes equation and dynamics of the actuator are given; the model of heating and deformation of the contact surface was developed and on its basis recommendations were given regarding calculations of the required force of contact pressure and the geometry of the contacts in the conditions of thermal stability. The original models of circuits connecting actuator coils to different sources of electric energy have been investigated and analyzed, and recommendations on their practical implementation have been given. The results of the study were checked on layouts, prototypes and used in the development of vacuum circuit breakers, tests of which models were confirmed by the obtained recommendations and conclusions. Implementation of the main scientific and practical results of the dissertation work was reflected: in agreement with «ABM Ampere», Kremenchk agreement No. 33/98-12 between NTU «KhPI» and «ABM Ampere» LLC «Influence of the parameters of a bistable polarized vacuum actuator of the circuit breaker on its ability to switch on», research and development work performed by order of Ukrenergokompleks-2 LLC, Kharkov «Bistable actuators in control plants and distribution of liquid flows».
Dunbabin, Matthew D. "The influence of temperature on PZT sensors & actuators for active vibration control of flexible structures." Thesis, Queensland University of Technology, 2002. https://eprints.qut.edu.au/36162/7/36162_Digitised%20Thesis-4_Redacted.pdf.
Full textDebien, Antoine. "Étude électromécanique et optimisation d'actionneurs plasmas à décharge à barrièrediélectrique – Application au contrôle de décollement sur un profil d'aile de type NACA0015." Thesis, Poitiers, 2013. http://www.theses.fr/2013POIT2253/document.
Full textThis work is conducted in the framework of the European PlasmAero project that aims to demonstrate how plasma actuators can be used to control aircraft aerodynamic. Surface Dielectric Barrier Discharge (DBD) is an innovative solution to control a flow with the electric wind induced by the electrohydrodynamic (EHD) force produced by a surface discharge. A first part is dedicated to plasma actuators study. The exposed electrode shape of a DBD actuator is investigated by electrical, optical and mechanical characterization. Discharges properties and EHD force evolution is fully dependent of exposed electrode shape. With an optimized active electrode shape, streamer discharge is cancelled while actuator effectiveness is increased from 0.65 to 0.97 mN/W. Flow field induced by multiple electrode design is also investigated. An innovative multi-DBD design is proposed. Inhibition of mutual interaction between successive DBD actuators and exposed electrode shape optimization conduct to an electric wind velocity of 10.5 m/s. In a second part, the control of boundary layer separation on a NACA 0015 airfoil is investigated. An ac DBD, a multi-DBD and a nanosecond DBD are used to manipulate separation at a Reynolds number Re = 1.3μ106, with tripped and natural boundary layer. Results show that actuators can effectively remove the separation existing without actuation
Plantegenet, Thibaud. "Analyse expérimentale de l'effet Morton." Thesis, Poitiers, 2019. http://www.theses.fr/2019POIT2319.
Full textThe main goal of this thesis is the experimental study of the Morton effect in hydrodynamic bearing for rigid and flexible rotors. The Morton effect is a thermally induced increase of the synchronous vibration phenomenon that appears in journal bearing. The introduction part permits to describe the thermal instabilities with firstly a focus on the Newkirk effect and its mathematical description to understand the philosophy of thermal instabilities. Bibliography study of the Morton effect is fully described (case studies, numerical analyses, experimental analyses). The first experimental analysis is conduct for a rigid rotor on a plain journal bearing. In this configuration, the test rig is detailed, the dynamic characteristics of the bearing are experimentally identified and then the tests at constant rotational speed show the “stable” Morton effect. The second study is achieved with a flexible rotor and permits to show the influence of the start-up time on the Morton effect stability. The last experimental study is realized with the flexible rotor on a tilting pad journal bearing with flexible pivot. This bearing being of a particular design, a bibliography allows to understand its principles, its pros and cons and its applications. Its design and its experimental characterization are detailed and then the experimental results show the unbalance influence on stability. To conclude, experimental results are compared and allow a better understanding of the Morton effect in the journal bearing and its influence on the rotordynamic
Tsai, Tsung-Ying, and 蔡宗穎. "Design , Fabrication and Actuation of Thermal Actuating XY-stage for Image Stabilization." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/77068698764761899459.
Full text國立交通大學
電控工程研究所
99
This research presents a MEMS micro electro - thermal actuating XY-stage fabricated by SOI process, and an image-sensor or a micro-lens can be mounted on this stage. A suitable fabrication process is designed to fabricate the stage in this research. The design-flow, fabrication process and measurements are all shown in the paper. The first step is to survey and set up the specification of the XY-stage. The main goals of this research are smaller device size, lower driving voltage and larger actuating displacement, besides, establishing decoupling function and increasing linearity and controllability are our goals, too. The stiffness, Young’s module, coefficient of thermal expansion and distribution of heat are the important factors which will affect the driving efficiency of the stabilizer, so we will pay most attention on design them. To increase yield, the promotion of fabrication process and design skills are presented in this research.
Tseng, Ke-hsin, and 曾可欣. "Single-Cell Separation by Thermal Bubble Actuation in Microfluidic Chips." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/56159713231576343818.
Full textWang, Chun-Chieh, and 王俊傑. "A CMOS micromachined resonant sensor with thermal actuation and piezoresistive sensing." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/11809649355899236369.
Full text國立交通大學
機械工程系所
98
Micromachined resonant sensors have the advantages of robust measurement and quasi-digital output and thus have been applied to various applications such as: pressure measurement, bio-molecular detection, and etc. Realizing these devices with industrial IC CMOS processes is attractive for low cost. However, it can be very challenging for engineers to optimize the device performance. This study intends to develop a resonant sensor using commercially available CMOS process (TSMC, 2P4M) and one post-process step. This resonant sensor is excited by the electro-thermal actuations and the motions are measured by the piezoresistive sensing. The design procedures are discussed in details to indicate that this could be an optimal design with this fabrication process. Besides, different to most sensor applications that acquired piezoresistivity of a film by experiments, this study intend to develop theoretical models to predict it from the film conditions. The existing models cannot be applied because they were all developed for P-type silicon with low doping concentrations. However, it is highly doped, N-type polysilicon in this process.
Chou, Chi-En, and 周吉恩. "Thermal actuation and creep performance of Polyethylene terephthalate (PET) artificial muscle." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/88vqhz.
Full textLiu, Kang-Chung, and 劉康仲. "Thermal-Fluid Characteristics of a Phase-Change-Material Thermal Actuator." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/30227103481744724855.
Full text國立成功大學
機械工程學系碩博士班
90
Results of an experimental and numerical investigation on thermal-fluid characteristics of a phase-change-material ( PCM ) thermal actuator consisting of a rectangular enclosure with a moveable upper wall are reported. The working principle of thermal actuator is utilizing volume change associated with melting process of the PCM. The parameters considered in the simulation are as follows:Asp = 2,3,4,6 and 12;Pr=41.7;Ste=0.1,0.3 and 0.5;Sc=0; . Simulation results reveal that the little influence of Rayleigh number on the displacement of upper moveable wall and the average Nusselt number of heated wall of the rectangular enclosure tends to degrade greatly with the increase of the aspect ratio. The numerical results of the displacement of the upper movableof the enclosure during melting process are found to be quite close to those predicted from the one-dimensional conduction analytical analysis. Moreover, in comparison with the experimental data for a rectangular enclosure of aspect ratio 12, the numerical results for the displacement of the upper movable wall appear somewhat overpredicted.
"Thermal Actuation and Fluidic Characterization of a Fluorescence-Based Multiplexed Detection System." Master's thesis, 2018. http://hdl.handle.net/2286/R.I.50454.
Full textDissertation/Thesis
Masters Thesis Biomedical Engineering 2018
張黃超. "Thermal actuations of carbon nanotubes coated bi-layered polymer films." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/69315299811160142161.
Full text國立清華大學
材料科學工程學系
100
This thesis discusses the thermal actuations of polyethylene terephthalate (PET) and polymethyl methacrylate (PMMA) bi-layers. Thermal actuating is firstly verified by radiation heating. Heat source is then replaced by joule heating (or ohmic heating) arising from carbon nanotubes (CNTs) coated onto one side of bilayered films. Comparisons are made between CNTs-free and -coated actuators at various driving voltages.
Yang, PENG. "DEVELOPMENT OF MICRO THERMAL ACTUATOR WITH CAPACTIVE SENSOR." Thesis, 2009. http://hdl.handle.net/1974/1981.
Full textThesis (Master, Mechanical and Materials Engineering) -- Queen's University, 2009-07-03 16:17:02.633
Lin, Yue-Jheng, and 林岳正. "Micro Thermal Actuator Characterized with Low Driving Voltage." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/71312451332500348633.
Full text淡江大學
機械與機電工程學系碩士班
95
This thesis applies the materials that can achieve the effect of experiment to fabricating the thermo-buckled micro actuators working in the appropriate temperature. This study chooses parylene as major materials and successfully fabricates a novel diaphragm type thermo-buckled microactuator with only a driving voltage of 2.5V and under a working temperature below 40℃. According to the method, the study also fabricates the thermo-reversible coil-like actuators and the diaphragm type micropumps to extend its application. The thermo-reversible coil-like actuators are a single beam structure. It can be transferred to a 3D spiral reversibly by proper heating the embedded electrodes. The term “reversibility” of this device means that the spiral device restores to the original beam structure after stopping the power supply of heating. The maximum twisting angle is 7 degrees under the heating voltage of 2.5V DC. The diaphragm type pumps of sub-mm size driven by a low voltage without apparent temperature rise. The micropumps have the maximum flow rate of 7.05 μm /s. The fabricated thermo-buckled type micropump could be integrated into the implantable bio-sensing system for microfludic driving, and drug delivery.
Chen, Wen-Chih, and 陳文誌. "A Single Layer Out-of-plane Micro Electro-Thermal Actuator." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/99837998006278553167.
Full text國立清華大學
動力機械工程學系
89
Out-of-plane electro-thermal actuators have been applied to a variety of fields. Among them, the actuators whose driving method is bi-metal effect have the advantage of simple fabrication processes and are thus most commonly used. However, such an actuator experiences a shear force at the interface of different materials, while actuated. Delamination consequently takes place and therefore decreases its lifetime. In an attempt to overcome the drawback inherent in a bi-metal actuator, a novel bi-directional out-of-plane electro-thermal actuator of single layer thin film material is proposed. The presented actuator comprises four parallel, identical beams. The two inner beams connect the two outer beams with a step, which enables the inner beams and the outer ones located at different planes. While a current only flows through the inner beams, they would experience a temperature rise; the accompanying thermal expansion therefore enables the actuator to bend upwards. On the contrary, while a current only flows through the outer beams, the actuator would bend downwards. The bi-directional out-of-plane motion is thus achieved. The design was examined in light of finite element analysis. The potential application lies in micro-relays, variable capacitors, and optical scanning system.
Yang, Sheng-Shing, and 楊盛行. "Two Hot Arm Electro-Thermal Actuator Optimization Using Differential Evolution." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/63368903634784610424.
Full text大同大學
機械工程學系(所)
98
In Micro-Electro-Mechanical Systems, electro-thermal actuator is the power of the device. In order to improve the performance of the device, the researchers try to apply the optimization method or a new design approach to change the design. Two hot arms electro-thermal actuator is adapted from the traditional one hot arm electro-thermal actuator for increasing the tip deflection and force output. There are some studies in design optimization of one hot arm electro-thermal actuator, but no research of optimization of two hot arms electro-thermal actuator is found. In this study, the differential evolution is integrated with commercial finite element program ANSYS for design optimization of two hot arms electro-thermal actuator. First, the one hot arm electro-thermal actuator is investigated and the optimal result is compared with the reference to verify that the architecture and the optimization method used in this study are capable and feasible for optimization of one hot arm electro-thermal actuator. Then same architecture and method are applied to optimize the two hot arms electro-thermal actuator for finding the best dimension of the device. From the comparison of results of the optimum solution this study and the design in the reference, the tip deflection of reference design was increased by more than two times using optimization architecture of this study.
Wu, Liang-Chieh, and 吳亮潔. "Motion Control of Thermal Actuator with Incorporated Active Heat Sink." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/84172937680712299895.
Full text國立臺灣大學
機械工程學研究所
96
In the micro-electro-mechanical systems (MEMS) regime, thermal actuators have been known for its advantages of high output force, low driving voltage and simple fabrication processes. This dissertation focuses on the dynamic control of the thermal actuation. For thermal actuators using heat resistor effect, the relation between input current and output heat is nonlinear, which also makes the relation between input current and output displacement nonlinear. To make the dynamic control feasible, a proper active heat sink is provided. A theoretical model taking into account the thermoelastic coupling is first developed. The thermoelastic coupling arises from the coupling of the strain rate to the temperature field of the heat transport. The dynamic responses for a harmonically varying thermal load are simulated using the eigenmode expansion method. The thermoelastic coupling effects on the resonant frequency and the quality factor are evaluated for each eigenmode resonance of the deflection. In addition, the dynamic characteristic of thermal actuators is dominated by the first-order characteristic of the heat conduction. Influences of thermal cut-off frequency, thermal diffusivity, thermal convection, and thermal radiation on the dynamic thermal responses are then studied. The active heat sink utilizes the commercial thermoelectric cooler. For thermal actuators operating under a DC/AC composite input current, active heat sink is designed to eliminate the effect of the nonlinear heat on the displacement. Therefore the thermal actuators can be actuated synchronously with the input current. Based on the control equations of the active heat, the scheme to control the input heat of thermal actuators is proposed. A bimorph micro-cantilever beam was fabricated using micromachining techniques. Dynamic responses of thermal actuators were measured using laser Doppler vibrometer. For DC/AC composite input current with AC component being a single-frequency sinusoidal waveform, the measured waveform of the tip velocity is generally agreed with the simulation. The displacement amplitude is 90.4% of the simulated one. The influence of the generated double-frequency heat on the displacement can be reduced by incorporating the active heat sink. The displacement amplitude from double-frequency heat is reduced to 46.5 %. For input current with AC component composed of two sinusoidal frequencies, the displacement stemmed from the generated nonlinear heat can also be reduced with discrepancies from the simulation. In this study, the thermo-mechanical behavior of thermal actuators was investigated theoretically and experimentally. The developed method for the dynamic control of the thermal actuators was also verified. The obtained results provide insights which enable and facilitate further optimization of the dynamic control of thermal actuators.
Zheng, Li-Sheng, and 鄭立昇. "Design of A Closed-Loop Controlled CMOS-MEMS Thermal actuator." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/09977163525912382289.
Full text國立清華大學
電子工程研究所
93
We present the design and characterization of a large-displacement thermal actuator fabricated in a conventional TSMC 0.35μm 2P4M CMOS process. The thermally-driven microstructure contains multi-layers of metal, silicon dioxide, and polysilicon, and is fabricated by two dry etching steps after completion of CMOS. To avoid thermal drift caused by change of ambient temperature, we adopt a capacitive sensing scheme that makes use of vertically sensed comb finger electrodes with a nominal sensing capacitance at 11 fF. The microactuator is characterized by static and dynamic measurements, with a measured out-of-plane motion up to 24 μm at 17 mW, a thermal time constant at 0.24 ms, and a mechanical resonant frequency at 25.2 kHz, By external measurement, we understand the relationship of supply power, ambient temperature and actuating displacement. We integrate the actuator and the capacitive sensing circuit within one chip. The measured results show that the device’s sensitivity is 4020 (V/m), and the measured minimum input-referred noise voltage of the sensing pre-amplifier is 5.9 μV/rt.Hz, corresponding to a minimum input-referred noise displacement of 0.15 nm. Because the open-loop operation can’t handle external disturbance, so we design a closed-loop control system to promote the device’s stability.
Lee, hong-da, and 李宏達. "Design and Fabrication of The Novel Planar Electro-thermal Actuator." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/82109330746110699053.
Full text國立中興大學
精密工程研究所
92
The electrothermal actuators have been known as their large displacement and high force output. There are two well-studied electrothermal actuators, i.e., the U-shaped actuator and V-beam actuator. Both actuators can provide one directional displacement in the static actuation operation. This characteristic is attributed by that static displacement generated from electrothermal actuators is formed by net volume expansion due to the thermal expansion difference distributed over the whole actuator structure. Since the net volume expansion is always pointing to one direction. In the application of optical switch, it is common to require the on-off operation from the device view point. Thus the actuator is demanded to provide the two-way motion, i.e., forward and backward, for optical switch application. This thesis first presents the comprehensive study on a new electrothermal actuator, denoted as H-shape X-beam actuator. This new actuator can provide large static displacement and force output. Briefly speaking, we compared several different types of H-shape X-beam actuators. According to the simulated results and the measured results, we can find out the optimal design parameters are beam width of 8μm , beam angle of 0.5 degree, and it can achieve maximum displacement of 86μm, under driving voltage of 23 V. Secondly, we proposed a new bi-directional movable electrothermal actuator, denoted as H-beam actuator. We verified the design of H-beam actuators by experimental data based on three types of structures. The best design, type 1 design, of H-beam actuator can generate forward maximum displacement of 52μm, under driving voltage of 40V, and backward maximum displacement of 52μm, under driving voltage of 40 V. Finally, the derived 2x2 optical switch using type 1 H-beam actuator can achieve performance including: IL=-0.96dB, BR=-50dB and PDL=-0.01dB(Transmission State) under driving voltage of 29 V; IL=-0.96dB, BR=-50dB and PDL=-0.01dB(Switching State) under driving voltage of 29V. Forward Switching time is 6.8ms, and backward Switching time is 1.96ms.
Heber, André. "Application of Single Optically Heated Gold Nanoparticles to Sensing and Actuation." Doctoral thesis, 2017. https://ul.qucosa.de/id/qucosa%3A16860.
Full textThis dissertation demonstrates the use of individual optically heated gold nanoparticles as sensors for investigations of heat transport and intensity modulation of light. The experiments employ the photothermal effect, which allows the selective detection and investigation of individual absorbers. The photothermal contrast is based on absorbing particles that are optically excited and relax via nonradiative processes. The absorbers act as nanosources of heat. The local temperature elevation leads to a local refractive index change due to thermal expansion which then acts as a lens. This thermal lens alters the propagation of a second non-absorbed beam of light. As the refractive index change with temperature is minuscule, the transmission changes of the detection are tiny as well. The photothermal signal is amplified by the use of a modulated detection scheme which enables the methods high sensitivity and provides a time scale for the measurement of thermal transport. The heating laser beam is intensity-modulated and thereby produces a small modulation of the beam waist of the detection laser beam and thus the transmitted power through an aperture. This modulation amplitude and phase are detected by a lock-in amplifier. Amplitude and phase depend on the modulation frequency and the thermal diffusivity of the material surrounding the nanoparticle. The frequency-resolved measurement of the two observables and their modeling using a generalized Lorenz–Mie theory allows the measurement of thermal diffusivities. In the second variant, the spread of heat into space is observed. A nanoparticle is optically heated, and the extended thermal lens is characterized by the deflection of a second laser beam. The deflection signal is modeled using ray optics to determine the thermal diffusivity of the material surrounding the nanoparticle. In a further experiment, the great potential of optically heated nanoparticles is demonstrated. Individual gold nanoparticles are embedded in a thin nematic liquid-crystal layer acting as a half-wave plate. The gold particles are optically heated. They control the transmission of a detection laser set up in polarization contrast. The intensity of the detection beam is modulated by up to 100%.
Sitaraman, Hariswaran. "Magneto-hydrodynamics simulation study of high density thermal plasmas in plasma acceleration devices." 2013. http://hdl.handle.net/2152/21618.
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WANG, CHEN-YA, and 王貞雅. "Development and Biomedical Application of Microfluidic Biochip Fabrication Technology with Centrifugal Force Actuation and Thermal Control Mechanism." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/20892729701801245966.
Full text長庚大學
醫療機電工程研究所
94
There is currently great interest in combining the functional components that are necessary for performing complex chemical and biochemical analyses into small, integrated units and Micro-Electro-Mechanical Systems (MEMS) are developed quickly in the field of biomedical devices and lab test for the miniaturization of object, which stands for faster reaction, higher efficiency, less specimen and less space. Microfluidic devices, from single element to integrated micro-total-analysis-system (μTAS) or lab-on-a-chip are under development and are expected to speed up and simplify important biological operations. However, the pumping and valving designs of biochip are fabricated by semi-conductor or LIGA process so that the processes not only are complicated but also cost a lot of money. In order to overcome the short- comings of the conventional lab-on-a-chip fabrication, depending on the pumps and valves, this research utilizes centrifugal propulsion to actuate fluid flow in the microfluidic channels and proposes a new lab-on-a-chip fabrication method, “microfluidic biochip fabrication technology with centrifugal force actuation and thermal control mechanism”, and the new fabrication technology will be verified by biomedical applications to test its feasibility. This research comprises of three different stages. The first stage is the microfluidic design of the biochip system. The microfluidic design includes analysis of microfluidic propulsion theory, thermal Conductivity theory, design of functional microfluidic patterns, incision of microfluidic and evaluation of microfluidic quality. The working solution includes using SolidWorks for pattern design, ANSYS for pattern simulation, PowerMill and Visual Basic to design the software window platform for computer numerical control (CNC) programming profile and CNC machine for pattern engraving. FRT and FTA machines are also used to evaluate the microfluidic surface quality. The second stage is the platform design of microfluidic biochip fabrication including capability study and design guideline and hardware design. The hardware design of microfluidic platform includes heat press device to seal the lab-on-a-CD (compact disk), temperature control device, centrifugal actuation device and electronic stroboscopes device. The heat press device with temperature feedback control is designed to seal the biochip. A servo motor within the centrifugal actuation device is used to generate centrifugal force which will lead the sample move through the microfluidic channel instead of pumps and valves. The temperature control device is designed to provide constant temperature for microfluidc channels. The electronic stroboscopes device is mainly used to observe fluid routes in high-speed rotation. The third stage is the clinical biomedical applications. The protocol of clinical test is pre-process and preservation of specimen, quantitative and qualitative biochemical reaction of specimen, and post-process of specimen or sewage. The separation, mixing and heating of specimen are so common in the clinical test that our biochip fabrication technology is verified by blood separation test, hexokinase method and BCG method. Hexokinase method is the measurement of blood sugar and BCG is the measurement of albumin. Seven cases are involved in either control or test group. Each case needs 10 c.c. of blood sample. The microfluidic biochip is applied in the test group and the conventional method offered by Chang Gung Memorial Hospital was applied in the control group. The statistical method, SPSS, was used to verify the value of this technique. In the statistical results of our microfluidic biochip and clinical data, the P-value is 0.115 in the blood sugar test, and 0.075 in the albumin test. To sum up, there is no remarkable different between our novel biochip and clinical test method. Our centrifugal microfluidic fabrication technology with temperature controlled developed in this study is a desk-top device and can use in laboratory or clinical biomedical tests. Furthermore, this biochip can also be used in other clinical tests in near future.
Wijeweera, Gayan. "Design of a micromachined electric field sensor using a thermal actuating shutter." 2008. http://hdl.handle.net/1993/21304.
Full textSchick, Justin Ryan. "Transformation Induced Fatigue of Ni-Rich NiTi Shape Memory Alloy Actuators." 2009. http://hdl.handle.net/1969.1/ETD-TAMU-2009-12-7636.
Full textLin, Yih Min, and 林益民. "The analysis of micro thermal buckling actuator in the micro fluidic system." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/84247646693257303935.
Full text國立成功大學
機械工程學系
86
The micro fluidic parts which use micro fabricated technique, not only control the fluid accurately, but also respond rapidly, and their volume are tiny. We will take the actuator structure on the thermally buckling valve as the subject here, to discuss the behavior of the valve. We consider the behavior of the actuator during the switch up process here, discuss the effect of the actuation due to the geometric dimension and different boundary conditions of the actuator, to design a perfect micro valve ;analyze the stress distribution in the buckled structure to prevent it from fatigue, and its transient state at the same time, to control its displacement and frequency appropriately. The numerical method that we describe and discuss the driven behavior of the structure is finite element analysis method. From this study, we can find that different boundary condition, thermal load and geometric dimension of the structure will affect its actuated behavior more. We also get the knowledge about its stress distribution in the structure and its transitional behavior. With them, we may design the perfect micro thermal buckling valve.
Lin, Yu-Hsin, and 林郁欣. "Development of Integrated Micro Platinum Temperature Sensors in A Novel Thermal Bubble Actuator." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/82793153336198820933.
Full text國立成功大學
航空太空工程學系碩博士班
92
In this thesis, novel thermal bubble actuator has been designed and fabricated for bubble actuator studies. Micro platinum heaters and temperature sensors are integrated within the actuator to study the detailed dynamics of the thermal bubble actuator. Each actuator contains four sets of microheaters/microsensors in the firing chamber, and one set of microheater for the surface tension breaker at the nozzle exit. By actuating the microheater array, the bubble can be generated to eject the liquid droplet out of micro nozzle. According to the number of the microheater actuated, the volume of the liquid droplet can be controlled. Bubbles generated in the firing chamber not only function as a pump, but also serve as a flow regulator between the chamber and the liquid supply. This mechanism can eliminate the bottleneck design, which is use for hydrodynamics cross talk in a conventional inkjet printhead. To investigate the dynamics of the novel thermal bubble actuator, a high speed microscopic imaging system was developed. The high-speed microscopic imaging system will help us diagnose the bubble nucleation, bubble growth and collapse, droplet breakup process, as well as the refilling process. From testing results of the experiment by using a commercial actuator HP ink-jet printhead, the performance of HPc6614d No.20 ink-jet printhead still has plenty of room to be improved. For example, the satellite droplets are found in HP printhead. Satellite droplets means non-uniform droplet sizes, which will degrade the printing quality. For the current thermal bubble actuator, surface tension breaker was design to manipulate the surface tension at the nozzle exit, which use to eliminate satellite droplets.
d'Entremont, Rene. "DEVELOPMENT OF NOVEL 2 DOF THERMAL MICRO ACTUATORS AND A COMPARISON OF DIFFERENT DISPLACEMENT MEASUREMENT TECHNIQUES." 2011. http://hdl.handle.net/10222/14021.
Full textQiu, Jun-Da, and 邱俊達. "Design and Analysis of a Compliant Bistable Mechanism Actuated by an Electro-thermal Actuator." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/08136025164417595107.
Full text國立中興大學
精密工程學系所
95
A compliant bistable mechanism is designed in this research. It is actuated by an electro-thermal actuator. The main characteristics of the actuator, such as the amount of displacement, the direction of movement, actuating voltage, and temperature distribution etc., are studied with consideration of the effects of surface thermal conduction, thermal convection and heat radiation. With voltage applied to the electro-thermal actuator, the amount of displacement and the variation of the reaction force of the compliant bistable mechanism is studied. A commercial finite element analysis software, ABAQUS 6.4, is used for the simulation. We simulate the stable thermal field of the electro-thermal actuator and the deformation of its structure, and the amount of displacement and the variation of the reaction force of the compliant bistable mechanism. A fabrication process of the compliant bistable mechanism and the electro-thermal actuator is proposed. Keywords: MEMS , Compliant bistable mechanism , Electro-thermal actuator
Chen, Po-Yen, and 陳博彥. "Study of a Thermal Flow Sensor integrated with a Valveless One-side Actuating Diaphragm Micropump." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/87406871762117474596.
Full text國立臺灣大學
機械工程學研究所
100
In this study, a new flow sensor combined with the valveless one-side actuating piezoelectric micropump has been successfully developed. The dimension of the flow sensor is 80 mm × 30 mm × 20 mm. The flow sensor uses a silicone heater that is fixed on the top of the microchannel and dissipates the heat by the flow inside the channel. Under constant heating power, we can obtain the relationship between the surface temperature of the heater and the flow rate and use it to measure the flow rate. The maximum flow rate of the valveless micropump is 1.13 mL/s at 150 Hz; while the maximum pump head can reach 1366.0 Pa. The experimental results indicate that the performance of the flow sensor is dominated by the heating power and the flow rate, and the performance is enhanced with increasing the heating power or decreasing the flow rate. Besides, the design of the microchannel suspended from the substrate to improve thermal isolation also proves better performance.