Auswahl der wissenschaftlichen Literatur zum Thema „On-Product-Overlay“
Geben Sie eine Quelle nach APA, MLA, Chicago, Harvard und anderen Zitierweisen an
Inhaltsverzeichnis
Machen Sie sich mit den Listen der aktuellen Artikel, Bücher, Dissertationen, Berichten und anderer wissenschaftlichen Quellen zum Thema "On-Product-Overlay" bekannt.
Neben jedem Werk im Literaturverzeichnis ist die Option "Zur Bibliographie hinzufügen" verfügbar. Nutzen Sie sie, wird Ihre bibliographische Angabe des gewählten Werkes nach der nötigen Zitierweise (APA, MLA, Harvard, Chicago, Vancouver usw.) automatisch gestaltet.
Sie können auch den vollen Text der wissenschaftlichen Publikation im PDF-Format herunterladen und eine Online-Annotation der Arbeit lesen, wenn die relevanten Parameter in den Metadaten verfügbar sind.
Zeitschriftenartikel zum Thema "On-Product-Overlay"
Wang, Yang-Kao, Hsi-Hui Lin und Ming-Jer Tang. „Collagen gel overlay induces two phases of apoptosis in MDCK cells“. American Journal of Physiology-Cell Physiology 280, Nr. 6 (01.06.2001): C1440—C1448. http://dx.doi.org/10.1152/ajpcell.2001.280.6.c1440.
Der volle Inhalt der QuelleAnn Drago, Dorothy, Carol Pollack-Nelson und Sarah Beth Newens. „Infant fatality patterns in shared sleep: keys to intervention strategies?“ Proceedings of the Human Factors and Ergonomics Society Annual Meeting 65, Nr. 1 (September 2021): 1322–26. http://dx.doi.org/10.1177/1071181321651174.
Der volle Inhalt der QuelleSattayawat, Pachara, Ian Sofian Yunus und Patrik R. Jones. „Bioderivatization as a concept for renewable production of chemicals that are toxic or poorly soluble in the liquid phase“. Proceedings of the National Academy of Sciences 117, Nr. 3 (08.01.2020): 1404–13. http://dx.doi.org/10.1073/pnas.1914069117.
Der volle Inhalt der QuelleHAH, ZOO-HWAN, HYUN-JUNG KIM und SUNG-KIE YOUN. „A HIERARCHICALLY SUPERIMPOSING LOCAL REFINEMENT METHOD FOR ISOGEOMETRIC ANALYSIS“. International Journal of Computational Methods 11, Nr. 05 (Oktober 2014): 1350074. http://dx.doi.org/10.1142/s0219876213500746.
Der volle Inhalt der QuelleCombrier, Emmanuel, und Dominique Castelli. „The Agarose Overlay Method as a Screening Approach for Ocular Irritancy: Application to Cosmetic Products“. Alternatives to Laboratory Animals 20, Nr. 3 (Juli 1992): 438–44. http://dx.doi.org/10.1177/026119299202000310.
Der volle Inhalt der QuelleHasanloo, M., P. Pahlavani und B. Bigdeli. „FLOOD RISK ZONATION USING A MULTI-CRITERIA SPATIAL GROUP FUZZY-AHP DECISION MAKING AND FUZZY OVERLAY ANALYSIS“. ISPRS - International Archives of the Photogrammetry, Remote Sensing and Spatial Information Sciences XLII-4/W18 (18.10.2019): 455–60. http://dx.doi.org/10.5194/isprs-archives-xlii-4-w18-455-2019.
Der volle Inhalt der QuelleShelton, Doug, Tomii Kume, Charles Wang, Alex Hubbard, Cody Murray und Rob DeLancey. „Advanced Process Technology for 3D and 2.5D Applications“. International Symposium on Microelectronics 2014, Nr. 1 (01.10.2014): 000905–11. http://dx.doi.org/10.4071/isom-thp55.
Der volle Inhalt der QuellePratama, Surya Adi, und Alla Asmara. „The Role of Leading Sectors in Supporting the Economic Growth of East Java Province Before and During the Covid-19 Pandemic“. International Journal of Research and Review 10, Nr. 9 (15.09.2023): 62–75. http://dx.doi.org/10.52403/ijrr.20230908.
Der volle Inhalt der QuelleTita, Efrida, Slamet Santoso, Rochmat Aldy Purnomo, Asis Riat Winanto und Choirul Hamidah. „ANALISIS DAYA SAING EKSPOR JASA NEGARA ASEAN“. Bina Ekonomi 24, Nr. 1 (10.09.2021): 71–86. http://dx.doi.org/10.26593/be.v24i1.5030.71-86.
Der volle Inhalt der QuelleShrivastaw, Nilesh. „Augmented Reality-Based Product Video Promotion Application: A Framework and Implementation“. International Journal for Research in Applied Science and Engineering Technology 12, Nr. 3 (31.03.2024): 2500–2504. http://dx.doi.org/10.22214/ijraset.2024.59384.
Der volle Inhalt der QuelleDissertationen zum Thema "On-Product-Overlay"
Bourguignon, Thibaut. „Implémentation et évaluation de la mesure Overlay in-situ par microscopie électronique pour la production de puces électroniques“. Electronic Thesis or Diss., Université Grenoble Alpes, 2024. http://www.theses.fr/2024GRALT001.
Der volle Inhalt der QuelleIntegrated circuits are manufactured via a stack of various layers. The precise alignment of these layers, known as "overlay" (OVL), is critical to chip reliability. The specifications are very strict: on a 300mm-diameter wafer, each pattern must be aligned to within a few nanometres. Current methods, based on optical observation of dedicated test patterns, show their limitations in terms of representativeness and assessment of local variability.This thesis proposes an innovative approach, using scanning electron microscopy (SEM), to accurately measure these local variations and to understand the biases induced by the test patterns. To this end, an algorithm for measuring the overlay from SEM contours has been developed. By registering reference contours on the extracted contours, the overlay is measured directly on the product, without the need for a specific test pattern, even in the presence of partially masked levels.Following the evaluation of this method on synthetic images, its application to production wafers enabled us to quantify the local variability of the overlay on the product, highlighting deviations from on-line measurements, while revealing the limits of SEM-OVL metrology
Faricha, Anifatul, und Anifatul Faricha. „Diffraction Based Overlay Target Design for On-Product Overlay Measurement“. Thesis, 2016. http://ndltd.ncl.edu.tw/handle/t6ec6a.
Der volle Inhalt der Quelle國立臺灣科技大學
自動化及控制研究所
104
To acquire the advanced-node technology, overlay becomes the key challenges for the nano-lithography in the semiconductor manufacturing. Overlay needs to evolve to accurately represent product device patterns for the control of overlay errors. The diffraction based overlay (DBO) is considered as the promising method, it is fast, non-destructive, stable, and also well-suited to being integrated with a 193-immersion lithography system for controlling the lithography process variations from die-to-die, wafer-to-wafer, and lot-to-lot. The DBO target is the candidate for the on-product overlay control since the DBO’s accuracy and resolution are beyond the diffraction limit. The calculation is more complicated and involved many sophisticated overlay target designs which should be robust against symmetry and asymmetry variation. Several resolution enhancement techniques (RET) such as sub-resolution assist feature (SRAF) and segmentation, are employed to meet the optimal overlay product. In this study, the segmented with SRAF model provided the sharpest aerial image contrast and the lowest critical (CD) error among other models. The feed-forward ANN model was integrated with the scatterometry to assess the resist CD profile in the DBO measurement. Based on the integrated ANN-scatterometry technique, the segmented with SRAF model had the closest result of resist CD profile to the device target among other models. The ANN-scatterometry technique, which was also used for predicting displacement offset of the DBO target with various SWAs, was successfully demonstrated. The numerical result of the minimum square error and the mean of residual in the flat region showed that the ANN model provided more effective displacement offset prediction than the linear and high order regression models, which implemented in the current scatterometry system.
McCanna, David. „Development of Sensitive In Vitro Assays to Assess the Ocular Toxicity Potential of Chemicals and Ophthalmic Products“. Thesis, 2009. http://hdl.handle.net/10012/4338.
Der volle Inhalt der QuelleBuchteile zum Thema "On-Product-Overlay"
Freitas, Isabel Vaz de, und Helena Albuquerque. „Porto, Gaia, and the Sant'Ana Arch“. In Global Perspectives on Literary Tourism and Film-Induced Tourism, 139–62. IGI Global, 2022. http://dx.doi.org/10.4018/978-1-7998-8262-6.ch008.
Der volle Inhalt der QuelleHughes, Jerald, und Karl Reiner Lang. „Content Sharing Systems for Digital Media“. In Encyclopedia of Multimedia Technology and Networking, Second Edition, 254–59. IGI Global, 2009. http://dx.doi.org/10.4018/978-1-60566-014-1.ch035.
Der volle Inhalt der QuelleKonferenzberichte zum Thema "On-Product-Overlay"
van Dijk, Leon, Kedir M. Adal, Sepideh Golmakaniyoon, Bertrand Le-Gratiet, Niyam Haque, Reza Sahraeian, Auguste Lam und Richard van Haren. „Computational overlay as enabler for enhanced on-product overlay control“. In 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). IEEE, 2022. http://dx.doi.org/10.1109/asmc54647.2022.9792531.
Der volle Inhalt der QuelleSmilde, Henk-Jan H., Richard J. F. van Haren, Willy van Buël, Lars H. D. Driessen, Jérôme Dépré, Jan Beltman, Florent Dettoni, Julien Ducoté, Christophe Dezauzier und Yoann Blancquaert. „Target design optimization for overlay scatterometry to improve on-product overlay“. In SPIE Advanced Lithography, herausgegeben von Jason P. Cain und Martha I. Sanchez. SPIE, 2015. http://dx.doi.org/10.1117/12.2085642.
Der volle Inhalt der QuelleShchegrov, Andrei V., Philippe Leray, Yuri Paskover, Liran Yerushalmi, Efi Megged, Yoav Grauer und Roel Gronheid. „On product overlay metrology challenges in advanced nodes“. In Metrology, Inspection, and Process Control for Microlithography XXXIV, herausgegeben von Ofer Adan und John C. Robinson. SPIE, 2020. http://dx.doi.org/10.1117/12.2551932.
Der volle Inhalt der Quellevan Haren, Richard, Orion Mouraille, Oktay Yildirim, Leon van Dijk, Kaushik Kumar, Yannick Feurprier und Jan Hermans. „On product overlay characterization after stressed layer etch“. In Advanced Etch Technology and Process Integration for Nanopatterning X, herausgegeben von Julie Bannister und Nihar Mohanty. SPIE, 2021. http://dx.doi.org/10.1117/12.2584311.
Der volle Inhalt der QuelleLiu, Guoping, Yinsheng Yu, Chi Zhang, Yuhui Li, Wei Cao, Qin Yuan und Hongwen Zhaoa. „Study On-Product Overlay Improvement for Immersion Lithography“. In 2023 China Semiconductor Technology International Conference (CSTIC). IEEE, 2023. http://dx.doi.org/10.1109/cstic58779.2023.10219349.
Der volle Inhalt der QuelleKarakoy, Mert, Yue Zhou, Dongsuk Park, Zhenhua Ge und Amit Siany. „On-product eBeam overlay topic/category AM: Advanced metrology“. In 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). IEEE, 2017. http://dx.doi.org/10.1109/asmc.2017.7969244.
Der volle Inhalt der QuelleDosho, Tomonori, Yuji Shiba, Takanobu Okamoto, Hajime Yamamoto, Yujiro Hikida, Jay Brown, Go Ichinose, Masahiro Morita und Yuichi Shibazaki. „On-product overlay improvement with an enhanced alignment system“. In SPIE Advanced Lithography, herausgegeben von Andreas Erdmann und Jongwook Kye. SPIE, 2017. http://dx.doi.org/10.1117/12.2257659.
Der volle Inhalt der QuelleKarakoy, Mert, Yue Zhou, Dongsuk Park, Zhenhua Ge und Amit Siany. „On-Product eBeam Overlay topic/category AM: Advanced metrology“. In 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO). IEEE, 2017. http://dx.doi.org/10.23919/mipro.2017.7966591.
Der volle Inhalt der QuelleJeong, Ik-Hyun, Hyun-Sok Kim, Yeong-Oh Kong, Ji-Hyun Song, Jae-Wuk Ju, Young-Sik Kim, Cees Lambregts et al. „Improved wafer alignment model algorithm for better on-product overlay“. In Optical Microlithography XXXII, herausgegeben von Jongwook Kye und Soichi Owa. SPIE, 2019. http://dx.doi.org/10.1117/12.2516259.
Der volle Inhalt der QuelleGatefait, Maxime, Bertrand Le-Gratiet, Pierre Jerome Goirand, Auguste Lam, Richard Van Haren, Anne Pastol, Maya Doytcheva, Xing Lan Liu und Jan Beltman. „Toward 7nm target on product overlay for C028 FDSOI technology“. In SPIE Advanced Lithography, herausgegeben von Alexander Starikov und Jason P. Cain. SPIE, 2013. http://dx.doi.org/10.1117/12.2011099.
Der volle Inhalt der QuelleBerichte der Organisationen zum Thema "On-Product-Overlay"
Lane, Lerose, R. Gary Hicks, DingXin Cheng und Erik Updyke. Manual for Thin Asphalt Overlays. Mineta Transportation Institute, Oktober 2020. http://dx.doi.org/10.31979/mti.2020.1906.
Der volle Inhalt der QuellePayment Systems Report - June of 2021. Banco de la República, Februar 2022. http://dx.doi.org/10.32468/rept-sist-pag.eng.2021.
Der volle Inhalt der Quelle