Thematische Bibliographien / Electron microscopy specimens preparation

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Auswahl der wissenschaftlichen Literatur zum Thema „Electron microscopy specimens preparation“

Autor: Grafiati

Veröffentlicht am 28. Juni 2021

Zuletzt aktualisiert am 14. Februar 2022

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Zeitschriftenartikel zum Thema "Electron microscopy specimens preparation"

Stadtländer, Christian T. K. H. „Dehydration and Rehydration Issues in Biological Tissue Processing for Electron Microscopy“. Microscopy Today 13, Nr. 1 (Januar 2005): 32–35. http://dx.doi.org/10.1017/s1551929500050847.

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Electron microscopy (EM) is an indispensable tool for the study of ultrastructures of biological specimens. Every electron microscopist would like to process biological specimens for either scanning electron microscopy (SEM) or transmission electron microscopy (TEM) in a way that the specimens viewed under the electron microscope resemble those seen in vivo or in vitro under the light microscope. This is, however, often easier said than done because biological tissue processing for EM requires careful attention of the investigator with regard to the numerous processing steps involved in specimen preparation, such as fixation, dehydration, infiltration, embedding, and sectioning.

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Robinson, Vivian. „A Review Of The Development Of Scanning Electron Microscopy At High Chamber Pressure“. Microscopy Today 5, Nr. 1 (Januar 1997): 14–15. http://dx.doi.org/10.1017/s1551929500059964.

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Ever since electron microscopes were developed, it has been the goal of microscopists to observe specimens in their natural state, free from artefacts which can often be introduced through specimen preparation. For most biological specimens, that includes the presence of water. With a pressure of 10-4 torr or lower required to operate a scanning electron microscope (SEM), liquid water, which required a pressure of above 5 torr, was clearly a problem.Although several attempts had been made to examine hydrated specimens in a SEM, the first published results of water imaged in a stable and reproducible manner in the SEM, were presented at the Eighth International Congress on Electron Microscopy in Canberra in 1974 (Robinson, 1974).

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Liu, Dang-Rong, H. E. George Rommal und David B. Williams. „Preparation of lithium specimens for transmission electron microscopy“. Journal of Electron Microscopy Technique 4, Nr. 4 (1986): 381–83. http://dx.doi.org/10.1002/jemt.1060040408.

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Cieslinski, R. C., M. T. Dineen, J. G. Marshall, J. H. Blackson, D. Mizer und H. L. Garrett. „Artifacts of preparation in polymer microscopy“. Proceedings, annual meeting, Electron Microscopy Society of America 47 (06.08.1989): 700–701. http://dx.doi.org/10.1017/s0424820100155475.

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The interpretation of, and information available from a transmission electron photomicrograph, frequently depend upon specimen preparation. A major consideration in the selection of a preparation method is the potential for preparation artifacts. The goal of this work is to illustrate some sectioning and staining artifacts found in the preparation of a variety of polymer specimens. The following artifacts, in addition to several others, will be presented during the poster session.

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Melanson, Linda. „A Versatile and Affordable Plunge Freezing Instrument for Preparing Frozen Hydrated Specimens for Cryo Transmission Electron Microscopy (CryoEM)“. Microscopy Today 17, Nr. 2 (März 2009): 14–17. http://dx.doi.org/10.1017/s1551929500054432.

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CryoEM is a powerful tool in the arsenal of structural biologists and soft polymer chemists. Hydrated specimens require a preservation method that will counteract the effects of the electron beam and the high vacuum environment of the electron microscope. Classical specimen preparation techniques using chemical fixatives are not able to capture the native structure of the once hydrated specimen perfectly. In contrast to classical methods for preserving specimens for electron microscopy, rapid freezing of radiation-sensitive specimens such as dispersed biological macromolecular assemblies, 2D crystals, and colloids allows the structural details of the specimen to be captured in their essentially native state to near atomic resolution.

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Wolff, T. „Preparation of Drosophila Eye Specimens for Scanning Electron Microscopy“. Cold Spring Harbor Protocols 2011, Nr. 11 (01.11.2011): pdb.prot066506. http://dx.doi.org/10.1101/pdb.prot066506.

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Wolff, T. „Preparation of Drosophila Eye Specimens for Transmission Electron Microscopy“. Cold Spring Harbor Protocols 2011, Nr. 11 (01.11.2011): pdb.prot066514. http://dx.doi.org/10.1101/pdb.prot066514.

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Stupina, T. A. „Preparation of Articular Cartilage Specimens for Scanning Electron Microscopy“. Bulletin of Experimental Biology and Medicine 161, Nr. 4 (August 2016): 558–60. http://dx.doi.org/10.1007/s10517-016-3460-9.

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Martone, Maryann E., Andrea Thor, Stephen J. Young und Mark H. Ellisman. „Correlated 3D Light and Electron Microscopy of Large, Complex Structures: Analysis of Transverse Tubules in Heart Failure“. Microscopy and Microanalysis 4, S2 (Juli 1998): 440–41. http://dx.doi.org/10.1017/s1431927600022327.

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Light microscopic imaging has experienced a renaissance in the past decade or so, as new techniques for high resolution 3D light microscopy have become readily available. Light microscopic (LM) analysis of cellular details is desirable in many cases because of the flexibility of staining protocols, the ease of specimen preparation and the relatively large sample size that can be obtained compared to electron microscopic (EM) analysis. Despite these advantages, many light microscopic investigations require additional analysis at the electron microscopic level to resolve fine structural features.High voltage electron microscopy allows the use of relatively thick sections compared to conventional EM and provides the basis for excellent new methods to bridge the gap between microanatomical details revealed by LM and EM methods. When combined with electron tomography, investigators can derive accurate 3D data from these thicker specimens. Through the use of correlated light and electron microscopy, 3D reconstructions of large cellular or subcellular structures can be obtained with the confocal microscope,

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OZERLER, MUSTAFA. „On the Specimen Preparation Techniques for Examining Geological Specimens Using Scanning Electron Microscopy“. Journal of King Abdulaziz University-Earth Sciences 3, Nr. 1 (1990): 369–75. http://dx.doi.org/10.4197/ear.3-1.32.

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Dissertationen zum Thema "Electron microscopy specimens preparation"

Čermák, Jan. „Návrh automatizovaného procesu elektrolytického leštění vzorků pro elektronový mikroskop“. Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2021. http://www.nusl.cz/ntk/nusl-444286.

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This diploma thesis deals with the automation of the electropolishing process, which is per-former as the last step in the preparation of metallographic samples intended for observation in an electron microscope. A complete hardware design of a single-purpose machine has been developed, which provides the automatic preperation of up to six samples per insertion. There was the design of a manipulator for sample handling together with chemically re-sistant sample holder suitable for automatic operation as a part of solution. The design of the whole machine was developed with regard to the safety of the operator. The thesis includes detailed 3D model of the device and the desing of an application for measurement in the LabVIEW. It describes the future working process of the machine, including a description of a software for controlling the machine and sending process data of each sample to the to the database in accordance with the principles of industry 4.0. In the conclusion, the achieved results and the proposal of further steps necessary for the realization of the machine are for-mulated.

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Schilling, Sibylle. „Liquid in situ analytical TEM : technique development and applications to austenitic stainless steel“. Thesis, University of Manchester, 2017. https://www.research.manchester.ac.uk/portal/en/theses/liquid-in-situ-analytical-tem-technique-development-and-applications-to-austenitic-stainless-steel(fd490551-7d7a-4b2e-9b1f-917b5f8165b3).html.

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Environmentally-assisted cracking (EAC) phenomena affect the in-service behaviour of austenitic stainless steels in nuclear power plants. EAC includes such degradation phenomena as Stress Corrosion Cracking (SCC) and Corrosion Fatigue (CF). Factors affecting EAC include the material type, microstructure, environment, and stress. This is an important degradation issue for both current and Gen III+ light water reactors, particularly as nuclear power plant lifetimes are extended ( > 60 years). Thus, it is important to understand the behaviour of the alloys used in light water reactors, and phenomena such as SCC to avoid failures. Although there is no agreement on the mechanism(s) of SCC, the importance of localized electrochemical reactions at the material surface is widely recognised. Considerable research has been performed on SCC and CF crack growth, but the initiation phenomena are not fully understood. In this project, novel in situ analytical TEM techniques have been developed and applied to explore localised reactions in Type 304 austenitic stainless steel. In situ transmission electron microscopy has become an increasingly important and dynamic research area in materials science with the advent of unique microscope platforms and a range of specialized in situ specimen holders. In metals research, the ability to image and perform X-ray energy dispersive spectroscopy (XED) analyses of metals in liquids are particularly important for detailed study of the metal-environment interactions with specific microstructural features. To further facilitate such studies a special hybrid specimen preparation technique involving electropolishing and FIB extraction has been developed in this thesis to enable metal specimens to be examined in the liquid cell TEM specimen holder using both distilled H2O and H2SO4 solutions. Furthermore, a novel electrode configuration has been designed to permit the localized electrochemical measurement of electron-transparent specimens in the TEM. These novel approaches have been benchmarked by extensive ex situ experiments, including both conventional electrochemical measurements and microcell measurements. The results are discussed in terms of validation of in situ test data as well as the role of the electron beam in the experiments. In situ liquid cell TEM experiments have also explored the localized dissolution of MnS inclusions in H2O, and correlated the behaviour with ex situ experiments. Based on the research performed in this thesis, in situ liquid cell and in situ electrochemical cell experiments can be used to study nanoscale reactions pertaining to corrosion and localized dissolution leading to "precursor" events for subsequent EAC phenomena.

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Ryan, Keith Patrick. „Rapid cryogenic fixation of biological specimens for electron microscopy“. Thesis, University of Plymouth, 1991. http://hdl.handle.net/10026.1/2504.

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This thesis describes investigations into cryofixation by the plunge-cooling technique, at ambient pressure. The objective was to characterise coolants which are commonly used for cryofixation, so that the structure and chemistry of biological specimens may be preserved in a more life-like state. The work began with the design of a suitable cooling device. This was developed further into a large test-bed apparatus which was used in both biological and methodological experiments. The large cooling apparatus demonstrated for the first time that ethane was a superior coolant under forced convection, compared to propane or Freon 22, for bare thermocouples, for exposed hydrated specimens and for metal-sandwiched hydrated specimens. Ice crystal formation was monitored in sandwiched specimens and found to correspond closely to modelling predictions. A biological application was the X-ray microanalysis of body fluids in "indicator" species of Chaetognaths, where results obtained from cryoscanning electron microscopy revealed ecophysiological differences. The use of low thermal mass supports demonstrated that good freezing can occur in the centre of specimens. A new cryomounting method was developed to load well-frozen specimens into the microscope. The effect of post-freeze processing temperature was investigated by monitoring ice crystals in red blood cells. Exposure to 213 K (-60°C) over a 48 hour period did not induce crystal growth and exposure to 233 K (-40°C) for 8 days showed minimal ice crystal damage. The progress of cryosubstitution was monitored over 48 h at 193 K ( -80°C), this showed that uranium ingressed to a depth of 320 µm which could be doubled when shrinkage was allowed for. The conclusion was that observed ice crystal damage originated during the initial freezing and not during subsequent cryoprocessing.

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Waterbury, Raymond. „The electron microscopy proteomic organellar preparation robot /“. Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=102768.

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An Electron Microscopy Proteomic Organellar Preparation (EMPOP) robot was developed as a tool for high-throughput preparation of subcellular fraction samples for electron microscopic identification. It will provide a means for validation of subcellular sample purity and confirmation of protein localization needed for organellar proteomics.
The device automates all chemical and mechanical manipulations required to prepare organelles for electron microscopic examination. It has a modular, integrated design that supports automated filtration, chemical processing, delivery and embedding of up to 96 subcellular fraction samples in parallel. Subcellular fraction specimens are extremely fragile. Consequently, the system was designed as a single unit to minimize mechanical stress on the samples by integrating a core mechanism, composed of four modular plates, and seven support subsystems for: (1) cooling, (2-3) fluid handling, (4-7) positioning. Furthermore, control software was developed specifically for the system to provide standardized, reproducible sample processing while maintaining flexibility for adjustment and recall of operational parameters.
Development of the automated process progressed from initial validation experiments and process screening to define operational parameters for preservation of sample integrity and establish a basic starting point for successful sample preparation. A series of successive modifications to seal the local environment of the samples and minimize the effect of fluidic perturbations further increased process performance. Subsequent testing of the robot's full sample preparation capacity used these refinements to generate 96 samples in approximately 16 hours; reducing the time and labor requirement of equivalent manual preparation by up to 1,000 fold.
These results provide a basis for a structured approach toward process optimization and subsequent utilization the device for massive, parallel preparation of subcellular fraction samples for electron microscopic screening and quantitative analysis of subcellular and protein targets necessary for high-throughput proteomics.

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Frangakis, Achilleas S. „Noise reduction and segmentation techniques developed for multidimensional electron microscopy of biological specimens“. [S.l. : s.n.], 2001. http://deposit.ddb.de/cgi-bin/dokserv?idn=962126888.

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Punwani, Karishma. „Automated control of the electron microscopy proteomic organellar preparation robot“. Thesis, McGill University, 2005. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=99011.

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Electron microscopy (EM) is an important tool in organellar proteomics, where it is used to validate sample purity and to confirm protein presence. Current sample preparation techniques are manual, labor-intensive and time-consuming. To overcome these problems, an electron microscopy proteomic organellar preparation (EMPOP) robot is being developed for parallel preparation of up to 96 subcellular fraction samples in an efficient, repeatable and standardized manner. This thesis describes the development and validation of the software that controls the EMPOP robot. The software was organized in two coordinated levels consisting of a: (1) human-machine interface (HMI), and (2) low-level real-time control routines. The HMI was designed to be 'friendly and flexible', and to enable the operator to modify system parameters on-the-fly. Contrarily, the low-level control routines are responsible for controlling all EMPOP system processes. Pilot studies using the EMPOP system prove that the robot and software function predictably and consistently to generate high quality subcellular sample fractions.

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Knappett, Benjamin Richard. „Preparation of core@shell magnetic nanoparticles and their characterisation by electron microscopy“. Thesis, University of Cambridge, 2015. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.709096.

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Harvey, Tyler. „Electron Orbital Angular Momentum| Preparation, Application and Measurement“. Thesis, University of Oregon, 2017. http://pqdtopen.proquest.com/#viewpdf?dispub=10599464.

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The electron microscope is an ideal tool to prepare an electron into a specified quantum state, entangle that state with states in a specimen of interest, and measure the electron final state to indirectly gain information about the specimen. There currently exist excellent technologies to prepare both momentum eigenstates (transmission electron microscopy) and position eigenstates (scanning transmission electron microscopy) in a narrow band of energy eigenstates. Similarly, measurement of the momentum and position final states is straightforward with post-specimen lenses and pixelated detectors. Measurement of final energy eigenstates is possible with magnetic electron energy loss spectrometers. In 2010 and 2011, several groups independently showed that it was straightforward to prepare electrons into orbital angular momentum eigenstates. This disseratation represents my contributions to the toolset we have to control these eigenstates: preparation, application (interaction with specimen states), and measurement. My collaborators and I showed that phase diffraction gratings efficiently produce electron orbital angular momentum eigenstates; that control of orbital angular momentum can be used to probe chirality and local magnetic fields; and that there are several routes toward efficient measurement.

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Tipping, Claudia, of Western Sydney Hawkesbury University, of Science Technology and Agriculture Faculty und School of Horticulture. „Morphological and structural investigations into C3 C4 and C3/C4 members of the genus Panicum grown under elevated CO2 concentrations“. THESIS_FSTA_HOR_Tipping_C.xml, 1996. http://handle.uws.edu.au:8081/1959.7/329.

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Three perennial tropical Panicum species were grown under ambient and elevated (900 ppm) carbon dioxide concentrations in especially designed microclimate chambers. The study aimed to investigate the influence of high carbon dioxide concentrations on morphology/anatomy with physiological change among three closely related species possessing distinctly different photosynthetic pathways. The anatomy of the leaf was investigated using light microscopy (LM), transmission electron microscopy (TEM), and graphics image analysis. A suitable schedule for fixation, dehydration and embedding of leaf specimens for both forms of microscopy was developed. The anatomy of the species investigated did not change qualitatively, but there were detectable changes in leaf thickness and tissue proportions of the epidermis, mesophyll and thickened tissues (sclerenchyma, bundle sheath, vascular elements) that differed with species. This study is also relevant to the investigation of the evolution of C4, although species, and the progression involved in plants with characteristics intermediate between those of C3 and C4 species. These intermediate species have been mainly characterized by CO2 exchange and biochemical analysis, but they also display anatomical characteristics in between those of C3 and C4 plants. The evolutionary progression of the C3 to C4 species remains unsolved, although current studies indicate that the evolutionary step was from the C3 plant to the C4. Thus the intermediate C3/C4 plants may not be intermediate in an evolutionary sense and they could be seen as a simple hybridization between a C3 plant and C4 plant. In most of the parameters measured the C3/C4 P. decipiens resembled either the C3 P. tricanthum or the C4 P. antidotale. It may therefore be likened to a physiological chimera rather than to a true intermediate form
Doctor of Philosophy (PhD)

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Hrubanová, Kamila. „Scanning Electron Microscopy and its Applications for Sensitive Samples“. Doctoral thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2019. http://www.nusl.cz/ntk/nusl-409082.

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Předložená dizertační práce s názvem “Rastrovací elektronová mikroskopie a její aplikace pro senzitivní vzorky” pojednává o problematice rastrovací elektronové mikroskopie v kontextu instrumentálního a metodologického vývoje vedoucího k inovativnímu řešení, které je dobře aplikovatelné zejména v mikrobiologickém výzkumu. Součástí práce je rozprava o historii a současném stavu elektronové mikroskopie (EM) jakožto vědecké zobrazovací a analytické techniky, tato část se nachází v úvodních kapitolách. Nepopiratelný přínos EM v biologických a lékařských oborech je dokazován mnoha citovanými vědeckými publikacemi. Předložená dizertační práce přináší novinky z oblasti přípravy preparátů a kryogenní rastrovací elektronové mikroskopie (cryo-SEM) vyvinuté na pracovišti Ústavu přístrojové techniky AV ČR, v.v.i. v Brně. Jedná se především o návrhy a výrobu speciálních držáků vzorků a vývoj nových metodik v oblasti přípravy mikrobiologických preparátů vedoucích k nalezení optimálních parametrů jednotlivých procesů. V experimentální části se nachází ověření metodologických postupů při studiu hydratovaných a na elektronový svazek senzitivních preparátů. Následné srovnání různých přístupů na definovaném biologickém systému z oblasti mikrobiologie přispívá k rozšíření interpretace doposud známých výsledků. Mezi zkoumanými mikrobiologickými kmeny byly biofilm-pozitivní bakterie Staphylococcus epidermidis a kvasinky jako Candida albicans a Candida parapsilosis, jež jsou považovány za klinicky významné, protože se podílejí na vzniku závažných infekcí zejména u imunokompromitovaných pacientů. Dále byl studován vliv růstu biofilmu bakterie Bacillus subtilis na biodeteriorizaci a biodegradaci poly--kaprolaktonových fólií. Vývoj v oblasti cryo-SEM byl aplikován ve výzkumu mikrobů s biotechnologickým potenciálem, jako jsou např. Cupriavidus necator a Sporobolomyces shibatanus.

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Bücher zum Thema "Electron microscopy specimens preparation"

R, Lewis P., Hrsg. Biological specimen preparation for transmission electron microscopy. Princeton, N.J: Princeton University Press, 1998.

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J, Goodhew Peter, Hrsg. Thin foil preparation for electron microscopy. Amsterdam: Elsevier, 1985.

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Ayache, Jeanne. Sample preparation handbook for transmission electron microscopy: Techniques. New York: Springer, 2010.

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service), ScienceDirect (Online, Hrsg. Electron microscopy of model systems. Amsterdam: Academic Press/Elsevier, 2010.

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Pfefferkorn Conference (14th 1995 Belleville, IL). The science of biological specimen preparation for microscopy: Proceedings of the 14th Pfefferkorn Conference, held August 6-11, 1995 at the Shrine of Our Lady of the Snows, Belleville, IL. Herausgegeben von Malecki M und Roomans Godfried M. Chicago, IL: Scanning Microscopy International, 1996.

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Robinson, David G., Ulrich Ehlers, Rainer Herken, Bernd Herrmann, Frank Mayer und Friedrich-Wilhelm Schürmann. Methods of Preparation for Electron Microscopy. Berlin, Heidelberg: Springer Berlin Heidelberg, 1987. http://dx.doi.org/10.1007/978-3-642-48848-1.

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Ayache, Jeanne, Luc Beaunier, Jacqueline Boumendil, Gabrielle Ehret und Danièle Laub. Sample Preparation Handbook for Transmission Electron Microscopy. New York, NY: Springer New York, 2010. http://dx.doi.org/10.1007/978-1-4419-5975-1.

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Ayache, Jeanne. Sample preparation handbook for transmission electron microscopy: Methodology. New York: Springer, 2010.

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Zabal, Monique M. Preparation of nucleosome core particles for electron microscopy. Ottawa: National Library of Canada, 1990.

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Buchteile zum Thema "Electron microscopy specimens preparation"

Williams, David B., und C. Barry Carter. „Specimen Preparation“. In Transmission Electron Microscopy, 173–93. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-76501-3_10.

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Williams, David B., und C. Barry Carter. „Specimen Preparation“. In Transmission Electron Microscopy, 155–73. Boston, MA: Springer US, 1996. http://dx.doi.org/10.1007/978-1-4757-2519-3_10.

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Dykstra, Michael J., und Laura E. Reuss. „Specimen Preparation for Electron Microscopy“. In Biological Electron Microscopy, 1–73. Boston, MA: Springer US, 2003. http://dx.doi.org/10.1007/978-1-4419-9244-4_1.

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Brodusch, Nicolas, Hendrix Demers und Raynald Gauvin. „Advanced Specimen Preparation“. In Field Emission Scanning Electron Microscopy, 115–28. Singapore: Springer Singapore, 2017. http://dx.doi.org/10.1007/978-981-10-4433-5_10.

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Dykstra, Michael J. „Specimen Preparation for Transmission Electron Microscopy“. In Biological Electron Microscopy, 5–78. Boston, MA: Springer US, 1992. http://dx.doi.org/10.1007/978-1-4684-0010-6_2.

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Tighe, N. J., J. R. Fryer und H. M. Flower. „Preparation of specimens for electron diffraction and electron microscopy“. In International Tables for Crystallography, 171–76. Chester, England: International Union of Crystallography, 2006. http://dx.doi.org/10.1107/97809553602060000589.

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Giddings, Thomas H., und George P. Wray. „Preparation of Freeze-Dried Specimens for Electron Microscopy“. In Ultrastructure Techniques for Microorganisms, 241–65. Boston, MA: Springer US, 1986. http://dx.doi.org/10.1007/978-1-4684-5119-1_9.

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Rong, Yonghua. „Specimen Preparation“. In Characterization of Microstructures by Analytical Electron Microscopy (AEM), 37–66. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-20119-6_2.

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Bozzola, John J. „Conventional Specimen Preparation Techniques for Scanning Electron Microscopy of Biological Specimens“. In Methods in Molecular Biology, 133–50. Totowa, NJ: Humana Press, 2013. http://dx.doi.org/10.1007/978-1-62703-776-1_7.

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Bozzola, John J. „Conventional Specimen Preparation Techniques for Scanning Electron Microscopy of Biological Specimens“. In Methods in Molecular Biology, 449–66. Totowa, NJ: Humana Press, 2007. http://dx.doi.org/10.1007/978-1-59745-294-6_22.

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Konferenzberichte zum Thema "Electron microscopy specimens preparation"

Thompson, Zachary J., Kevin L. Johnson, Nicolas Overby, Jessica I. Chidi, William K. Pryor und Marcia K. O’Malley. „A Fully Automated System for the Preparation of Samples for Cryo-Electron Microscopy“. In ASME 2010 Dynamic Systems and Control Conference. ASMEDC, 2010. http://dx.doi.org/10.1115/dscc2010-4272.

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The preparation of specimens for cryo-electron microscopy is currently a labor and time intensive process, and the quality of resulting samples is highly dependent on both environmental and procedural factors. Specimens must be applied to sample grids in a high-humidity environment, frozen in liquid ethane, and stored in liquid nitrogen. The combination of cryogenic temperatures and humidity-control mandates the segregation of the humidity-controlled environment from the cryogenic environment. Several devices which automate portions of the specimen preparation process are currently in use; however, these systems still require significant human interaction in order to create viable samples. This paper describes a fully automated system for specimen preparation. The resulting system removes the need for human input during specimen preparation, improves process control, and provides similar levels of environmental control. Early testing shows that the resulting system is capable of manipulating samples in an autonomous manner while providing performance similar to existing systems.

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Kaplan, Wayne D., Kim Kisslinger, Ron Oviedo, Efrat M. Raz und Colin Smith. „Automatic TEM Sample Preparation“. In ISTFA 1999. ASM International, 1999. http://dx.doi.org/10.31399/asm.cp.istfa1999p0103.

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Abstract The rising demand in the semiconductor industry for higher spatial resolution in the analysis of device defects has focused attention on the use of transmission electron microscopy (TEM). However, conventional TEM sample preparation may be difficult and time-consuming, and depending on the operator may result in a low yield of quality specimens. One solution to this problem is the use of focused ion beam (FIB) milling for the final stage of TEM sample preparation. However, specimens have to be mechanically thinned prior to FIB processing, and the need to characterize specific devices requires a pre-FIB preparation method to isolate specific regions on the wafer. An innovative and automated solution that isolates specific devices and prepares TEM specimens for subsequent thinning by FIB has been developed. Based on controlled microcleaving technology, the system automatically performs the pre-FIB preparation in less than 30 minutes. An important added benefit is that the target area to be analyzed can be positioned at a specific distance from the sample edge, thereby facilitating the final FIB milling stage. The thinned specimen is automatically packaged for subsequent FIB processing and TEM. Details of the method and examples showing TEM results from tungsten filled vias are presented.

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Bonifacio, C. S., P. Nowakowski, M. J. Campin, J. T. Harbaugh, M. Boccabella und P. E. Fischione. „Automated End-Point Detection and Targeted Ar+ Milling of Advanced Integrated Circuit FIB TEM Specimens“. In ISTFA 2017. ASM International, 2017. http://dx.doi.org/10.31399/asm.cp.istfa2017p0375.

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Abstract The sub-nanometer resolution that transmission electron microscopy (TEM) provides is critical to the development and fabrication of advanced integrated circuits. TEM specimens are usually prepared using the focused ion beam, which can cause gallium-induced artifacts and amorphization. This work presents the use of a concentrated argon ion beam for reproducible TEM specimen preparation using automatic milling termination and targeted ion milling of device features; the result is high-quality and electron-transparent specimens of less than 30 nm. Such work is relevant for semiconductor product development and failure analysis.

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Bonifacio, C. S., P. Nowakowski, M. J. Campin, M. L. Ray und P. E. Fischione. „Low Energy Ar Ion Milling of FIB TEM Specimens from 14 nm and Future FinFET Technologies“. In ISTFA 2018. ASM International, 2018. http://dx.doi.org/10.31399/asm.cp.istfa2018p0241.

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Abstract Transmission electron microscopy (TEM) specimens are typically prepared using the focused ion beam (FIB) due to its site specificity, and fast and accurate thinning capabilities. However, TEM and high-resolution TEM (HRTEM) analysis may be limited due to the resulting FIB-induced artifacts. This work identifies FIB artifacts and presents the use of argon ion milling for the removal of FIB-induced damage for reproducible TEM specimen preparation of current and future fin field effect transistor (FinFET) technologies. Subsequently, high-quality and electron-transparent TEM specimens of less than 20 nm are obtained.

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Hunt, C. A. „Comparison Precision XTEM Specimen Preparation Techniques for Semiconductor Failure Analysis“. In ISTFA 1997. ASM International, 1997. http://dx.doi.org/10.31399/asm.cp.istfa1997p0097.

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Abstract Transmission electron microscopy (TEM) is now commonly employed in semiconductor device quality control and failure analysis. Precision cross-section specimens (PXTEM) are often required - these are samples that isolate an extremely small volume such as a single failed transistor. PXTEM samples are among the most difficult TEM samples to prepare. It is important for laboratories that perform PXTEM to master a variety of techniques so that the issues of cost, quality, and risk can be properly balanced. This paper addresses these issues while explaining the most common methods of PXTEM preparation along with an illustrative case study.

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Liu, Chin Kai, Chi Jen. Chen, Jeh Yan.Chiou und David Su. „A Methodology to Reduce Ion Beam Induced Damage in TEM Specimens Prepared by FIB“. In ISTFA 2002. ASM International, 2002. http://dx.doi.org/10.31399/asm.cp.istfa2002p0313.

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Abstract Focused ion beam (FIB) has become a useful tool in the Integrated Circuit (IC) industry, It is playing an important role in Failure Analysis (FA), circuit repair and Transmission Electron Microscopy (TEM) specimen preparation. In particular, preparation of TEM samples using FIB has become popular within the last ten years [1]; the progress in this field is well documented. Given the usefulness of FIB, “Artifact” however is a very sensitive issue in TEM inspections. The ability to identify those artifacts in TEM analysis is an important as to understanding the significance of pictures In this paper, we will describe how to measure the damages introduced by FIB sample preparation and introduce a better way to prevent such kind of artifacts.

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Bender, H. J., und R. A. Donaton. „Focused Ion Beam Analysis of Low-K Dielectrics“. In ISTFA 2000. ASM International, 2000. http://dx.doi.org/10.31399/asm.cp.istfa2000p0397.

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Abstract The characteristics of an organic low-k dielectric during investigation by focused ion beam (FIB) are discussed for the different FIB application modes: cross-section imaging, specimen preparation for transmission electron microscopy, and via milling for device modification. It is shown that the material is more stable under the ion beam than under the electron beam in the scanning electron microscope (SEM) or in the transmission electron microscope (TEM). The milling of the material by H2O vapor assistance is strongly enhanced. Also by applying XeF2 etching an enhanced milling rate can be obtained so that both the polymer layer and the intermediate oxides can be etched in a single step.

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Chan, Lisa, Jon M. Hiller und Lucille A. Giannuzzi. „Ex-Situ Lift Out of Plasma Focused Ion Beam Prepared Site Specific Specimens“. In ISTFA 2014. ASM International, 2014. http://dx.doi.org/10.31399/asm.cp.istfa2014p0274.

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Abstract Ex situ lift out (EXLO) was historically the first lift out technique to be developed for site specific removal and manipulation of focused ion beam (FIB)-prepared specimens to a suitable carrier. In this paper, fast plasma FIB (PFIB) preparation of large scanning/transmission electron microscope specimens is combined with fast conventional EXLO and EXpressLO "pick and place" solutions. The combination of large material removal rates with PFIB and EXLO allows for efficiency and high throughput of FIB lift out specimens.

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Okihara, M., H. Tanaka, N. Hirashita, T. Nakamura, H. Okada, Y. Hijikata und K. Shimoda. „Pin-Point Transmission Electron Microscopic Analysis Applied to Off-Leakage Failures of a Bipolar Transistor in 0.5μm BiCMOS Devices“. In ISTFA 1996. ASM International, 1996. http://dx.doi.org/10.31399/asm.cp.istfa1996p0207.

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Abstract Pin-point (specific area) planar transmission electron microscopy (TEM) analysis has been improved to study process-induced defects in recent very large scale integrated (VLSI) devices. The specimens are prepared by a combination of marking failure sites with focused ion beam (FTB) equipment and planar TEM specimen preparation technique. This method provides not only planar observation of localized failures with an accurate observation with high positioning accuracy but also wide range of observable area which is feasible to carry out some application techniques associated with TEM. In particular, it is found to be a powerful method to identify the nature of crystalline defects which cause the failures. This work presents the detailed procedure and demonstrates its successful applicability via studying a leaky bipolar transistor in 0.5μm BiCMOS devices (one failure of more than 4500 transistors). The results clarify the presence of stacking faults, formed during epitaxial growth, between collector and emitter regions in the specific transistor with resistive collector-emitter leakage current.

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Lorut, Frédéric, Alexia Valéry, Nicolas Chevalier und Denis Mariolle. „FIB-Based Sample Preparation for Localized SCM and SSRM“. In ISTFA 2018. ASM International, 2018. http://dx.doi.org/10.31399/asm.cp.istfa2018p0209.

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Abstract Dopants imaging using scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy are used for identifying doped areas within a device, the latter being analyzed either in a top view or in a side view. This paper presents a sample preparation workflow based on focused ion beam (FIB) use. A discussion is then conducted to assess advantages of the method and factors to monitor vigilantly. Dealing with FIB machining, any sample preparation geometry can be achieved, as it is for transmission electron microscopy (TEM) sample preparation: cross-section, planar, or inverted TEM preparation. This may pave the way to novel SCM imaging opportunities. As FIB milling generates a parasitic gallium implanted layer, a mechanical polishing step is needed to clean the specimen prior to SCM imaging. Efforts can be conducted to reduce the thickness of this layer, by reducing the acceleration voltage of the incident gallium ions, to ease sample cleaning.

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Berichte der Organisationen zum Thema "Electron microscopy specimens preparation"

Scott, Keana C., und Lucille A. Giannuzzi. Strategies for transmission electron microscopy specimen preparation of polymer composites. National Institute of Standards and Technology, September 2015. http://dx.doi.org/10.6028/nist.sp.1200-16.

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Kestel, B. Polishing methods for metallic and ceramic transmission electron microscopy specimens: Revision 1. Office of Scientific and Technical Information (OSTI), März 1986. http://dx.doi.org/10.2172/5617234.

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Prabhakaran, Ramprashad, Vineet V. Joshi, Mark A. Rhodes, Alan L. Schemer-Kohrn, Anthony D. Guzman und Curt A. Lavender. U-10Mo Sample Preparation and Examination using Optical and Scanning Electron Microscopy. Office of Scientific and Technical Information (OSTI), März 2016. http://dx.doi.org/10.2172/1339911.

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Vladar, Andras E. Strategies for scanning electron microscopy sample preparation and characterization of multiwall carbon nanotube polymer composites. National Institute of Standards and Technology, Januar 2016. http://dx.doi.org/10.6028/nist.sp.1200-17.

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