Dissertationen zum Thema „Dry etch“
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Nilgianskul, Tan. „Control of a semiconductor dry etch process using variation and correlation analyses“. Thesis, Massachusetts Institute of Technology, 2016. http://hdl.handle.net/1721.1/107025.
Der volle Inhalt der QuelleThis electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 67-69).
Statistical process control (SPC) is one of the traditional quality control methods that, if correctly applied, can be effective to improve and maintain quality and yield in any manufacturing facility. The purpose of this project is to demonstrate how to effectively apply SPC to a dry etch process (in this case plasma ashing), at Analog Devices, Inc., a company that runs large-scale fabrication sites in the Boston area. This thesis focuses on spatial and run-to-run variation across multiple measurement sites on a wafer and validates the assumptions of normality and correlation between sites within a wafer in order to justify and confirm the value of employing SPC theories to the plasma ashing process. By plotting control charts on past data, outlier data points are detected using Analog's current monitoring system. Further, irregularities in the process that would not have been detected using traditional x-bar Shewhart charts are detected by monitoring non-uniformity. Finally, cost analysis suggests that implementing SPC would be a modest investment relative to the potential savings.
by Tan Nilgianskul.
M. Eng. in Manufacturing
Muthukrishnan, N. Moorthy. „Characterization and modeling of dry etch processes for titanium nitride and titanium films in Cl₂/N₂ and BCl₃ plasmas“. Diss., This resource online, 1996. http://scholar.lib.vt.edu/theses/available/etd-06062008-151045/.
Der volle Inhalt der QuelleCatala, Antoine. „Gravure Plasma du Nitrure de Gallium pour la réalisation de micro LEDs à hautes performances“. Electronic Thesis or Diss., Université Grenoble Alpes, 2024. http://www.theses.fr/2024GRALT041.
Der volle Inhalt der QuelleThrough the development of the internet of things and virtual and augmented reality, increase of microdisplay need appeared. Gallium Nitride (GaN) microLED (µLED) seem to be a promising solution thanks to its electro-optical properties like its wide direct band gap. Nevertheless, GaN µLED efficiency drop significantly when their size shrinks, due to damages induced by singularization process.This thesis aims to understand GaN damages apparition during the plasma etching process and then their reduction. To study mesas sidewall damage after the etching, a new experimental set up using cathodoluminescence has been developed. A standard process using Cl2/BCl3/Ar chemistry is studied to characterize GaN damages. Then through a dichotomy of the chemistry, chlorine turns out to be the main damaging species within the plasma, both on sidewall and bottom trench. Plasma parameters (density and ion bombardment energy) and the damaging effect of the hard mask material have been studied with a plasma chemistry reduced to chlorine only. Noting divergent results with the ones reported in the literature, a comparative study between plan c Ga and N polarities have been carried. This study highlight that N face GaN is mainly damaged by plasma chemical component (reactive species) while Ga face GaN is by plasma physical component (ion bombardment). An etching mechanism is finally proposed to explain those differences
Villa, Katherine. „The use of wet-to-dry dressings for mechanical debridement“. Honors in the Major Thesis, University of Central Florida, 2013. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/928.
Der volle Inhalt der QuelleB.S.N.
Bachelors
Nursing
Nursing
Hamlett, Anna. „Human trafficking : a modern day slavery“. Honors in the Major Thesis, University of Central Florida, 2009. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1270.
Der volle Inhalt der QuelleBachelors
Sciences
Political Science
Torres, Gabriella. „An exploratory study : romanticism in modern day men and women“. Honors in the Major Thesis, University of Central Florida, 2010. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1509.
Der volle Inhalt der QuelleBachelors
Sciences
Psychology
Miniello, Jonathan. „Missing the consequences misperceptions of the 1967 six-day israeli-arab war“. Honors in the Major Thesis, University of Central Florida, 2011. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/478.
Der volle Inhalt der QuelleB.S.
Bachelors
Sciences
Psychology
Ahmed, Shameem. „Day in and day out : women's experience in the family and the reconstruction of their secondary status“. Thesis, McGill University, 1991. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=59959.
Der volle Inhalt der QuelleGuijarro, de Ortiz Myriam. „Literacy Activities that Parents of Preschool Children Attending Day Care Promote at Home and Community Settings“. Honors in the Major Thesis, University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/760.
Der volle Inhalt der QuelleBachelors
Education
Exceptional Education
Alabed, Hadhom Mohamed. „The effects of fasting for a single day, and during Ramadan, upon performance“. Thesis, Liverpool John Moores University, 2010. http://researchonline.ljmu.ac.uk/5958/.
Der volle Inhalt der QuelleChiappero, Florent. „Du Collectif Etc aux « collectifs d'architectes » : une pratique matricielle du projet pour une implication citoyenne“. Thesis, Aix-Marseille, 2017. http://www.theses.fr/2017AIXM0428/document.
Der volle Inhalt der QuelleIn recent years, "architects’ collectives" have occupied a significant part of the media space. Do we even know who they are and what they do? These are the two main questions to which we have tried to answer. A research is based on opportunities, mine was to be the co-founder in 2009 of one of these groups, Collectif Etc. I have been one of his main fanimators, and all this research has been based on this group. The first part enabled us to highlight a network of practitioners that we call "architects’ collective ", groups formed mainly by architects, whose goal is to promote citizen involvement in the processes of transformation of the cities, in order to create self-managed situations. Their methods of intervention correspond to the combination of the practice of residence, the use of self-construction and the production of ephemeral architectures. In a second part, we were able to formulate the hypothesis that these groups developed an original model of project practice, based on the construction of three matrices, which we called mythogenic, constructive, and political. For each of them, a historico-theoretical research has enabled us to form more complete definitions, characterizing a matrix practice of the project, favoring the involvement of the citizen. And if this model was built from the practice of these particular groups, we believe that it might be relevant to all practitioners wishing to involve various actors in the city's making processes
Williams, Melonie. „The Effects of Blocked and Random Word Lists on the Production of False Memories“. Honors in the Major Thesis, University of Central Florida, 2007. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1196.
Der volle Inhalt der QuelleBachelors
Sciences
Psychology
Smith, Catherine D. „Productive matters : the DIY architecture manuals of Ant Farm and Paolo Soleri“. Thesis, Faculty of Architecture, Design and Planning, 2012. http://hdl.handle.net/2123/13503.
Der volle Inhalt der QuelleMulhern, Margaret. „Social Work Student Perceptions of Labor Trafficking“. Honors in the Major Thesis, University of Central Florida, 2014. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1632.
Der volle Inhalt der QuelleB.S.W.
Bachelors
Social Work
Health and Public Affairs
Special, Kenneth W. „Prototypical design for a proprietary childcare center located in Christiansburg, Virginia“. Thesis, This resource online, 1992. http://scholar.lib.vt.edu/theses/available/etd-09122009-040358/.
Der volle Inhalt der QuelleTitle on abstract: The design of a childcare center. Vita. Abstract. Includes bibliographical references (leaves 107-112). Also available via the Internet.
Collett, Donald C. „Prophetic intentionality and the Book of the Twelve : a study in the hermeneutics of prophecy“. Thesis, St Andrews, 2007. http://hdl.handle.net/10023/527.
Der volle Inhalt der QuelleKuenstel, Annegret. „Preaching about the Last judgment in the New Testament? : a hermeneutical approach to the portrayal of the Last Judgment in Luk 16:19-31 and Rev 20:11-15“. Thesis, Stellenbosch : Stellenbosch University, 2006. http://hdl.handle.net/10019.1/17451.
Der volle Inhalt der QuelleENGLISH ABSTRACT: This assignment deals with the question of whether and how it is possible to preach about texts on the last judgment in the New Testament under the premise of a merciful God. This question will be approached from a hermeneutical angle. Therefore the researcher will, after some introductory comments, deal with two different texts about the last judgment (Luk 16:19-31 and Rev 20:11-15) and investigate them exegetically. This will form a large part of the assignment. After the exegesis, a homiletical as well as a systematical reflection will be done on these specific biblical texts. Each of these chapters will conclude with a draft of a sermon on the texts, showing what a possible sermon on these texts may look like. In the last chapter, the researcher will summarize the approaches she used on her way from the biblical texts to the sermons. A general outline of different approaches depicting how a sermon on the last judgment in the New Testament can be done is followed. The researcher will come to the conclusion that it is possible to preach about the last judgment in the New Testament under the premise of a merciful God. She shows this in dealing with the biblical texts in exegetical and contextual, rhetorical and historical, theological and homiletical ways.
AFRIKAANSE OPSOMMING: Hierdie werkstuk handel oor die vraag of en inderdaad hoe dit moontlik is om te preek oor tekste wat handel oor die laaste oordeel in die Nuwe Testament vanuit die veronderstelling van ‘n genadige God. Hierdie vraag sal benader word vanuit ‘n hermeneutiese hoek. In hierdie verband sal die navorser, na ‘n paar inleidende opmerkings, handel met twee verskillende tekste oor die laaste oordeel nl. Luk 16:19-31 and Openbaring 20:11-15. Hierdie tekste sal eksegeties ondersoek word en dit sal ‘n groot deel uitmaak van hierdie werkstuk. Na die eksegese sal ‘n homiletiese sowel as ‘n sistematiese refleksie gedoen word oor hierdie spesifieke Bybeltekste. Elk van hierdie hoofstukke sal afgesluit word met ‘n preekontwerp van die teks wat sal dien as voorstel hoe ‘n moontlike preek oor die betrokke teks sal kan lyk. Binne die laaste hoofstuk sal die navorser ‘n opsomming maak van al die benaderings deur haar gebruik op haar weg vanaf die Bybelse tekste na die preke. ‘n Algemene raamwerk van die verskillende benaderings wat voorstel hoe ‘n preek oor die laaste oordeel in die Nuwe Testament gedoen kan word sal hierop volg. Die navorser sal dan tot die gevolgtrekking kom dat dit wel moontlik is om oor die laaste oordeel in die Nuwe Testament te preek vanuit die veronderstelling van ‘n genadige God. Dit dui sy aan deur op ‘n eksegetiese en kontekstuele, ‘n retoriese en historiese, en op ‘n teologiese en homiletiese wyse te handel met die Bybeltekste.
McPherson, Maleah Lynne. „Instructor field manual for Camp Highland Outdoor Science School“. CSUSB ScholarWorks, 2005. https://scholarworks.lib.csusb.edu/etd-project/2818.
Der volle Inhalt der QuelleRocha, Patrícia de Brito. „A sintaxe no e do discurso político brasileiro: os proferimentos do Dia do Trabalho em Dilma Rousseff : a direita na esquerda ou a esquerda na direita?“ Universidade Federal de Uberlândia, 2016. https://repositorio.ufu.br/handle/123456789/18030.
Der volle Inhalt der QuelleOn this thesis, we’ve gotten Dilma Rousseff’s utterances from The Labor Day on her first term, establishing the discourse as a theoretical object, considering our theoretical bonding with the French pechetiana Discourse Analysis, and the syntax implied by the speech of the first woman President in Brazil’s history as the study object. In order to study the syntax implied by this speech, we selected, specifically, the accessory terms named by the Normative Grammar, which are: the adjuncts and the appositive, since it’s disclosed that the political speech would be a speech with no sense, so that, if this reality is fulfilled, the performance of the accessory terms wouldn’t be more than a contingent adding on the production of the analyzed speech. Nevertheless, we’ve taken as hypothesis the fact of the syntax has got the essential articulation mechanism that allow us understand the discursive processes, constituting, then, the point in which the discursive process develops from spiral movements. On this way, the sequence concept, from the theoretical perspective chosen, gets other concepts: it configures as a spiral extension, not being, so, from the linearity order, as it is in the linguistic perspective. In consequence of that, it’s opened the possibility of working with reading paths, as it was proposed in the analyses process of the utterances. From our target, then, the adjuncts and the appositive are understood as linguistic-syntactic mechanisms considered as belonging to the language order and, in consequence of that, they can’t be considered dispensable, whereas they cause sense effects along with the other discourse units, in view of the spiral promoted by the effect-reader. Therefore we’ve stopped just looking at the usage of the language and we’ve put our attention on the items of sense production, trying to (re)cognize the articulation between the interdiscourse and the intradiscourse in the discursive process, specifically in the presidential utterances of the Labor Day from 2011 to 2014. Thereunto, our thesis shows, in the introduction, the theoretical and methodological markings from this study. On chapters that talk about theoretical reference, at first we were concerned with delineating the differences between the linguistic of the discourse from the Linguistic; then, the concern is to deal with the linguistic of the discourse and the syntax related to the discursive; and, finally, work with some particularities of the presidential speech. On the following chapter, we’ve undertaken the analytical movements, considering the four utterances of the Labor Day crossed by the neoliberal capitalist speech. In the conclusion, we’ve produced a reflection about the wordsconcept of language, grammar, syntax, discourse, subject and teaching.
Tese (Doutorado)
Oliveira, Filipa Isabel Lopes de. „Nanoinfiltração na variação do protocolo de sistemas adesivos etch & dry e etch & rinse“. Master's thesis, 2014. http://hdl.handle.net/10451/25466.
Der volle Inhalt der QuelleObjetivos: Avaliar, através de um estudo in vitro, os padrões de nanoinfiltração existentes em dois sistemas adesivos e suas variações do protocolo, observadas ao microscópio electrónico de varrimento (MEV). Tipo de estudo: Estudo in vitro. Materiais e Métodos: A amostra deste estudo consistiu em 12 dentes molares humanos livres de cárie (N=12). Foram preparados 12 espécimes abrangendo a dentina média e divididos aleatoriamente por 6 grupos (n=2). Aplicaram-se 2 sistemas adesivos diferentes: ClearfilTM SE Bond (Kuraray), ScotchbondTM Universal (3M ESPE), tendo sido todos os espécimes restaurados com o compósito FiltekTM Buk Fill (3M ESPE). O sistema adesivo Scotchbond Universal foi aplicado em modo etch and dry (grupo SBUED) e etch and rinse (grupo SBUER) segundo as instruções do fabricante e com variações do protocolo quando a este foi adicionado o adesivo Scotchbond Multipropose (3M ESPE) quer em modo etch and dry (grupo SAED) e etch and rinse (grupo SAER). O sistema adesivo Clearfil SE Bond foi aplicado em modo etch and dry segundo as instruções do fabricante (grupo CSED) e com variações no protocolo em modo etch and rinse (grupo CSER). Os espécimes foram impregnados com nitrato de prata amoniacal (50% wt; pH=9,5) durante 24h e na solução reveladora durante 8h sob luz fluorescente. A penetração de nitrato de prata amoniacal na interface adesiva foi observada ao microscópio electrónico de varrimento com detector de eletrões retrofundidos com uma acelaração de voltagem 15 Kv. Resultados: A presença, o padrão e a extensão da nanoinfiltração variam consoante os sistemas e estratégia adesiva usadas. O sistema adesivo SBU obteve a menor quantidade de nanoinfiltração nos grupos SAED e SAER e maiores no grupo SBUER. A menor quantidade de nanoinfiltração foi obtida no grupo CSED, dentro dos seis grupos testados. Conclusões: A performance dos adesivos testados demonstrou ser dependente da estratégia adesiva usada. O adesivo de dois passos CSE parece providenciar um melhor selamento quando aplicado em modo etch and dry e o mesmo parece acontecer no adesivo universal de um passo SBU.
Purpose: Evaluate through a in vitro study, the nanoleakage patterns existing in two bonding systems and their variations of the protocol, observed under the scanning electron microscope (SEM). Study Design: In vitro study Materials and Methods: The sample for this study consisted of 12 human molar teeth caries free (N=12). 12 specimens were prepared covering the deep dentin and randomly divided into 6 groups (n=2). We applied two different adhesive systems: ClearfilTM SE Bond (Kurary), ScotchbondTM Universal (3M ESPE), all specimens were restored with composite FiltekTM Buk Fill (3M ESPE). The adhesive system Scotchbond Universal was applied in etch and dry (group SBUED) and etch and rinse (SBUER) mode according to the manufacturer`s instructions and with variations of the protocolo when was added the adhesive Scotchbond Multipropose both in etch and dry (group SAED) and etch and rinse (SAER) mode. The adhesive system Clearfil SE Bond, was applied in etch and dry mode according to the manufacturer`s instructions (group CSED) and with variations in the protocolo in etch and rinse mode (group CSER). The specimens were impregnated with amoniacal silver nitrate (50% wt; pH=9,5) during 24h and in the developing solution during 8h under fluorescent light. The amoniacal silver nitrate penetration was observed under scanning electron microscope with backscattered in 15Kv acceleration voltage. Results: The presence, pattern and extension of nanoleakage varie depending on the adhesives systems and the strategys used. The adhesive system SBU showed the lowest amount of nanoleakage in SAED and SAER groups and incresead in the SBUER group. The lowest amount of nanoleakage was obtained in group CSED, within the six tested groups. Conclusions: The performance of the adhesives tested proved to be dependente on the adhesive strategy used. The two-step adhesive CSE seems to provide a better seal when applied in etch and dry mode and the same seems to happen in the one step universal adhesive SBU.
劉嘉群. „Investigation of Defects Induced by Plasma Dry Etch Processes“. Thesis, 2016. http://ndltd.ncl.edu.tw/handle/4yx56g.
Der volle Inhalt der QuelleYang, SHIH-FENG, und 楊世豐. „TFT LCD Dry etcher process chemical type Side etch study“. Thesis, 2014. http://ndltd.ncl.edu.tw/handle/19184604902928332763.
Der volle Inhalt der Quelle國立交通大學
平面顯示技術碩士學位學程
102
During TFT-LCD array process, etching plays a crucial role of creating designed circuits and patterns. By applying chemical or physical process etching can remove certain parts of the deposit film which are not protected by the photo resist. Therefore it can transfer specific patterns from the photo mask to the deposit film (usually thousands of Å) on the glass. The transferred circuit and patterns are important components in the TFT-LCD manufacturing process. Currently there are two types of etching techniques in TFT LCD etching process, Wet and Dry Etching. The former applies chemical agent while the later takes the physical reaction approach (via plasma); In practice one can fine tune some parameters to change dry etching to behave like chemical type. Conventional results show Wet etching is superior in terms of factory throughput. However its isotropic etching by chemical agent may cause undercut issue, which makes line width hard to control. To the contrary although Dry Etching has lower throughput that is introduced by vacuuming process. Its anisotropic property makes it a great method when line width quality is a top priority. The focus of this dissertation is on Dry Etching. We will show by fine tuning some dry etching parameters to make it similar to wet etching, one can achieve the benefit of both wet and dry etching, i.e. higher throughput and better line width control (less occurrence of defects). This paper applied the methodology of Evidence Act and Taguchi experimental method to research the genuine parameters that make Dry Etching process act similar to the wet one. We filtered the candidate parameters and searched for the optimized parameter set in the experiments. We hope the study results can improve existing dry etching process recipe and eventually this new concept can be introduced in the mass-production manufacturing process.
Chen, Ta-Chin, und 陳達欽. „A Service Strategy for Taiwan’s Industry of the Dry Etch Equipment“. Thesis, 2009. http://ndltd.ncl.edu.tw/handle/47733467466708779810.
Der volle Inhalt der Quelle國立交通大學
管理學院高階主管管理碩士學程
97
This thesis reports on a strategic analysis of the Dry Etch Equipment Industry of Taiwan. Particularly, a service framework of Innovation Intensive Services (IIS) is used to assess the future strategy for the Industry. The IIS framework contains a matrix structure with 4 service segment and 5 innovation modes, allowing the portrait the present and future strategic positions of the Industry, within which the required core competencies and externalities are identified. The methods for this study include literature review, interview and general survey of expert and statistics analysis. Based on the research results, we have found thatthe current business model for the suppliers is Product innovation and Restricted service, within which core competence rests in Design Service and Marketing with required externalities of Complementary Assets Supplier, R&D/Science, Technology, Production, Servicing and Other Users . The future positioning moves toward target Market innovation and Selective service . with core competence in Marketing and After Service, and the required externalities in Servicing , Market and Other Users .
蘇天佑. „Development of a High-Density-Plasma System for Dry Etch Applications“. Thesis, 2002. http://ndltd.ncl.edu.tw/handle/41482985169509690246.
Der volle Inhalt der QuellePeneque, Carolina Martins Santos. „Teste de microtração em esmalte de um sistema adesivo universal pela técnica etch-and-rinse e etch-and-dry“. Master's thesis, 2014. http://hdl.handle.net/10451/25416.
Der volle Inhalt der QuelleObjetivo: Recorrendo ao teste de microtração, avaliar e comparar as forças adesivas em esmalte cortado de um sistema adesivo universal (Scotchbond Universal Adhesive, 3M ESPE, St. Paul, MN, USA) usado segundo as instruções do fabricante, nos modos etch-and-rinse e etch-and-dry. A hipótese nula testada é a de que não existem diferenças estatisticamente significativas nas forças de adesão ao esmalte cortado entre as duas estratégias de adesão propostas pelo fabricante para o mesmo adesivo universal. Materiais e Métodos: Foi usada uma amostra de oito terceiros molares humanos. Cortaram-se as superfícies coronárias no sentido mesio-distal, de forma a obter dois segmentos de coroa por dente. Os dentes foram aleatoriamente distribuídos por um dos grupos de teste, de acordo com a estratégia de adesão: SBU aplicado como self-etch de um passo (SBU SE); SBU aplicado como etch-and-rinse de dois passos (SBU TE). Nos segmentos de coroa do grupo SBU TE foi realizado condicionamento com ácido ortofosfórico a 32% (Scotchbond Universal Etchant, 3M ESPE, St Paul, MN), durante 15 segundos. Foram aplicados incrementos de compósito sobre as superfícies dentárias preparadas, até perfazer uma altura de aproximadamente 6 mm. Após 24h numa estufa de incubação a 37º, os dentes foram seccionados de forma a obter palitos com uma área de aproximadamente 1 mm2. Os palitos foram submetidos a uma força de tração, a uma velocidade de 1 mm/minuto. A análise estatística foi realizada com o teste t para amostras independentes. Resultados: As forças médias de resistência à microtração (em MPa) e desvios padrão em cada grupo foram: SBU TE = 22,8 (12,3); SBU SE = 14,3 (6,7). Verificaram-se diferenças estatisticamente significativas entre os grupos (p = 0,000). Conclusões: A hipótese nula foi rejeitada. O condicionamento ácido da superfície do esmalte cortado aumentou significativamente as forças de adesão produzidas pelo sistema adesivo Scotchbond Universal Adhesive.
Objective: To evaluate microtensile bond strength (μTBS) to bur cut enamel of a new universal adhesive (SBU Scotchbond Universal Adhesive, 3M ESPE, St Paul, MN) used according to the manufacturers’ instructions, in the etch-and-rinse and etch-and-dry modes. The null hypothesis tested was that there were no differences in enamel microtensile bond strengths (μTBS) among these two different adhesion strategies. Materials and Methods: Eight human third molars were sectioned to obtain two enamel fragments. The enamel surfaces were roughened with a diamond bur in a standardized procedure. Teeth were randomly assigned to two groups, according to the adhesive strategy: SBU applied as one-step self-etch adhesive (SBU SE); SBU applied as two-step etch-and-rinse adhesive (SBU TE). The etched specimens were previously conditioned with 32% phosphoric acid (Scotchbond Universal Etchant, 3M ESPE, St Paul, MN), for 15 seconds. Composite resin blocks (ENAMEL plus HRi, Micerium S.p.A. Avegno GE Italy) of approximately 6 mm were then incrementally built up over the prepared tooth substrate. After 24h of water storage (37º), the bonded specimens were sectioned into beams with a cross sectional area of 1 mm2 and tested under tension (1 mm/min). The data were analyzed with an independent-sample t test, when the assumption of normality was valid. Results: The μTBS (MPa) and standard deviations were: SBU TE = 22,8 (12,3); SBU SE = 14,3 (6,7). These values were statistically significantly different. Conclusions: The null hypothesis was rejected. Preliminary etching of enamel significantly increased bond strength for the universal adhesive Scotchbond Universal Adhesive
Liu, Ji-Feng, und 劉吉峰. „Studies on Dry Etch of Low Dielectric Constant Nanoporous Silica Thin Films“. Thesis, 2006. http://ndltd.ncl.edu.tw/handle/37393144934146257011.
Der volle Inhalt der Quelle國立交通大學
材料科學與工程系所
94
Due to the rapid increase in transistor density and the operation speed of an IC chip, the ultralarge-scale integrated circuit (ULSI) has an urgent demand for scaling down the device size, and thus the dimension of the interconnect accordingly. Consequently, the performance of the chip is no longer solely limited by the operation speed of the transistors, but also depends on the speed of the signal propagating through the interconnect. As the line width of the metal interconnect reduces, the performance of an IC chip can be degraded by interconnect RC delay and power consumption. In order to alleviate the problems, low dielectric constant (k) materials are used to replace the conventional intermetal dielectric (IMD), SiO2. In this thesis, low-k nanoporous silica dielectrics used as the IMD material for ULSI applications is reported. Because of the high porosity, implementation of the nanoporous silica in the IC process will result in many integration problems, such as water uptake on the pore surface, impurity permeation thorough the pores, mechanical deficiency, etc. In this work, we propose a post-etch pore formation method to mitigate impurity diffusion in the nanoporous dielectric during the etch process and improve hydrophobicity of the low-k dielectric. Instead of conventional way to remove the organic template from the silica matrix by calcination before IMD pattering, nanopores of the low-k silica dielectric are formed in-situ as the photoresist is stripped by ozone ashing after the reactive-ion-etch process. In the study, we compared the etch characteristics of HMDS treated nanoporous silica thin film with pristine nanoporous thin film. We found little difference in surface morphology and microstructure between the two nanoporous thin films after reactive-ion etch. But the etch rate was significantly affected by the amount of carbon present in the silica matrix. This can be explained in terms of the dependence of the etch rate on the fluorine/carbon (F/C) ratio. The etch rate of the nanoporous silica thin film increases with the F/C ratio, plasma power and bias. For the post-etch pore formation process, the etch rate of the organic surfactant templated silica thin film was found to be comparable to that of a dense silica thin film.
Fernandes, Sara Palmares. „In vitro microtensile bond strength of a universal adhesive system to dentin using etch-and-rinse and etch-and-dry technique“. Master's thesis, 2014. http://hdl.handle.net/10451/25493.
Der volle Inhalt der QuelleObjectives: The purpose of the present study is to compare the immediate microtensile bond strengths (μTBS) of one universal adhesive applied to dentine according to the etch-and-rinse and the self-etch technique. The null hypothesis tested was that the bonding effectiveness to dentin was not affected when the adhesive was applied either following an etch-and-rinse or etch-and-dry technique. Methods: Six recently extracted human third molars, intact and without macroscopic evidence of caries or restorations, were assigned to two groups according to the etching strategy: Group SBU TE D – Scotchbond Universal Adhesive (3M ESPE) applied as a 2-step etch-and-rinse adhesive on moist dentin; Group SBU SE D - Scotchbond Universal Adhesive applied as a 1-step self-etch adhesive on dentin. After resin composite build-ups were performed, the teeth were stored in distilled water in an incubator for 24 hours at 37°C. Specimens were sectioned with a slow-speed diamond saw under water irrigation to obtain bonded sticks that were tested to failure in a universal testing machine at a crosshead speed of 1mm/minute. The statistical analysis of the results was performed with SPSS. A paired-sample t-test was performed when the assumption of normality was valid. Results: The mean μTBS to dentin of the Scotchbond Universal Adhesive applied following the etch-and-dry approach (SBU SE D) was statistically higher than that when the SBU was applied following the etch-and-rinse approach (SBU TE D) (p = 0,008). Conclusions: Within the limitations of the present laboratory study, it may be concluded that improved bonding effectiveness of SBU on dentin is obtained when the adhesive is applied with the self-etch approach. The etch-and-rinse approach tested (wet dentin) resulted in immediate bond strength statistically lower than the self-etch group.
Hsieh, Awei, und 謝紹偉. „Study on Minimization of the Dry Etch Undercut for High Temperature Aluminum Process“. Thesis, 2016. http://ndltd.ncl.edu.tw/handle/p28t9y.
Der volle Inhalt der Quelle國立交通大學
工學院半導體材料與製程設備學程
104
To reduce the fabrication cost, we replaced the conventional tungsten plug process based on the design rule for 6-inch wafers with the aluminum plug process. The replacement of the plug material significantly changes the process characteristics of patterning of the plug and the first metal interconnect layer, such as the etch rate, etch selectivity and etch profile. Undercuts are easily formed during the dry etch of the Al metal layer because a part of the Al plug is subject to etch erosion as a result of the larger top area of the sloping Al contact structure compared with the tungsten plug process. In this study, we studied the cause leading to the Al undercut. We first analyzed key factors resulting in the Al undercut during the etch process, followed by an experimental design for optimizing the etch process. The key etch parameters include source RF power, bias RF power, and the flow rate of etchants, such as BCl3 ,Cl2 ,N2 and Ar. Using a model developed for optimizing process conditions and verified by experiments, we have decided the best etch process condition for the Al interconnect using the Al plug structure. To alleviate the undercut failure, it is important to effectively passivate the sidewall of the metal line structure during the etch process by minimizing chemical erosion, which is an isotropic process, and increasing physical sputtering, which is an anisotropic process. From the study, effective sidewall passivation can be achieved by optimizing the plasma condition and the concentration of reactant gases; these include increasing the BCl3 flow rate, increasing the bottom power, decreasing the Cl2 flow rate and the RF source power.
Ming-KueiHsu und 許明貴. „Using Design of Experiment to Improve Electro-Static Discharge Phenomena in TFT Dry-Etch Equipment“. Thesis, 2017. http://ndltd.ncl.edu.tw/handle/jtgn8y.
Der volle Inhalt der QuelleTALABÉR, Andrea. „Protests and parades : national day commemorations in Hungary and Czechoslovakia, 1918-1989“. Doctoral thesis, 2016. http://hdl.handle.net/1814/41545.
Der volle Inhalt der QuelleExamining Board: Professor Pavel Kolár, European University Institute (EUI Supervisor); Professor Lucy Riall, European University Institute; Professor Peter Haslinger, Herder Institute; Professor Nancy M. Wingfield, Northern Illinois University.
This thesis examines national days in Hungary and Czechoslovakia from their establishment as independent nation-states in 1918 to the collapse of Communism in 1989. The focus is on the capital cities of Budapest and Prague, as the locations of the official commemorations. In these eighty years both countries underwent major political, social and cultural changes that were reflected in national day commemorations. In the interwar period these countries were free to establish their own commemorative calendars and construct their own national historical narratives. Whilst in Hungary this was a rather straightforward process, in Czechoslovakia establishing the calendar was fought along a number of different battle lines. During the Second World War Czechoslovakia was occupied by Nazi Germany and dismantled, whilst Hungary became Hitler's reluctant satellite. National day calendars, rather than simply being completely cancelled, continued in some form from the previous period, as this allowed the Nazis to maintain a semblance of normality. The most significant overhaul of the national day calendar came with the Communist takeovers. The Communist parties imposed a new socialist culture that included a new set of Sovietthemed national days. However, they could not completely break away from the national days of the independent interwar states. Eventually, especially from the late 1960s, the Communists in both countries found that it was expedient to restore some of the interwar national days, some of which still continue today, thus questioning how radical a break 1989 was. Studying national days over the longue durée enables historians to uncover how the dynamics of political power operated in Central and Eastern Europe over the 20th century. This thesis concludes that national days are an example of both the invention of tradition as well as the resilience of tradition, demonstrating how political regimes are always bound by the broader cultural context.
Deering, Chad D. „Spatial and temporal distribution of a rhyolite compositional continuum from wet-oxidizing to dry-reducing types governed by lower-middle crustal P-T-fO₂-fH₂O conditions in the Taupo Volcanic Zone, New Zealand : a thesis submitted in fulfilment of the requirements for the degree of Doctor of Philosophy in Geology at the University of Canterbury /“. 2009. http://hdl.handle.net/10092/2578.
Der volle Inhalt der QuelleHachalinga, Passmore. „A critical analysis of the application of the sola Scriptura principle in Adventist theological thinking and practical action with special reference to the Zambian context“. Thesis, 2010. http://hdl.handle.net/10500/3704.
Der volle Inhalt der QuelleSystematic Theology and Theological Ethics
D.Th. (Systematic Theology)
Mollema, Nina. „Combating human trafficking in South Africa: a comparative legal study“. Thesis, 2013. http://hdl.handle.net/10500/10189.
Der volle Inhalt der QuelleCriminal & Procedural Law
LL.D.
Chembe, Phyllis Kedibone. „Human trafficking in Southern Africa: the need for an effective regional response“. Diss., 2016. http://hdl.handle.net/10500/23739.
Der volle Inhalt der QuellePublic, Constitutional and International Law
LL. M.
Sonnenberg, Edwina Samantha. „Social context, social cohesion and interventions: an assessment of early childhood development (ECD) programmes in selected communities in the Cape Flats“. Diss., 2018. http://hdl.handle.net/10500/24544.
Der volle Inhalt der QuelleSouth Africa’s education system is in crisis. Problems in education directly impact the country’s economy through its influence on skills development for employability. Young children trapped in an environment under serviced by educational resources and haracterised poor social cohesion cannot reach their full potential. This study, undergirded by Bronfenbrenner’s ecological model, sought to establish whether stateled early childhood development centres (ECDCs) in the Cape Flats can establish social cohesion and foster responsible citizenship and youth resilience. A qualitative study was conducted in selected ECDCs. Focus group interviews with caregivers of children from sampled centres and face-to-face interviews with the owners/managers of centres were augmented by an interview with an official from local government. The study concluded that the sampled ECDCs are merely coping, but restricted by various problems. They cannot function optimally as institutions for community development, although the community holds them in high esteem. Recommendations are made for improvements.
Uhlelo lwemfundo yaseNingizimu Afrika lunezingxaki. Izinkinga ezitholakala kwezemfundo zinomthelela othintana ngqo nezomnotho ngenxa yethonya ezinalo ekuthuthukisweni kwamakhono kuzokwenza abantu ukuba baqasheke. Izingane ezisezincane ezibiyelwe esibayeni esincishwa izimfanelo zezemfundo, ezingenakho nokubumbana okufanele komphakathi, ngeke zakufeza lokho ezinamandla okufinyelele kukho. Ucwaningo olususelwe esibonelweni sikaBronfenbrenner ngobudlelwane bomuntu nesizinda sakhe, lwaluhlose ukuthola ukuthi ngabe izikhungo eziholwa ngumbuso zokuthuthuka kwezingane ezincane (ama-ECDC) eCape Flats ziyakwazi yini ukugxilisa ukubumbana komphakathi, zikhulise kumuntu ukuba yisakhamuzi esiqotho nabasha abakwazi ukuqina bomelele. Kwenziwa ukuhlolisisa ezikhungweni zama-ECDC ezikhethiwe. Kwaba nokuxoxisana namaqembu aqokiwe abanakekeli bezingane zakulezo zikhungo ezikhethiwe, kwabuye kwaba nokuxoxa bukhoma nabanikazi/abaphathi bezikhungo, okwengezwa kukho nesikhulu esivela kuhulumeni wendawo. Lolu cwaningo lwafinyelela ekuthini izikhungo ezikhethiwe zama-ECDC zazipatanisa nje ngoba zazinqindwa yizinkinga ezahlukene, okusho ukuthi zazingakwazi ukusebenza ngokuphelele njengezikhungo zokuthuthukisa umphakathi, noma umphakathi wona wawuzibabaza kakhulu. Kukhona nezincomo ngokungase kwenziwe ukuze isimo sibe ngcono.
Isimo senkqubo yemfundo yoMzantsi Afrika simandundu. Iingxaki ezikhoyo kwezemfundo ziluchaphazela ngqo uqoqosho ngenxa yokuba zinefuthe kuphuhliso lwezakhono ezilungiselela ukuqesheka komntu. Abantwana abaselula abakwazi ukuphuhla ngokugqibeleleyo kuba bavaleleke kwimeko yemfundo eneenkonzo ezingekho mgangathweni nakwisimo esingazinzanga somphakathi. Esi sifundo sisekelwe kwinkqubo kaBronfenbrenner yolwalamano lwezinto eziphilayo nendalo, kwaye sizama ukuqonda ukuba ingaba ukusekwa kwamaziko ophuhliso lwabantwana abancinci (iiearly childhood development centres- ECDCs) eCape Flats kungadala uzinzo eluntwini, kukhuthaze ukuba ubani abe ngummi othatha uxanduva, ulutsha lungathabatheki lula kusini na. Uphando lomgangatho lwenziwe kumaziko iiECDCs ezikhethiweyo. Udliwano-ndlebe namaqela abantu abagcina abantwana kumaziko akhethiweyo kwanabaphathi baloo maziko luxhaswe ludliwano-ndlebe esiphathamandla sorhulumente wendawo. Esi sifundo sifikelele kwisigqibo esithi ezi ECDCs zikhethiweyo ziyazama kodwa zikhonkxwa ziingxaki ezahlukeneyo, nto leyo ithetha ukuthi azikwazi ukusetyenziswa ngokupheleleyo njengamaziko ophuhliso lomphakathi nangona umphakathi wona uzixabise kakhulu. Kunikwe iingcebiso zokuphucula imeko.
Development Studies
M.A. (Development Studies)