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1
Shen, Wei. „Image based body dimension measurement /“. View abstract or full-text, 2010. http://library.ust.hk/cgi/db/thesis.pl?MECH%202010%20SHEN.
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2
Binnie, Iona B. „Critical dimension control : influencing factors and measurement“. Thesis, University of Edinburgh, 1991. http://hdl.handle.net/1842/10815.
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Advanced Lithography continues to be the limiting factor in the drive for higher levels of microcircuit integration. The key to the successful management of a lithography process is the integration of full measurement and instrumentation functions with the process, and the adoption of effective process control strategies. The aim of this research is to improve the understanding of critical dimension (CD) control by an investigation of the sources of variations in linewidth dimensions. Having identified the key factors, it should be possible to characterize and control their influence. Experimental analysis suggests that film thickness and photoresist thickness have a profound effect on linewidth dimensions. Simulation techniques are used to establish a theory which uses standing wave patterns within film stacks to predict reflectance and exposure threshold, as well as the dimensions of the developed resist images. This theory is later corroborated by measurements on test wafers. Having established the need to monitor film thickness variations, a novel metrology technique which incorporates both film thickness and linewidth uniformity measurements is introduced. The technique is based on the optical characteristics of a 'chequerboard' test pattern, consisting of clear and opaque squares. The chequerboard effectively enhances deviations in CD by translating changes in linewidth into an area change on the chequerboard. The technique was originally based on the measurement of light transmitted through glass wafers. The implementation of the technique using reflectance from silicon wafers is described, and possible future developments of the system are discussed.
3
Rennell, Beverley. „The social dimension of chronic pain : problems of measurement“. Thesis, London Metropolitan University, 1997. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.264707.
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4
Davies, Guy Scott. „Critical dimension measurement and sidewall slope evaluation using a coherence probe microscope“. Thesis, University of Edinburgh, 1994. http://hdl.handle.net/1842/13587.
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The drive by the manufacturers and designers of integrated circuits towards smaller dimensions has led to ever increasing demands being placed on the vendors of semiconductor equipment. In the photolithography arena this has meant producing optical projection systems with improved resolution approaching 0.2μm and layer to layer registration to better than 50nm. In order to monitor these processes, metrology equipment must be capable of tracking changes in the above areas. Traditionally, optical techniques have been utilised for several reasons, namely their cost, high throughput and ease of use. The drive however, towards circuit dimensions which are equal to the wavelength of the illuminating light has reduced the appeal of optical tools to be used at these dimensions. The ability to get as close as possible to the theoretical limit is of benefit to the users and manufacturers of metrology equipment in that the useful life of optical metrology tools can be increased. This has been achieved by examining and implementing various new algorithms developed for the coherence probe microscope, the aim of which is to improve the measuring ability and extract more information from the complex signal that the microscope produces. Three areas have been examined, the first was the effect of a pathlength offset on the microscope, which moves the coherence region away from the focal plane of the objective lens. The results from this show a substantial improvement in the repeatability of the measurements from the bottom of trenches. The second area is that of profile extraction, in particular that of a photoresist profile after development. The ability to extract profile information from an optical tool is of great use to a lithography engineer as it negates the need to destructively cross section the sample. Thirdly, the area of general algorithms for measurement of critical dimensions has been investigated and several other schemes for measurement have been proposed.
5
Doyle, Tim L. A. „Understanding the control strategies of quiet stance via a fractal dimension analysis of centre of pressure“. Virtual Press, 2003. http://liblink.bsu.edu/uhtbin/catkey/1260622.
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Certain natural phenomena have been identified as having fractal properties in their patterns. That is, their seemingly random patterns contain a level of order and deterministic properties that are more complex than previously thought. Centre of Pressure (COP) traces are one of these phenomena. By using a fractal dimension analysis of COP, it is possible that we can gain more information about control during quiet stance than traditional analyses have previously allowed. This Thesis considered a group of young healthy participants and a group of elderly healthy participants to compare traditional measures of COP (range and velocity of sway, and total excursion area) against a fractal dimension analysis of COP. Results indicated that both types of analyses are able to distinguish between eyes open and eyes closed in the elderly group. However, the fractal dimension analysis more accurately detects differences between the participant groups when standing with their eyes closed. Based on these results it is suggested that a fractal dimension analysis is more informative about posture control than traditional measures. Recommendations for future research include the development of model that incorporates non-linear properties of control and for further work investigating gait and balance from a dynamical systems perspective.School of Physical Education
6
Bodner, Sarah L. „Dimensional Assessment of Empowerment in Organizations“. Thesis, University of North Texas, 2003. https://digital.library.unt.edu/ark:/67531/metadc4236/.
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This research project was inspired by a survey that was designed to help an organization determine how well it was doing in its efforts to empower associates and achieve a goal of continuous improvement. Initial review of the survey created suspicion that the survey was not built around the appropriate dimensions to accurately measure the level of empowerment in organizations. As such, the survey was psychometrically analyzed to determine the validity of the instrument as a measure of empowerment. Additionally, an extensive review of the literature was performed to determine new dimensions that would most accurately measure empowerment. Eight dimensions (culture, trust, accountability, leadership, ability, commitment, responsibility, and communication) were put forth as the most appropriate to measure empowerment. Subject matter experts with knowledge and experience in the area of organizational empowerment reviewed the new dimensions for accuracy and fit with the original survey items.
7
Dufloux, Laurent. „Dimension de Hausdorff des ensembles limites“. Thesis, Sorbonne Paris Cité, 2015. http://www.theses.fr/2015USPCD022/document.
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Soit G le groupe SO°(1, n) (n ≥ 3) ou PU(1, n) (n ≥ 2) et fixons une décomposition d'Iwasawa G = KAN. Soit ɼ un sous-groupe discret de G, que nous supposons Zariski-dense et de mesure de Bowen-Margulis-Sullivan finie. Lorsque G = SO°(1, n), nous étudions la géométrie de la mesure de Bowen-Margulis-Sullivan le long des sous-groupes fermés connexes de N, en lien avec la dichotomie de Mohammadi-Oh. Nous établissons des résultats déterministes sur la dimension des projections de la mesure de Patterson- Sullivan. Lorsque G = PU(1, n), nous relions la géométrie de la mesure de Bowen- Margulis-Sullivan le long du centre du groupe de Heisenberg au problème du calcul de la dimension de Hausdorff de l'ensemble limite relativement à la distance sphérique au bord. Nous calculons cette dimension pour certains groupes de SchottkyLet G be the group SO° (1,n) (n ≥ 3) or PU(1, n) (n ≥ 2) and fix some Iwasawa decomposition G = KAN. Let ɼ be a discrete subgroup of G.We assume that ɼ is Zariski-dense with finite Bowen-Margulis-Sullivan measure. When G = SO°(1,n), we investigate the geometry of the Bowen-Margulis-Sullivan measure elong connected closed subgroups of N. This is related to the Mohammadi-Oh dichotomy. We then prove deterministic results on the dimension of projections of Patterson-Sullivan measure. When G = PU(1,n), we relate the geometry of Bowen-Margulis-Sullivan measure along the center of Heisenberg group to the problem of computing the Hausdorff dimension of the limit set with respect to the spherical metric on the boudary. We construct some Schottky subgroups for wich we are able to compute this dimension
8
Loo, James. „A proposed microwave system for on-line measurement of specific gravity and moisture content of dimension lumber“. Thesis, University of British Columbia, 1987. http://hdl.handle.net/2429/26721.
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A 10 GHz microwave bridge measurement system has been developed to automatically measure the electromagnetic field parameters transmitted through a dielectric material. These parameters are used to calculate the complex dielectric constant with the free-space transmission technique. The system is used to measure the field parameters transmitted through dimension lumber and a correlation is made with two strength determining factors of lumber: specific gravity and moisture content. Hemlock and Douglas Fir wood samples were tested and a grading technique was implemented. The system is capable of estimating the specific gravity to ±0.05 accuracy and the moisture content to ±3.0% accuracy.Applied Science, Faculty of
Electrical and Computer Engineering, Department of
Graduate
9
Liu, Zao. „Measurement of White Matter Structure Changes in Amyotrohpic Lateral Sclerosis Using Fractal Analysis“. Cleveland State University / OhioLINK, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=csu1315930636.
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10
Herrera, Sabillon Beatriz Soledad [Verfasser], und Andrea [Akademischer Betreuer] Knierim. „Measurement of sustainability at farm-level : stakeholders perceptions and indicators of the social dimension / Beatriz Soledad Herrera Sabillon ; Betreuer: Andrea Knierim“. Hohenheim : Kommunikations-, Informations- und Medienzentrum der Universität Hohenheim, 2020. http://d-nb.info/1219574147/34.
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11
Bourreau, Léa. „Contribution de la dimension conformité règlementaire à la mesure de la performance des systèmes de management environnemental : Proposition d’un outil de mesure“. Thesis, Paris, ENMP, 2012. http://www.theses.fr/2012ENMP0059/document.
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Le présent travail de recherche a pour objet de concevoir, de développer et d'expérimenter un outil de mesure de la performance des systèmes de management environnemental (SME) des entreprises. S'il existe déjà différents outils de mesure de cette dernière, ceux-ci différent selon les contingences des entreprises (l'environnement de ces dernières étant par nature différent), sont difficilement (voire pas du tout) transposables d'une entreprise à l'autre et interdisent toute comparaison interentreprises (voire inter-sites au sein d'une même entreprise) des SME mis en oeuvre. L'apport de la démarche de modélisation et d'ingénierie proposée réside ainsi dans la formalisation d'une méthode de mesure de la performance des SME reposant sur l'amélioration de la mesure dela conformité règlementaire des entreprises. De la méthode découle un outil opérationnel ayant vocation à être utilisé par l'ensemble des entreprises, ce, quelle que soit leur forme (centralisée ou décentralisée sur de nombreux sites), leur branche d'activité, le nombre de salariés, etc. Cet outil propose de mesurer la performance du SME au travers de ses principales dimensions, notamment, la maîtrise de la conformité règlementaire, normative et interne, l'analyse environnementale et enfin l'élaboration d'un plan d'actions correctives et proactives ainsi que le suivi de sa mise en oeuvre, ce dans une perspective d'amélioration continue. L'originalité de cette démarche réside dans la prise en compte des interrelations existant entre ces différentes dimensions en vue d'enrichir les systèmes classiques de mesure de la performanceThe current research aims to conceive, develop and experiment a tool to measure performance in environmental management systems (EMS). Although different tools already exist, they differ from one company to another depending on contingencies (their environment being different), are difficult (and sometimes impossible) to apply from one firm to another and prevent from making inter-firms (or inter-sites within the same company) comparisons between different EMS. The contribution of the modelling and engineering approach developed in this thesis lies in the formalisation of a new method of measurement of performance in EMS based on the improvement of the measure of regulatory compliance in companies.This specific method leads to the introduction of an operational tool aiming to be used by all companies, whatever their structures (centralised or decentralised over different sites), their activity, their amount of employees, etc. This tool offers to measure the EMS performance, in a continuous perspective of improvement, through its key dimensions, and in particular through, the mastering of regulatory (normative and internal) compliance, the environmental analysis and the elaboration of a planning for proactive andcorrective actions as well as the follow-up of its implementation. Overall, the novelty of this approach results from the particular emphasise put on interrelations existing between those different dimensions in order to enhance standard systems of performance measurement
12
Salles, Christian. „Analyse microphysique de la pluie au sol : mesures par spectro-pluviomètre optique et méthodes statistiques d'analyse spectrale et de simulation numérique“. Université Joseph Fourier (Grenoble), 1995. http://www.theses.fr/1995GRE10241.
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La caracterisation de la variabilite spatio-temporelle de la pluie est l'une des etapes importantes de l'etude du cycle de l'eau. L'information sur la distribution granulometrique de la pluie familiere aux physiciens de l'atmosphere et aux specialistes des telecommunications apparaitra utile en hydrologie si l'utilisation des radars meteorologiques se generalise. C'est cette description, a l'echelle de la goutte de pluie que nous avons aborde dans ce travail. La metrologie des distributions granulometriques des gouttes de pluie est realisee par l'intermediaire d'un capteur de mesure (le spectro-pluviometre optique) que nous avons analyse et qualifie en detail. L'analyse de la variabilite des comptages de gouttes nous a ensuite permis d'aborder la question de l'echantillonnage. Deux points essentiels se sont degages: i) l'effet d'echantillonnage est en general insuffisant pour expliquer les fluctuations des comptages de gouttes. Ii) il existe des precipitations pour lesquelles certains diametres de gouttes ne sont pas representes (lacune dans les spectres de gouttes). L'analyse spectrale des distributions granulometriques proposee en derniere partie du document s'est appuyee sur la technique d'analyse en composantes principales. Cette analyse a permis de distinguer deux types d'ecart au spectre moyen: des ecarts que l'on peut attribuer aux processus microphysiques et des ecarts de type bruit blanc vraisemblablement dus a l'echantillonnage. Un generateur de distribution granulometrique a ete propose d'apres cette analyse puis il a ete teste en simulation numerique de mesure radar. La comparaison des resultats obtenus avec ceux d'un generateur plus classique confirme l'interet de cette nouvelle approche
13
Nelson, Petter. „A model to measure and increase customer perceived relationship quality: A case study“. Thesis, Linnéuniversitetet, Institutionen för teknik, TEK, 2011. http://urn.kb.se/resolve?urn=urn:nbn:se:lnu:diva-11122.
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The competitive market of today is characterized by globalization, increased demands from customers and similarities of products and services. High demands are thus put on organizations ability of differentiating themselves from competitors acting on the same market. Within this area, the customer relationship itself has turned out being an efficient tool. In addition, a high quality customer relationship is considered as an important factor when creating loyal customers, growth, profitability and competitive advantages. In order to reach high quality customer relationships, an ability of identifying and validate actions aimed for relationship quality improvements is needed as well as clear guidelines and managerial support regarding creation of value adding activities supporting such process. This thesis is supposed to, by the creation of a model, make improvement processes of customer perceived relationship quality in a B2B context possible. The model consists of actions and tools aimed for measurement of customer perceived relationship quality and identification of value adding activities from a customer perspective. The developed model is encapsulated by three steps, take-off, investigation and action/evaluation. The developed model was tested in a case study and it turned out to be practically applicable. It had a positive effect on the customer perceived relationship quality and additionally on the dyad´s transaction costs.Dagens konkurrensutsatta marknad karaktäriseras av globalisering, ökade kundkrav och likheter mellan aktörers produkter och tjänster. Stora krav ställs således på företags förmåga att differentiera sig själva gentemot konkurrenter på samma marknad. Inom detta område har själva kundrelationen och dess kvalité visat sig vara ett effektivt verktyg. En högkvalitativ kundrelation anses vara en viktig faktor i skapandet av lojala kunder, tillväxt, lönsamhet samt konkurrensfördelar. För att driva en organisation i en riktning mot högkvalitativa kundrelationer krävs förmågan att identifiera och validera förbättringsåtgärder samt tydliga riktlinjer för skapande av värdeskapande aktiviteter i ett sådant syfte. Den här rapporten syftar till att genom skapandet av en modell, möjliggöra mätning av den kunduppfattade relationskvalitén samt genomföra förbättringsprocesser av den kunduppfattade relationskvalitén via identifiering av värdeskapande aktiviteter utifrån ett kundperspektiv. Tillvägagångssättet är uppdelat i tre steg med en förberedande fas, följt av en undersöknings samt en implementering/utvärderings – fas. Dess praktiska relevans är testad genom en fallstudie där processen visade sig vara tillämpbar. Vid modellens test visade den sig ha positiv effekt på den kundupplevda relationskvalitén samt även relationens transaktionskostnader.
14
Hons, Viktor. „Detekce vad s využitím smart kamery“. Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2021. http://www.nusl.cz/ntk/nusl-442536.
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This thesis deals with the application of smart cameras and verification of its functions. In the first part the term smart camera is defined, the parts of it and the most common applications are presented. A review of smart cameras from the different manufactures on the market is made. After selection of the proper camera model three task from real industrial application are specified – inspection of capacitor print, inspection of beer label and dimension measurement. With the picked camera the tasks are performed, including the layout of workplace, scene and lighting. Further the reliability is tested together with the successfulness and the speed of designed solution.
15
Hardy, Ben. „Morale : definitions, dimensions and measurement“. Thesis, University of Cambridge, 2010. https://www.repository.cam.ac.uk/handle/1810/229514.
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Morale is a commonly used term both in business and society but the concept of morale is relatively poorly defined and understood. In a recent paper Liefooghe et al. (2004) expressed surprise that "when reviewing the literature, no strong theory to explain morale as such is in evidence, nor are there many empirical studies that offer solid ground to advise organisations"(p 1). This thesis aims to provide these theories and this empirical evidence in order to produce a better understanding of morale. This research identifies a number of deficiencies in the current understanding of morale. These range from elision with other concepts to disagreement about whether it is an individual or group phenomenon. In this study, four principal domains are examined: (i) what morale is; (ii) how it differs from other concepts; (iii) the antecedents of morale and (iv) its consequences. A mixed methods approach was adopted combining idiographic and nomothetic research. The idiographic phase of the research adopted a Straussian (1998) grounded theory approach, involving data collection from seven different organisations. The data was accrued from a combination of site visits, informal contacts, external research, and 203 semi-structured interviews which were supplemented with psychometric instruments. The data were then coded and analysed. Morale could be readily differentiated from other concepts and emerged as a phenomenon with three dimensions: affective, future/goal and interpersonal. It was also viewed as a single phenomenon which was generalisable across situations and rooted in the individual although perceived members of the group exerted considerable influence. The antecedents of morale impacted on the three dimensions outlined above. Its consequences were the zeal with which tasks are undertaken, creativity and engagement. The nomothetic element of the research developed a number of measurement scales, grounded in the qualitative phase. These allowed morale to be differentiated from other phenomena and offered insights into individual and group perceptions of morale and the influence of personality variables. Further quantitative research confirmed the three dimensional structure of the concept. The results of these two phases were then integrated to provide a picture of the phenomenon of morale, differentiate it from other concepts and elucidate its antecedents and consequences. An appraisal of the limitations of the research is also made. Finally the implications of this research for both academic researchers and practitioners are discussed along with suggestions for future research.
16
LaRocca, Michela A. „Perception of Leadership Qualities in Higher Education: Impact of Professor Gender, Professor Leader Style, Situation, and Participant Gender“. Scholar Commons, 2003. https://scholarcommons.usf.edu/etd/1415.
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This experimental study used eight written vignettes to analyze the effects of professor gender, professor leadership style (democratic/autocratic), and type of situation (task/personal) and participant gender on evaluations of professorsʹ competence, likeability and masculinity characteristics. Undergraduates from the College of Arts and Science (N=932; Males=464, Females=467), and the College of Education (N=722; Males=140, Females=582) were used. Results indicated that research participants rated democratic professors significantly more competent, likeable, and more feminine than autocratic professors. Contrary to expectations derived from gender spill-over and gender congruency theories, male participants did not rate female professors more negatively than their male counterparts when they acted autocratically in a personal situation (i.e., gender incongruent manner.) Exploratory results revealed trends that are discussed along with theoretical and practical implications.
17
Akturk, Selcuk. „Extending ultrashort-laser-pulse measurement techniques to new dimensions, time scales, and frequencies“. Diss., Georgia Institute of Technology, 2005. http://hdl.handle.net/1853/6892.
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In the last decade, there has been tremendous progress in the field of ultrashort-pulse measurement. However, this effort has focused mostly on the temporal behavior of 100-fs, 800-nm ultrashort pulse, ignoring other pulse lengths, wavelengths, and the very common space-time couplings or so called spatio-temporal distortions. In this thesis work, I do an extensive study of spatio-temporal distortions and their measurement using Frequency Resolved Optical Gating (FROG) and its relatives. I clarify some ambiguities in the descriptions of these effects in the existing theory and establish a more general description of such distortions in ultrashort pulses. I also extend these measurement techniques to different wavelengths and pulse lengths. Specifically, I develop measurement devices for few-cycle NIR pulses, weak and narrowband fiber laser pulses, long (several-ps) NIR pulses, and visible pulses from NOPAs.
18
Kshirsagar, Ashwini Arvind. „Measurement of cartilage dimensions using MRI“. Thesis, University of Cambridge, 1998. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.624926.
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Eriksen, Pål Egil. „Three-dimensional wake measurements“. Thesis, Norwegian University of Science and Technology, Department of Energy and Process Engineering, 2010. http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-9127.
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The performance of a hot wire probe with three wires is investigated for two different flow cases. The wires are made of a platinum/rhodium alloy, and has a diameter of 5 micrometer. The three wires make a probe volume with acrossection of approximately 5 mm. A cosinus fit using the effective angle method gives a deviation of plus/minus 1 degree for a variation of yaw angle equal to plus/minus 20 degrees. First the probe was tested in a fully developed turbulent pipe flow, for Re_D = 10^5. Good results were obtained for |y/R|<0.8, both for mean velocities and turbulent stresses. Closer to the wall the mean flow gradient was to large relative to the probe resolution, giving large errors. The second flow case was a cylinder wake. A traverse of the flow at x/D = 10 was performed at Re_D = 3*10^3. The mean velocities and turbulent stresses was partly found to be in qualitative agreement with results found in litterature. The shear stresses uw and vw were however found to be unphysically large, this is belived to be due to the velocity gradient in the wake. Conditional averaging of the wake results with respect to shedding frequency was also conducted.
20
Batley, Rose-Marie. „The effects on parameter estimation of correlated dimensions and a differentiated ability in a two-dimensional, two-parameter item response model“. Thesis, University of Ottawa (Canada), 1989. http://hdl.handle.net/10393/21362.
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Xiao, Xinghua. „Vibration measurement using videogrammetric method /“. View abstract or full-text, 2009. http://library.ust.hk/cgi/db/thesis.pl?CIVL%202009%20XIAO.
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Chan, Yin-man, und 陳彥民. „Three-dimensional cephalometry of Chinese faces“. Thesis, The University of Hong Kong (Pokfulam, Hong Kong), 2009. http://hub.hku.hk/bib/B43958643.
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Gencel, Cigdem. „An Architectural Dimensions Based Software Functional Size Measurement Method“. Phd thesis, METU, 2005. http://etd.lib.metu.edu.tr/upload/12606732/index.pdf.
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This thesis study aims to examine the conceptual and theoretical differences of Functional Size Measurement (FSM) methods, to identify the improvement opportunities of these methods and to develop a new FSM method. A comprehensive literature review is performed and two multiple-case studies are conducted as a research strategy. In the light of the results obtained, some improvement suggestions on two of the most challenging improvement opportunities identified for FSM methods are made &ndashimprovement opportunities which are related to the conceptual and theoretical basis of FSM and the extension of the applicability of these methods to different software functional domain types. The work behind these suggestions involves the critical examination of the concepts &ldquo
functionality&rdquo
and &ldquo
functional size&rdquo
and the depiction of &ldquo
types of functionality&rdquo
considering the components of software architecture and the forms of information processing logic performed in different software functional domain types. Based on the suggestions made, a new FSM method, called ARCHItectural DIMensions Based FSM (ARCHI-DIM) is developed conforming to the ISO/IEC 14143-1 standard. A third multiple-case study is conducted in order to evaluate the new method and to identify future directions for FSM methods.
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Yap, Han Lun. „Constrained measurement systems of low-dimensional signals“. Diss., Georgia Institute of Technology, 2012. http://hdl.handle.net/1853/47716.
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The object of this thesis is the study of constrained measurement systems of signals having low-dimensional structure using analytic tools from Compressed Sensing (CS). Realistic measurement systems usually have architectural constraints that make them differ from their idealized, well-studied counterparts. Nonetheless, these measurement systems can exploit structure in the signals that they measure. Signals considered in this research have low-dimensional structure and can be broken down into two types: static or dynamic. Static signals are either sparse in a specified basis or lying on a low-dimensional manifold (called manifold-modeled signals). Dynamic signals, exemplified as states of a dynamical system, either lie on a low-dimensional manifold or have converged onto a low-dimensional attractor.
In CS, the Restricted Isometry Property (RIP) of a measurement system ensures that distances between all signals of a certain sparsity are preserved.
This stable embedding ensures that sparse signals can be distinguished one from another by their measurements and therefore be robustly recovered. Moreover, signal-processing and data-inference algorithms can be performed directly on the measurements instead of requiring a prior signal recovery step. Taking inspiration from the RIP, this research analyzes conditions on realistic, constrained measurement systems (of the signals described above) such that they are stable embeddings of the signals that they measure.
Specifically, this thesis focuses on four different types of measurement systems. First, we study the concentration of measure and the RIP of random block diagonal matrices that represent measurement systems constrained to make local measurements. Second, we study the stable embedding of manifold-modeled signals by existing CS matrices. The third part of this thesis deals with measurement systems of dynamical systems that produce time series observations. While Takens' embedding result ensures that this time series output can be an embedding of the dynamical systems' states, our research establishes that a stronger stable embedding result is possible under certain conditions. The final part of this thesis is the application of CS ideas to the study of the short-term memory of neural networks. In particular, we show that the nodes of a recurrent neural network can be a stable embedding of sparse input sequences.
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Troke, Michael. „Three dimensional measurement of lumbar spinal motion“. Thesis, University of Brighton, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.407676.
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Batt, J. J. M. „Three-dimensional unsteady gas turbine flow measurement“. Thesis, University of Oxford, 1997. http://ora.ox.ac.uk/objects/uuid:3302ca8f-0618-4440-9e23-3bf99bc3705d.
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The high pressure turbine stage can be considered the most important component for the efficiency and longevity of a modern gas turbine. The flow field within this stage is highly complex and is both unsteady and three-dimensional. Understanding this flow field is essential if improvements are to be made to future engine designs. Increasingly designers are placing more emphasis on the use of Computational Fluid Dynamics (CFD) rather than experimental results. CFD methods can be more flexible and cost effective. However before these predictions can be used they must be validated against experimental data at engine conditions. The hostile environment and complexity of flows within a gas turbine engine mean that collection of experimental data is extremely challenging. This thesis describes the development of an instrumentation technique for unsteady gas turbine flow measurement capable of resolving unsteady three-dimensional flow. The technique is based on an aerodynamic probe constructed with miniature semiconductor pressure transducers manufactured by Kulite Semiconductor Inc. Measurements recorded using this instrumentation technique from the Oxford Rotor experiment are presented to illustrate its use, and these in turn are compared with a CFD prediction of the rotor flow-field. This work was funded by the Engineering and Physical Sciences Research Council and Kulite Semiconductor Inc. The Oxford Rotor project is jointly funded by the Engineering and Physical Sciences Research Council (EPSRC), and Rolls-Royce Plc.
27
Moreland, D. J. „Real-time high accuracy measurement of small component dimensions“. Thesis, Liverpool John Moores University, 1987. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.376527.
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Lillis, Anne M. „Managing multiple dimensions of manufacturing performance - an exploratory study“. Melbourne, Vic. : University of Melbourne, Dept. of Accounting and Business Information Systems, 2001. http://wff1.ecom.unimelb.edu.au/accwww/research/res_papers.html.
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Includes bibliographical references : (p. [37]-40) Drawing on qualitative data collected during semi-structured interviews with 36 profit centre managers in manufacturing firms in Victoria, Australia, this study seeks to explore the mechanisms used to manage multiple manufacturing performance dimensions arising from the pursuit of profit centre strategy. Where measures capture potentially conflicting influences on the manufacturing cost function, strategy implementation is facilitated by loosening control reactions to cost variances and through explicit attempts to integrate multiple measures. However, a joint emphasis on performance dimensions relating to manufacturing efficiency and customer responsiveness emerges as problematic. In contrast, a joint emphasis on quality and efficiency is relatively easily managed. It is suggested that in the context of responsiveness strategies, the difficulty of designing complete measures inhibits the relevance of performance measurement systems as a facilitator of strategy implementation.
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Li, Xuesong. „Multi-dimensional Flow and Combustion Diagnostics“. Diss., Virginia Tech, 2014. http://hdl.handle.net/10919/48894.
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Turbulent flows and turbulent flames are inherently multi-dimensional in space and transient in time. Therefore, multidimensional diagnostics that are capable of resolving such spatial and temporal dynamics have long been desired; and the purpose of this dissertation is to investigate three such diagnostics both for the fundamental study of flow and combustion processes and also for the applied research of practical devices. These multidimensional optical diagnostics are a 2D (two dimensional) two-photon laser-induced fluorescence (TPLIF) technique, a 3D hyperspectral tomography (HT) technique, and a 4D tomographic chemiluminescence (TC) technique. The first TPLIF technique is targeted at measuring temporally-resolved 2D distribution of fluorescent radicals, the second HT technique is targeted at measuring temperature and chemical species concentration at high speed, and the third TC technique is targeted at measuring turbulent flame properties. This dissertation describes the numerical and experimental evaluation of these techniques to demonstrate their capabilities and understand their limitations. The specific aspects investigated include spatial resolution, temporal resolution, and tomographic inversion algorithms. It is expected that the results obtained in this dissertation to lay the groundwork for their further development and expanded application in the study of turbulent flow and combustion processes.Ph. D.
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Clegg, Scott Tom. „Estimation of three-dimensional temperature fields from a limited number of transient temperature measurements during hyperthermia“. Diss., The University of Arizona, 1988. http://hdl.handle.net/10150/184424.
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In this dissertation, a new reconstruction algorithm to estimate the complete temperature field during hyperthermia is developed which relies upon a limited amount of transient measured temperature data. The predictive capabilities of this new algorithm are then systematically studied; first using one-dimensional simulated treatments, then using three-dimensional simulated treatments, and finally applying it to hyperthermia treatments of normal canine thighs. It was found that this new algorithm predicts the complete temperature fields more accurately and robustly than the steady-state approach. In particular, it can better predict the complete temperature fields in situations where the number of unknown blood perfusion parameters are greater than the number of available temperature sensors. It was also found that the steady-state temperature field could be estimated to within 1°C if there was no measurement noise, no model mismatch, and as few as three measurement locations for seven perfusion zones. The addition of measurement noise degraded the performance of this estimation algorithm especially when the number of measurement locations was small. It was found that use of Tikhonov regularization of order zero significantly improved the performance of the algorithm and that there was an optimal choice for the regularization parameter. For the animal experiments, normal canine thighs were instrumented with one-hundred twelve thermocouples and heated to steady-state using a 6 cm planar ultrasound transducer operating at 0.5 MHz: then the power was turned off and the transient cool down temperature data was stored for later use by the reconstruction algorithm. Only a subset of the one-hundred twelve measurements was used as input to the reconstruction algorithm. The remaining measurements were used to compare the results of the reconstruction algorithm with the true temperatures. The results showed that in general the predicted perfusion and reconstructed temperature field did not change significantly as sensors were removed. However, the error was quite large for some of the situations studied particularly when only twenty-seven piecewise constant regions of perfusion were used. Increasing the number of perfusion regions reduced this error suggesting that model mismatch had contributed significantly to the error.
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Ge, Youmei. „Noncontact 3D biological shape measurement from multiple views“. University of Western Australia. Dept. of Computer Science, 1994. http://theses.library.uwa.edu.au/adt-WU2003.0003.
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Many clinically important applications require measurements on a large portion of the human body surface that may not be visible from a single view. For example, a single view may be insufficient for the measurement of a complete facial surface for facial plastic surgery. And observing breast surfaces from multiple views is needed in accurate breast volume measurement. On the other hand most 3D vision systems only recover 3D data from a single viewpoint and the recovered 3D data are often incomplete due to the occlusion problem and thus cannot uniquely define the surface. A unique and more complete description of the surface is necessary for most applications such as measuring area or volume and finding the best 3D registration between corresponding surfaces. This thesis describes a structured light based system for fast and noncontact 3D measurement of the human body from multiple views. A particular application of our system is the study of human lactation through measuring the breast surface and volume. Fast, accurate, non-contact, and biologically safe measurement is the key requirement in our application. We use structured light to fulfill the requirement. Based on the SHAPE system [4,3], a single view structured light system developed at Monash University, our system for breast volume measurement generates more complete 3D information on object surfaces by observing the object from more than one viewpoint. The breast volume is computed using the integrated data from all views. We present a simple method that performs 3D measurement from multiple views simultaneously. Combined with a camera and a projector, a mirror is used in the method to create an additional viewpoint to recover the occluded regions that are illuminated by the light source but were previously invisible to the camera. Images from the two views one directly seen by the camera and the other seen via the mirror are taken simultaneously. We develop the method for the purpose of achieving more complete measurements without increasing image capture time, which is very useful in situations where both speed and accuracy are important. The complete 3D description of the surface of objects requires the acquisition of several images from different vantage viewpoints. Each image contains information on the part of the object that is visible from its viewpoint. A very important task consists in the integration of the information present in each view. We have developed a two view system to achieve a more complete breast volume measurement. The system uses a stationary sensor at each view. Our system can largely eliminate the occlusion regions produced by a single view system and all data from different views are integrated into an object centered coordinate system and resampled by a single parametric grid. The system has been used to accurately measure short term changes in breast volume for lactating mothers. Currently, the system is also used to observe the breast volume change of pregnant women over many weeks' time.
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Davis, E. J. „Three dimensional topography : Statistical assessment and instrument fidelity“. Thesis, Coventry University, 1988. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.379677.
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Hughes, Stephen William. „Measurement of organ volume using three dimensional ultrasound“. Thesis, Imperial College London, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.484233.
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Huang, Yi Dong. „Three dimensional measurement based on theodolite-CCD cameras“. Thesis, University College London (University of London), 1994. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.309243.
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Fasogbon, Peter Oluwanisola. „Dimensional measurement of metallic object by 3D vision“. Thesis, Lille 1, 2016. http://www.theses.fr/2016LIL10105.
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Dans cette thèse nous avons montré à travers différentes études et expériences la nécessité de mesurer la section de pièces métalliques. Les méthodes actuelles sont basées sur des systèmes de vision 2D, ce qui ne permet pas de traiter toutes les géométries possibles. Par conséquent nous avons proposé d’utiliser des méthodes de vision 3D basées sur un couplage laser caméra et sur un dispositif optique de type Scheimpflug. Ce dispositif non conventionnel augmente le champ de vue focalisé de la caméra. La mesure dimensionnelle de la pièce nécessite une calibration spécifique d’un tel système. Nous avons donc proposé des méthodes de calibrage dont les performances dépassent celles de l’état de l’art. Une fois le système calibré, la mesure de la section est obtenue par une analyse du profil résultant de la projection du plan laser sur la pièce. La capacité du système développé a été évaluée avec des pièces étalonsIn this PhD thesis, we have demonstrated through various studies and experiments the necessity of using 3D vision system to measure the cross-section area of metallic objects. The current methods are based on 2D vision approach, which do not allow the measurement of different geometry of these metallic objects. Therefore, we have proposed 3D vision system that consists of lasers and cameras that have been equipped with Scheimpflug optical devices. This non-conventional optical set-up increases the field of view of the camera. As we have to measure the metallic object using the laser-Scheimpflug device, we need to calibrate the system. We proposed a new calibration method that provides significant improvement compared to the state of art laser-camera triangulation system. Using the calibrated system, the cross-section of the metallic object is determined by the analysis of the profile that results from the laser line projected on the metallic object. We have validated the system capability on plug gauges
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Foster, Elizabeth M. „Aberration analysis and dimensional measurement in underwater hologrammetry“. Thesis, University of Aberdeen, 1997. http://digitool.abdn.ac.uk/R?func=search-advanced-go&find_code1=WSN&request1=AAIU104801.
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The objective of this project was to investigate the image quality of holograms of objects located in water and the accuracy of dimensional measurements produced using underwater hologrammetric techniques. Much research has been completed into the image quality of holograms of objects located inside a water filled, glass walled tank with only a small gap between the hologram and the glass tank and the reference beam introduced through the water [Kilpatrick 1991, Ross 1994]. The work presented here investigates the image quality of holograms recorded with a larger gap between the hologram and the glass tank and a reference beam introduced in air. The image quality of the reconstructed real image was investigated both experimentally using underwater holograms of resolution targets and other objects and theoretically. The dimensional measurements were taken from holograms, of a metallic test object, recorded in air, in tap water and sea water. The experimental results for the dimensional measurements were compared with the results obtained using a ray trace program written as part of the project. The accuracy of the experimental dimensional measurements was deemed to be the difference between experimental results and the ray trace results. The accuracy of the dimensional measurements and the image quality results were then compared to give an indication of the useable image volume.
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Barnett, Nicholas David. „Measurement and modelling of three dimensional scapulohumeral kinematics“. Thesis, University of Newcastle upon Tyne, 1996. http://hdl.handle.net/10443/3588.
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The term scapulohumeral rhythm is commonly used to describe the two dimensional rotation of the scapula accompanying motion of the arm. Despite the development of a variety of measurement techniques, including radiography, goniometry and three dimensional digitisation, the complete three dimensional kinematics of the scapula have never been presented. Nor have the effects of arm motions outside elevation in the coronal, sagittal or scapula planes been considered. Employing the Isotrak®" electromagnetic measurement system, this study has developed and validated a new method to simultaneously measure the three dimensional kinematics of the scapula and humerus. Euler angle rotations of the· scapu·lawere defined in a sequence approximately analogous to clinical definitions. For the first time, the three dimensional displacements of the scapula have also been determined. 950/0 confidence intervals for lateral rotation of the scapula during humeral elevation in the coronal plane have been calculated at under 4°, Significantly smaller than those presented by previous authors. A mathematical model of three dimensional scapulohumeral kinematics has been developed, capable of predicting the position and orientation of the scapula for a given orientation of the humerus over a wide range of humeral motion. Using this model system, the effects of humeral azimuth, elevation and rotation on the kinematics of the scapula have been investigated. Humeral elevation was seen to have the largest effect, causing the scapula to rotate laterally, retract and tip backwards. Humeral azimuth. has no noticeable effect on the lateral rotation of the scapula, although it causes the scapula to retract, and to tip backwards slightly. Rotation of the humerus has littre effect on the kinematics of the scapula. However, when approaching maximal internal rotation, the ligaments around the glenohumeral joint impose a kinematic constraint on the scapula, resulting in elevation of the scapula upon the thoracic cage.
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FERIZAJ, DRILON, und CARLOS GAITAN. „Performance measurement: Incorporating sustainability practices in a performance measurement structure : A qualitative case study of Atlas Copco“. Thesis, KTH, Industriell Management, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-191129.
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In order to fulfill stakeholder requirements whilst aspiring for long term competitiveness, industrial firms are aiming for increased incorporation of sustainability practices in their operations, set up by lean practices. At the same time, there is a potential inconsistency when working in accordance to lean practices whilst applying a sustainable approach, given e.g. the end-user focus of lean and post-consumption focus of sustainability (Machado et al., 2014). With performance measurement being the tool for evaluating the impact of sustainability practices, the purpose of this study is to increase the knowledge of performance measurement for incorporating sustainable practices in a lean production organization. With the intention of fulfilling the objective, the research is based on empirical evidence gained through a single case study of a leading product company in the industrial tools and equipment industry. The case study comprised multiple sources of data collection methods (e.g. interviews and observations), for identifying variables and conflicting interests among priorities, processes and people. It was found that the performance measurement structure does not support the incorporation of sustainable practices in operations in some of the dimensions studied due to i) misalignment between organizational placement of the measure and the power of the resources, ii) supplier feedback neglecting and iii) limited maturity level regarding the differences between sustainability and lean practices. The contribution to research and practitioners accentuates that while there are differences between lean and sustainability practices in some performance dimensions, some of the differences have limited impact on the performance measurement level, but more on a performance management level given their strategic prominence.I syfte att uppfylla intressenters krav och uppnå en långsiktig konkurrenskraft eftersträvarindustriföretag att inkorporera hållbarhetsprinciper i sin operativa verksamhet. Den operativa verksamheten präglas i sin tur präglas av lean metoder. Det finns dock en inkonsekvens när man arbetar både i enlighet lean metoder och hållbarhetsprinciper. Exempelvis fokuserar lean metoder på slutanvändaren medan hållbarhetsprinciper också beaktar vad som händer efter konsumtionen av en produkt (Machado et al., 2014). Med prestationsmätning (performance measurement) som ett verktyg för att utvärdera effekterna av hållbarhetsprinciper, syftar denna studie till att öka kunskapen om prestationsmätning för att stödja inkorporeringen av hållbarhetsprinciper i en produktionsorganisation som arbetar enligt lean metoder. För att uppnå syftet, baserades denna studie på empiriska bevis från en fallstudie på ett ledande produktbolag som tillverkar industriverktyg. Fallstudien omfattade olika datainsamlingsmetoder som t.ex. intervjuer och observationer, för att identifiera variabler och motstridiga intressen bland prioriteringar, processer och människor. Studien visade att resultatmätningsstrukturen (performance measurement structure) inte stödjer inkorporeringen av hållbarhetsprinciper i den operativa verksamheten i ett antal olika dimensioner på grund av i) förskjutning mellan placering av mätetal (performance measure) och resurskontroll,ii) försummad återkoppling från leverantör och iii) begränsad insikt att det råder skillnaderna mellan hållbarhetsprinciper och lean metoder. Bidraget till forskning och utövare understryker att även om det råder skillnader mellan lean metoder och hållbarhetsprinciper i vissa prestationsaspekter, har några av dessa skillnader en begränsad inverkan på prestationsmätningen. Desto större är deras inverkan på performance management nivå, givet den strategiska betydelsen av skillnaderna.
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Williams, Robin Lewis. „Electrical transport measurements in two-dimensional systems“. Thesis, Imperial College London, 1989. http://hdl.handle.net/10044/1/47711.
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Wu, Chin-Hsien 1967. „Laboratory measurements of three-dimensional breaking waves“. Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/80213.
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Majola, Khwezi. „Three-Dimensional Body Volume Measurement From Two-Dimensional Images: Towards A Smartphone Application“. Master's thesis, Faculty of Health Sciences, 2021. http://hdl.handle.net/11427/32797.
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Obesity poses a public health threat worldwide and is associated with a higher mortality, increased likelihood of diabetes, and an increased risk of cancer. When treating obesity, regular monitoring of metrics such as body mass index (BMI) and waist circumference has been found to result in improved health outcomes for patients. Three-dimensional (3D) scanners provide a useful tool to provide body measurements based on 3D images in obesity management. However, such scanners are often inaccessible due to cost. A smartphone image-based method able to produce 3D images may provide a more accessible measuring tool. As a step towards developing such a smartphone application, this project developed a method for 3D reconstruction of body images from two-dimensional (2D) images, using a full body 3D Gaussian process morphable model (GPMM). Separate GPMMs were trained to learn the shape of female and male human bodies. Gaussian process regression of the three-dimensional (3D) GPMM models onto two-dimensional (2D) images is performed. Corresponding landmarks on the 3D shapes and in the 2D images are employed in reconstruction. Measurements of body volume, waist circumference and height are then performed to extract information that is useful in obesity management. Different model configurations (shape model with arms; modified shape model with arms; shape model without arms; marginalised shape model without arms; shape model with different landmarks) were used to ascertain the most promising approach for the reconstruction. Each reconstructed body was tested for accuracy using the surface-tosurface distance per vertex, modified Hausdorff distance, and assessment of the measurements. Tests were performed using data from the same dataset used to build the model and generalised data from a different dataset. In all test cases, the best performing approach used shape models without arms when considering surface distances. However, the surface-to-surface distances errors were larger than those seen in literature. For body measurements, the best performing models varied with different models performing best for different measurements. For the measurements, the errors were larger than the allowable errors and larger than those found in literature. Landmark positions were evaluated separately and found to be imprecise. There are a few sources that contribute towards the reconstruction errors. Possible sources of error include an inability to interpret pose and landmark position errors. The major recommendations for future work are to use a model that incorporates both shape and pose and to use automatic landmarking methods. Regarding a pathway to a smartphone app, camera parameter information should be considered to improve processing of the images and smartphone orientation information should be considered to correct for distortions due to a tilted phone.
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Chapman, Erin L. „Periodic analysis of critical dimension measurements in the photolithography manufacturing process“. Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1999. http://www.collectionscanada.ca/obj/s4/f2/dsk1/tape8/PQDD_0023/MQ52290.pdf.
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Tucker, Thomas Marshall. „Three dimensional measurement data analysis in stereolithography rapid prototyping“. Thesis, Georgia Institute of Technology, 1997. http://hdl.handle.net/1853/17082.
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Claudet, Andre Aman. „Analysis of three dimensional measurement data and CAD models“. Diss., Georgia Institute of Technology, 2001. http://hdl.handle.net/1853/17530.
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Rubin, Richard K. „Three-dimensional measurement and visualisation of human lumbar kinematics“. Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1997. http://www.collectionscanada.ca/obj/s4/f2/dsk1/tape11/PQDD_0007/MQ44038.pdf.
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Su, Xiaogen. „Generation, measurement and reverse engineering of three-dimensional gears /“. The Ohio State University, 1999. http://rave.ohiolink.edu/etdc/view?acc_num=osu1488187763844984.
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Wang, Rong. „Volume measurement using multicolour three-dimensional particle tracking velocimetry“. Thesis, Heriot-Watt University, 2013. http://hdl.handle.net/10399/2721.
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The determination of flow velocity in complex flows is a fundamental task in fluid dynamics. PTV tracks the positions of small buoyant seeding particles through the image sequence to give the full-field velocity. 3D PTV requires the establishment of correspondences between particles from multiple images. As the seeding density increases, ambiguities in identifying the correspondences increase. Multicolour 3D PTV was investigated to reduce such ambiguities and then increase the spatial resolution. In this thesis, for the first time mathematical models and numerical simulations were used to quantify the improvement of multicolour PTV and validated by experiments. Conclusions were also drawn on the optimal seeding density. It was concluded that at a certain seeding density, the probability of success and the optimal seeding density increase obviously when multiple colours were introduced. For the spatial matching, it was found that by using 5-colour particles the optimal seeding density increased about 4 times, and at the optimal seeding density of 5-colour condition, the probability of success was 40 times greater. Similar improvement has been found in the temporal matching. Then, the measurement of a 3D dynamic flow was described, at a high seeding density when conventional PTV was not able to produce long trajectories.
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Buelow, Dwight Van. „Measurement of Forces and Moments in Three-Dimensional Archwires“. VCU Scholars Compass, 2003. http://scholarscompass.vcu.edu/etd/783.
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AbstractMEASUREMENT OF FORCES AND MOMENTS IN THREE-DIMENSIONAL ARCHWIRESBy Dwight V. Buelow, D.D.S.A thesis submitted in partial fulfillment of the requirements for the degree of Master of Science at Virginia Commonwealth University.Virginia Commonwealth University, 2003Major Director: Steven J. Lindauer, D.M.D., M.D.Sc.Chairman and Professor, Department of OrthodonticsOrthodontic tooth movement occurs in response to the application of controlled mechanical force systems. The purpose of this study was to improve understanding of those force systems by evaluating differences between the resultants of two-dimensional and three-dimensional orthodontic appliance activations. An in-vitro model was constructed and three force-moment gauges were used to measure the forces and moments produced. Comparisons were made between two-dimensional and three-dimensional v-bend activations. Measurements were made with both edgewise and ribbonwise wire orientations. Locations of v-bends resulting in zero moment at the incisor were found to be closer to the molar than the anticipated 1/3 of the distance from molar to incisor, for both two-dimensional and three-dimensional wires. For two-dimensional wires, this v-bend location was found to be approximately ¼, while for three-dimensional wires it was even closer to the molar. Ribbonwise wires, both two-dimensional and three-dimensional, produced forces and moments of greater magnitude than their edgewise counterparts. Further research is required to explain the differences between anticipated and actual results, and to develop more accurate means of modeling orthodontic force systems.
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Hsiao, Wei-Lin, und 蕭瑋霖. „Study on Product Dimension Measurement by Three Dimensional Measurement System“. Thesis, 2014. http://ndltd.ncl.edu.tw/handle/75158218354277240024.
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碩士國立高雄應用科技大學
機械與精密工程研究所
102
As technology and economic development, using car for transport goods and manned demand has gradually transformed into many functions. For the speed and driving performance of the vehicle handling, active and passive safety, etc, are good examples of higher requirements. Therefore, to improve the car engine materials and processing technology allows various components of minimum dimensional tolerances, improved accuracy, finer quality assembly, manufacturing and testing methods from traditional human processing, testing and gradually developed into an automated mode. In this study, Machine Vision technology is used to build a non-contact measurement system for engine cylinder head. First, build a sample component that has the same characteristics with cylinder head. Then, using double CMOS camera to capture the image plane of feature points, and generalized perspective projection method to measure feature points, the size of the sample cylinder head can be obtained. Then, 3D coordinate measurement system, ATOS optical scanning measurement system, and the inside diameter micrometer are used to verify the accuracy of its measurement data. By summarizing various experimental results of the engine cylinder head bore gage by using the proposed dual CMOS camera measurement system, the maximum error is 0.373mm and the minimum error is 0.053mm which are within the general amount of manufacturing tolerance (± 0.5mm) in engineering drawings.
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Shyu, Deh-Ming, und 徐得銘. „High Resolution Optical Metrology for Critical Dimension Measurement“. Thesis, 2007. http://ndltd.ncl.edu.tw/handle/33502758311896154885.
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博士國立交通大學
光電工程系所
95
Critical dimension (CD) is the smallest size which must be resolved in specific measurement. The CD becomes smaller and smaller due to developments of technology and innovations of products. In the fabrication of integrated circuit, reliable CD measurement is the key procedure to improve the yields. The CD measurements include line-width, overlay, thickness, material, and roughness, etc. In this thesis we focus on the high resolution optical metrology for CD measurement. For the measurement of line-width, we use the through-focus focus-metric method to measure the line-width. In this research, we combine the boundary element method and physical optical propagation to simulate the images of a finite grating. The images with different object distance are obtained when moving the finite grating along the optical axis. These images contain the information of the geometric structure of grating. By measuring and analyzing the finite grating, we can obtain the geometric structure of grating. The results show that the through-focus focus-metric method is sensitive for recognizing the line-width and nano-scale resolution could be achieved. For the overlay measurement, we proposed a new method, interfero- scatterometry, to measure the overlaid grating. By measuring the overlaid grating, the overlay between different layers in the integrated circuit can be obtained. First, we modify the rigorous coupled wave algorithm for our measurement system, and then design and fabricate an overlaid grating. After measuring and analyzing the grating by the interfero-scatterometer, we obtain the overlay between different layers.