Thematische Bibliographien / Radio frequency inductively-coupled plasma

Inhaltsverzeichnis

  1. Zeitschriftenartikel
  2. Dissertationen
  3. Bücher
  4. Buchteile
  5. Konferenzberichte

Auswahl der wissenschaftlichen Literatur zum Thema „Radio frequency inductively-coupled plasma“

Autor: Grafiati
Veröffentlicht am 28. Juni 2021
Zuletzt aktualisiert am 1. Februar 2022

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Zeitschriftenartikel zum Thema "Radio frequency inductively-coupled plasma"

1

Boulos, Maher I. „THE INDUCTIVELY COUPLED RADIO FREQUENCY PLASMA“. High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) 1, Nr. 1 (1997): 17–39. http://dx.doi.org/10.1615/hightempmatproc.v1.i1.20.

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Boulos, M. I. „The inductively coupled R.F. (radio frequency) plasma“. Pure and Applied Chemistry 57, Nr. 9 (01.01.1985): 1321–52. http://dx.doi.org/10.1351/pac198557091321.

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3

Bera, K., B. Farouk und P. Vitello. „Inductively coupled radio frequency methane plasma simulation“. Journal of Physics D: Applied Physics 34, Nr. 10 (01.05.2001): 1479–90. http://dx.doi.org/10.1088/0022-3727/34/10/308.

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4

Abdel-Rahman, M., V. Schulz-von der Gathen und T. Gans. „Transition phenomena in a radio-frequency inductively coupled plasma“. Journal of Physics D: Applied Physics 40, Nr. 6 (02.03.2007): 1678–83. http://dx.doi.org/10.1088/0022-3727/40/6/017.

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5

Stittsworth, J. A., und A. E. Wendt. „Striations in a radio frequency planar inductively coupled plasma“. IEEE Transactions on Plasma Science 24, Nr. 1 (1996): 125–26. http://dx.doi.org/10.1109/27.491744.

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6

Hua, Yue, Jian Song, Zeyu Hao, Gailing Zhang und Chunsheng Ren. „Characteristics of a dual-radio-frequency cylindrical inductively coupled plasma“. Contributions to Plasma Physics 59, Nr. 7 (04.02.2019): e201800029. http://dx.doi.org/10.1002/ctpp.201800029.

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Tuszewski, M. „Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma“. Physical Review Letters 77, Nr. 7 (12.08.1996): 1286–89. http://dx.doi.org/10.1103/physrevlett.77.1286.

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Bozeman, S. P., D. A. Tucker, B. R. Stoner, J. T. Glass und W. M. Hooke. „Diamond deposition using a planar radio frequency inductively coupled plasma“. Applied Physics Letters 66, Nr. 26 (26.06.1995): 3579–81. http://dx.doi.org/10.1063/1.113793.

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9

Lafleur, T., und C. S. Corr. „Characterization of a radio-frequency inductively coupled electrothermal plasma thruster“. Journal of Applied Physics 130, Nr. 4 (28.07.2021): 043304. http://dx.doi.org/10.1063/5.0056124.

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Dewangan, Rakesh Kumar, Sangeeta B. Punjabi, N. K. Joshi, D. N. Barve, H. A. Mangalvedekar und B. K. Lande. „State-space modeling of the radio frequency inductively-coupled plasma generator“. Journal of Physics: Conference Series 208 (01.02.2010): 012056. http://dx.doi.org/10.1088/1742-6596/208/1/012056.

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Dissertationen zum Thema "Radio frequency inductively-coupled plasma"

1

Chen, Bing-Hung. „Inductively coupled radio-frequency discharges“. Thesis, University of Oxford, 1998. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244566.

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Canturk, Mehmet. „Modeling Of Helically Applied Current To The Inductively Coupled Radio Frequency Plasma Torch In Two Dimensions“. Phd thesis, METU, 2004. http://etd.lib.metu.edu.tr/upload/3/12604691/index.pdf.

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The electrodeless plasma discharge is typically driven by radio frequency (RF) power supply within the range (0.2 ¡
40 MHz). The applied power is coupled into the plasma inductively called inductively coupled plasma (ICP). RF ICP technique has achieved significance importance in a diversity of research and industrial applications for over the last threes decades. It is still required to undertake both theoretical and experimental research. In this work, RF ICP technique is applied on the torch modeling in 2D. Based on extended electromagnetic vector potential representation, an axisymmetric model in 2D is proposed for the calculations of the electromagnetic fields in an RF ICP torch. The influence of axial vector potential is included to the vector potential formulations. This is achieved by imposing a helical current carrying wire configuration. The corresponding governing equations are solved numerically by applying finite element method (FEM) using commercial partial differential equation solver (Flex PDE3). Based on this model, the plasma behavior and properties are examined in terms of plasma parameters. Besides, a comparative iii analysis is made between proposed model called helical configuration and the one currently available in the literature called circular configuration. This study shows relatively little difference between temperature fields predicted by two models. However, significant difference is observed between corresponding flows and electromagnetic fields. Especially, tangential flow which is observed in helical configuration vanishes in circular configuration. The proposed model offers an effective means of accounting for the variations of the helical coil geometry on the flow and temperature fields and achieving a better representation of the electromagnetic fields in the discharge. Finally, it is concluded that minimum number of turns (n = 2) yields significant difference between two models whereas, maximum allowable number of turns yield no distinctions on the results of two models in terms of azimuthally applied current. However, axial effect of current still exists but very small with respect to the result obtained with minimum number of turns.
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Yang, Suidong. „Diagnostics and modelling of an inductively coupled RF low-pressure low-temperature plasma“. Thesis, n.p, 1998. http://oro.open.ac.uk/19841/.

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Rainey, Joe Seaburn. „Synthesis of fullerenes and metallic fullerenes by the utilization of an argon radio frequency inductively coupled plasma“. Diss., Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/27679.

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Wegner, Thomas [Verfasser]. „Comprehensive study of the discharge mode transition in inductively coupled radio frequency plasmas / Thomas Wegner“. Greifswald : Universitätsbibliothek Greifswald, 2016. http://d-nb.info/1122581629/34.

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Miller, Charles William. „Surface characterization of inductively coupled radio frequency plasma treated glassy carbons by x-ray photoelectron spectroscopy and scanning electron microscopy /“. The Ohio State University, 1986. http://rave.ohiolink.edu/etdc/view?acc_num=osu1487266362335601.

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Miller, Joseph. „Direct Multielemental Analysis of Solid Samples Using Laser Ablation Inductively Coupled Plasma Mass Spectometry and Pulsed Radio Frequency Glow Discharge Mass Spectrometry“. TopSCHOLAR®, 2003. http://digitalcommons.wku.edu/theses/556.

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Direct solid sampling is an area of analytical research that has generated a large amount of interest in recent years. Two analysis systems offering fast and nondestructive methods of determining the elemental composition of substances, without requiring complicated sample preparation procedures, are laser ablation inductively coupled plasma mass spectroscopy (LA-ICPMS) and radio frequency glow discharge mass spectroscopy (rf-GDMS). A Cetac LSX-200 laser system coupled to a LECO Renaissance ICPMS was utilized to analyze coal and ash samples prepared by incorporation into a lithium borate matrix to form a disk. In addition, a VG 9000 Glow Discharge Mass Spectrometer (GDMS) with Nier-Johnson reverse ion optic geometry, equipped with a radio frequency source (rf-source), was used for the determination of nonconductors or insulators in addition to the normal metals and semiconductors previously determined by dc-source analysis. Further addition of a pulse generator to the rf-source resulted in a variable duty cycle, allowing greater ionization efficiency without the risk of catastrophic damage to the sample. The results of this research indicate that the LA-ICPMS system can be used to directly determine the composition of ash samples, with further method development, and that the Prf-GDMS system can be used successfully to analyze nonconductive solid samples including bone tissue.
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Dukovský, Daniel. „Depozice bioaktivních keramických vrstev pomocí technologie RF-ICP“. Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2021. http://www.nusl.cz/ntk/nusl-442600.

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Tato diplomová práce se zabývá problematikou plazmového nanášení bioaktivních keramických povlaků hydroxylapatitu s využitím technologie radio-frekvenčně buzeného indukčně vázaného plazmatu. Cílem bylo optimalizovat proces a nanést kompaktní hydroxylapatitové povlaky na substráty z titanové slitiny Ti6Al4V. Nanesené vzorky byly následně podrobeny analýzám povrchové drsnosti, mikrostruktury a fázového složení. Ze získaných výsledků byly vyvozeny závěry, které byly srovnány s dalšími odbornými pracemi zabývajícími se příbuznou problematikou.
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Liang, Dong Cuan. „Development and characterization of atmospheric pressure radio frequency capacitively coupled plasmas for analytical spectroscopy“. Thesis, University of British Columbia, 1990. http://hdl.handle.net/2429/30590.

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An atmospheric pressure radio frequency capacitively coupled plasma (CCP) has been developed and characterized for applications in atomic emission spectrometry (AES), atomic absorption spectrometry (AAS) and gas chromatography (GC). The CCP torch was initially designed as an atom reservoir for carrying out elemental analysis using atomic absorption. Functionally, the device consists of two parts, the CCP discharge tube and the tantalum strip electrothermal vaporization sample introduction system. The torch design provides for very effective energy transfer from the power supply to the plasma by capacitive coupling. Therefore, the plasma can be generated at atmospheric pressure with a flexible geometry. The plasma can be operated at very low rf input powers (30-600 W) enabling optimal conditions for atom resonance line absorption measurements. Absorption by the analyte takes place within the plasma discharge which is characterized by a long path length (20 cm) and low support gas flow rate (0.2 L/Min). Both of these characteristics ensure a relatively long residence time. The device exhibits linear calibration plots and provides sensitivities in the range of 3.5-40 pg. A preliminary measurement gave a Fe I excitation temperature of approximately 4000 K for the discharge. At this temperature, potential chemical interferences are likely to be minimal. Chemical interferences for Fe, Al, As, Ca, Co, Cd, Li, Mo and Sr were negligible in the determination of silver. Chloride interference, which is prevalent in GF-AAS, was not found. The amount of Ag found in a SMR#1643b (NIST) water sample was 9.5 ± 0.5 ng/g which fell in the certified range of 9.8 ± 0.8 ng/g. Spikes of 30 ng/g and 60 ng/g of silver were added to the SRM and recoveries were found to be in a range from 105 % to 96.2 %. The RSD obtained for 7 replicates of 270 pg silver was 4.6 %. The results for the CCP AES are even more promising. The interferences of thirteen elements are negligible in the determination of silver. The chloride interference was not found. The detection limits for Ag, Cd, Li, Sb and B are 0.7, 0.7, 2, 80 and 400 pg respectively. The amount of silver found in a SRM#1643b (NIST) water sample was 9.3 ± 0.5 ng/g which also fell in the certified range of 9.8 ±0.8 ng/g. Spikes of 30 ng/g and 60 ng/g of silver were added into the SRM#1643b (NIST) samples; the recoveries were found to range from 97 % to 104 %. The RSD obtained for 7 analyses of 270 pg silver were 1.5 % for CCP-AES. It was also found that the signal to noise ratios (S/N) are higher in the AES mode than those in the AAS mode in the same CCP atomizer. In order to exploit advantages inherent in both GF-AAS and I CP-AES, an atmospheric pressure capacitively coupled plasma sustained inside a graphite furnace was developed. This source combines the high efficiency of atomization in furnaces and the high efficiency of the excitation in atmospheric pressure plasmas. In general, plasma sources are able to effectively excite high-lying excited states for most metals and non-metals and can also ionize vaporized elements. Therefore the possibility exists of using non-resonance lines to avoid the effects of self-absorption at high analyte concentrations. Ion lines may also be used in cases where they provide better sensitivity or freedom from spectral interferences. This source also offers the ability to independently optimize vaporization and excitation. However, the most important aspect of this new source is that it can be used for simultaneous, multielement determinations of small sized samples in a graphite furnace atomizer, a design which has been proven to be effective over many years of use. Preliminary quantitative characteristics of this new atmospheric pressure plasma emission source have been studied. The detection limit for Ag of 0.3 pg is lower than the value of 0.4 pg reported for GF-AAS. Variants of the CCP, including a gas chromatography (GC) detector, combinations of laser ablation - CCP, rf sputtering - CCP direct solid analysis, and its application as an intense spectral lamp have been developed and are reported in this dissertation.
Science, Faculty of
Chemistry, Department of
Graduate
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10

O'Neill, Colm Philip. „Numerical simulations of plasma dynamics and chemistry in dual radio-frequency and pulse driven capacitively coupled atmosphere pressure plasmas“. Thesis, Queen's University Belfast, 2015. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.696157.

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This thesis presents the results of numerical models used to investigate the influence of the operating conditions of a micro atmospheric pressure plasma jet, on the electron dynamics, ionisation/sustainment mechanisms and resultant plasma chemistry. The aim is to determine the, optimum operating conditions of this discharge for enhancing and controlling the underlying plasma processes and production/composition of useful reactive species. Both nonlinear frequency coupling and pulsed excitation have been shown to influence the underlying processes governing the electron dynamics in radio-frequency driven atmospheric pressure plasmas, here the effects of operating a micro atmospheric pressure 'plasma jet (μ-APPJ) using dual frequency (2F) and pulsed excitation are explored. Several multi-scale numerical models based on hydrodynamic equations with a semi-kinetic treatment of the electrons are used to investigate the influence of the operating mode on the plasma dynamics and chemistry. The models consider a helium background gas with a small molecular admixture of either Nitrogen or Oxygen, and range in complexity, with the most complex model accounting for 184 reactions amongst 20 species. Each model is found to agree well with experimental benchmarks. Using 2F excitation, it is found that variations of power density, voltage ratio and phase relationship provide separate control over the electron density, mean electron energy and electro-negativity. Using Pulsed excitation, variations of the pulse width and repetition rate are also found to directly influence the electron density, mean electron energy and electro-negativity. In both cases this is exploited to directly influence the phase dependent and time averaged effective EEPF, which enables tailoring of the EEPF for enhanced control over the plasma chemical kinetics. This is shown to allow control over the production and composition of useful reactive species, namely reactive oxygen species.
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Bücher zum Thema "Radio frequency inductively-coupled plasma"

1

Gao, Guangning. Modelling and diagnostics of atmospheric argon radio frequency inductively coupled plasma. 2004.

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Shan, Yanguang. A stochastic spray model for radio frequency inductively coupled plasmas. 2004.

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Buchteile zum Thema "Radio frequency inductively-coupled plasma"

1

Boulos, Maher I., Pierre Fauchais und Emil Pfender. „Inductively Coupled Radio Frequency Plasma Torches“. In Handbook of Thermal Plasmas, 1–55. Cham: Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-12183-3_17-1.

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Jayapalan, Kanesh Kumar, Oi Hoong Chin und Chiow San Wong. „Radio Frequency Planar Inductively Coupled Plasma: Fundamentals and Applications“. In Plasma Science and Technology for Emerging Economies, 527–91. Singapore: Springer Singapore, 2017. http://dx.doi.org/10.1007/978-981-10-4217-1_10.

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Berezhnoi, S., I. Kaganovich, A. Bogaerts und R. Gijbels. „Modelling of Radio Frequency Capacitively Coupled Plasma at Intermediate Pressures“. In Advanced Technologies Based on Wave and Beam Generated Plasmas, 525–26. Dordrecht: Springer Netherlands, 1999. http://dx.doi.org/10.1007/978-94-017-0633-9_48.

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Rossnagel, Stevi. „Ionization by radio frequency inductively coupled plasma“. In Ionized physical vapor deposition, 37–66. Elsevier, 2000. http://dx.doi.org/10.1016/s1079-4050(00)80005-8.

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Coppa, Gianni, Antonio D'Angola, Ivo Furno, Davide Bernardi, Philippe Guittienne, Alan Howling, Remy Jacquier und Renato Zaffina. „Radio frequency inductively coupled discharges in thermal plasmas“. In Plasma Modeling Methods and Applications. IOP Publishing, 2016. http://dx.doi.org/10.1088/978-0-7503-1200-4ch10.

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Ohtsu, Yasunori. „Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications“. In Plasma Science and Technology - Basic Fundamentals and Modern Applications. IntechOpen, 2019. http://dx.doi.org/10.5772/intechopen.78387.

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Deicke, Frank, Hagen Grtz und Wolf-Joachim Fischer. „Virtual Optimisation and Verification of Inductively Coupled Transponder Systems“. In Radio Frequency Identification Fundamentals and Applications Design Methods and Solutions. InTech, 2010. http://dx.doi.org/10.5772/7980.

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Griffiths, C. M., R. Bøe und R. A. and Hodkinson. „Frequency and Sequency Analyses of Petrophysical Log Data and Inductively Coupled Argon Plasma Analysis of Sediments in the Lau Basin“. In Proceedings of the Ocean Drilling Program, 135 Scientific Results. Ocean Drilling Program, 1994. http://dx.doi.org/10.2973/odp.proc.sr.135.105.1994.

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Konferenzberichte zum Thema "Radio frequency inductively-coupled plasma"

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Wendt, Amy E. „The physics of inductively coupled plasma sources“. In The twelfth topical conference on radio frequency power in plasmas. AIP, 1997. http://dx.doi.org/10.1063/1.53368.

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2

Kato, Takahiro, Yuma Iwasaki, Takayasu Fujino und Ikkoh Funaki. „Thrust Measurement of Radio Frequency Inductively Coupled Plasma Thruster“. In 53rd AIAA Aerospace Sciences Meeting. Reston, Virginia: American Institute of Aeronautics and Astronautics, 2015. http://dx.doi.org/10.2514/6.2015-1613.

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Akiyama, Kaho, und Takayasu Fujino. „Study on Nozzle Shape of Radio-Frequency Inductively Coupled Plasma Thruster“. In AIAA Propulsion and Energy 2021 Forum. Reston, Virginia: American Institute of Aeronautics and Astronautics, 2021. http://dx.doi.org/10.2514/6.2021-3381.

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Razzak, M. A., S. Takamura, Y. Uesugi und N. Ohno. „Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure“. In The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. IEEE, 2006. http://dx.doi.org/10.1109/plasma.2006.1706960.

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Kemaneci, Efe H., Emile Carbone, Sara Rahimi, Manuel Jimenez-Diaz, Jan van Dijk, Gerrit Kroesen und Jean-Paul Booth. „Global model of inductively coupled radio-frequency Cl2 plasma: Dissociation, excitation and power modulation“. In 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS). IEEE, 2013. http://dx.doi.org/10.1109/plasma.2013.6634959.

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Xiong, H. B., L. L. Zheng, J. Margolies und S. Sampath. „Numerical Simulation of Radio Frequency Induction Plasma Spray Processing“. In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-59895.

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A two-dimensional numerical model has been developed to investigate the induction electromagnetic (EM) field and the thermo-fluid field in a radio frequency inductively coupled plasma (RF-ICP). Various physical and chemical phenomena have been considered such as the induction heating, plasma generation, and the in-flight particle interaction with the plasma jet. This model has been applied to the induction plasma spray process operated in a vacuum chamber. The partially stabilized zirconia powder (PSZ) has been used as an example for the feedstock. The effects of power input, standoff distance and powder injection position on the plasma and particle behaviors have also been investigated and discussed.
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Yamauchi, Mioko, und Takayasu Fujino. „Comparison between Experiments and Numerical Simulations of a Radio-frequency Inductively Coupled Plasma Thruster“. In AIAA Propulsion and Energy 2019 Forum. Reston, Virginia: American Institute of Aeronautics and Astronautics, 2019. http://dx.doi.org/10.2514/6.2019-3903.

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Ng, K. H., C. S. Wong, S. L. Yap, S. N. Gan, Swee-Ping Chia, Kurunathan Ratnavelu und Muhamad Rasat Muhamad. „Deposition Of Materials Using A Simple Planar Coil Radio Frequency Inductively Coupled Plasma System“. In FRONTIERS IN PHYSICS: 3rd International Meeting. AIP, 2009. http://dx.doi.org/10.1063/1.3192288.

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Gushchin, Mikhail E., Sergey V. Korobkov, Alexander V. Kostrov, Askold V. Strikovsky, Vladimir I. Gundorin, Alexander G. Galka, Dmitry A. Odzerikho, Volodymyr Bobkov und Jean-Marie Noterdaeme. „Basic plasma physics experiments and modeling of space phenomena on a large inductively coupled magnetoplasma device“. In RADIO FREQUENCY POWER IN PLASMAS: Proceedings of the 18th Topical Conference. AIP, 2009. http://dx.doi.org/10.1063/1.3273837.

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Huang, Ta-Yen, Yueh-Heng Li, Ming-Hsueh Shen und Yi-Chien Chen. „Development of a Miniature Radio-Frequency Ion Engine with Inductively Coupled Plasma (ICP) Source for Cube Satellite Propulsion“. In AIAA Propulsion and Energy 2021 Forum. Reston, Virginia: American Institute of Aeronautics and Astronautics, 2021. http://dx.doi.org/10.2514/6.2021-3417.

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