Thematische Bibliographien / Plasma immersion ion implantation

Inhaltsverzeichnis

  1. Zeitschriftenartikel
  2. Dissertationen
  3. Bücher
  4. Buchteile
  5. Konferenzberichte
  6. Berichte der Organisationen

Auswahl der wissenschaftlichen Literatur zum Thema „Plasma immersion ion implantation“

Autor: Grafiati
Veröffentlicht am 4. Juni 2021
Zuletzt aktualisiert am 25. Juli 2025

Geben Sie eine Quelle nach APA, MLA, Chicago, Harvard und anderen Zitierweisen an

Wählen Sie eine Art der Quelle aus:

Machen Sie sich mit den Listen der aktuellen Artikel, Bücher, Dissertationen, Berichten und anderer wissenschaftlichen Quellen zum Thema "Plasma immersion ion implantation" bekannt.

Neben jedem Werk im Literaturverzeichnis ist die Option "Zur Bibliographie hinzufügen" verfügbar. Nutzen Sie sie, wird Ihre bibliographische Angabe des gewählten Werkes nach der nötigen Zitierweise (APA, MLA, Harvard, Chicago, Vancouver usw.) automatisch gestaltet.

Sie können auch den vollen Text der wissenschaftlichen Publikation im PDF-Format herunterladen und eine Online-Annotation der Arbeit lesen, wenn die relevanten Parameter in den Metadaten verfügbar sind.

Zeitschriftenartikel zum Thema "Plasma immersion ion implantation"

1

Mantese, Joseph V., Ian G. Brown, Nathan W. Cheung, and George A. Collins. "Plasma-Immersion Ion Implantation." MRS Bulletin 21, no. 8 (1996): 52–56. http://dx.doi.org/10.1557/s0883769400035727.

Der volle Inhalt der Quelle
Annotation:
Plasma-immersion ion implantation (PIII) is an emerging technology for the surface engineering of semiconductors, metals, and dielectrics. It is inherently a batch-processable technique that lends itself to the implantation of large numbers of parts simultaneously. It thus offers the possibility of introducing ion implantation into manufacturing processes that have not traditionally been feasible using conventional implantation.In PIII the part to be treated is placed in a vacuum chamber in which is generated a plasma containing the ions of the species to be implanted. The plasma based implant
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Thomae, Rainer W. "Plasma-immersion ion implantation." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 139, no. 1-4 (1998): 37–42. http://dx.doi.org/10.1016/s0168-583x(97)00952-x.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

MIREAULT, N., and G. G. ROSS. "MODIFICATION OF WETTING PROPERTIES OF PMMA BY IMMERSION PLASMA ION IMPLANTATION." Surface Review and Letters 15, no. 04 (2008): 345–54. http://dx.doi.org/10.1142/s0218625x08011470.

Der volle Inhalt der Quelle
Annotation:
Advancing and receding contact angles below 5° have been obtained on PMMA surfaces with the implantation of argon and oxygen ions. The ion implantations were performed by means of the Immersion Plasma Ion Implantation (IPII) technique, a hybrid between ion beams and immersion plasmas. Characterization of treated PMMA surfaces by means of XPS and its combination with chemical derivatization (CD-XPS) have revealed the depletion of oxygen and the creation of dangling bonds, together with the formation of new chemical functions such as –OOH , –COOH and C = C . These observations provide a good exp
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Lieberman, M. A. "Model of plasma immersion ion implantation." Journal of Applied Physics 66, no. 7 (1989): 2926–29. http://dx.doi.org/10.1063/1.344172.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
5

Kondyurin, A., V. Karmanov, and R. Guenzel. "Plasma immersion ion implantation of polyethylene." Vacuum 64, no. 2 (2001): 105–11. http://dx.doi.org/10.1016/s0042-207x(01)00381-5.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
6

López-Callejas, R., R. Valencia-Alvarado, A. E. Muñoz-Castro, O. G. Godoy-Cabrera, and J. L. Tapia-Fabela. "Instrumentation for plasma immersion ion implantation." Review of Scientific Instruments 73, no. 12 (2002): 4277–82. http://dx.doi.org/10.1063/1.1517144.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
7

Collins, G. A., R. Hutchings, and J. Tendys. "Plasma immersion ion implantation of steels." Materials Science and Engineering: A 139 (July 1991): 171–78. http://dx.doi.org/10.1016/0921-5093(91)90613-r.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
8

Mändl, S., J. Brutscher, R. Günzel, and W. Möller. "Ion energy distribution in plasma immersion ion implantation." Surface and Coatings Technology 93, no. 2-3 (1997): 234–37. http://dx.doi.org/10.1016/s0257-8972(97)00051-0.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
9

Kenny, M. J., L. S. Wielunski, J. Tendys, and G. A. Collins. "A comparison of plasma immersion ion implantation with conventional ion implantation." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 80-81 (June 1993): 262–66. http://dx.doi.org/10.1016/0168-583x(93)96120-2.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
10

Yankov, Rossen A., and Stephan Mändl. "Plasma immersion ion implantation for silicon processing." Annalen der Physik 513, no. 4 (2001): 279–98. http://dx.doi.org/10.1002/andp.20015130401.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
Mehr Quellen

Dissertationen zum Thema "Plasma immersion ion implantation"

1

Chen, Shou-Mian. "Plasma immersion ion implantation of silicon." Thesis, University of Surrey, 1997. http://epubs.surrey.ac.uk/842893/.

Der volle Inhalt der Quelle
Annotation:
Plasma Immersion Ion Implantation has several unique advantages over conventional implantation, such as low cost, large area capability, non-line-of-sight features and high dose rate implantation. However, it is still far from use in routine production because of problems such as the ability to control the ion depth profile in targets, the ion dose and contamination. In this thesis, a PIII system has been systematically calibrated, and a computer simulation code for PIII has been developed in order to understand more clearly the physics of the PIII process and to optimise the experimental cond
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Allan, Scott Young. "Ion Energy Measurements in Plasma Immersion Ion Implantation." Thesis, The University of Sydney, 2009. http://hdl.handle.net/2123/5338.

Der volle Inhalt der Quelle
Annotation:
This thesis investigates ion energy distributions (IEDs) during plasma immersion ion implantation (PIII). PIII is a surface modification technique where an object is placed in a plasma and pulse biased with large negative voltages. The energy distribution of implanted ions is important in determining the extent of surface modifications. IED measurements were made during PIII using a pulse biased retarding field energy analyser (RFEA) in a capacitive RF plasma. Experimental results were compared with those obtained from a two dimensional numerical simulation to help explain the origins of featu
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

Allan, Scott Young. "Ion Energy Measurements in Plasma Immersion Ion Implantation." The School of Physics. The Faculty of Science, 2009. http://hdl.handle.net/2123/5338.

Der volle Inhalt der Quelle
Annotation:
Doctor of Philosophy (PhD)<br>This thesis investigates ion energy distributions (IEDs) during plasma immersion ion implantation (PIII). PIII is a surface modification technique where an object is placed in a plasma and pulse biased with large negative voltages. The energy distribution of implanted ions is important in determining the extent of surface modifications. IED measurements were made during PIII using a pulse biased retarding field energy analyser (RFEA) in a capacitive RF plasma. Experimental results were compared with those obtained from a two dimensional numerical simulation to hel
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Oates, Thomas William Henry. "Metal plasma immersion ion implantation and deposition using polymer substrates." Connect to full text, 2003. http://hdl.handle.net/2123/571.

Der volle Inhalt der Quelle
Annotation:
Thesis (Ph. D.)--University of Sydney, 2004.<br>Title from title screen (viewed 5 May 2008). Submitted in fulfilment of the requirements for the degree of Doctor of Philosophy to the School of Physics, Faculty of Science. Degree awarded 2004; thesis submitted 2003. Includes bibliographical references. Also available in print form.
APA, Harvard, Vancouver, ISO und andere Zitierweisen
5

Oates, T. W. H. "Metal plasma immersion ion implantation and deposition using polymer substrates." Thesis, The University of Sydney, 2003. http://hdl.handle.net/2123/571.

Der volle Inhalt der Quelle
Annotation:
This thesis investigates the application of plasma immersion ion implantation (PIII) to polymers. PIII requires that a high negative potential be applied to the surface of the material while it is immersed in a plasma. This presents a problem for insulating materials such as polymers, since the implanting ions carry charge to the surface, resulting in a charge accumulation that effectively neutralises the applied potential. This causes the plasma sheath at the surface to collapse a short time after the potential is applied. Measurements of the sheath dynamics, including the collapsing shea
APA, Harvard, Vancouver, ISO und andere Zitierweisen
6

Oates, T. W. H. "Metal plasma immersion ion implantation and deposition using polymer substrates." University of Sydney. Physics, 2003. http://hdl.handle.net/2123/571.

Der volle Inhalt der Quelle
Annotation:
This thesis investigates the application of plasma immersion ion implantation (PIII) to polymers. PIII requires that a high negative potential be applied to the surface of the material while it is immersed in a plasma. This presents a problem for insulating materials such as polymers, since the implanting ions carry charge to the surface, resulting in a charge accumulation that effectively neutralises the applied potential. This causes the plasma sheath at the surface to collapse a short time after the potential is applied. Measurements of the sheath dynamics, including the collapsing shea
APA, Harvard, Vancouver, ISO und andere Zitierweisen
7

Kosobrodova, Elena. "Plasma Immersion Ion Implanted Polymers for Antibody Microarray Applications." Thesis, The University of Sydney, 2014. http://hdl.handle.net/2123/13676.

Der volle Inhalt der Quelle
Annotation:
A novel platform for protein microarrays with improved sensitivity and reproducibility was developed. Plasma immersion ion implantation (PIII) treated polycarbonate (PC) was used as a substrate for anti-cluster of differentiation (CD) antibody microarrays. Compared to the current industrial standard, nitrocellulose-coated glass slides, the novel platform requires a three times lower concentration of anti-CD antibodies to achieve an equivalent signal strength and has about two times better reproducibility and three times higher sensitivity. For the first time, an anti-CD antibody microarray w
APA, Harvard, Vancouver, ISO und andere Zitierweisen
8

Bozkurt, Bilge. "Dynamic Ion Behavior In Plasma Source Ion Implantation." Master's thesis, METU, 2006. http://etd.lib.metu.edu.tr/upload/12607025/index.pdf.

Der volle Inhalt der Quelle
Annotation:
The aim of this work is to analytically treat the dynamic ion behavior during the evolution of the ion matrix sheath, considering the industrial application plasma source ion implantation for both planar and cylindrical targets, and then to de-velop a code that simulates this dynamic ion behavior numerically. If the sepa-ration between the electrodes in a discharge tube is small, upon the application of a large potential between the electrodes, an ion matrix sheath is formed, which fills the whole inter-electrode space. After a short time, the ion matrix sheath starts moving towards the cathod
APA, Harvard, Vancouver, ISO und andere Zitierweisen
9

Tsoutas, Kostadinos Wallach. "Towards Advanced Bionics: Plasma Immersion Ion Implantation of Conductive Polypyrrole Films." Thesis, The University of Sydney, 2019. https://hdl.handle.net/2123/22624.

Der volle Inhalt der Quelle
Annotation:
This thesis investigates the use of Plasma Immersion Ion Implantation (PIII) to modify electroploymerised polypyrrole (PPy) to allow for surface covalent binding of a range of biomolecules for biofunctionalized bionic applications. Synthesis regimes were investigated, aiming to produce PPy samples with the highest degree of batch consistency, chemical homogeneity and electroactivity. Galvanostatic samples at 0.2mA proved to produce superior PPy samples. PIII of nitrogen ions into PPy was modelled using TRIM/SRIM software. The depth of the treated volume of PPy was determined, along with the u
APA, Harvard, Vancouver, ISO und andere Zitierweisen
10

Watkins, John H. "The application of plasma immersion ion implantation to sheep shearing combs /." Title page, contents and abstract only, 1995. http://web4.library.adelaide.edu.au/theses/09PH/09phw335.pdf.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
Mehr Quellen

Bücher zum Thema "Plasma immersion ion implantation"

1

André, Anders, ed. Handbook of plasma immersion ion implantation and deposition. Wiley, 2000.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Dearborn, Mich ). International Workshop on Plasma-Based Ion Implantation (4th 1998. Papers from the Fourth International Plasma-Based Ion Implantation Workshop: 2-4 June 1998, Dearborn, Michigan. American Vacuum Society through the American Institute of Physics, 1999.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

United States. National Aeronautics and Space Administration., ed. Plasma assisted surface coating/modification processes: An emerging technology. National Aeronautics and Space Administration, 1987.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Robert, Moran. Thin layer deposition: Highlighting implantation and epitaxy, plasma, thermal, and ion. Business Communications Co., 1996.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
5

1928-, Hochman Robert F., Solnick-Legg Hillary, Legg Keith O, ASM International. Ion Implantation Committee., and ASM International. Plasma Processes Committee., eds. Ion implantation and plasma assisted processes: Proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988. ASM International, 1988.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
6

R, Conrad John, Sridharan Kumar, and Applied Science and Technology (ASTeX), Inc., eds. Papers from the First International Workshop on Plasma-Based Ion Implantation: 4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin. Published for the American Vacuum Society by the American Institute of Physics, 1994.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
7

Anders, André. Handbook of Plasma Immersion Ion Implantation and Deposition. Wiley-Interscience, 2000.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
8

Hochman, Robert F., Hillary Solnick-Legg, and Keith O. Legg. Ion Implantation and Plasma Assisted Processes: Proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Appli. Asm Intl, 1989.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
9

Papers from the First International Workshop on Plasma-Based Ion Implantation: 4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin. Published for the American Vacuum Society by the American Institute of Physics, 1994.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen
10

Gnedenkov, S. V. Plazmennoe ėlektroliticheskoe oksidirovanie metallov i splavov v tartratsoderzhashchikh rastvorakh =: Plazma electrolitic oxidation of metal and alloys in tartrate containing electrolytes. 2008.

Den vollen Inhalt der Quelle finden
APA, Harvard, Vancouver, ISO und andere Zitierweisen

Buchteile zum Thema "Plasma immersion ion implantation"

1

Yu, Crid, and Nathan W. Cheung. "Plasma Immersion Ion Implantation: A Perspective." In Crucial Issues in Semiconductor Materials and Processing Technologies. Springer Netherlands, 1992. http://dx.doi.org/10.1007/978-94-011-2714-1_25.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Jirásková, Y., O. Schneeweiss, V. Peřina, C. Blawert, and B. L. Mordike. "Phase Composition of Steel Surfaces after Plasma Immersion Ion Implantation." In Mössbauer Spectroscopy in Materials Science. Springer Netherlands, 1999. http://dx.doi.org/10.1007/978-94-011-4548-0_17.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

Hirschmann, A. C. O., M. M. Silva, C. Moura Neto, et al. "Surface Modification of Inconel 718 Superalloy by Plasma Immersion Ion Implantation." In Superalloy 718 and Derivatives. John Wiley & Sons, Inc., 2012. http://dx.doi.org/10.1002/9781118495223.ch75.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Coeur, F., Y. Arnal, J. Pelletier, O. Lesaint, O. Maulat, and M. Roche. "Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage — High Current Pulse Generator." In Advanced Technologies Based on Wave and Beam Generated Plasmas. Springer Netherlands, 1999. http://dx.doi.org/10.1007/978-94-017-0633-9_32.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
5

Uzumaki, E. T., and C. S. Lambert. "Characterization of Titanium Oxide Thin Films Produced by Plasma Immersion Ion Implantation for Biomedical Implants." In Bioceramics 20. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-457-x.673.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
6

Pakpum, C., N. Pasaja, P. Suanpoot, et al. "Diamond-Like Carbon Formed by Plasma Immersion Ion Implantation and Deposition Technique on 304 Stainless Steel." In Solid State Phenomena. Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/3-908451-12-4.129.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
7

You, Y. Z., D. I. Kim, and H. G. Chun. "A study on the Surface Properties of Nitrogen Implanted H13 Steel by Plasma Immersion Ion Implantation." In Solid State Phenomena. Trans Tech Publications Ltd., 2006. http://dx.doi.org/10.4028/3-908451-25-6.275.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
8

Uzumaki, E. T., C. S. Lambert, W. D. Belangero, and Cecília A. C. Zavaglia. "Biocompatibility of Titanium Based Implants with Diamond-Like Carbon Coatings Produced by Plasma Immersion Ion Implantation and Deposition." In Bioceramics 20. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-457-x.677.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
9

Liu, Hongxi, Rong Zhou, Yehua Jiang, and Baoyin Tang. "Friction and Wear Behaviors and Rolling Contact Fatigue Life of TiN Film on Bearing Steel by Plasma Immersion Ion Implantation and Deposition Technique." In Advanced Tribology. Springer Berlin Heidelberg, 2009. http://dx.doi.org/10.1007/978-3-642-03653-8_241.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
10

Möller, Wolfhard. "Plasma Based Ion Implantation." In Advanced Technologies Based on Wave and Beam Generated Plasmas. Springer Netherlands, 1999. http://dx.doi.org/10.1007/978-94-017-0633-9_10.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen

Konferenzberichte zum Thema "Plasma immersion ion implantation"

1

Wei, Ronghua, Marta A. Jakab, Kent Coulter, and A. M. Abd El-Rahman. "Plasma Surface Engineering of Materials for Corrosion Protection." In CORROSION 2010. NACE International, 2010. https://doi.org/10.5006/c2010-10261.

Der volle Inhalt der Quelle
Annotation:
Abstract The surface of a component is very critical to maintain the proper functions when it is directly exposed to a very harsh environment. Various commercial treatments are available to enhance the surface properties including heat treatment and painting. For over a half of a century, plasmas have been studied for enhancing the surface properties of materials, and in some areas plasma surface engineering is applied to industrial components. In this paper, we will discuss the latest research in this area and various technologies with the emphasis on materials corrosion protection. SwRI has
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Oliveira, Rogerio M., Mario Ueda, Jose O. Rossi, and Beatriz L. D. Moreno. "Plasma Immersion Ion Implantation with Lithium Ions." In 2007 IEEE Pulsed Power Plasma Science Conference. IEEE, 2007. http://dx.doi.org/10.1109/ppps.2007.4345866.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

Burenkov, A., P. Pichler, J. Lorenz, Y. Spiegel, J. Duchaine, and F. Torregrosa. "Simulation of plasma immersion ion implantation." In 2011 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD). IEEE, 2011. http://dx.doi.org/10.1109/sispad.2011.6034962.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Sakudo, N., N. Ikenaga, K. Matsui, and N. Sakumoto. "Exact ion energy in plasma immersion ion implantation." In 2015 IEEE International Conference on Plasma Sciences (ICOPS). IEEE, 2015. http://dx.doi.org/10.1109/plasma.2015.7179884.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
5

Díaz, C., J. A. García, S. Mändl, R. Pereiro, B. Fernández, and R. J. Rodríguez. "Plasma immersion ion implantation for reducing metal ion release." In ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology. AIP, 2012. http://dx.doi.org/10.1063/1.4766544.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
6

Oliveira, R. M., M. Ueda, J. O. Rossi, and B. Diaz. "Plasma immersion ion implantation with lithium atoms." In 2007 IEEE International Pulsed Power Plasma Science Conference (PPPS 2007). IEEE, 2007. http://dx.doi.org/10.1109/ppps.2007.4651972.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
7

Nizou, S., V. Vervisch, H. Etienne, et al. "Deep Trench Doping by Plasma Immersion Ion Implantation in Silicon." In ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006. AIP, 2006. http://dx.doi.org/10.1063/1.2401501.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
8

Vahedi, V., M. A. Lieberman, M. V. Alves, J. P. Verboncoeur, and C. K. Birdsall. "A collisional model for plasma immersion ion implantation." In 1990 Plasma Science IEEE Conference Record - Abstracts. IEEE, 1990. http://dx.doi.org/10.1109/plasma.1990.110778.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
9

Burenkov, Alex, Juergen Lorenz, Yohann Spiegel, and Frank Torregrosa. "Simulation of plasma immersion ion implantation into silicon." In 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD). IEEE, 2015. http://dx.doi.org/10.1109/sispad.2015.7292298.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
10

Cheung, N. W., W. En, J. Gao, et al. "Plasma Immersion Ion Implantation for Electronic Materials Applications." In 1995 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1995. http://dx.doi.org/10.7567/ssdm.1995.c-2-1.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen

Berichte der Organisationen zum Thema "Plasma immersion ion implantation"

1

Scheuer, J. T., K. C. Walter, D. J. Rej, M. Nastasi, and J. P. Blanchard. Plasma source ion implantation of ammonia into electroplated chromium. Office of Scientific and Technical Information (OSTI), 1995. http://dx.doi.org/10.2172/28338.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
2

Bibeault, M. L., and G. R. Thayer. Operations manual for the plasma source ion implantation economics program. Office of Scientific and Technical Information (OSTI), 1995. http://dx.doi.org/10.2172/366451.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
3

Lillard, R. S., D. P. Butt, T. N. Taylor, K. C. Walter, and M. Nastasi. Diamond-like carbon produced by plasma source ion implantation as a corrosion barrier. Office of Scientific and Technical Information (OSTI), 1998. http://dx.doi.org/10.2172/645555.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
4

Wood, B. P., W. A. Reass, and I. Henins. Plasma source ion implantation of metal ions: Synchronization of cathodic-arc plasma production and target bias pulses. Office of Scientific and Technical Information (OSTI), 1995. http://dx.doi.org/10.2172/52820.

Der volle Inhalt der Quelle
APA, Harvard, Vancouver, ISO und andere Zitierweisen
Die Auswahlen zum Thema "Plasma immersion ion implantation" für konkrete Quellenarten können Sie auch interessieren:
Zeitschriftenartikel Dissertationen
Wir bieten Rabatte auf alle Premium-Pläne für Autoren, deren Werke in thematische Literatursammlungen aufgenommen wurden. Kontaktieren Sie uns, um einen einzigartigen Promo-Code zu erhalten!

Zur Bibliographie